CN114990666B - Hole sealing method for metal surface chemical treatment - Google Patents

Hole sealing method for metal surface chemical treatment Download PDF

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Publication number
CN114990666B
CN114990666B CN202210683618.7A CN202210683618A CN114990666B CN 114990666 B CN114990666 B CN 114990666B CN 202210683618 A CN202210683618 A CN 202210683618A CN 114990666 B CN114990666 B CN 114990666B
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hole sealing
water
product
sealing liquid
value
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CN114990666A (en
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李玉琼
陈立航
郑宣
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Chongqing Zhenbao Technology Co ltd
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Chongqing Zhenbao Technology Co ltd
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    • CCHEMISTRY; METALLURGY
    • C25ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25DPROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
    • C25D11/00Electrolytic coating by surface reaction, i.e. forming conversion layers
    • C25D11/02Anodisation
    • C25D11/04Anodisation of aluminium or alloys based thereon
    • C25D11/18After-treatment, e.g. pore-sealing
    • C25D11/24Chemical after-treatment
    • C25D11/246Chemical after-treatment for sealing layers

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  • Chemical & Material Sciences (AREA)
  • General Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Electrochemistry (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Detergent Compositions (AREA)

Abstract

The invention discloses a hole sealing liquid and a hole sealing method for metal surface chemical treatment, which belong to the preparation technology of parts for chemical vapor deposition and dry etching equipment, and comprise the following raw material components: water, ammonium acetate and sodium dihydrogen phosphate, the beneficial effects of the invention are that: the hole sealing liquid hole sealing product prepared by water, ammonium acetate and sodium dihydrogen phosphate according to the proportion has good effect and high voltage resistance; the hole sealing liquid consists of chemical medicines, and the water for high-temperature hole sealing is regulated and controlled by utilizing ion balance and chemical sedimentation; the hole sealing liquid reduces the water quality requirement, is beneficial to the production of large-area products, and can achieve ideal hole sealing effect.

