CN115074681A - Rare earth metal rotary target material preparation equipment - Google Patents
Rare earth metal rotary target material preparation equipment Download PDFInfo
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- CN115074681A CN115074681A CN202210708011.XA CN202210708011A CN115074681A CN 115074681 A CN115074681 A CN 115074681A CN 202210708011 A CN202210708011 A CN 202210708011A CN 115074681 A CN115074681 A CN 115074681A
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- 239000013077 target material Substances 0.000 title claims abstract description 28
- 238000002360 preparation method Methods 0.000 title claims abstract description 20
- 229910052761 rare earth metal Inorganic materials 0.000 title claims abstract description 19
- 150000002910 rare earth metals Chemical class 0.000 title claims abstract description 19
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 59
- 239000000463 material Substances 0.000 claims description 30
- 239000007921 spray Substances 0.000 claims description 30
- 238000009434 installation Methods 0.000 claims description 23
- 239000007787 solid Substances 0.000 claims description 19
- 238000005507 spraying Methods 0.000 claims description 19
- 238000010438 heat treatment Methods 0.000 claims description 17
- 238000005245 sintering Methods 0.000 claims description 17
- 238000000889 atomisation Methods 0.000 claims description 10
- 230000000149 penetrating effect Effects 0.000 claims description 10
- 230000000694 effects Effects 0.000 description 17
- 239000000110 cooling liquid Substances 0.000 description 11
- 239000007788 liquid Substances 0.000 description 9
- 230000006872 improvement Effects 0.000 description 7
- 230000008859 change Effects 0.000 description 5
- 239000002826 coolant Substances 0.000 description 4
- 238000001816 cooling Methods 0.000 description 4
- 238000010586 diagram Methods 0.000 description 4
- 238000004519 manufacturing process Methods 0.000 description 4
- 238000009825 accumulation Methods 0.000 description 3
- 238000004140 cleaning Methods 0.000 description 3
- 230000005291 magnetic effect Effects 0.000 description 3
- 239000002994 raw material Substances 0.000 description 3
- 230000009471 action Effects 0.000 description 2
- 230000006698 induction Effects 0.000 description 2
- 239000000696 magnetic material Substances 0.000 description 2
- 238000012423 maintenance Methods 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 230000035515 penetration Effects 0.000 description 2
- 230000008569 process Effects 0.000 description 2
- 229910001220 stainless steel Inorganic materials 0.000 description 2
- 239000010935 stainless steel Substances 0.000 description 2
- 238000003723 Smelting Methods 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 238000005336 cracking Methods 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 230000008595 infiltration Effects 0.000 description 1
- 238000001764 infiltration Methods 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 238000000465 moulding Methods 0.000 description 1
- 239000000843 powder Substances 0.000 description 1
- 238000007493 shaping process Methods 0.000 description 1
- 238000003466 welding Methods 0.000 description 1
Images
Classifications
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/34—Sputtering
- C23C14/3407—Cathode assembly for sputtering apparatus, e.g. Target
- C23C14/3414—Metallurgical or chemical aspects of target preparation, e.g. casting, powder metallurgy
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
- F25D—REFRIGERATORS; COLD ROOMS; ICE-BOXES; COOLING OR FREEZING APPARATUS NOT OTHERWISE PROVIDED FOR
- F25D1/00—Devices using naturally cold air or cold water
- F25D1/02—Devices using naturally cold air or cold water using naturally cold water, e.g. household tap water
Abstract
The invention provides a rare earth metal rotary target material preparation device, which structurally comprises a gas discharge end, a temperature balance shaft, a machine body, a movable door and an opening and closing block, wherein the gas discharge end and the temperature balance shaft are integrated, the machine body is communicated with the temperature balance shaft, and the movable door is arranged at the front end of the machine body Corresponding convenience.
Description
Technical Field
The invention relates to the technical field of rare earth metal fine and deep product preparation, in particular to rare earth metal rotary target preparation equipment.
Background
The preparation equipment adopts plasma welding to build up rare earth metal powder on the non-magnetic high-temperature-resistant rotary target material under the protection of rare gas to form a certain thickness, so that the preparation equipment can control the usage amount of metal along with the change of the diameter length of the target material, and the effects of saving the utilization rate of raw materials and reducing the production cost can be achieved in the production process;
in summary, the inventors found that the existing preparation equipment mainly has the following defects: when the rotary target is manufactured and molded in the preparation equipment, as the rotary target and the rare earth metal are mutually fused in a smelting furnace for sintering, the hardness of a target blank in a high-temperature state is fragile, so that the target body is easy to crack and break in the process of directly taking out the rotary target by using a corresponding tool after sintering, the efficiency of rapid production is directly reduced, and the production difficulty of the target is increased.
