CN115015947A

CN115015947A - Scanning device

Info

Publication number: CN115015947A
Application number: CN202110248474.8A
Authority: CN
Inventors: 叶良琛; 向少卿
Original assignee: Hesai Technology Co Ltd
Current assignee: Hesai Technology Co Ltd
Priority date: 2021-03-05
Filing date: 2021-03-05
Publication date: 2022-09-06

Abstract

A scanning device, comprising: a magnetic device and a support assembly, wherein the support assembly comprises: the outer frame at least comprises 1 pair of power edges which are parallel to each other and are in a straight line shape; the magnetic device comprises at least 1 magnet group, the magnet group comprises 2 convex polyhedral magnets respectively corresponding to the power edge, and the surface of the magnet facing the outer frame is parallel to the power edge; the outer frame is positioned in the interval between the 2 magnets, and in the direction perpendicular to the plane of the outer frame, the outer frame is positioned between the upper surface and the lower surface of each magnet. The magnet in the magnetic device can be compactly matched with the outer frame without being arranged in a bent shape, so that the magnet with a regular shape can be adopted; and a more uniform magnetic field can be obtained without arranging a plurality of magnets on the same side of the outer frame. Therefore, the scanning device is easier to produce, lower in cost and lower in installation difficulty.

Description

Scanning device

Technical Field

The invention relates to the field of laser detection, in particular to a scanning device.

Background

Laser radar is a range finding sensor commonly used, has characteristics such as detection range is far away, resolution ratio is high, receive environmental disturbance little, and the wide application is in fields such as intelligent robot, unmanned aerial vehicle, unmanned driving. In recent years, the automatic driving technology has been rapidly developed, and the laser radar has become indispensable as a core sensor for distance sensing.

In the scanning type laser radar, a light beam is reflected by a reflection surface of a scanning device, thereby forming a light beam for scanning. For a laser radar system for long-distance detection, a scanning device for receiving an echo signal is required to have a large optical aperture.

However, as the aperture of the scanning device increases, the scanning device inevitably occupies a larger volume, and the production cost is increased in order to make the lidar compact.

Disclosure of Invention

The invention provides a scanning device to reduce the production cost.

To solve the above problems, the present invention provides a scanning device, comprising: the magnetic device is used for generating a single-direction magnetic field, and the supporting component is used for arranging a coil and a scanning mirror; wherein the support assembly comprises: the outer frame is at least provided with 1 pair of mutually parallel power edges, and the power edges are straight edges; the magnetic device comprises at least 1 magnet group, the magnet group comprises 2 magnets of a convex polyhedron, and the 2 magnets in the same magnet group are arranged at intervals along a first direction, wherein the first direction is vertical to the extension direction of the power edge, and the surface of the magnet facing the outer frame is parallel to the power edge; the outer frame is positioned in the interval between the 2 magnets, and in the direction perpendicular to the plane of the outer frame, the outer frame is positioned between the upper surface and the lower surface of each magnet.

Optionally, the support assembly further includes: the 2 anchor areas are positioned on two sides of the outer frame along a second direction, and the second direction is not orthogonal to the extending direction of the power edge; 2 first twist beams, 2 first twist beams connect different anchor areas and the frame respectively.

Optionally, the 2 first torsion beams are identical in shape.

Optionally, the first torsion beam is at least one of a serpentine beam, a folded beam, or a linear beam.

Optionally, the supporting assembly further comprises: the inner frame is positioned inside the outer frame; and the 2 second torsion beams are positioned on two sides of the inner frame along a third direction so as to connect the inner frame and the outer frame, and the third direction is intersected with the second direction.

Optionally, 2 of the second torsion beams are identical in shape.

Optionally, the second torsion beam is at least one of a serpentine beam, a folded beam, or a linear beam.

Optionally, the shape of the second twist beam is different from the shape of the first twist beam.

Optionally, the power edges are connected by at least one connecting edge to reduce the length of the outer frame between the first torsion beam and the second torsion beam.

Optionally, the connecting edge is a straight line edge or a curved line edge.

Optionally, the length of the power side is greater than the length of any of the connecting sides.

Optionally, along the extending direction of the power edge, the length of each magnet is greater than that of the power edge.

Optionally, in a cross section parallel to the plane of the outer frame, a pair of sides of the cross section of the magnet is parallel to the extending direction of the power side.

