CN115031692A

CN115031692A - Method for measuring vertical deviation angle and electronic equipment

Info

Publication number: CN115031692A
Application number: CN202210956677.7A
Authority: CN
Inventors: 黄浩; 宋强; 马国斌
Original assignee: Long Optoelectronics Co ltd
Current assignee: Long Optoelectronics Co ltd
Priority date: 2022-08-10
Filing date: 2022-08-10
Publication date: 2022-09-09
Anticipated expiration: 2042-08-10
Also published as: CN115031692B

Abstract

The invention provides a method for measuring a vertical deviation angle and an electronic device, wherein the method for measuring the vertical deviation angle comprises the steps of providing an incident beam; controlling an incident beam to be incident into the to-be-detected piece from the reference surface at a preset incident angle, so that the incident beam is reflected by the first transmitting and reflecting surface and the second transmitting and reflecting surface to form a first reflected wave and a second transmitted wave; acquiring a first incident angle at which the first reflected wave propagates to the reference surface and a second incident angle at which the second reflected wave propagates to the reference surface; and obtaining a vertical deviation angle according to the first incident angle and the second incident angle. The measuring method can measure the vertical deviation angle by using the wave beam without damaging the piece to be measured, has simple measuring mode operation and can reduce the measuring cost.

Description

Method for measuring vertical deviation angle and electronic equipment

Technical Field

The embodiment of the invention relates to the technical field of optics, in particular to a method for measuring a vertical deviation angle and electronic equipment.

Background

In the prior art, tools such as a grating ruler instrument and a vertical angle gauge are usually adopted to measure the perpendicularity and the vertical deviation angle of two surfaces, however, the method of measuring two surfaces by using a precision instrument is complex in operation and high in cost for manufacturing the precision instrument.

Disclosure of Invention

The embodiment of the invention aims to provide a method for measuring a vertical deviation angle and an electronic device, which are simple in measurement operation and reduce measurement cost.

In order to solve the above technical problem, in a first aspect, an embodiment of the present invention adopts a technical solution that: the method is used for measuring the vertical deviation angle of a transmitting and reflecting surface arranged in a piece to be measured relative to a reference surface of the piece to be measured, wherein the transmitting and reflecting surface comprises a first transmitting and reflecting surface and a second transmitting and reflecting surface which are parallel to each other, and the reference surface comprises a first surface and a second surface which are parallel to each other; the measuring method comprises the following steps: providing an incident beam; controlling the incident beam to be incident into the piece to be tested from the reference surface at a preset incident angle, so that the incident beam is reflected by the first transmitting and reflecting surface and the second transmitting and reflecting surface to form a first reflected wave and a second reflected wave; the incident beam is incident into the piece to be tested from the first surface to generate a first beam; the first wave beam is transmitted to the first transmitting and reflecting surface in the piece to be detected and is reflected by the first transmitting and reflecting surface to form a first reflected wave; the first wave beam transmitted by the first transmission and reflection surface is transmitted to the second surface in the piece to be tested and is reflected by the second surface to form a second wave beam, and the second wave beam is transmitted to the second transmission and reflection surface in the piece to be tested and is reflected by the second transmission and reflection surface to form a second reflected wave; acquiring a first incident angle at which the first reflected wave propagates to the reference surface and a second incident angle at which the second reflected wave propagates to the reference surface; and obtaining the vertical deviation angle according to the first incidence angle and the second incidence angle.

In some embodiments, the emitting the first reflected wave through the reference surface to form a first emitted wave and the emitting the second reflected wave through the reference surface to form a second emitted wave, the obtaining a first incident angle at which the first reflected wave propagates to the reference surface and a second incident angle at which the second reflected wave propagates to the reference surface, comprises: acquiring a first emergence angle corresponding to the first emergence wave and a second emergence angle corresponding to the second emergence wave; and obtaining the first incidence angle and the second incidence angle according to the first emergence angle and the second emergence angle.

In some embodiments, the emitting the first reflected wave through the reference surface to form a first emitted wave and the second reflected wave at the reference surface just without total reflection, and the obtaining a first incident angle at which the first reflected wave propagates to the reference surface and a second incident angle at which the second reflected wave propagates to the reference surface includes: acquiring a first emergence angle corresponding to the first emergence wave, and taking 90 degrees as a second emergence angle; obtaining the first incidence angle and the second incidence angle according to the first emergence angle and the second emergence angle; or, the second reflected wave exits through the reference surface to form a second exiting wave, and the first reflected wave does not just totally reflect at the reference surface, and the obtaining a first incident angle at which the first reflected wave propagates to the reference surface and a second incident angle at which the second reflected wave propagates to the reference surface includes: acquiring a second emergence angle corresponding to the second emergence wave, and taking 90 degrees as a first emergence angle; and obtaining the first incidence angle and the second incidence angle according to the first emergence angle and the second emergence angle.

In some embodiments, said deriving said vertical deviation angle from said first and second incident angles comprises: obtaining an included angle between the transmission reflecting surface and the reference surface according to the first incident angle and the second incident angle; and obtaining the vertical deviation angle according to the included angle between the transmission reflecting surface and the reference surface.

In some embodiments, the obtaining the included angle between the transflective surface and the reference surface according to the first incident angle and the second incident angle includes: establishing a spatial rectangular coordinate system, wherein the spatial rectangular coordinate system comprises a first coordinate axis, a second coordinate axis and a third coordinate axis which are perpendicular to each other, the incident beam is perpendicular to the first coordinate axis, and the reference surface is perpendicular to the third coordinate axis; establishing an equation set by taking a first direction cosine and a second direction cosine of the direction of the first beam in the space rectangular coordinate system, an included angle between the transmitting reflecting surface and the reference surface as unknown quantities, and taking the first incident angle, the second incident angle and an included angle between an intersection line and the second coordinate axis as known quantities; the cosine of the first direction is the cosine of an included angle between the direction of the first beam and the second coordinate axis, and the cosine of the second direction is the cosine of an included angle between the direction of the first beam and the third coordinate axis; the intersection line is the intersection line of the transmission and reflection surface and the reference surface; and solving the equation set to obtain the vertical deviation angle.

In some embodiments, said solving said system of equations to obtain said vertical deviation angle comprises: solving the equation to obtain the cosine of an included angle between the transmission reflecting surface and the reference surface; obtaining the vertical deviation angle according to the cosine of an included angle between the transmission reflecting surface and the reference surface; wherein the system of equations is:

；

wherein the content of the first and second substances,

for the first angle of incidence to be said,

is the second angle of incidence and is,

is the cosine of the first direction and,

is the cosine of the second direction and,

is the cosine of the angle between the transmitting and reflecting surface and the reference surface,

is the cosine of the angle between the intersection line and the X-axis.

In some embodiments, the first exit wave is a first exit light and the second exit wave is a second exit light; a projection plane is arranged in the emergent direction of the first emergent light and the second emergent light, and the projection plane is vertical to the reference surface; the obtaining of the first exit angle corresponding to the first exit wave includes: acquiring a first distance between a first light spot generated by the first emergent light irradiating on the projection plane and the extension surface of the reference surface and a second distance between the emergent point of the first emergent light and the projection plane; obtaining the first emergence angle according to the first distance and the second distance; the obtaining of the second exit angle corresponding to the second exit wave includes: acquiring a third distance between a second light spot generated on the projection plane by the second emergent light and the extension surface of the reference surface, and a fourth distance between the emergent point of the second emergent light and the projection plane; and obtaining the second emergence angle according to the third distance and the fourth distance.

In some embodiments, the measurement method further comprises: obtaining the preset incident angle by the following formula

：

；

Wherein, the first and the second end of the pipe are connected with each other,

is the distance between the first surface and the second surface,

the refraction angle of the incident beam incident into the element to be tested,

is the beam radius of the incident beam,

the distance between the first transflective surface and the second transflective surface in the sub-direction in which the incident direction of the incident beam is parallel to the reference surface,

is the refractive index of the piece to be measured.

