CN114988692A - Method for improving multi-filament vertex angle dislocation in micro-channel plate preparation process - Google Patents
Method for improving multi-filament vertex angle dislocation in micro-channel plate preparation process Download PDFInfo
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- 238000000034 method Methods 0.000 title claims abstract description 57
- 238000002360 preparation method Methods 0.000 title claims abstract description 14
- 239000007787 solid Substances 0.000 claims abstract description 115
- 239000011521 glass Substances 0.000 claims abstract description 76
- 239000011162 core material Substances 0.000 claims abstract description 62
- 238000003825 pressing Methods 0.000 claims abstract description 20
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 claims abstract description 15
- 229910052739 hydrogen Inorganic materials 0.000 claims abstract description 15
- 239000001257 hydrogen Substances 0.000 claims abstract description 15
- 238000004519 manufacturing process Methods 0.000 claims description 19
- 238000005253 cladding Methods 0.000 claims description 12
- 238000005520 cutting process Methods 0.000 claims description 6
- 238000007731 hot pressing Methods 0.000 claims description 5
- 239000002346 layers by function Substances 0.000 claims description 4
- 238000005482 strain hardening Methods 0.000 claims description 4
- 238000005491 wire drawing Methods 0.000 claims description 4
- 239000012943 hotmelt Substances 0.000 claims description 3
- 229910052751 metal Inorganic materials 0.000 claims description 3
- 239000002184 metal Substances 0.000 claims description 3
- 238000007747 plating Methods 0.000 claims description 3
- 238000013329 compounding Methods 0.000 claims description 2
- 238000006073 displacement reaction Methods 0.000 claims 1
- 239000000463 material Substances 0.000 abstract description 23
- 238000002844 melting Methods 0.000 abstract description 7
- 230000008018 melting Effects 0.000 abstract description 6
- 230000007797 corrosion Effects 0.000 abstract description 4
- 238000005260 corrosion Methods 0.000 abstract description 4
- 238000009489 vacuum treatment Methods 0.000 abstract description 4
- 238000005516 engineering process Methods 0.000 abstract description 3
- 239000007888 film coating Substances 0.000 abstract description 2
- 238000009501 film coating Methods 0.000 abstract description 2
- 150000002500 ions Chemical class 0.000 description 4
- 230000007547 defect Effects 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 239000000835 fiber Substances 0.000 description 2
- 238000009434 installation Methods 0.000 description 2
- 239000000203 mixture Substances 0.000 description 2
- 238000005498 polishing Methods 0.000 description 2
- 239000000126 substance Substances 0.000 description 2
- BPQQTUXANYXVAA-UHFFFAOYSA-N Orthosilicate Chemical compound [O-][Si]([O-])([O-])[O-] BPQQTUXANYXVAA-UHFFFAOYSA-N 0.000 description 1
- 239000002253 acid Substances 0.000 description 1
- 239000003513 alkali Substances 0.000 description 1
- 230000003749 cleanliness Effects 0.000 description 1
- 238000010276 construction Methods 0.000 description 1
- 238000005336 cracking Methods 0.000 description 1
- 238000007872 degassing Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000012681 fiber drawing Methods 0.000 description 1
- 238000009472 formulation Methods 0.000 description 1
- 230000004927 fusion Effects 0.000 description 1
- 238000000227 grinding Methods 0.000 description 1
- 238000003384 imaging method Methods 0.000 description 1
- 239000010410 layer Substances 0.000 description 1
- 238000003754 machining Methods 0.000 description 1
- 238000001000 micrograph Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 230000007935 neutral effect Effects 0.000 description 1
- 229910000623 nickel–chromium alloy Inorganic materials 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 230000000704 physical effect Effects 0.000 description 1
- 230000002265 prevention Effects 0.000 description 1
- 230000002035 prolonged effect Effects 0.000 description 1
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- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B37/00—Manufacture or treatment of flakes, fibres, or filaments from softened glass, minerals, or slags
- C03B37/01—Manufacture of glass fibres or filaments
- C03B37/02—Manufacture of glass fibres or filaments by drawing or extruding, e.g. direct drawing of molten glass from nozzles; Cooling fins therefor
- C03B37/025—Manufacture of glass fibres or filaments by drawing or extruding, e.g. direct drawing of molten glass from nozzles; Cooling fins therefor from reheated softened tubes, rods, fibres or filaments, e.g. drawing fibres from preforms
- C03B37/027—Fibres composed of different sorts of glass, e.g. glass optical fibres
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B37/00—Manufacture or treatment of flakes, fibres, or filaments from softened glass, minerals, or slags
- C03B37/10—Non-chemical treatment
- C03B37/14—Re-forming fibres or filaments, i.e. changing their shape