Optionally, the cross section of the magnet is rectangular or right trapezoid.

Optionally, the shape of the outer frame is a polygon.

Optionally, the shape of the outer frame is a point-symmetric polygon.

Optionally, the method further includes: one or more coils.

Optionally, the number of the coils is multiple; the plurality of coils are sequentially stacked on the outer frame along the direction vertical to the plane of the outer frame; or, the plurality of coils are arranged in a way of surrounding in sequence in a plane parallel to the outer frame.

Compared with the prior art, the technical scheme of the invention has the following advantages:

in the scanning device of the invention, the outer frame positioned between 2 magnets in the same magnet group has at least 1 pair of power sides which are parallel to each other and are straight sides, and the surface of the magnet facing the outer frame is parallel to the power sides; in addition, the outer frame is positioned between the upper and lower surfaces of each of the magnets in a direction perpendicular to the plane of the outer frame. Therefore, the magnetic device in the technical scheme can be compactly matched with the outer frame without being arranged in a bent shape, so that a magnet with a regular shape can be adopted; and a more uniform magnetic field can be obtained without arranging a plurality of magnets on the same side of the outer frame. Therefore, the scanning device is easier to produce, lower in cost and lower in installation difficulty.

In an alternative of the invention, the power edges are connected with each other by at least one connecting edge. The power sides are connected through the connecting sides to form the outer frame, so that the lengths of the sides of the outer frame except the power sides can be reduced as much as possible according to actual needs, and the load of the outer frame during vibration can be effectively reduced; on the other hand, along the extension direction of the power edge, the length of the magnet is greater than that of the power edge, so that the driving force of the outer frame during vibration can be effectively improved; therefore, the load is reduced, the driving force is improved, and the driving efficiency is improved.

In an alternative aspect of the invention, the length of the power edge is greater than the length of any of the connecting edges. Through the increase the length of power limit, reduce the length of connecting the limit, when can increase the lorentz force that the coil received, reduce the frame load when twistinging, increase torsion simultaneously, reduce the load, can reduce the driven degree of difficulty of frame, improve frame drive speed and frame vibration speed.

In an alternative aspect of the present invention, the first torsion beam connecting the outer frame and the anchor region may be a serpentine beam or a folded beam, and the second torsion beam connecting the outer frame and the inner frame may also be a serpentine beam or a folded beam. The adoption of the snake-shaped beam or the folded beam can increase the physical length of the torsion beam, so as to reduce the rigidity of the torsion beam, and further enable the scanning device to have a larger rotation angle.

Drawings

FIG. 1 is a schematic top view of a scanning device;

FIG. 2 is a schematic top view of a scanning device according to a first embodiment of the present invention;

FIG. 3 is a schematic diagram of a side view of the scanning device in FIG. 2 along direction A;

FIG. 4 is a cross-sectional view of the embodiment of the scanning device shown in FIG. 2 taken along line A1A 2;

FIG. 5 is a schematic top view of a scanning device according to a second embodiment of the present invention;

FIG. 6 is a schematic top view of a scanning device according to a third embodiment of the present invention;

FIG. 7 is a schematic top view of a scanning device according to a fourth embodiment of the present invention;

FIG. 8 is a schematic top view of a scanning device according to a fifth embodiment of the present invention;

FIG. 9 is a schematic top view of a scanning device according to a sixth embodiment of the present invention;

FIG. 10 is a schematic top view of a scanning device according to a seventh embodiment of the present invention;

FIG. 11 is a cross-sectional view of the embodiment of the scanning device shown in FIG. 10 taken along line B1B 2;

FIG. 12 is a schematic top view of a scanning device according to an eighth embodiment of the present invention;

FIG. 13 is a schematic top view of a scanning device in accordance with a ninth embodiment of the present invention;

fig. 14 is a schematic top view of a scanning device according to a tenth embodiment of the present invention.

Detailed Description

It is known from the background art that the scanning device in the prior art has a problem of high cost. The source of the problem of excessive cost is firstly analyzed by combining the structure of the scanning device in the prior art.

The outer frame of the support component in the existing scanning device is usually in a pattern of a circle, an ellipse, a square and the like, and is difficult to be compactly matched with a magnet in a conventional shape for use; in order to ensure compact structure and improve the degree of fitting, irregular-shaped magnets are usually used, so that the surface of the magnet facing the outer frame is adapted to the shape of the outer frame, and therefore, the magnet often has a curved surface (as shown by the magnet 10 in fig. 1), for example, the magnet is arranged in an L shape and the surface close to the outer frame is a curved surface. The process difficulty of bending the outer surface of the magnet is relatively high, and the yield is low.

