CN114994782A - Sensitive structure of axial component gravity gradiometer - Google Patents
Sensitive structure of axial component gravity gradiometer Download PDFInfo
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- CN114994782A CN114994782A CN202210580692.6A CN202210580692A CN114994782A CN 114994782 A CN114994782 A CN 114994782A CN 202210580692 A CN202210580692 A CN 202210580692A CN 114994782 A CN114994782 A CN 114994782A
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- G01—MEASURING; TESTING
- G01V—GEOPHYSICS; GRAVITATIONAL MEASUREMENTS; DETECTING MASSES OR OBJECTS; TAGS
- G01V7/00—Measuring gravitational fields or waves; Gravimetric prospecting or detecting
- G01V7/02—Details
Abstract
The utility model relates to a differential accelerometer gravity gradiometer technical field particularly, relates to a sensitive structure of axial component gravity gradiometer, including from the top down last electrode plate subassembly, last electrode frame subassembly, middle electrode plate subassembly, bottom electrode frame subassembly and the bottom electrode plate subassembly that connects gradually, wherein: a first sensitive mass block is arranged at the middle position of the upper electrode frame assembly; a second sensitive mass block is arranged in the middle of the lower electrode frame assembly; the upper electrode plate assembly, the first sensitive mass block, the upper electrode frame assembly and the middle electrode plate assembly form a first equivalent probe; the lower electrode plate assembly, the second sensitive mass block, the lower electrode frame assembly and the middle electrode plate assembly form a second equivalent probe. Inside this application concentrates on same sensitive structure with two quality pieces, realize the better uniformity of two position accelerations more easily, saved weight greatly, reading interval time is short, the cost is reduced has improved the measuring precision.
Description
Technical Field
The application relates to the technical field of gravity gradiometers of differential accelerometers, in particular to a sensitive structure of an axial component gravity gradiometer.
Background
The gravity gradiometer is mainly used for measuring the tensor of the second derivative of the gravitational potential of the satellite at the orbit so as to determine the earth gravitational field, and has wide application in the fields of navigation, geophysical exploration, earth dynamics, space science and the like. The measurement principle of the gravity gradiometer comprises a differential acceleration method and a measurement mode based on torque, the measurement principle based on the torque is mainly limited by factors of volume and stability, the development is slow, and the gradiometer based on the differential acceleration method is successfully carried and used on a satellite due to high stability and high precision. Typically, the full-tension gravity gradiometer is carried by a GOCE project of the European space Bureau, and the precision of the full-tension gravity gradiometer can reach
The gravity gradiometer based on the differential acceleration method is composed of a plurality of pairs of electrostatic suspension accelerometer sensors distributed on the same straight line, wherein two electrostatic suspension accelerometer sensors are generally paired, and the gravity gradiometer is characterized by large volume, heavy mass and high cost, and can only be used as a main load to exist on a satellite.
In the prior art, an electrostatic suspension accelerometer based on a capacitance difference principle is generally adopted, the core of the accelerometer is a sensitive structure, the sensitive structure is processed by microcrystalline glass with a low expansion coefficient, different areas are divided on the surface of the sensitive structure through processes such as coating, etching and the like, the position change of a mass block is detected by means of capacitance difference change formed by the mass block and peripheral electrodes, and then satellite acceleration data is deduced, but the current differential gradiometer consists of a plurality of accelerometers, the distance between the accelerometers and the external structure of the sensitive structure are arranged, so that the overall volume of the gradiometer is large; each sensitive structure needs to be processed and installed independently, so that the development period of the sensitive structure of the gradiometer is long, the assembly process is complicated, the cost is high, and the inconsistency between the two pairs of sensors influencing the precision index of the gradiometer is difficult to guarantee.
Disclosure of Invention
The main purpose of the present application is to provide a sensitive structure of an axial component gravity gradiometer, wherein two sensitive mass blocks are provided in the sensitive structure, and the sensitive structure can sense acceleration at two positions, so as to calculate gravitational acceleration and gradient tensor in a horizontal direction in the directions of the two positions.
In order to achieve the above object, the present application provides a sensitive structure of an axial component gravity gradiometer, which comprises an upper electrode plate assembly, an upper electrode frame assembly, a middle electrode plate assembly, a lower electrode frame assembly and a lower electrode plate assembly, which are sequentially connected from top to bottom, wherein: a first sensitive mass block is arranged at the middle position of the upper electrode frame assembly; a second sensitive mass block is arranged in the middle of the lower electrode frame assembly; the upper electrode plate assembly, the first sensitive mass block, the upper electrode frame assembly and the middle electrode plate assembly form a first equivalent probe; the lower electrode plate assembly, the second sensitive mass block, the lower electrode frame assembly and the middle electrode plate assembly form a second equivalent probe.
