CN115078433A - Low-temperature in-situ loading platform for scanning electron microscope - Google Patents
Low-temperature in-situ loading platform for scanning electron microscope Download PDFInfo
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- CN115078433A CN115078433A CN202210469191.0A CN202210469191A CN115078433A CN 115078433 A CN115078433 A CN 115078433A CN 202210469191 A CN202210469191 A CN 202210469191A CN 115078433 A CN115078433 A CN 115078433A
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N23/00—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
- G01N23/22—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material
- G01N23/225—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material using electron or ion
- G01N23/2251—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material using electron or ion using incident electron beams, e.g. scanning electron microscopy [SEM]
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N3/00—Investigating strength properties of solid materials by application of mechanical stress
- G01N3/02—Details
- G01N3/06—Special adaptations of indicating or recording means
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N3/00—Investigating strength properties of solid materials by application of mechanical stress
- G01N3/08—Investigating strength properties of solid materials by application of mechanical stress by applying steady tensile or compressive forces
- G01N3/18—Performing tests at high or low temperatures
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N3/00—Investigating strength properties of solid materials by application of mechanical stress
- G01N3/32—Investigating strength properties of solid materials by application of mechanical stress by applying repeated or pulsating forces
- G01N3/38—Investigating strength properties of solid materials by application of mechanical stress by applying repeated or pulsating forces generated by electromagnetic means
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- H—ELECTRICITY
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- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/20—Means for supporting or positioning the objects or the material; Means for adjusting diaphragms or lenses associated with the support
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/26—Electron or ion microscopes; Electron or ion diffraction tubes
- H01J37/28—Electron or ion microscopes; Electron or ion diffraction tubes with scanning beams
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N2203/00—Investigating strength properties of solid materials by application of mechanical stress
- G01N2203/0058—Kind of property studied
- G01N2203/0069—Fatigue, creep, strain-stress relations or elastic constants
- G01N2203/0073—Fatigue
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N2203/00—Investigating strength properties of solid materials by application of mechanical stress
- G01N2203/02—Details not specific for a particular testing method
- G01N2203/022—Environment of the test
- G01N2203/0222—Temperature
- G01N2203/0228—Low temperature; Cooling means
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N2203/00—Investigating strength properties of solid materials by application of mechanical stress
- G01N2203/02—Details not specific for a particular testing method
- G01N2203/022—Environment of the test
- G01N2203/0244—Tests performed "in situ" or after "in situ" use
- G01N2203/0246—Special simulation of "in situ" conditions, scale models or dummies
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
- H01J2237/20—Positioning, supporting, modifying or maintaining the physical state of objects being observed or treated
- H01J2237/2001—Maintaining constant desired temperature
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Abstract
The invention relates to a low-temperature in-situ loading platform for a scanning electron microscope, which comprises a base, wherein a low-temperature device and a load servo mechanism are arranged on the base, the low-temperature device and the load servo mechanism comprise a vacuum servo motor, a transmission mechanism, two lead screws arranged in parallel, a first beam and a second beam, the vacuum servo motor is connected with the transmission mechanism, one ends of the two lead screws are fixed on the base, the other ends of the two lead screws are connected with the transmission mechanism, each lead screw comprises a first section and a second section with opposite thread directions, the first beam is in threaded connection with the first sections of the two lead screws respectively, and the second beam is in threaded connection with the second sections of the two lead screws respectively; a first clamp and a second clamp are respectively arranged on the first cross beam and the second cross beam; the low-temperature device is positioned between the first cross beam and the second cross beam, and the first clamp and the second clamp are used for fixing two ends of a sample. The low-temperature in-situ loading platform for the scanning electron microscope integrates the load servo mechanism and the low-temperature device on the base, and is designed in a miniaturized manner, so that the low-temperature in-situ loading platform is conveniently integrated into the scanning electron microscope.
Description
Technical Field
The invention relates to the field of microscopic research of material performance, in particular to a low-temperature in-situ loading table (temperature range is 293K-4K) of a scanning electron microscope for microscopic imaging of a material.
Background
With the continuous progress of science and technology, the research on materials is from macro to micro, from off-line characterization to on-line characterization, and from conventional working conditions to severe working conditions. As a microscopic morphology observation means between a transmission electron microscope and an optical microscope, a Scanning Electron Microscope (SEM) is widely used in various fields of scientific research due to its characteristics of relatively simple sample preparation, large imaging depth of field, large visual field, good imaging stereoscopic effect, and the like.