To solve the above technical problem, the present invention provides a scanning device, including: the magnetic device is used for generating a single pointing magnetic field, and the support assembly is used for arranging a coil and a scanning mirror; wherein the support assembly comprises: the outer frame at least comprises 1 pair of power edges which are parallel to each other, and the power edges are linear edges; the magnetic device comprises at least 1 magnet group, the magnet group comprises 2 magnets of a convex polyhedron, the 2 magnets in the magnet group are arranged at intervals along a first direction, the first direction is vertical to the extension direction of the power edge, and the surface of the magnet facing the outer frame is parallel to the power edge; the outer frame is positioned in the interval between the 2 magnets, and in the direction perpendicular to the plane of the outer frame, the outer frame is positioned between the upper surface and the lower surface of each magnet.

In the technical scheme of the invention, the magnet in the magnetic device can be compactly matched with the outer frame without being arranged in a bent shape, so that the magnet with a regular shape can be adopted; and a more uniform magnetic field can be obtained without arranging a plurality of magnets on the same side of the outer frame. Therefore, the scanning device is easier to produce, lower in cost and lower in installation difficulty.

In order to make the aforementioned objects, features and advantages of the present invention comprehensible, embodiments accompanied with figures are described in detail below.

Referring to fig. 2 to 4, there are shown schematic structural diagrams of an embodiment of a scanning device according to the present invention; FIG. 2 is a schematic top view of an embodiment of the scanning device; FIG. 3 is a schematic diagram of a side view of the embodiment of the scanning device shown in FIG. 2 along direction A; fig. 4 is a schematic cross-sectional view of the embodiment of the scanning device shown in fig. 2 along line A1a 2.

The scanning device includes: a magnetic device (not shown) for generating a single pointing magnetic field, and a support assembly (not shown) for positioning the coils and the scan mirror.

Wherein the support assembly comprises: the outer frame 110, the said outer frame 110 has 1 pairs of

power sides

111a and 111b parallel to each other at least, the said

power side

111a and 111b is a straight line side; the magnetic device comprises at least 1 magnet group, the magnet group comprises 2

magnets

121a and 121b of a convex polyhedron, the 2

magnets

121a and 121b in the same magnet group are arranged at intervals along a first direction m, wherein the first direction m is perpendicular to the extending direction n of the power edges 111a and 111b, and the surfaces of the

magnets

121a and 121b facing the outer frame 110 are parallel to the power edges 111a and 111 b.

The frame 110 is located in the space between the 2

magnets

121a and 121b, and the frame 110 is located between the upper and lower surfaces of each of the

magnets

121a and 121b in a direction z perpendicular to the plane of the frame 110.

The frame 110, which is located between the 2

magnets

121a and 121b of the same magnet group, has at least 1 pair of

power sides

111a and 111b that are parallel to each other and are straight sides, and the surfaces of the

magnets

121a and 121b facing the frame 110 are parallel to the

power sides

111a and 111 b; further, the outer frame 110 is located at a position between the upper and lower surfaces of the

respective magnets

121a and 121b in a direction z perpendicular to the plane of the outer frame 110. Therefore, the

magnetic devices

121a and 121b do not need to be provided in a curved shape, and can be compactly matched with the outer frame 110, so that the

magnets

121a and 121b with regular shapes can be adopted; and a more uniform magnetic field can be obtained without providing a plurality of

magnets

121a and 121b on the same side of the outer frame 110. Therefore, the scanning device is easier to produce, lower in cost and lower in installation difficulty.

The support assembly is adapted to position the coil 120 and the scan mirror 130. Specifically, the frame 110 of the support assembly is used to fix the coil 120, thereby providing a directional torque for the vibration of the scan mirror.

A pair of

power sides

111a and 111b of the outer frame 110 correspond to the

magnets

121a and 121b, respectively, and the

power sides

111a and 111b are linear sides, that is, the

power sides

111a and 111b are elongated.

