CN114988692B - Method for improving multifilament vertex angle dislocation in microchannel plate preparation process - Google Patents
Method for improving multifilament vertex angle dislocation in microchannel plate preparation process Download PDFInfo
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- 238000000034 method Methods 0.000 title claims abstract description 56
- 238000002360 preparation method Methods 0.000 title claims abstract description 18
- 239000011521 glass Substances 0.000 claims abstract description 69
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- 238000003825 pressing Methods 0.000 claims abstract description 19
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 claims abstract description 15
- 229910052739 hydrogen Inorganic materials 0.000 claims abstract description 15
- 239000001257 hydrogen Substances 0.000 claims abstract description 15
- 238000007747 plating Methods 0.000 claims abstract description 5
- 239000007787 solid Substances 0.000 claims description 90
- 230000008569 process Effects 0.000 claims description 30
- 238000005253 cladding Methods 0.000 claims description 16
- 238000004519 manufacturing process Methods 0.000 claims description 13
- 230000009467 reduction Effects 0.000 claims description 13
- 238000002844 melting Methods 0.000 claims description 12
- 238000005482 strain hardening Methods 0.000 claims description 7
- 238000005520 cutting process Methods 0.000 claims description 5
- 238000007731 hot pressing Methods 0.000 claims description 5
- 239000002346 layers by function Substances 0.000 claims description 4
- 238000005096 rolling process Methods 0.000 claims description 4
- 229910052751 metal Inorganic materials 0.000 claims description 3
- 239000002184 metal Substances 0.000 claims description 3
- 239000011148 porous material Substances 0.000 claims description 3
- 239000000463 material Substances 0.000 abstract description 20
- 230000007797 corrosion Effects 0.000 abstract description 4
- 238000005260 corrosion Methods 0.000 abstract description 4
- 238000009489 vacuum treatment Methods 0.000 abstract description 4
- 238000005516 engineering process Methods 0.000 abstract description 3
- 239000010985 leather Substances 0.000 abstract description 3
- 230000008018 melting Effects 0.000 description 9
- 238000010586 diagram Methods 0.000 description 4
- 150000002500 ions Chemical class 0.000 description 3
- BPQQTUXANYXVAA-UHFFFAOYSA-N Orthosilicate Chemical compound [O-][Si]([O-])([O-])[O-] BPQQTUXANYXVAA-UHFFFAOYSA-N 0.000 description 2
- 238000007872 degassing Methods 0.000 description 2
- 238000003384 imaging method Methods 0.000 description 2
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- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B37/00—Manufacture or treatment of flakes, fibres, or filaments from softened glass, minerals, or slags
- C03B37/01—Manufacture of glass fibres or filaments
- C03B37/02—Manufacture of glass fibres or filaments by drawing or extruding, e.g. direct drawing of molten glass from nozzles; Cooling fins therefor
- C03B37/025—Manufacture of glass fibres or filaments by drawing or extruding, e.g. direct drawing of molten glass from nozzles; Cooling fins therefor from reheated softened tubes, rods, fibres or filaments, e.g. drawing fibres from preforms
- C03B37/027—Fibres composed of different sorts of glass, e.g. glass optical fibres
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- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B37/00—Manufacture or treatment of flakes, fibres, or filaments from softened glass, minerals, or slags
- C03B37/10—Non-chemical treatment
- C03B37/14—Re-forming fibres or filaments, i.e. changing their shape
- C03B37/15—Re-forming fibres or filaments, i.e. changing their shape with heat application, e.g. for making optical fibres
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- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C15/00—Surface treatment of glass, not in the form of fibres or filaments, by etching
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- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
- C03C17/001—General methods for coating; Devices therefor
- C03C17/002—General methods for coating; Devices therefor for flat glass, e.g. float glass
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- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
- C03C17/06—Surface treatment of glass, not in the form of fibres or filaments, by coating with metals
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- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C23/00—Other surface treatment of glass not in the form of fibres or filaments
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J43/00—Secondary-emission tubes; Electron-multiplier tubes
- H01J43/04—Electron multipliers
- H01J43/06—Electrode arrangements
- H01J43/18—Electrode arrangements using essentially more than one dynode
- H01J43/24—Dynodes having potential gradient along their surfaces
- H01J43/246—Microchannel plates [MCP]
