CN115053172A - 一种移相器、光相控阵以及光相控阵的制备方法 - Google Patents

一种移相器、光相控阵以及光相控阵的制备方法 Download PDF

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Publication number
CN115053172A
CN115053172A CN202080005553.XA CN202080005553A CN115053172A CN 115053172 A CN115053172 A CN 115053172A CN 202080005553 A CN202080005553 A CN 202080005553A CN 115053172 A CN115053172 A CN 115053172A
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China
Prior art keywords
insulating layer
layer
waveguide
electrode structure
electromagnetic wave
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Pending
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CN202080005553.XA
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English (en)
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牛犇
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Suteng Innovation Technology Co Ltd
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Suteng Innovation Technology Co Ltd
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    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/03—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on ceramics or electro-optical crystals, e.g. exhibiting Pockels effect or Kerr effect
    • G02F1/035—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on ceramics or electro-optical crystals, e.g. exhibiting Pockels effect or Kerr effect in an optical waveguide structure

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  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Nonlinear Science (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Chemical & Material Sciences (AREA)
  • Ceramic Engineering (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Optical Modulation, Optical Deflection, Nonlinear Optics, Optical Demodulation, Optical Logic Elements (AREA)
  • Optical Integrated Circuits (AREA)

Abstract

一种移相器(100)、光相控阵(10)以及光相控阵(10)的制备方法，移相器(100)包括信号发生器(110)以及波导(120)，信号发生器(110)用于产生电磁波信号；波导(120)位于电磁波信号的传输路径上，以使在电磁波信号的作用下波导(120)内传输的光线的相位能够改变，波导(120)的制备材料包括氮化铝。通过将波导(120)的制备材料设置为氮化铝，氮化铝与CMOS工艺兼容且可以通过磁控溅射方法以薄膜的形式淀积于基底(130)上，形成的氮化铝薄膜具有晶格结构以及电光效应，且能实现比基于热光效应更快的调相速度。

Description

PCT国内申请，说明书已公开。

Claims (12)

  1. PCT国内申请，权利要求书已公开。
CN202080005553.XA 2020-11-02 2020-11-02 一种移相器、光相控阵以及光相控阵的制备方法 Pending CN115053172A (zh)

Applications Claiming Priority (1)

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PCT/CN2020/125903 WO2022088180A1 (zh) 2020-11-02 2020-11-02 一种移相器、光相控阵以及光相控阵的制备方法

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CN115053172A true CN115053172A (zh) 2022-09-13

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WO (1) WO2022088180A1 (zh)

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN115166898B (zh) * 2022-07-21 2024-02-06 西安电子科技大学 一种电光调制集成波导结构

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3119965B2 (ja) * 1993-04-05 2000-12-25 アルプス電気株式会社 光導波路型光素子
JP3567901B2 (ja) * 2000-12-22 2004-09-22 日本電気株式会社 導波路型光制御デバイスおよびその製造方法
CN102763264B (zh) * 2012-03-14 2014-04-30 华为技术有限公司 一种移相器和耦合器及其制造方法
DE102015225863A1 (de) * 2015-12-18 2017-06-22 Robert Bosch Gmbh Optische phasengesteuerte Anordnung und LiDAR System
CN109001918B (zh) * 2018-07-13 2020-10-23 电子科技大学 一种基于高迁移率tco薄膜的低损耗光波导移相器

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