In some embodiments of the present invention, the

powered sides

111a and 111b are connected by at least one connecting

side

117a, 117b, and 117 c. Specifically, as shown in fig. 2, portions of the frame 110 that do not correspond to the

magnets

121a and 121b are provided as multi-stage linear connecting

sides

117a, 117b, and 117c, so that the portion of the frame 110 between the first torsion beam 113b and the second torsion beam 115a is 3-stage linear connecting sides. Specifically, the shape of the outer frame 110 is preferably a regular octagon.

In some embodiments of the present invention, the outer frame 110 is polygonal. Specifically, the shape of the outer frame is a point-symmetric polygon. The pair of power sides parallel to each other is centrosymmetric with respect to the center of symmetry of the outer frame 110.

As shown in fig. 2, in the present embodiment, the outer frame 110 has an octagonal shape. Compared with the oval frame, the octagonal frame 110 can reduce the distortion of the scanning pattern and improve the scanning performance. In addition, in other embodiments of the present invention, the shape of the outer frame may also be other shapes, such as a diamond shape (as shown in the outer frame 210 of the scanning device embodiment in fig. 5) or a square shape.

As shown in fig. 2, in some embodiments of the present invention, the support assembly further comprises: 2

anchoring areas

112a and 112b, wherein the 2

anchoring areas

112a and 112b are located at two sides of the outer frame 110 along a second direction x, and the second direction x is not orthogonal (i.e. oblique) to the extending direction n of the

dynamic sides

111a and 111 b; 2

first torsion beams

113a and 113b, the 2

first torsion beams

113a and 113b connecting

different anchor areas

112a and 112b and the outer frame 110, respectively.

The

anchor areas

112a and 112b are connected to the housing 110 and can be fastened to the housing of the scanning device by fasteners. In this embodiment, the

first torsion beams

113a and 113b respectively connecting the

anchor areas

112a and 112b and the outer frame 110 are slow axes, so that the outer frame 110 can vibrate with the extending direction of the

first torsion beams

113a and 113b as an axis. Wherein, the extending direction of the

first torsion beams

113a and 113b refers to a direction pointing from one end of the

first torsion beams

113a and 113b to the other end.

In some embodiments of the present invention, 2 of the

first torsion beams

113a and 113b have the same shape. Making the 2

first torsion beams

113a and 113b have the same shape can ensure that the 2

first torsion beams

113a and 113b can provide balanced torsion for the vibration of the outer frame 110.

Specifically, as shown in fig. 2, in the present embodiment, the

first torsion beams

113a and 113b are shaped as linear beams. In other embodiments of the present invention, the first torsion beam may be shaped as a non-linear beam, such as a serpentine beam or a folded beam (as shown in fig. 6 for the

first torsion beams

313a and 313b of the scanning device embodiment). The first torsion shaft is arranged to be a non-linear beam, so that the actual length of the first torsion beam can be prolonged to reduce the rigidity of the torsion beam, and the scanning mirror can obtain a larger rotation angle.

With continued reference to fig. 2, in some embodiments of the invention, the support assembly further comprises: an inner frame 114, the inner frame 114 being positioned inside the outer frame 110; and 2

second torsion beams

115a and 115b, the 2

second torsion beams

115a and 115b being positioned at both sides of the inner frame 114 along a third direction y to connect the inner frame 114 and the outer frame 110, the third direction y intersecting the second direction x.

The inner frame 114 is used to mount a scanning mirror 130 and coils (not shown) for reflecting light beams. In this embodiment, the

second torsion beams

115a and 115b connecting the inner frame 114 and the outer frame 110 are fast axes, so that the inner frame 114 can vibrate about the extending direction of the

second torsion beams

115a and 115 b. Wherein, the extending direction of the

second torsion beams

115a and 115b means a direction pointing from one end of the

second torsion beams

115a and 115b to the other end.

As shown in fig. 4, the scan mirror 130 is disposed on the inner frame 114 of the support assembly and is overlapped with the inner frame 114. The material of the scan mirror 130 may be glass or metal. When the scanning mirror 130 is made of metal, the metal surface may be polished to serve as a mirror surface; when the material of the scanning mirror 130 is glass, quartz, sapphire, silicon carbide, or the like, the surface of the scanning mirror may be coated to serve as a mirror surface. This arrangement enables the manufacture of a large size scan mirror, for example, the scan mirror 130 can be sized in the range of 10mm to 20mm, and even the scan mirror 130 can be sized larger than 20 mm. The scanning mirror 130 may be fixed to the inner frame 114 by welding, bonding, or the like, so that the scanning device may be manufactured at low cost and in a large batch.