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P40/00—Technologies relating to the processing of minerals
- Y02P40/50—Glass production, e.g. reusing waste heat during processing or shaping
- Y02P40/57—Improving the yield, e-g- reduction of reject rates
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Abstract
The invention provides a method for improving dislocation of multifilament vertex angle in the preparation process of a microchannel plate, under the condition that leather and core materials of an effective area of the microchannel plate are determined, two proper glass materials are selected to be respectively used as materials of an entity area A and an entity area B of the microchannel plate, the materials are arranged at the periphery of the effective area, the entity area A and the entity area B are hot-melt-pressed into a blank screen section by adopting a melt-pressing technology, then the entity area B is cut off from the blank screen section and a sheet which only consists of the effective area and the entity area A is formed, and finally the microchannel plate with entity edges is prepared through operations such as corrosion, hydrogen burning, film plating and the like. The method for improving the dislocation of the multifilament vertex angle in the preparation process of the microchannel plate provided by the invention can ensure the excellent vertex angle structural performance of the small-aperture microchannel plate and simultaneously meet the requirement of non-deformation pipe making in high-temperature vacuum treatment at 420-500 ℃.
Description
Technical Field
The invention relates to the technical field of micro-channel plates, in particular to a method for improving dislocation of multifilament vertex angles in the preparation process of a micro-channel plate, which is suitable for the preparation of a micro-channel plate with a small-aperture structure matched with a high-performance three-generation micro-optical image intensifier.
Background
Microchannel plates (MCPs) are parallel arrays of millions of microporous electron multiplier devices, which are two-dimensional vacuum electron multipliers of thin-sheet structure, sensitive to electrons, ions and accelerated neutral particles, ultraviolet photons and X-rays, and are widely used in the fields of image intensifiers, displays, space science and analytical instruments. In the conventional preparation process of the microchannel plate, a glass multi-fiber drawing technology (GMD) is relied on to prepare a lead silicate cladding glass tube and a matched core rod, the lead silicate cladding glass tube is drawn into single fiber filaments at high temperature, and a series of processes such as rod arrangement, multifilament drawing, screen arrangement, melt pressing, slicing, rounding, fine grinding, edge chamfering, polishing, chemical corrosion and the like are performed to prepare the multichannel array sheet.
In general, MCP performance parameters such as hole spacing, opening area ratio, length-diameter ratio, high temperature vacuum baking resistance, mechanical strength resistance and the like greatly influence the main performance of the low-light-level image intensifier. For the MCP matched with the high-performance three-generation low-light-level image intensifier, the aperture is required to be as small as possible, the aperture area ratio is as large as possible, the length-diameter ratio is proper, and the high-temperature vacuum baking is resistant. Meanwhile, as the MCP used by the third generation micro-light image intensifier needs to be coated with an anti-ion feedback film on the input surface of the MCP before the MCP is assembled, the existence of the anti-ion feedback film can block the ion feedback noise caused by the ion feedback from the tail end of the MCP on one hand, and can block part of low-energy photoelectrons from the photocathode on the other hand, so that the signal to noise ratio is reduced. Because of the special requirement, the third generation low-light level image intensifier puts higher demands on the MCP structure performance matched with the third generation low-light level image intensifier.
In order to ensure the degassing effect and the yield in the tube manufacturing process of the third-generation low-light-level image intensifier, a solid edge without holes is required to be added outside an MCP imaging area, and the main functions of the MCP imaging area are to improve the mechanical strength of the MCP and facilitate the degassing, so that the service life of the low-light-level image intensifier is prolonged and the yield is improved. In terms of small pore diameter (4-6 μm), large opening area ratio (more than or equal to 65%) and thinner MCP (plate thickness of 0.26-0.30 mm), the solid edge material of the MCP and the whole plate manufacturing process are strictly tested in order to ensure that the screen section is not burst in the melting and pressing and cold working processes and is not deformed in the high-temperature hydrogen reduction and high-temperature vacuum treatment process before the tube mounting.