- C03B37/15—Re-forming fibres or filaments, i.e. changing their shape with heat application, e.g. for making optical fibres
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C15/00—Surface treatment of glass, not in the form of fibres or filaments, by etching
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
- C03C17/001—General methods for coating; Devices therefor
- C03C17/002—General methods for coating; Devices therefor for flat glass, e.g. float glass
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
- C03C17/06—Surface treatment of glass, not in the form of fibres or filaments, by coating with metals
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C23/00—Other surface treatment of glass not in the form of fibres or filaments
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J43/00—Secondary-emission tubes; Electron-multiplier tubes
- H01J43/04—Electron multipliers
- H01J43/06—Electrode arrangements
- H01J43/18—Electrode arrangements using essentially more than one dynode
- H01J43/24—Dynodes having potential gradient along their surfaces
- H01J43/246—Microchannel plates [MCP]
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P40/00—Technologies relating to the processing of minerals
- Y02P40/50—Glass production, e.g. reusing waste heat during processing or shaping
- Y02P40/57—Improving the yield, e-g- reduction of reject rates
Abstract
The invention provides a method for improving multi-filament apex angle dislocation in a microchannel plate preparation process, which is characterized in that under the condition that a skin material and a core material of an effective area of a microchannel plate are determined, two proper glass materials are selected to be respectively used as a material of a solid area A and a material of a solid area B of the microchannel plate and arranged at the periphery of the effective area, the solid area A and the solid area B are hot-melted and pressed into a blank screen section by adopting a melting and pressing technology, then the solid area B is cut off from the blank screen section to form a sheet only consisting of the effective area and the solid area A, and the microchannel plate with solid edges is finally prepared by operations of corrosion, hydrogen burning, film coating and the like. According to the method for improving the multi-filament apex angle dislocation in the preparation process of the microchannel plate, the prepared microchannel plate can ensure the excellent apex angle structural performance of the small-aperture microchannel plate and meet the requirement of pipe making without deformation through high-temperature vacuum treatment at 420-500 ℃.
Description
Technical Field
The invention relates to the technical field of microchannel plates, in particular to a method for improving the dislocation of a multifilament vertex angle in a microchannel plate preparation process, which is suitable for preparing a microchannel plate with a small aperture structure matched with a high-performance third-generation micro-optical image intensifier.
Background
Microchannel plates (MCPs) are a parallel array of millions of microporous electron multipliers, are two-dimensional vacuum electron multipliers of thin sheet construction, are sensitive to electrons, ions, accelerated neutral particles, ultraviolet photons, and X-rays, and are widely used in the fields of image intensifiers, displays, space science, and analytical instruments. In the conventional preparation process of the microchannel plate, a lead silicate cladding glass tube and a matched core material rod are prepared and drawn into single fibers at high temperature by depending on a glass multi-fiber drawing technology (GMD), and the multichannel array type sheet is manufactured by a series of processes of rod arrangement, multifilament drawing, screen arrangement, melt pressing, slicing, rounding, fine grinding, edge chamfering, polishing, chemical corrosion and the like.
In general, MCP performance parameters such as hole spacing, open area ratio, aspect ratio, high temperature vacuum baking resistance, and mechanical strength resistance greatly affect the main performance of the micro-optical image intensifier. For MCP matched with a high-performance third-generation low-light-level image intensifier, the MCP not only requires the aperture to be as small as possible, but also requires a large opening area ratio, a proper length-diameter ratio and high-temperature vacuum baking resistance. Meanwhile, the third generation of micro optical image intensifiers use MCP which needs to be coated with a layer of ion feedback prevention film on the input surface of the MCP before tube installation, so that on one hand, ion feedback noise caused by ion feedback from the tail end of the MCP is blocked, and on the other hand, part of low-energy photoelectrons from a photocathode are blocked, and further the signal to noise ratio is reduced. Due to the special requirement, the third-generation low-light-level image intensifier puts higher requirements on the performance of an MCP structure matched with the same.
