CN115077290B - Apparatus and method for processing metal frost - Google Patents

Apparatus and method for processing metal frost Download PDF

Info

Publication number
CN115077290B
CN115077290B CN202210678230.8A CN202210678230A CN115077290B CN 115077290 B CN115077290 B CN 115077290B CN 202210678230 A CN202210678230 A CN 202210678230A CN 115077290 B CN115077290 B CN 115077290B
Authority
CN
China
Prior art keywords
heat transfer
transfer sheet
frosting
metal
top cover
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
CN202210678230.8A
Other languages
Chinese (zh)
Other versions
CN115077290A (en
Inventor
陈志豪
宇高义郎
孟璐璐
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Tianjin University
Original Assignee
Tianjin University
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tianjin University filed Critical Tianjin University
Priority to CN202210678230.8A priority Critical patent/CN115077290B/en
Publication of CN115077290A publication Critical patent/CN115077290A/en
Application granted granted Critical
Publication of CN115077290B publication Critical patent/CN115077290B/en
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F28HEAT EXCHANGE IN GENERAL
    • F28FDETAILS OF HEAT-EXCHANGE AND HEAT-TRANSFER APPARATUS, OF GENERAL APPLICATION
    • F28F13/00Arrangements for modifying heat-transfer, e.g. increasing, decreasing
    • F28F13/18Arrangements for modifying heat-transfer, e.g. increasing, decreasing by applying coatings, e.g. radiation-absorbing, radiation-reflecting; by surface treatment, e.g. polishing

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Thermal Sciences (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Defrosting Systems (AREA)

Abstract

The invention relates to a device for processing metal frost, which is used for forming metal frost on the surface of a heat transfer sheet and comprises a frosting structure, a cooling structure and an environment control structure, wherein the frosting structure comprises an iron column, a screw electrode, a nut electrode, a tungsten boat for containing frosting metal, a heat transfer sheet cover plate and an electrode wire; the cooling structure comprises a heat transfer block and a water cooling plate; the environment control structure comprises a top cover, a base, a heating belt, a heat preservation sleeve, an argon bottle, a vacuum pump and a temperature sensor. The heat transfer sheet is arranged on the heat transfer block; the top cover is connected with the base in a sealing way, and a closed space surrounded by the top cover and the base is called a frost forming cavity; the heat transfer block is insulated from the base; the iron column is connected to the top cover in a sealing way; a tungsten boat is fixed in the frosting cavity, and a screw electrode and a nut electrode are used for clamping and fixing the tungsten boat and an electrode wire; the heating belt is in direct contact with the top cover, and the heat preservation sleeve is used for wrapping the heating belt and the top cover.

