CN114983031A - Groove annular heating type atomizing core and preparation method thereof - Google Patents
Groove annular heating type atomizing core and preparation method thereof Download PDFInfo
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- CN114983031A CN114983031A CN202210618546.8A CN202210618546A CN114983031A CN 114983031 A CN114983031 A CN 114983031A CN 202210618546 A CN202210618546 A CN 202210618546A CN 114983031 A CN114983031 A CN 114983031A
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- A—HUMAN NECESSITIES
- A24—TOBACCO; CIGARS; CIGARETTES; SIMULATED SMOKING DEVICES; SMOKERS' REQUISITES
- A24F—SMOKERS' REQUISITES; MATCH BOXES; SIMULATED SMOKING DEVICES
- A24F40/00—Electrically operated smoking devices; Component parts thereof; Manufacture thereof; Maintenance or testing thereof; Charging means specially adapted therefor
- A24F40/40—Constructional details, e.g. connection of cartridges and battery parts
- A24F40/46—Shape or structure of electric heating means
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- A—HUMAN NECESSITIES
- A24—TOBACCO; CIGARS; CIGARETTES; SIMULATED SMOKING DEVICES; SMOKERS' REQUISITES
- A24F—SMOKERS' REQUISITES; MATCH BOXES; SIMULATED SMOKING DEVICES
- A24F40/00—Electrically operated smoking devices; Component parts thereof; Manufacture thereof; Maintenance or testing thereof; Charging means specially adapted therefor
- A24F40/70—Manufacture
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- A—HUMAN NECESSITIES
- A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
- A61M—DEVICES FOR INTRODUCING MEDIA INTO, OR ONTO, THE BODY; DEVICES FOR TRANSDUCING BODY MEDIA OR FOR TAKING MEDIA FROM THE BODY; DEVICES FOR PRODUCING OR ENDING SLEEP OR STUPOR
- A61M11/00—Sprayers or atomisers specially adapted for therapeutic purposes
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05B—SPRAYING APPARATUS; ATOMISING APPARATUS; NOZZLES
- B05B15/00—Details of spraying plant or spraying apparatus not otherwise provided for; Accessories
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05B—SPRAYING APPARATUS; ATOMISING APPARATUS; NOZZLES
- B05B17/00—Apparatus for spraying or atomising liquids or other fluent materials, not covered by the preceding groups
- B05B17/04—Apparatus for spraying or atomising liquids or other fluent materials, not covered by the preceding groups operating with special methods
- B05B17/06—Apparatus for spraying or atomising liquids or other fluent materials, not covered by the preceding groups operating with special methods using ultrasonic or other kinds of vibrations
- B05B17/0607—Apparatus for spraying or atomising liquids or other fluent materials, not covered by the preceding groups operating with special methods using ultrasonic or other kinds of vibrations generated by electrical means, e.g. piezoelectric transducers
- B05B17/0653—Details
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F24—HEATING; RANGES; VENTILATING
- F24F—AIR-CONDITIONING; AIR-HUMIDIFICATION; VENTILATION; USE OF AIR CURRENTS FOR SCREENING
- F24F6/00—Air-humidification, e.g. cooling by humidification
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- Health & Medical Sciences (AREA)
- Heart & Thoracic Surgery (AREA)
- Hematology (AREA)
- General Engineering & Computer Science (AREA)
- Combustion & Propulsion (AREA)
- Anesthesiology (AREA)
- Biomedical Technology (AREA)
- Chemical & Material Sciences (AREA)
- Mechanical Engineering (AREA)
- Life Sciences & Earth Sciences (AREA)
- Animal Behavior & Ethology (AREA)
- General Health & Medical Sciences (AREA)
- Public Health (AREA)
- Veterinary Medicine (AREA)
- Resistance Heating (AREA)
Abstract
The invention discloses a groove annular heating type atomizing core and a preparation method thereof. The groove annular heating type atomizing core comprises: the ceramic substrate is provided with a first surface and a second surface which are arranged back to back, the first surface is provided with a first groove, the second surface is provided with a plurality of oil penetration holes, and the oil penetration holes are communicated with the first groove; and the heating structure is at least arranged in the first groove, and the heating structure at least covers part of the oil penetration hole. The groove annular heating type atomizing core provided by the embodiment of the invention has the advantages that the reliability of the atomizing core is higher, the temperature consistency is better controlled, the heating area is wider, and the temperature field is more uniformly controlled; on the other hand, the oil seepage speed and the quantity of array oil seepage hole in atomizing core working process can accurate control, keeps better atomization effect.
