CN115077417A - Integrated interference measuring head and interference measuring system - Google Patents
Integrated interference measuring head and interference measuring system Download PDFInfo
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- CN115077417A CN115077417A CN202210682665.XA CN202210682665A CN115077417A CN 115077417 A CN115077417 A CN 115077417A CN 202210682665 A CN202210682665 A CN 202210682665A CN 115077417 A CN115077417 A CN 115077417A
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
- G01B11/2441—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures using interferometry
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Abstract
The invention belongs to the technical field of precision measurement, and particularly relates to an integrated interference measuring head and an interference measuring system, wherein the integrated interference measuring head comprises two groups of interference measuring components which are integrated together, one group is used for measuring the appearance of a measured object, and the other group is used for realizing the position feedback of the first group, so that the mechanical movement error can be compensated better; meanwhile, the invention adopts one group of PZT modules to simultaneously realize the interference phase adjustment of two groups of measuring components, thereby reducing the number of PZT modules. The invention integrally reduces the volume of an interference measurement system, reduces the compensation difficulty of mechanical errors and phase errors and improves the measurement precision of the three-dimensional shape.
Description
Technical Field
The invention belongs to the technical field of precision measurement, and particularly relates to an integrated interference measuring head and an interference measuring system.
Background
In order to complete the measurement of the three-dimensional shape of the measured object, the integrated interference measuring head needs to perform movements with multiple degrees of freedom, such as horizontal, vertical and rotational movements, and these movements need to be matched with a precise displacement table, because there are mechanical errors (usually, the errors are in the micron order, or even larger, and for a nanometer precision measuring instrument, the errors are too large) in the mechanical axis movement, so error compensation needs to be performed by an optical measuring means. Errors due to multiple degrees of freedom need to be compensated for, which results in the need for multiple heads, including both the topographical head and the reference head, in a single measurement system. In order to perform high-precision morphology measurement, phase modulation (i.e. phase-shifting interferometry) needs to be performed, and due to the need of phase modulation, a single PZT (piezoelectric ceramic, which is a mainstream phase modulation module in the current market in the field of interferometry) module needs to be adopted by a single measuring head, and a plurality of PZT modules need to be adopted by a plurality of measuring heads.
Disclosure of Invention
In view of this, the present invention provides an integrated interference measurement head, in which two sets of interference measurement components are integrated together, one set performs a shape measurement on a measured object, and the other set performs a position feedback of the first set, so as to better compensate a mechanical movement error; meanwhile, the invention adopts one group of PZT modules to simultaneously realize the interference phase adjustment of two groups of measuring components, thereby reducing the number of PZT modules. The invention integrally reduces the volume of an interference measurement system, reduces the compensation difficulty of mechanical errors and phase errors and improves the measurement precision of the three-dimensional shape.
In order to achieve the technical purpose, the invention adopts the following specific technical scheme:
an integrated interference measurement head comprising:
the first light ray inlet is used for point outgoing and point receiving light rays;
a second light inlet for point outgoing and point receiving light;
a first collimating lens having a focus disposed at the first light entrance;
a second collimating lens, the focus of which is arranged at the second light inlet;
the first spectroscope reflects part of the emergent light path of the first collimating lens in a transmission way, at least one part of the reflected light returns to the first collimating lens in the original way, and the transmitted light is transmitted to a first measured object;
the second spectroscope reflects part of the emergent light path of the second collimating lens in a transmission way, at least one part of the reflected light returns to the optical axis of the second collimating lens in the original way, and the transmitted light is transmitted to a second measured object;
wherein: the integrated interference measurement head further comprises a PZT module; the PZT module drives the first beam splitter and the second beam splitter to do linear motion with the same moving mode, and the optical path between the first beam splitter and the first collimating lens and the optical path between the second beam splitter and the second collimating lens are adjusted.
Further, the integrated interference measuring head further comprises a first focusing lens, and the first focusing lens is arranged on the transmission emergent light path of the first spectroscope.
Further, the integrated interference measuring head further comprises a second focusing lens, and the first focusing lens is arranged on the transmission emergent light path of the second beam splitter.