Disclosure of Invention
The technical scheme adopted by the invention for realizing the technical purpose is as follows: the structure of the rare earth metal rotary target preparation equipment comprises a gas discharge end, a temperature balance shaft, an engine body, a movable door and an opening and closing block, wherein the gas discharge end and the temperature balance shaft are integrated, the engine body is communicated with the temperature balance shaft, the movable door is installed at the front end of the engine body, the opening and closing block is movably connected with the movable door, and the engine body is communicated with the gas discharge end through the temperature balance shaft.
The machine body is provided with a sintering space, a material fixing body and a heating block, the center of the sintering space is fixedly connected with the material fixing body, the heating block is communicated with the material fixing body, the material fixing body is communicated with the movable door, the upper part of the material fixing body is communicated with a gas discharge end, the material fixing body is communicated with the balance shaft, and the heating block is respectively provided with one block in each of four directions in the sintering space.
As a further improvement of the invention, the material fixing body is provided with a limiting layer, a central block, an adjusting shaft, a plate wall and a through hole, the limiting layer and the central block are integrated, the adjusting shaft is arranged on the outer side of the central block and movably connected with the limiting layer, the plate wall is communicated with the adjusting shaft, the through hole is embedded in the plate wall and is communicated with the central block, the central block is embedded in the central part of the sintering space, the central block is communicated with the heating block, and a circular ring clamped in the center of the adjusting shaft has a corresponding telescopic induction function.
As a further improvement of the invention, the rear end of the central block is provided with a telescopic seat, a telescopic rod, a connecting wheel, a water spray pipe and a water diversion block, the telescopic seat is movably connected with the telescopic rod, the connecting wheel is embedded in the telescopic rod, the water spray pipe is arranged above and below the connecting wheel, the water diversion block is movably connected with the water spray pipe, the water spray pipe penetrates through a through hole to be communicated with a plate wall, the bottom end of the telescopic seat is provided with a fixed plate, the telescopic rod and the telescopic seat have a corresponding gap, the connecting wheel is made of a magnetic material, and the water spray pipe and the water diversion block and the telescopic seat form a mutually connected control state.
As a further improvement of the invention, the front end of the spray pipe is provided with an installation block, a solid ring, an installation groove, a clamping wheel and an atomization net, the installation block and the solid ring are integrated, the installation groove is embedded in the solid ring, the clamping wheel is fixed on the inner side of the installation groove, the atomization net is embedded in the clamping wheel, the clamping wheel is communicated with the water diversion block, the clamping wheel is installed above and below the connecting wheel, the installation block is respectively provided with a block at the upper side and the lower side of the solid ring to form a symmetrical state, the installation groove is in a circular concave shape, the clamping wheel is respectively provided with a block at the two sides of the installation groove, and the atomization net is made of stainless steel.
As a further improvement of the invention, the clamping wheel is provided with an overturning body, a positioning block and a penetrating layer, the overturning body is movably connected with the positioning block, the penetrating layer is communicated with the positioning block, the positioning block is connected with the atomizing net in a positioning mode, the overturning body is in clearance fit with the mounting groove, the overturning body is in a spherical state, the positioning block is in a circular solid state, and the penetrating layer is in a triangular hollow shape.
As a further improvement of the invention, the through hole is provided with a buffer layer, a water spraying hole and a discharge end, the buffer layer is movably connected with the water spraying hole, the discharge end is embedded in the lower end of the water spraying hole and communicated with the lower end of the water spraying hole, the discharge end is communicated with the plate wall, and the buffer layer has corresponding toughness.
As a further improvement of the invention, the discharge end is provided with a block body, a flow guide block and a channel, the block body is fixedly connected with the flow guide block, the channel is communicated with the flow guide block, the block body is fixed at two sides below the water spray hole, and the flow guide block is arc-shaped.
As a further improvement of the invention, the block body is provided with an outer layer, a positioning ring and a bolt, the outer layer and the positioning ring are in the same circle center, the bolt penetrates through the center part of the positioning ring, the positioning ring is fixedly connected with the flow guide block, and the positioning ring is in a solid state.