In order to ensure the degassing effect and yield of the third-generation micro-light image intensifier tube manufacturing process, a solid edge without holes is required to be added outside an MCP imaging area, and the solid edge is mainly used for improving the mechanical strength of the MCP and facilitating air exhaust, so that the service life of the micro-light image intensifier is prolonged and the yield is improved. In terms of small aperture (4-6 μm), large opening area ratio (more than or equal to 65%) and thin MCP (plate thickness of 0.26-0.30 mm) with excellent structural performance, the MCP is strictly tested for solid edge materials of the MCP and the whole plate manufacturing process in order to ensure that the MCP does not crack during the fusion pressing and cold processing process and does not deform during the high-temperature hydrogen reduction and high-temperature vacuum treatment process before pipe installation.
Disclosure of Invention
The invention aims to provide a method for improving multi-filament apex angle dislocation in a microchannel plate preparation process, which comprises the steps of selecting two appropriate glass materials as materials of a solid area A and a solid area B of a microchannel plate respectively under the condition that a skin material and a core material of an effective area of the microchannel plate are determined, arranging the two appropriate glass materials at the periphery of the effective area, hot-melting and pressing the effective area, the solid area A and the solid area B into a blank screen section by adopting a melting and pressing technology, cutting the solid area B from the blank screen section to form a sheet only consisting of the effective area and the solid area A, and finally preparing the microchannel plate with solid edges by operations of corrosion, hydrogen burning, film coating and the like. According to the method for improving the offset of the vertex angle of the multifilament in the preparation process of the microchannel plate, the prepared microchannel plate can ensure the excellent vertex angle structural performance of the small-aperture microchannel plate and meet the requirement of pipe manufacturing without deformation during high-temperature vacuum treatment at 420-500 ℃.
In order to achieve the above object, a first aspect of the present invention provides a method for improving the apex angle misalignment of multifilaments in a microchannel plate manufacturing process, which comprises, based on selecting a sheath glass P1 and a core glass X1 for an active area of a microchannel plate to be manufactured, dividing a solid area located at the periphery of the active area of the microchannel plate into a first solid area and a second solid area, wherein the first solid area is located at the periphery of the active area, the second solid area is located at the periphery of the first solid area, and completing a plate manufacturing process based on the active area, the divided first solid area and the second solid area, the method comprising:
step 1, matching sheath glass P1 and core glass X1 used in a selected effective area with a tube rod, and preparing the multifilament of the effective area of the microchannel plate through monofilament drawing, filament arrangement and filament overlapping rod and multifilament drawing processes;
step 2, preparing a first entity area multifilament of the microchannel plate by monofilament drawing, arranging and repeating filament rods and multifilament drawing processes after matching the cladding glass P1 and the core glass X2 of the selected first entity area through a tube rod; wherein the core glass X2 of the first solid zone is different from the core glass X1 of the effective zone, and the linear expansion coefficient and the softening temperature of the core glass X2 are both lower than those of the core glass X1;
step 3, preparing a first entity area of the microchannel plate by performing monofilament drawing, arranging and doubling the fiber rods and multifilament drawing processes after matching the cladding glass P1 and the core glass X2 of the selected second entity area through the tubes and the rods; wherein the linear expansion coefficient and the softening temperature of the core glass X2 are both lower than those of the core glass X1;
step 4, arranging the multifilament of the effective area, the multifilament of the first solid area and the multifilament of the second solid area in a screen arranging mould according to a certain sequence, wherein the cross section of the multifilament of the effective area, the multifilament of the first solid area and the multifilament of the second solid area are in a regular hexagon shape;
step 5, feeding the arranged multifilament into a hot-pressing die for hot melt pressing, and slicing to obtain a flaky microchannel plate blank screen section;
step 6, cutting the second entity area from the blank screen section through rounding cold working treatment, and only reserving the effective area and the annular first entity area surrounding the effective area;
step 7, corroding the blank screen section after the second entity area is removed, and removing core material glass X1 to form a micron-sized porous channel structure, so that the background of the microchannel plate is prepared and the microchannel plate is of a porous sheet structure;
step 8, carrying out hydrogen reduction treatment on the porous sheet structure to enable the inner wall of the porous channel to form a functional layer with secondary electron emission capability;
and 9, plating a metal electrode on the surface of the porous sheet structure subjected to hydrogen reduction treatment to prepare the microchannel plate.
