CN114990509A - Strengthening method of medium-entropy alloy coating - Google Patents
Strengthening method of medium-entropy alloy coating Download PDFInfo
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- 238000000576 coating method Methods 0.000 title claims abstract description 80
- 239000011248 coating agent Substances 0.000 title claims abstract description 78
- 238000000034 method Methods 0.000 title claims abstract description 24
- 238000005728 strengthening Methods 0.000 title claims abstract description 24
- 238000004544 sputter deposition Methods 0.000 claims abstract description 84
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 claims abstract description 23
- 238000010438 heat treatment Methods 0.000 claims abstract description 22
- 239000006104 solid solution Substances 0.000 claims abstract description 14
- 238000001816 cooling Methods 0.000 claims abstract description 13
- 230000032683 aging Effects 0.000 claims abstract description 12
- 229910052786 argon Inorganic materials 0.000 claims abstract description 12
- 238000001755 magnetron sputter deposition Methods 0.000 claims abstract description 11
- 238000010791 quenching Methods 0.000 claims abstract description 10
- 230000000171 quenching effect Effects 0.000 claims abstract description 10
- 229910000765 intermetallic Inorganic materials 0.000 claims abstract description 9
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- 239000007789 gas Substances 0.000 claims description 9
- 239000000243 solution Substances 0.000 claims description 9
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- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 claims description 6
- 229910052782 aluminium Inorganic materials 0.000 claims description 6
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims description 6
- 238000001035 drying Methods 0.000 claims description 6
- 239000003344 environmental pollutant Substances 0.000 claims description 6
- 238000000227 grinding Methods 0.000 claims description 6
- 238000005498 polishing Methods 0.000 claims description 6
- 231100000719 pollutant Toxicity 0.000 claims description 6
- 230000008569 process Effects 0.000 claims description 6
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 6
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- CWYNVVGOOAEACU-UHFFFAOYSA-N Fe2+ Chemical compound [Fe+2] CWYNVVGOOAEACU-UHFFFAOYSA-N 0.000 claims description 3
- 229910002545 FeCoNi Inorganic materials 0.000 claims description 3
- 229910000831 Steel Inorganic materials 0.000 claims description 3
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- 229910052751 metal Inorganic materials 0.000 claims description 2
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/34—Sputtering
- C23C14/35—Sputtering by application of a magnetic field, e.g. magnetron sputtering
- C23C14/352—Sputtering by application of a magnetic field, e.g. magnetron sputtering using more than one target
-
- C—CHEMISTRY; METALLURGY
- C22—METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
- C22C—ALLOYS
- C22C30/00—Alloys containing less than 50% by weight of each constituent
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
- C23C14/14—Metallic material, boron or silicon
- C23C14/16—Metallic material, boron or silicon on metallic substrates or on substrates of boron or silicon
- C23C14/165—Metallic material, boron or silicon on metallic substrates or on substrates of boron or silicon by cathodic sputtering
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/58—After-treatment
- C23C14/5806—Thermal treatment
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/58—After-treatment
- C23C14/5893—Mixing of deposited material
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Abstract
The invention discloses a strengthening method of a medium-entropy alloy coating, which comprises the following steps: treating the surface of a component needing coating; respectively installing a medium-entropy alloy target and an Al target at two direct-current target positions of a vacuum magnetron sputtering coating machine, fixing a component serving as a base body on a sample table, and introducing argon for pre-sputtering when the vacuum degree in a sputtering chamber reaches a preset value; adjusting the air pressure in the sputtering chamber, setting sputtering power and carrying out co-sputtering coating; heating the coated component to 1200 ℃, preserving heat, and then carrying out quenching treatment; and heating the component to 600 ℃, preserving heat, and cooling along with the furnace to realize the strengthening of the medium-entropy alloy coating. According to the invention, the medium-entropy alloy and the Al target are co-sputtered onto the surface of the component through magnetron sputtering, a proper amount of intermetallic compound is formed on the basis of ensuring the original solid solution of the coating by controlling the sputtering power of the Al target, and the medium-entropy alloy coating is effectively strengthened through solid solution treatment and aging treatment.
Description
Technical Field
The invention relates to the technical field of surface coatings, in particular to a strengthening method of a medium-entropy alloy coating.
Background
The medium-entropy alloy is a novel metal material developed in recent years, consists of three main-element alloys and has a single solid solution phase. Compared with the traditional metal material, the medium-entropy alloy material has good strength, hardness and wear resistance, and is comparable to or even superior to most high-entropy alloys and multi-phase alloys. In the aspect of surface treatment, the medium entropy alloy is used as a coating material, can improve the reliability of a component, and can be used as a hard coating material which is popularized and used.