Description
Technical Field
The invention particularly relates to a groove annular heating type atomizing core and a preparation method thereof, and belongs to the technical field of atomizers.
Background
Atomization is the process of turning a liquid into small droplets in some way. At present, the atomization mode mainly comprises high-pressure gas atomization, ultrasonic atomization, microwave heating atomization, resistance heating atomization and the like. As the "heart" of the atomization technique, the atomizing core determines the atomization effect.
The current common atomizing core structure is shown in fig. 1, which is a heating resistor formed on a porous ceramic by a printing process. The tiny micropores in the porous ceramic are the key points for realizing the functions of stable liquid guiding and liquid locking of the ceramic atomizing core. Due to the surface tension and the capillary action, the liquid can uniformly permeate into the atomizing core and be adsorbed on the surface of the atomizing core.
Compared with other atomization modes, the porous ceramic atomization core has the advantages that the temperature can rise faster and the temperature uniformity is better in the heating process. However, the resistance paste is prepared by a screen printing process and is subjected to high-temperature sintering and other processes subsequently, on one hand, the high-temperature sintering can cause the shrinkage of the resistance paste, so that the discreteness of the resistance is caused; on the other hand, since the porous ceramic substrate has a microporous structure, the resistance paste may penetrate into pores during printing, thereby causing defects such as disconnection, open circuit, and the like. The alloy membrane is used as the atomizing core of the heating structure, and in the heating working state, the gap is generated between the alloy membrane and the porous ceramic due to the problem of the difference of the thermal expansion coefficients, so that the atomizing effect is influenced.
Disclosure of Invention
The invention mainly aims to provide a groove annular heating type atomizing core and a preparation method thereof, so that the defects in the prior art are overcome.
In order to achieve the purpose of the invention, the technical scheme adopted by the invention comprises the following steps:
the embodiment of the invention provides a groove annular heating type atomizing core, which comprises:
the ceramic substrate is provided with a first surface and a second surface which are oppositely arranged, the first surface is provided with a first groove, the second surface is provided with a plurality of oil penetration holes, and the oil penetration holes are communicated with the first groove;
the heating structure is used for heating the fluid medium entering the first groove from the oil penetration hole so as to heat and atomize the fluid medium.
The embodiment of the invention also provides a preparation method of the groove annular heating type atomizing core, which comprises the following steps:
providing a ceramic substrate, and processing a first groove on a first surface of the ceramic substrate;
forming a heating resistor in the first groove;
and processing a plurality of oil penetration holes penetrating through the ceramic substrate along the second surface of the ceramic substrate in a region corresponding to the heating resistor, and communicating the oil penetration holes with the first groove so as to enable a fluid medium introduced from the oil penetration holes to be in contact with the heating resistor, wherein the second surface and the first surface are oppositely arranged.
Compared with the prior art, the invention has the advantages that:
the groove annular heating type atomizing core provided by the embodiment of the invention has the advantages that the reliability of the atomizing core is higher, the temperature consistency is better controlled, the heating area is wider, and the temperature field is more uniformly controlled; on the other hand, the plurality of arrayed oil penetration holes in the groove annular heating type atomizing core provided by the embodiment of the invention can accurately control the oil penetration speed and the number of the oil penetration holes in the working process of the atomizing core, and keep a better atomizing effect.
Drawings
FIG. 1 is a sample of a porous ceramic atomizing core of the prior art;
FIG. 2 is a schematic structural view of a grooved annular heated atomizing core provided in example 1 of the present invention;
FIG. 3 is a schematic view showing a flow of production of a grooved annular heated atomizing core provided in example 1 of the present invention;
FIG. 4 is a schematic structural view showing a manufacturing process of a grooved annular heated atomizing core provided in example 1 of the present invention;
fig. 5 is a schematic structural view of a grooved annular heated atomizing core provided in embodiment 2 of the present invention.
Detailed Description
In view of the deficiencies in the prior art, the inventors of the present invention have made extensive studies and extensive practices to provide technical solutions of the present invention. The technical solution, its implementation and principles, etc. will be further explained as follows.