Disclosure of Invention
The invention aims to provide a method for improving dislocation of multifilament vertex angles in a microchannel plate preparation process, under the condition that leather materials and core materials of an effective area of a microchannel plate are determined, two proper glass materials are selected to be respectively used as materials of an entity area A and an entity area B of the microchannel plate, the materials are arranged on the periphery of the effective area, the entity area A and the entity area B are hot-melt-pressed into a blank screen section by adopting a melt-pressing technology, then the entity area B is cut off from the blank screen section and a sheet which only consists of the effective area and the entity area A is formed, and finally the microchannel plate with entity edges is manufactured through operations such as corrosion, hydrogen burning, film plating and the like. The method for improving the dislocation of the multifilament vertex angle in the preparation process of the microchannel plate provided by the invention can ensure the excellent vertex angle structural performance of the small-aperture microchannel plate and simultaneously meet the requirement of non-deformation pipe making in high-temperature vacuum treatment at 420-500 ℃.
In order to achieve the above object, a first aspect of the present invention provides a method for improving dislocation of multifilament vertex angle in a microchannel plate manufacturing process, on the basis of selecting a cladding glass P1 and a core glass X1 used for an effective area of the manufactured microchannel plate, dividing an entity area located at a periphery of the effective area of the microchannel plate into a first entity area and a second entity area, wherein the first entity area is located at a periphery of the effective area, and the second entity area is located at a periphery of the first entity area, and completing a plate manufacturing process on the basis of the effective area, the divided first entity area and the second entity area, the method specifically comprising:
on the basis of selecting the cladding glass P1 and the core glass X1 used for the effective area of the prepared microchannel plate, dividing the entity area positioned at the periphery of the effective area of the microchannel plate into a first entity area and a second entity area, wherein the first entity area is positioned at the periphery of the effective area, the second entity area is positioned at the periphery of the first entity area, and on the basis of the effective area and the divided first entity area and second entity area, completing the plate making process, and specifically comprising:
step 1, after the cladding glass P1 and the core glass X1 used in the selected effective area are matched through pipe rods, preparing effective area multifilaments of the microchannel plate through single-filament drawing, multi-filament rod arrangement and multi-filament drawing processes;
step 2, preparing the multifilaments of the first solid area of the microchannel plate through the processes of single filament drawing, multifilament rod arrangement and multifilament drawing after tube rod matching according to the cladding glass P1 and the core glass X2 of the selected first solid area; wherein, the linear expansion coefficient and softening temperature of the core glass X2 are lower than those of the core glass X1;
step 3, preparing the multifilaments of the second solid area of the microchannel plate through the processes of single filament drawing, multifilament rod arrangement and multifilament drawing after tube rod matching according to the cladding glass P1 and the core glass X1 of the selected second solid area;
step 4, arranging the effective area multifilament, the first solid area multifilament and the second solid area multifilament in a screen arranging mold according to a certain sequence, wherein the cross section of the effective area multifilament, the first solid area multifilament and the second solid area multifilament is in a regular hexagon shape;
step 5, delivering the arranged multifilament into a hot-pressing mold for hot-melting pressing, and slicing to obtain a lamellar microchannel plate blank screen section;
step 6, cutting off the second solid area from the blank screen section through rolling cold working treatment, and only reserving the effective area and the annular first solid area surrounding the effective area;
step 7, corroding the blank screen section after the second entity area is cut off, and removing the core material glass X1 to form a micron-sized porous channel structure, so that a microchannel plate background is prepared and is of a porous sheet structure;
step 8, carrying out hydrogen reduction treatment on the porous sheet structure to form a functional layer with secondary electron emission capability on the inner wall of the porous channel;
and 9, plating a metal electrode on the surface of the porous sheet structure after hydrogen reduction treatment to prepare the microchannel plate.
In a preferred embodiment, the first solid region has a core glass X2 with a linear expansion coefficient lower than that of the core glass X1 by (5-10) 10 -7 a/DEG C; and the softening temperature of the core glass X2 of the first entity area is 50-70 ℃ lower than that of the core glass X1.