It should be noted that the scan mirror may be integrally formed on the inner frame in an integrated manner, and may be assembled on the inner frame as a separate component.

In some embodiments of the present invention, the mirror surface of the scan mirror 130 may be circular, and the inner frame 114 may be circular to match the shape of the scan mirror 130. In other embodiments of the present invention, the shape of the scanning mirror may also be square, rectangle, triangle, ellipse, or other polygon, etc.; the shape of the inner frame can also be square, rectangle, triangle, ellipse or rhombus and other shapes which are matched with the mirror surface of the scanning mirror.

In some embodiments of the present invention, the 2

second torsion beams

115a and 115b have the same shape, so as to ensure that the 2

second torsion beams

115a and 115b can provide balanced torque for the vibration of the inner frame 114. Specifically, as shown in fig. 2, in the present embodiment, the

second torsion beams

115a and 115b are shaped as linear beams. In other embodiments of the present invention, the second torsion beam may also be shaped as a non-linear beam, such as a serpentine beam (as shown by

second torsion beams

315a and 315b for the scanning device embodiment of FIG. 6 and

second torsion beams

415a and 415b for the scanning device embodiment of FIG. 7) or a folded beam (as shown by

second torsion beams

515a and 515b for the scanning device embodiment of FIG. 8). The first torsion shaft is arranged to be a non-linear beam, so that the actual length of the first torsion beam can be prolonged to reduce the rigidity of the torsion beam, and the scanning mirror can obtain a larger rotation angle.

In this embodiment, the

second torsion beams

115a and 115b have the same shape as the

first torsion beams

115a and 115b, and are linear beams. In another embodiment of the present invention, the second torsion beam has a shape different from that of the first torsion beam, that is, 2 of the second torsion beams have the same shape, and 2 of the first torsion beams have the same shape, but the second torsion beam has a shape different from that of the first torsion beam.

With continued reference to fig. 2, the magnetic device includes at least 1 magnet set including 2

magnets

121a and 121b to generate a single directed magnetic field. The shape of the magnet is a convex polyhedron.

The

magnets

121a and 121b are generally permanent magnets. The two

magnets

121a and 121b of the same magnet group are located on two sides m of the outer frame 110 along the first direction, and have opposite magnetic poles in the direction z perpendicular to the plane of the outer frame 110 and in the direction parallel to the plane of the outer frame 110, so that the two

magnets

121a and 121b of the same magnet group can generate a single-pointing magnetic field in the plane of the outer frame 110.

The

magnets

121a and 121b correspond to the

power sides

111a and 111b of the outer frame 110, respectively. Specifically, the

magnets

121a and 121b are respectively disposed outside the power edges 111a and 111b, that is, the directions of the power edges 111a and 111b pointing to the

magnets

121a and 121b are respectively consistent with the directions of the inside of the frame pointing to the outside of the frame.

The surfaces of the

magnets

121a and 121b facing the housing are parallel to the power edges 111a and 111 b. Therefore, in a cross section parallel to the plane of the outer frame 110, in the cross section of the

magnets

121a and 121b, a side close to the outer frame 110 is parallel to the extending direction n of the

power sides

111a and 111 b.

In addition, in some embodiments of the present invention, in a cross section parallel to a plane of the outer frame 110, a pair of sides of the cross section of the

magnets

121a and 121b are parallel to an extending direction of the

power sides

111a and 111 b. As shown in fig. 2, in the present embodiment, the

magnets

121a and 121b have a rectangular cross-sectional shape.

It should be noted that, in order to make the housing of the scanning device smaller and more compact, as shown in the

magnets

621a and 621b of the scanning device embodiment in fig. 9, the cross-sectional shapes of the

magnets

121a and 121b may also be set to be right trapezoid.

As shown in fig. 2, the

magnets

121a and 121b are disposed at diagonally opposite corners of the octagonal housing 110 and are disposed adjacent to two

power edges

111a and 111b of the housing 110. The

magnets

121a and 121b are shown as being arranged at 45 deg. (as shown in fig. 2, the

magnets

121a and 121b are arranged in the m-direction at an angle of 45 deg. to the extending direction x of the

first torsion beams

113a and 113 b). In other embodiments of the present invention, the distribution of the magnets may be at other angles according to the shape change of the outer frame. In other embodiments of the present invention, the magnets may also be symmetrically disposed at opposite positions of the outer frame according to the positions of the first torsion beam and the second torsion beam.

