CN115001310A - Inchworm type piezoelectric actuator - Google Patents
Inchworm type piezoelectric actuator Download PDFInfo
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- CN115001310A CN115001310A CN202210682710.1A CN202210682710A CN115001310A CN 115001310 A CN115001310 A CN 115001310A CN 202210682710 A CN202210682710 A CN 202210682710A CN 115001310 A CN115001310 A CN 115001310A
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- 230000003068 static effect Effects 0.000 description 5
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- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
- H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
- H02N2/02—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors
- H02N2/021—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors using intermittent driving, e.g. step motors, piezoleg motors
- H02N2/023—Inchworm motors
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- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
- H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
- H02N2/02—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors
- H02N2/04—Constructional details
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- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
- H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
- H02N2/02—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors
- H02N2/06—Drive circuits; Control arrangements or methods
- H02N2/065—Large signal circuits, e.g. final stages
- H02N2/067—Large signal circuits, e.g. final stages generating drive pulses
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Abstract
The application discloses inchworm formula piezoelectric actuator includes: the piezoelectric actuator comprises a left clamping unit, a right clamping unit, a pre-tightening unit and a driving unit, wherein the left clamping unit and the right clamping unit are positioned in the pre-tightening unit, the pre-tightening unit is used for applying pre-tightening force to the left clamping unit and the right clamping unit, the driving unit is respectively connected with the left clamping unit and the right clamping unit, the left clamping unit, the driving unit and the right clamping unit can move left and right in the pre-tightening unit under time sequence control, the stretching direction of the left clamping unit, the stretching direction of the driving unit and the stretching direction of the right clamping unit are the same as the moving direction of the left clamping unit, the driving unit and the right clamping unit, larger thrust can be achieved in a small volume range, and meanwhile, the piezoelectric actuator can provide larger clamping friction force for the left clamping unit and the right clamping unit through the pre-tightening unit in a power-down state.
Description
Technical Field
The application relates to the technical field of piezoelectric driving devices, in particular to an inchworm type piezoelectric driver.
Background
The inchworm-type piezoelectric actuator has the performance advantages of small volume, large thrust, high precision, large stroke, quick response, high reliability and the like, is widely applied to various fields, and has irreplaceable superiority relative to other types of piezoelectric actuators.
However, the output thrust and the power failure holding force of the conventional inchworm-type piezoelectric driver with small volume are not high, and the inchworm-type driver with large driving force has larger appearance volume and cannot meet the space requirement of small volume.
Disclosure of Invention
The application aims at providing an inchworm formula piezoelectric actuator can realize big thrust and big power down holding power in little volume range.
In order to achieve the above purpose, the present application provides the following technical solutions:
an inchworm-type piezoelectric actuator comprising: the device comprises a left clamping unit, a right clamping unit, a pre-tightening unit and a driving unit, wherein the left clamping unit and the right clamping unit are located in the pre-tightening unit, the pre-tightening unit is used for exerting pre-tightening force on the left clamping unit and the right clamping unit, the driving unit is respectively connected with the left clamping unit and the right clamping unit, the left clamping unit, the driving unit and the right clamping unit can move left and right in the pre-tightening unit under time sequence control, and the stretching direction of the left clamping unit, the stretching direction of the driving unit and the stretching direction of the right clamping unit are the same as the moving direction of the left clamping unit, the stretching direction of the driving unit and the stretching direction of the right clamping unit.
Preferably, the driving unit comprises a driving piezoelectric stack, the pre-tightening unit comprises a flexible pre-tightening housing, the left clamping unit comprises a left friction block and a plurality of left piezoelectric stacks, the right clamping unit comprises a right friction block and a plurality of right piezoelectric stacks, the left friction block and the right friction block are located in the flexible pre-tightening housing, and the flexible pre-tightening housing is used for applying pre-tightening force to the left friction block and the right friction block; the driving piezoelectric stack, the left piezoelectric stack and the right piezoelectric stack can generate extension motion in an electrified state, and the extension direction of the driving piezoelectric stack, the left piezoelectric stack and the right piezoelectric stack is the same as the axial direction of the flexible pre-tightening shell.
Preferably, the driving unit further comprises a flexible pre-tightening tension spring and a pre-tightening compensation ring, two ends of the flexible pre-tightening tension spring are respectively connected with the left friction block and the right friction block, two ends of the driving piezoelectric stack are respectively provided with the pre-tightening compensation ring, and the pre-tightening compensation ring is used for adjusting the pre-tightening force of the driving piezoelectric stack by adjusting the axial size of the pre-tightening compensation ring.
