CN115014584A - Skin touch bionic system and preparation method thereof - Google Patents
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- CN115014584A CN115014584A CN202210627403.3A CN202210627403A CN115014584A CN 115014584 A CN115014584 A CN 115014584A CN 202210627403 A CN202210627403 A CN 202210627403A CN 115014584 A CN115014584 A CN 115014584A
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- 239000011664 nicotinic acid Substances 0.000 title claims abstract description 41
- 238000002360 preparation method Methods 0.000 title claims abstract description 16
- XLOMVQKBTHCTTD-UHFFFAOYSA-N Zinc monoxide Chemical compound [Zn]=O XLOMVQKBTHCTTD-UHFFFAOYSA-N 0.000 claims abstract description 95
- 239000011787 zinc oxide Substances 0.000 claims abstract description 29
- 239000000758 substrate Substances 0.000 claims abstract description 20
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 claims abstract description 17
- 230000002950 deficient Effects 0.000 claims abstract description 17
- 239000001301 oxygen Substances 0.000 claims abstract description 17
- 229910052760 oxygen Inorganic materials 0.000 claims abstract description 17
- 238000009832 plasma treatment Methods 0.000 claims abstract description 17
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 claims abstract description 13
- 239000001257 hydrogen Substances 0.000 claims abstract description 13
- 229910052739 hydrogen Inorganic materials 0.000 claims abstract description 13
- 238000003466 welding Methods 0.000 claims abstract description 10
- XOLBLPGZBRYERU-UHFFFAOYSA-N tin dioxide Chemical compound O=[Sn]=O XOLBLPGZBRYERU-UHFFFAOYSA-N 0.000 claims description 15
- 229910001887 tin oxide Inorganic materials 0.000 claims description 15
- 230000003592 biomimetic effect Effects 0.000 claims description 12
- 229910003437 indium oxide Inorganic materials 0.000 claims description 9
- PJXISJQVUVHSOJ-UHFFFAOYSA-N indium(iii) oxide Chemical compound [O-2].[O-2].[O-2].[In+3].[In+3] PJXISJQVUVHSOJ-UHFFFAOYSA-N 0.000 claims description 9
- 238000005530 etching Methods 0.000 claims description 6
- 239000007789 gas Substances 0.000 claims description 6
- 238000000034 method Methods 0.000 claims description 5
- 229920006289 polycarbonate film Polymers 0.000 claims description 5
- 229920006290 polyethylene naphthalate film Polymers 0.000 claims description 4
- -1 polyethylene terephthalate Polymers 0.000 claims description 4
- 229920000139 polyethylene terephthalate Polymers 0.000 claims description 4
- 239000005020 polyethylene terephthalate Substances 0.000 claims description 4
- 229920001721 polyimide Polymers 0.000 claims description 4
- 239000004642 Polyimide Substances 0.000 claims description 2
- 239000011112 polyethylene naphthalate Substances 0.000 claims description 2
- 238000004519 manufacturing process Methods 0.000 claims 1
- 239000002070 nanowire Substances 0.000 abstract description 9
- 230000007547 defect Effects 0.000 abstract description 4
- 238000005036 potential barrier Methods 0.000 abstract description 3
- 229910052782 aluminium Inorganic materials 0.000 description 15
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 15
- 210000000225 synapse Anatomy 0.000 description 8
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 3
- 210000004556 brain Anatomy 0.000 description 3
- 238000001755 magnetron sputter deposition Methods 0.000 description 3
- 210000005036 nerve Anatomy 0.000 description 3
- 230000000638 stimulation Effects 0.000 description 3
- 229910052719 titanium Inorganic materials 0.000 description 3
- 239000010936 titanium Substances 0.000 description 3
- 206010070834 Sensitisation Diseases 0.000 description 2
- 230000006399 behavior Effects 0.000 description 2
- 210000002569 neuron Anatomy 0.000 description 2
- 230000035807 sensation Effects 0.000 description 2
- 230000008313 sensitization Effects 0.000 description 2
- 206010052804 Drug tolerance Diseases 0.000 description 1
- 238000005452 bending Methods 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- 210000004204 blood vessel Anatomy 0.000 description 1
- 239000000969 carrier Substances 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000002650 habitual effect Effects 0.000 description 1
- 230000026781 habituation Effects 0.000 description 1
- 230000007774 longterm Effects 0.000 description 1
- 235000001968 nicotinic acid Nutrition 0.000 description 1
- 230000001473 noxious effect Effects 0.000 description 1
- 230000011514 reflex Effects 0.000 description 1
- 230000001235 sensitizing effect Effects 0.000 description 1
- 230000001953 sensory effect Effects 0.000 description 1
- 210000000697 sensory organ Anatomy 0.000 description 1
- 238000004088 simulation Methods 0.000 description 1
- 210000000278 spinal cord Anatomy 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
- 230000005062 synaptic transmission Effects 0.000 description 1
- 230000007704 transition Effects 0.000 description 1
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L1/00—Measuring force or stress, in general
- G01L1/005—Measuring force or stress, in general by electrical means and not provided for in G01L1/06 - G01L1/22
