CN115050909A - Wearable display device and preparation method thereof - Google Patents

Wearable display device and preparation method thereof Download PDF

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Publication number
CN115050909A
CN115050909A CN202210657864.5A CN202210657864A CN115050909A CN 115050909 A CN115050909 A CN 115050909A CN 202210657864 A CN202210657864 A CN 202210657864A CN 115050909 A CN115050909 A CN 115050909A
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layer
flexible
stretchable substrate
display device
wearable display
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舒成业
张仕强
张仕刚
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Sichuan Jinglong Photoelectric Technology Co ltd
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Sichuan Jinglong Photoelectric Technology Co ltd
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    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K77/00—Constructional details of devices covered by this subclass and not covered by groups H10K10/80, H10K30/80, H10K50/80 or H10K59/80
    • H10K77/10—Substrates, e.g. flexible substrates
    • H10K77/111—Flexible substrates
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K50/00—Organic light-emitting devices
    • H10K50/80—Constructional details
    • H10K50/84—Passivation; Containers; Encapsulations
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K59/00—Integrated devices, or assemblies of multiple devices, comprising at least one organic light-emitting element covered by group H10K50/00
    • H10K59/10—OLED displays
    • H10K59/12—Active-matrix OLED [AMOLED] displays
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K59/00—Integrated devices, or assemblies of multiple devices, comprising at least one organic light-emitting element covered by group H10K50/00
    • H10K59/10—OLED displays
    • H10K59/12—Active-matrix OLED [AMOLED] displays
    • H10K59/128—Active-matrix OLED [AMOLED] displays comprising two independent displays, e.g. for emitting information from two major sides of the display
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K71/00—Manufacture or treatment specially adapted for the organic devices covered by this subclass
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
    • Y02E10/00—Energy generation through renewable energy sources
    • Y02E10/50—Photovoltaic [PV] energy
    • Y02E10/549—Organic PV cells

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  • Manufacturing & Machinery (AREA)
  • Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Electroluminescent Light Sources (AREA)
  • Devices For Indicating Variable Information By Combining Individual Elements (AREA)

Abstract

The invention discloses wearable display equipment and a preparation method thereof, and relates to the field of display equipment, wherein the display equipment comprises a flexible stretchable substrate and a display unit; the method comprises the steps of S1 cleaning a flexible stretchable substrate, S2 preparing a flexible non-stretchable substrate, S3 preparing an anode electrode, a drain electrode, a hole injection layer, a hole transport layer, a light emitting layer, an electron transport layer, an electron injection layer, a cathode electrode, a semiconductor layer, a dielectric layer and a gate electrode, and S4 packaging to obtain the display device; the display unit is installed on flexible tensile base plate, and according to hooke's law, this will make wearable display device most stress in tensile process all concentrate on the flexible tensile base plate of bottom, therefore the display unit can keep stable performance and normal work under tensile state, has effectively improved the mechanical characteristic of device for this wearable display device can seamless comfortable laminating on human epidermis or clothing, has practicality and convenience.

Description

Wearable display device and preparation method thereof
Technical Field
The invention relates to the field of display equipment, in particular to wearable display equipment and a preparation method thereof.
Background
With the rapid development of the information age, the display of information becomes an indispensable part of the information industry, and the display gains more attention as a carrier for information presentation. Flexible organic light-emitting diodes (OLEDs) are important in display products because of their excellent characteristics of self-luminescence, wide viewing angle, thinness, low energy consumption, flexibility, etc. However, in current research, OLED display cannot fully realize large-area wearable display due to limitations of manufacturing processes, device structures, and the like. In the bending deformation process of the flexible OLED module, the bending radius is small, the stress of the device is overlarge, and each thin film device cannot be coordinately deformed, so that the device is peeled off, and the screen is permanently damaged. Meanwhile, in order to realize flexible OLED display, specific materials and process flows need to be adopted, which greatly increases the production cost and limits the development thereof. In addition, as wearable display, the wearable display can only be bent to a certain degree and cannot meet actual requirements, and the stretchable performance of the wearable device is often required in the actual use process so as to realize the requirements of display under multiple scenes, wearing comfort and the like.