In a preferred embodiment, the effective area multifilament yarn, the first solid area multifilament yarn and the second solid area multifilament yarn are each prepared by a rod arrangement treatment of corresponding filaments having a pore size of 4 μm to 6 μm.
In a preferred embodiment, the cross-sections of the effective area multifilament yarn, the first solid area multifilament yarn and the second solid area multifilament yarn are all regular hexagons.
In a preferred embodiment, in the step 4, the effective area multifilament yarn, the first solid area multifilament yarn, and the second solid area multifilament yarn are arranged in a horizontal type screen arranging mold in this order. The inclination angle between the horizontal screen arranging die and the horizontal is 10-20 degrees, and a screen section with a regular hexagon cross section is obtained.
In a preferred embodiment, the active area multifilament yarn, the first solid area multifilament yarn and the second solid area multifilament yarn arranged in the screening mould are melt-pressed and formed into a single piece as a microchannel plate blank screen, the highest temperature of the melt-pressing being 40-50 ℃ lower than the softening temperature of the core glass X1 of the active area.
Therefore, the microchannel plate manufacturing method provided by the embodiment of the invention reduces the arrangement of the solid area in the blank screen section, effectively avoids the thermal property difference caused by different materials of the solid area and the effective area in the melting and pressing process, improves the stress uniformity in the melting and pressing process of the screen section, and does not have the structural problem of big triangle, wherein the structural problem of big triangle refers to the structural problem that the multifilament vertex angle has dislocation of more than 3 monofilaments, and meets the performance requirements of small aperture (4 mu m-6 mu m), large opening area ratio (more than or equal to 65%) and ultra-thin structure (MCP plate thickness of 0.26 mm-0.30 mm) of the third-generation micro-image intensifier, has high mechanical strength and is convenient for exhausting, improves the service life of the micro-image intensifier and improves the yield.
Compared with the prior art, the method for improving the dislocation of the multifilament vertex angle in the preparation process of the microchannel plate has the remarkable advantages that:
1) The blank screen section of the microchannel plate is manufactured by adopting a manufacturing method that a solid area A (namely a first solid area) is arranged between an effective area and a solid area B (namely a second solid area), and the solid area B (namely the second solid area) is arranged at the periphery of the solid area A (namely the first solid area), because the linear expansion coefficient and the softening temperature of the first solid area are respectively lower than those of a core material glass material X1 of the effective area by (5-10) multiplied by 10 -7 The viscosity of the first entity area is smaller in the melting and pressing process at 50-70 ℃, and the pressure can be effectively reduced, so that the stress uniformity of the blank screen section of the microchannel plate is improved, the structural performance of the microchannel plate is improved, and the related process adjustment difficulty of the microchannel plate structure is reduced;
2) The effective area, the entity area A and the entity area B are arranged in a horizontal screen arranging die with the horizontal inclination angle of 10-20 degrees according to a certain sequence, compared with the traditional vertical screen arranging mode, the weight of multifilament can be better utilized in the arranging process, the multifilament stacking is more compact and orderly, the size consistency of the screen sections to the sides is improved, and the apex angle structure of the microchannel plate is improved; meanwhile, the chips among the multifilaments can be cleaned easily in the arranging process, and the cleanliness among the multifilaments of the microchannel plate is improved;
3) The aperture of the microchannel plate consisting of the effective area and the first entity area is 4-6 mu m, and the thickness of the microchannel plate is 0.26-0.30 mm, and the linear expansion coefficient and softening temperature of the core material glass X2 of the first entity area are basically equivalent to those of the core material glass X1 of the effective area, so that the microchannel plate with the entity edge can be ensured not to deform by high-temperature hydrogen reduction treatment at 450 ℃, and the mechanical strength of the microchannel plate is effectively improved.
It should be understood that all combinations of the foregoing concepts, as well as additional concepts described in more detail below, may be considered a part of the inventive subject matter of the present disclosure as long as such concepts are not mutually inconsistent. In addition, all combinations of claimed subject matter are considered part of the disclosed inventive subject matter.