Furthermore, the upper electrode plate assembly and the lower electrode plate assembly are identical in structure and comprise an electrode plate and a limiting screw, a gold wire fixing structure is arranged on one side of the electrode plate, and a vertical shaft electrode is arranged on the other side of the electrode plate.
Furthermore, the vertical axis electrode is an independent conductive surface manufactured by coating and etching processes, and is limited by a limiting screw.
Furthermore, the upper electrode frame assembly and the lower electrode frame assembly are identical in structure and comprise electrode frames and limiting clamping blocks, and horizontal shaft electrodes are arranged on the inner side surfaces of the surrounding electrode frame bodies.
Furthermore, the horizontal shaft electrode is an independent conductive surface manufactured by coating and etching processes, and is limited by a limiting clamping block.
Furthermore, middle electrode plate subassembly includes middle electrode plate and spacing bolt, and the positive and negative face of middle electrode plate all is provided with the electrode face, and the electrode face carries on spacingly through spacing bolt.
Further, the first sensitive mass block is arranged between the vertical shaft electrode of the upper electrode plate assembly and the front electrode surface of the middle electrode plate assembly.
Further, the second sensitive mass block is arranged between the electrode surface on the reverse side of the middle electrode plate assembly and the vertical shaft electrode of the lower electrode plate assembly.
Furthermore, the signal of the first sensitive mass block is led out from the central hole of the upper electrode plate component through a gold wire and is fixed through a gold wire fixing structure, and the signal of the second sensitive mass block is led out from the central hole of the lower electrode plate component through the gold wire and is fixed through a gold wire fixing structure.
Furthermore, the upper electrode plate assembly, the upper electrode frame assembly, the middle electrode plate assembly, the lower electrode frame assembly and the lower electrode plate assembly are fixedly installed through a plurality of groups of bolt assemblies.
The sensitive structure of the axial component gravity gradiometer provided by the invention has the following beneficial effects:
this application concentrates two quality pieces in a sensitive structure, make a sensitive structure have the effect of two electrostatic suspension accelerometer sensor equivalent probes, two sensitive quality pieces are installed in same direction, can satisfy the basic principle measurement of axial gradiometer, through measuring distance between two sensitive quality pieces and acceleration result of surveying separately, alright with the horizontal component of gravity gradient and tensor between two quality piece barycenter positions of calculating, compare with the gravity gradiometer of other electrostatic suspension principles, this application concentrates two quality pieces inside same sensitive structure, realize the better uniformity of two position accelerations more easily, in addition, only need design one set of external structure can, greatly save weight, reading interval time is short, the cost is reduced, the measuring precision has been improved.
Drawings
The accompanying drawings, which are incorporated in and constitute a part of this application, serve to provide a further understanding of the application and to enable other features, objects, and advantages of the application to be more apparent. The drawings and their description illustrate the embodiments of the invention and do not limit it. In the drawings:
FIG. 1 is a schematic diagram of a sensitive structure of an axial component gravity gradiometer provided according to an embodiment of the application;
FIG. 2 is an exploded view of the internal structure of an axial component gravity gradiometer sensitive structure provided in accordance with an embodiment of the present application;
FIG. 3 is a schematic diagram of one side of an upper electrode plate assembly (a lower electrode plate assembly) of a sensitive structure of an axial component gravity gradiometer provided in accordance with an embodiment of the present application;
FIG. 4 is a schematic diagram of the other side of an upper electrode plate assembly (lower electrode plate assembly) of a sensitive structure of an axial component gravity gradiometer provided according to embodiments of the present application;
FIG. 5 is a schematic diagram of an upper electrode frame assembly (lower electrode frame assembly) of an axial component gravity gradiometer sensitive structure provided according to an embodiment of the application;
FIG. 6 is a schematic diagram of a middle electrode plate assembly of an axial component gravity gradiometer sensitive structure provided in accordance with an embodiment of the application;
in the figure: 1-upper electrode plate component, 11-electrode plate, 12-limit screw, 13-vertical axis electrode, 14-gold wire fixing structure, 15-gold wire, 2-upper electrode frame component, 21-electrode frame, 22-limit clamping block, 23-horizontal axis electrode, 3-middle electrode plate component, 31-middle electrode plate, 32-limit bolt, 33-electrode surface, 4-lower electrode frame component, 5-lower electrode plate component, 6-first sensitive mass block, 7-second sensitive mass block and 8-bolt.