Disclosure of Invention
The invention aims to solve the problems and designs a wearable display device and a preparation method thereof.
The invention realizes the purpose through the following technical scheme:
a wearable display device, comprising:
a flexible stretchable substrate;
at least two display units; the display units are all arranged on the flexible stretchable substrate, and the distance between every two adjacent display units is larger than zero.
A method of making a wearable display device, comprising:
s1, cleaning the flexible stretchable substrate, and drying the flexible stretchable substrate after cleaning;
s2, preparing a plurality of flexible non-stretchable substrates distributed in an array on the flexible stretchable substrate by using a patterned photoetching method;
s3, moving the flexible stretchable substrate into a vacuum film plating chamber, and sequentially preparing an anode electrode, a drain electrode, a hole injection layer, a hole transport layer, a luminescent layer, an electron transport layer, an electron injection layer, a cathode electrode, a semiconductor layer, a dielectric layer and a gate electrode on each flexible non-stretchable substrate;
and S4, packaging the device obtained in the S3 to obtain the wearable display device.
The invention has the beneficial effects that: install display element on flexible tensile base plate, and the distance between two adjacent display elements is greater than zero, according to hooke's law, this will make wearable display device most stress in tensile process all concentrate on the flexible tensile base plate of bottom, consequently display element can keep the stable performance and normally work under tensile state, has effectively improved the mechanical properties of device for this wearable display device can seamless comfortable laminating on human epidermis or clothing, has practicality and convenience.
Drawings
FIG. 1 is a schematic structural diagram of a wearable display device of the present invention;
FIG. 2 is a schematic structural diagram of a display unit in the wearable display device of the present invention;
wherein corresponding reference numerals are:
1-flexible stretchable substrate, 2-display unit, 3-anode electrode, 4-hole injection layer, 5-hole transport layer, 6-light emitting layer, 7-electron transport layer, 8-electron injection layer, 9-cathode electrode, 10-drain electrode, 11-semiconductor layer, 12-dielectric layer, 13-gate electrode, 14-flexible non-stretchable substrate.
Detailed Description
In order to make the objects, technical solutions and advantages of the embodiments of the present invention clearer, the technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention. It is to be understood that the embodiments described are only a few embodiments of the present invention, and not all embodiments. The components of embodiments of the present invention generally described and illustrated in the figures herein may be arranged and designed in a wide variety of different configurations.
Thus, the following detailed description of the embodiments of the present invention, as presented in the figures, is not intended to limit the scope of the invention, as claimed, but is merely representative of selected embodiments of the invention. All other embodiments, which can be obtained by a person skilled in the art without inventive step based on the embodiments of the present invention, are within the scope of protection of the present invention.
It should be noted that: like reference numbers and letters refer to like items in the following figures, and thus, once an item is defined in one figure, it need not be further defined and explained in subsequent figures.
In the description of the present invention, it is to be understood that the terms "upper", "lower", "inside", "outside", "left", "right", and the like, indicate orientations or positional relationships based on the orientations or positional relationships shown in the drawings, or the orientations or positional relationships that the products of the present invention are conventionally placed in use, or the orientations or positional relationships that are conventionally understood by those skilled in the art, and are used for convenience of describing the present invention and simplifying the description, but do not indicate or imply that the devices or elements referred to must have a specific orientation, be constructed in a specific orientation, and be operated, and thus, should not be construed as limiting the present invention.
Furthermore, the terms "first," "second," and the like are used solely to distinguish one from another, and are not to be construed as indicating or implying relative importance.