Description

Apparatus and method for processing metal frost
Technical Field
The invention relates to equipment for heat exchange aiming at the boiling phenomenon, which is mainly used for forming a metal frost structure on the boiling heat exchange surface so as to improve the boiling heat exchange performance of the equipment surface.
Background
Nucleate boiling can transfer a greater heat flux density with less wall superheat and is therefore often used for cooling industrial equipment, such as nuclear reactors, electronics, heat exchangers, and the like. In particular, in recent years, the electronic information industry has been rapidly developed, and in order to meet the requirements, the density of electronic components has been continuously increased, and a large number of data centers have been established, which means that the heat dissipation requirements of electronic devices have been increased. The heat dissipation requirement cannot be met only by air cooling, and it can be presumed that a method for heat exchange by liquid phase change will become one of the main flows of future data center cooling technologies.
In nucleate boiling, there is a critical heat Flux density (CRITICAL HEAT Flux, CHF), and when the heat Flux density exceeds this value, the boiling state transitions from nucleate boiling to film boiling, and the surface temperature of the device rises rapidly and is likely to burn out. Therefore, to improve the heat transfer characteristics of the device, nucleate boiling CHF must be improved.
The formation of porous structures on the boiling surface is one of the effective methods for enhancing CHF. The frost layer formed by condensing the mixture of water vapor and air on the cold surface is a porous structure, and the structure has an acceleration effect on the boiling heat exchange of objects in liquid nitrogen which is a low-temperature fluid. However, in the general industrial application field, the boiling heat exchange temperature ranges from 100 ℃ to 300 ℃, so that the frost layer structure formed by water is not applicable. Therefore, the low-melting-point metal is utilized to form the metal frost which is not easy to melt on the heat exchange surface of the boiling equipment, and the metal frost has important significance and practical value for improving the heat exchange effect of the boiling equipment.
Disclosure of Invention
The invention aims to provide a device capable of directly forming a metal frost structure on a heat exchange surface, and the device does not have any influence on the functions of equipment. The technical proposal is as follows:
the device for processing the metal frost is used for forming the metal frost on the surface of the heat transfer sheet 9 and comprises a frosting structure, a cooling structure and an environment control structure, wherein the frosting structure comprises an iron column 1, a screw electrode 8, a nut electrode 13, a tungsten boat 12 for containing frosting metal, a heat transfer sheet cover plate 10 and an electrode wire 21; the cooling structure comprises a heat transfer block 18 and a water cooling plate 20; the environment control structure comprises a top cover 3, a base 11, a heating belt 22, a thermal insulation sleeve 23, an argon bottle 24, a vacuum pump 25 and a temperature sensor, wherein,
The heat transfer block 18 includes an upper portion of smaller size and a lower portion of larger size, and the heat transfer sheet 9 is placed on the heat transfer block 18;
the top cover 3 is connected with the base 11 in a sealing way, the enclosed space surrounded by the top cover 3 and the base 11 is called a frosting cavity, a through hole for accommodating the upper part of the heat transfer block 18 is formed in the base 11, and the lower part of the heat transfer block 18 is positioned at the lower part of the base 11 and connected with the water cooling plate 20; the heat transfer sheet 9 is arranged on the upper surface of the upper part of the heat transfer block 18, and an iron heat transfer sheet cover plate 10 is arranged on the heat transfer sheet 9; after the iron column 1 is magnetized, the heat transfer sheet cover plate 10 is removed from above the heat transfer sheet 9;
the heat transfer block 18 is connected with the base 11 through heat insulation;
The iron column 1 is connected to the top cover 3 in a sealing way;
a tungsten boat 12 is fixed in the frosting cavity, and a screw electrode 8 and a nut electrode 13 are used for clamping and fixing the tungsten boat 12 and an electrode wire 21;
the heating belt 22 is in direct contact with the top cover 3, and the heat insulation sleeve 23 is used for wrapping the heating belt 22 and the top cover;
The temperature sensor is used for monitoring the temperature in the frosting cavity and the temperature of the heat transfer sheet.
The argon bottle 24 and the vacuum pump 25 are connected with the base 11 through pipelines and communicated with the frosting cavity.
Further, the heat transfer sheet cover plate 10 includes a cover plate 101 for covering the heat transfer sheet 9 and a vertical plate 102.
Further, a heat conductive paste is coated between the water cooling plate 20 and the lower portion of the heat transfer block 18.
Further, a glass window is provided on the side of the top cover.