Detailed Description
In order to make the technical solutions of the present application better understood by those skilled in the art, the technical solutions in the embodiments of the present application will be clearly and completely described below with reference to the drawings in the embodiments of the present application, and it is obvious that the described embodiments are only some embodiments of the present application, and not all embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present application.
It should be noted that the terms "first," "second," and the like in the description and claims of this application and in the accompanying drawings are used for distinguishing between similar elements and not necessarily for describing a particular sequential or chronological order. It should be understood that the data so used may be interchanged under appropriate circumstances such that embodiments of the application described herein may be used. Furthermore, the terms "comprises," "comprising," and "having," and any variations thereof, are intended to cover a non-exclusive inclusion, such that a process, method, system, article, or apparatus that comprises a list of steps or elements is not necessarily limited to those steps or elements expressly listed, but may include other steps or elements not expressly listed or inherent to such process, method, article, or apparatus.
In this application, the terms "upper", "lower", "left", "right", "front", "rear", "top", "bottom", "inner", "outer", "middle", "vertical", "horizontal", "lateral", "longitudinal", and the like indicate orientations or positional relationships based on the orientations or positional relationships shown in the drawings. These terms are used primarily to better describe the present application and its embodiments, and are not used to limit the indicated devices, elements or components to a particular orientation or to be constructed and operated in a particular orientation.
Moreover, some of the above terms may be used to indicate other meanings besides the orientation or positional relationship, for example, the term "on" may also be used to indicate some kind of attachment or connection relationship in some cases. The specific meaning of these terms in this application will be understood by those of ordinary skill in the art as appropriate.
In addition, the term "plurality" shall mean two as well as more than two.
It should be noted that the embodiments and features of the embodiments in the present application may be combined with each other without conflict. The present application will be described in detail below with reference to the embodiments with reference to the attached drawings.
As shown in fig. 1-2, the present application provides a sensitive structure of an axial component gravity gradiometer, which comprises an upper electrode plate assembly 1, an upper electrode frame assembly 2, a middle electrode plate assembly 3, a lower electrode frame assembly 4 and a lower electrode plate assembly 5, which are sequentially connected from top to bottom, wherein: a first sensitive mass block 6 is arranged at the middle position of the upper electrode frame component 2; a second sensitive mass block 7 is arranged in the middle of the lower electrode frame assembly 4; the upper electrode plate assembly 1, the first sensitive mass block 6, the upper electrode frame assembly 2 and the middle electrode plate assembly 3 form a first equivalent probe; the lower electrode plate assembly 5, the second proof mass 7, the lower electrode frame assembly 4 and the middle electrode plate assembly 3 constitute a second equivalent probe.
Specifically, the sensitive structure of the axial component gravity gradiometer provided by the embodiment of the application is mainly arranged in the axial gradiometer, two sensitive mass blocks are arranged in one sensitive structure, which is equivalent to integrating two electrostatic suspension accelerometer sensors into the sensitive structure, and the sensitive structure has the effect of two probes. The upper electrode plate assembly 1, the first sensitive mass block 6, the upper electrode frame assembly 2 and the middle electrode plate assembly 3 form a first equivalent probe, and the first equivalent probe can measure the centroid acceleration of the first sensitive mass block 6; the lower electrode plate component 5, the second sensitive mass block 7, the lower electrode frame component 4 and the middle electrode plate component 3 form a second equivalent probe, the second equivalent probe can measure the centroid acceleration of the second sensitive mass block 7, the two equivalent probes share the middle electrode plate 31, the consistency is good, the processing and assembling period of the sensitive structure is greatly shortened, and the integral volume of the gradiometer is reduced.
Further, as shown in fig. 3-4, the upper electrode plate assembly 1 and the lower electrode plate assembly 5 have the same structure, and include an electrode plate 11 and a limit screw 12, wherein one side of the electrode plate 11 is provided with a gold wire fixing structure 14, and the other side is provided with a vertical shaft electrode 13. The upper electrode plate assembly 1 and the lower electrode plate assembly 5 have the same structure, and both include an electrode plate 11 and a limit screw 12, the electrode plate 11 is made of a low expansion coefficient material, one side of the electrode plate 11 is provided with a gold wire fixing structure 14 for fixing a gold wire 15 for transmitting signals, and the other side is provided with a vertical axis electrode 13, which is matched with the sensitive mass block and an electrode surface 33 of the middle electrode plate assembly 3 to form a differential sensing capacitor, so that the axial control of the first sensitive mass block 6 and the second sensitive mass block 7 is realized respectively.