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B82—NANOTECHNOLOGY
- B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
- B82Y15/00—Nanotechnology for interacting, sensing or actuating, e.g. quantum dots as markers in protein assays or molecular motors
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B82—NANOTECHNOLOGY
- B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
- B82Y40/00—Manufacture or treatment of nanostructures
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Abstract
The invention discloses a skin touch bionic system and a preparation method thereof, wherein the system sequentially comprises a flexible substrate, a bottom electrode film, a zinc oxide nanowire layer, an anoxic zinc oxide film and a top electrode film from bottom to top; during preparation, hydrogen plasma treatment is firstly carried out on the surface of a flexible substrate, a bottom electrode film is formed on the flexible substrate after plasma treatment, a zinc oxide nanowire layer is fixedly connected on the bottom electrode film in a laser welding mode, finally, an oxygen-deficient zinc oxide film and a top electrode film are sequentially formed on the zinc oxide nanowire layer, and the bottom electrode film and the top electrode film are connected with a pulse power supply through electrode leads. The skin touch bionic system disclosed by the invention has excellent cycle retentivity and fatigue resistance; meanwhile, the preparation method can preset a defect layer at the interface, and reduces the contact potential barrier between the bottom electrode and the nanowire.
Description
Technical Field
The invention belongs to the field of micro-nano electronic devices, and particularly relates to a skin touch bionic system and a preparation method thereof.
Background
The skin is the largest sensory organ of the human body, and has abundant blood vessels and sensory nerves in the skin, and neurons can transmit received external stimulation information such as touch, pressure and the like from skin receptors to the spinal cord and the brain through synaptic transmission, and activate corresponding brain areas to cause sensation. In the case of harmless stimulation, even if stimulation is repeatedly given, the tactile reflex gradually weakens or disappears, and the habituation behavior of the sense of touch is exhibited. When a noxious stimulus is present, the skin feel is enhanced, again transmitting the sensation to the brain. Synapses are functionally connected parts among neurons and are key parts of information transmission, and at present, electronic skin touch bionics mainly rely on piezoresistive, piezoelectric, capacitive and friction sensors to convert mechanical signals of skin contact into electrical signals for simulation, and synapse characteristics cannot be simulated.
Disclosure of Invention
The purpose of the invention is as follows: the first purpose of the invention is to provide a skin touch bionic system which can adopt inorganic nano-wires to simulate synapse characteristics of skin touch nerves and has excellent circulation retentivity and fatigue resistance;
the second purpose of the invention is to provide a preparation method of the skin touch bionic system.
The technical scheme is as follows: the method for preparing the skin touch bionic system comprises the following steps:
(1) carrying out plasma treatment on the surface of the flexible substrate for 10-60s, wherein etching gas of the plasma treatment comprises hydrogen;
(2) forming a bottom electrode film on the flexible substrate after plasma treatment, forming a zinc oxide nanowire layer on the bottom electrode film, and performing laser welding on the zinc oxide nanowire layer and the bottom electrode film under the conditions of laser power of 50-200mW, laser beam diameter of 1-5 mu m and laser repetition frequency of 50-100 MHz;
(3) and sequentially forming an oxygen-deficient zinc oxide film and a top electrode film on the zinc oxide nanowire layer, and connecting the bottom electrode film and the top electrode film with a pulse power supply through electrode leads to obtain the skin touch bionic system.
When the skin touch bionic system is prepared, H is adopted firstly 2 The flexible substrate is processed by the plasma, so that the adhesion between the flexible substrate and the bottom electrode is increased, and the reliability and the durability of a flexible system are improved; meanwhile, the zinc oxide nanowire layer is formed on the bottom electrode in a laser welding mode, so that the zinc oxide nanowire layer can be arranged on the bottom electrode and the nanowireAn interconnection structure is formed, so that the interface has better mechanical bending property and electrical conduction property; meanwhile, a defect layer can be preset at the interface by adopting a laser welding mode, the contact potential barrier of the bottom electrode and the nanowire is reduced, and the combination of the bottom electrode and the nanowire effectively improves the cycle retentivity and the fatigue resistance of the skin touch bionic system.
