CN111308541B - Faraday cylinder device for measuring ion beam current - Google Patents
Faraday cylinder device for measuring ion beam current Download PDFInfo
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- CN111308541B CN111308541B CN201910980969.2A CN201910980969A CN111308541B CN 111308541 B CN111308541 B CN 111308541B CN 201910980969 A CN201910980969 A CN 201910980969A CN 111308541 B CN111308541 B CN 111308541B
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01T—MEASUREMENT OF NUCLEAR OR X-RADIATION
- G01T1/00—Measuring X-radiation, gamma radiation, corpuscular radiation, or cosmic radiation
- G01T1/29—Measurement performed on radiation beams, e.g. position or section of the beam; Measurement of spatial distribution of radiation
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Abstract
The invention discloses a Faraday cylinder device for measuring the size of an ion beam current, which comprises a storage cavity, a beam current cavity, a Faraday cylinder and a motor, wherein the storage cavity and the beam current cavity are in vacuum environment and are communicated. The motor is positioned outside the storage cavity and the beam current cavity, the rotation of the Faraday cylinder in a vacuum environment is realized by means of the connection of the motor and the Faraday cylinder, and the switching between a Faraday cylinder measuring mode and an exit mode is realized by means of the rotation of the Faraday cylinder. The Faraday cage can measure the ion beam current in the beam current cavity in the measuring mode, and the Faraday cage is completely positioned in the storage cavity and does not intervene in the ion beam current in the exit mode. The beam size distribution measuring device has the advantages of small volume, simplicity in assembly, convenience in maintenance, rapider acquisition in an ideal vacuum environment and capability of flexibly measuring the beam size distribution of ion beams with different incident angles.
Description
Technical Field
The invention relates to a Faraday cylinder device for measuring the size of an ion beam, in particular to a measuring device for measuring the size of the ion beam by rotating a Faraday cylinder, belonging to measuring devices of ion implanters in semiconductor equipment.
Background
With the beginning of the first diode of the united states invention in the middle of the 20 th century, transistors are gradually replacing the tubes in the microelectronics field. Semiconductor devices represented by transistors are enriching life and scientific research of people, and semiconductor equipment is also perfected and improved; ion implanters have been developed as an important doping tool for intrinsic semiconductors.
Before the ion implanter injects accelerated ions into a silicon wafer, parameters such as the size, uniformity and the like of the ion beam current need to be measured, wherein the measurement of the size of the ion beam current is completed by a Faraday cylinder. After the measurement is finished, the Faraday cylinder needs to be far away from the ion beam current so as to inject the beam current into the silicon wafer. In order to change the position state of the faraday cage, a linear motor is usually used to drive the faraday cage to make a one-dimensional linear motion. The method has the problems of higher cost, large volume of the whole measuring system, easy vacuum sealing error in assembly, lower vacuum acquisition speed and the like. The ion implanter is a set of medium-sized equipment with compact space, and the maintenance difficulty of the measurement system is larger due to the pushing mode of the linear motor. Therefore, it is desirable to design a faraday cup device that has a simple and compact structure, is convenient to assemble and maintain, has a small volume, and can rapidly acquire an ideal vacuum environment.
Disclosure of Invention
The technical problem to be solved by the invention is as follows: in order to overcome the defects in the prior art, the invention provides a Faraday cylinder device for measuring the size of an ion beam current.
The technical scheme adopted by the invention is as follows:
a Faraday cylinder device for measuring the size of an ion beam current comprises a storage cavity, a beam current cavity, a Faraday cylinder and a motor, wherein the storage cavity and the beam current cavity are in vacuum environment and are communicated;
the side surface of the storage cavity is provided with a first circulating cooling hole and a first multi-pin connector, a Faraday cylinder in the storage cavity is connected with a motor outside the storage cavity, and an upper cover plate of the storage cavity is detachable;
a second circulating cooling hole and a second multi-pin connector are arranged on the side surface of the Faraday cylinder;
the first circulating cooling hole and the second circulating cooling hole are used for circulating cooling media to radiate heat of the Faraday cylinder;
the side surface of the beam cavity is provided with a beam inlet, and the beam can only enter the beam cavity from the beam inlet after being constrained.