In order to solve the above technical problem, in a second aspect, an embodiment of the present invention provides an electronic device, including: at least one processor; and a memory communicatively coupled to the at least one processor; wherein the memory stores instructions executable by the at least one processor to enable the at least one processor to perform the measurement method of any one of the first aspects.

In order to solve the above technical problem, in a third aspect, an embodiment of the present invention further provides a computer-readable storage medium storing computer-executable instructions for causing a computer to perform the method according to the first aspect.

To solve the above technical problem, in a fourth aspect, the present invention further provides a computer program product including a computer program stored on a computer-readable storage medium, the computer program including program instructions that, when executed by a computer, cause the computer to perform the method according to the first aspect.

Compared with the prior art, the invention has the beneficial effects that: in contrast to the state of the art, the present invention provides a method and an electronic device for measuring a vertical deviation angle, the method comprising providing an incident beam; controlling an incident beam to be incident into the to-be-detected piece from the reference surface at a preset incident angle, so that the incident beam is reflected by the first transmitting and reflecting surface and the second transmitting and reflecting surface to form a first reflected wave and a second reflected wave; acquiring a first incident angle at which the first reflected wave propagates to the reference surface and a second incident angle at which the second reflected wave propagates to the reference surface; and obtaining a vertical deviation angle according to the first incident angle and the second incident angle. In the measurement method, since directions of a first reflected wave and a second reflected wave respectively generated when the first beam and the second beam are reflected on the transmitting and reflecting surface have a certain relationship with a normal direction of the transmitting and reflecting surface, and the normal direction of the transmitting and reflecting surface is related to a vertical deviation angle to be measured, the directions of the first reflected wave and the second reflected wave are related to the vertical deviation angle. Thus, after the first incident angle of the first reflected wave and the first incident angle of the second reflected wave are obtained, the vertical deviation angle can be obtained according to the first incident angle and the second incident angle. According to the measuring method, the vertical deviation angle can be measured by using the wave beam without damaging the piece to be measured, the measuring mode is simple to operate, and the measuring cost can be reduced.

Drawings

One or more embodiments are illustrated by the accompanying figures in the drawings that correspond thereto and are not to be construed as limiting the embodiments, wherein elements/modules and steps having the same reference numerals are represented by like elements/modules and steps, unless otherwise specified, and the drawings are not to scale.

FIG. 1 is a schematic diagram of a measurement for measuring the verticality of a geometric optical waveguide according to an embodiment of the present invention;

FIG. 2 is a schematic flow chart of a method for measuring a vertical deviation angle according to an embodiment of the present invention;

FIG. 3 is a schematic diagram of a glass sheet stack according to an embodiment of the present invention;

FIG. 4 is a front view of FIG. 3;

FIG. 5 is a right side view of FIG. 3;

FIG. 6 is a top view of FIG. 3;

FIG. 7 is a schematic diagram of a measuring optical path according to an embodiment of the present invention;

FIG. 8 is a top view of FIG. 7;

FIG. 9 is a schematic illustration of the beam path within a glass sheet stack according to an embodiment of the present invention;

FIG. 10 is a schematic illustration of the beam path within another glass sheet stack provided by an embodiment of the present invention;

FIG. 11 is a schematic illustration of a beam path within yet another glass sheet stack provided by an embodiment of the present invention;

FIG. 12 is a schematic flow chart of step S3 in FIG. 2;

FIG. 13 is a schematic view of another measurement optical path provided by an embodiment of the present invention;

FIG. 14 is a schematic view of still another flowchart of step S3 in FIG. 2;

FIG. 15 is a schematic view of another measuring optical path provided by the embodiment of the present invention;

FIG. 16 is a schematic view of still another flowchart of step S3 in FIG. 2;

FIG. 17 is a schematic view of another measuring optical path provided by the embodiment of the present invention;

FIG. 18 is a flowchart illustrating a step S4 according to an embodiment of the present invention;

FIG. 19 is a schematic flow chart of step S41 in FIG. 18;

FIG. 20 is a partial flow chart of a measurement method according to an embodiment of the present invention;

FIG. 21 is a partial flow diagram of another measurement method provided by an embodiment of the present invention;

FIG. 22 is a partial schematic view of a measurement beam path provided by an embodiment of the present invention;

FIG. 23 is a graph of a first distance versus a vertical offset angle provided by an embodiment of the present invention;

FIG. 24 is a graph of vertical deviation angle versus magnification provided by an embodiment of the present invention;

FIG. 25 is a graph of vertical deviation angle versus first distance provided by an embodiment of the present invention;

fig. 26 is a schematic structural diagram of an electronic device according to an embodiment of the present invention.

Detailed Description

The present invention will be described in detail with reference to specific examples. The following examples will assist those skilled in the art in further understanding the invention, but are not intended to limit the invention in any way. It should be noted that variations and modifications can be made by persons skilled in the art without departing from the spirit of the invention. All falling within the scope of the present invention.

In order to facilitate an understanding of the invention, the invention is described in more detail below with reference to the accompanying drawings and specific examples. Unless defined otherwise, all technical and scientific terms used herein have the same meaning as commonly understood by one of ordinary skill in the art to which this invention belongs. The terminology used in the description of the invention herein is for the purpose of describing particular embodiments only and is not intended to be limiting of the invention. As used herein, the term "and/or" includes any and all combinations of one or more of the associated listed items.

It should be noted that, if not conflicted, the various features of the embodiments of the invention may be combined with each other within the scope of protection of the invention. In addition, although the functional blocks are divided in the device diagram, in some cases, the blocks may be divided differently from those in the device. Further, the terms "first," "second," and the like, as used herein, do not limit the data and the execution order, but merely distinguish the same items or similar items having substantially the same functions and actions.

Currently, optical waveguide display schemes have great potential in the augmented reality display industry, including diffractive and geometric optical waveguides. The exit pupil expansion effect is formed by adopting a plurality of transmitting and reflecting surfaces in the geometric optical waveguide, but the process requirement is very strict, and when the plurality of transmitting and reflecting surfaces are not perpendicular to the reference surface of the geometric optical waveguide, the display effect is poor, so that the method is very important for measuring the verticality of the geometric optical waveguide.

When the perpendicularity of the geometric optical waveguide is measured, a grating ruler goniometer is usually adopted for measurement, as shown in a in fig. 1, the geometric optical waveguide 30 is firstly damaged, the transmission reflecting surface S is exposed, and the transmission reflecting surface S is placed on a rotary table 20 with a grating ruler, so that the transmission reflecting surface S is aligned to the autocollimator 10, and a primary angle is recorded; next, referring to fig. 1b, the turntable 20 with the grating ruler is rotated to align the reference surface P of the geometric optical waveguide 30 with the autocollimator 10, and the angle is recorded again; finally, the angle between the transmission reflecting surface S and the reference surface P, namely the perpendicularity, can be obtained according to the angle recorded twice and the angle rotated by the turntable, and then the perpendicularity is subtracted by ninety degrees to obtain the vertical deviation angle of the transmission reflecting surface S relative to the reference surface P.

However, in this measurement mode, the geometric optical waveguide needs to be destroyed, the accuracy directly depends on the angle of the turntable, the high-accuracy autocollimator and grating ruler are extremely expensive to manufacture, and when the area of the measured surface is small, the reflected light energy is low, and the image seen by the autocollimator is very weak and is not easy to measure.

In order to solve the above technical problem, embodiments of the present invention provide a method and an electronic device for measuring a vertical deviation angle, which can measure a vertical deviation angle of a transmission reflection surface inside a to-be-measured object relative to a reference surface of the to-be-measured object without damaging the to-be-measured object, that is, an angle at which an included angle between the transmission reflection surface inside the to-be-measured object and the surface of the to-be-measured object deviates from 90 °, and the measurement method is simple, reduces measurement cost, and improves measurement accuracy.