Furthermore, in the step (1) of the preparation method of the present invention, the temperature of the plasma treatment is 15-30 ℃, the power of the plasma source is 100-200W, the power of the RF bias is 20-40W, the pressure of the reaction chamber is 0.1-0.4Pa, and the flow rate of the hydrogen is 5-30 sccm.
The skin touch bionic system prepared by the preparation method sequentially comprises a flexible substrate, a bottom electrode film, a zinc oxide nanowire layer, an anoxic zinc oxide film and a top electrode film from bottom to top, wherein the bottom electrode film and the top electrode film are connected with a pulse power supply through electrode leads.
The bionic system is provided with the oxygen-deficient zinc oxide film which is used as a transition buffer layer between the nanowire and the top electrode, wherein the defect state structure can enable current carriers to be better transmitted between the nanowire and the top electrode; meanwhile, the buffer layer improves the binding property between the nanowire and the top electrode and improves the reliability of the device.
Furthermore, the flexible substrate of the bionic system can be polyimide, polyethylene terephthalate, polyethylene naphthalate or polycarbonate film.
Further, the thickness of the flexible substrate of the biomimetic system may be 0.5-1 mm.
Furthermore, the bottom electrode film of the biomimetic system can be a tin-doped indium oxide, aluminum-doped zinc oxide or fluorine-doped tin oxide film.
Furthermore, the thickness of the bottom electrode film of the bionic system can be 50-1000 nm.
Furthermore, the thickness of the zinc oxide nanowire layer of the bionic system can be 50-2000nm, and the length of the zinc oxide nanowire is 1-10 μm.
Furthermore, the thickness of the oxygen-deficient zinc oxide buffer layer of the bionic system can be 10-50 nm.
Furthermore, the thickness of the top electrode film of the bionic system can be 20-100 nm.
Has the beneficial effects that: compared with the prior art, the invention has the following remarkable advantages: the skin touch bionic system can adopt the inorganic nano-wires to simulate the synapse characteristic of skin touch nerves, and has excellent cycle retentivity and fatigue resistance; meanwhile, the preparation method of the bionic system combines the plasma treatment and laser welding modes, effectively improves the cycle retentivity and the fatigue resistance of the skin touch bionic system, can preset a defect layer at an interface, and reduces the contact potential barrier between the bottom electrode and the nanowire.
Drawings
FIG. 1 is a schematic structural diagram of a skin touch bionic system according to the present invention;
FIG. 2 is a graph showing the I-V characteristics of the biomimetic system of skin touch in example 1 of the present invention under positive and negative pulses.
Detailed Description
The technical solution of the present invention will be further described in detail with reference to the following examples.
As shown in figure 1, the skin touch bionic system sequentially comprises a flexible substrate 1, a bottom electrode film 2, a zinc oxide nanowire layer 3, an anoxic zinc oxide film 4 and a top electrode film 5 from bottom to top, wherein the bottom electrode film 2 and the top electrode film 5 are connected with a pulse power supply 7 through electrode leads 6.
The bottom electrode film can be tin-doped indium oxide, aluminum-doped zinc oxide or fluorine-doped tin oxide film. The top electrode film may be an aluminum film or a titanium film. The thickness of the flexible substrate can be 0.5-1mm, the thickness of the bottom electrode film can be 50-1000nm, the thickness of the zinc oxide nanowire layer can be 50-2000nm, the length of the zinc oxide nanowire layer can be 1-10 mu m, the thickness of the oxygen-deficient zinc oxide buffer layer is 10-50nm, and the thickness of the top electrode film is 20-100 nm.
The bottom electrode film, the zinc oxide nanowire layer, the oxygen-deficient zinc oxide buffer layer and the top electrode film can be formed by adopting a magnetron sputtering method in the prior art, the name of the application of the applicant in 2018, 10, month and 29 is referred to as a flexible synapse bionic device and a preparation method thereof, the magnetron sputtering method disclosed in the application number 201811265425X is set according to the requirement, the power, the temperature and the sputtering time of magnetron sputtering are set, the requirements of different thicknesses can be realized, and the method is not limited, namely, only the thickness range can be reached.
Example 1
The skin touch bionic system of the embodiment 1 sequentially comprises a polyimide film, a tin-doped indium oxide film, a zinc oxide nanowire layer, an oxygen-deficient zinc oxide film and an aluminum film from bottom to top, wherein the tin-doped indium oxide film and the aluminum film are connected with a pulse power supply through electrode leads.