The Faraday cylinder is connected with the motor through a Faraday cylinder rotating interface, and the Faraday cylinder rotating interface is connected with the storage cavity in a vacuum sealing manner;
the motor rotates to drive the Faraday cage to rotate clockwise and anticlockwise, and the Faraday cage does not contact the inner walls of the storage cavity and the beam current cavity in the rotation process;
After the Faraday cylinder rotates, a beam current collecting area on the side surface of the Faraday cylinder is vertical to the incident direction of the ion beam current, and the size of the ion beam current is measured by the Faraday cylinder;
after the Faraday cylinder rotates, a beam current collecting area on the side surface of the Faraday cylinder is parallel to the incident direction of the ion beam current, and the size of the ion beam current is not measured by the Faraday cylinder.
The Faraday cylinder rotary interface and the Faraday cylinder form an L-shaped structure;
the Faraday cylinder rotates around the Faraday cylinder rotating interface to realize the switching of two modes of contact between the beam current collecting area and the ion beam and non-contact between the beam current collecting area and the ion beam.
The first circulating cooling hole in the side face of the storage cavity is correspondingly connected with the second circulating cooling hole in the side face of the Faraday cage through a cooling pipeline, and the first multi-pin connector in the side face of the storage cavity is correspondingly connected with the second multi-pin connector in the side face of the Faraday cage through a cable.
The motor has the function of rotating along the clockwise direction and the anticlockwise direction, and is placed outside the storage cavity and the beam cavity.
The first circulating cooling hole, the first multi-pin connector, the Faraday cylinder rotating interface and the storage cavity are in vacuum sealing connection.
The invention has the advantages that:
(1) The invention has compact structure and convenient assembly and maintenance.
(2) The motor of the present invention resides outside the vacuum chamber so that the entire motor system does not interfere with the rapid acquisition of vacuum.
(4) The invention adopts the mode of measuring the ion beam size by the rotating Faraday cylinder to replace the traditional mode of collecting the beam size by the telescopic Faraday cylinder, and can greatly reduce the volume of the measuring device.
(5) According to the invention, the cooling pipeline connected between the second circulating cooling hole on the side surface of the Faraday cylinder and the first circulating cooling hole on the side surface of the storage cavity is shorter, and the cable connected between the second multi-pin connector on the side surface of the Faraday cylinder and the first multi-pin connector on the side surface of the storage cavity is shorter.
(6) The rotation angle of the Faraday cup is adjustable, so that the beam size distribution of ion beams with different incidence angles can be measured, normalized contrast analysis is carried out, and the adjustment of the beam injection direction is facilitated.
Drawings
FIG. 1 is a schematic side view of the present invention;
FIG. 2 is a schematic cross-sectional view of a Faraday cup measuring ion beam current in accordance with the present invention;
FIG. 3 is a schematic cross-sectional view of a Faraday cup of the present invention without measuring ion beam current;
FIG. 4 is a schematic cross-sectional view of the present invention with the storage chamber cover removed;
Fig. 5 is a schematic view of a faraday cage according to the present invention:
in the figure: 1. a storage chamber; 2. a motor; 3a. a first multi-pin connector; a second multi-pin connector; 4a. a first recirculating cooling hole; 4b. a second recirculating cooling hole; 5. a beam inlet; 6. a beam flow chamber; 7. a Faraday cylinder; 8. a beam current collecting region; 9. a faraday cage rotation interface.