In a first aspect, an embodiment of the present invention provides a method for measuring a vertical deviation angle of a transmission reflection surface disposed in a device under test with respect to a reference surface of the device under test, with reference to fig. 2, the method includes:

step S1: an incident beam is provided.

The incident beam is a beam incident from an air interface to the surface of the device under test, and the incident beam may be a beam having particle characteristics, such as an electron beam, a light beam, and the like, and the light beam may be a light beam generated by a coherent laser light source or a light beam generated by an incoherent light source, and may be a monochromatic light beam, or a mixed light beam, and may also be a visible light or an invisible light. The object to be measured can be an object to be measured with a transmission reflection surface arranged inside, such as glass, ZnS, metal and the like.

The type of the incident beam corresponds to the to-be-detected piece, and it is required to ensure that the incident beam can be incident into the to-be-detected piece and can be transmitted and reflected inside the to-be-detected piece. For example, in measuring the vertical deviation angle of the transmission reflection surface inside the glass with respect to the reference surface of the glass, a visible light beam may be used as the incident beam. In measuring the vertical deviation angle of the transmitted reflective surface of ZnS with respect to the surface of ZnS, an infrared beam can be used as an incident beam. In measuring the vertical deviation angle of the transmission reflection surface inside the metal with respect to the surface of the metal, an electron beam may be used as an incident beam.

Step S2: controlling an incident beam to be incident into the to-be-detected piece from the reference surface at a preset incident angle, so that the incident beam is reflected by the first transmitting and reflecting surface and the second transmitting and reflecting surface to form a first reflected wave and a second reflected wave; the incident beam is incident into the piece to be detected from the first surface to generate a first beam; the first wave beam is transmitted to the first transmitting and reflecting surface in the piece to be detected and is reflected by the first transmitting and reflecting surface to form a first reflected wave; the first wave beam transmitted by the first transmission reflection surface is transmitted to the second surface in the to-be-tested piece and is reflected by the second surface to form a second wave beam, and the second wave beam is transmitted to the second transmission reflection surface in the to-be-tested piece and is reflected by the second transmission reflection surface to form a second reflection wave.

The transmission and reflection surface of the piece to be measured comprises a first transmission and reflection surface and a second transmission and reflection surface which are parallel to each other, and the reference surface of the piece to be measured comprises a first surface and a second surface which are parallel to each other. The number of the first transflective surfaces may be one or more, and the number of the second transflective surfaces may be one or more. Each first transmission reflection surface is a transmission reflection surface encountered in the process that the incident beam enters the piece to be detected and propagates from the first surface to the second surface in the piece to be detected, each second transmission reflection surface is a transmission reflection surface encountered in the process that the incident beam enters the piece to be detected and propagates from the second surface to the first surface in the piece to be detected, and the first surface is an incident surface of the incident beam entering the piece to be detected. That is, after entering the device under test from the first surface, the incident beam may pass through one or more first transmitting and reflecting surfaces, be reflected by the second surface, and then pass through one or more second transmitting and reflecting surfaces. It should be noted that the first surface and the second surface are only two different surfaces for distinguishing the reference surface, and the positions of the first surface and the second surface are not limited, for example, the reference surface includes an upper surface and a lower surface, the first surface may be the upper surface or the lower surface, and the corresponding second surface may be the lower surface or the upper surface. The incident beam can enter the piece to be measured through the incidence of the first surface and can also enter the piece to be measured through the incidence of the second surface.

In at least one embodiment, referring to fig. 3 to 6, the incident beam is taken as an incident beam, the device to be tested is a glass stack, the glass stack includes eight glass sheets, i.e., glass sheets 1 to 8, wherein the glass sheets 2 to 7 are all parallel glass sheets, the glass sheets are fixed in sequence by glue or bonding technology to form a cuboid, and the reference surface of the glass stack includes a first surface P1 and a second surface P2 which are parallel to each other. The interfaces (which may include S1-S7) between the glass sheets have certain reflectivity and transmittance and are parallel to each other, and the interfaces (which may include S1-S7) are the transparent reflective surfaces of the present embodiment. When an incident beam is incident on the stack from glass sheet 8 and a portion of the incident beam is able to propagate within the stack toward glass sheet 1, if the incident beam passes through interface S7 and interface S6 via first surface P1, then reflects off second surface P2, passes through interface S5 and interface S4, reflects off first surface P1, and then passes through interface S3 and interface S2, then interface S7, interface S6, interface S3, and interface S2 are first transflective surfaces and interface S5 and interface S4 are second transflective surfaces. The parallelism between the transmission and reflection surfaces (which may include S1-S7) is easy to guarantee, and is easy to guarantee to 0.01 ″, and the error is small, so it is very important to measure the vertical deviation angle of the transmission and reflection surfaces relative to the reference surface in the object to be measured. Additionally, in some embodiments, when the stack of glass sheets is used as a geometric light guide, the transmitting reflective surface can be used to expand the pupil and out-couple light.

Specifically, referring to fig. 7 and 8 in combination, after the incident beam LIN is controlled to obliquely enter the first surface P1 of the dut from the air interface by directing the positive direction of the Z axis in fig. 8 toward the outside of the screen, a part of the beam will be reflected from the outer surface of the first surface P1 into the air, as shown by LO1, and the part of the beam will be ignored. Another part of the beams enters the device to be tested from the first surface P1, referring to fig. 9, the positive direction of the Y axis in fig. 9 is toward the screen, the another part of the beams is the first beam L1, the first beam L1 is incident on the first transmissive reflective surface S and then undergoes transmission and reflection, wherein the transmission generates a transmission beam L1Ta and the reflection generates a first reflection wave L1r, and because the transmission direction of the transmission beam L1Ta is the same as the propagation direction of the first beam L1, the transmission beam L1Ta is regarded as the first beam L1.

Next, referring to fig. 10, the positive direction of the Y axis in fig. 10 is toward the screen, and the first beam L1 is reflected and transmitted when propagating to the second surface P2, wherein the reflection generates the second beam L2 and the transmission generates the transmission beam L2 Tb. Then, when the second beam L2 encounters the second transflective surface, transmission and reflection also occur, wherein the transmitted beam generated by the second beam L2 through the second transflective surface has the same propagation direction as the second beam L2, and thus is regarded as the second beam L2. Then, when the second beam L2 is transmitted and reflected when it is incident on the first surface P1, since the first surface P1 is parallel to the second surface P2, the incident angle of the second beam L2 to the first surface P1 is equal to the incident angle of the first beam L1 to the second surface P2, then the second beam L2 is equivalent to the mirror image of the first beam L1, and the exit angle of the transmitted beam generated by the second beam L2 on the first surface P1 is the same as the exit angle of the transmitted beam L2Tb generated by the first beam L1 on the second surface P2, so the transmitted beam is also labeled as L2 Tb. And the reflected beam generated by the second beam L2 on the first surface P1 is parallel to the first beam L1, so the subsequent beam path is the same as the first beam L1. It can be seen that, in the device under test, only the propagation routes of the first beam L1 and the second beam L2 need to be analyzed.

Step S3: a first incident angle at which the first reflected wave propagates to the reference surface and a second incident angle at which the second reflected wave propagates to the reference surface are obtained.

