CN210666065U - Calibration device of seismic intensity instrument - Google Patents
Calibration device of seismic intensity instrument Download PDFInfo
- Publication number
- CN210666065U CN210666065U CN201921427738.0U CN201921427738U CN210666065U CN 210666065 U CN210666065 U CN 210666065U CN 201921427738 U CN201921427738 U CN 201921427738U CN 210666065 U CN210666065 U CN 210666065U
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- mems accelerometer
- piezoelectric ceramic
- circuit board
- analog converter
- power amplifier
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- 239000000919 ceramic Substances 0.000 claims abstract description 25
- 230000035945 sensitivity Effects 0.000 claims abstract description 8
- 238000000034 method Methods 0.000 claims description 4
- 238000004026 adhesive bonding Methods 0.000 claims description 2
- 230000001133 acceleration Effects 0.000 description 8
- 238000012544 monitoring process Methods 0.000 description 4
- 238000004519 manufacturing process Methods 0.000 description 3
- 238000005259 measurement Methods 0.000 description 3
- 238000011160 research Methods 0.000 description 2
- 238000012360 testing method Methods 0.000 description 2
- 229920000297 Rayon Polymers 0.000 description 1
- 238000010923 batch production Methods 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 238000013480 data collection Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 230000007774 longterm Effects 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P21/00—Testing or calibrating of apparatus or devices covered by the preceding groups
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01V—GEOPHYSICS; GRAVITATIONAL MEASUREMENTS; DETECTING MASSES OR OBJECTS; TAGS
- G01V13/00—Manufacturing, calibrating, cleaning, or repairing instruments or devices covered by groups G01V1/00 – G01V11/00
Abstract
The utility model provides a calibration device of seismic intensity instrument, which comprises a data acquisition unit and an MEMS accelerometer fixed on one side of a circuit board, wherein the MEMS accelerometer is electrically connected with the data acquisition unit; the other side of the circuit board is provided with a piezoelectric ceramic piece; the calibration device also comprises a program-controlled digital-to-analog converter and a power amplifier, wherein the program-controlled digital-to-analog converter is electrically connected with the piezoelectric ceramic piece through the power amplifier; the MEMS accelerometer receives the frequency and amplitude of the vibration signal adjusted by the program-controlled digital-to-analog converter in real time to obtain a calibrated vibration signal, and the data acquisition unit records and calculates the sensitivity of the MEMS accelerometer in real time, performs zero calibration and judges whether the MEMS accelerometer normally works.
Description
[ technical field ] A method for producing a semiconductor device
The utility model relates to a calibration technique especially relates to a calibration device of earthquake intensity appearance.
[ background of the invention ]
At present, an MEMS acceleration sensor is a micro-electromechanical sensor, can measure acceleration, inclination, vibration or impact, and is widely applied to the fields of aviation, aerospace, navigation, automobile industry, industrial monitoring, robots, consumer electronics and the like due to the advantages of small volume, light weight, low power consumption, mass production, low cost, high reliability and the like which are not possessed by a series of traditional inertial sensors
The MEMS acceleration sensor has some problems in application, wherein the most difficult problem to be solved is zero offset stability, the MEMS acceleration sensor is difficult to stably work for a long time in the application of attitude measurement and twice integral calculation positions, the long-term stability is poor, the obvious time drift phenomenon exists, in addition, the output error of a sensitive element can be caused by the imperfect processing and manufacturing process and the like, the error of a component usually accounts for more than 90% of the error of the whole system, and the research for improving the accuracy of the MEMS acceleration sensor is competitively developed in the related field aiming at the problem of poor accuracy of the MEMS acceleration sensor.
Two methods for improving the precision of the MEMS acceleration sensor are mainly used, one is to research or purchase a higher-precision MEMS inertial sensor, which inevitably brings about great increase in time and cost; the other method is to adopt field calibration to calibrate and compensate the zero position error of the MEMS inertial sensor, so as to improve the use precision of the MEMS inertial sensor. However, the error calibration test of the MEMS acceleration sensor in the two modes is complicated, the calibration time is long, each module can be calibrated independently, the efficiency is low, the cost is high, and the requirement of batch production is not facilitated; moreover, in order to obtain a relatively accurate zero position through field calibration, a tool with a horizontal reference must be manufactured, and the significance of field calibration is lost.
[ Utility model ] content
The utility model discloses with traditional seismometer cooperation, provide a compact structure, small, light in weight, accord with the intensity and survey the scene demand, can take the initiative and mark automatically, effective monitoring facilities sensitivity and whether normal work's calibration device of ground intensity appearance.