Detailed Description
The following description of embodiments of the invention refers to the accompanying drawings and specific examples:
as shown in fig. 1 and 4, the invention provides a faraday cage device for measuring the size of ion beam current, wherein a storage cavity 1 is communicated with a vacuum cavity of a beam current cavity 6, and the side surface of the beam current cavity 6 of the storage cavity 1 is convex; the side surface of the storage cavity 1 is provided with a first circulating cooling hole 4a and a first multi-pin connector 3a, and the upper cover plate of the storage cavity 1 is detachable; the Faraday cage 7 in the storage cavity 1 is connected with the motor 2 outside the storage cavity 1, and the motor 2 can drive the Faraday cage 7 to rotate in the storage cavity 1; a Faraday cylinder rotating interface 9 of the Faraday cylinder 7 is hermetically connected with the side surface of the storage cavity 1; the second circulating cooling hole 4b on the side of the faraday cage 7 is connected to the first circulating cooling hole 4a on the side of the storage cavity 1 through a cooling pipeline, and the second multi-pin connector 3b on the side of the faraday cage 7 is connected to the first multi-pin connector 3a on the side of the storage cavity 1 through a cable; a beam entrance 5 of a beam chamber 6 is provided for the passage of an accelerated ion beam, the ion beam having an incident direction perpendicular to the axis of rotation of the faraday cup 7.
As shown in fig. 2 and 5, the present invention provides a faraday cup device for measuring the size of an ion beam current, wherein the shape of the faraday cup 7 is L-shaped, a second circulating cooling hole 4b on the side surface of the faraday cup 7 is used for circulating a cooling medium to dissipate heat thereof, and a second multi-pin connector 3b on the side surface of the faraday cup 7 corresponds to a beam current collecting region 8.
As shown in fig. 2 and 3, the present invention provides a faraday cup apparatus for measuring the size of an ion beam, wherein the faraday cup 7 does not contact with the storage cavity 1 and the beam cavity 6 during the rotation process; the motor 2 rotates to drive the Faraday cylinder 7 to rotate, and the Faraday cylinder 7 can realize the switching between a measurement mode and an exit mode; when the Faraday cylinder 7 is in a measurement mode, the collecting surface of the Faraday cylinder 7 is vertical to the flight direction of ions, and ions flowing in from the beam inlet 5 can be directly collected by a beam collecting area 8 of the Faraday cylinder 7; when the Faraday cage 7 is in the exit mode, the Faraday cage 7 is only positioned in the storage cavity 1, and the beam collection area 8 of the Faraday cage 7 is not contacted with the ion beam.
The specific implementation steps are as follows:
referring to fig. 1 to 5, the present invention provides a faraday cage apparatus for measuring the size of an ion beam, wherein a storage chamber 1 and a beam chamber 6 are connected, and a first circulating cooling hole 4a and a first multi-pin connector 3a are already installed on the side surfaces of the storage chamber 1 and a faraday cage 7; faraday cup rotational interface 9 of faraday cup 7 has been mounted to the side of storage chamber 1; only the first circulating cooling hole 4a on the side surface of the storage cavity 1 and the second circulating cooling hole 4b on the side surface of the faraday cage 7 need to be correspondingly connected through cooling pipelines, and the first multi-pin connector 3a on the side surface of the storage cavity 1 and the second multi-pin connector 3b on the side surface of the faraday cage 7 need to be correspondingly connected through cables.
Further, motor 2 is connected to faraday cup rotational interface 9 of faraday cup 7.
Further, fixing the motor 2 to the side of the storage chamber 1 prevents shaking.
Further, an upper cover plate of the storage chamber 1 is fixed to the storage chamber 1 to be vacuum-sealed.
And finally, the assembled Faraday cylinder device for measuring the size of the ion beam current is used as a part of an ion implanter, the working mode of the Faraday cylinder 7 is rotationally adjusted by the motor 2 during use, the number of rotating turns of the motor 2 and the rotating position of the Faraday cylinder 7 are obtained by experimental calibration, the motor 2 is controlled by upper computer software, the number of the rotating turns and the corresponding direction in an upper computer software interface are input limited, and input exceeding a limited range can pop up an input invalid prompt window, so that the Faraday cylinder 7 can be ensured to rotate without contacting the inner walls of the storage cavity 1 and the beam current cavity 6 by the upper computer software.
Any modification, equivalent replacement, or improvement made within the spirit and principle of the present invention shall fall within the protection scope of the present invention.