Further, the temperature sensor is a thermocouple 19, and the thermocouple 19 includes four thermocouples for respectively monitoring the ambient temperature at two different positions in the frosting cavity, the temperature of the tungsten boat 12 and the temperature of the heat transfer sheet 9.
Further, the environment control structure also comprises a pressure gauge 7, and the pressure gauge 7 is fixedly connected to the pipeline.
The invention also provides a method for processing metal cream by using the device, which comprises the following steps:
(1) The vacuum pump 25 is utilized to exhaust the oxygen in the frosting cavity;
(2) Opening an argon bottle 24 to fill the interior of the frosting cavity with argon gas, and maintaining an inert environment;
(3) Presetting a first temperature threshold, heating by using a heating belt 22, and electrifying the tungsten boat 12 when the temperature in the frosting cavity reaches the first temperature threshold, so as to evaporate frosting metal;
(4) Cooling the heat transfer sheet 9;
(5) When the heat transfer sheet 9 is lowered to the second temperature threshold value, the heat transfer sheet cover plate 10 is moved away by the iron posts 1, thereby realizing a frosting process of frosting metal on the heat transfer sheet 9.
The invention can form metal frost on the heat exchange surface, namely the heat transfer sheet, and the heat transfer sheet with the metal frost is used as the heat exchange surface of the boiling equipment, so that the heat exchange performance of the equipment can be improved.
Drawings
FIG. 1 is an exploded view showing the general structure of a device for processing metal frost according to the present invention
FIG. 2 is a semi-sectional view of a device for processing metal frost according to the present invention
FIG. 3 is an enlarged view of a part of a device for processing metal frost according to the present invention
The drawings are described below
1. Iron column 2, iron column sealing ring 3, top cover 4, glass window cover plate 5, glass window sealing gasket 6, glass window 7, digital display pressure gauge 8, screw electrode 9, heat transfer sheet 10, heat transfer sheet cover plate 11, base 12, tungsten boat 13, nut electrode 14, base sealing ring 15, heat-insulating sheet 16, heat transfer block sealing ring 17, heat-insulating thick plate 18, heat transfer block 19, thermocouple 20, water-cooling plate 21, electrode wire 22, heating band 23, heat-insulating sleeve 24, argon bottle 25, vacuum pump
Detailed Description
The invention will be described in further detail with reference to the drawings and examples. The specific embodiments described herein are for illustrative purposes only and are not intended to limit the scope of the present invention.
Now, with reference to the above drawings, a practical use case of a device for processing metal frost is presented.
The device (figure 1) is a device for processing metal frost and is mainly used for equipment for heat transfer by using boiling phenomenon. By utilizing the patent of the invention, the porous structure of the metal frost can be processed on the boiling heat transfer surface of the equipment, so that the critical heat flow density of nucleate boiling is improved, and the heat transfer effect of the equipment is obviously improved. The positional relationship of the heat transfer sheet 9 and the heat transfer sheet cover plate 10 shown in fig. 1 is a positional relationship after the magnet is put in. The positional relationship between the heat transfer sheet 9 and the heat transfer sheet cover 10 shown in fig. 2 is the positional relationship before the magnets are placed. Fig. 3 is an enlarged view of the partial positions of the heat transfer sheet 9 and the heat transfer sheet cover 10, and shows the positional change of the heat transfer sheet 9 and the heat transfer sheet cover 10 before and after the placement of the magnets from fig. a to fig. b.
As shown in fig. 1, the device for processing metal frost of the present invention mainly comprises a frosting structure, a cooling structure and an environment control structure. The frosting structure consists of an iron column 1, an iron column sealing ring 2, a screw electrode 8, a nut electrode 13, a tungsten boat 12, a heat transfer sheet 9, a heat transfer sheet cover plate 10 and an electrode lead 21; the cooling structure consists of a heat transfer block 18, a heat transfer block sealing ring 16, a heat preservation thin plate 15, a heat preservation thick plate 17 and a water cooling plate 20; the environment control structure consists of a top cover 3, a glass window cover plate 4, a glass window sealing gasket 5, a glass window 6, a digital display pressure gauge 7, a base 11, a base sealing ring 14, a thermocouple 19, a heating belt 22, a heat preservation sleeve 23, an argon bottle 24 and a vacuum pump 25.