The foregoing and other aspects, embodiments, and features of the present teachings will be more fully understood from the following description, taken together with the accompanying drawings. Other additional aspects of the invention, such as features and/or advantages of the exemplary embodiments, will be apparent from the description which follows, or may be learned by practice of the embodiments according to the teachings of the invention.
Drawings
The drawings are not intended to be drawn to scale. In the drawings, each identical or nearly identical component that is illustrated in various figures may be represented by a like numeral. For purposes of clarity, not every component may be labeled in every drawing. Embodiments of various aspects of the invention will now be described, by way of example, with reference to the accompanying drawings, in which:
fig. 1 is a schematic diagram of the arrangement of blank screen segments of a microchannel plate of the invention.
FIG. 2 is a schematic view of the structure of the present invention after cutting the outermost second physical area.
Fig. 3a and 3b are microscopic comparison diagrams of the vertex structures of the conventional microchannel plate and the microchannel plate prepared by the method, wherein fig. 3a is a schematic diagram of the conventional plate-making MCP vertex structure, and fig. 3b is a schematic diagram of the plate-making MCP vertex structure according to the method of the present invention, and has no large triangle defect and excellent structure.
Detailed Description
For a better understanding of the technical content of the present invention, specific examples are set forth below, along with the accompanying drawings.
Aspects of the invention are described in this disclosure with reference to the drawings, in which are shown a number of illustrative embodiments. The embodiments of the present disclosure are not necessarily intended to include all aspects of the invention. It should be understood that the various concepts and embodiments described above, as well as those described in more detail below, may be implemented in any of a number of ways, as the disclosed concepts and embodiments are not limited to any implementation. Additionally, some aspects of the disclosure may be used alone or in any suitable combination with other aspects of the disclosure.
According to the method for improving the dislocation of the multifilament vertex angle in the preparation process of the microchannel plate, which is provided by the embodiment of the invention, the manufacturing method of the phi 25 microchannel plate with excellent small-aperture structural performance is provided according to the index requirement of high-performance MCP, the aperture is 5+/-0.05 mu m, the opening area ratio is more than or equal to 65%, the plate thickness is 0.28 mm+/-0.02 mm, and the whole multifilament structure of the MCP vertex angle does not allow more than 3 monofilaments to be dislocated at 5 positions.
Referring to fig. 1 and 2, in the method for improving dislocation of multifilament vertex angle in the process of manufacturing a microchannel plate according to the embodiment of the invention, on the basis of selecting a cladding glass P1 and a core glass X1 used for an effective region 10 of the prepared microchannel plate, a solid region located at the periphery of the effective region of the microchannel plate is divided into a first solid region 21 and a second solid region 22, wherein the first solid region 21 is located at the periphery of the effective region 10, and the second solid region 22 is located at the periphery of the first solid region 21, and on the basis of the effective region 10 and the divided first solid region 21 and second solid region 22, a plate manufacturing process is completed.
The implementation process of the alternative method specifically comprises the following steps:
step 1, after the cladding glass P1 and the core glass X1 used in the selected effective area are matched through pipe rods, preparing effective area multifilaments of the microchannel plate through single-filament drawing, multi-filament rod arrangement and multi-filament drawing processes;
step 2, preparing the multifilaments of the first solid area of the microchannel plate through the processes of single filament drawing, multifilament rod arrangement and multifilament drawing after tube rod matching according to the cladding glass P1 and the core glass X2 of the selected first solid area; wherein, the linear expansion coefficient and softening temperature of the core glass X2 are lower than those of the core glass X1;
step 3, preparing the multifilaments of the second solid area of the microchannel plate through the processes of single filament drawing, multifilament rod arrangement and multifilament drawing after tube rod matching according to the cladding glass P1 and the core glass X1 of the selected second solid area;
step 4, arranging the effective area multifilament, the first solid area multifilament and the second solid area multifilament in a screen arranging mold according to a certain sequence, wherein the cross section of the effective area multifilament, the first solid area multifilament and the second solid area multifilament is in a regular hexagon shape;
step 5, delivering the arranged multifilament into a hot-pressing mold for hot-melting pressing, and slicing to obtain a lamellar microchannel plate blank screen section;
step 6, cutting off the second solid area from the blank screen section through rolling cold working treatment, and only reserving the effective area and the annular first solid area surrounding the effective area;
step 7, corroding the blank screen section after the second entity area is cut off, and removing the core material glass X1 to form a micron-sized porous channel structure, so that a microchannel plate background is prepared and is of a porous sheet structure;
step 8, carrying out hydrogen reduction treatment on the porous sheet structure to form a functional layer with secondary electron emission capability on the inner wall of the porous channel;
and 9, plating a metal electrode on the surface of the porous sheet structure after hydrogen reduction treatment to prepare the microchannel plate.