Preferably, the pre-tightening unit further comprises a pre-tightening pressing block and a pre-tightening screw, the pre-tightening pressing block is located on the inner side of the flexible pre-tightening shell, the pre-tightening screw is in threaded connection with the side wall of the flexible pre-tightening shell, and the pre-tightening screw is used for controlling the movement of the pre-tightening pressing block so as to adjust the pre-tightening force of the pre-tightening unit on the left clamping unit and the right clamping unit.
Preferably, the flexible pre-tensioning housing comprises two flexible hinges respectively located at two sides of the pre-tensioning pressing block.
Preferably, the pre-tightening unit further comprises a pre-tightening wear-resistant ceramic sheet, one surface of the pre-tightening pressing block, which is opposite to the left clamping unit and the right clamping unit, is provided with the pre-tightening wear-resistant ceramic sheet, and one surface of the flexible pre-tightening shell, which is opposite to the pre-tightening pressing block, is provided with the pre-tightening wear-resistant ceramic sheet.
Preferably, clamping wear-resistant ceramic plates corresponding to the pre-tightening wear-resistant ceramic plates are arranged on the outer sides of the left friction block and the right friction block respectively.
Preferably, the left friction block and the right friction block are respectively flexible integral friction blocks.
Compared with the prior art, the technical scheme has the following advantages:
the application provides an inchworm formula piezoelectric actuator includes: the piezoelectric actuator comprises a left clamping unit, a right clamping unit, a pre-tightening unit and a driving unit, wherein the left clamping unit and the right clamping unit are positioned in the pre-tightening unit, the pre-tightening unit is used for applying pre-tightening force to the left clamping unit and the right clamping unit, the driving unit is respectively connected with the left clamping unit and the right clamping unit, the left clamping unit, the driving unit and the right clamping unit can move left and right in the pre-tightening unit under time sequence control, the telescopic directions of the left clamping unit, the driving unit and the right clamping unit are the same as the moving direction of the left clamping unit, larger thrust can be achieved in a small volume range, and meanwhile, the piezoelectric actuator can provide larger clamping friction force for the left clamping unit and the right clamping unit through the pre-tightening unit in a power-down state.
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In order to more clearly illustrate the embodiments of the present application or the technical solutions in the prior art, the drawings needed to be used in the description of the embodiments or the prior art will be briefly introduced below, it is obvious that the drawings in the following description are only embodiments of the present application, and for those skilled in the art, other drawings can be obtained according to the provided drawings without creative efforts.
FIG. 1 is a schematic diagram illustrating a schematic structure of an inchworm-type piezoelectric actuator according to an embodiment of the present disclosure;
FIG. 2 is a schematic cross-sectional view of an inchworm-type piezoelectric actuator according to an embodiment of the present disclosure;
FIG. 3 is a schematic cross-sectional view of an inchworm-type piezoelectric actuator according to an embodiment of the present disclosure;
FIG. 4 is a schematic diagram of an internal structure of an inchworm-type piezoelectric actuator according to an embodiment of the present disclosure;
FIG. 5 is a schematic diagram of a flexible pre-tensioned housing of an inchworm-type piezoelectric actuator according to an embodiment of the present disclosure;
fig. 6 is a schematic structural diagram of a left clamping unit of an inchworm-type piezoelectric actuator according to an embodiment of the present disclosure.
Detailed Description
The technical solutions in the embodiments of the present application will be clearly and completely described below with reference to the drawings in the embodiments of the present application, and it is obvious that the described embodiments are only a part of the embodiments of the present application, and not all of the embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present application.
Referring to fig. 1 to 6, fig. 1 is a schematic structural diagram of an inchworm-type piezoelectric actuator according to an embodiment of the present disclosure; FIG. 2 is a schematic cross-sectional view of an inchworm-type piezoelectric actuator according to an embodiment of the present disclosure; FIG. 3 is a schematic cross-sectional view of an inchworm-type piezoelectric actuator according to an embodiment of the present disclosure; FIG. 4 is a schematic diagram of an internal structure of an inchworm-type piezoelectric actuator according to an embodiment of the present disclosure; FIG. 5 is a schematic diagram of a flexible pre-tensioned housing of an inchworm-type piezoelectric actuator according to an embodiment of the present disclosure; fig. 6 is a schematic structural diagram of a left clamping unit of an inchworm-type piezoelectric actuator according to an embodiment of the present disclosure.