Further, the vertical axis electrode 13 is an independent conductive surface manufactured by coating and etching processes, and is limited by the limit screw 12. The vertical axis electrodes 13 are formed on the electrode plate 11 by plating a metal film on the electrode plate 11 to metalize the surface, and then dividing the electrode plate into different conductive areas by etching, in this embodiment, the vertical axis electrodes 13 of the upper electrode plate are preferably 4, the vertical axis electrodes 13 of the lower electrode plate are also preferably 4, the 4 vertical axis electrodes 13 form the whole conductive area, and the vertical axis electrodes are fixed on the electrode plate 11 by the limiting screws 12 at 4 corners to prevent the short circuit caused by the movement of the sensing mass block in the vertical direction.
Further, as shown in fig. 5, the upper electrode frame assembly 2 and the lower electrode frame assembly 4 have the same structure, and include an electrode frame 21 and a limiting fixture 22, and a horizontal axis electrode 23 is disposed around the inner side surface of the frame body of the electrode frame 21. The upper electrode frame assembly 2 and the lower electrode frame assembly 4 are completely the same in structure and both comprise an electrode frame 21 and a limiting fixture block 22, the electrode frame 21 is mainly used for placing a sensitive mass block, a horizontal shaft electrode 23 is arranged around the sensitive mass block, the horizontal shaft electrode 23 and the side surface of the sensitive mass block form a differential sensing capacitor, and the horizontal postures of the first sensitive mass block 6 and the second sensitive mass block 7 are respectively controlled.
Furthermore, the horizontal axis electrode 23 is an independent conductive surface manufactured by coating and etching processes, and is limited by the limiting fixture block 22. Make the surface metallization through plating the metal film equally in the side of electrode frame 21, then cut apart into different electrically conductive region through the sculpture, thereby form horizontal axis electrode 23 on the side of electrode frame 21, in this application embodiment, every medial surface of electrode frame 21 sets up 2 horizontal axis electrodes 23, the inboard of whole electrode frame 21 sets up 8 horizontal axis electrodes 23 altogether, the horizontal axis electrode 23 of every medial surface is fixed spacingly through spacing fixture block 22, prevent the short circuit that the sensitive quality piece caused when the horizontal direction removes.
Further, as shown in fig. 6, the intermediate electrode plate assembly 3 includes an intermediate electrode plate 31 and a limiting bolt 32, wherein both the front and back sides of the intermediate electrode plate 31 are provided with electrode surfaces 33, and the electrode surfaces 33 are limited by the limiting bolt 32. The middle electrode plate 31 is arranged in the middle of the structure, the first equivalent probe and the second equivalent probe share the middle electrode plate 31, the electrode surfaces 33 are designed on the front and back surfaces of the middle electrode plate 31 through processes of coating, etching and the like, and are fixed and limited through the limiting screw rod and the limiting nut, so that short circuit between the sensitive mass block and the electrode surfaces 33 when the sensitive mass block moves in the vertical direction is prevented.
Further, the first proof mass 6 is disposed between the vertical axis electrode 13 of the upper electrode plate assembly 1 and the front electrode surface 33 of the middle electrode plate assembly 3. The vertical axis electrodes 13 of the upper electrode plate assembly 1 correspond to the front electrode surfaces 33 of the middle electrode plate assembly 3 one by one, and the first sensitive mass blocks 6 are arranged between the vertical axis electrodes 13 and the front electrode surfaces 33 to form differential sensing capacitors.
Further, a second sensing mass 7 is arranged between the opposite electrode face 33 of the middle plate assembly 3 and the vertical axis electrode 13 of the lower plate assembly 5. The vertical axis electrodes 13 of the lower electrode plate assembly 5 correspond to the opposite electrode surfaces 33 of the middle electrode plate assembly 3 one by one, and the second sensitive mass blocks 7 are arranged between the vertical axis electrodes 13 and the opposite electrode surfaces 33 to form differential sensing capacitors.
Further, the signal of the first sensing mass block 6 is led out from the central hole of the upper electrode plate assembly 1 through the gold wire 15 and is fixed through the gold wire fixing structure 14, and the signal of the second sensing mass block 7 is led out from the central hole of the lower electrode plate assembly 5 through the gold wire 15 and is fixed through the gold wire fixing structure 14. The signal of the sensitive mass block is led out through a gold wire 15, then is fixed through a gold wire fixing structure 14, and is subsequently connected with a signal processing device of the gradiometer to carry out signal transmission processing.