In the description of the present invention, it is also to be noted that, unless otherwise explicitly stated or limited, the terms "disposed" and "connected" are to be interpreted broadly, and for example, "connected" may be a fixed connection, a detachable connection, or an integral connection; can be mechanically or electrically connected; the connection may be direct or indirect via an intermediate medium, and may be a communication between the two elements. The specific meanings of the above terms in the present invention can be understood by those skilled in the art according to specific situations.
The following describes in detail embodiments of the present invention with reference to the drawings.
As shown in figures 1 and 2 of the drawings,
a wearable display device, comprising:
a flexible stretchable substrate;
at least two display units; the display units are all arranged on the flexible stretchable substrate, and the distance between every two adjacent display units is larger than zero.
A plurality of rectangular arrays of display elements are disposed on the flexible stretchable substrate.
Each display unit includes:
a flexible, non-stretchable substrate; the flexible non-stretchable substrate is fixedly arranged on the flexible stretchable substrate;
a light emitting device for display;
a driving device for controlling whether the light emitting device operates or not; the light-emitting device and the driving device are both fixedly arranged on the flexible and non-stretchable substrate.
The light-emitting device comprises an anode electrode, a hole injection layer, a hole transport layer, a light-emitting layer, an electron transport layer, an electron injection layer and a cathode electrode; the anode electrode, the hole injection layer, the hole transport layer, the light-emitting layer, the electron transport layer, the electron injection layer and the cathode electrode are sequentially arranged on the flexible non-stretchable substrate from bottom to top.
The driving device comprises a drain electrode, a semiconductor layer, a dielectric layer and a gate electrode, wherein the drain electrode, the semiconductor layer, the dielectric layer and the gate electrode are sequentially arranged on the flexible non-stretchable substrate from bottom to top, and two ends of the semiconductor layer are respectively contacted with the anode electrode and the drain electrode.
The thickness of the flexible stretchable substrate is 100-300 mu m, the thickness of the flexible non-stretchable substrate is 50-100 mu m, the thickness of the hole injection layer and the hole transport layer is 1-30nm, the thickness of the luminescent layer is 10-200nm, the thickness of the electron injection layer and the electron transport layer is 1-20nm, the thickness of the anode electrode, the cathode electrode, the drain electrode and the gate electrode is 10-50nm, the thickness of the semiconductor layer is 30-300nm, and the thickness of the dielectric layer is 100-600 nm.
The flexible non-stretchable substrate is made of any one of polyethylene terephthalate (PET), polyethylene naphthalate (PEN) and Polyimide (PI).
The light emitting layer is made of any one of orange light, red light, blue light and green light, the light emitting layer is made of a host material doped with a guest dye, the host material is a fluorescent host material or a phosphorescent host material, the guest material is a fluorescent guest dye or a phosphorescent guest dye, and the doping volume of the guest dye is 5-18% of the volume of the light emitting layer;