In a preferred embodiment, the first solid region of the core glass X2 has a lower linear expansion coefficient (5-10) 10 than the core glass X1 -7 And the softening temperature is 50-70 ℃ lower than that of the core glass X1.
Wherein the effective area multifilament, the first entity area multifilament and the second entity area multifilament are prepared by arranging corresponding monofilaments through rod arrangement treatment, and the aperture of the monofilaments is 4-6 mu m.
The cross sections of the effective area multifilament yarns, the first solid area multifilament yarns and the second solid area multifilament yarns are all regular hexagons.
In step 4, the effective area multifilament yarn, the first solid area multifilament yarn, and the second solid area multifilament yarn are arranged in a horizontal type screen arranging mold in a certain order. The inclination angle between the horizontal screen arranging die and the horizontal is 10-20 degrees, and a screen section with a regular hexagon cross section is obtained.
In a preferred embodiment, the active area multifilament yarn, the first solid area multifilament yarn and the second solid area multifilament yarn arranged in the screen arranging die are melt-pressed and formed into a whole into a microchannel plate blank screen section, wherein the highest temperature of the melt-pressing is 40-50 ℃ lower than the softening temperature of the core glass X1 of the active area.
In a preferred embodiment, the method of the present invention is suitable for preparing microchannel plates having a thickness in the range of 0.26mm to 0.30mm.
As an alternative example, the compositions and proportions of the selected cladding glass P1, core glass X1 and core glass X2 are shown in the following table.
As an alternative embodiment, the core glass X1 has a linear expansion coefficient of (100.+ -. 5). Times.10 -7 The softening temperature is (659+/-10) DEG C.
The practice of the invention is described below in conjunction with specific examples.
(1) Under the conditions of the physicochemical properties of the sheath glass P1 and the core glass X1 used in the effective area of the microchannel plate and the whole plate making process, in order to alleviate the phenomenon of dislocation of multifilament vertex angles of the microchannel plate caused by the physical property difference of materials in the effective area and the solid area in the melting and pressing process, the solid area is divided into a solid area A and a solid area B. The entity area A (namely a first entity area) is wrapped on the periphery of the effective area and takes the shape of a ring; the entity area B (namely a second entity area) is wrapped on the periphery of the entity area A, the whole entity area is wrapped on the periphery of the effective area, and the section of the entity area B is regular hexagon;
according to the matching principle of the plate manufacturing process, the melting and pressing process has no explosion, the high-temperature hydrogen reduction treatment has no deformation and the like, and the glass materials of the entity area A and the entity area B are selected.
The leather material of the entity area A is selected as P1, the core material X2 is selected from acid and alkali corrosion resistant glass materials, and the linear expansion coefficient of the core material is lower than that of the glass material X1 by (5-10) X10 -7 The softening temperature is 50-70 ℃ lower than that of the glass material X1. Wherein the physical area BThe materials of the sheath material and the core material are consistent with those of the effective area. In this example, the core material X2 has a linear expansion coefficient of (90.+ -. 5). Times.10 -7 The softening temperature is 600+/-5 ℃.
(2) Matching the sheath material P1 and the core material X1 with pipe rods to draw monofilaments, arrange multifilament rods, draw effective area and physical area B multifilament; the sheath material P1 and the core material X2 are matched and drawn into single filaments through pipe rods, multi-filament arranging rods and multi-filaments in a drawing entity area A.