Description

Hole sealing method for metal surface chemical treatment
Technical Field
The invention belongs to the technical field of part preparation for chemical vapor deposition and dry etching equipment, and particularly relates to a hole sealing method for metal surface chemical treatment.
Background
With the rapid development of the photoelectric industry and the semiconductor industry, high-end products of aluminum alloy are widely used in equipment in the industries, such as dry etching equipment and chemical vapor deposition equipment, 5052 series and 6061 series aluminum alloys are widely used, and the surfaces of the 6061 series and 5052 series aluminum alloys are subjected to electrochemical treatment, so that the performances of voltage resistance, corrosion resistance, thermal shock resistance and the like of the aluminum alloys can be remarkably improved.
However, due to the high requirements of the photoelectric industry and the semiconductor industry, the equipment component production process cannot contain metal ions such as nickel, copper, iron and the like, and the high requirements of 18MΩ & cm and above are set for water quality, so that the addition of a plurality of ash inhibitors, surfactants, accelerators and the like is avoided, and the high quality requirements of the common hole sealing process cannot be met. Therefore, the additive is added into the hole sealing water to regulate and control the hole sealing liquid, reduce the interference caused by impurities in the water and improve the voltage and corrosion resistance of the product.
Disclosure of Invention
In view of the above, the present invention aims to provide a hole sealing method for metal surface chemical treatment.
In order to achieve the above purpose, the present invention provides the following technical solutions: the hole sealing liquid for the chemical treatment of the metal surface comprises the following raw material components: the resistivity is 3-7MΩ cm water and the additive comprises ammonium acetate and sodium dihydrogen phosphate, wherein the mass percentage of the ammonium acetate is 0.008-0.012%, and the mass percentage of the sodium dihydrogen phosphate is 0.0008-0.0012%.
Further, the ratio of ammonium acetate to sodium dihydrogen phosphate is 10:1.
further, 800-1200kg of water, 0.08-0.12kg of ammonium acetate and 0.008-0.012kg of sodium dihydrogen phosphate.
The hole sealing method of the hole sealing liquid for the chemical treatment of the metal surface comprises the following steps:
s1, adding 0.08-0.12% of ammonium acetate and 0.008-0.012% of sodium dihydrogen phosphate into the water obtained in the step S1 to prepare a hole sealing liquid, and uniformly stirring and mixing the hole sealing liquid and the water to measure the pH value of the hole sealing liquid;
s3, adding glacial acetic acid and ammonia water according to the pH value to enable the pH value of the hole sealing liquid to be between 5.5 and 6.0;
s4, starting heating equipment, and heating the hole sealing liquid to 90-100 ℃;
s5, carrying out hole sealing pretreatment on a product to be subjected to hole sealing, transferring the treated product into hole sealing equipment, enabling hole sealing liquid to submerge the product, and starting air stirring;
s6, calculating hole sealing time according to the film thickness, cleaning, drying and packaging the product after hole sealing.
Further, the hole sealing time in the step S6 is calculated in such a way that the hole sealing time of the film thickness of 1 μm is 80-90 seconds.
Further, in the step S6, the product is dried and cleaned before being packaged, and the product is subjected to two steps of water cleaning and high-pressure cleaning.
Further, in the step S5, the product is cleaned and then placed in the hole sealing liquid, and the surface is required to be kept moist.
In the step S3, glacial acetic acid is added when the pH value is higher, and ammonia water is added when the pH value is lower.
Further, the hole sealing device in the step S1 is a hole sealing groove, and the heating device in the step S4 is a steam generator.
The invention has the beneficial effects that:
1. the hole sealing liquid prepared from water, ammonium acetate and sodium dihydrogen phosphate in proportion has unique components, good hole sealing product effect and obviously improved voltage resistance after hole sealing, and is suitable for large-area aluminum alloy products with holes or reducing small holes.
2. The hole sealing liquid consists of chemical medicines, and the water for high-temperature hole sealing is regulated and controlled by utilizing ion balance and chemical sedimentation.
3. The hole sealing liquid reduces the water quality requirement, is beneficial to the production of large-area products, and can achieve ideal hole sealing effect.
4. The hole sealing liquid and the hole sealing method solve the problem of high requirement on water quality in the production of aluminum alloy parts of dry etching equipment and chemical vapor deposition equipment by boiling water hole sealing, and can achieve better effect without adding ash inhibitor and the like.
Additional advantages, objects, and features of the invention will be set forth in part in the description which follows and in part will become apparent to those having ordinary skill in the art upon examination of the following or may be learned from practice of the invention. The objects and other advantages of the invention may be realized and obtained by means of the instrumentalities and combinations particularly pointed out in the specification.
Drawings
In order to make the objects, technical solutions and advantageous effects of the present invention more clear, the present invention provides the following drawings for description:
FIG. 1 is a photograph of a surface scanning electron microscope after hole sealing using a hole sealing liquid of the present invention in example 1;
FIG. 2 is a photograph of a cross-sectional scanning electron microscope after hole sealing using the hole sealing liquid of the present invention in example 1;