The embodiment of the invention provides an atomizing core which is simple in process, good in performance and high in precision and is suitable for application fields of electronic cigarettes, humidifiers, face steaming devices, mist making machines, medical atomizers and the like.
In order to overcome the defects of the porous ceramic atomizing core prepared by thick film printing and alloy membrane at present, the invention provides a method for forming an annular heating structure on a compact ceramic substrate in a printing or deposition mode; on the other hand, the aperture size and the number of the oil penetration holes can be accurately controlled in an etching mode.
The embodiment of the invention provides a groove annular heating type atomizing core, which comprises:
the ceramic substrate is provided with a first surface and a second surface which are arranged back to back, the first surface is provided with a first groove, the second surface is provided with a plurality of oil penetration holes, and the oil penetration holes are communicated with the first groove;
the heating structure is used for heating the fluid medium entering the first groove from the oil penetration hole so as to heat and atomize the fluid medium.
In a specific embodiment, the first side of the ceramic substrate has a first region and a second region, the second region being disposed around the first region, wherein the first recess is disposed in the first recess, and a portion of the heating structure is disposed in the first region and another portion is disposed in the second region.
In a specific embodiment, the heating structure comprises at least one annular heating resistor, and the oil penetration hole and an orthographic projection area of the heating resistor in the axial direction of the oil penetration hole are free from an overlapping area.
In one embodiment, the heating resistor has a resistance of 0.5 to 5 ohms.
In one embodiment, the material of the heating resistor includes any one metal of Ni, Cr, Au, Pt, Mo, and W, or an alloy of two or more metals.
In one embodiment, the thickness of the heating resistor is 100nm to 500 μm.
In a specific embodiment, the second region of the first surface of the ceramic substrate is further provided with a metal pad, and the metal pad is electrically connected with the heating structure.
In one embodiment, the plurality of oil penetration holes are arranged at intervals in an array.
In a specific embodiment, the oil penetration holes may be uniformly distributed or non-uniformly distributed.
In a specific embodiment, the diameter of the oil penetration hole is 10 μm to 100 μm, and the distance between the oil penetration holes is 10 μm to 10 mm.
In a specific embodiment, the number of the oil-penetrating holes is 10 to 5000.
In a specific embodiment, the second surface of the ceramic substrate is provided with a second groove, and the oil penetration hole is arranged at the bottom of the second groove, wherein the depth ratio of the first groove to the second groove is (1-100) to (10-300), and the thickness ratio of the ceramic substrate remaining between the first groove and the second groove to the depth ratio of the first groove is (20-300) to (1-100).
In a specific embodiment, the depth of the first recess is 10 μm to 1000 μm, the depth of the second recess is 100 μm to 3000 μm, and the thickness of the ceramic substrate remaining between the first recess and the second recess is 200 μm to 3000 μm.
In a specific embodiment, the ceramic substrate comprises a ceramic substrate.
The embodiment of the invention also provides a preparation method of the groove annular heating type atomizing core, which comprises the following steps:
providing a ceramic substrate, and processing a first groove on a first surface of the ceramic substrate;
forming a heating resistor in the first groove;
and processing a plurality of oil penetration holes penetrating through the ceramic substrate along the edge in a region of the second surface of the ceramic substrate corresponding to the heating resistor, and communicating the oil penetration holes with the first groove so as to enable a fluid medium introduced from the oil penetration holes to be in contact with the heating resistor, wherein the second surface and the first surface are arranged in a back-to-back manner.
In one embodiment, the preparation method comprises the following steps: and processing a second groove in a region of the second surface of the ceramic substrate corresponding to the first groove, and processing the bottom of the second groove to form a plurality of oil penetration holes.
In one embodiment, the preparation method comprises the following steps: and manufacturing a bonding pad on the first surface of the ceramic substrate, and electrically connecting the bonding pad with the heating structure.
The embodiments, processes and principles of the present invention will be further explained with reference to the drawings and the detailed description, and unless otherwise specified, the etching, deposition, patterning processes, devices and so on used in the embodiments of the present invention are well known to those skilled in the art.