(3) Arranging the multifilament of the effective area, the multifilament of the entity area A and the multifilament of the entity area B in a screen arranging mold according to a certain sequence, sending the arranged screen sections into a hot pressing mold by using a screen rotating tool to melt and press the screen sections of the micro-channel plate blank, cutting the entity area B from the blank screen sections by slicing, rolling and cold working, and preparing the sheet by using a double-sided polishing machine. And (3) chemically corroding the sheet, and removing the X1 core material to form the porous sheet.
The porous sheet is subjected to hydrogen reduction treatment, so that a functional layer with secondary electron emission is formed on the inner wall of the porous channel, and a nickel-chromium alloy electrode is plated on the surface of the porous sheet after the hydrogen reduction treatment, so that the micro-channel plate with excellent small-aperture structural performance can be finally prepared.
Preferably, the microchannel plate blank panel has an effective area dimension of 19.50 mm.+ -. 0.05mm and a blank panel edge dimension of 31.20.+ -. 0.03mm.
The solid area A is formed by arranging 6 rows of multifilaments between the effective area and the solid area B, and the solid area B is formed by arranging 5 rows of multifilaments at the periphery of the solid area A.
Wherein the multifilament of the effective region, the multifilament of the solid region A and the multifilament of the solid region B are regular hexagon multifilament, and the opposite side size is 0.59mm plus or minus 0.15 mu m. The multifilament yarn is composed of a corresponding plurality of filaments. The filament size was 0.35 mm.+ -. 0.15. Mu.m.
In the preparation process, the effective area, the entity area A and the entity area B are arranged in a horizontal screen arranging die in a certain sequence, the inclination angle between the horizontal screen rotating die and the horizontal screen rotating die is 15 degrees, and the actual opposite side size of the screen section placed in the hot pressing die is 31.5mm plus or minus 0.1mm.
Preferably, multifilament yarns in an effective area, a solid area A and a solid area B which are arranged in a horizontal screen arranging mold are formed by melting and pressing into a whole to form a micro-channel plate blank screen section, the highest temperature of melting and pressing is 45 ℃ lower than the softening temperature of an effective area core material X1, the opposite side size of the screen section after melting and pressing is 31.35mm plus or minus 0.02mm, and the shrinkage ratio is about 5.0%.
Preferably, the microchannel plate blank screen section is cut from the blank screen section by a slicing, spheronizing cold working process to form a microchannel plate sheet having an outer diameter of 25mm + -0.02 mm consisting only of the active area and the solid area A, and a thickness of 0.28mm + -0.02 mm.
Preferably, the hydrogen reduction temperature of the phi 25 micro-channel plate only consisting of the effective area and the entity area A is 450 ℃, and compared with the micro-structure shown in figures 3a and 3b, the multifilament vertex angle structure of the micro-channel plate prepared by the invention has no problem of big triangle, improves the vertex angle structure of the micro-channel plate, ensures that the screen section is not burst in the melt pressure and cold working processes in the plate manufacturing process, does not deform in the high-temperature hydrogen reduction and high-temperature vacuum treatment process before the tube mounting, ensures the high quality in the plate manufacturing process and ensures the yield, and meets the performance requirements of small aperture (4 mu m-6 mu m), big opening area ratio (more than or equal to 65%) and ultra-thin structure (MCP plate thickness of 0.26 mm-0.30 mm) of the micro-light image intensifier used by the third generation micro-light image intensifier.
While the invention has been described with reference to preferred embodiments, it is not intended to be limiting. Those skilled in the art will appreciate that various modifications and adaptations can be made without departing from the spirit and scope of the present invention. Accordingly, the scope of the invention is defined by the appended claims.