Since the power edges 111a and 111b are linear, the

magnets

121a and 121b are regular in shape, i.e., non-curved. The

magnets

121a and 121b are less difficult to process, and the

magnets

121a and 121b are less costly.

With continuing reference to fig. 2-4, the scanning device further comprises: one or more coils 120.

Since the housing 110 is located in the magnetic field of the single direction generated by the magnetic device, when the driving current is input to the coil 120, the coil 120 is subjected to the lorentz force in the magnetic field, and the coil 120 is fixed to the housing 110, so that the housing 110 vibrates about the extending direction of the

first torsion beams

113a and 113 b. And the outer frame 110 is connected to the inner frame 114 by the

second torsion beams

115a and 115b, and the scanning mirror 130 is fixed to the inner frame 114, so that after the outer frame 110 vibrates, the outer frame 110 can drive the inner frame 114 by the

second torsion beams

115a and 115b, so that the scanning mirror 130 vibrates about the extending direction of the

first torsion beams

113a and 113 b.

On the other hand, the inner frame 114 is also provided with coils 120, similar to the way the outer frame 110 vibrates. When the coil on the inner frame is energized with a driving current, the inner frame 114 also generates a vibration about the extending direction of the

second torsion beams

115a and 115b under the action of the lorentz force applied to the coil, and the mirror 130 generates a vibration about the extending direction of the

second torsion beams

115a and 115 b.

It should be noted that, because the mass of the outer frame 110 is large, the vibration frequency of the outer frame 110 is low; the inner frame can still maintain a higher frequency, so that a larger frequency difference exists between the vibration of the mirror 130 about the extension direction of the

first torsion beams

113a and 113b and the vibration about the extension direction of the

second torsion beams

115a and 115b, thereby enabling the scanning device to scan.

It should be noted that, in order to ensure that the force applied to the outer frame 110 and the inner frame 114 in the unidirectional magnetic field generated by the magnetic device is not disturbed, the material of the supporting component is nonmagnetic metal, such as copper. In addition, in order to ensure the reciprocating vibration of the outer frame 110 and the inner frame 114, the driving current is an alternating current.

As shown in fig. 3 and 4, the number of the coils 120 is two, and the coils are respectively stacked on the upper and lower surfaces of the housing 110 in a direction z perpendicular to the plane of the housing 110, and are overlapped with the housing 110. In other embodiments of the present invention, the number of the coils may also be 3, 4, 5, or more, and the plurality of coils may also be stacked on the outer frame in sequence. And the number of the upper and lower surfaces of the outer frame may be unequal, for example, N coils are sequentially stacked on one surface of the outer frame, and M coils are sequentially stacked on the other surface of the outer frame, where N, M are integers greater than or equal to 1.

However, the way of stacking the coils on the outer frame along the direction perpendicular to the plane of the outer frame is only an example, and in other embodiments of the present invention, the coils may be stacked left and right in a plane parallel to the outer frame, that is, the coils may also be sequentially surrounded. The coil and the outer frame no longer overlap. (as shown in the arrangement of the coil 720 and the outer frame 710 of the embodiment of the scanning apparatus in FIGS. 10 and 11, wherein FIG. 11 is a cross-sectional view along line B1B2 of the embodiment of the scanning apparatus in FIG. 10).

In the foregoing embodiment, the shape of the outer frame is a regular polygon. However, this is merely an example, and in other embodiments of the present invention, the shape of the outer frame may also be an irregular polygon.

Referring to fig. 12, a schematic top view of a scanning device according to another embodiment of the present invention is shown.

The present embodiment is the same as the previous embodiments, and the description of the present invention is omitted. The difference between this embodiment and the previous embodiment is that, in this embodiment, the outer frame 810 is an irregular polygon.

As shown in fig. 12, in some embodiments of the present invention, the length of the

magnets

821a and 821b is greater than the length of the power edges 811a and 811b along the extending direction n of the power edges 811a and 811 b. The scanning device is based on the fact that an energized coil is subjected to lorentz forces in a magnetic field to effect vibration. According to the lorentz force formula F ═ BIL, where B is the magnetic field strength, I is the energized coil current, and L is the length of the energized coil in the magnetic field, it can be seen that the greater the length of the power side corresponding to the magnet, the greater the lorentz force experienced by the outer frame, the greater the torque force distributed to the respective torsion beams. Therefore, by increasing the length of the power sides 811a and 811b as much as possible, the lorentz force applied to the outer frame 810 can be effectively increased.