The groove annular heating type atomizing core provided by the embodiment of the invention takes dense ceramic as a ceramic substrate and mainly comprises two parts of structures; the ceramic substrate comprises a ceramic substrate part and a heating part, wherein the heating part mainly comprises a heating structure, the heating structure is mainly a heating resistor, and the heating function is realized by electrifying a metal material; the central area of the first groove of the ceramic substrate part is provided with a plurality of oil penetration holes which are formed by etching and distributed in an array, the heating structure is correspondingly distributed around the oil penetration holes, and the oil penetration rate and the oil penetration quantity can be controlled by the oil penetration holes, wherein the fluid medium in the embodiment of the invention mainly refers to smoke oil and the like.
Example 1
Referring to fig. 2, the slot ring heating type atomizing core includes a ceramic substrate 100 and a heating structure 200, wherein the ceramic substrate 100 has a first surface and a second surface oppositely arranged, the first surface is provided with a first slot 110, the second surface is provided with a plurality of oil penetration holes 130, and the oil penetration holes 130 are communicated with the first slot 110; the heating structure 200 is disposed in the first groove 110, and the fluid medium entering from the oil penetration hole 130 can be heated and atomized by contacting the heating structure 200.
In the present embodiment, the heating structure 200 includes a heating resistor having a ring structure, and it is understood that the heating resistor itself has a ring structure, or a plurality of heating resistors included in the heating structure 200 are in a ring shape as a whole.
In this embodiment, the resistance of the heating resistor is 0.5-5 ohm, the material of the heating resistor may be any one metal or an alloy of two or more metals of Ni, Cr, Au, Pt, Mo, and W, and the thickness of the heating resistor is 100nm-500 μm.
In this embodiment, the first surface of the ceramic substrate 100 has a first region and a second region, the second region is distributed around the first region, the first groove 110 is disposed in the first region, a part of the heating structure 200 is disposed in the first groove 110 of the first region, another part is disposed in the second region, and the second region is further disposed with a metal pad 400, and the metal pad 400 is electrically connected to the heating structure 200.
In this embodiment, the bottom of the first groove 110 is formed with an outlet of the oil-penetrating hole 130, the outlet of the oil-penetrating hole 130 is located at a middle region of the bottom of the first groove 110, the heating structures 200 are disposed at other regions of the bottom of the first groove 110 and distributed around the middle region, and it can be understood that the oil-penetrating hole is not covered by the heating structures 200.
In this embodiment, the plurality of oil penetration holes 130 are arranged at intervals in an array, and the diameter of each oil penetration hole 130 is 10 μm to 100 μm, and the distance between the oil penetration holes 130 is 10 μm to 10 mm.
In this embodiment, the second surface of the ceramic substrate 100 is provided with a second groove 120, the oil penetration hole 130 is disposed in the ceramic substrate remaining between the second groove 120 and the first groove 110, and the oil penetration hole 130 is respectively communicated with the first groove 110 and the second groove 120, wherein the orthographic projection areas of the first groove 110 and the second groove 120 are the same, the depth ratio of the first groove 110 to the second groove 120 is (1-100): (10-300), and the depth ratio of the first groove 110 to the second groove 120 of the ceramic substrate 100 remaining between the first groove 110 and the second groove 120 to the depth of the first groove 110 is (20-300): 1-100).
For example, the depth of the first recess 110 is 10 μm to 1000 μm, the depth of the second recess 120 is 100 μm to 3000 μm, and the thickness of the ceramic substrate remaining between the first recess 110 and the second recess 120 is 200 μm to 3000 μm.
It should be noted that the positions of the first groove 110 and the second groove 120 may be corresponding to each other, and it is understood that the orthographic projection area of one of the first groove 110 and the second groove 120 may be located within the orthographic projection area of the other or completely coincide with each other.
In this embodiment, the ceramic substrate 100 may be a ceramic substrate, the ceramic substrate 100 is mainly formed by using dense ceramic as a base material, mixing the dense ceramic raw material in a mixing manner such as a roller, a three-dimensional manner, a planetary manner, and the like, then forming a dense ceramic substrate in a manner such as injection molding or isostatic pressing, and then pre-sintering and high-temperature sintering, and a manufacturing process of the ceramic substrate 100 is not specifically limited and described herein.