The iron column 1 of the frosting structure of the device is fixed on the top cover 3 through 2 screws and the iron column sealing ring 2, and the sealing is ensured. The tungsten boat 12 and the electrode wire 21 are clamped and fixed by the screw electrode 8 and the nut electrode 13. The tungsten boat 12 contains frost metal therein. The electrode lead 21 is fixed to the pipe of the base 11 by screw connection and sealant. The tungsten boat 12 is energized by the electrode wires 21 to heat the tungsten boat 12 for evaporating the frost-forming metal. The heat transfer sheet 9 is fixed to the heat transfer block 18 by four screws. The heat transfer sheet cover plate 10 is made of iron, the heat transfer sheet cover plate 10 is divided into two structures, wherein a square cover plate 101 with the same size as the heat transfer sheet 9 is arranged at the bottom, and a rectangular vertical plate 102 is arranged at the side face. The heat transfer sheet cover plate 10 was directly placed on the upper surface of the heat transfer sheet 9 in the initial stage of the experiment, and the heat transfer sheet 9 was completely covered. When the heat transfer sheet 9 needs to be exposed in the experiment, a magnet is placed above the iron pillar 1, the iron pillar 1 has magnetism, and then the heat transfer sheet cover plate 10 is moved away from the heat transfer sheet 9 by utilizing the magnetism of the iron pillar 1 (fig. 1 shows a position after the heat transfer sheet cover plate 10 is moved away, fig. 2 shows an initial position of the heat transfer sheet cover plate 10, and fig. 3 shows a change of positions of the heat transfer sheet 9 and the heat transfer sheet cover plate 10 before and after the magnet is placed in the heat transfer sheet cover plate from fig. a to fig. b).
The cooling structure of the device is fixed on the base 11 by using 2 heat transfer block sealing rings 16 and 10 screws, the heat transfer block 18 and the base 11 are separated by a heat insulation thin plate 15 and a heat insulation thick plate 17 serving as heat insulation members, direct contact is avoided, the heat transfer block 18 is in a shape of two cuboid stacks, and the heat transfer block 18 is enclosed by using two heat insulation plates (the heat insulation thin plate 15 and the heat insulation thick plate 17) as heat insulation members so as to be separated from the base 11. A layer of heat conducting glue is smeared between the water cooling plate 20 and the heat transfer block 18, on one hand, the water cooling plate 20 is fixed on the heat transfer block 18, and meanwhile, the effect of enhancing heat transfer is achieved. The entire cooling structure is used to effect cooling of the heat transfer sheet 9.
The environmental control structure of the device of the present invention requires control of the temperature and pressure inside the device. The top cover 3 is provided with an observation window on each side, and is provided with threaded holes, and the top cover 3 is fixed with 10 screws according to the sequence of the glass window cover plate 4, the glass window sealing gasket 5, the glass window 6 and the glass window sealing gasket 5 from outside to inside. The 2 heating strips 22 are tightly attached to the top cover 3, so that the inside of the device is heated, and the outer sides of the heating strips 22 are wrapped with a layer of heat preservation sleeve 23 for avoiding heat dissipation of the heating strips 22 to the outer sides in the heating process. The top cover 3 and the base 11 are connected by using the base sealing ring 14 and 10 bolts, so that sealing is realized. The monitoring of the temperature inside the device is achieved by 4 thermocouples 19, wherein the measured temperature comprises two ambient temperatures, the temperature of the tungsten boat 12 and the temperature of the heat transfer sheet 9, the heat transfer sheet 9 is provided with a temperature measuring hole, and the thermocouples 19 are fixed on the pipeline of the base 11 through threaded connection and sealant.
The argon bottle 24 and the vacuum pump 25 are connected with the base 11 through quick connectors and pipes.
Before the experiment was formally started, the inside of the apparatus was purged of oxygen by the vacuum pump 25, and then the inside of the apparatus was filled with argon gas by opening the argon gas bottle 24. And the inert environment inside the device is maintained, and the oxidation of metal in the test process is prevented. In the process, the pressure inside the device is detected by a digital display pressure gauge 7, and the digital display pressure gauge 7 is fixed on a pipeline through threaded connection.
The total of 4 thermocouples 19 are used for monitoring the ambient temperature at two different positions in the frosting cavity, the temperature of the tungsten boat 12 and the temperature of the heat transfer sheets 9. The two thermocouples 19 are placed directly in the air, i.e. the ambient temperature can be measured. The temperature measuring end of one thermocouple 19 is inserted into zinc particles of the tungsten boat 12, and the temperature measuring end of the thermocouple 19 is wrapped after the zinc particles are melted, so that the temperature of the tungsten boat can be accurately measured. A temperature measuring hole is processed on the heat transfer sheet 9, and a thermocouple 19 is inserted into the temperature measuring hole, so that the temperature of the heat transfer sheet 9 can be accurately measured.
When the whole device starts to operate, argon is filled in the device, and then the heating belt 22 is used for heating the device. When the temperature reaches a certain level, the tungsten boat 12 is electrified and evaporated into frost metal. While cooling the heat transfer sheet 9. When the heat transfer sheet 9 reaches the desired temperature, the heat transfer sheet cover plate 10 can be removed by the iron column 1. Thereby realizing a frosting process of frosting metal on the heat transfer sheet 9. All the devices can be turned off after the frosting is completed.