In order to accurately research the change process, mechanism and influence on performance of the material under various load states, in combination with the 'in situ' technology of a scanning electron microscope, the technology has been developed greatly in recent years, and a plurality of micro multifunctional in situ test beds based on the scanning electron microscope are developed, so that the problem of in situ observation of the material under different load conditions in scientific research is effectively solved.
With the rapid development of science and technology towards nuclear energy, deep sea and deep space, the conventional experimental conditions are difficult to meet the requirements of performance evaluation of materials in severe environments, and some in-situ thermal coupling in-situ test benches are developed successively. However, due to the size limitation of the scanning electron microscope chamber and the high requirement of the vacuum degree, the development of the in-situ test bed with the environment is difficult. At present, only a product coupling a high-temperature environment and an in-situ test bed is usually used, related equipment is rare in the low-temperature environment due to the difficulty in obtaining and the interference on the observation of a scanning electron microscope, and the coupling product of a cryogenic environment and the in-situ mechanical test bed is blank. In addition, the existing in-situ loading table under the scanning electron microscope is limited by the problems of poor heat dissipation of the motor under vacuum and the like, and is mostly limited to developing simple tensile compression experiments, but for engineering structural materials, performance data under long-term fatigue load is very important, so that the realization of the in-situ fatigue experiment is a problem to be solved urgently.
Disclosure of Invention
The invention aims to provide a low-temperature in-situ loading platform for a scanning electron microscope, which is used for realizing a low-temperature environment in the scanning electron microscope and carrying out an in-situ loading test on a sample in the low-temperature environment.
The invention provides a low-temperature in-situ loading platform for a scanning electron microscope, which comprises:
the base is provided with a low-temperature device for placing a sample; and the combination of (a) and (b),
the load servo mechanism is arranged on the base and comprises a vacuum servo motor, a transmission mechanism, two lead screws arranged in parallel, and a first cross beam and a second cross beam which are perpendicular to the two lead screws, wherein the vacuum servo motor is connected with the transmission mechanism; a first clamp is arranged on the first cross beam, and a second clamp is arranged on the second cross beam;
the low-temperature device is located between the first cross beam and the second cross beam, and the first clamp and the second clamp are fixedly connected with two ends of the sample.
Furthermore, a load sensor and a limit sensor are arranged on the first cross beam, and the load sensor is connected with the first clamp through bolts.
Further, the second clamp is formed as a receiving groove on the second beam.
Furthermore, the first clamp and the second clamp are both provided with anti-skidding grooves.
Furthermore, the transmission mechanism comprises a multistage speed reducer and a plurality of gears, the multistage speed reducer is connected with an output shaft of the vacuum servo motor, the output shaft of the multistage speed reducer is connected with one gear, the gears are meshed with each other, and the two screw rods are respectively connected with two gears with the same rotation direction.
Furthermore, the transmission mechanism also comprises a box body arranged on the base, and the multistage speed reducer and the plurality of gears are positioned in the box body; and a displacement sensor is also arranged in the box body.
Furthermore, the low-temperature device comprises a low-temperature objective table and a plurality of heat pipes, wherein one ends of the heat pipes extend into the low-temperature objective table, and the other ends of the heat pipes extend to the lower part of the vacuum servo motor and are connected with the vacuum servo motor through heat conducting pastes.
Further, a temperature sensor is arranged on the low-temperature objective table.
Further, be provided with the keysets in the scanning electron microscope, be provided with entry, export, electronic signal vacuum adapter and ground connection on the keysets, the both ends of heat pipe respectively with entry and export intercommunication, load sensor, spacing sensor, displacement sensor, temperature sensor and vacuum servo motor all through electromagnetic shield signal line with electronic signal vacuum adapter connects.
Further, be provided with load control system and low temperature control system outside the scanning electron microscope, load control system with low temperature control system all with electronic signal vacuum adapter electricity is connected, low temperature control system still with a liquid tank intercommunication to through the low temperature hose with the entry intercommunication.
According to the low-temperature in-situ loading platform for the scanning electron microscope, the load servo mechanism and the low-temperature device are integrated on the base, and the miniaturization design is carried out, so that the low-temperature in-situ loading platform is conveniently integrated into an electron microscope cavity of the scanning electron microscope; through the low temperature device, can make the sample cool to required test temperature to accomplish axial single loading and cyclic loading test under the low temperature severe environment, and especially do the consideration for low temperature fatigue loading, provide extra cooling device for servo motor in order to ensure its long-term operation under the vacuum. The surface microscopic change of the sample in a loading state is monitored in real time through a scanning electron microscope, so that the development and research work of advanced materials under a deep cooling working condition can be greatly assisted; the sealing connection of the inner part and the outer part of the endoscope cavity is realized through the adapter plate, so that the vacuum sealing environment in the endoscope cavity is ensured.