In a preferred embodiment, the core glass X2 of the first solid area has a linear expansion coefficient 10 lower (5-10) than that of the core glass X1 -7 /° c; the softening temperature of the core glass X2 in the first solid region is 50 to 70 ℃ lower than that of the core glass X1.
In a preferred embodiment, the active area multifilaments, the first solid area multifilaments and the second solid area multifilaments are each prepared by subjecting corresponding monofilaments to a rod arrangement, and the diameter of the monofilaments is 4 to 6 μm.
In a preferred embodiment, the cross sections of the active area multifilaments, the first solid area multifilaments and the second solid area multifilaments are all regular hexagons.
In a preferred embodiment, in step 4, the active area multifilaments, the first solid area multifilaments and the second solid area multifilaments are arranged in the horizontal type screen arranging mold in a certain order. The inclination angle of the horizontal screen arranging mould and the horizontal plane is 10-20 degrees, and a screen section with a regular hexagon-shaped section appearance is obtained.
In a preferred embodiment, the active area multifilaments, the first solid area multifilaments and the second solid area multifilaments arranged in the screen arranging mould are melted and pressed into a microchannel plate blank screen section, and the melting and pressing are carried out at the highest temperature which is 40-50 ℃ lower than the softening temperature of the core glass X1 in the active area.
Therefore, the manufacturing method of the microchannel plate provided by the embodiment of the invention reduces the arrangement of the solid area A in the blank screen section, effectively avoids the thermal property difference caused by different materials of the solid area and the effective area in the melt-pressing process, improves the stress uniformity during melt-pressing of the screen section, and the prepared multi-filament apex angle structure of the microchannel plate does not have the structural problem of 'big triangle', wherein the structural problem of 'big triangle' refers to the structural problem that a plurality of single filaments are staggered, so that the performance requirements of a third-generation low-light-level image intensifier on a small aperture (4-6 mu m), a large opening area ratio (not less than 65%) and an ultrathin structure (the thickness of the MCP plate is 0.26-0.30 mm) of the MCP are met, the mechanical strength is high, the air exhaust is convenient, the working life of the low-light-level image intensifier is improved, and the yield is improved.
Compared with the prior art, the method for improving the multi-filament vertex angle dislocation in the preparation process of the microchannel plate has the remarkable advantages that:
1) the microchannel plate blank screen section is manufactured by adopting a arraying method that a solid area A (namely a first solid area) is arrayed between an effective area and a solid area B (namely two solid areas), and the solid area B (namely a second solid area) is arrayed at the periphery of the solid area A (namely the first solid area), because the linear expansion coefficient and the softening temperature of the solid area B are respectively lower than those of an effective area core material X1 glass material by (5-10) multiplied by 10 -7 The viscosity of the solid area B is lower and the pressure relief effect can be effectively realized in the melt-pressing and pressurizing process at 50-70 ℃, so that the stress uniformity of the blank screen section of the microchannel plate is improved, the structural performance of the microchannel plate is improved, and the related process adjustment difficulty of the microchannel plate structure is reduced;
2) the effective area, the solid area A and the solid area B are arranged in a horizontal screen arrangement mould with a horizontal inclination angle of 10-20 degrees in a certain sequence, compared with the traditional vertical screen arrangement mode, the weight of multifilaments can be better utilized in the arrangement process, the multifilaments are more closely and orderly stacked, the size consistency of opposite sides of screen sections is improved, and the vertex angle structure of the microchannel plate is improved; meanwhile, debris among the multifilaments can be cleaned in the arranging process, and the cleanliness among the multifilaments of the microchannel plate can be improved;
3) the micro-channel plate which consists of an effective area and a solid area A and has the aperture of 4-6 mu m and the plate thickness of 0.26-0.30 mm has the advantages that the linear expansion coefficient and the softening temperature of the core material X2 of the solid area A are basically equivalent to those of the core material X1 glass material of the effective area, the deformation can be avoided by high-temperature hydrogen reduction treatment at 450 ℃, and meanwhile, the mechanical strength of the micro-channel plate with the solid edge is effectively improved.
It should be understood that all combinations of the foregoing concepts and additional concepts described in greater detail below can be considered as part of the inventive subject matter of this disclosure unless such concepts are mutually inconsistent. In addition, all combinations of claimed subject matter are considered a part of the presently disclosed subject matter.