Magnetron sputtering is a physical vapor deposition technique that not only allows large area coatings, but also has some other advantages such as: the prepared coating has uniform surface and good bonding force with the substrate, and the quality of the coating can be further regulated and controlled by controlling magnetron sputtering parameters, so that the element content in the coating can be effectively controlled.
The mechanical property of the existing medium-entropy alloy coating still cannot meet the use requirement under certain specific use conditions, so that the mechanical property of the medium-entropy alloy coating needs to be further improved.
Disclosure of Invention
In order to solve the technical problems, the invention aims to provide a strengthening method of a medium-entropy alloy coating, which is characterized in that a medium-entropy alloy and an Al target are co-sputtered onto the surface of a component through magnetron sputtering, a proper amount of intermetallic compounds are formed on the basis of ensuring the original solid solution of the coating by controlling the sputtering power of the Al target, and the medium-entropy alloy coating is effectively strengthened through solution treatment and aging treatment.
In order to achieve the technical purpose and achieve the technical effect, the invention is realized by the following technical scheme:
a strengthening method of a medium-entropy alloy coating comprises the following steps:
(1) component processing
Sequentially grinding, polishing, cleaning and drying the surface of a component to be coated for later use;
(2) target pretreatment
Respectively installing the intermediate entropy alloy target and the Al target at two direct current target positions of a vacuum magnetron sputtering coating machine; fixing the member treated in the step (1) on a sample table as a base body, closing a sputtering chamber, firstly performing low-vacuum pumping, and starting a molecular pump to perform high-vacuum pumping when the air pressure in a cavity of the sputtering chamber reaches below 4 Pa; when the vacuum degree in the sputtering chamber reaches a preset value, introducing argon gas, and carrying out pre-sputtering to remove pollutants on the surface of the target material;
(3) co-sputtered coating
Adjusting the air pressure in the sputtering chamber, setting the sputtering power of the medium-entropy alloy target and the Al target, and carrying out co-sputtering coating; after sputtering is finished, cooling the component to room temperature along with the furnace and taking out;
(4) solution treatment
Heating the coated component to 1200 ℃ through a vacuum induction furnace, preserving heat for 2h, and then quenching to dissolve the excessive phase generated after the Al element is added to the medium-entropy alloy coating into the solid solution;
(5) aging treatment
And (3) heating the component treated in the step (4) to 600 ℃ through a vacuum induction furnace, preserving heat for 2-8 h, and cooling along with the furnace to precipitate an aluminum-based intermetallic compound so as to strengthen the medium-entropy alloy coating.
Further, the member is selected from a steel material, a cast iron type material or other non-ferrous metal type material.
Further, the cleaning process in the step (1) adopts ultrasonic waves to sequentially carry out absolute ethyl alcohol cleaning and plasma water cleaning.
Further, the medium entropy alloy target is selected from one of a CoCrNi alloy target, a FeCoNi alloy target, a CrFeNi alloy target and a CrNiTi alloy target; the purity of the Al target is more than 99.9%.
Further, the degree of vacuum in the sputtering chamber during the preliminary sputtering was 7X 10 -4 Pa, and the time of pre-sputtering is 10 min.
Further, in the step (3), the temperature of the matrix before sputtering is 100-500 ℃; adjusting the air pressure in the sputtering chamber to 0.2-0.5 Pa; the sputtering power of the medium-entropy alloy target is 100W, and the sputtering power of the Al target is 20-100W; the sputtering time is 10-60 min.
Further, in the step (2), argon gas is introduced at a flow rate of 50 sccm.
Furthermore, the heating mode of the solution treatment and the aging treatment is surface heating.
The invention has the beneficial effects that:
the invention ionizes argon under the action of an electric field by co-sputtering, ionized argon ions bombard the surfaces of an entropy alloy target and an Al target, and the target material sputters a large amount of target material atoms to deposit and form a coating on a component; heating the coated component through the surface of a vacuum induction furnace, preserving heat, and then quenching to promote the excessive phase generated after the Al element is added to the medium-entropy alloy coating to be dissolved in the solid solution; and then heating to a lower temperature again for long time, and carrying out aging treatment to achieve the strengthening effect of the medium-entropy alloy coating.