Drawings
FIG. 1 is a schematic structural diagram of a low-temperature in-situ loading table for a scanning electron microscope according to an embodiment of the invention;
FIG. 2 is a schematic structural diagram of a load servo according to an embodiment of the present invention;
FIG. 3 is a schematic structural diagram of an additional cooling device according to an embodiment of the present invention;
FIG. 4 is a schematic structural diagram of an interposer according to an embodiment of the present invention;
FIG. 5 is a system block diagram of a cryogenic in-situ load station according to an embodiment of the present invention.
Detailed Description
The preferred embodiments of the present invention will be described in detail below with reference to the accompanying drawings.
As shown in fig. 1, an embodiment of the present invention provides a low-temperature in-situ loading platform for a scanning electron microscope, which is installed in an electron microscope chamber of the scanning electron microscope, and includes a base 1 and a load servo mechanism 2 disposed on the base 1, where the load servo mechanism 2 includes a vacuum servo motor 21, a transmission mechanism 22, two screw rods 23 arranged in parallel, a first cross beam 24 and a second cross beam 25, the vacuum servo motor 21 is connected with the transmission mechanism 22, one ends of the two screw rods 23 are fixed on the base 1 through a bearing seat 26, and the other ends are respectively connected with the transmission mechanism 22; the screw rods 23 comprise first sections 231 and second sections 232, the thread directions of the first sections and the second sections 232 are opposite, two ends of the first beam 24 are respectively in threaded connection with the first sections 231 of the two screw rods 23, and two ends of the second beam 25 are respectively in threaded connection with the second sections 232 of the two screw rods 23; the first clamp 31 is arranged on the first cross beam 24, the second clamp 32 is arranged on the second cross beam 25, the low-temperature device 4 is arranged on the base 1 and located between the first cross beam 24 and the second cross beam 25, the sample 5 is placed on the low-temperature device 4, two ends of the sample 5 are fixedly connected with the first clamp 31 and the second clamp 32 respectively, and the low-temperature device 4 can cool the sample 5 on the low-temperature device to reduce the temperature of the sample 5 to a required test target value. In the in-situ test, the vacuum servo motor 21 drives the two screw rods 23 to rotate through the transmission mechanism 22, the two screw rods 23 drive the first beam 24 and the second beam 25 to move axially, the movement directions of the first beam 24 and the second beam 25 are opposite because the thread directions of the first section 231 and the second section 232 of the screw rods 23 are opposite, the first beam 24 and the second beam 25 can be close to or away from each other by adjusting the rotation direction of the vacuum servo motor 21, when the first beam 24 and the second beam 25 are close to each other, a compression load is applied to the sample 5, when the first beam 24 and the second beam 25 are away from each other, a tensile load is applied to the sample 5, that is, by adjusting the rotation direction of the vacuum servo motor 21, the loading of the sample 5 can be realized. Because the low-temperature in-situ loading platform is arranged in the electric microscope chamber, the surface microscopic change of the sample 5 in the loading process can be monitored in real time through a scanning electron microscope.
The first beam 24 is provided with a load sensor 6 which is bolted to the first clamp 31 and is used for monitoring the magnitude of the load applied to the test sample 5 in real time. The first and second clamps 31 and 32 are each provided with an anti-slip groove, and both ends of the sample 5 are placed on the anti-slip grooves, respectively, and then an upper cover plate (not shown) is covered, and the upper cover plate is fastened to the first and second clamps 31 and 32 by screws, thereby clamping the sample 5.
In this embodiment, the first clamp 31 is bolted to the first beam 24, and the second clamp 32 is formed as a receiving slot on the second beam 25.
The first beam 24 is further provided with a limit sensor 7 for detecting the distance between the first beam 24 and the surface of the base 1, and when the value exceeds a preset range, a limit switch is triggered to limit the movement of the first beam 24, so that the equipment is prevented from being damaged.
As shown in fig. 2, the transmission mechanism 22 includes a multi-stage reducer 221 and a plurality of gears 222, the multi-stage reducer 221 is connected to the output shaft 211 of the vacuum servo motor 21, the output shaft of the multi-stage reducer 221 is connected to one gear 222, the plurality of gears 222 are engaged with each other, two lead screws 23 are respectively connected to two of the gears 222, and the rotation directions of the two lead screws 23 are kept the same. Thus, when the vacuum servo motor 21 rotates, the gear 222 is driven to rotate after being decelerated by the multi-stage decelerator 221, and then the two lead screws 23 are driven to rotate by the gear 222.