The foregoing and other aspects, embodiments and features of the present teachings can be more fully understood from the following description taken in conjunction with the accompanying drawings. Additional aspects of the present invention, such as features and/or advantages of exemplary embodiments, will be apparent from the description which follows, or may be learned by practice of specific embodiments in accordance with the teachings of the present invention.
Drawings
The figures are not intended to be drawn to scale. In the drawings, each identical or nearly identical component that is illustrated in various figures may be represented by a like numeral. For purposes of clarity, not every component may be labeled in every drawing. Embodiments of various aspects of the present invention will now be described, by way of example, with reference to the accompanying drawings, in which:
FIG. 1 is a schematic view of a layout structure of green body segments of a microchannel plate according to the present invention.
Fig. 2 is a schematic structural diagram of the present invention after cutting off the outermost second solid region.
Fig. 3a and 3b are micrographs of top angle structures of a traditional microchannel plate and a microchannel plate prepared by the method of the present invention, wherein fig. 3a is a schematic view of a top angle structure of a traditional MCP plate manufactured by the method of the present invention, which has a defect of "large triangle", and fig. 3b is a schematic view of a top angle structure of an MCP plate manufactured by the method of the present invention, which has no defect of large triangle, and has an excellent structure.
Detailed Description
In order to better understand the technical content of the present invention, specific embodiments are described below with reference to the accompanying drawings.
In this disclosure, aspects of the present invention are described with reference to the accompanying drawings, in which a number of illustrative embodiments are shown. Embodiments of the present disclosure are not necessarily intended to include all aspects of the invention. It should be appreciated that the various concepts and embodiments described above, as well as those described in greater detail below, may be implemented in any of numerous ways, as the disclosed concepts and embodiments are not limited to any one implementation. In addition, some aspects of the present disclosure may be used alone, or in any suitable combination with other aspects of the present disclosure.
The embodiment of the invention provides a method for improving multi-filament apex angle dislocation in a micro-channel plate preparation process, and aims to provide a method for manufacturing a phi 25 micro-channel plate with a small-aperture structure and excellent performance according to the index requirement of high-performance MCP, wherein the aperture is 5 +/-0.05 mu m, the opening area ratio is not less than 65%, the plate thickness is 0.28mm +/-0.02 mm, and the integral plate of the MCP apex angle multi-filament structure is not allowed to have more than 3 single-filament dislocation positions at 5 positions.
Referring to fig. 1 and 2, in the method for improving the offset of the vertex angle of the multifilament in the microchannel plate manufacturing process according to the embodiment of the present invention, on the basis of the selection of the skin glass P1 and the core glass X1 used in the active area 10 of the prepared microchannel plate, the solid area located at the periphery of the active area of the microchannel plate is divided into the first solid area 21 and the second solid area 22, wherein the first solid area 21 is located at the periphery of the active area 10, and the second solid area 22 is located at the periphery of the first solid area 21, and the plate manufacturing process is completed on the basis of the active area 10, the divided first solid area 21 and the divided second solid area 22.
As an optional method implementation process, the method specifically includes:
step 1, matching sheath glass P1 and core glass X1 used in a selected effective area with a tube rod, and preparing the multifilament of the effective area of the microchannel plate through monofilament drawing, arranging and doubling the tube rod and multifilament drawing processes;
step 2, preparing a first entity area multifilament of the microchannel plate through monofilament drawing, arranging and doubling a filament rod and multifilament drawing processes after pipe rod matching according to the selected cladding glass P1 and core glass X2 of the first entity area; wherein the linear expansion coefficient and the softening temperature of the core glass X2 are both lower than those of the core glass X1;
step 3, preparing a first entity area of the microchannel plate by using single-wire drawing, arranging and compounding wire rods and multi-wire drawing processes after matching the cladding glass P1 and the core glass X2 of the selected second entity area through a tube rod; wherein the linear expansion coefficient and the softening temperature of the core glass X2 are both lower than those of the core glass X1;
step 4, arranging the multifilament of the effective area, the multifilament of the first solid area and the multifilament of the second solid area in a screen arranging mould according to a certain sequence, wherein the cross section of the multifilament of the effective area, the multifilament of the first solid area and the multifilament of the second solid area are in a regular hexagon shape;
step 5, feeding the arranged multifilament into a hot-pressing die for hot melt pressing, and slicing to obtain a flaky microchannel plate blank screen section;
step 6, cutting off the second entity area from the blank screen section through rounding cold working treatment, and only reserving the effective area and the annular first entity area surrounding the effective area;
step 7, corroding the blank screen section after the second entity area is removed, and removing core material glass X1 to form a micron-sized porous channel structure, so that the background of the microchannel plate is prepared and the microchannel plate is of a porous sheet structure;
step 8, carrying out hydrogen reduction treatment on the porous sheet structure to enable the inner wall of the porous channel to form a functional layer with secondary electron emission capability;
and 9, plating a metal electrode on the surface of the porous sheet structure subjected to hydrogen reduction treatment to prepare the microchannel plate.