FIG. 3 is a photograph of a surface scanning electron microscope of comparative example 1 without hole sealing;
FIG. 4 is a photograph of a cross-sectional scanning electron microscope of comparative example 1 without hole sealing;
FIG. 5 is a photograph of a surface scanning electron microscope after hole sealing using a conventional hole sealing liquid in comparative example 2;
fig. 6 is a photograph of a cross-sectional scanning electron microscope after sealing with a conventional sealing liquid of comparative example 2.
Detailed Description
The following will clearly and completely describe the technical solutions in the embodiments of the present invention, and it is obvious that the described embodiments are only some embodiments of the present invention, but not all embodiments. Based on the embodiments of the present invention, other embodiments that may be obtained by those of ordinary skill in the art without making any inventive effort are within the scope of the present invention.
Example 1: the hole sealing liquid for the metal surface chemical treatment comprises the following raw material components in parts by mass: 800kg of water, 0.08kg of ammonium acetate, 0.008kg of sodium dihydrogen phosphate, and the ratio of ammonium acetate to sodium dihydrogen phosphate is 10:1, a step of;
a hole sealing method using a hole sealing liquid for metal surface chemical treatment comprises the following steps:
s1, adding 800kg of water into a hole sealing groove, and measuring the pH value and the resistivity of the water, wherein the water can be used when the resistivity is 5MΩ;
s2, adding 0.08kg of ammonium acetate and 0.008kg of sodium dihydrogen phosphate into the water in the step S1 to prepare a hole sealing liquid, uniformly stirring and mixing, measuring the pH value of the hole sealing liquid, wherein the sodium dihydrogen phosphate is used as a water softener, and acts with cations such as calcium, magnesium and the like in the water to generate precipitate for separation, and the ammonium acetate and the sodium dihydrogen phosphate are added into the water to help to keep the constant pH value of the hole sealing liquid, and ionized cations can balance anions in the water to keep the solution stable;
s3, adding glacial acetic acid and ammonia water according to the pH value, when the pH value of the hole sealing liquid is higher, adding the glacial acetic acid to reduce the pH value of the hole sealing liquid, and when the pH value of the hole sealing liquid is lower, adding the ammonia water to increase the pH value of the hole sealing liquid to enable the pH value of the hole sealing liquid to be between 5.5 and 6.0;
s4, starting a steam generator, and heating the hole sealing liquid to 95 ℃;
s5, carrying out electrochemical treatment on a product to be sealed, transferring the treated product into sealing equipment, submerging the product by using sealing liquid, keeping the product moist during transfer, and starting air stirring;
s6, calculating hole sealing time according to the film thickness, wherein the hole sealing time of a film thickness product with the film thickness of 1 mu m is 85 seconds, and drying and packaging the product subjected to hole sealing after washing with water and high-pressure washing.
Example 2: the hole sealing liquid for the metal surface chemical treatment comprises the following raw material components in parts by mass: 1000kg of water, 0.1kg of ammonium acetate, 0.01kg of sodium dihydrogen phosphate, the ratio of ammonium acetate to sodium dihydrogen phosphate being 10:1,
a hole sealing method of hole sealing liquid for metal surface chemical treatment comprises the following steps:
s1, adding 1000kg of water into a hole sealing groove, and measuring the pH value and the resistivity of the water, wherein the water can be used when the resistivity is 5MΩ;
s2, adding 0.1kg of ammonium acetate and 0.01kg of sodium dihydrogen phosphate into the water in the step S1 to prepare a hole sealing liquid, uniformly stirring and mixing, measuring the pH value of the hole sealing liquid, wherein the sodium dihydrogen phosphate is used as a water softener, and acts with cations such as calcium, magnesium and the like in the water to generate precipitate for separation, and the ammonium acetate and the sodium dihydrogen phosphate are added into the water to help to keep the constant pH value of the hole sealing liquid, and ionized cations can balance anions in the water to keep the solution stable;
s3, adding glacial acetic acid and ammonia water according to the pH value, when the pH value of the hole sealing liquid is higher, adding the glacial acetic acid to reduce the pH value of the hole sealing liquid, and when the pH value of the hole sealing liquid is lower, adding the ammonia water to increase the pH value of the hole sealing liquid to enable the pH value of the hole sealing liquid to be between 5.5 and 6.0;
s4, starting a steam generator, and heating the hole sealing liquid to 95 ℃;
s5, carrying out electrochemical treatment on a product to be sealed, transferring the treated product into sealing equipment, submerging the product by using sealing liquid, keeping the product moist during transfer, and starting air stirring;
s6, calculating hole sealing time according to the film thickness, wherein the hole sealing time of a film thickness product with the film thickness of 1 mu m is 85 seconds, and drying and packaging the product subjected to hole sealing after washing with water and high-pressure washing.
Example 3: the hole sealing liquid for the metal surface chemical treatment comprises the following raw material components in parts by mass: 1200kg of water, 0.12kg of ammonium acetate, 0.012kg of sodium dihydrogen phosphate, the ratio of ammonium acetate to sodium dihydrogen phosphate being 10:1.
a hole sealing method using a hole sealing liquid for metal surface chemical treatment comprises the following steps:
s1, adding 1200kg of water into a hole sealing groove, and measuring the pH value and the resistivity of the water, wherein the water can be used when the resistivity is 5MΩ;