Further, the optical axes of the first focusing lens and the second focusing lens coincide.
Further, the integrated interference measurement head further comprises a first mirror; the optical axis of the first collimating lens is vertical to the reflecting surface of the first beam splitter; the first reflector realizes the mutual transmission of the light rays between the spectroscope and the first collimating lens.
Further, the integrated interference measurement head further comprises a second mirror; the optical axis of the second collimating lens is vertical to the reflecting surface of the second beam splitter; the second reflecting mirror realizes the mutual transmission of the light rays between the beam splitter and the second collimating lens.
Further, the first measured object is a position reference surface; the position reference surface forms a coordinate reference of the integrated interference measurement head; the integrated interference measuring head measures the appearance of the second measured object.
Furthermore, the integrated interference measuring head is arranged on a rotating shaft; the position reference surface is a circular arc surface.
Further, the light is composed of at least two groups of monochromatic light.
Meanwhile, the invention also provides an interference measurement system which comprises the integrated interference measurement head, a motion assembly and a reference system assembly; the moving part drives the integrated interference measuring head and/or the second measured object to move, so that the measured area of the second measured object is within the detection range of the measuring head;
the reference system component comprises at least one group of reference measuring heads and at least one group of coordinate reference surfaces, the reference measuring heads irradiate the coordinate reference surfaces based on the monochromatic light and receive the monochromatic light reflected by the coordinate reference surfaces, so that the monochromatic light reflected by the coordinate reference surfaces and a part of the monochromatic light incident to the reference measuring heads generate interference;
the first light ray inlet, the first collimating lens and the first beam splitter and/or the first focusing lens form a group of reference measuring heads; the position reference surfaces form a set of the coordinate reference surfaces.
By adopting the technical scheme, the invention can also bring the following beneficial effects:
the invention is provided with a first focusing lens and/or a second focusing lens, and light rays are converted into convergent light for shape measurement and/or position calibration of an integrated interference measuring head; the light utilization rate can be improved, the measurement precision can be further improved, and the measurement range can be enlarged;
the first focusing lens and the second focusing lens are coaxially arranged, so that the size can be further reduced;
the invention is provided with the first reflecting mirror and/or the second reflecting mirror, and the optical axis of the first collimating lens and/or the second collimating lens is set to be vertical to the reflecting surface of the spectroscope, so that the length of the measuring head can be shortened;
the integrated interference measuring head is arranged on the rotating shaft, and the position reference surface is set to be a curved surface, so that the inaccuracy of the measuring result caused by the mechanical error of the rotating shaft is avoided in the working condition that the integrated interference measuring head needs to rotate;
the light ray of the invention is composed of at least two groups of monochromatic light, the measurement range can break through lambda/2, and the measurement of nanometer precision (5-0.05 nm) is realized.
Drawings
In order to more clearly illustrate the technical solutions of the embodiments of the present invention, the drawings needed to be used in the embodiments will be briefly described below, and it is obvious that the drawings in the following description are only some embodiments of the present invention, and it is obvious for those skilled in the art to obtain other drawings based on these drawings without creative efforts.
FIG. 1 is a schematic diagram of an optical path structure of an integrated interference measurement head according to an embodiment of the present invention;
FIG. 2 is a schematic diagram of an optical path structure of another integrated interferometric measuring head in accordance with an embodiment of the present invention;
FIG. 3 is a schematic diagram of an interferometric device according to an embodiment of the invention;
FIG. 4 is a schematic diagram of another reference head in accordance with an embodiment of the present invention;
wherein: 1. a support frame; 2. a first reference surface; 3. a first mechanical arm; 4. a first reference measuring head; 5. a first rotating shaft; 6. an object measuring head; 7. an object to be measured; 8. a second rotating shaft; 9. a second reference surface; 10. a displacement table; 11. a second reference measuring head; 12. a reference measuring head III; 13. a reference surface III; 14. a light source; 15. a detector module; 16. a signal line; 17. a computer; 18. a second focusing lens; 19. a second spectroscope; 20. a first reflector; 21. a PZT module; 22. incident light; 23. reflecting the light; 24. a first collimating lens; 25. a second collimating lens; 26. a cavity; 27. a fourth lens; 28. an optical fiber; 29. a second reflector; 30. a first beam splitter; 31. a first focusing lens; 32. a first light entrance; 33. a second light entrance.