Compared with the prior art, the invention has the following beneficial effects:
1. the material fixing body in the machine body can change along with the change of the diameter of the target material through the adjusting shaft, the material fixing body can be positioned at the original point through the central block, the water spraying pipe and the water guide block at the rear end can guide the cooling liquid to flow after the movable door is opened, and the cooling liquid is sprayed out from the through hole part to cool and form the target material, meanwhile, the atomizing net can enlarge the spraying range of the cooling liquid, improve the cooling area and improve the corresponding fixing effect according to the clamping wheel, so that the cracking and crushing phenomenon caused by directly taking out the target material at a high temperature can be effectively prevented, the temperature of the target material can be effectively and rapidly reduced to achieve the forming effect, and the atomizing net can be detached and maintained to achieve corresponding convenience.
2. The improved through hole buffer layer can enhance the connection effect of the spray pipe and the spray hole, so that liquid generated in the continuous spraying process of cold liquid can be guided into the channel by the guide block at the discharge end to be discharged into the plate wall, the positioning effect of the guide block can be effectively improved under the clamping of the positioning ring and the bolt of the guide block, the accumulation condition caused by the continuous penetration generated by the sprayed liquid can be effectively prevented, the condition that the cleaning is difficult is further caused, the cooling effect of the cooling liquid on the target material comprehensively can be improved, the use effect of the cooling liquid is improved, and the corresponding convenient effect can be achieved for the disassembly and assembly of the guide block.
Drawings
Fig. 1 belongs to a schematic structural diagram of a rare earth metal rotary target material preparation device.
Fig. 2 is a schematic structural diagram of a front view of a machine body.
Fig. 3 is a sectional structural view of a material fixing body.
Fig. 4 belongs to a side view of a part arranged at the rear end of a center block.
FIG. 5 is a side view of a sprinkler tube.
Fig. 6 is a front view of a snap-fit wheel.
Fig. 7 is a structural diagram of a through hole with an improved front view.
Fig. 8 is a sectional view of the discharge end.
Fig. 9 is a schematic structural diagram of a block body in a front view.
In the figure: a gas discharge end-1, a temperature balance shaft-2, a machine body-3, a movable door-4, an opening and closing block-5, a sintering space-31, a material fixing body-32, a heating block-33, a limiting layer-321, a central block-322, an adjusting shaft-323, a plate wall-324, a through hole-325, a telescopic seat-a 1, a telescopic rod-a 2, a connecting wheel-a 3, a water spraying pipe-a 4, a water guiding block-a 5, a mounting block-a 41, a solid ring-a 42, a mounting groove-a 43, a clamping wheel-a 44, an atomizing net-a 45, an overturning body-b 1, a positioning block-b 2, a penetrating layer-b 3, a buffer layer-c 1, a water spraying hole-c 2, a discharge end-c 3, a block-c 31, a flow guiding block-c 32, a channel-c 33, a sintering space-31, a material fixing body-a heating block-33, a limiting layer-b 4, a water guiding layer-b 3538, a water spraying hole-b-, Outer layer-d 1, positioning ring-d 2, bolt-d 3.
Detailed Description
The invention is further described below with reference to the accompanying drawings:
example 1:
fig. 1 to 6 show:
the invention provides a rare earth metal rotary target material preparation device,
the structure of the gas exhaust device comprises a gas exhaust end 1, a temperature balance shaft 2, a machine body 3, a movable door 4 and an opening and closing block 5, wherein the gas exhaust end 1 and the temperature balance shaft 2 are integrated, the machine body 3 is communicated with the temperature balance shaft 2, the movable door 4 is installed at the front end of the machine body 3, the opening and closing block 5 is movably connected with the movable door 4, and the machine body 3 is communicated with the gas exhaust end 1 through the temperature balance shaft 2.
The machine body 3 is provided with a sintering space 31, a material fixing body 32 and a heating block 33, the center of the sintering space 31 is fixedly connected with the material fixing body 32, the heating block 33 is communicated with the material fixing body 32, the material fixing body 32 is communicated with the movable door 4, the upper part of the material fixing body 32 is communicated with the gas discharge end 1, the material fixing body 32 is communicated with the balance shaft 2, the heating block 33 is respectively provided with one block at each of four directions in the sintering space 31, and the heating block 33 can effectively perform omnibearing heating and sintering on the target material of the material fixing body 32 through the four-direction position of the heating block 33.