s2, adding 0.12kg of ammonium acetate and 0.012kg of sodium dihydrogen phosphate into the water in the step S1 to prepare a hole sealing liquid, uniformly stirring and mixing, measuring the pH value of the hole sealing liquid, wherein the sodium dihydrogen phosphate is used as a water softener, and acts with cations such as calcium, magnesium and the like in the water to generate precipitate for separation, and the ammonium acetate and the sodium dihydrogen phosphate are added into the water to help to keep the constant pH value of the hole sealing liquid, and ionized cations can balance anions in the water to keep the solution stable;
s3, adding glacial acetic acid and ammonia water according to the pH value, when the pH value of the hole sealing liquid is higher, adding the glacial acetic acid to reduce the pH value of the hole sealing liquid, and when the pH value of the hole sealing liquid is lower, adding the ammonia water to increase the pH value of the hole sealing liquid to enable the pH value of the hole sealing liquid to be between 5.5 and 6.0;
s4, starting a steam generator, and heating the hole sealing liquid to 95 ℃;
s5, carrying out electrochemical treatment on a product to be sealed, transferring the treated product into sealing equipment, submerging the product by using sealing liquid, keeping the product moist during transfer, and starting air stirring;
s6, calculating hole sealing time according to the film thickness, wherein the hole sealing time of a film thickness product with the film thickness of 1 mu m is 85 seconds, and drying and packaging the product subjected to hole sealing after washing with water and high-pressure washing.
Comparative example 1:
s1, carrying out electrochemical pretreatment on a product, and then not carrying out hole sealing;
s2, observing the microscopic morphology of the treated product.
Comparative example 2:
s1, carrying out electrochemical pretreatment on a product;
s2, placing the product in pure water for hole sealing;
s3, drying the hole after hole sealing is finished, and observing the microscopic morphology of the dried product.
The performance test of different hole sealing methods on products is shown in the following table:
test meter
From the above table: the product of comparative example 1, which was not subjected to hole sealing, was inferior in both AC and DC voltage breakdown resistance to the product subjected to hole sealing; the product subjected to hole sealing by adopting the hole sealing liquid has higher AC and DC voltage breakdown resistance than the traditional hole sealing in comparative example 2, wherein the AC breakdown voltage resistance is 0.43KV higher than that of the traditional hole sealing and 0.58KV higher than that of the product subjected to hole sealing without hole sealing. The DC breakdown voltage is 1.18KV higher than that of the traditional hole sealing and 1.28KV higher than that of the hole sealing.
Fig. 1 is a surface scanning electron micrograph of example 1, and fig. 2 is a cross-sectional scanning electron micrograph of example 1. Fig. 3 is a surface electron micrograph of comparative example 1 in which hole sealing was not performed, fig. 4 is a cross-sectional electron micrograph of comparative example 1 in which hole sealing was not performed, fig. 5 is a conventional hole sealing surface electron micrograph of comparative example 2, and fig. 6 is a conventional hole sealing cross-sectional electron micrograph of comparative example 2.
From a comparison of fig. 1, 3 and 5, it can be seen that there are a large number of nano-scale micropores on the surface of the non-plugged sample, these micropores are typical features of the sample after electrochemical treatment, and the existence of the micropores significantly affects the AC breakdown voltage and DC breakdown voltage resistance of the sample, as shown in the test table data. In the hole sealing sample, a large number of lamellar structures are piled on the surface, and the lamellar structures on the surface of the sample adopting the hole sealing liquid are piled densely and uniformly, so that the flatness is good. The surface laminated structure of the sample adopting the traditional hole sealing liquid is loose and uneven in accumulation, and poor in flatness, so that the AC breakdown voltage resistance and DC breakdown voltage resistance of the sample are related to the accumulation uniformity of the laminated structure, and the more dense and uniform the accumulation, the better the AC breakdown voltage resistance and DC breakdown voltage resistance are.
By comparing fig. 2, fig. 4 and fig. 6, it can be seen that the section photographs of the sample without hole sealing are hollow columnar structures, the hole sealing samples are solid structures, and the columnar structures of the sample sealed by the hole sealing liquid of the invention are vertical to the surface of the sample and are uniformly and orderly distributed. The columnar structure of the sample sealed by the traditional hole sealing liquid is inclined to the surface of the sample, the distribution is disordered and uneven, the distribution difference of the hole sealing structures is embodied above the AC breakdown voltage resistance and DC breakdown voltage resistance, the vertical distribution is uniform, the AC breakdown voltage resistance and DC breakdown voltage resistance of the hole sealing structure are good, and the AC breakdown voltage resistance and DC breakdown voltage resistance of the hole sealing structure with uneven inclined distribution are poor.
Finally, it is noted that the above-mentioned preferred embodiments are only intended to illustrate rather than limit the invention, and that, although the invention has been described in detail by means of the above-mentioned preferred embodiments, it will be understood by those skilled in the art that various changes in form and details may be made therein without departing from the scope of the invention as defined by the appended claims.