Detailed Description
Embodiments of the present invention will be described in detail below with reference to the accompanying drawings.
The embodiments of the present invention are described below with reference to specific embodiments, and other advantages and effects of the present invention will be easily understood by those skilled in the art from the disclosure of the present specification. It is to be understood that the described embodiments are merely exemplary of the invention, and not restrictive of the full scope of the invention. The invention is capable of other and different embodiments and of being practiced or of being carried out in various ways, and its several details are capable of modification in various respects, all without departing from the spirit and scope of the present invention. It is to be noted that the features in the following embodiments and examples may be combined with each other without conflict. All other embodiments, which can be obtained by a person skilled in the art without inventive step based on the embodiments of the present invention, are within the scope of protection of the present invention.
It is noted that various aspects of the embodiments are described below within the scope of the appended claims. It should be apparent that the aspects described herein may be embodied in a wide variety of forms and that any specific structure and/or function described herein is merely illustrative. Based on the disclosure, one skilled in the art should appreciate that one aspect described herein may be implemented independently of any other aspects and that two or more of these aspects may be combined in various ways. For example, an apparatus may be implemented and/or a method practiced using any number of the aspects set forth herein. Additionally, such an apparatus may be implemented and/or such a method may be practiced using other structure and/or functionality in addition to one or more of the aspects set forth herein.
It should be noted that the drawings provided in the following embodiments are only for illustrating the basic idea of the present invention, and the drawings only show the components related to the present invention rather than the number, shape and size of the components in practical implementation, and the type, quantity and proportion of the components in practical implementation can be changed freely, and the layout of the components can be more complicated.
In addition, in the following description, specific details are provided to facilitate a thorough understanding of the examples. However, it will be understood by those skilled in the art that the aspects may be practiced without these specific details.
In one embodiment of the present invention, an integrated interference measurement head is provided, as shown in fig. 1 and 2, comprising:
a first light inlet 32 for point outgoing and point receiving light;
a second light inlet 33 for point outgoing and point receiving light;
a first collimating lens 24 having a focal point disposed at the first light ray inlet 32;
a second collimating lens 25 having a focus disposed at the second light ray inlet 33;
the first spectroscope 30 is used for partially transmitting and partially reflecting the emergent light path of the first collimating lens 24, returning at least part of the reflected light to the first collimating lens 24 in the original path, and transmitting the transmitted light to a first measured object;
the second spectroscope 19 reflects part of the emergent light path of the second collimating lens 25 in a transmission way, at least part of the reflected light returns to the optical axis of the second collimating lens 25 in the original way, and the transmitted light is transmitted to a second measured object;
wherein: the integrated interference measurement head further comprises a PZT module 21; the PZT module 21 drives the first beam splitter 30 and the second beam splitter 19 to perform linear motions in the same moving manner, and adjusts an optical path between the first beam splitter 30 and the reference plane one 2 and an optical path between the second beam splitter 19 and the object 7 to be measured.
The specific position of the optical component is not limited in this embodiment.
In the present embodiment, the first set of interferometric components includes a first light entrance 32, a first collimating lens 24, and a first beam splitter 30; the first light ray inlet 32 transmits light rays to the first collimating lens 24 and then refracts the light rays into parallel light rays, the parallel light rays are transmitted to the first beam splitter 30, the reflecting surface of the first beam splitter 30 is vertically arranged with the parallel light rays, so that a part of the light rays return to the original path and finally reach the first collimating lens 24, the first collimating lens 24 forms the reference light rays from the parallel light rays reflected by the first beam splitter 30, and then the reference light rays are refracted into convergent light rays which are transmitted to the first light ray inlet 32; the light transmitted by the first spectroscope 30 is transmitted to a first measured object and then reflected by the first measured object, and the light transmitted by the first spectroscope 30 forms measuring light, finally reaches the first collimating lens 24 and is converged to a first light outlet by the first collimating lens 24; because the optical path difference between the measuring light and the reference light interferes at the first spectroscope 30 and generates interference fringes, when the distance between the first measured object and the first spectroscope 30 changes, the interference fringes also change, the detector module 15 detects the interference fringes, the distance change between the first spectroscope 30 and the measured object can be obtained based on the change rule of the interference fringes, and the appearance of the first measured object is obtained according to the distance change.