In a preferred embodiment, the core glass X2 of the first solid zone has a lower coefficient of linear expansion (5-10) than the core glass X1 by 10 -7 v/deg.C and a softening temperature 50 deg.C to 70 deg.C lower than that of core frit glass X1.
The active area multifilament, the first solid area multifilament and the second solid area multifilament are all prepared by arranging corresponding monofilaments through a bar arrangement process, and the aperture of each monofilament is 4-6 microns.
The cross sections of the active area multifilaments, the first solid area multifilaments and the second solid area multifilaments are all regular hexagons.
In step 4, the active area multifilaments, the first solid area multifilaments and the second solid area multifilaments are arranged in the horizontal type screen arranging mold in a certain order. The inclination angle of the horizontal screen arranging mould and the horizontal plane is 10-20 degrees, and a screen section with a regular hexagon-shaped section appearance is obtained.
In a preferred embodiment, the active area multifilaments, the first solid area multifilaments and the second solid area multifilaments which are arranged in the screen arranging mould are melted and pressed into a microchannel plate blank screen section, and the melting and pressing are carried out at the highest temperature which is 40-50 ℃ lower than the softening temperature of the core glass X1 in the active area.
In a preferred embodiment, the process of the present invention is suitable for making a microchannel plate having a thickness in the range of 0.26mm to 0.30 mm.
As an alternative example, the compositions and formulations of the selected cladding glass P1, core glass X1, and core glass X2 are shown in the following table.
As an alternative example, the core frit glass X1 has a linear expansion coefficient of (100. + -. 5). times.10 -7 The softening temperature is (659 +/-10) DEG C.
The following describes the implementation of the present invention with reference to specific examples.
(1) Under the conditions of selecting the physical and chemical properties of cladding glass P1 and core glass X1 glass used in an effective area of the microchannel plate and the whole plate manufacturing process, in order to relieve the phenomenon that the multifilament vertex angle of the microchannel plate is dislocated due to the difference of the physical properties of materials of the effective area and a solid area in the melt-pressing process, the solid area is divided into a solid area A and a solid area B. The solid area A is wrapped on the periphery of the effective area and is annular; the entity area B is wrapped on the periphery of the entity area A, the whole entity area is wrapped on the periphery of the effective area, and the cross section of the entity area B is a regular hexagon;
and selecting glass materials of the entity area A and the entity area B according to the matching principle of a plate making process, the requirements of no cracking in the melt-pressing process, no deformation in high-temperature hydrogen reduction treatment and the like.
The solid area A is made of P1 as the cladding material, the core material X2 is made of glass material resistant to acid and alkali corrosion, and the linear expansion coefficient of the glass material is 5-10 multiplied by 10 lower than that of the X1 glass material -7 The softening temperature is 50 ℃ to 70 ℃ lower than that of the X1 glass material. Wherein the solid zone B cladding material and the core material are consistent with the effective zone material. In this example, the core material X2 has a linear expansion coefficient of (90. + -. 5). times.10 -7 The softening temperature is 600 +/-5 ℃.
(2) Matching and drawing a sheath material P1 and a core material X1 by a tube rod to obtain a monofilament, a row of multifilament rods, a drawing effective area and a solid area B multifilament; the sheath material P1 and the core material X2 are matched with and drawn into monofilaments through a tube rod, are arranged on a filament rod and are drawn into multifilaments in a solid area A.