Claims (10)
1. A method for improving the dislocation of multifilament vertex angle in the preparation process of a microchannel plate is characterized in that on the basis of selecting a cladding glass P1 and a core glass X1 used for an effective area of the prepared microchannel plate, an entity area positioned at the periphery of the effective area of the microchannel plate is divided into a first entity area and a second entity area, wherein the first entity area is positioned at the periphery of the effective area, the second entity area is positioned at the periphery of the first entity area, and the plate making process is finished on the basis of the effective area, the divided first entity area and the second entity area, and specifically comprises the following steps:
step 1, after the cladding glass P1 and the core glass X1 used in the selected effective area are matched through pipe rods, preparing effective area multifilaments of the microchannel plate through single-filament drawing, multi-filament rod arrangement and multi-filament drawing processes;
step 2, preparing the multifilaments of the first solid area of the microchannel plate through the processes of single filament drawing, multifilament rod arrangement and multifilament drawing after tube rod matching according to the cladding glass P1 and the core glass X2 of the selected first solid area; wherein, the linear expansion coefficient and softening temperature of the core glass X2 are lower than those of the core glass X1;
step 3, preparing the multifilaments of the second solid area of the microchannel plate through the processes of single filament drawing, multifilament rod arrangement and multifilament drawing after tube rod matching according to the cladding glass P1 and the core glass X1 of the selected second solid area;
step 4, arranging the effective area multifilament, the first solid area multifilament and the second solid area multifilament in a screen arranging mold according to a certain sequence, wherein the cross section of the effective area multifilament, the first solid area multifilament and the second solid area multifilament is in a regular hexagon shape;
step 5, delivering the arranged multifilament into a hot-pressing mold for hot-melting pressing, and slicing to obtain a lamellar microchannel plate blank screen section;
step 6, cutting off the second solid area from the blank screen section through rolling cold working treatment, and only reserving the effective area and the annular first solid area surrounding the effective area;
step 7, corroding the blank screen section after the second entity area is cut off, and removing the core material glass X1 to form a micron-sized porous channel structure, so that a microchannel plate background is prepared and is of a porous sheet structure;
step 8, carrying out hydrogen reduction treatment on the porous sheet structure to form a functional layer with secondary electron emission capability on the inner wall of the porous channel;
and 9, plating a metal electrode on the surface of the porous sheet structure after hydrogen reduction treatment to prepare the microchannel plate.
2. The improved microchannel plate of claim 1A method for dislocation of multifilament vertex angle in the process is characterized in that the core glass X2 of the first solid region has a linear expansion coefficient lower than that of the core glass X1 by (5-10) X10 -7 /℃。
3. The method of claim 1, wherein the core glass X2 of the first solid region has a softening temperature 50 ℃ to 70 ℃ lower than the softening temperature of the core glass X1.
4. The method for improving dislocation of apex angle of multifilaments in preparation of micro channel plate as claimed in claim 1, wherein the effective area multifilaments, the first solid area multifilaments and the second solid area multifilaments are prepared by arranging corresponding monofilaments with pore diameters of 4 μm to 6 μm.
5. The method of claim 1, wherein the cross sections of the effective area multifilaments, the first solid area multifilaments and the second solid area multifilaments are regular hexagons.
6. The method for improving dislocation of apex angle of multifilaments in a process of manufacturing a microchannel plate as claimed in claim 1, wherein in the step 4, the multifilaments of effective area, the multifilaments of first solid area and the multifilaments of second solid area are arranged in a horizontal screen arranging mold in a certain order, and an inclination angle between the horizontal screen arranging mold and a horizontal plane is 10 ° to 20 °, so as to obtain a screen section with a regular hexagon shape in section.
7. The method for improving dislocation of apex angle of multifilaments in preparation of micro channel plate as claimed in claim 1, wherein the multifilaments of effective area, the multifilaments of first solid area and the multifilaments of second solid area which are arranged in the screen arranging mold are melt-molded and integrated into a micro channel plate blank screen section by melt-pressing, wherein the melt-pressing has a highest temperature 40 ℃ to 50 ℃ lower than the softening temperature of the core glass X1 of the effective area.
8. The method for improving dislocation of top angles of multifilaments in preparation of micro-channel plate as claimed in claim 1, wherein thickness of prepared micro-channel plate is 0.26 mm-0.30 mm.
9. The method for improving dislocation of apex angle of multifilaments in preparation of micro-channel plate as claimed in claim 1, wherein the linear expansion coefficient of the core glass X1 is (100.+ -. 5). Times.10 -7 /℃。
10. The method for improving dislocation of top angles of multifilaments in preparation of microchannel plate as claimed in claim 1, wherein the softening temperature of the core glass X1 is (659±10) °c.
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