The preparation method of the skin touch bionic system comprises the following steps:
(1) performing plasma treatment on the surface of the polyimide film for 10-60s by using etching gas (containing hydrogen) under the conditions that the temperature is 15-30 ℃, the power of a plasma source is 100-200W, the power of a radio frequency bias is 20-40W, the pressure of a reaction cavity is 0.1-0.4Pa and the flow of hydrogen is 5-30 sccm;
(2) arranging a tin-doped indium oxide film on the flexible substrate after plasma treatment, arranging a zinc oxide nanowire layer on the tin-doped indium oxide film, and performing laser welding on the zinc oxide nanowire layer and the tin-doped indium oxide film under the conditions of the laser central wavelength of 800nm, the laser beam diameter of 1-5 mu m, the laser repetition frequency of 70MHz and the laser power of 100 mW;
(3) and sequentially arranging an oxygen-deficient zinc oxide film and a titanium film on the zinc oxide nanowire layer, and connecting the tin-doped indium oxide film and the titanium film with a pulse power supply through an electrode lead to obtain the skin touch bionic system.
Performance detection
A pulse power supply is connected between the top electrode and the bottom electrode, and the habit and sensitization behavior of synapses are simulated by applying different numbers of positive/negative pulses. If the power supply is positive pulse (6V in figure 2), the current between the two electrodes is gradually reduced along with the increase of the number of positive pulses, and the habitual characteristic of skin synapse is simulated; if the power is negatively pulsed (e.g., -3V in FIG. 2), the reduced current increases again with a positive pulse, simulating the sensitizing properties of the skin synapses. The first current peak after sensitization is reduced after each negative pulse, which is similar to the habit enhancement phenomenon in living beings, i.e. the habit becomes faster if a series of repeated habit exercises are given.
Example 2
The skin touch bionic system of embodiment 2 sequentially includes a polyethylene terephthalate film, an aluminum-doped zinc oxide film, a zinc oxide nanowire layer, an oxygen-deficient zinc oxide film, and an aluminum film from bottom to top, and the aluminum-doped zinc oxide film and the aluminum film are connected to a pulse power supply through electrode leads.
The preparation method of the skin touch bionic system comprises the following steps:
(1) plasma processing the surface of the polyethylene terephthalate film for 10-60s by adopting etching gas (containing hydrogen) under the conditions that the temperature is 15-30 ℃, the power of a plasma source is 100-200W, the power of a radio frequency bias voltage is 20-40W, the pressure of a reaction cavity is 0.1-0.4Pa and the flow of the hydrogen is 5-30 sccm;
(2) arranging an aluminum-doped zinc oxide film on a flexible substrate after plasma treatment, arranging a zinc oxide nanowire layer on the aluminum-doped zinc oxide film, and performing laser welding on the zinc oxide nanowire layer and the aluminum-doped zinc oxide film under the conditions of laser central wavelength of 800nm, laser beam diameter of 1-5 mu m, laser repetition frequency of 80MHz and laser power of 150 mW;
(3) and sequentially arranging an oxygen-deficient zinc oxide film and an aluminum film on the zinc oxide nanowire layer, and connecting the aluminum-doped zinc oxide film and the aluminum film with a pulse power supply through an electrode lead to obtain the skin touch bionic system.
Example 3
The skin touch bionic system of embodiment 3 sequentially includes a polyethylene naphthalate film, a fluorine-doped tin oxide film, a zinc oxide nanowire layer, an oxygen-deficient zinc oxide film and an aluminum film from bottom to top, and the fluorine-doped tin oxide film and the aluminum film are connected with a pulse power supply through electrode leads.
The preparation method of the skin touch bionic system comprises the following steps:
(1) carrying out plasma treatment on the surface of the polyethylene naphthalate film by using etching gas (containing hydrogen) for 10-60s under the conditions that the temperature is 15-30 ℃, the power of a plasma source is 100-200W, the radio frequency bias power is 20-40W, the pressure of a reaction cavity is 0.1-0.4Pa and the hydrogen flow is 5-30 sccm;
(2) arranging a fluorine-doped tin oxide film on a flexible substrate after plasma treatment, arranging a zinc oxide nanowire layer on the fluorine-doped tin oxide film, and performing laser welding on the zinc oxide nanowire layer and the fluorine-doped tin oxide film under the conditions of the laser central wavelength of 800nm, the laser beam diameter of 1-5 mu m, the laser repetition frequency of 50MHz and the laser power of 50 mW;
(3) and sequentially arranging an oxygen-deficient zinc oxide film and an aluminum film on the zinc oxide nanowire layer, and connecting the fluorine-doped tin oxide film and the aluminum film with a pulse power supply through an electrode lead to obtain the skin touch bionic system.