(3) Arranging the multifilament of the effective area, the multifilament of the solid area A and the multifilament of the solid area B in a screen arranging mould according to a certain sequence, sending the arranged screen sections into a hot-pressing mould by using a screen rotating tool to perform melt-pressing to prepare a microchannel plate blank screen section, cutting the solid area B from the blank screen section through slicing, rounding and cold processing, and preparing a sheet by using a double-sided polishing machine. The flakes were chemically etched to remove the X1 core, forming porous flakes.
The porous thin sheet is subjected to hydrogen reduction treatment to form a functional layer with secondary electron emission on the inner wall of the porous channel, and the surface of the porous thin sheet subjected to hydrogen reduction treatment is plated with a nickel-chromium alloy electrode, so that the microchannel plate with excellent small-aperture structure performance can be finally prepared.
Preferably, the design value of the size of the effective area of the blank screen section of the microchannel plate is 19.50mm +/-0.05 mm, and the design value of the size of the opposite side of the blank screen section is 31.20 +/-0.03 mm.
The solid area A is formed by arranging 6 rows of multifilaments between the effective area and the solid area B, and the solid area B is formed by arranging 5 rows of multifilaments on the periphery of the solid area A.
Wherein, the multifilaments of the effective area, the solid area A and the solid area B are all regular hexagon multifilaments, and the size of the opposite side is 0.59mm +/-0.15 μm. The multifilament consists of a corresponding plurality of monofilaments. The monofilament size is 0.35mm +/-0.15 mu m.
In the preparation process, the effective area, the solid area A and the solid area B are arranged in a horizontal screen arranging mould according to a certain sequence, the inclination angle of the horizontal screen rotating mould and the horizontal is 15 degrees, and the actual opposite side size of the screen section placed in the hot pressing mould is 31.5mm +/-0.1 mm.
Preferably, multifilaments in an effective area, an entity area A and an entity area B which are arranged in a horizontal type screen arranging mould are melted and pressed to form a microchannel plate blank screen section, the highest melting and pressing temperature is 45 ℃ lower than the softening temperature of a core material X1 in the effective area, the opposite side dimension of the screen section after melting and pressing is 31.35mm +/-0.02 mm, and the shrinkage ratio is about 5.0%.
Preferably, the microchannel plate blank screen section is cut from the blank screen section by a slicing, spheronizing cold working process to form a microchannel plate sheet with an outer diameter of 25mm + -0.02 mm and a thickness of 0.28mm + -0.02 mm, consisting of only the active area and the solid area A.
Preferably, the hydrogen reduction temperature of the phi 25 microchannel plate only consisting of the effective area and the solid area A is 450 ℃, and by combining the microstructure comparison shown in figures 3a and 3b, the multi-filament vertex angle structure of the microchannel plate prepared by the invention does not have the problem of a large triangle structure, the vertex angle structure of the microchannel plate is improved, so that a screen section is not cracked in the processes of melt pressing and cold machining in the plate manufacturing process, and is not deformed in the high-temperature hydrogen reduction and high-temperature vacuum treatment process before tube loading, the high-quality proceeding and yield rate in the plate manufacturing process are ensured, the performance requirements of a small aperture (4 mu m-6 mu m), a large opening area ratio (not less than 65%) and an ultrathin structure (the thickness of the MCP plate) of a third-generation micro-image intensifier are met, meanwhile, the mechanical strength is high, the air exhaust is convenient, the working life of the micro-image intensifier is improved, and the yield rate is improved.
Although the present invention has been described with reference to the preferred embodiments, it is not intended to be limited thereto. Those skilled in the art can make various changes and modifications without departing from the spirit and scope of the invention. Therefore, the protection scope of the present invention should be determined by the appended claims.