The second set of interferometric measuring components comprises a second light ray inlet 33, a second collimating lens 25 and a second beam splitter 19; the second light ray inlet 33 transmits the light rays to the second collimating lens 25 and then refracts the light rays into parallel light rays, the parallel light rays are transmitted to the second beam splitter 19, the reflecting surface of the second beam splitter 19 is vertically arranged with the parallel light rays, so that a part of the light rays return to the original path and finally reach the second collimating lens 25, the second collimating lens 25 refracts the parallel light rays reflected by the second beam splitter 19 into reference light rays, and then the reference light rays are refracted into convergent light rays which are transmitted to the second light ray inlet 33; the light transmitted by the second spectroscope 19 is transmitted to a second measured object and then reflected by the second measured object, and the light transmitted by the second spectroscope 19 forms measuring light, finally reaches the second collimating lens 25 and is converged to a second light outlet by the second collimating lens 25; because the measuring light and the reference light have optical path difference and interfere with each other and generate interference fringes, when the distance between the second measured object and the second spectroscope 19 changes, the interference fringes also change, the detector module 15 detects the interference fringes, the distance change between the second spectroscope 19 and the measured object can be obtained based on the change rule of the interference fringes, and the appearance of the second measured object is obtained according to the distance change.
Two groups of interference measurement assemblies are integrated together, one group can be selected for carrying out the appearance measurement on the measured object 7, and the other group realizes the position feedback of the first group, so that the mechanical movement error can be compensated better;
and due to the phase modulation requirement, the phase difference and the optical path difference of the two groups of interference measurement assemblies are adjusted by adopting a PZT (piezoelectric ceramic) module so as to realize accurate measurement. Because the PZT modules 21 have the defects of hysteresis, peristalsis, and the like, which may cause errors to be introduced into the measuring head during the measurement process, the errors are also one of the important error sources of the system, so that more error factors may be introduced by increasing the number of the PZT modules 21, which may cause a difficulty in error compensation and a difficulty in calibration. In the embodiment, the number of the PZT modules 21 can be reduced by simultaneously realizing the interference phase adjustment of two groups of measuring assemblies through one group of PZT, so that error factors are reduced, the measuring difficulty is reduced, and the measuring precision is improved.
Meanwhile, in this embodiment, it is also optional to use both sets of measuring components to measure the object to be measured 7 or to perform position feedback.
In one embodiment, as shown in FIG. 1, the integrated interference measurement head further includes a first focusing lens 31, the first focusing lens 31 being disposed on the transmitted outgoing light path of the first beam splitter 30.
In one embodiment, as shown in FIG. 1, the integrated interference measurement head further includes a second focusing lens 18, and a first focusing lens 31 is disposed on the transmitted exit light path of the second beam splitter 19.
The first focusing lens 31 and/or the second focusing lens 18 are/is arranged in the two embodiments, and light rays are converted into converged light rays for shape measurement and/or position calibration of the integrated interference measuring head; the light utilization rate can be improved, the measurement precision is further improved, and the measurement range is enlarged.
In one embodiment, the optical axes of the first focusing lens 31 and the second focusing lens 18 coincide, and the first focusing lens 31 and the second focusing lens 18 are coaxially disposed, so that the radial volume of the integrated interference measuring head can be reduced, the integrated interference measuring head is more compact, and the integrated interference measuring head has higher flexibility and thus increases the measuring range.
In one embodiment, as shown in FIG. 1, the integrated interference measurement head further comprises a first mirror 20; the optical axis of the first collimating lens 24 is perpendicular to the reflecting surface of the first beam splitter 30; the first reflecting mirror 20 realizes the mutual transmission of the light between the beam splitter and the first collimating lens 24.