Claims (6)

1. The device for processing the metal frost is used for forming the metal frost on the surface of the heat transfer sheet (9), and comprises a frosting structure, a cooling structure and an environment control structure, wherein the frosting structure comprises an iron column (1), a screw electrode (8), a nut electrode (13), a tungsten boat (12) for containing frosting metal, a heat transfer sheet cover plate (10) and an electrode wire (21); the cooling structure comprises a heat transfer block (18) and a water cooling plate (20); the environment control structure comprises a top cover (3), a base (11), a heating belt (22), a heat insulation sleeve (23), an argon bottle (24), a vacuum pump (25) and a temperature sensor, wherein,
The heat transfer block (18) comprises an upper part with smaller size and a lower part with larger size, and the heat transfer sheet (9) is arranged on the heat transfer block (18);
the top cover (3) is connected with the base (11) in a sealing way, a closed space surrounded by the top cover and the base is called a frosting cavity, a through hole for accommodating the upper part of the heat transfer block (18) is formed in the base (11), and the lower part of the heat transfer block (18) extends to the lower part of the base (11) and contacts with the water cooling plate (20); the heat transfer sheet (9) is arranged on the upper surface of the upper part of the heat transfer block (18), and an iron heat transfer sheet cover plate (10) is arranged on the heat transfer sheet (9); after the iron column (1) is magnetized, the heat transfer sheet cover plate (10) is removed from above the heat transfer sheet (9);
the heat transfer block (18) and the base (11) are insulated by a heat insulation piece;
The iron column (1) is connected to the top cover (3) in a sealing way;
The tungsten boat (12) is positioned in the frosting cavity, and the screw electrode (8) and the nut electrode (13) are used for clamping and fixing the tungsten boat (12) and the electrode lead (21);
The heating belt (22) is in direct contact with the top cover (3), and the heat preservation sleeve (23) is used for wrapping the heating belt (22) and the top cover;
the temperature sensor is used for monitoring the temperature in the frosting cavity and the temperature of the heat transfer sheet;
The argon bottle (24) and the vacuum pump (25) are connected with the base (11) through pipelines and communicated to the frosting cavity; a method of processing metal frost comprising the steps of:
The oxygen in the frosting cavity is exhausted by a vacuum pump (25);
Opening an argon bottle (24) to enable the interior of the frosting cavity to be filled with argon, and maintaining an inert environment;
Presetting a first temperature threshold, heating by using a heating belt (22), and electrifying a tungsten boat (12) when the temperature in a frosting cavity in the frosting cavity reaches the first temperature threshold, so as to evaporate the frosting metal;
cooling the heat transfer sheet (9);
And presetting a second temperature threshold, and when the heat transfer sheet (9) is reduced to the second temperature threshold, removing the heat transfer sheet cover plate (10) by utilizing the iron column (1), so that a frosting process of frosting metal on the heat transfer sheet (9) is realized.
2. Device for working metal creams according to claim 1, characterized in that the heat transfer sheet cover plate (10) comprises a cover plate (101) for covering the heat transfer sheet (9) and a vertical plate (102).
3. Device for working metal creams according to claim 1, characterized in that a heat-conducting glue is applied between the water-cooled plate (20) and the lower part of the heat transfer block (18).
4. A device for processing metal frost according to claim 1, wherein a glass window is provided on the side of the top cover.
5. The device for processing metal frost according to claim 1, wherein the temperature sensor is a thermocouple (19), and the thermocouple (19) comprises four sensors for monitoring the ambient temperature at two different positions in the frost forming chamber, the temperature of the tungsten boat (12) and the temperature of the heat transfer sheet (9), respectively.
6. The device for processing metal frost according to claim 1, wherein the environment control structure further comprises a pressure gauge (7), and the pressure gauge (7) is fixedly connected to the pipe.
CN202210678230.8A 2022-06-16 2022-06-16 Apparatus and method for processing metal frost Active CN115077290B (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN202210678230.8A CN115077290B (en) 2022-06-16 2022-06-16 Apparatus and method for processing metal frost

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN202210678230.8A CN115077290B (en) 2022-06-16 2022-06-16 Apparatus and method for processing metal frost

Publications (2)

Publication Number Publication Date
CN115077290A CN115077290A (en) 2022-09-20
CN115077290B true CN115077290B (en) 2024-05-14

Family

ID=83252718

Family Applications (1)

Application Number Title Priority Date Filing Date
CN202210678230.8A Active CN115077290B (en) 2022-06-16 2022-06-16 Apparatus and method for processing metal frost

Country Status (1)

Country Link
CN (1) CN115077290B (en)