Preferably, the transmission mechanism 22 further includes a case 223 disposed on the base 1, and the multi-stage reducer 221 and the plurality of gears 222 are disposed inside the case 223 for protecting the multi-stage reducer 221 and the gears 222.
A displacement sensor 224 is further disposed in the box 223 for measuring the rotation angle of the gear 222, so as to calculate the displacement values of the first beam 24 and the second beam 25 according to the rotation angle.
As shown in fig. 3, the low temperature device 4 includes a low temperature stage 41 and a plurality of heat pipes 42, one end of each heat pipe 42 extends into the low temperature stage 41, the other end extends to the lower part of the vacuum servo motor 21 and is connected with the vacuum servo motor 21 through a heat conducting paste (not shown in the figure), a low temperature liquid can be introduced into each heat pipe 42 for cooling the low temperature stage 41 and the vacuum servo motor 21, and taking away heat generated during the operation of the vacuum servo motor 21, so as to avoid the overheating damage of the vacuum servo motor 21 during long-time operation under high vacuum degree, and realize long-time heavy load operation under vacuum, thereby enabling the equipment to have the capability of developing low temperature in-situ fatigue tests; since the low temperature stage 41 is made of metal, for example, silver, which has good thermal conductivity, and the sample 5 is placed on the low temperature stage 41, the low temperature stage 41 can exchange heat with the sample 5 to cool the sample 5. The low temperature stage 41 is provided with a temperature sensor (not shown in the figure) for monitoring the temperature of the sample 5 in real time and feeding back the signal to the low temperature control system 9. Therefore, the surface of the sample can be observed at low temperature in a contact heat transfer mode, and the problem that imaging is influenced by the fact that the sample is immersed in low-temperature liquid in the prior art is solved.
As shown in fig. 4, an adapter plate 100 is arranged in an electron microscope chamber of a scanning electron microscope, and is provided with an inlet 101 and an outlet 102 for providing a low-temperature liquid, an electronic signal vacuum adapter 103 and a ground adapter 104, two ends of a heat pipe 42 are respectively communicated with the inlet 101 and the outlet 102, the low-temperature liquid is provided into the two heat pipes 42 through the inlet 101, so that cooling is achieved, and the low-temperature liquid is recovered through the outlet 102 to form a loop; the electronic signal vacuum adapter 103 is used for realizing signal transmission of the inside and outside parts of the cavity of the scanning electron microscope, and the grounding connector 104 is used for shielding the electronic interference of the whole set of equipment to the scanning electron microscope, so that the interference of weak electronic signals to the electron beam imaging of the scanning electron microscope is avoided. The adapter plate 100 can realize the sealing connection of the inner part and the outer part of the endoscope cavity, and simultaneously ensure the vacuum sealing environment in the endoscope cavity.
As shown in fig. 5, a load control system 8 and a low temperature control system 9 are further arranged outside the endoscope chamber, the load control system 8 is electrically connected with the electronic signal vacuum adapter 103, so as to perform signal transmission with the vacuum servo motor 21, the load sensor 6, the limit sensor 7 and the displacement sensor 224, and control the type and magnitude of the load applied on the sample 5. The low temperature control system 9 controls the opening and closing of the electromagnetic valve in real time according to the signal of the temperature sensor arranged on the low temperature objective table 41, so that any specific temperature in the 293K-4K temperature range can be controlled within an error range.
The low-temperature control system 9 is communicated with the liquid tank 91 and is communicated with the inlet 101 through a low-temperature hose, so that low-temperature liquid in the liquid tank 91 flows into the low-temperature device 4, gas and redundant liquid in the low-temperature device 4 are discharged from an outlet, the excessive pressure in the low-temperature device 4 is avoided, and meanwhile, gas molecules are prevented from escaping into an electron microscope cavity of a scanning electron microscope to damage a related ion pump. The low temperature control system 9 and the temperature sensor are both electrically connected with the electronic signal vacuum adapter 103 to realize signal transmission, and the low temperature control system 9 controls the temperature of the sample 5 by controlling the flow of the low temperature liquid flowing into the low temperature device 4, wherein the temperature can reach 4K.
The cryogenic liquid may be liquid nitrogen or liquid helium or other non-toxic and non-explosive liquids.