Wherein the first incident angle is an angle between the first reflected wave and a normal of the reference surface, and the second incident angle is an angle between the second reflected wave and the normal of the reference surface. Referring to fig. 11, as for the first reflected wave L1r generated by the first beam L1 being reflected by the first transmitting and reflecting surface S, when the positive direction of the X axis in fig. 11 is toward the outside of the screen, and the first reflected wave L1r propagates to the second surface P2, a transmitted beam L1ro is generated by transmission and a reflected beam L1r 'is generated by reflection, the reflected beam L1 r' continues propagating inside the device under test, and a transmitted beam L1ro 'is generated by transmission and a reflected beam L1 r' is generated by reflection when propagating to the first surface P1. Then, the reflected beam L1 r' repeats to propagate sequentially in the above manner. Similarly, for the second reflected wave L2r generated by the second beam L2 passing through the second transmitting and reflecting surface, when the second reflected wave L2r propagates to the first surface P1, the second reflected wave L2r is transmitted to generate the transmitted beam L2ro and reflected to generate the reflected beam L2r ', the reflected beam L2 r' continues to propagate inside the dut, and when the second reflected wave L2r propagates to the second surface P2, the second reflected wave L2r 'is transmitted to generate the transmitted beam L2 ro' and reflected to generate the reflected beam L2r ', and then the reflected beam L2 r' repeats to propagate sequentially in the above manner. In one embodiment, the preset incident angle is adjusted so that the generated first reflected wave L1r and the second reflected wave L2r both exit through the first surface and the second surface of the dut, and the first incident angle and the second incident angle are known by measuring or calculating the exit angles of the exit waves corresponding to the first reflected wave L1r and the second reflected wave L2 r. In another embodiment, by adjusting the preset incident angle, one of the first reflected wave L1r and the second reflected wave L2r is emitted out of the device under test, and the other reflected wave is not totally reflected at the reference surface, so that the corresponding emission angle is close to 90 °. It can be seen that when the control beam is incident on the device under test, the beam propagates through the transmission reflection surface, and the generated first reflected wave L1r and/or second reflected wave L2r exit through the reference surface.

Step S4: and obtaining the vertical deviation angle according to the first incidence angle and the second incidence angle.

In the case where the transflector is perpendicular to the reference plane, as described above, since the first beam L1 and the second beam L2 are mirror images of each other, the incident angle at which the first beam L1 propagates to the first transflector is equal to the incident angle at which the second beam L2 propagates to the second transflector, and thus the first incident angle and the second incident angle are equal. If the transflective surface is not perpendicular to the reference plane, the incident angle of the first beam L1 propagating to the first transflective surface will not be equal to the incident angle of the second beam L2 propagating to the second transflective surface, so that the relative magnitude of the first incident angle and the second incident angle is affected, and the change of the angle between the transflective surface and the reference plane can be reflected by the relative magnitude of the first incident angle and the second incident angle, so that the vertical deviation angle of the transflective surface relative to the reference plane can be calculated by the first incident angle and the second incident angle.

The method for measuring the vertical deviation angle provided by the embodiment does not need to damage the piece to be measured, obtains the vertical deviation angle through the emergent angle of the emergent beam which penetrates through the reference surface by utilizing the characteristics of reflection and transmission of the beam, is simple in operation, and can be used for measuring the vertical deviation angle, so that the measurement cost can be reduced, and the measurement accuracy can be improved.

In some embodiments, the first reflected wave L1r exits through the reference surface to form a first exiting wave, and the second reflected wave L2r exits through the reference surface to form a second exiting wave, as shown in fig. 12, where the step S3 includes:

step S31 a: acquiring a first emergence angle corresponding to the first emergence wave and a second emergence angle corresponding to the second emergence wave;

step S32 a: and obtaining a first incidence angle and a second incidence angle according to the first emergence angle and the second emergence angle.

Specifically, the first exit angle is an angle between the first exit wave and a normal of the reference surface, and the second exit angle is an angle between the second exit wave and the normal of the reference surface. Referring to fig. 13, the positive direction of the X axis in fig. 13 is toward the outside of the screen, and the outgoing condition of the outgoing beam can be adjusted by adjusting the preset incident angle, so that the first reflected wave L1r and the second reflected wave L2r can both form the first outgoing wave and the second outgoing wave through the reference surface, respectively, thereby measuring or calculating a first outgoing angle at which the first reflected wave L1r exits through the reference surface and a second outgoing angle at which the second reflected wave L2r exits through the reference surface, and obtaining a first incident angle corresponding to the first outgoing angle and a second incident angle corresponding to the second outgoing angle according to the law of refraction.

In some embodiments, the first reflected wave L1r exits through the reference surface to form a first exiting wave, and the second reflected wave L2r just does not totally reflect on the reference surface, as shown in fig. 14, where the step S3 includes:

step S31 b: acquiring a first emergence angle corresponding to the first emergence wave, and taking 90 degrees as a second emergence angle;

step S32 b: obtaining a first incidence angle and a second incidence angle according to the first emergence angle and the second emergence angle;

alternatively, the first and second electrodes may be,

the second reflected wave L2r exits through the reference surface to form a second exiting wave, and the first reflected wave L1r just does not totally reflect on the reference surface, as shown in fig. 16, where the step S3 includes:

step S31 c: acquiring a second emergence angle corresponding to the second emergence wave, and taking 90 degrees as a first emergence angle;

step S32 c: and obtaining a first incidence angle and a second incidence angle according to the first emergence angle and the second emergence angle.

Specifically, in order to reduce measurement items, reduce calculation difficulty and improve calculation efficiency, one of the first reflected wave L1r and the second reflected wave L2r is made to exit to the outside of the device under test to form an exit beam by adjusting a preset incident angle, and the other reflected wave is just not totally reflected on the reference surface, so that the exit angle corresponding to the other reflected wave is close to 90 °. And in the first reflected wave and the second reflected wave, the first reflected wave may not be totally reflected at first, and the second reflected wave may not be totally reflected at first, and no matter which beam does not totally reflect at first, the emergent angle corresponding to the grazing emergent beam is determined as 90 degrees, and the angle of the emergent angle corresponding to the other emergent beam is measured. In particular, the corresponding incident angle can be determined from the corresponding exit angle by the law of refraction.

In one embodiment, the beam in which total reflection does not occur is the second reflected wave L2r, and the second exit angle is determined to be 90 °, so that the second incident angle can be determined to be a critical angle, and the first incident angle can be found according to the law of refraction, so that the vertical deviation angle can be found according to the first incident angle and the second incident angle. In another embodiment, the beam just not totally reflected is the first reflected wave L1r, and the first exit angle is determined to be 90 °, so that it can be determined that the first incident angle is a critical angle, and the vertical deviation angle can be obtained from the first incident angle and the second exit angle.

In one embodiment, the first exit angle is obtained

And/or a second exit angle

Then, the first incident angle can be obtained according to the law of refraction

And/or second angle of incidence

Comprises the following steps:

。

wherein n is the refractive index of the object to be measured, and if the first reflected wave L1r just does not generate total reflection, the first exit angle

At 90 deg. if the second reflected waveL2r just before total reflection, the second exit angle

Is 90 deg..

In some embodiments, referring to fig. 18, the step S4 includes:

step S41: obtaining an included angle between the transmission reflecting surface and the reference surface according to the first incident angle and the second incident angle;

step S42: and obtaining the vertical deviation angle according to the included angle between the transmission reflecting surface and the reference surface.

Because the vertical deviation angle condition of the included angle between the transmission reflecting surface and the reference surface can be obtained from the size condition between the first incident angle and the second incident angle, the included angle between the transmission reflecting surface and the reference surface can be obtained by calculation according to the first incident angle and the second incident angle after the first incident angle and the second incident angle are obtained, and finally, the included angle degree can be subtracted from 90 degrees after the included angle between the transmission reflecting surface and the reference surface is obtained, so that the vertical deviation angle can be obtained.

In some embodiments, referring to fig. 19, the step S41 includes:

step S411: establishing a spatial rectangular coordinate system, wherein the spatial rectangular coordinate system comprises a first coordinate axis, a second coordinate axis and a third coordinate axis which are mutually vertical, an incident beam is vertical to the first coordinate axis, and a reference surface is vertical to the third coordinate axis;

step S412: establishing an equation set by taking a first direction cosine and a second direction cosine of the first beam in a space rectangular coordinate system and an included angle between a transmission reflecting surface and a reference surface as unknown quantities and taking a first incident angle, a second incident angle and an included angle between an intersection line and a second coordinate axis as known quantities; the cosine of the first direction is the cosine of an included angle between the direction of the first wave beam and a second coordinate axis, and the cosine of the second direction is the cosine of an included angle between the direction of the first wave beam and a third coordinate axis; the intersection line is the intersection line of the transmission reflecting surface and the reference surface;

step S413: and solving an equation set to obtain a vertical deviation angle.