Referring to fig. 3 and 4, a method for preparing a grooved annular heated atomizing core may include the following steps:
1) alumina ceramic powder material with the grain diameter of about 200 mu m is taken as a raw material for manufacturing a ceramic substrate, and the grain diameter distribution is controlled by screening;
2) mixing an alumina ceramic powder material with additives such as glass frit and stearic acid by using a roller material changer and the like, wherein the mass percentages of the alumina ceramic powder material and the additives are respectively 5% and 15%;
3) injecting the mixed slurry into a prepared die by using a hot-pressing grouting machine and the like, thereby forming a ceramic substrate blank of the atomizing core with strength;
4) placing the ceramic substrate blank of the atomization core in a program-controlled oven, and heating the temperature in the program-controlled oven to 200 ℃ so as to carry out degreasing treatment on the ceramic substrate blank of the atomization core by using an organic solvent;
5) pre-sintering the degreased ceramic substrate blank by adopting a muffle furnace and the like, controlling the pre-sintering temperature at 500-600 ℃, and adjusting the pre-sintering time according to specific conditions;
6) integrally sintering the pre-sintered ceramic substrate blank by adopting a high-temperature sintering furnace, wherein the sintering temperature is controlled to be 1100-1200 ℃, and the sintering time is controlled to be 1-1.5 hours, so as to obtain the ceramic substrate;
7) processing a first groove 110 on a first surface of the sintered ceramic substrate, processing a second groove 120 on a second surface of the sintered ceramic substrate by etching and the like, and making the first groove 110 correspond to the second groove 120, wherein the first surface and the second surface are arranged oppositely;
8) patterning metal Ni/Cr on a first surface of the ceramic substrate by deposition and the like, so as to form a heating resistor for heating on the first surface, wherein one part of the heating resistor is arranged in the peripheral region inside the first groove 110, the other part of the heating resistor is arranged outside the first groove 110, and the resistance of the heating resistor is 1-1.5 ohm;
9) a plurality of oil penetration holes 130 which are distributed in a display manner are manufactured in the middle area of the bottom of the second groove 120 of the ceramic substrate in a laser etching manner, the oil penetration holes 130 penetrate through the ceramic substrate in the thickness direction and are communicated with the first groove, the diameter of each oil penetration hole 130 is controlled to be 10-100 micrometers, the distance between every two oil penetration holes is controlled to be 10-10 mm, and the peripheral area is distributed around the middle area;
10) a pad 400 is formed on the first surface of the ceramic substrate, and the pad 400 is electrically connected to a heating resistor, and then a nickel wire having a diameter of about 0.5 μm is welded to the pad by spot welding or the like.
Example 2
Referring to fig. 5, the structure of a grooved annular heated atomizing core in this embodiment is substantially the same as that in embodiment 1, except that:
the bottom of the first groove 110 of the ceramic substrate 100 is provided with a plurality of blind holes 140 in the area corresponding to the heating resistor, the depth of the blind holes is 1/3-1/2 of the depth of the oil penetration holes 130, the aperture of the blind holes is 1-2 times of the aperture of the oil penetration holes, the distance between the blind holes can be 0.5-1.5 times of the distance between the oil penetration holes, each blind hole is also filled with a transition layer 500, the transition layer 500 is formed by sintering a mixture of metal particles and ceramic particles, wherein the metal particles are the same as the heating resistor, the ceramic particles are the same as the ceramic substrate, and the heating resistor is directly combined with the transition layer 500.
The groove annular heating type atomizing core provided by the embodiment can utilize the characteristic that the transition layer has good compatibility with the heating resistor and the ceramic substrate, the bonding force between the heating resistor and the ceramic substrate is strengthened from the material science angle, on the other hand, the transition layer is used as an anchor point, the bonding between the transition layer and the ceramic substrate is strengthened from the mechanical angle, and the problems of warping, separation and the like possibly caused by the difference of thermal expansion coefficients between the heating resistor and the ceramic substrate are solved. In addition, due to the existence of the blind holes and the transition layers, a three-dimensional heating path (a heating resistor is in contact with the bottom surface of the ceramic substrate, surface heating is realized, and the transition layers are deep into the ceramic substrate, so that one heating dimension is increased), and the heating efficiency and the heating uniformity are further improved.
The groove annular heating type atomizing core provided by the embodiment of the invention has the advantages that the reliability is higher, the temperature consistency control is better, the heating area is wider, and the temperature field control is more uniform; on the other hand, according to the groove annular heating type atomizing core provided by the embodiment of the invention, the array oil penetration holes can accurately control the oil penetration speed and the number of the oil penetration holes in the working process of the atomizing core, so that a better atomizing effect is kept.