the main material is 8-hydroxyquinoline aluminum, 9, 10-di (naphthyl-2-yl) anthracene or 2-tert-butyl-9, 10-di (naphthyl-2-yl) anthracene; the phosphorescent host material is 4,4 '-bis (carbazole-9-yl) biphenyl, 1, 3-bis (carbazole-9-yl) -benzene, 4' -tris (carbazole-9-yl) triphenylamine, 1, 4-bis (triphenylsilyl) benzene, 1, 3-bis (triphenylsilyl) benzene or polyvinylcarbazole;
the fluorescent guest dye is a red dye, a green dye, a blue dye or a yellow dye; the red dye is 3- (dicyanomethylene) -5, 5-dimethyl-1- (dimethylamino-styrene) cyclic ethylene, 4- (dicyanomethylene) -2-tert-butyl-6- (1,1,7, 7-tetramethyl julolidin-4-yl-vinyl) -4H-pyran, 4- (dicyanomethylene) -2-tert-butyl-6- (1,1,7, 7-tetramethyl julolidin-9-enyl) -4H-pyran, 4- (dicyanomethylene) -2-i-propyl-6- (1,1,7, 7-tetramethyl julolidin-9-enyl) -4H-pyran, One or more of 4- (dicyanomethylene) -2-methyl-6- (4-dimethylaminostyryl) -4H-pyran or 4- (dicyanomethylene) -2-methyl-6- (p-dimethylamino-styryl) -4H-pyran; the green dye is one or more of 8-hydroxyquinoline aluminum, bis (2-methyl-8-hydroxyquinoline) (p-phenylphenol) aluminum, quinacridone, N, N' -dimethyl-quinacridone, coumarin 6, coumarin, difluoro [ 6-isopropylideneacetone-N- (2- (1H) -quinolinemethyl-kN) - (6-isopropylideneacetone-2-quinolinemethyl-kN 1) ] boron; the blue dye is one or more of N, N '-di (naphthylmethylene-1-yl) -N, N' -di (phenyl-benzidine, 4 '-di (2, 2-distyryl) -1, 1' -biphenyl, 4 '-bis (9-ethyl-3-carbazolenyl) -1, 1' -biphenyl, 1, 4-bis [2- (3-N-ethane carbazole) vinyl ] benzene, 1-4-bis- [4- (N, N-di-benzene) amino ] styryl-benzene or perylene, and the yellow dye is 5,6,11, 12-tetraphenylbetrabenzene.
The phosphorescent guest dye is Ir, Pt, Os or Re metal complex, wherein the Ir, Pt, Os and Re metal complex is divided into red dye, green dye, blue dye and yellow dye, the red dye is tris (1-benzisoquinoline) iridium complex, bis (1-benzisoquinoline) (acetylacetone) iridium complex, bis (2-benzo [ b ] thiophene-2-yl-pyridine) (acetylacetone) iridium complex, bis-diphenyl [ f, H ] quinoxaline-N, C2) (acetylacetone), bis (2, 4-diphenyl quinoxaline-N, C2 ') (acetylacetone) iridium complex, bis- (2-phenylquinoline-N, C2') (acetylacetone) iridium complex or 2,3,7,8,12,13,17, 18-octaethyl-21H, one or more of 23H-porphyrin platinum complexes; the green dye is one or more of a tris (2-phenylpyridine) iridium complex, a bis (1, 2-diphenyl-1H-benzimidazole) (acetylacetone) iridium complex, a bis (2-phenylpyridine) (acetylacetone) iridium complex, a tris [2- (p-tolyl) pyridine ] iridium complex, a bis [3, 5-bis (2-pyridine) -1,2, 4-triazole ] platinum complex or a 3, 5-bis (2-pyridine) chlorotoluene platinum complex; the blue dye is one or more of bis (3, 5-difluoro-2- (2-pyridine) benzene- (2-carboxypyridine)) iridium complex, bis (2, 4-difluoropyridine) tetrakis (1-pyrazole) borate iridium complex, tris ((3, 5-difluoro-4-benzonitrile) pyridine) iridium complex, tris (N-dibenzofuran-N' -methylimidazole) iridium complex, or 3, 5-bis ((2-pyridine) -1,2, 4-triazole) platinum complex; the yellow dye is one or more of 2- (p-tert-butyl-phenyl) -benzothiazole (acetylacetone) iridium complex, bis (2-benzothiazole) (acetylacetone) iridium complex, bis (2- (9, 9-diethyl-9H-fluorene-2-yl) -1-benzene-1H-benzimidazole-N, C3) (acetylacetone) iridium complex or bis (2-methyldibenzoyl- [ f, H ] quinoxaline) (acetylacetone) iridium complex.
The hole transport layer is made of one or more of aromatic diamine compounds, aromatic triamine compounds, carbazole compounds, star triphenylamine compounds, furan compounds, spiral structure compounds and polymer materials.