When a spatial rectangular coordinate system is established, according to the difference of positions of a piece to be measured in coordinate axes, a first coordinate axis can be an X axis, a Y axis or a Z axis, if the first coordinate axis is the X axis, a second coordinate axis can be the Y axis, and a third coordinate axis can be the Z axis; if the first coordinate axis is the Y axis, the second coordinate axis may be the X axis, and the third coordinate axis may be the Z axis; if the first coordinate axis is a Z-axis, the second coordinate axis may be an X-axis and the third coordinate axis may be a Y-axis. The following description specifically describes the first coordinate axis as a Y axis, the second coordinate axis as an X axis, and the third coordinate axis as a Z axis, which is not limited in practical application. Specifically, referring to fig. 4, the positive direction of the Z axis in fig. 4 is toward the outside of the screen, the reference surface of the object to be tested is perpendicular to the Z axis, i.e., the reference surface of the object to be tested is parallel to the plane of the X axis-Y axis, the X axis is along the horizontal direction in fig. 4, and the Y axis is along the vertical direction in fig. 4.

In the spatial rectangular coordinate system, the directions of the first reflected wave L1r and the second reflected wave L2r generated when the first beam L1 and the second beam L2 are reflected on the transmitting and reflecting surface respectively relate to the angle between the transmitting and reflecting surface and the reference surface, the first incident angle relates to the beam direction of the first reflected wave L1r, the second incident angle relates to the beam direction of the second reflected wave L2r, the beam direction of the first beam L1 relates to the beam direction of the first reflected wave L1r, the beam direction of the second beam L2 relates to the beam direction of the second reflected wave L2r, and the angle between the normal vector of the transmitting and reflecting surface and the X axis can be known by the angle between the intersection line and the second coordinate axis. Also, according to the above analysis of the propagation path of the beam, it can be determined that the magnitude of the cosine of the angle between the direction of the second beam L2 and the Z-axis is the same as the magnitude of the cosine of the angle between the direction of the first beam L1 and the Z-axis, and the directions of the first beam L1 and the second beam L2 are opposite in the direction of the Z-axis; the cosine of the angle between the direction of the first beam L1 and the X axis is the same as the cosine of the angle between the direction of the second beam L2 and the X axis, and the directions of the first beam L1 and the second beam L2 are the same in the direction of the X axis; then, the vertical deviation angle can be obtained by establishing an equation set with the direction of the first beam L1, the direction of the second beam L2, the angle between the transmissive reflective surface and the reference surface, the first incident angle and the second incident angle, and the angle between the intersection line and the second coordinate axis, and obtaining the angle between the transmissive reflective surface and the reference surface.

Specifically, in some embodiments, the step S423 includes: solving an equation set to obtain the cosine of an included angle between the transmission reflecting surface and the reference surface; obtaining a vertical deviation angle according to the cosine of an included angle between the transmission reflecting surface and the reference surface; wherein the system of equations is:

；

wherein the content of the first and second substances,

at the first angle of incidence,

is the second angle of incidence and is,

is the cosine of the first direction and,

is the cosine of the second direction and,

is the cosine of the angle between the transmission reflection surface and the reference surface,

is the cosine of the angle between the intersection line and the X axis.

Specifically, under the rectangular spatial coordinate system, the direction of the incident beam LIN is along the X-axis forward direction in the X-axis direction, the direction of any beam entering the piece to be measured is represented by a direction vector, the direction vector is represented by a direction cosine, wherein the direction cosine of each beam is the direction vector of the beam and the direction cosine of the X-axis, the Y-axis and the Z-axisThe cosine and direction cosine of the included angle between the two beams can also be regarded as the projection of the unit direction vector of the beam on the X axis, the Y axis and the Z axis respectively. Specifically, the normal vector transmitted through the reflecting surface is expressed as

(wherein,

、

、

are respectively normal vector

The cosine of the angle between the X-axis, the Y-axis, and the Z-axis), and the direction of the normal vector is the positive direction of the normal line passing through the reflecting surface. The direction vector of the first beam L1 is represented as

(wherein the content of the first and second components,

、

、

respectively, direction vectors of the first beam L1

Cosine of angles with the X, Y, and Z axes), the direction vector of the second beam L2 is expressed as

(wherein,

、

、

respectively, direction vectors of the second beam L2

Cosine of the angle with the X, Y, Z axes). Since the incident beam LIN is perpendicular to the Y axis, the first beam L1 and the second beam L2 are perpendicular to the Y axis, i.e. the cosine of the included angle between the first beam L1 and the second beam L2 and the Y axis is 0, and according to the propagation routes of the first beam L1 and the second beam L3 analyzed above, the direction of the second beam L2 is opposite to that of the first beam L1 only in the Z axis direction, then,

，

. The direction vector of the first reflected wave L1r is represented as

(wherein,

、

、

respectively, the direction vectors of the first reflected wave L1r

Cosine of angles with the X, Y, and Z axes), the direction vector of the second reflected wave L2r is expressed as

(wherein,

、

、

respectively, the direction vectors of the second reflected wave L2r

Cosine of the angle with the X, Y, Z axes). According to the vector reflection law equation:

；

wherein the content of the first and second substances,

in the form of a vector of the incident wave,

as a vector of the reflected wave,

is the normal vector transmitted through the reflecting surface.

Then for

And

the method comprises the following steps:

，（1）

the corresponding direction vector is taken into formula (1) to obtain:

，（2）

since the required vertical deviation angle between the transmitting and reflecting surface and the reference plane is only related to the angle between the normal vector of the transmitting and reflecting surface and the Z axis, considering only the angle between each direction vector and the Z axis direction in this embodiment, there are:

，（3）

because:

；

then equation (3) transforms to:

,（4）

since the direction cosines of the direction vector in the present embodiment can also be regarded as the projection of the unit direction vector on three coordinate axes, respectively, then, the normal vector

The projection of the unit vector of (b) on the Z axis is 0. If the transflective surface has an inclination angle along the emitting direction, i.e. the transflective surface is not perpendicular to the reference plane, then the normal vector

The projection of the unit vector of (b) on the Z axis is the amount of tilt of the transmitting reflective surface, and the amount of tilt is the cosine

Then, the process of the present invention,

wherein, in the step (A),

is the cosine of the angle between the normal vector of the transmitting and reflecting surface and the Z axis in the case where the transmitting and reflecting surface is perpendicular to the reference plane, i.e.

=0, therefore

I.e. cosine

The corresponding angle can be regarded as a normal vector

The included angle between the transmission reflection surface and the Z axis is the included angle between the transmission reflection surface and the reference plane. The normal vector transmitted through the reflecting surface is updated as follows:

，（5）

then the formula (5) is brought into the formula (4),

，（6）

transforming the formula (6) to obtain:

，（7）

since the reflected beam L2 r' is obtained after the second reflected wave L2r is reflected once, the second reflected wave L2r is opposite to the first reflected wave L1r in the Z-axis direction, and then:

，（8）

since the incident beam is perpendicular to the Y-axis, i.e.