According to the groove annular heating type atomizing core provided by the embodiment of the invention, the overall temperature field in a tobacco tar atomizing area is more uniform due to the annular heating structure, so that the problem of uncomfortable taste caused by inconsistent tobacco tar atomizing speed due to nonuniform temperature field distribution in the tobacco tar atomizing process can be avoided; on the other hand, the speed and the quantity of array's oil impregnate hole, control oil supplement that can be more meticulous can carry out timely tobacco tar after the atomizing and supply, and the speed that can fully guarantee oil supplement is unanimous moreover to guarantee the whole atomization effect of atomizing core.
Most of the existing atomizing core structures mainly adopt S-shaped heating lines, the distribution uniformity of a thermal field on the whole surface is poor, and the difference of thermal temperature gradients is large, so that the difference of the mouthfeel of tobacco tar atomization is large.
It should be understood that the above-mentioned embodiments are merely illustrative of the technical concepts and features of the present invention, which are intended to enable those skilled in the art to understand the contents of the present invention and implement the present invention, and therefore, the protection scope of the present invention is not limited thereby. All equivalent changes and modifications made according to the spirit of the present invention should be covered within the protection scope of the present invention.
Claims (10)
1. A groove annular heating type atomizing core is characterized in that:
the ceramic substrate is provided with a first surface and a second surface which are oppositely arranged, the first surface is provided with a first groove, the second surface is provided with a plurality of oil penetration holes, and the oil penetration holes are communicated with the first groove;
the heating structure is used for heating the fluid medium entering the first groove from the oil penetration hole so as to heat and atomize the fluid medium.
2. The grooved annularly heated atomizing core of claim 1, wherein: the first surface of the ceramic substrate has a first region and a second region disposed around the first region, wherein the first groove is disposed in the first region, a portion of the heating structure is disposed in the first groove, and another portion is disposed in the second region.
3. The grooved annularly heated atomizing core according to claim 1 or 2, wherein: the heating structure comprises at least one annular heating resistor, and the oil penetration hole and an orthographic projection area of the heating resistor in the axial direction of the oil penetration hole are not overlapped; preferably, the resistance of the heating resistor is 0.5-5 ohms.
4. A grooved annularly heated atomizing core as set forth in claim 3, wherein: the material of the heating resistor comprises any one metal or an alloy formed by more than two metals of Ni, Cr, Au, Pt, Mo and W;
preferably, the thickness of the heating resistor is 100nm to 500 μm.
5. The grooved annularly heated atomizing core of claim 2, wherein: and the second area of the first surface of the ceramic substrate is also provided with a metal bonding pad, and the metal bonding pad is electrically connected with the heating structure.
6. The grooved annularly heated atomizing core of claim 2, wherein: the plurality of oil penetration holes are distributed in an array type at intervals, wherein the aperture of each oil penetration hole is 10-100 mu m, and the distance between the oil penetration holes is 10-10 mm.
7. The grooved annularly heated atomizing core of claim 1, wherein: the second surface of the ceramic substrate is provided with a second groove, and the oil penetration hole is arranged at the bottom of the second groove, wherein the depth ratio of the first groove to the second groove is (1-100) to (10-300), and the thickness ratio of the ceramic substrate remaining between the first groove and the second groove to the depth of the first groove is (20-300) to (1-100).
8. The grooved annularly heated atomizing core of claim 7, wherein: the ceramic substrate includes a ceramic substrate.
9. A method of producing a grooved annularly heated atomizing core according to any one of claims 1 to 8, comprising:
providing a ceramic substrate, and processing a first groove on a first surface of the ceramic substrate;
forming a heating resistor in the first groove;
and processing a plurality of oil penetration holes penetrating through the ceramic substrate along the second surface of the ceramic substrate in a region corresponding to the heating resistor, and communicating the oil penetration holes with the first groove so as to enable a fluid medium introduced from the oil penetration holes to be in contact with the heating resistor, wherein the second surface and the first surface are oppositely arranged.
10. The method of claim 9, comprising: and processing a second groove in a region of the second surface of the ceramic substrate corresponding to the first groove, and processing the bottom of the second groove to form a plurality of oil penetration holes.
Applications Claiming Priority (2)
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CN2021116148738 | 2021-12-27 | ||
CN202111614873 | 2021-12-27 |
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CN114983031A true CN114983031A (en) | 2022-09-02 |
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