The material fixing body 32 is provided with a limiting layer 321, a central block 322, an adjusting shaft 323, a plate wall 324 and a through hole 325, the limiting layer 321 and the central block 322 are integrated, the adjusting shaft 323 is installed on the outer side of the central block 322 and movably connected with the limiting layer 321, the plate wall 324 is communicated with the adjusting shaft 323, the through hole 325 is embedded in the plate wall 324 and communicated with the central block 322, the central block 322 is embedded in the central part of the sintering space 31, the central block 322 is communicated with the heating block 33, a circular ring clamped in the center of the adjusting shaft 323 has a corresponding telescopic induction function, and the circular ring at the center of the adjusting shaft 323 can control the length of a connected ejector rod along with the diameter of the target.
Wherein, the rear end of the central block 322 is provided with a telescopic seat a1, a telescopic rod a2, a connecting wheel a3, a water spray pipe a4 and a water diversion block a5, the telescopic seat a1 is movably connected with the telescopic rod a2, the connecting wheel a3 is embedded in the telescopic rod a2, the water spray pipe a4 is arranged above and below the connecting wheel a3, the water diversion block a5 is movably connected with the water spray pipe a4, the water spray pipe a4 penetrates through the through hole 325 and is communicated with the plate wall 324, the bottom end of the telescopic seat a1 is provided with a fixing plate, the telescopic rod a2 and the telescopic seat a1 have corresponding gaps, the connecting wheel a3 is made of magnetic material, the water spray pipe a4 and the water diversion block a5 and the telescopic seat a1 form a mutually connected and controlled state, the fixing plate at the bottom end of the telescopic seat a1 can position itself at the origin, the gap between the telescopic rod a2 and the telescopic seat a1 can prevent the phenomenon of the connecting wheel a3 from being stuck, and the magnetic effect of the connecting wheel can be enhanced according to the magnetic effect of the self-3, the water guide block a5 can guide the coolant to spray out from the spray pipe a4 when the telescopic seat a1 moves.
Wherein, the front end of the water spray pipe a4 is provided with an installation block a41, a solid ring a42, an installation groove a43, a clamping wheel a44, and an atomization net a45, the installation block a41 and the solid ring a42 are integrated, the installation groove a43 is embedded in the solid ring a42, the clamping wheel a42 is fixed on the inner side of the installation groove a42, the atomization net a42 is embedded in the clamping wheel a42, the clamping wheel a42 is communicated with the water guide block a42, the clamping wheel a42 is installed above and below the connecting wheel a42, the installation block a42 is provided with a block on each of the upper and lower sides of the solid ring a42 to form a symmetrical state, the installation groove a42 is in a circular concave shape, the clamping wheel a42 is provided with a block on each of both sides of the installation groove a42, the atomization net a42 is made of stainless steel, the installation block a42 can increase the clamping effect of the clamping wheel a42 in the installation groove a42 under the number of the solid rings a42, so as to fix the atomization net 42 a42, therefore, the atomizing net a45 can prolong the service life of the atomizing net according to the material of the atomizing net a45, and prevent rusting and the like.
The clamping wheel a44 is provided with an overturning body b1, a positioning block b2 and a penetrating layer b3, the overturning body b1 is movably connected with the positioning block b2, the penetrating layer b3 is communicated with the positioning block b2, the positioning block b2 is in positioning connection with an atomizing net a45, the overturning body b1 is in clearance fit with a mounting groove a43, the overturning body b1 is in a spherical state, the positioning block b2 is in a circular solid state, the penetrating layer b3 is in a triangular hollow shape, the overturning body b1 can rapidly control a plate body connected with the overturning body according to the spherical state of the overturning body b1 to achieve the clamping effect with the positioning block b2, and further the positioning block b2 can position each component at the origin according to the shape and the solid state of the positioning block b 3936 and each component to form a matching state according to the shape of the penetrating layer b 3.