The embodiment of the application provides an inchworm formula piezoelectric actuator includes: the device comprises a left clamping unit 1, a right clamping unit 2, a pre-tightening unit 3 and a driving unit 4, wherein the left clamping unit 1 and the right clamping unit 2 are positioned in the pre-tightening unit 3, the pre-tightening unit 3 is used for applying pre-tightening force to the left clamping unit 1 and the right clamping unit 2, the driving unit 3 is respectively connected with the left clamping unit 1 and the right clamping unit 2, the left clamping unit 1, the driving unit 4 and the right clamping unit 2 can move left and right in the pre-tightening unit 3 under time sequence control, and the stretching directions of the left clamping unit 1, the driving unit 4 and the right clamping unit 2 are the same as the moving direction of the left clamping unit 1, the driving unit 4 and the right clamping unit 2. Wherein the drive unit 4 comprises a drive piezoelectric stack 16; the pre-tightening unit 3 comprises a flexible pre-tightening shell 7; the left clamping unit 1 and the right clamping unit 2 respectively comprise a friction block 8 and a plurality of clamping piezoelectric stacks 15 which are respectively marked as a left friction block, a left piezoelectric stack, a right friction block and a right piezoelectric stack, for example, two left piezoelectric stacks can be respectively arranged on two radial sides of the left friction block, two right piezoelectric stacks can be respectively arranged on two radial sides of the right friction block, the left friction block and the right friction block are preferably flexible integrated friction blocks and respectively comprise four groups of parallel hinges 8a, 8b, 8c and 8d, and the arrangement positions of the parallel hinges and the piezoelectric stacks are located on different side parts of the corresponding friction blocks; the left friction block and the right friction block are positioned in the flexible pre-tightening shell 7, the flexible pre-tightening shell 7 can apply pre-tightening force to the left friction block and the right friction block, end covers 5 are arranged at two ends of the flexible pre-tightening shell 7, and the end covers 5 can limit the left clamping unit 1 and the right clamping unit 2; the left clamping unit 1, the right clamping unit 2 and the driving unit 4 are structurally integrated and can move left and right along the axial direction of the flexible pre-tightening shell 7 under the time sequence control; the driving piezoelectric stack 16, the left piezoelectric stack and the right piezoelectric stack can generate extension motion in an upper power state, the extension direction of the driving piezoelectric stack is the same as the axial direction of the flexible pre-tightening shell 7, namely the extension direction of each piezoelectric stack is the same as the motion direction of the piezoelectric driver, the maximum output force of the piezoelectric driver depends on the thrust generated when the piezoelectric stack extends, larger thrust can be realized in a small volume range, and meanwhile, the piezoelectric driver can provide larger clamping friction force for the left clamping unit 1 and the right clamping unit 2 through the flexible pre-tightening shell 7 in a power-down state, so that the piezoelectric driver is suitable for being applied to scenes such as photoetching projection objectives and the like with higher requirements on volume and reliability.
In some embodiments, as shown in fig. 4, the driving unit 4 further includes a flexible pre-tightening tension spring 11 and a pre-tightening compensation ring 9, two ends of the flexible pre-tightening tension spring 11 are respectively connected to the left friction block and the right friction block, for example, by bolts 14, two ends of the driving piezoelectric stack 16 are respectively provided with one pre-tightening compensation ring 9, and the pre-tightening compensation ring 9 is used for adjusting the pre-tightening force of the driving piezoelectric stack 16 by adjusting the axial dimension thereof.
The following description is made of the motion principle of the inchworm-type piezoelectric actuator:
when the inchworm type piezoelectric actuator moves rightwards:
the left clamping unit 1 is powered off, and the relative position between the left clamping unit 1 and the pre-tightening unit 3 is kept unchanged through static friction force;
the right clamping unit 2 is electrified, the left piezoelectric stacks in the right clamping unit 2 reciprocate in opposite directions under the action of the control system, and a group of sliding friction forces with equal magnitude and opposite directions are generated between the right clamping unit 2 and the pre-tightening unit 3;
the driving unit 4 is powered on, and at the moment, because the friction force of the left side of the driving unit 4 is greater than that of the right side of the driving unit 4, the driving piezoelectric stack in the driving unit 4 drives the right clamping unit 2 to move one step to the right under the action of the control system;
the right clamping unit 2 is powered off, the left clamping unit 1 is powered on, the left piezoelectric stacks in the left clamping unit 1 reciprocate oppositely under the action of a control system, and a group of sliding friction forces with the same magnitude and direction are generated between the left clamping unit 1 and the pre-tightening unit 3;
the driving unit 4 is powered off, and the left clamping unit 1 is driven to move one step to the right under the action of the flexible pre-tightening tension spring 11; the continuous stepping movement of the piezoelectric driver towards the right can be realized by repeating the process.