The electronic transmission layer is made of one or more materials of metal complexes, oxadiazole compounds, quinoxaline compounds, nitrogen-containing heterocyclic compounds, anthracene compounds, organosilicon materials, organic boron materials and organic sulfur materials.
The anode electrode, the cathode electrode, the drain electrode and the gate electrode are all made of transparent inorganic or organic materials, such as one of a metal grid based on gold, a metal nanowire, an ultrathin metal film, a carbon-based nano material (such as a carbon nano tube and graphene), a conductive polymer (such as poly (3, 4-ethylenedioxythiophene) polystyrene sulfonate, (PEDOT: PSS), polyaniline, polypyrrole, polystyrene and polythiophene).
The semiconductor layer is made of one or more materials of poly-3-hexylthiophene (P3HT), pentacene (pentacene), 6, 13-bis (triisopropylsilylethynyl) pentacene (TIPS-pentacene), phthalone and fullerene.
The dielectric layer is made of one or more organic polymer insulating materials of Polystyrene (PS), polymethyl methacrylate (PMMA), polyvinyl alcohol (PVA), polyvinylidene fluoride (PVDF) and PI.
The double-substrate structure is utilized to reduce the deformation of the light-emitting device and the driving device in the stretching and bending process, and effectively improve the mechanical property of the display equipment, so that the display equipment can be seamlessly and comfortably attached to the human epidermis or clothes, and the practicability and convenience are realized. Meanwhile, the requirements on the mechanical properties of the material are reduced, the selection range of the material is expanded, and the production cost is greatly reduced. In addition, the preparation method is well compatible with the existing preparation process, and is beneficial to the realization of industrial preparation of large-area high-density wearable display arrays;
the flexible stretchable substrate and the flexible non-stretchable substrate have different Young's moduli, according to Hooke's law, most of stress of the display device in the stretching process is concentrated on the flexible stretchable substrate of the bottom layer, so that the light-emitting device and the driving device which are prepared on the flexible non-stretchable substrate can keep stable performance and normal work in the stretching state, the mechanical property of the display device is effectively improved, the display device can be seamlessly and comfortably attached to the skin of a human body or clothes, and the flexible stretchable substrate and the flexible non-stretchable substrate have practicability and convenience.
The requirements of a luminescent device and a driving device which are prepared on the flexible and non-stretchable substrate on the mechanical properties of the material are reduced, the selection range of the material is expanded, and the production cost is greatly reduced.
The preparation method is well compatible with the existing preparation process, and is beneficial to the realization of industrial preparation of large-area high-density wearable display equipment.
A method of making a wearable display device, comprising:
s1, ultrasonically cleaning the substrate by using acetone, deionized water and an ethanol solution, ultrasonically cleaning the flexible stretchable substrate, and drying the flexible stretchable substrate by using dry nitrogen after cleaning;
s2, preparing a plurality of flexible non-stretchable substrates distributed in an array on the flexible stretchable substrate by using a patterned photoetching method; the patterning photoetching process comprises the following steps: spin-coating photoresist on the cooled layer, and then sequentially carrying out exposure, development, wet etching and photoresist removal;
s3, moving the flexible stretchable substrate into a vacuum coating chamber, and sequentially preparing an anode electrode, a drain electrode, a hole injection layer, a hole transport layer, a luminescent layer, an electron transport layer, an electron injection layer, a cathode electrode, a semiconductor layer, a dielectric layer and a gate electrode on each flexible non-stretchable substrate in one or more modes of vacuum evaporation, ion cluster beam deposition, ion plating, direct current sputtering coating, radio frequency sputtering coating, ion beam assisted deposition, plasma enhanced chemical vapor deposition, high-density inductively coupled plasma source chemical vapor deposition, catalytic chemical vapor deposition, magnetron sputtering, electroplating, spin coating, dip coating, ink-jet printing, roller coating and LB (LB) film;
and S4, packaging the device obtained in the step S3 in a glove box, wherein the glove box is in a nitrogen atmosphere, and thus the wearable display device can be obtained.