In one embodiment, as shown in FIG. 1, the integrated interference measurement head further comprises a second mirror 29; the optical axis of the second collimating lens 25 is perpendicular to the reflecting surface of the second beam splitter 19; the second reflecting mirror 29 realizes the mutual transmission of the light between the beam splitter and the second collimating lens 25.
The first reflecting mirror 20 and/or the second reflecting mirror 29 are/is arranged in the above embodiment, and the optical axis of the first collimating lens 24 and/or the second collimating lens 25 is/are arranged to be perpendicular to the light reflecting surface of the spectroscope, so that the distance between the two spectroscopes can be shortened, the axial length of the integrated interference measuring head is further reduced, the integrated interference measuring head is more compact, and the integrated interference measuring head has higher flexibility and further increases the measuring range.
In one embodiment, the first object under test is a position reference plane, i.e., reference plane one 2 as shown in FIG. 3; the position reference surface forms a coordinate reference of the integrated interference measuring head; the integrated interference measuring head measures the topography of the second measured object.
In one embodiment, as shown in FIG. 3, the integrated interference measurement head is mounted on a rotating shaft, i.e., the rotating head one as shown in FIG. 3; the position reference surface is a circular arc surface. The embodiment adopts the arc surface as the position reference, and can effectively eliminate the mechanical error caused by the rotating shaft when the integrated interference measuring head is used for measuring.
In one embodiment, the light is composed of at least two sets of monochromatic light. The embodiment can break the measurement range through lambda/2 and realize the measurement of nanometer precision (5-0.05 nm).
In one embodiment, as shown in fig. 3, an interferometric measuring system is provided, which is implemented based on the above-mentioned integrated interferometric measuring head, and further includes a motion component and a reference frame component; the moving part drives the integrated interference measuring head and/or a second measured object to move, so that the measured area of the second measured object is positioned in the detection range of the object measuring head 6;
the reference system assembly comprises at least one group of reference measuring heads and at least one group of coordinate reference surfaces, the reference measuring heads irradiate the coordinate reference surfaces on the basis of monochromatic light, and receive the monochromatic light reflected by the coordinate reference surfaces, so that the monochromatic light reflected by the coordinate reference surfaces interferes with a part of the monochromatic light incident to the reference measuring heads;
the first light ray inlet 32, the first collimating lens and the first beam splitter 30 and/or the first focusing lens 31 constitute a set of reference heads; the position reference planes form a set of coordinate reference planes.
As shown in fig. 3, the principle of the interferometric system of the present embodiment is: the multi-wavelength monochromatic light emitted by the light source 14 (the light source module contains a plurality of monochromatic lights, and the free combination output of the monochromatic lights with different wavelengths can be performed by the control system in the wavelength range of visible light or infrared light) is transmitted to the object measuring head 6, the reference measuring head I4, the reference measuring head II 11 and the reference measuring head III 12 through the signal line 16 (the signal line contains optical fibers, electric wires and the like capable of transmitting optical signals and electric signals, and the simplification processing is performed in the schematic diagram). One part of incident light is reflected and returned by a reference surface (namely, a mirror surface shape (with very small roughness) in the measuring head, the mirror surface shape can be approximately regarded as an ideal surface shape, and no obvious measuring error is introduced) to be used as reference light, the other part of incident light is reflected and returned by the measured object 7 or the reference surfaces I2, II 9 and III 13 to be used as measuring light, the reference light and the measuring light are subjected to interference after meeting in the measuring head, interference signals are transmitted to the detector module 15 through the signal line 16, acquired signals are transmitted to the computer 17 after being primarily processed by the control system, further processing is completed in the computer 17, deviation data of the three-dimensional shape of the measured object 7 are obtained, and data display is carried out.
Object alignment measuring head 6: the three-dimensional shape measuring device is used for measuring the three-dimensional shape of a measured object 7;
a first reference measuring head 4, a second reference measuring head 11 and a third reference measuring head 12: the device is used for measuring the displacement distance of the mechanical shaft, accurately positioning the position of the object measuring head 6 or the measured object 7 in space, and the measured data can be used for compensating errors introduced when the mechanical shaft moves.