Claims (6)

1. A hole sealing method for metal surface chemical treatment is characterized in that: the method comprises the following steps:
s1, adding 800-1200kg of water with resistivity of 3-7MΩ & cm into hole sealing equipment, and measuring the pH value and resistivity of the water;
s2, adding 0.08-0.12kg of ammonium acetate and 0.008-0.012kg of sodium dihydrogen phosphate into the water obtained in the step S1 to prepare a hole sealing liquid, and uniformly stirring and mixing the hole sealing liquid and the water to measure the pH value of the hole sealing liquid;
s3, adding glacial acetic acid and ammonia water according to the pH value to enable the pH value of the hole sealing liquid to be between 5.5 and 6.0;
s4, starting heating equipment, and heating the hole sealing liquid to 90-100 ℃;
s5, carrying out hole sealing pretreatment on a product to be subjected to hole sealing, transferring the treated product into hole sealing equipment, enabling hole sealing liquid to submerge the product, and starting air stirring;
s6, calculating hole sealing time according to the film thickness, cleaning, drying and packaging the product after hole sealing.
2. The hole sealing method for the chemical treatment of a metal surface according to claim 1, wherein: and S6, calculating the hole sealing time in the step of 80-90 seconds, wherein the hole sealing time is calculated in a mode of 1 mu m of film thickness.
3. The hole sealing method for the chemical treatment of a metal surface according to claim 1, wherein: and S6, the product is dried and cleaned before being packaged, and the product is subjected to two steps of water cleaning and high-pressure cleaning.
4. The hole sealing method for the chemical treatment of a metal surface according to claim 1, wherein: and S5, keeping the surface moist when the product is placed in the hole sealing liquid after being cleaned in the step of cleaning.
5. The hole sealing method for the chemical treatment of a metal surface according to claim 1, wherein: and S3, adding glacial acetic acid when the pH value is higher and adding ammonia water when the pH value is lower in the step of S3.
6. The hole sealing method for the chemical treatment of a metal surface according to claim 1, wherein: the hole sealing device in the step S1 is a hole sealing groove, and the heating device in the step S4 is a steam generator.
CN202210683618.7A 2022-06-17 2022-06-17 Hole sealing method for metal surface chemical treatment Active CN114990666B (en)

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