In another aspect of some embodiments of the present invention, the powered sides 811a and 811b are coupled by at least one

coupling side

817a, 817b, 817c, 817 d. The connecting

sides

817a, 817b, 817c, 817d connecting the power sides 811a and 811b in the outer frame 810 are loads of the vibration of the outer frame, and the smaller the load is, the easier the vibration of the outer frame is when the lorentz force applied to the outer frame is constant. Therefore, the purpose of reducing the length of the outer frame 810 between the first torsion beam 813b and the second torsion beam 815a can be achieved by reasonably setting the connecting

edges

817a, 817b, 817c and 817d, and the effect of reducing the vibration load of the outer frame is further achieved.

In this embodiment, the connecting

sides

817a, 817b, 817c and 817d are straight sides. In other embodiments of the present invention, the connecting edge may also be a curved edge. Specifically, as shown in fig. 12, the partial outer frame 810 which does not correspond to the

magnets

821a and 821b is provided with a plurality of straight connecting

sides

817a, 817b, 817c, 817d, that is, the partial outer frame 810 between the first torsion beam 813b and the second torsion beam 815a is provided with a 4-straight connecting side. The connecting

sides

817a, 817b, 817c, and 817d are loads to which the outer frame 810 vibrates, and thus the length of the outer frame between the first torsion beam 813b and the second torsion beam 815a can be reduced by appropriately setting the lengths and shapes of the connecting

sides

817a, 817b, 817c, and 817 d. In the embodiment of the scanning apparatus shown in fig. 5, the shape of the outer frame 210 is set to be a diamond shape, so that the length of the connecting edge can be reduced as much as possible to reduce the load of the vibration of the outer frame 210.

It should be noted that, in order to increase the driving force of the outer frame 810 as much as possible and reduce the load of the vibration of the outer frame 810 as much as possible, in some embodiments of the present invention, the lengths of the driving sides 811a and 811b are greater than the lengths of any of the connecting

sides

817a, 817b, 817c, and 817 d.

Further, the case 817 is provided as an irregular polygon to increase the driving force of the outer frame 810 and reduce the load of the vibration of the outer frame 810, which is only an example. In other embodiments of the present invention, the outer frame may be set to be a reasonable regular polygon to achieve the purpose. In the embodiment of the scanning apparatus shown in fig. 13, the shape of the outer frame 910 is octagonal, and the octagonal outer frame 910 is axisymmetric with the extending directions of the

first torsion beams

913a and 913b and the

second torsion beams

915a and 915b as symmetry axes, respectively. In addition, the

power sides

911a and 911b of the octagonal frame 910 are extended to increase the driving force. The shape of the outer frame 817 can be considered as a diamond with corners truncated in the direction of the diagonal perpendicular.

In addition, the driving force of the frame vibration can be increased not only by extending the length of the power edge, but also by increasing the number of magnet groups in the magnetic device to increase the magnetic field intensity and increase the number of power edges. As shown in fig. 14, the magnetic device of the scanning apparatus includes 2 sets of magnet groups, a first magnet

group including magnets

1021a and 1021b and a second magnet

group including magnets

1022a and 1022b, respectively, so that the sides of the outer frame opposing the

magnets

1021a and 1021b in the first magnet group are first power sides 1011a and 1011b, and the sides of the outer frame opposing the

magnets

1022a and 1022b in the second magnet group are

second power sides

1012a and 1012 b. The driving force for the frame 1010 with 2 power sides to vibrate tends to be greater; the length of the outer frame between the power edges is inevitably reduced due to the increase of the number of the power edges, and the vibration load of the outer frame is also reduced; in addition, according to the calculation formula of the lorentz force, the required current is smaller under the condition of generating the same driving force due to the increase of the magnetic field intensity, so that the current in the coil can be reduced and the energy consumption can be reduced by increasing the driving force by increasing the magnetic field intensity.