Claims (10)
1. A method for improving the multi-filament apex angle dislocation in the preparation process of a microchannel plate is characterized in that on the basis of selecting a cladding glass P1 and a core glass X1 used in an effective area of the prepared microchannel plate, an entity area positioned at the periphery of the effective area of the microchannel plate is divided into a first entity area and a second entity area, wherein the first entity area is positioned at the periphery of the effective area, the second entity area is positioned at the periphery of the first entity area, and the plate manufacturing process is completed on the basis of the effective area, the divided first entity area and the divided second entity area, and the method specifically comprises the following steps:
step 1, matching sheath glass P1 and core glass X1 used in a selected effective area with a tube rod, and preparing the multifilament of the effective area of the microchannel plate through monofilament drawing, arranging and doubling the tube rod and multifilament drawing processes;
step 2, preparing a first entity area multifilament of the microchannel plate by monofilament drawing, arranging and repeating filament rods and multifilament drawing processes after matching the cladding glass P1 and the core glass X2 of the selected first entity area through a tube rod; wherein the linear expansion coefficient and the softening temperature of the core glass X2 are both lower than those of the core glass X1;
step 3, preparing a first entity area of the microchannel plate by using single-wire drawing, arranging and compounding wire rods and multi-wire drawing processes after matching the cladding glass P1 and the core glass X2 of the selected second entity area through a tube rod; wherein the linear expansion coefficient and the softening temperature of the core glass X2 are both lower than those of the core glass X1;
step 4, arranging the multifilament of the effective area, the multifilament of the first solid area and the multifilament of the second solid area in a screen arranging mould according to a certain sequence, wherein the cross section of the multifilament of the effective area, the multifilament of the first solid area and the multifilament of the second solid area are in a regular hexagon shape;
step 5, feeding the arranged multifilament into a hot-pressing die for hot melt pressing, and slicing to obtain a flaky microchannel plate blank screen section;
step 6, cutting the second entity area from the blank screen section through rounding cold working treatment, and only reserving the effective area and the annular first entity area surrounding the effective area;
step 7, corroding the blank screen section after the second entity area is removed, and removing core material glass X1 to form a micron-sized porous channel structure, so that the background of the microchannel plate is prepared and the microchannel plate is of a porous sheet structure;
step 8, carrying out hydrogen reduction treatment on the porous sheet structure to enable the inner wall of the porous channel to form a functional layer with secondary electron emission capability;
and 9, plating a metal electrode on the surface of the porous sheet structure subjected to hydrogen reduction treatment to prepare the microchannel plate.
2. The method for improving the multi-filament apex angle displacement in the microchannel plate preparation process of claim 1, wherein the core glass X2 of the first solid zone has a linear expansion coefficient lower (5-10) 10 than that of the core glass X1 -7 /℃。
3. The method for improving multi-filament apex angle misalignment during microchannel plate fabrication of claim 1, wherein the core glass X2 of the first solid zone has a softening temperature 50 ℃ to 70 ℃ lower than that of core glass X1.
4. The method for improving the apex angle misalignment of the multifilaments in the microchannel plate manufacturing process of claim 1, wherein the multifilaments in the active area, the multifilaments in the first solid area and the multifilaments in the second solid area are all prepared by subjecting the corresponding monofilaments to rod alignment treatment, and the diameter of the monofilament is 4 μm to 6 μm.
5. The method for improving the offset of the top angles of the multifilaments in the microchannel plate manufacturing process of claim 1, wherein the sections of the multifilaments in the active area, the multifilaments in the first solid area and the multifilaments in the second solid area are all regular hexagons.
6. The method for improving the apex angle misalignment of the multifilaments in the microchannel plate manufacturing process of claim 1, wherein in the step 4, the multifilaments in the active area, the multifilaments in the first solid area, and the multifilaments in the second solid area are sequentially arranged in the horizontal type screen arranging mold. The inclination angle of the horizontal screen arranging mould and the horizontal plane is 10-20 degrees, and a screen section with a regular hexagon-shaped section appearance is obtained.
7. The method for improving the apex angle misalignment of the multifilaments in the microchannel plate manufacturing process according to claim 1, wherein the multifilaments in the active area, the multifilaments in the first solid area and the multifilaments in the second solid area arranged in the screen arranging mold are melt-pressed and molded into a microchannel plate blank screen section, and the maximum temperature of the melt-pressing is 40 ℃ to 50 ℃ lower than the softening temperature of the core glass X1 in the active area.
8. The method for improving the apex angle misalignment of the multifilaments in the microchannel plate preparation process of claim 1, wherein the prepared microchannel plate has a thickness of 0.26mm to 0.30 mm.
9. The method for improving the apex angle misalignment of multifilaments in the microchannel plate manufacturing process of claim 1, wherein the core glass X1 has a linear expansion coefficient of (100 ± 5) × 10 -7 ℃。
10. The method for improving multi-filament apex angle misalignment in microchannel plate making process of claim 1, wherein the softening temperature of the core glass X1 is (659 ± 10) ° c.
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