Al element is added into the medium entropy alloy, so that intermetallic compounds can be generated on the basis of forming solid solution, a precipitation strengthening effect is formed on the basis of solid solution strengthening, and the wear resistance of the alloy can be further improved.
The preparation method adopts the co-sputtering method to prepare the intermediate entropy alloy coating, on one hand, the preparation quality of the coating is ensured, on the other hand, the content and the phase composition of Al in the intermediate entropy alloy coating can be effectively regulated and controlled through controlling the power parameter of the Al target, and the Al phase enrichment caused by adding excessive Al is prevented, so that the influence of the Al phase enrichment on the hardness and the wear resistance of the coating is avoided.
The invention combines magnetron co-sputtering and subsequent heat treatment technology, controls the components and the structure of the entropy alloy coating by controlling the sputtering power of the Al target, further regulates and controls the structure of the coating by applying the solid solution treatment and the aging treatment process on the basis, and realizes the effective strengthening of the entropy alloy coating.
The method has the advantages of good repeatability of production process, high deposition speed and high process controllability, and the obtained coating has the advantages of excellent strength, hardness and wear resistance, high compactness, uniform film formation and the like, is easy to realize industrialization, and can be used for surface strengthening treatment of components.
Drawings
FIG. 1 is an XRD spectrum of an entropy alloy CoCrNi target and an Al target co-sputtered coating in example 1 of the invention.
FIG. 2 is SEM image of the surface and cross section of the co-sputtered coating of the entropy alloy CoCrNi target and the Al target in example 1 of the invention;
FIG. 3 shows the hardness change of the coating under different sputtering powers of the Al target when the medium entropy alloy CoCrNi target and the Al target of the embodiment 1 are co-sputtered.
Detailed Description
The following detailed description of the preferred embodiments of the present invention, taken in conjunction with the accompanying drawings, will make the advantages and features of the present invention more comprehensible to those skilled in the art, and will thus provide a clear and concise definition of the scope of the present invention.
The invention provides a strengthening method of a medium-entropy alloy coating, which comprises the following steps:
(1) component processing
Sequentially grinding, polishing, cleaning and drying the surface of a component to be coated for later use; the component is selected from steel materials, cast iron materials or other non-ferrous metal materials; wherein, the cleaning process adopts ultrasonic waves to sequentially carry out absolute ethyl alcohol cleaning and plasma water cleaning;
(2) target pretreatment
Respectively installing the intermediate entropy alloy target and the Al target at two direct current target positions of a vacuum magnetron sputtering coating machine; fixing the member treated in the step (1) on a sample table as a base body, closing a sputtering chamber, firstly performing low-vacuum pumping, and starting a molecular pump to perform high-vacuum pumping when the air pressure in a cavity of the sputtering chamber reaches below 4 Pa; when the vacuum degree in the sputtering chamber reaches a preset value, introducing argon gas, and carrying out pre-sputtering to remove pollutants on the surface of the target material;
wherein the medium entropy alloy target is selected from one of a CoCrNi alloy target, a FeCoNi alloy target, a CrFeNi alloy target and a CrNiTi alloy target; the purity of the Al target is more than 99.9%; vacuum in sputtering chamber during pre-sputteringDegree of 7X 10 -4 Pa, introducing argon gas with the flow rate of 50sccm, and pre-sputtering for 10 min;
(3) co-sputtered coating
Before sputtering, heating the substrate to 100-500 ℃; adjusting the air pressure in the sputtering chamber to 0.2-0.5 Pa, setting the sputtering power of the medium-entropy alloy target to be 100W and the sputtering power of the Al target to be 20-100W, and carrying out co-sputtering coating; the sputtering time is 10-60 min; after sputtering is finished, cooling the component to room temperature along with the furnace and taking out;
(4) solution treatment
Heating the coated component to 1200 ℃ through the surface of a vacuum induction furnace, preserving heat for 2h, and then quenching to dissolve the excessive phase generated after the Al element is added to the medium-entropy alloy coating into a solid solution; wherein the quenching treatment adopts oil quenching;
(5) aging treatment
And (3) heating the component treated in the step (4) to 600 ℃ through the surface of a vacuum induction furnace, preserving heat for 2-8 h, and cooling along with the furnace to precipitate an aluminum-based intermetallic compound so as to strengthen the intermediate-entropy alloy coating.