When the inchworm type piezoelectric actuator moves leftwards:
the right clamping unit 1 is powered off, and the relative position between the right clamping unit 2 and the pre-tightening unit 3 is kept unchanged through static friction force;
the left clamping unit 1 is electrified, a left piezoelectric stack in the left clamping unit 1 reciprocates oppositely under the action of a control system, and a group of sliding friction forces with equal magnitude and opposite directions are generated between the left clamping unit 1 and the pre-tightening unit 3;
the driving unit 4 is powered on, and at this time, because the friction force of the right side of the driving unit 4 is greater than that of the left side of the driving unit 4, the driving piezoelectric stack in the driving unit 4 drives the left clamping unit 1 to move one step to the left under the action of the control system;
the left clamping unit 1 is powered off, the right clamping unit 2 is powered on, the right piezoelectric stacks in the right clamping unit 2 reciprocate in opposite directions under the action of the control system, and a group of sliding friction forces with the same magnitude and the same direction are generated between the right clamping unit 1 and the pre-tightening unit 3;
the driving unit 4 is powered off, and the right clamping unit 2 is driven to move one step leftwards under the action of the flexible pre-tightening tension spring 11; the continuous stepping movement of the piezoelectric driver to the left can be realized by repeating the above process.
When the inchworm type piezoelectric actuator is static, the pretightening force F is N Under the action of the friction force f, the friction force f is generated on the contact surface of the clamping unit and the shell, and the friction force f is respectively generated on the left side and the right side of the driving unit L ＝f R ＝f max ＝0.5μF N
Wherein f is L To act on the static friction of the left clamp unit 1, f R Mu is a friction factor for the static friction force acting on the right clamping unit 2; the power-down retention of the inchworm type piezoelectric actuator is F hold ＝f L +f R ＝2f max
When the inchworm type piezoelectric actuator moves, the maximum output force F which can be generated by the inchworm type piezoelectric actuator max ＝F P ,F P Is the thrust that the drive unit 4 can generate.
In some embodiments, as shown in fig. 5, the pre-tightening unit 3 further includes a pre-tightening pressing block 6 and pre-tightening screws 10, the pre-tightening pressing block 6 is located inside the flexible pre-tightening housing 7, the pre-tightening screws 10 are screwed on a side wall of the flexible pre-tightening housing 7, for example, a groove for placing the pre-tightening pressing block 6 may be provided at an inner top of the flexible pre-tightening housing 7, the pre-tightening screws 10 are connected to a top of the flexible pre-tightening housing 7, wherein the inner top and the inner bottom of the flexible pre-tightening housing 7 are preferably flat, and accordingly, upper and lower surfaces of the left friction block and the right friction block are also flat, the structure of the pre-tightening pressing block 6 is preferably a plate-shaped structure extending along an axial direction of the flexible pre-tightening housing 7, and the number of the pre-tightening screws 10 is also preferably multiple. By screwing the pre-tightening screw 10, the pre-tightening pressing block 6 can be controlled to move so as to adjust the pre-tightening force of the pre-tightening unit 3 on the left clamping unit and the right clamping unit. The flexible pre-tightening shell 7 comprises two flexible hinges 7a and 7b which are respectively positioned at two sides of the pre-tightening pressing block 6, the flexible hinges deform under the action of the adjusting pre-tightening screw 10, so that positive pressure in the Z-direction is generated, and friction force is generated among the left clamping unit 1, the right clamping unit 2 and the pre-tightening unit 3.
Further, as shown in fig. 6, the pre-tightening unit 3 further includes a pre-tightening wear-resistant ceramic plate 12, one surface of the pre-tightening pressing block 6 opposite to the left clamping unit 1 and the right clamping unit 2 is provided with the pre-tightening wear-resistant ceramic plate 12, one surface of the flexible pre-tightening housing 7 opposite to the pre-tightening pressing block 6 is also provided with the pre-tightening wear-resistant ceramic plate 12, and the pre-tightening wear-resistant ceramic plate 12 can be fixed in a sticking manner. Clamping wear-resistant ceramic plates 13 corresponding to the pre-tightening wear-resistant ceramic plates 12 are respectively arranged on the outer sides of the left friction block and the right friction block, and the clamping wear-resistant ceramic plates 13 can also be fixed in a sticking mode. The abrasion between the left friction block, the right friction block and the flexible pre-tightening shell 7 can be reduced through the pre-tightening wear-resistant ceramic sheet 12 and the clamping wear-resistant ceramic sheet 13.
The embodiments in the present description are described in a progressive manner, each embodiment focuses on differences from other embodiments, and the same and similar parts among the embodiments are referred to each other.