Reference measuring head one 4: and compensating mechanical errors generated when the first rotating shaft 5 rotates.
Reference head two 11: compensating for mechanical errors generated when the displacement table 10 moves vertically.
Reference head three 12: compensating for mechanical errors that may occur when the translation stage 10 is moved horizontally.
Error compensation: the reference head measures the mechanical axis displacement distance (because of the low accuracy of the mechanical axis displacement, inaccurate positioning of the spatial position of the object, optical means are required to accurately position the spatial position of the object), and subtracts or adds this value to (or otherwise calculates) the measurement data of the object measurement head 6.
The object measuring head 6 and the reference measuring head 4 are integrated interference measuring heads, in order to measure the shapes of the surfaces of the measured object 7 at different curvatures, the object measuring head 6 needs to rotate around a rotating shaft 5, the rotating shaft 5 is a mechanical shaft, errors exist in the measured data of the object measuring head 6 due to mechanical disturbance during rotation, compensation is needed, and therefore the reference measuring head 4 is introduced. The object measuring head 6 and the reference measuring head I4 are coaxially integrated, and the measuring precision can be improved according to the Abbe principle. In actual measurement, the distance between the reference measuring head-4 and the reference surface-2 (the reference surface-2 is fixed on the mechanical arm-3 and does not rotate) is fixed (calibration can be performed in advance), and when the object measuring head 6 and the reference measuring head-4 are subjected to rotation measurement, due to the existence of mechanical disturbance, the distance between the reference measuring head-4 and the reference surface-2 slightly changes, and the change directly influences the measurement precision of the system. Therefore, the measurement data of the first measuring head 4 needs to be subtracted from the measurement data of the object measuring head 6 to compensate for the error introduced during the mechanical rotation.
The structure of the first integrated interference measuring head is shown in fig. 1, an incident light ray 22 (solid line) is collimated by a first collimating lens 24, then reflected by a first reflecting mirror 20, then passes through a second beam splitter 19, a part of the light is reflected back to serve as reference light, after being transmitted, the part of the light is focused by a second focusing lens 18, and then the light irradiates on a measured object 7 and a reference surface 2 respectively, and then returns to serve as measuring light, the reference light meets the measuring light to generate interference, and interference signals are transmitted to a detector module 15 through a signal line 16 (interference signals of different measuring heads and different wavelengths are respectively detected and processed).
In addition, in order to complete the three-dimensional scanning of the morphology of the measured object 7, the measured object 7 needs to be moved horizontally and vertically, the movement is completed by the displacement table 10, mechanical movement errors exist in the horizontal and vertical movement processes of the displacement table 10, compensation is needed, and therefore the reference measuring head two 11 and the reference measuring head three 12 are respectively installed, and the horizontal and vertical movement distances are respectively monitored in real time. In addition, the measured object 7 needs to rotate to complete the topography measurement, and the rotation is completed by the second rotating shaft 8 (the reference measuring head can also be added to monitor errors such as jitter and offset introduced during rotation in real time).
The internal structures of the reference measuring head two 11 and the reference measuring head three 12 are shown in fig. 4, and the principle is as follows: part of the incident light 22 (solid line) is reflected by the end face of the optical fiber 28 to be used as reference light, part of the incident light passes through the end face, is collimated by the lens four 27 and meets the reference plane two 9 (or the reference plane three 13) to be reflected to be used as measuring light, the reference light meets the measuring light to generate interference, and the interference signal is transmitted to the detector module 15 through the signal line 16. The PZT module 21 drives the optical fiber 28 to move up and down, and changes an optical path difference between the reference light and the measurement light, thereby performing phase modulation.
In one embodiment, as shown in fig. 2, the optical path of the integrated interference measurement head is further simplified, that is, the signal line 16 is placed inside the object measurement head 6 and the reference measurement head one 4, the cavity 26 is filled with a glue, the signal line 16 and the second collimating lens 25 are fixed together to ensure the stability of the incident optical path and the reflected optical path, the PZT module 21 drives the second beam splitter 19 to move up and down to change the optical path difference between the reference light and the measurement light, so as to complete the phase-shift interference measurement, and the cavity 26, the signal line 16 and the second collimating lens 25 are fixed.