A device 1 was prepared, the structure of which is shown below:
flexible stretchable substrate: PDMS (200 μm)
Light emitting device PET (20 μm)/Au (50nm)/MoO3(3nm)/NPB (30nm)/CBP 5% Ir (piq)2(acac) (30nm)/BPhen (40nm)/LiF (1nm)/Au (30nm)/SU8(20 μm)
Drive device PET (20 μm)/Au (50nm)/pentacene (40nm)/PMMA (400nm)/Au (30nm)/SU8(20 μm)
The preparation method comprises the following steps:
step 1, cleaning a PDMS (polydimethylsiloxane) substrate by adopting a detergent, deionized water, acetone and isopropanol in a curing ratio of 30: 1, and then carrying out nitrogen blow-drying treatment;
step 2, spin-coating a layer of PET on the dried PDMS substrate, and carrying out photoetching treatment to obtain a PET substrate array;
step 3, transferring the base plate with the substrate array into a vacuum degree of 10 -4 The organic evaporation chamber of Pa, evaporate and plate each functional layer and metal electrode sequentially according to the display element, evaporation rate and thickness are installed and monitored by the film thickness appearance near the substrate;
and 4, conveying the prepared device to a glove box for packaging, wherein the glove box is in a nitrogen atmosphere of 99.9%.
A device 2 was prepared, the structure of which is shown below:
flexible stretchable substrate: SEBS (100 μm)
Light-emitting device, PI (30 μm)/Au (40nm)/MoO3(3nm)/NPB (30nm)/CBP 10% FIrpic (30nm)/BPhen (40nm)/LiF (1nm)/Au (30nm)/SU8(20 μm)
Driving device PI (20 μm)/Au (40nm)/CuPc (50nm)/PS (400nm)/Au (30nm)/SU8(20 μm)
The preparation method comprises the following steps:
step 1, cleaning an SEBS substrate by using a detergent, deionized water, acetone and isopropanol, and then carrying out nitrogen blow-drying treatment;
step 2, spinning a layer of PI on the dried substrate, and carrying out photoetching treatment to obtain a PI substrate array;
step 3, transferring the base plate with the substrate array into a vacuum degree of 10 -4 And the Pa organic evaporation chamber is used for sequentially evaporating each functional layer and the metal electrode according to the device structure. The evaporation rate and the thickness are monitored by a film thickness meter arranged near the substrate;
and 4, conveying the prepared device to a glove box for packaging, wherein the glove box is in a nitrogen atmosphere of 99.9%.
A device 3 was prepared, the structure of which is shown below:
flexible stretchable substrate: ecoflex (300 μm)
Light-emitting unit PEN (40 μm)/Au (50nm)/MoO3(3nm)/NPB (30nm)/CBP 8% FIrpic (30nm)/BPhen (40nm)/LiF (1nm)/Au (30nm)/SU8(20 μm)
Driving unit PEN (20 μm)/Au (50nm)/TIPS-pentacene (50nm)/PS (400nm)/Au (30nm)/SU8(20 μm)
The preparation method comprises the following steps:
step 1, cleaning an Ecoflex substrate by using a detergent, deionized water, acetone and isopropanol, and then carrying out nitrogen blow-drying treatment;
step 2, spinning and coating a layer of PEN on the dried substrate, and carrying out photoetching treatment to obtain a PEN substrate array;
step 3, transferring the base plate with the substrate array into a vacuum degree of 10 -4 And the Pa organic evaporation chamber is used for sequentially evaporating each functional layer and the metal electrode according to the device structure. The evaporation rate and the thickness are monitored by a film thickness meter arranged near the substrate;
and 4, conveying the prepared device to a glove box for packaging, wherein the glove box is in a nitrogen atmosphere of 99.9%.