In order to realize the purpose of the utility model, the utility model discloses a technical scheme be:
a calibration device of a seismic intensity meter comprises an MEMS accelerometer and a data collector, wherein the MEMS accelerometer and the data collector are installed and fixed on one side of a circuit board, the MEMS accelerometer is electrically connected with the data collector, and the data collector receives an output signal of the MEMS accelerometer in real time and records data in real time;
a piezoelectric ceramic piece which generates vibration under the drive of a sine drive signal is arranged at the other side of the circuit board corresponding to the MEMS accelerometer;
the calibration device also comprises a program-controlled digital-to-analog converter and a power amplifier, wherein the program-controlled digital-to-analog converter is electrically connected with the piezoelectric ceramic piece through the power amplifier;
the programmable digital-to-analog converter outputs sinusoidal analog signals according to control requirements and generates sinusoidal driving signals for driving the piezoelectric ceramic piece after being amplified by the power amplifier, the piezoelectric ceramic piece generates vibration under the sinusoidal driving signals and transmits the vibration signals to the MEMS accelerometer on the other side of the circuit board, the MEMS accelerometer receives the vibration signals calibrated after adjusting the frequency and amplitude of the vibration signals by the programmable digital-to-analog converter in real time, and the data acquisition unit records and calculates the sensitivity of the MEMS accelerometer in real time, performs zero calibration and judges whether the MEMS accelerometer normally works or not.
Furthermore, the piezoelectric ceramic plate is arranged on the bottom end face of the circuit board in a gluing mode.
Further, the MEMS accelerometer is mounted on the top side of the circuit board.
Furthermore, the piezoelectric ceramic piece is provided with a positive connecting wire and a negative connecting wire which are electrically connected with the power amplifier.
Furthermore, a grounding end connected with a grounding wire is further arranged on the piezoelectric ceramic sheet.
The utility model has the advantages that:
the utility model discloses survey the scene demand according to the intensity, the test is markd to the MEMS accelerometer through the mode of additional driving source, mainly through the piezoceramics piece that produces mechanical vibration in MEMS accelerometer bottom installation initiative, be as the initiative source of marking through the piezoceramics piece promptly, when the calibration, frequency through programme-controlled digital analog converter adjustment vibration signal, the range, and produce the sinusoidal drive signal who drives the piezoceramics piece after enlarging through power amplifier, then data collection station record MEMS accelerometer receives the vibration signal of demarcation in real time, calculate the sensitivity of MEMS accelerometer, carry out the zero-position and mark and judge whether normal work of MEMS accelerometer.
Compare with driven unable demarcation MEMS accelerometer, the utility model discloses can initiatively produce the amplitude of vibration source and active control vibration and the frequency of vibration, complete machine compact structure, small, light in weight, effective monitoring facilities sensitivity, carry out the zero-bit and mark and whether the automatic definite equipment normally works, can extensively be used for engineering vibration measurement, geological exploration.
[ description of the drawings ]
Fig. 1 is a schematic front structural view of the present invention;
FIG. 2 is a schematic view of the reverse structure of the present invention;
fig. 3 is a schematic circuit diagram of the driving source of the present invention;
the following describes embodiments of the present invention in further detail with reference to the accompanying drawings.
[ detailed description ] embodiments
A calibration device of a seismic intensity meter is shown in figures 1 and 3 and comprises an MEMS accelerometer 2 and a data collector (not shown) which are arranged and fixed on the side surface of the top side of a circuit board 1, wherein the MEMS accelerometer 2 is electrically connected with the data collector, and the data collector receives an output signal of the MEMS accelerometer in real time and records data in real time; and a piezoelectric ceramic piece 3 which generates vibration under the drive of a sine drive signal is arranged at the corresponding position of the bottom surface of the other side of the circuit board 1 and the MEMS accelerometer 2, and the piezoelectric ceramic piece 3 is arranged on the bottom end surface of the circuit board 1 in a viscose mode.
As shown in fig. 2 and fig. 3, the calibration apparatus further includes a programmable digital-to-analog converter 4 and a power amplifier 5, the programmable digital-to-analog converter 4 is electrically connected to the piezoelectric ceramic plate 3 through the power amplifier 5, wherein the piezoelectric ceramic plate 3 is provided with a positive connection line 30 and a negative connection line 31 electrically connected to the power amplifier 5, and the piezoelectric ceramic plate 3 is further provided with a ground terminal 32 connected to a ground lead.
When the circuit board works, the program-controlled digital-to-analog converter 4 outputs a sinusoidal analog signal according to control requirements, and generates a sinusoidal driving signal for driving the piezoelectric ceramic piece 3 after being amplified by the power amplifier 5, and the piezoelectric ceramic piece 3 generates vibration under the sinusoidal driving signal, transmits the vibration to the MEMS accelerometer 2 on the other side of the circuit board 1 and outputs a vibration signal; then, after the MEMS accelerometer 2 receives the frequency and amplitude of the vibration signal adjusted by the program-controlled digital-to-analog converter 4 in real time, the data acquisition unit records the vibration signal in real time to obtain a calibration vibration signal; setting the amplitude of a sinusoidal driving signal for driving the piezoelectric ceramic piece to be Vc, and the conversion coefficient of the electric signal and the vibration signal to be Sc, wherein the output vibration signal of the piezoelectric ceramic piece is Ac-Sc multiplied by Vc; and obtaining the voltage value of the MEMS accelerometer as Va according to the signals acquired by the data acquisition unit, further calculating the sensitivity corresponding to the voltage value of the MEMS accelerometer as Sa-c being Ac multiplied by Va, performing zero calibration and judging whether the MEMS accelerometer normally works.