The specific functions and operation flow of this embodiment are as follows:
in the invention, the rotary target material preparation equipment can open the movable door 4 through the self opening and closing block 5 to feed raw materials into the material fixing body 32 of the machine body 3, so that the target materials of the raw materials can be sintered according to the sintering space 31 and the heating block 33, the central block 322 of the material fixing body 32 can position the target materials at the original point and can achieve the fixing effect according to the change of the adjusting shaft 323 along with the diameter change of the target materials, the telescopic seat a1 arranged at the rear end of the central block 322 can extend the telescopic rod a2 to automatically send the target materials out of the machine when the movable door is opened 4 after the target materials are processed, meanwhile, the water guide block a5 of the water spray pipe a4 can guide cooling liquid and finally spray the cooling liquid from the through hole 325 to the rear end of the target materials for rapid cooling molding, so that the atomization net a45 arranged at the surface end of the water spray pipe a4 can be positioned at the original point to achieve the spraying range of the cooling liquid by the matching of the mounting groove a43 and the clamping wheel a44, simultaneously block wheel a44 through self turning body b1 and locating piece b2 then can play corresponding convenience for follow-up atomizing net a45 dismantlement maintenance, to sum up can effectually prevent the target under the high temperature state directly to take out the fracture breakage phenomenon that produces and can effectually reduce the temperature of target fast and reach the shaping effect and promote corresponding efficiency of taking out simultaneously through the mutually supporting of each part to can play corresponding convenience for the dismantlement maintenance of atomizing net.
Example 2:
fig. 7 to 9 show:
the invention provides a rare earth metal rotary target material preparation device,
the structure of the water spray pipe comprises that the through hole 325 is provided with a buffer layer c1, a water spray hole c2 and a discharge end c3, the buffer layer c1 is movably connected with the water spray hole c2, the discharge end c3 is embedded in and communicated with the lower end of the water spray hole c2, the discharge end c3 is communicated with the plate wall 324, the buffer layer c1 has corresponding toughness, and the buffer layer c1 can enhance the fixing effect of each component in the water spray hole c2 according to the toughness of the buffer layer c 1.
The discharge end c3 is provided with a block c31, a flow guide block c32 and a channel c33, the block c31 is fixedly connected with the flow guide block c32, the channel c33 is communicated with the flow guide block c32, the block c31 is fixed to two sides below the water spray holes c2, the flow guide block c32 is arc-shaped, and the flow guide block c32 can quickly guide accumulated and permeated cooling liquid to be drained through the arc-shaped flow guide block.
Wherein, block c31 is equipped with outer layer d1, holding ring d2, bolt d3, outer layer d1 is same centre of a circle with holding ring d2, bolt d3 runs through the central part in holding ring d2, holding ring d2 carries out fixed connection with water conservancy diversion piece c32, holding ring d2 is solid state, holding ring d2 can prevent the unable wrench movement that leads to the influence of bolt d3 that the continuous infiltration of coolant liquid produced according to the solid state of self.
The specific functions and operation flow of this embodiment are as follows:
in the invention, under the basic action of embodiment 1, after the through hole 325 is improved, the connection effect of the water spray hole c2 to the water spray pipe a4 can be controlled through the self buffer layer c1, and when the cooling liquid is continuously sprayed, the side leakage and the residual situation easily occur due to the continuous guiding of the liquid, so that the leaked and residual liquid can be continuously guided into the channel c33 by the guide block a32 of the discharge end a3 directly and discharged onto the surface end of the plate wall 324, the utilization rate of the cooling liquid is improved, the difficult cleaning phenomenon caused by accumulation is prevented, meanwhile, the origin location performance of the guide block c32 can be enhanced according to the self locating ring d2 and the bolt d3 under the action of the block c31 arranged at the two sides of the guide block c32, and the accumulation situation caused by the continuous penetration of the sprayed liquid can be effectively prevented through the mutual matching of the components to further cause the difficult cleaning situation, and can promote the coolant liquid and comprehensively promote the result of use of coolant liquid to the cooling effect of target and can play corresponding convenient effect for the dismouting of water conservancy diversion piece simultaneously.
The technical solutions of the present invention or similar technical solutions designed by those skilled in the art based on the teachings of the technical solutions of the present invention are all within the scope of the present invention to achieve the above technical effects.
Claims (8)
1. The utility model provides a rotatory target preparation equipment of rare earth metal, its structure includes, gas discharge end (1), temperature balance axle (2), organism (3), dodge gate (4), opening and shutting piece (5) its characterized in that: the gas discharge end (1) is integrated with the temperature balance shaft (2), the machine body (3) is communicated with the temperature balance shaft (2), the movable door (4) is installed at the front end of the machine body (3), the opening and closing block (5) is movably connected with the movable door (4), and the machine body (3) is communicated with the gas discharge end (1) through the temperature balance shaft (2);
the machine body (3) is provided with a sintering space (31), a material fixing body (32) and a heating block (33), the center of the sintering space (31) is fixedly connected with the material fixing body (32), the heating block (33) is communicated with the material fixing body (32), the material fixing body (32) is communicated with the movable door (4), the upper part of the material fixing body (32) is communicated with the gas discharge end (1), and the material fixing body (32) is communicated with the balance shaft (2).