Example 4
The skin touch bionic system of embodiment 4 sequentially includes a polycarbonate film, a fluorine-doped tin oxide film, a zinc oxide nanowire layer, an oxygen-deficient zinc oxide film, and an aluminum film from bottom to top, and the fluorine-doped tin oxide film and the aluminum film are connected with a pulse power supply through electrode leads.
The preparation method of the skin touch bionic system comprises the following steps:
(1) performing plasma treatment on the surface of the polycarbonate film by using etching gas (containing hydrogen) for 10-60s under the conditions that the temperature is 15-30 ℃, the power of a plasma source is 100-200W, the radio frequency bias power is 20-40W, the pressure of a reaction cavity is 0.1-0.4Pa and the hydrogen flow is 5-30 sccm;
(2) arranging a fluorine-doped tin oxide film on the polycarbonate film after the plasma treatment, arranging a zinc oxide nanowire layer on the fluorine-doped tin oxide film, and performing laser welding on the zinc oxide nanowire layer and the fluorine-doped tin oxide film under the conditions of the laser central wavelength of 800nm, the laser beam diameter of 1-5 mu m, the laser repetition frequency of 100MHz and the laser power of 200 mW;
(3) and sequentially arranging an oxygen-deficient zinc oxide film and an aluminum film on the zinc oxide nanowire layer, and connecting the fluorine-doped tin oxide film and the aluminum film with a pulse power supply through an electrode lead to obtain the skin touch bionic system.
The skin touch bionic systems prepared by the embodiments are respectively connected into a resistance change characteristic testing system for calibration, and the skin touch bionic systems have long-term stability and durability.
Claims (10)
1. A method of making a biomimetic system of skin haptics, comprising the steps of:
(1) carrying out plasma treatment on the surface of the flexible substrate for 10-60s, wherein etching gas of the plasma treatment comprises hydrogen;
(2) forming a bottom electrode film on the flexible substrate after plasma treatment, forming a zinc oxide nanowire layer on the bottom electrode film, and performing laser welding and fixing on the zinc oxide nanowire layer and the bottom electrode film under the conditions of laser power of 50-200mW, laser beam diameter of 1-5 mu m and laser repetition frequency of 50-100 MHz;
(3) and sequentially forming an oxygen-deficient zinc oxide film and a top electrode film on the zinc oxide nanowire layer, and connecting the bottom electrode film and the top electrode film with a pulse power supply through electrode leads to obtain the skin touch bionic system.
2. The method of preparing a biomimetic system for skin haptics according to claim 1, wherein: in the step (1), the plasma processing temperature is 15-30 ℃, the plasma source power is 100-200W, the radio frequency bias power is 20-40W, the pressure of the reaction chamber is 0.1-0.4Pa, and the hydrogen flow is 5-30 sccm.
3. The skin touch bionic system prepared by the preparation method of claim 1, which is characterized in that: the bionic system sequentially comprises a flexible substrate (1), a bottom electrode film (2), a zinc oxide nanowire layer (3), an oxygen-deficient zinc oxide film (4) and a top electrode film (5) from bottom to top, wherein the bottom electrode film (2) and the top electrode film (5) are connected with a pulse power supply (7) through electrode leads (6).
4. The skin haptic biomimetic system of claim 3, wherein: the flexible substrate is a polyimide, polyethylene terephthalate, polyethylene naphthalate or polycarbonate film.
5. The skin haptic biomimetic system of claim 4, wherein: the thickness of the flexible substrate is 0.5-1 mm.
6. The skin haptic biomimetic system of claim 3, wherein: the bottom electrode film is a tin-doped indium oxide film, an aluminum-doped zinc oxide film or a fluorine-doped tin oxide film.
7. The skin haptic biomimetic system of claim 6, wherein: the thickness of the bottom electrode film is 50-1000 nm.
8. The skin haptic biomimetic system of claim 3, wherein: the thickness of the zinc oxide nanowire layer is 50-2000nm, and the length of the zinc oxide nanowire layer is 1-10 mu m.
9. The skin haptic biomimetic system of claim 3, wherein: the thickness of the oxygen-deficient zinc oxide buffer layer is 10-50 nm.
10. The biomimetic system of claim 3, wherein: the thickness of the top electrode film is 20-100 nm.
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