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4357393A (en) * 1979-04-10 1982-11-02 Katuragi Sangyo Co., Ltd. Sintered porous metal plate and its production
CN102683305A (en) * 2012-05-14 2012-09-19 西安交通大学 Chip reinforced boiling heat transfer structure of multi-pore microcolumn variable camber molded surfaces
CN103884217A (en) * 2014-04-09 2014-06-25 北京依米康科技发展有限公司 Heat dissipation device for low-melting-point metal through composite phase change
CN103903658A (en) * 2014-03-19 2014-07-02 清华大学 Sealing head with enhanced boiling heat exchange array hole surface with communicated net-shaped groove
CN108562067A (en) * 2018-04-17 2018-09-21 华南理工大学 Electric field-enhanced refrigerant boiling heat transfer micro-channel heat exchanger based on needle electrode
JP2021025667A (en) * 2019-07-31 2021-02-22 古河電気工業株式会社 Boiling heat transfer member, cooler comprising boiling heat transfer member, and cooling device comprising boiling heat transfer member

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20100206527A1 (en) * 2009-02-18 2010-08-19 Hu Lin-Wen In-Situ Treatment of Metallic Surfaces

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4357393A (en) * 1979-04-10 1982-11-02 Katuragi Sangyo Co., Ltd. Sintered porous metal plate and its production
CN102683305A (en) * 2012-05-14 2012-09-19 西安交通大学 Chip reinforced boiling heat transfer structure of multi-pore microcolumn variable camber molded surfaces
CN103903658A (en) * 2014-03-19 2014-07-02 清华大学 Sealing head with enhanced boiling heat exchange array hole surface with communicated net-shaped groove
CN103884217A (en) * 2014-04-09 2014-06-25 北京依米康科技发展有限公司 Heat dissipation device for low-melting-point metal through composite phase change
CN108562067A (en) * 2018-04-17 2018-09-21 华南理工大学 Electric field-enhanced refrigerant boiling heat transfer micro-channel heat exchanger based on needle electrode
JP2021025667A (en) * 2019-07-31 2021-02-22 古河電気工業株式会社 Boiling heat transfer member, cooler comprising boiling heat transfer member, and cooling device comprising boiling heat transfer member

Also Published As

Publication number Publication date
CN115077290A (en) 2022-09-20

Similar Documents

Publication Publication Date Title
JP6247290B2 (en) High temperature sealed electrochemical cell
Shankar et al. On the temperature distribution in liquid–vapor phase change between plane liquid surfaces
WO2005051065A2 (en) Pumped liquid cooling for computer systems using liquid metal coolant
CN115077290B (en) Apparatus and method for processing metal frost
JP7154160B2 (en) TEMPERATURE MEASUREMENT MECHANISM, TEMPERATURE MEASUREMENT METHOD AND STAGE DEVICE
Álvarez-Alonso et al. Simple set-up for adiabatic measurements of magnetocaloric effect
Misale et al. FC-72 pool boiling from finned surfaces placed in a narrow channel: preliminary results
Hakuraku et al. Thermal design and tests of a subcooled superfluid helium refrigerator
JP2804640B2 (en) Apparatus and method for cooling semiconductor device
CN205540349U (en) Temperature control device
CN108663397B (en) Thermal conductivity measuring device for vacuum glass
US20050194098A1 (en) Cast design for plasma chamber cooling
CN108663394B (en) Thermal conductivity measuring device and method for vacuum glass
CN114460986B (en) Device for controlling atomic vapor pressure
JPH06307791A (en) High performance heat transfer
CN209858128U (en) Saturated vapor pressure measurement and critical phenomenon observation device
JP7401279B2 (en) Stage for heating and cooling objects
US20120160812A1 (en) Method for sealing vapor chamber
CN216978900U (en) Testing device
JPH07260590A (en) Temperature monitor
CN218120320U (en) Ultrahigh vacuum cooling device based on Peltier effect
CN114093540B (en) Be used for damaged experimental apparatus of stainless steel ladle shell heating
CN220767160U (en) Heating plate, process cooling water system and thin film deposition equipment
CN215782538U (en) Gas trapping and separating device
US20230377819A1 (en) Vacuum degree detection device, monitoring system, and vacuum arc extinguishing chamber thereof

Legal Events

Date Code Title Description
PB01 Publication
PB01 Publication
SE01 Entry into force of request for substantive examination
SE01 Entry into force of request for substantive examination
GR01 Patent grant
GR01 Patent grant