An inchworm-type piezoelectric driver provided by the application is described in detail above. The principles and embodiments of the present application are explained herein using specific examples, which are provided only to help understand the method and the core idea of the present application. It should be noted that, for those skilled in the art, it is possible to make several improvements and modifications to the present application without departing from the principle of the present application, and such improvements and modifications also fall within the scope of the claims of the present application.
Claims (8)
1. An inchworm-type piezoelectric actuator, comprising: the device comprises a left clamping unit, a right clamping unit, a pre-tightening unit and a driving unit, wherein the left clamping unit and the right clamping unit are located in the pre-tightening unit, the pre-tightening unit is used for exerting pre-tightening force on the left clamping unit and the right clamping unit, the driving unit is respectively connected with the left clamping unit and the right clamping unit, the left clamping unit, the driving unit and the right clamping unit can move left and right in the pre-tightening unit under time sequence control, and the stretching direction of the left clamping unit, the stretching direction of the driving unit and the stretching direction of the right clamping unit are the same as the moving direction of the left clamping unit, the stretching direction of the driving unit and the stretching direction of the right clamping unit.
2. The inchworm-type piezoelectric driver of claim 1, wherein the driving unit comprises a driving piezoelectric stack, the pre-tightening unit comprises a flexible pre-tightening housing, the left clamping unit comprises a left friction block and a plurality of left piezoelectric stacks, the right clamping unit comprises a right friction block and a plurality of right piezoelectric stacks, the left friction block and the right friction block are located in the flexible pre-tightening housing, and the flexible pre-tightening housing is used for applying pre-tightening force to the left friction block and the right friction block; the driving piezoelectric stack, the left piezoelectric stack and the right piezoelectric stack can generate an extension motion in an electrified state, and the extension direction of the driving piezoelectric stack, the left piezoelectric stack and the right piezoelectric stack is the same as the axial direction of the flexible pre-tightening shell.
3. The inchworm-type piezoelectric driver as claimed in claim 2, wherein the driving unit further comprises a flexible pre-tightening tension spring and a pre-tightening compensation ring, two ends of the flexible pre-tightening tension spring are respectively connected with the left friction block and the right friction block, two ends of the driving piezoelectric stack are respectively provided with one pre-tightening compensation ring, and the pre-tightening compensation rings are used for adjusting the pre-tightening force of the driving piezoelectric stack by adjusting the axial dimension of the pre-tightening compensation rings.
4. The inchworm-type piezoelectric driver as claimed in claim 3, wherein the pre-tightening unit further comprises a pre-tightening pressing block and a pre-tightening screw, the pre-tightening pressing block is located on the inner side of the flexible pre-tightening shell, the pre-tightening screw is in threaded connection with the side wall of the flexible pre-tightening shell, and the pre-tightening screw is used for controlling the pre-tightening pressing block to move so as to adjust the pre-tightening force of the pre-tightening unit on the left clamping unit and the right clamping unit.
5. The inchworm-type piezoelectric driver of claim 4, wherein the flexible pre-tensioned casing comprises two flexible hinges respectively located on both sides of the pre-tensioned pressing block.
6. The inchworm-type piezoelectric driver as claimed in claim 4, wherein the pre-tightening unit further comprises a pre-tightening wear-resistant ceramic sheet, the pre-tightening wear-resistant ceramic sheet is arranged on one surface of the pre-tightening pressing block opposite to the left clamping unit and the right clamping unit, and the pre-tightening wear-resistant ceramic sheet is arranged on one surface of the flexible pre-tightening shell opposite to the pre-tightening pressing block.
7. The inchworm-type piezoelectric driver as claimed in claim 6, wherein clamping wear-resistant ceramic plates corresponding to the pre-tightening wear-resistant ceramic plates are respectively arranged on the outer sides of the left friction block and the right friction block.
8. The inchworm-type piezoelectric actuator according to claim 1, wherein the left friction block and the right friction block are respectively flexible integral friction blocks.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202210682710.1A CN115001310A (en) | 2022-06-16 | 2022-06-16 | Inchworm type piezoelectric actuator |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202210682710.1A CN115001310A (en) | 2022-06-16 | 2022-06-16 | Inchworm type piezoelectric actuator |
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| Publication Number | Publication Date |
|---|---|
| CN115001310A true CN115001310A (en) | 2022-09-02 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202210682710.1A Pending CN115001310A (en) | 2022-06-16 | 2022-06-16 | Inchworm type piezoelectric actuator |
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| Country | Link |
|---|---|
| CN (1) | CN115001310A (en) |
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2022
- 2022-06-16 CN CN202210682710.1A patent/CN115001310A/en active Pending
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