A device 4 was prepared, the structure of which is shown below:
flexible stretchable substrate: SEBS (200 μm)
Light emitting device comprising PI (40 μm)/Au (50nm)/MoO 3 (3nm)/NPB(30nm)/CBP:5％DCJTB(30nm)/BPhen(40nm)/LiF(1nm)/Au(30nm)/SU8(20μm)
Drive device PI (40 μm)/Au (50nm)/TIPS-pentacene (50nm)/PMMA (500nm)/Au (30nm)/SU8(20 μm)
The preparation method comprises the following steps:
step 1, cleaning an SEBS substrate by using a detergent, deionized water, acetone and isopropanol, and then carrying out nitrogen blow-drying treatment;
step 2, spinning a layer of PI on the dried substrate, and carrying out photoetching treatment to obtain a PI substrate array;
step 3, transferring the base plate with the substrate array into a vacuum degree of 10 -4 The organic evaporation chamber of Pa, evaporate and plate each functional layer and metal electrode sequentially according to the device structure, evaporation rate and thickness are installed and monitored by the membrane thickness appearance near the substrate;
and 4, conveying the prepared device to a glove box for packaging, wherein the glove box is in a nitrogen atmosphere of 99.9%.
A device 5 was prepared, the structure of which is shown below:
flexible stretchable substrate: PDMS (200 μm)
Light emitting device comprising PI (30 μm)/Au (30nm)/MoO 3 (3nm)/NPB(30nm)/CBP:8％Ir(piq)2(acac)(30nm)/BPhen(40nm)/LiF(1nm)/Au(30nm)/SU8(20μm)
Driving device PI (30 μm)/Au (30nm)/pentacene (40nm)/PS (400nm)/Au (30nm)/SU8(20 μm)
The preparation method comprises the following steps:
step 1, cleaning a PDMS (polydimethylsiloxane) substrate by adopting a detergent, deionized water, acetone and isopropanol in a curing ratio of 30: 1, and then carrying out nitrogen blow-drying treatment;
step 2, spinning a layer of PI on the dried substrate, and carrying out photoetching treatment to obtain a PI substrate array;
step 3, transferring the base plate with the substrate array into a vacuum degree of 10 -4 The organic evaporation chamber of Pa, evaporate and plate each functional layer and metal electrode sequentially according to the device structure, evaporation rate and thickness are installed and monitored by the membrane thickness appearance near the substrate;
and 4, conveying the prepared device to a glove box for packaging, wherein the glove box is in a nitrogen atmosphere of 99.9%.
The prepared devices 1,2, 3,4 and 5 were subjected to bending and tensile property tests, and the test results are shown in tables 1 and 2 below.
Table 1: bending behaviour of the devices 1-5
Figure BDA0003689054020000121
Table 2: tensile Properties of devices 1-5
Figure BDA0003689054020000122
Figure BDA0003689054020000131
The technical solution of the present invention is not limited to the limitations of the above specific embodiments, and all technical modifications made according to the technical solution of the present invention fall within the protection scope of the present invention.

Claims (10)

1. A wearable display device, comprising:
a flexible stretchable substrate;
at least two display units; the display units are all arranged on the flexible stretchable substrate, and the distance between every two adjacent display units is larger than zero.
2. The wearable display apparatus of claim 1, wherein a plurality of rectangular arrays of display elements are disposed on a flexible stretchable substrate.
3. A wearable display device according to claim 1, characterized in that each display unit comprises:
a flexible, non-stretchable substrate; the flexible non-stretchable substrate is fixedly arranged on the flexible stretchable substrate;
a light emitting device for display;
a driving device for controlling whether the light emitting device operates or not; the light-emitting device and the driving device are both fixedly arranged on the flexible and non-stretchable substrate.
4. A wearable display device according to claim 3, characterized in that the light emitting device comprises an anode electrode, a hole injection layer, a hole transport layer, a light emitting layer, an electron transport layer, an electron injection layer and a cathode electrode; the anode electrode, the hole injection layer, the hole transport layer, the light-emitting layer, the electron transport layer, the electron injection layer and the cathode electrode are sequentially arranged on the flexible non-stretchable substrate from bottom to top.