Example 1
(1) Component processing
Grinding the surface of a component needing coating by using abrasive paper, and then polishing until the surface has no obvious scratch; sequentially cleaning the components in absolute ethyl alcohol and plasma water for ten minutes by an ultrasonic cleaner and then drying for later use;
(2) target pretreatment
Respectively installing a CoCrNi alloy target and an Al target at two direct current target positions of a vacuum magnetron sputtering coating machine; fixing the member processed in the step (1) on a sample table, closing a sputtering chamber, firstly performing low-vacuum pumping, and starting a molecular pump to perform high-vacuum pumping when the air pressure in the cavity of the sputtering chamber reaches below 4 Pa; when the vacuum degree in the sputtering chamber reaches a preset value of 7 multiplied by 10 -4 Introducing argon gas of 50sccm after Pa, and pre-sputtering for 10min to remove pollutants on the surface of the target material;
(3) co-sputtered coating
Adjusting the air pressure in the sputtering chamber to be 0.3Pa, the substrate temperature to be 100 ℃, the sputtering power of the CoCrNi alloy target to be 100W and the sputtering power of the Al target to be 20W, and carrying out co-sputtering coating; and after sputtering for 10min, cooling the component to room temperature along with the furnace, and taking out.
(4) Solution treatment
Heating the coated component to 1200 ℃ through the surface of a vacuum induction furnace, then preserving heat for 2h, and then quenching to promote the excessive phase generated after the Al element is added to the medium-entropy alloy coating to be dissolved in the solid solution.
(5) Aging treatment
And (4) heating the component treated in the step (4) to 600 ℃ through the surface of a vacuum induction furnace, preserving heat for 2h, and cooling along with the furnace to separate out an aluminum-based intermetallic compound so as to achieve the strengthening effect of the medium-entropy alloy coating.
Example 2
(1) Component processing
Grinding the surface of a component needing coating by using abrasive paper and then polishing until the surface has no obvious scratch; sequentially cleaning the components in absolute ethyl alcohol and plasma water for ten minutes by an ultrasonic cleaner and then drying for later use;
(2) target pretreatment
Respectively installing a CoCrNi alloy target and an Al target at two direct current target positions of a vacuum magnetron sputtering coating machine; fixing the member processed in the step (1) on a sample table, closing a sputtering chamber, firstly performing low-vacuum pumping, and starting a molecular pump to perform high-vacuum pumping when the air pressure in the cavity of the sputtering chamber reaches below 4 Pa; when the vacuum degree in the sputtering chamber reaches a preset value of 7 multiplied by 10 - 4 Introducing argon gas of 50sccm after Pa, and pre-sputtering for 10min to remove pollutants on the surface of the target material;
(3) co-sputtered coating
Adjusting the air pressure in the sputtering chamber to be 0.4Pa, the substrate temperature to be 200 ℃, the sputtering power of a CrNiTi alloy target to be 100W and the sputtering power of an Al target to be 30W, and carrying out co-sputtering coating; sputtering for 20min, cooling the component to room temperature along with the furnace, and taking out;
(4) solution treatment
Heating the coated component to 1200 ℃ through the surface of a vacuum induction furnace, then preserving heat for 2h, and then quenching to promote the excessive phase generated after the Al element is added to the medium-entropy alloy coating to be dissolved in the solid solution.
(5) Aging treatment
And (3) heating the component treated in the step (4) to 600 ℃ through the surface of a vacuum induction furnace, preserving heat for 4 hours, and cooling along with the furnace to separate out an aluminum-based intermetallic compound so as to achieve the strengthening effect of the medium-entropy alloy coating.
Example 3
(1) Component processing
Grinding the surface of a component needing coating by using abrasive paper and then polishing until the surface has no obvious scratch; sequentially cleaning the components in absolute ethyl alcohol and plasma water for ten minutes by an ultrasonic cleaner and then drying the components for later use;
(2) target pretreatment
Respectively installing a CoCrNi alloy target and an Al target at two direct current target positions of a vacuum magnetron sputtering coating machine; fixing the member processed in the step (1) on a sample table, closing a sputtering chamber, firstly performing low-vacuum pumping, and starting a molecular pump to perform high-vacuum pumping when the air pressure in the cavity of the sputtering chamber reaches below 4 Pa; when the vacuum degree in the sputtering chamber reaches a preset value of 7 multiplied by 10 - 4 And introducing argon gas of 50sccm after Pa, and pre-sputtering for 10min to remove pollutants on the surface of the target.