Compare with driven unable demarcation MEMS accelerometer, the utility model discloses can initiatively produce the amplitude of vibration source and active control vibration and the frequency of vibration, complete machine compact structure, small, light in weight, effective monitoring facilities sensitivity, carry out the zero-bit and mark and whether the automatic definite equipment normally works, can extensively be used for engineering vibration measurement, geological exploration.
The above-mentioned embodiments are only preferred embodiments of the present invention, not limiting the scope of the present invention, and all equivalent changes made by the shape, structure and principle of the present invention should be covered by the protection scope of the present invention.
Claims (5)
1. A calibration device of a seismic intensity meter comprises an MEMS accelerometer and a data collector, wherein the MEMS accelerometer and the data collector are installed and fixed on one side of a circuit board, the MEMS accelerometer is electrically connected with the data collector, and the data collector receives an output signal of the MEMS accelerometer in real time and records data in real time; the method is characterized in that:
a piezoelectric ceramic piece which generates vibration under the drive of a sine drive signal is arranged at the other side of the circuit board corresponding to the MEMS accelerometer;
the calibration device also comprises a program-controlled digital-to-analog converter and a power amplifier, wherein the program-controlled digital-to-analog converter is electrically connected with the piezoelectric ceramic piece through the power amplifier;
the programmable digital-to-analog converter outputs sinusoidal analog signals according to control requirements and generates sinusoidal driving signals for driving the piezoelectric ceramic piece after being amplified by the power amplifier, the piezoelectric ceramic piece generates vibration under the sinusoidal driving signals and transmits the vibration signals to the MEMS accelerometer on the other side of the circuit board, the MEMS accelerometer receives the vibration signals calibrated after adjusting the frequency and amplitude of the vibration signals by the programmable digital-to-analog converter in real time, and the data acquisition unit records and calculates the sensitivity of the MEMS accelerometer in real time, performs zero calibration and judges whether the MEMS accelerometer normally works or not.
2. The apparatus of claim 1, wherein the piezoelectric ceramic plate is mounted on the bottom surface of the circuit board by gluing.
3. The apparatus of claim 1, wherein the MEMS accelerometer is mounted on a top side of the circuit board.
4. The calibration device of the seismic intensity meter of claim 1, wherein the piezoelectric ceramic plate is provided with a positive connecting wire and a negative connecting wire which are electrically connected with the power amplifier.
5. The apparatus of claim 1, wherein the piezoelectric ceramic plate further comprises a ground terminal connected to a ground lead.
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
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| CN2019107186748 | 2019-08-05 | ||
| CN201910718674 | 2019-08-05 |
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| CN210666065U true CN210666065U (en) | 2020-06-02 |
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| CN201921427738.0U Active CN210666065U (en) | 2019-08-05 | 2019-08-29 | Calibration device of seismic intensity instrument |
| CN201910805802.2A Active CN110531443B (en) | 2019-08-05 | 2019-08-29 | Calibration device of earthquake intensity meter |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN110531443B (en) * | 2019-08-05 | 2024-04-16 | 珠海市泰德企业有限公司 | Calibration device of earthquake intensity meter |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN112733254A (en) * | 2020-12-28 | 2021-04-30 | 华域动力总成部件系统(上海)有限公司 | Optimization design method for cascade system of automobile hydraulic torque converter |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5458222A (en) * | 1994-12-05 | 1995-10-17 | General Electric Company | Active vibration control of structures undergoing bending vibrations |
| CN102981522B (en) * | 2012-11-29 | 2015-03-25 | 中国科学院武汉物理与数学研究所 | Small active vibration control system based on piezoelectric ceramic and piezoelectric accelerometer |
| CN103399570B (en) * | 2013-07-29 | 2015-10-28 | 华南理工大学 | A kind of virtual space aircraft wall panel structure flutter/vibration control apparatus and method |
| CN204649977U (en) * | 2015-06-09 | 2015-09-16 | 北京吉利客科技股份有限公司 | Seismic intensity self-operated measuring unit |
| CN106426089B (en) * | 2016-09-30 | 2018-07-20 | 华南理工大学 | Flexible three-freedom parallel institution vibration detection control device and control method |
| CN210666065U (en) * | 2019-08-05 | 2020-06-02 | 珠海市泰德企业有限公司 | Calibration device of seismic intensity instrument |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110531443B (en) * | 2019-08-05 | 2024-04-16 | 珠海市泰德企业有限公司 | Calibration device of earthquake intensity meter |
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| CN110531443B (en) | 2024-04-16 |
| CN110531443A (en) | 2019-12-03 |
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