Claims (4)
1. A Faraday cage device for measuring the size of ion beam current is characterized in that:
the Faraday device comprises a storage cavity, a beam current cavity, a Faraday cylinder and a motor, wherein the storage cavity and the beam current cavity are in vacuum environment and are communicated;
The side surface of the storage cavity is provided with a first circulating cooling hole and a first multi-pin connector, a Faraday cylinder in the storage cavity is connected with a motor outside the storage cavity, and an upper cover plate of the storage cavity is detachable;
a second circulating cooling hole and a second multi-pin connector are arranged on the side surface of the Faraday cylinder;
the first circulating cooling hole and the second circulating cooling hole are used for circulating cooling media to radiate heat of a Faraday cylinder;
the side surface of the beam cavity is provided with a beam inlet, and the beam can only enter the beam cavity from the beam inlet after being constrained;
the Faraday cylinder is connected with the motor through a Faraday cylinder rotating interface, and the Faraday cylinder rotating interface is connected with the storage cavity in a vacuum sealing manner;
the motor rotates to drive the Faraday cage to rotate clockwise and anticlockwise, and the Faraday cage does not contact the inner walls of the storage cavity and the beam current cavity in the rotation process;
the Faraday cylinder rotating interface and the Faraday cylinder form an L-shaped structure; the Faraday cylinder rotates around the Faraday cylinder rotating interface to realize the switching between two modes of contact between the beam current collecting area and the ion beam and non-contact between the beam current collecting area and the ion beam; when the beam current collecting region is contacted with the ion beam, the beam current collecting region on the side surface of the Faraday cylinder is vertical to the incident direction of the ion beam current, and the size of the ion beam current is measured by the Faraday cylinder; when the beam current collecting area is not contacted with the ion beam, the beam current collecting area on the side surface of the Faraday cylinder is parallel to the incident direction of the ion beam current, and the size of the ion beam current is not measured by the Faraday cylinder.
2. The faraday cup apparatus of claim 1, wherein:
the first circulating cooling hole in the side face of the storage cavity is correspondingly connected with the second circulating cooling hole in the side face of the Faraday cage through a cooling pipeline, and the first multi-pin connector in the side face of the storage cavity is correspondingly connected with the second multi-pin connector in the side face of the Faraday cage through a cable.
3. The faraday cup apparatus of claim 1, wherein:
the motor has the function of rotating along the clockwise direction and the anticlockwise direction, and is placed outside the storage cavity and the beam cavity.
4. The faraday cup apparatus for measuring an amount of ion beam current as recited in claim 1, wherein:
the first circulating cooling hole, the first multi-pin connector, the Faraday cylinder rotating interface and the storage cavity are in vacuum sealing connection.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910980969.2A CN111308541B (en) | 2019-10-15 | 2019-10-15 | Faraday cylinder device for measuring ion beam current |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910980969.2A CN111308541B (en) | 2019-10-15 | 2019-10-15 | Faraday cylinder device for measuring ion beam current |
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| Publication Number | Publication Date |
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| CN111308541A CN111308541A (en) | 2020-06-19 |
| CN111308541B true CN111308541B (en) | 2022-06-28 |
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| CN110618444A (en) * | 2019-09-24 | 2019-12-27 | 北京航空航天大学 | Beam current measuring system and main system of electric thruster |
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| CN105068110B (en) * | 2015-08-27 | 2018-04-13 | 广东恒聚医疗科技有限公司 | A kind of new beam detector |
| CN105470085B (en) * | 2015-12-04 | 2017-08-04 | 中国电子科技集团公司第四十八研究所 | It is mobile in a kind of high vacuum to survey beam faraday's drive device |
| JP2017199554A (en) * | 2016-04-27 | 2017-11-02 | 日新電機株式会社 | Ion beam irradiation device and ion beam irradiation method |
| CN108735563B (en) * | 2017-04-25 | 2020-12-04 | 北京中科信电子装备有限公司 | Ion implantation terminal device |
| JP2019121465A (en) * | 2017-12-28 | 2019-07-22 | 株式会社アルバック | Ion implanting device and faraday cup gathering device |
| CN109157760B (en) * | 2018-08-07 | 2019-12-24 | 中国原子能科学研究院 | Rotary beam arresting device for medical device |
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