5. A wearable display device according to claim 4, wherein the driving device comprises a drain electrode, a semiconductor layer, a dielectric layer and a gate electrode, the drain electrode, the semiconductor layer, the dielectric layer and the gate electrode are arranged on the flexible non-stretchable substrate in sequence from bottom to top, and two ends of the semiconductor layer are respectively in contact with the anode electrode and the drain electrode.
6. A wearable display device according to claim 5, characterized in that the thickness of the flexible stretchable substrate is 100-300 μm, the thickness of the flexible non-stretchable substrate is 50-100 μm, the thickness of the hole injection layer and the hole transport layer is 1-30nm, the thickness of the light emitting layer is 10-200nm, the thickness of the electron injection layer and the electron transport layer is 1-20nm, the thickness of the anode electrode, the cathode electrode, the drain electrode and the gate electrode is 10-50nm, the thickness of the semiconductor layer is 30-300nm, and the thickness of the dielectric layer is 100-600 nm.
7. A wearable display device according to claim 5, characterized in that:
the flexible non-stretchable substrate is made of any one of polyethylene terephthalate (PET), polyethylene naphthalate (PEN) and Polyimide (PI);
the luminescent layer is made of any one luminescent material of orange light, red light, blue light and green light;
the light-emitting layer is made of a host material doped with a guest dye, the host material is a fluorescent host material or a phosphorescent host material, and the guest material is a fluorescent guest dye or a phosphorescent guest dye;
the hole transport layer is made of one or more materials of aromatic diamine compounds, aromatic triamine compounds, carbazole compounds, star triphenylamine compounds, furan compounds, spiral structure compounds and polymer materials;
the electronic transmission layer is made of one or more materials of metal complexes, oxadiazole compounds, quinoxaline compounds, nitrogen-containing heterocyclic compounds, anthracene compounds, organosilicon materials, organic boron materials and organic sulfur materials;
the anode electrode, the cathode electrode, the drain electrode and the gate electrode are all made of transparent inorganic or organic materials;
the semiconductor layer is made of one or more materials of poly-3-hexylthiophene (P3HT), pentacene (pentacene), 6, 13-bis (triisopropylsilylethynyl) pentacene (TIPS-pentacene), phthalone and fullerene;
the dielectric layer is made of one or more organic polymer insulating materials of Polystyrene (PS), polymethyl methacrylate (PMMA), polyvinyl alcohol (PVA), polyvinylidene fluoride (PVDF) and PI.
8. A wearable display device according to claim 5, characterized in that the doping volume of the guest dye is 5-18% of the volume of the light emitting layer.
9. A method of making a wearable display device, comprising:
s1, cleaning the flexible stretchable substrate, and drying the flexible stretchable substrate after cleaning;
s2, preparing a plurality of flexible non-stretchable substrates distributed in an array on the flexible stretchable substrate by using a patterned photoetching method;
s3, moving the flexible stretchable substrate into a vacuum coating chamber, and sequentially preparing an anode electrode, a drain electrode, a hole injection layer, a hole transport layer, a luminescent layer, an electron transport layer, an electron injection layer, a cathode electrode, a semiconductor layer, a dielectric layer and a gate electrode on each flexible non-stretchable substrate;
s4, packaging the device obtained in S3 to obtain the wearable display device as claimed in any one of claims 1-8.
10. The method for manufacturing a wearable display device according to claim 9, wherein in S2, the patterning lithography process is: and spin-coating photoresist on the cooled layer, and sequentially carrying out exposure, development, wet etching and photoresist removal to obtain a plurality of flexible non-stretchable substrates distributed in an array.
CN202210657864.5A 2022-06-10 2022-06-10 Wearable display device and preparation method thereof Pending CN115050909A (en)

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