=0, and

=0, then

And

the belt-in (8) is changed to:

，（9）

the two equations in equation (9) are subtracted to yield:

，（10）

since the direction of the first beam L1 is forward propagation toward the X axis in the X axis direction, 0 <

＜1，

The corresponding angle is related to the angle between the intersection line and the X-axis, e.g. if the angle between the intersection line and the X-axis is 45, as shown in FIG. 8, then according to the normal vector

Is opposite to the X-axis direction

The corresponding angle is 135 deg., then

=cos(135°)=-2 ^1/2 /2. Thus the normal vector

Is/are as follows

Is a known quantity, as can be seen from equation (10),

can pass through

And

it is calculated that the first emergent wave L1ro is a beam of the first reflected wave L1r refracted from the device under test into the air, that is, the first emergent wave L1ro and the first reflected wave L1r have a one-to-one correspondence relationship. The incident angle (i.e. the first incident angle) of the second beam L1r can be obtained from the first exit angle of the first exit wave L1ro according to the law of refraction, and the incident angle (i.e. the second incident angle) of the second reflected wave L2r can be obtained from the exit angle of the second exit wave L2ro in the same way. Since the reference plane is perpendicular to the Z axis, the incident angles of the first reflected wave L1r and the second reflected wave L2r are respectively

And

the angle to the Z axis, that is:

，

wherein, in the step (A),

at the first angle of incidence,

at the second incident angle, due to

And

the relationship between them is:

. A first incident angle

And a second angle of incidence

Obtained after the substitution of the formula (9):

，（11）

according to equation (11), the unknowns can be established

、

And

in obtaining a first angle of incidence

And a second angle of incidence

And substituted into known

Then, the cosine of the included angle between the transmission reflecting surface and the reference surface can be obtained by solving the equation

。

In this embodiment, the tilt direction of the transmission/reflection surface is not determined, and hence the cosine is determined

The sign of (a) is not determined, but the embodiment does not need to determine the inclination direction of the transmission reflection surface, only needs to calculate the inclination angle, and after the solution of the equation set is obtained subsequently, the cosine is omitted

The negative sign of (a) then calculates the final vertical deviation angle without affecting the final result. Thus obtaining the first incident angle

And a second angle of incidence

Then, the first incident angle may be adjusted

The first equation of formula (11) may also be substituted into the second equation, i.e. formula (11) may also be:

in order to reduce the amount of calculation, in one embodiment, after the spatial rectangular coordinate system is established, the angle between the intersection line and the X-axis may be adjusted to be 45 ° as shown in fig. 8, where the first reflected wave L1r, the reflected beam L1 r' of the first reflected wave L1r, the second reflected wave L2r and the second reflected wave L2r are generatedThe reflected beam L2 r' is transmitted through the reference surface to emit a beam LO2 perpendicular to the incident beam LIN, normal to the beam

Is/are as follows

=-2 ^1/2 And/2, substituting the formula (11) to obtain:

，（12）

the amount of calculation of the vertical deviation angle can be further reduced by using the calculation of equation (12).

In some embodiments, the first outgoing wave is a first outgoing light, and the second outgoing wave is a second outgoing light; a projection plane is arranged in the emergent direction of the first emergent light and the second emergent light, and the projection plane is vertical to the reference surface; referring to fig. 20 and 21, obtaining a first exit angle corresponding to a first exit wave includes:

step S321: acquiring a first distance between a first light spot generated by the first emergent light irradiating on the projection plane and an extension surface of the reference surface and a second distance between the emergent point of the first emergent light and the projection plane;

step S322: obtaining a first emergence angle according to the first distance and the second distance;

acquiring a second emergence angle corresponding to the second emergence wave, wherein the second emergence angle comprises the following steps:

step S331: acquiring a third distance between a second light spot generated by the second emergent light irradiating on the projection plane and the extension surface of the reference surface and a fourth distance between the emergent point of the second emergent light and the projection plane;

step S332: and obtaining a second emergence angle according to the third distance and the fourth distance.

Specifically, the first outgoing wave L1ro is the first outgoing light, and the second outgoing wave L2ro is the second outgoing light, so the incident beam and other beams are both beams. The emergent light can form a visible light spot on the projection plane M, and the included angle between the emergent light and the reference plane can be calculated according to the position of the light spot. Referring to fig. 13, a projection plane M is disposed in the emitting direction of the emitted light, so that the first emitted light (L1 ro in the figure) is irradiated on the projection plane M to form a first spot I1, and the second emitted light (L2 ro in the figure) forms a second spot I2 on the projection plane. In practical situations, since the first reflected wave L1r and the second reflected wave L2r both transmit and reflect when contacting the first surface and the second surface during propagation in the dut, the first outgoing light irradiates on the projection plane M to generate two first light spots I1, and similarly, the second outgoing light irradiates on the projection plane M to generate two second light spots I2. One of the first I1 and second I2 spots may be selected to calculate the distance of the spot from the corresponding plane of extension of the reference surface.

In one embodiment, four spots appear on the projection plane M, and as shown in fig. 13, the first reflected wave L1r emerges to produce two first spots I1 on the projection plane M, and the second reflected wave L2r emerges to produce two second spots I2 on the projection plane M. The relative positions of the first spot I1 and the second spot I2 are related to the tilt direction of the transmitting and reflecting surface, and the first spot I1 may be two spots away from the extension surface of the reference surface and the second spot I2 may be two spots away from the extension surface of the reference surface according to the tilt direction of the transmitting and reflecting surface. As described above, in practical applications, it is not necessary to distinguish which two light spots are the first light spot and the second light spot, and only the first distance and the second distance, and the third distance and the fourth distance need to be measured, so as to calculate the first emergence angle and the second emergence angle.

In another embodiment, only the first spot I1 or the second spot I2 appears on the projection plane, i.e. only the first spot I1 appears on the projection plane M in the case where the second reflected wave L2 just does not totally reflect, and only the second spot I2 appears on the projection plane M in the case where the first reflected wave L1 just does not totally reflect. If only the first reflected wave L1r exits through the reference surface, only the first light spot I1 and not the second light spot I2 will be observed on the projection plane M, as shown in fig. 15, the positive direction of the X-axis is toward the outside of the screen in fig. 15, and at this time, the second reflected wave L2r is not totally reflected at the reference surface, that is, the second exit angle is 90 °. If only the second reflected wave L2r exits through the reference surface, only the second spot I2 is observed on the projection plane M, and the first spot cannot be observed, as shown in fig. 17, the positive direction of the X axis in fig. 17 is toward the outside of the screen, and at this time, the first reflected wave L1r is not totally reflected on the reference surface, that is, the first exit angle is 90 °.

After the first spot I1 is observed, a first distance D1 between the first spot I1 and an extension surface of a reference surface (the reference surface may be the first surface P1 or the second surface P2) of the first emergent light irradiated on the projection plane M and a second distance D2 between an emergent point of the first emergent light and the projection plane M are measured, and a first emergent angle can be obtained through geometrical relations

=90 ° -atan (D1/D2). Similarly, after observing the second light spot I2, measuring a third distance D3 between the second light spot I2 of the second emergent light irradiated on the projection plane M and the extension surface of the reference surface and a fourth distance D4 between the emergent point of the second emergent light and the projection plane M, the second emergent angle can be obtained through geometric relations

=90 ° -atan (D3/D4). It can be seen that the first exit angle and/or the second exit angle can be determined by means of a geometric relationship.

In practical applications, as mentioned above, since the first reflected wave L1r reflects and transmits on both the first surface P1 and the second surface P2, and since the first surface P1 and the second surface P2 are parallel, the exit angles of the first exit light from the first surface P1 and the second surface P2 are equal, and therefore, although there may be multiple first exit light from the same surface, all the first exit light from the same surface may converge on the projection plane M to form one first spot I1 due to the equal exit angles, and the first exit light forms two first spots I1 on the projection plane M. Similarly, the second emergent light forms two second light spots I2 on the projection plane.

In one embodiment, acquiring a first distance between a first spot generated on the projection plane by the first emergent light and an extension plane of the reference surface comprises: acquiring a fifth distance between two first light spots of the first emergent light irradiated on the projection plane; and obtaining the first distance according to the fifth distance.

Specifically, in order to reduce the measurement difficulty, if two first light spots I1 are observed on the projection plane M, the fifth distance D5 between the two first light spots I1 on the projection plane M can be directly measured, and finally, the fifth distance D5 is divided by 2 to obtain the first distance D1, and then the first exit angle can be calculated with the second distance D2 to obtain the first exit angle

=90°-atan（D5/(2×D2)）。

In another embodiment, obtaining a third distance between the second spot generated on the projection plane by the second emergent light and the extension plane of the reference surface comprises: acquiring a sixth distance between two second light spots of the second emergent light irradiated on the projection plane; and obtaining a third distance according to the sixth distance.