2. The rare earth metal rotary target material preparation device according to claim 1, wherein: the material fixing body (32) is provided with a limiting layer (321), a central block (322), an adjusting shaft (323), a plate wall (324) and a through hole (325), the limiting layer (321) and the central block (322) are integrated, the adjusting shaft (323) is installed on the outer side of the central block (322) and movably connected with the limiting layer (321), the plate wall (324) is communicated with the adjusting shaft (323), the through hole (325) is embedded in the plate wall (324) and communicated with the central block (322), the central block (322) is embedded in the central part of the sintering space (31), and the central block (322) is communicated with the heating block (33).
3. The rare earth metal rotary target material preparation device according to claim 2, wherein: the rear end of the central block (322) is provided with a telescopic seat (a1), an expansion link (a2), a connecting wheel (a3), a water spraying pipe (a4) and a water diversion block (a5), the telescopic seat (a1) is movably connected with the expansion link (a2), the connecting wheel (a3) is embedded into the expansion link (a2), the water spraying pipe (a4) is arranged above and below the connecting wheel (a3), the water diversion block (a5) is movably connected with the water spraying pipe (a4), and the water spraying pipe (a4) penetrates through the through hole (325) to be communicated with the plate wall (324).
4. The rare earth metal rotary target material preparation device according to claim 3, wherein: the front end of the water spray pipe (a4) is provided with an installation block (a41), a solid ring (a42), an installation groove (a43), a clamping wheel (a44) and an atomization net (a45), the installation block (a41) and the solid ring (a42) are integrated, the installation groove (a43) is embedded into the solid ring (a42), the clamping wheel (a44) is fixed on the inner side of the installation groove (a43), the atomization net (a45) is embedded into the clamping wheel (a44), the clamping wheel (a44) is communicated with the water guide block (a5), and the clamping wheel (a44) is installed above and below the connecting wheel (a 3).
5. The rare earth metal rotary target material preparation device according to claim 4, wherein: the clamping wheel (a44) is provided with an overturning body (b1), a positioning block (b2) and a penetrating layer (b3), the overturning body (b1) is movably connected with the positioning block (b2), the penetrating layer (b3) is communicated with the positioning block (b2), the positioning block (b2) is connected with an atomizing net (a45) in a positioning mode, and the overturning body (b1) is in clearance fit with the mounting groove (a 43).
6. The rare earth metal rotary target material preparation device according to claim 2, wherein: the through hole (325) is provided with a buffer layer (c1), a water spraying hole (c2) and a discharge end (c3), the buffer layer (c1) is movably connected with the water spraying hole (c2), the discharge end (c3) is embedded at the lower end of the water spraying hole (c2) and communicated with the lower end of the water spraying hole, and the discharge end (c3) is communicated with the plate wall (324).
7. The apparatus for preparing rare-earth metal rotary target material according to claim 6, wherein: the discharge end (c3) is provided with a block body (c31), a flow guide block (c32) and a channel (c33), the block body (c31) is fixedly connected with the flow guide block (c32), the channel (c33) is communicated with the flow guide block (c32), and the block body (c31) is fixed on two sides below the water spray hole (c 2).
8. The apparatus for preparing rare-earth metal rotary target material according to claim 7, wherein: block (c31) are equipped with skin (d1), holding ring (d2), bolt (d3), skin (d1) are same centre of a circle with holding ring (d2), bolt (d3) run through the central part in holding ring (d2), holding ring (d2) carry out fixed connection with water conservancy diversion piece (c 32).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202210708011.XA CN115074681A (en) | 2022-06-21 | 2022-06-21 | Rare earth metal rotary target material preparation equipment |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202210708011.XA CN115074681A (en) | 2022-06-21 | 2022-06-21 | Rare earth metal rotary target material preparation equipment |
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| CN115074681A true CN115074681A (en) | 2022-09-20 |
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| CN202210708011.XA Pending CN115074681A (en) | 2022-06-21 | 2022-06-21 | Rare earth metal rotary target material preparation equipment |
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| CN113106407A (en) * | 2021-03-26 | 2021-07-13 | 福建省长汀金龙稀土有限公司 | Manufacturing device and method of rare earth metal and rare earth alloy rotary target material |
| CN213803968U (en) * | 2020-12-16 | 2021-07-27 | 涿州有融新材料科技有限公司 | Sputtering target material self-circulation cooling device |
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