(3) Co-sputtered coating
And adjusting the air pressure in the sputtering chamber to be 0.5Pa, the substrate temperature to be 100 ℃, the sputtering power of the CrNiTi alloy target to be 100W and the sputtering power of the Al target to be 50W, and carrying out co-sputtering coating. After sputtering for 30min, cooling the component to room temperature along with the furnace and taking out;
(4) solution treatment
Heating the coated component to 1200 ℃ through the surface of a vacuum induction furnace, preserving heat for 2h, and then quenching to promote excessive phase generated after Al element is added to the medium-entropy alloy coating to be dissolved in solid solution;
(5) aging treatment
And (3) heating the component treated in the step (4) to 600 ℃ through the surface of a vacuum induction furnace, preserving heat for 6h, and cooling along with the furnace to separate out an aluminum-based intermetallic compound so as to achieve the strengthening effect of the medium-entropy alloy coating.
As shown in FIGS. 1 and 2, the coating obtained by the method of the present invention has the advantages of high strength, high hardness, excellent wear resistance, high compactness and uniform film formation.
The above description is only an embodiment of the present invention, and not intended to limit the scope of the present invention, and all modifications of equivalent structures and equivalent processes performed by the present specification and drawings, or directly or indirectly applied to other related technical fields, are included in the scope of the present invention.
Claims (8)
1. A strengthening method of a medium entropy alloy coating is characterized by comprising the following steps:
(1) component processing
Sequentially grinding, polishing, cleaning and drying the surface of a component needing to be coated for later use;
(2) target pretreatment
Respectively installing the intermediate entropy alloy target and the Al target at two direct current target positions of a vacuum magnetron sputtering coating machine; fixing the member treated in the step (1) on a sample table as a base body, closing a sputtering chamber, firstly performing low-vacuum pumping, and starting a molecular pump to perform high-vacuum pumping when the air pressure in a cavity of the sputtering chamber reaches below 4 Pa; when the vacuum degree in the sputtering chamber reaches a preset value, introducing argon gas, and carrying out pre-sputtering to remove pollutants on the surface of the target material;
(3) co-sputtered coating
Adjusting the air pressure in the sputtering chamber, setting the sputtering power of the medium-entropy alloy target and the Al target, and carrying out co-sputtering coating; after sputtering is finished, cooling the component to room temperature along with the furnace and taking out;
(4) solution treatment
Heating the coated component to 1200 ℃ through a vacuum induction furnace, preserving heat for 2h, and then quenching to dissolve the excessive phase generated after the Al element is added to the medium-entropy alloy coating into the solid solution;
(5) aging treatment
And (3) heating the component treated in the step (4) to 600 ℃ through a vacuum induction furnace, preserving heat for 2-8 h, and cooling along with the furnace to precipitate an aluminum-based intermetallic compound so as to strengthen the medium-entropy alloy coating.
2. A method of strengthening a mid-entropy alloy coating, according to claim 1, wherein: the member is selected from steel, cast iron or other non-ferrous metal.
3. A method of strengthening a mid-entropy alloy coating, according to claim 1, wherein: and (2) carrying out absolute ethyl alcohol cleaning and plasma water cleaning in sequence by adopting ultrasonic waves in the cleaning process of the step (1).
4. A method of strengthening a mid-entropy alloy coating, according to claim 1, wherein: the medium entropy alloy target is selected from one of a CoCrNi alloy target, a FeCoNi alloy target, a CrFeNi alloy target and a CrNiTi alloy target; the purity of the Al target is more than 99.9%.
5. A method of strengthening a mid-entropy alloy coating, according to claim 1, wherein: in the step (2), the degree of vacuum in the sputtering chamber during the pre-sputtering is 7X 10 -4 Pa, and the time of pre-sputtering is 10 min.
6. A method of strengthening a mid-entropy alloy coating, according to claim 1, wherein: in the step (3), the temperature of the matrix before sputtering is 100-500 ℃; adjusting the air pressure in the sputtering chamber to 0.2-0.5 Pa; the sputtering power of the medium-entropy alloy target is 100W, and the sputtering power of the Al target is 20-100W; the sputtering time is 10-60 min.
7. A method of strengthening a mid-entropy alloy coating, according to claim 1, wherein: in the step (2), the flow rate of argon gas is 50 sccm.
8. A method of strengthening a mid-entropy alloy coating, according to claim 1, wherein: the heating mode of the solution treatment and the aging treatment is surface heating.
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Cited By (1)
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| CN115786851A (en) * | 2022-11-29 | 2023-03-14 | 西北有色金属研究院 | Method for preparing high-hardness double-phase structure medium-entropy alloy film |
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