The above description is only for the specific embodiment of the present invention, but the scope of the present invention is not limited thereto, and any changes or substitutions that can be easily conceived by those skilled in the art within the technical scope of the present invention are included in the scope of the present invention. Therefore, the protection scope of the present invention shall be subject to the protection scope of the claims.
Claims (10)
1. An integrated interferometric measurement head, comprising:
the first light ray inlet is used for point outgoing and point receiving light rays;
a second light inlet for point outgoing and point receiving light;
a first collimating lens having a focus disposed at the first light entrance;
a second collimating lens, the focus of which is arranged at the second light inlet;
the first spectroscope reflects part of the emergent light path of the first collimating lens in a transmission way, at least one part of the reflected light returns to the first collimating lens in the original way, and the transmitted light is transmitted to a first measured object;
the second spectroscope reflects part of the emergent light path of the second collimating lens in a transmission way, at least one part of the reflected light returns to the optical axis of the second collimating lens in the original way, and the transmitted light is transmitted to a second measured object;
wherein: the integrated interference measurement head further comprises a PZT module; the PZT module drives the first beam splitter and the second beam splitter to do linear motion with the same moving mode, and the optical path between the first beam splitter and the first collimating lens and the optical path between the second beam splitter and the second collimating lens are adjusted.
2. The integrated interference measurement head of claim 1, further comprising a first focusing lens disposed on a transmitted exit light path of the first beam splitter.
3. The integrated interference measurement head according to claim 1 or 2, further comprising a second focusing lens, the first focusing lens being disposed on a transmitted exit optical path of the second beam splitter.
4. The integrated interference measurement head of claim 3, wherein the optical axes of the first and second focusing lenses coincide.
5. The integrated interference measurement head of claim 1, further comprising a first mirror; the optical axis of the first collimating lens is vertical to the reflecting surface of the first beam splitter; the first reflector realizes the mutual transmission of the light rays between the spectroscope and the first collimating lens.
6. The integrated interference measurement head of claim 1 or 5, further comprising a second mirror; the optical axis of the second collimating lens is vertical to the reflecting surface of the second beam splitter; the second reflecting mirror realizes the mutual transmission of the light rays between the beam splitter and the second collimating lens.
7. The integrated interference measurement head of claim 1, wherein the first measured object is a position reference surface; the position reference surface forms a coordinate reference of the integrated interference measurement head; the integrated interference measuring head measures the appearance of the second measured object.
8. The integrated interference measurement head of claim 7, wherein the integrated interference measurement head is mounted on a rotating shaft; the position reference surface is a circular arc surface.
9. The integrated interference measurement head of claim 1, wherein the light rays consist of at least two sets of monochromatic light.
10. An interferometric measuring system comprising the integrated interferometric measuring head of any of claims 1 to 9, further comprising a motion assembly and a reference frame assembly; the moving part drives the integrated interference measuring head and/or the second measured object to move, so that the measured area of the second measured object is within the detection range of the measuring head;
the reference system component comprises at least one group of reference measuring heads and at least one group of coordinate reference surfaces, the reference measuring heads irradiate the coordinate reference surfaces based on the monochromatic light and receive the monochromatic light reflected by the coordinate reference surfaces, so that the monochromatic light reflected by the coordinate reference surfaces and a part of the monochromatic light incident to the reference measuring heads generate interference;
the first light ray inlet, the first collimating lens and the first beam splitter and/or the first focusing lens form a group of reference measuring heads; the position reference surfaces form a set of the coordinate reference surfaces.
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| CN202210682665.XA CN115077417A (en) | 2022-06-16 | 2022-06-16 | Integrated interference measuring head and interference measuring system |
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| CN202210682665.XA CN115077417A (en) | 2022-06-16 | 2022-06-16 | Integrated interference measuring head and interference measuring system |
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