Specifically, in order to reduce the measurement difficulty, if two second light spots I2 are observed on the projection plane M, the sixth distance D6 between the two second light spots I2 on the projection plane M can be directly measured, and finally, the sixth distance D6 is divided by 2 to obtain the third distance D3, and then the first emergence angle is obtained by calculating the first emergence angle with the fourth distance D4

=90°-atan（D6/(2×D4)）。

In some embodiments, referring to fig. 22, the measurement method further includes: obtaining a preset incident angle by the following formula

：

；

Wherein the content of the first and second substances,

is the distance between the first surface and the second surface,

the refraction angle of the incident beam incident into the device under test,

is the beam radius of the incident beam,

the distance between the first transmission reflection surface and the second transmission reflection surface in the branch direction of the incident beam parallel to the reference surface,

is the refractive index of the test piece.

In particular, the amount of, for example,

=1.64779，

=1.5mm，

=2mm，

=1mm, suppose

=10 °, then

=40.4967 °, when:

。

this value is much greater than: 2

=2 × 2mm =4 mm. The preset incident angle is obtained through the mode, the incident beam can be ensured to be in incident contact with at least two transmission reflection surfaces, and therefore the measuring effect can be improved.

In some embodiments, two light spots are generated on the projection plane, wherein the two light spots are two first light spots or two second light spots, and the measuring method further comprises: establishing a corresponding table of the vertical deviation angle and the distance between the two light spots; and obtaining a vertical deviation angle according to the distance between the two light spots and the corresponding table.

Specifically, in practical applications, by utilizing the foregoing relationship, one of the beams of the first reflected wave L1r and the second reflected wave L2r is just totally reflected, and two light spots are present on the projection plane under the condition that the refractive index of the device to be measured and the second distance D2 are fixed, in practical situations, a detection person does not know which light spot is first just totally reflected, that is, the two light spots appearing on the projection plane cannot be actually distinguished as two first light spots or two second light spots, since which light spot is first just totally reflected is related to the inclination direction of the transmission reflection plane, the embodiment only calculates the inclination angle without considering the inclination direction, and therefore, no matter which light spot appears on the projection plane, only a correspondence table of the distance between the two light spots and the vertical deviation angle needs to be established, so that after the distance between the two light spots is measured, and quickly querying the corresponding table to obtain the vertical deviation angle, namely the non-perpendicularity.

In a specific embodiment, the object to be tested is a glass object with the material model of H-K9L, and the refractive index is n = 1.51680. Under the condition that the first reflected wave or the second reflected wave just does not generate total reflection on the reference surface, two light spots appear on the projection plane, the distance L =1m between the light emergent point and the projection plane (the emergent point can be approximate to the emergent point of any emergent light on the same plane due to the fact that L is longer relative to the size of the piece to be measured), and the distance D =15cm is measured between the two light spots. Assuming that the first reflected wave is just not totally reflected, the first incident angle and the second incident angle can be obtained according to the geometric relationship as follows:

calculating to obtain a first incident angle according to the law of refraction

And a second angle of incidence

Respectively as follows:

substituting formula (12) to obtain:

；（13）

solving equation (13) to obtain six solutions:

（1）

=-0.7526952，

=0.6583691，

=0.000875432；

（2）

=0.7526952，

=0.6583691，

=-0.000875432；

（3）

=-0.0015943，

=0.9999987，

=0.41329834；

（4）

=0.0015943，

=0.9999987，

=-0.41329834；

（5）

=-0.0007236，

=-0.9999997，

=0.910595492；

（6）

=0.000723629，

=-0.999999738，

=-0.910595492。

wherein due to cosine

Is a small amount corresponding to an angle close to 90 °, so the invalid solutions of (3) - (6) are removed, and since the tilt directions of the transmission reflection surface cannot be distinguished, (1) and (2) are repeated, ignoring the negative sign:

= 0.000875432. I.e. the included angle between the transmission and reflection surface and the reference surface is

. Then, the vertical deviation angle is:

。

by the method, the included angle between the transmission reflecting surface and the reference surface can be calculated, and a smaller vertical deviation angle can be effectively measured under the measuring method provided by the embodiment of the invention, so that the measuring precision is improved, and the amplification factor is about

And D is the distance between the two light spots, L is the distance between the light emergent point and the projection plane, and compared with a mode of directly measuring a small angle, the mode provided by the embodiment improves the measurement effect.

A table of the distance between the two spots and the non-perpendicularity (vertical deviation angle) of the two spots transmitted through the reflecting surface is established, and the table is shown in the following table 1:

table 1a table for mapping a distance between two light spots and a non-perpendicularity according to an embodiment of the present invention

Thus, in actual batch measurement, the non-perpendicularity can be quickly obtained according to the distance between the two light spots, and in actual application, a relation graph of the distance between the two light spots and the vertical deviation angle can be established according to a corresponding table, as shown in fig. 23, so that the corresponding vertical deviation angle can be quickly obtained according to the relation graph after the distance between the two light spots is obtained. Therefore, the calculation efficiency is improved by establishing the corresponding table, and the method is suitable for large-batch measurement.

In addition, the relationship between the vertical deviation angle and the magnification as measured by magnifying the small angle is shown in fig. 24, and it can be seen that the magnification is higher in the small angle region, such as 890 when the vertical deviation angle is 0.0009 °, i.e., 3.24 ″. Compared with a direct measurement mode: the small-angle light is projected on a screen for measurement, the light spot distance is small in a direct measurement mode, measurement is not easy to carry out, and the error is large, and as can be seen from the graph 25, the measurement mode provided by the embodiment of the invention has higher magnification than the direct measurement mode, and the measurement accuracy is improved. Note that, in fig. 25, the line near the abscissa is the line in the direct measurement mode, and the line far from the abscissa is the line in the measurement mode of the present invention.

In a second aspect, an embodiment of the present invention further provides an electronic device, please refer to fig. 26, which shows a hardware structure of an electronic device capable of executing an embodiment of the measurement method according to any one of the first aspects.

The electronic device includes: at least one processor 41; and a memory 42 communicatively connected to the at least one processor 41, with one processor 41 being exemplified in fig. 26. The memory 42 stores instructions executable by the at least one processor 41 to enable the at least one processor 41 to perform the measurement method of any one of the first aspects. The processor 41 and the memory 42 may be connected by a bus or other means, and fig. 26 illustrates the connection by a bus as an example.

The memory 42, which is a non-volatile computer-readable storage medium, may be used to store non-volatile software programs, non-volatile computer-executable programs, and modules, such as program instructions/modules corresponding to the measurement methods in the embodiments of the present invention. The processor 41 implements the measurement method described in the above method embodiments by running non-volatile software programs, instructions, and modules stored in the memory 42.

The memory 42 may include a storage program area and a storage data area, wherein the storage program area may store an operating system, an application program required for at least one function; the storage data area may store data created according to the measurement method use, and the like. Further, the memory 42 may include high speed random access memory, and may also include non-volatile memory, such as at least one magnetic disk storage device, flash memory device, or other non-volatile solid state storage device. In some of these embodiments, memory 42 optionally includes memory located remotely from processor 41, and these remote memories may be connected to the measurement device via a network. Examples of such networks include, but are not limited to, the internet, intranets, local area networks, mobile communication networks, and combinations thereof.

The one or more modules are stored in the memory 42 and, when executed by the one or more processors 41, perform the measurement method of any of the method embodiments described above.

The product can execute the method provided by the embodiment of the invention, and has corresponding functional modules and beneficial effects of the execution method. For technical details that are not described in detail in this embodiment, reference may be made to the method provided in the embodiment of the present invention.