According to the low-temperature in-situ loading platform for the scanning electron microscope, the load servo mechanism 2 and the low-temperature device 4 are integrated on the base 1, and the miniaturization design is carried out, so that the low-temperature in-situ loading platform is conveniently integrated into an electron microscope cavity of the scanning electron microscope; the low-temperature device 4 can cool the sample 5 to the required test temperature, so that the axial single loading and cyclic loading tests in a low-temperature severe environment are completed, the low-temperature fatigue loading is particularly considered, and an additional cooling device is provided for the servo motor to ensure long-time operation under vacuum; and the surface microscopic change of the sample 5 in a loading state is monitored in real time through a scanning electron microscope, so that the development and research work of advanced materials under the deep cooling working condition can be greatly assisted.
The above embodiments are merely preferred embodiments of the present invention, which are not intended to limit the scope of the present invention, and various changes may be made in the above embodiments of the present invention. All simple and equivalent changes and modifications made according to the claims and the content of the specification of the present invention are within the scope of the claims of the present invention. The invention has not been described in detail in order to avoid obscuring the invention.
Claims (10)
1. A low-temperature in-situ loading table for a scanning electron microscope is characterized by comprising, mounted in the scanning electron microscope:
the base is provided with a low-temperature device for placing a sample; and the combination of (a) and (b),
the load servo mechanism is arranged on the base and comprises a vacuum servo motor, a transmission mechanism, two lead screws arranged in parallel, and a first cross beam and a second cross beam which are perpendicular to the two lead screws, wherein the vacuum servo motor is connected with the transmission mechanism; a first clamp is arranged on the first cross beam, and a second clamp is arranged on the second cross beam;
the low-temperature device is located between the first cross beam and the second cross beam, and the first clamp and the second clamp are fixedly connected with two ends of the sample.
2. The low-temperature in-situ loading table for a scanning electron microscope according to claim 1, wherein a load sensor and a limit sensor are arranged on the first beam, and the load sensor is connected with the first clamp through a bolt.
3. The low-temperature in-situ loading table for scanning electron microscopes according to claim 1, wherein the second clamp is formed as a receiving groove on the second beam.
4. The low-temperature in-situ loading table for scanning electron microscopes according to claim 3, wherein the first clamp and the second clamp are both provided with anti-slip grooves.
5. The low-temperature in-situ loading platform for a scanning electron microscope according to claim 2, wherein the transmission mechanism comprises a multistage speed reducer and a plurality of gears, the multistage speed reducer is connected with an output shaft of the vacuum servo motor, the output shaft of the multistage speed reducer is connected with one gear, the gears are meshed with each other, and the two lead screws are respectively connected with two gears with the same rotation direction.
6. The low-temperature in-situ loading table for scanning electron microscopes according to claim 5, wherein the transmission mechanism further comprises a box body arranged on the base, and the multistage speed reducer and the plurality of gears are both located inside the box body; and a displacement sensor is also arranged in the box body.
7. The low-temperature in-situ loading platform for a scanning electron microscope according to claim 6, wherein the low-temperature device comprises a low-temperature stage and a plurality of heat pipes, one end of each heat pipe extends into the low-temperature stage, and the other end of each heat pipe extends to the position below the vacuum servo motor and is connected with the vacuum servo motor through a heat conduction paste.
8. The low-temperature in-situ loading platform for scanning electron microscopes according to claim 7, wherein a temperature sensor is arranged on the low-temperature loading platform.
9. The low-temperature in-situ loading table for a scanning electron microscope according to claim 8, wherein an adapter plate is arranged in the scanning electron microscope, an inlet, an outlet, an electronic signal vacuum adapter and a grounding connector are arranged on the adapter plate, two ends of the heat pipe are respectively communicated with the inlet and the outlet, and the load sensor, the limit sensor, the displacement sensor, the temperature sensor and the vacuum servo motor are all connected with the electronic signal vacuum adapter through electromagnetic shielding signal lines.
10. The cryogenic in-situ loading table for scanning electron microscopes according to claim 9, wherein a load control system and a cryogenic control system are arranged outside the scanning electron microscope, the load control system and the cryogenic control system are both electrically connected to the electronic signal vacuum adapter, and the cryogenic control system is further communicated with a liquid tank and the inlet through a cryogenic hose.
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| CN202210469191.0A CN115078433A (en) | 2022-04-30 | 2022-04-30 | Low-temperature in-situ loading platform for scanning electron microscope |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN115468863A (en) * | 2022-11-14 | 2022-12-13 | 东北大学 | Ultra-low temperature environment sheet sample quasi-in-situ tensile testing device and testing method |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN115468863A (en) * | 2022-11-14 | 2022-12-13 | 东北大学 | Ultra-low temperature environment sheet sample quasi-in-situ tensile testing device and testing method |
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