Further, the upper electrode plate assembly 1, the upper electrode frame assembly 2, the middle electrode plate assembly 3, the lower electrode frame assembly 4 and the lower electrode plate assembly 5 are fixedly installed through a plurality of groups of bolts 8. The whole sensitive structure comprises 5 electrode plate (electrode frame) assemblies, 2 sensitive mass blocks, 2 gold wire fixing devices and 2 gold wires, wherein the 5 electrode plate (electrode frame) assemblies are fixed through 12 groups of bolts 8 and are matched and connected with a mounting structure of a gradiometer, the middle electrode plate assembly 3 is positioned in the middle of the structure, the upper electrode frame assembly 2 and the lower electrode frame assembly 4 are symmetrically mounted from the middle to two sides, the upper electrode plate assembly 1 and the lower electrode plate assembly 5 are symmetrically mounted, the upper gold wire fixing devices and the lower gold wire fixing devices are symmetrically mounted, the first sensitive mass block 6 is arranged in the middle of the upper electrode frame assembly 2, and the second sensitive mass block 7 is arranged in the middle of the lower electrode frame assembly 4.
The application and the applicable environment of the sensitive structure of the axial component gravity gradiometer provided by the application are specifically described in combination with the specific embodiments as follows:
example one
The embodiment of the application can be used as an axial gravity gradiometer to carry out measurement of a basic principle:
the earth is in an ellipsoid shape and has the attribute of a gravity field, a normal gravity value is related to a dimension, and the larger the dimension is, the larger the gravity value is. In the task process of the satellite, the center of a sensitive structure of an axial gradiometer is coincided with the center of mass of the satellite, each equivalent probe is provided with two high sensitive axes and one low sensitive axis, the large surface of each sensitive mass represents the direction of the low sensitive axis, the small surface represents the direction of the high sensitive axis, under the action of gravity gradient, the two sensitive masses are subjected to different axial and horizontal acting forces, the measurement of tensor components of the axial gravity gradient and the horizontal gradient can be realized through different axial and horizontal accelerations on the sensitive mass blocks, the maximum angular velocity comes from the direction of a vertical orbit plane (orbital angular velocity) according to the running condition of the satellite and the autorotation of the earth, the influence of the angular velocity is deducted when the gradiometer runs, and the high sensitive axes in the two horizontal directions of the design scheme of the gradiometer can accurately measure the horizontal components of the gradient tensor.
Example two
The embodiment of the application can be used as an accelerometer for mutual calibration and correction:
the electrostatic suspension accelerometer sensor belongs to a high-precision instrument, the highest measured precision of the electrostatic suspension accelerometer sensor is mainly given through theoretical derivation, the micron-level processed structure is considered, the absolute consistency cannot be realized in production, the precision of the accelerometer can be accurately calculated through a micro thruster of a satellite in orbit, in order to realize the in-orbit precision of the acceleration sensor, the sensor can be calibrated on the ground, the sensor calibration is usually carried out in three modes, namely high-pressure suspension, torsional pendulum suspension and free falling body. All three of these approaches have inevitable drawbacks to some extent. The distance between the two mass blocks in the vertical direction is about 10mm, the alignment assembly precision is very high, the electrode parameter consistency can be very good by means of the integral machining grinding process, calibration, noise testing, high-pressure suspension testing and comparison can be synchronously performed after the sensor is calibrated, measurement and comparison can be performed on non-conservative forces such as the same external light pressure during on-track, and the method has important significance for measuring the sensor capacity.
EXAMPLE III
The embodiment of the application can improve the reliability of the accelerometer when used as a single acceleration:
the embodiment of the application has two mass blocks, which is equivalent to two probes, the service life and the reliability of the whole accelerometer can be prolonged when the sensitive structure is used as an accelerometer, the STAR accelerometer in the CHAMP satellite has one path of capacitance plate and abnormal control in the flight process, and the later data processing is recovered to be normal.