In a third aspect, the present invention provides a non-transitory computer-readable storage medium storing computer-executable instructions, which are executed by one or more processors, for example, to perform the method steps of the embodiment of the measurement method according to any one of the first aspect.

In a fourth aspect, embodiments of the present invention also provide a computer program product, including a computer program stored on a non-volatile computer-readable storage medium, the computer program including program instructions that, when executed by a computer, cause the computer to perform the measurement method in any of the above method embodiments, for example, to perform the method steps of an embodiment of the measurement method in any of the first aspects.

It should be noted that the above-described device embodiments are merely illustrative, where the units described as separate parts may or may not be physically separate, and the parts displayed as units may or may not be physical units, may be located in one place, or may be distributed on multiple network units. Some or all of the modules may be selected according to actual needs to achieve the purpose of the solution of the present embodiment.

Through the above description of the embodiments, those skilled in the art will clearly understand that each embodiment can be implemented by software plus a general hardware platform, and certainly can also be implemented by hardware. Based on such understanding, the above technical solutions substantially or otherwise contributing to the related art may be embodied in the form of a software product, which may be stored in a computer-readable storage medium, such as ROM/RAM, magnetic disk, optical disk, etc., and includes a plurality of instructions for executing the method according to each embodiment or some parts of the embodiments by at least one computer device (which may be a personal computer, a server, or a network device, etc.).

Finally, it should be noted that: the above examples are only intended to illustrate the technical solution of the present invention, but not to limit it; within the idea of the invention, also technical features in the above embodiments or in different embodiments may be combined, steps may be implemented in any order, and there are many other variations of the different aspects of the invention as described above, which are not provided in detail for the sake of brevity; although the present invention has been described in detail with reference to the foregoing embodiments, it will be understood by those of ordinary skill in the art that: the technical solutions described in the foregoing embodiments may still be modified, or some technical features may be equivalently replaced; and the modifications or the substitutions do not make the essence of the corresponding technical solutions depart from the scope of the technical solutions of the embodiments of the present invention.

Claims

1. A vertical deviation angle measuring method is characterized by being used for measuring a vertical deviation angle of a transmitting and reflecting surface arranged in a piece to be measured relative to a reference surface of the piece to be measured, wherein the transmitting and reflecting surface comprises a first transmitting and reflecting surface and a second transmitting and reflecting surface which are parallel to each other, and the reference surface comprises a first surface and a second surface which are parallel to each other; the measuring method comprises the following steps:

providing an incident beam;

controlling the incident beam to be incident into the to-be-detected piece from the reference surface at a preset incident angle, so that the incident beam is reflected by the first transmitting and reflecting surface and the second transmitting and reflecting surface to form a first reflected wave and a second reflected wave; the incident beam is incident into the piece to be tested from the first surface to generate a first beam; the first wave beam is transmitted to the first transmitting and reflecting surface in the piece to be detected and is reflected by the first transmitting and reflecting surface to form a first reflected wave; the first wave beam transmitted by the first transmission and reflection surface is transmitted to the second surface in the piece to be tested and is reflected by the second surface to form a second wave beam, and the second wave beam is transmitted to the second transmission and reflection surface in the piece to be tested and is reflected by the second transmission and reflection surface to form a second reflected wave;

acquiring a first incident angle at which the first reflected wave propagates to the reference surface and a second incident angle at which the second reflected wave propagates to the reference surface;

and obtaining the vertical deviation angle according to the first incidence angle and the second incidence angle.

2. The measuring method according to claim 1,

the acquiring a first incident angle at which the first reflected wave propagates to the reference surface and a second incident angle at which the second reflected wave propagates to the reference surface includes:

acquiring a first emergence angle corresponding to the first emergence wave and a second emergence angle corresponding to the second emergence wave;

and obtaining the first incidence angle and the second incidence angle according to the first emergence angle and the second emergence angle.

3. The measuring method according to claim 1,

acquiring a first emergence angle corresponding to the first emergence wave, and taking 90 degrees as a second emergence angle;

obtaining the first incidence angle and the second incidence angle according to the first emergence angle and the second emergence angle;

alternatively, the first and second electrodes may be,

the second reflected wave exits through the reference surface to form a second exiting wave, and the first reflected wave does not just totally reflect at the reference surface, and the obtaining a first incident angle at which the first reflected wave propagates to the reference surface and a second incident angle at which the second reflected wave propagates to the reference surface includes:

acquiring a second emergence angle corresponding to the second emergence wave, and taking 90 degrees as a first emergence angle;

4. The measurement method of claim 1, wherein the deriving the vertical deviation angle from the first and second incident angles comprises:

obtaining an included angle between the transmission reflecting surface and the reference surface according to the first incident angle and the second incident angle;

and obtaining the vertical deviation angle according to the included angle between the transmission reflecting surface and the reference surface.

5. The method of claim 4, wherein the obtaining the angle between the transreflective surface and the reference surface according to the first incident angle and the second incident angle comprises:

establishing a spatial rectangular coordinate system, wherein the spatial rectangular coordinate system comprises a first coordinate axis, a second coordinate axis and a third coordinate axis which are perpendicular to each other, the incident beam is perpendicular to the first coordinate axis, and the reference surface is perpendicular to the third coordinate axis;

establishing an equation set by taking a first direction cosine and a second direction cosine of the direction of the first beam in the space rectangular coordinate system, an included angle between the transmission reflecting surface and the reference surface as unknown quantities, and taking the first incident angle, the second incident angle and an included angle between an intersection line and the second coordinate axis as known quantities; the cosine of the first direction is the cosine of an included angle between the direction of the first beam and the second coordinate axis, and the cosine of the second direction is the cosine of an included angle between the direction of the first beam and the third coordinate axis; the intersection line is the intersection line of the transmission and reflection surface and the reference surface;

and solving the equation set to obtain the vertical deviation angle.

6. The measurement method of claim 5, wherein solving the system of equations to obtain the vertical deviation angle comprises:

solving the equation set to obtain the cosine of an included angle between the transmission reflecting surface and the reference surface;

obtaining the vertical deviation angle according to the cosine of an included angle between the transmission reflecting surface and the reference surface;

wherein the system of equations is:

；

wherein the content of the first and second substances,

for the first angle of incidence to be said,

is the second angle of incidence and is,

is the cosine of the first direction and,

is the cosine of the second direction and,

is the cosine of the angle between the intersection line and the X axis.

7. A measuring method according to claim 2 or 3, characterized in that the first outgoing wave is a first outgoing light and the second outgoing wave is a second outgoing light; a projection plane is arranged in the emergent direction of the first emergent light and the second emergent light, and the projection plane is vertical to the reference surface;

the obtaining of the first exit angle corresponding to the first exit wave includes:

acquiring a first distance between a first light spot generated by the irradiation of the first emergent light on the projection plane and the extension surface of the reference surface and a second distance between the emergent point of the first emergent light and the projection plane;

obtaining the first emergence angle according to the first distance and the second distance;

the obtaining of the second exit angle corresponding to the second exit wave includes:

acquiring a third distance between a second light spot generated by the second emergent light irradiating on the projection plane and the extension surface of the reference surface and a fourth distance between the emergent point of the second emergent light and the projection plane;

and obtaining the second emergence angle according to the third distance and the fourth distance.

8. The measurement method according to any one of claims 1 to 6, characterized in that the measurement method further comprises:

the preset incident angle is obtained by the following formula

：

；

Wherein the content of the first and second substances,

is the distance between the first surface and the second surface,

is the beam radius of the incident beam,

is the refractive index of the piece to be measured.

9. An electronic device, comprising:

at least one processor;

and a memory communicatively coupled to the at least one processor;

wherein the memory stores instructions executable by the at least one processor to enable the at least one processor to perform the measurement method of any one of claims 1-8.

10. A computer-readable storage medium having stored thereon computer-executable instructions for causing a computer to perform the measurement method of any one of claims 1-8.