In summary, the outer frame between 2 magnets in the same magnet group has at least 1 pair of power sides which are parallel to each other and are straight sides, and the surface of the magnet facing the outer frame is parallel to the power sides; in addition, the outer frame is positioned between the upper and lower surfaces of each of the magnets in a direction perpendicular to the plane of the outer frame. Therefore, the magnetic device in the technical scheme can be compactly matched with the outer frame without being arranged in a bent shape, so that a magnet with a regular shape can be adopted; and a more uniform magnetic field can be obtained without arranging a plurality of magnets on the same side of the outer frame. Therefore, the scanning device is easier to produce, lower in cost and lower in installation difficulty. In an alternative of the invention, the power edges are connected with each other by at least one connecting edge. The connecting edges are connected with the power edges to form the outer frame, so that the lengths of the edges of the outer frame except the power edges can be reduced as much as possible according to actual needs, and the vibration load of the outer frame can be effectively reduced; on the other hand, along the extension direction of the power edge, the length of the magnet is greater than that of the power edge, so that the driving force of the vibration of the outer frame can be effectively improved; therefore, the reduction of load and the improvement of driving force are beneficial to the improvement of driving efficiency and the control of magnet cost.

Although the present invention is disclosed above, the present invention is not limited thereto. Various changes and modifications may be effected by one skilled in the art without departing from the spirit and scope of the invention, as defined in the appended claims.

Claims

1. A scanning device, comprising: the magnetic device is used for generating a single-direction magnetic field, and the supporting component is used for arranging a coil and a scanning mirror; wherein the content of the first and second substances,

the support assembly includes:

the outer frame is at least provided with 1 pair of mutually parallel power edges, and the power edges are straight edges;

the magnetic device comprises at least 1 magnet group, the magnet group comprises 2 magnets of a convex polyhedron, the 2 magnets in the same magnet group are arranged at intervals along a first direction, the first direction is vertical to the extending direction of the power edge, and the surface of the magnet facing the outer frame is parallel to the power edge;

the outer frame is positioned in the interval between the 2 magnets, and in the direction perpendicular to the plane of the outer frame, the outer frame is positioned between the upper surface and the lower surface of each magnet.

2. The scanning device of claim 1, wherein the support assembly further comprises:

the 2 anchor areas are positioned on two sides of the outer frame along a second direction, and the second direction is not orthogonal to the extending direction of the power edge;

2 first twist beams, 2 first twist beams connect different anchor areas and the frame respectively.

3. The scanning device of claim 2, wherein 2 of said first torsion beams are identical in shape.

4. The scanning device of claim 3, wherein the first torsion beam is at least one of a serpentine beam, a folded beam, or a linear beam.

5. The scanning device of claim 2, wherein the support assembly further comprises:

the inner frame is positioned inside the outer frame;

and the 2 second torsion beams are positioned on two sides of the inner frame along a third direction so as to connect the inner frame and the outer frame, and the third direction is intersected with the second direction.

6. The scanning device according to claim 5, wherein 2 of said second torsion beams are identical in shape.

7. A scanning device according to claim 6, wherein the second torsion beam is at least one of a serpentine beam, a folded beam or a linear beam.

8. The scanning device according to claim 5, wherein a shape of the second torsion beam is different from a shape of the first torsion beam.

9. The scanning device according to claim 5, wherein the powered edges are connected to each other by at least one connecting edge to reduce the length of the frame between the first torsion beam and the second torsion beam.

10. The scanning device according to claim 9, wherein the connecting edge is a straight edge or a curved edge.

11. The scanning device according to claim 9, wherein the length of said powered side is greater than the length of any of said connecting sides.

12. A scanning device according to any one of claims 1 or 9 to 11, wherein the length of the magnets, in the direction of extension of the powered side, is greater than the length of the powered side.

13. The scanning device according to claim 1, wherein a pair of sides of a cross section of the magnet in a cross section parallel to a plane in which the outer frame is located is parallel to an extending direction of the power side.

14. The scanning device according to claim 13, wherein the cross-section of the magnet has a rectangular or right-angled trapezoidal shape.

15. The scanning device as claimed in claim 1, wherein the outer frame has a polygonal shape.

16. The scanning device according to claim 15, wherein the shape of the outer frame is a point-symmetric polygon.

17. The scanning device of claim 1, further comprising: one or more coils.

18. The scanning device according to claim 17, characterized in that the number of the coils is plural;

the plurality of coils are sequentially stacked on the outer frame along the direction vertical to the plane of the outer frame; or, the plurality of coils are arranged in a way of surrounding in sequence in a plane parallel to the outer frame.