Example four
The method can be used for estimating the centroid of the satellite in orbit:
when the satellite is in orbit, the center of mass shifts due to the dissipation of fuel, and the influence is generated on the satellite which partially works based on the center of mass, the position of the center of mass is estimated by using an accelerometer sensor and a gyroscope, and then the position of the center of mass is ensured by using a center of mass adjusting mechanism, the position of the center of mass estimated in this way is within 6mm, when the attitude of the satellite is maneuvering, the input acceleration of the accelerometer comes from the linear acceleration introduced by the centrifugal acceleration and the angular acceleration, and the position of the center of mass of the object can be deduced by knowing the speed of two fixed positions in the object according to the kinematics principle. In the embodiment of the application, the two internal sensitive mass blocks are positioned at two positions, and the acceleration values of the two positions of the satellite can be measured when the two internal sensitive mass blocks are arranged inside the satellite, so that the position of the center of mass of the satellite can be deduced.
EXAMPLE five
The embodiment of the application can be used as a gradiometer ground detection device for verifying the functions of the measurement and control unit:
the embodiment of the application has two mass blocks, only one set of external structure is needed, the early measurement and control unit can conveniently verify as ground detection equipment during debugging, and secondly, because the real gradiometer has a huge appearance, the tower falling condition of microgravity environment is not provided for the gradiometer in China at present, therefore, the real capture capacity of the gradiometer in the microgravity environment can not be verified on the ground, but the miniaturized sensitive structure is benefited, the two equivalent probes are provided, and the measurement and control unit can completely replace the gradiometer without measuring the space gravity gradient, so the sensitive structure has important application significance in the aspect of replacing the real gradiometer to realize tower falling experiment.
The above description is only a preferred embodiment of the present application and is not intended to limit the present application, and various modifications and changes may be made by those skilled in the art. Any modification, equivalent replacement, improvement and the like made within the spirit and principle of the present application shall be included in the protection scope of the present application.
Claims (10)
1. The utility model provides a sensitive structure of axial component gravity gradiometer which characterized in that, includes from the top down upper electrode plate subassembly, last electrode frame subassembly, middle electrode plate subassembly, lower electrode frame subassembly and lower electrode plate subassembly that connect gradually, wherein:
a first sensitive mass block is arranged in the middle of the upper electrode frame assembly;
a second sensitive mass block is arranged in the middle of the lower electrode frame assembly;
the upper electrode plate assembly, the first sensitive mass block, the upper electrode frame assembly and the middle electrode plate assembly form a first equivalent probe;
the lower electrode plate assembly, the second sensitive mass block, the lower electrode frame assembly and the middle electrode plate assembly form a second equivalent probe.
2. The sensitive structure of axial component gravity gradiometer of claim 1 wherein the upper and lower electrode plate assemblies are identical in construction and include an electrode plate with a gold wire fixing structure on one side and a vertical axis electrode on the other side and a set screw.
3. The sensitive structure of axial component gradiometer of claim 2, wherein the vertical axis electrode is a separate conductive surface made by a plating, etching process, limited by a limit screw.
4. The sensitive structure of an axial component gravity gradiometer of claim 1 wherein the upper electrode frame assembly and the lower electrode frame assembly are of the same construction and comprise an electrode frame and a limiting fixture block, a horizontal axis electrode being provided around the inner side of the electrode frame body.
5. The sensitive structure of an axial component gradiometer of claim 1 wherein the horizontal axis electrode is an independent conductive surface made by coating and etching processes, and is limited by a limiting fixture block.
6. The sensitive structure of axial component gravity gradiometer of claim 2, wherein the intermediate electrode plate assembly comprises an intermediate electrode plate and a limit bolt, wherein the front and back sides of the intermediate electrode plate are provided with electrode faces, and the electrode faces are limited by the limit bolt.
7. The axial component gravity gradiometer sensitive structure of claim 6, wherein the first proof mass is disposed between the upper electrode plate assembly vertical axis electrode and the middle electrode plate assembly front face electrode face.
8. The axial component gravity gradiometer sensitive structure of claim 6, wherein the second proof mass is disposed between the opposing electrode face of the middle electrode plate assembly and the vertical axis electrode of the lower electrode plate assembly.
9. The axial component gradiometer sensitive structure of claim 2, wherein the signal of the first proof mass is extracted from the central aperture of the upper electrode plate assembly through a gold wire and secured by a gold wire securing structure, and the signal of the second proof mass is extracted from the central aperture of the lower electrode plate assembly through a gold wire and secured by a gold wire securing structure.
10. The axial component gradiometer sensitive structure of claim 1, wherein the upper electrode plate assembly, the upper electrode frame assembly, the middle electrode plate assembly, the lower electrode frame assembly and the lower electrode plate assembly are mounted and secured by sets of bolt assemblies.
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