CN114976559A - Microwave resonant cavity - Google Patents
Microwave resonant cavity Download PDFInfo
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- CN114976559A CN114976559A CN202210698835.3A CN202210698835A CN114976559A CN 114976559 A CN114976559 A CN 114976559A CN 202210698835 A CN202210698835 A CN 202210698835A CN 114976559 A CN114976559 A CN 114976559A
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- microwave
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- cylindrical
- resonant cavity
- cooling channel
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- 238000001816 cooling Methods 0.000 claims abstract description 32
- 230000008878 coupling Effects 0.000 claims abstract description 14
- 238000010168 coupling process Methods 0.000 claims abstract description 14
- 238000005859 coupling reaction Methods 0.000 claims abstract description 14
- 239000000463 material Substances 0.000 claims abstract description 11
- 238000005457 optimization Methods 0.000 claims description 21
- 239000004020 conductor Substances 0.000 claims description 16
- 230000005540 biological transmission Effects 0.000 claims description 7
- 239000007787 solid Substances 0.000 claims description 7
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 5
- 239000000110 cooling liquid Substances 0.000 claims description 4
- 230000000694 effects Effects 0.000 claims description 2
- 238000005086 pumping Methods 0.000 claims description 2
- 239000013078 crystal Substances 0.000 abstract description 7
- 238000000034 method Methods 0.000 abstract description 7
- 239000010432 diamond Substances 0.000 abstract description 6
- 229910003460 diamond Inorganic materials 0.000 abstract description 6
- 230000008569 process Effects 0.000 abstract description 4
- 230000005284 excitation Effects 0.000 description 4
- 238000005229 chemical vapour deposition Methods 0.000 description 3
- 238000009826 distribution Methods 0.000 description 3
- 238000010521 absorption reaction Methods 0.000 description 2
- 239000011810 insulating material Substances 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 239000004809 Teflon Substances 0.000 description 1
- 229920006362 Teflon® Polymers 0.000 description 1
- 230000002776 aggregation Effects 0.000 description 1
- 238000004220 aggregation Methods 0.000 description 1
- 238000004364 calculation method Methods 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 238000011109 contamination Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 239000010437 gem Substances 0.000 description 1
- 229910001751 gemstone Inorganic materials 0.000 description 1
- 230000017525 heat dissipation Effects 0.000 description 1
- 238000009413 insulation Methods 0.000 description 1
- 239000012212 insulator Substances 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 239000010453 quartz Substances 0.000 description 1
- 229910052594 sapphire Inorganic materials 0.000 description 1
- 239000010980 sapphire Substances 0.000 description 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
- 238000004088 simulation Methods 0.000 description 1
- 238000004381 surface treatment Methods 0.000 description 1
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Classifications
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01P—WAVEGUIDES; RESONATORS, LINES, OR OTHER DEVICES OF THE WAVEGUIDE TYPE
- H01P7/00—Resonators of the waveguide type
- H01P7/06—Cavity resonators
Abstract
The invention relates to a microwave resonant cavity, comprising: a cylindrical chamber comprising a nested plurality of cylindrical cavities for containing a gaseous plasma, the plurality of cylindrical cavities having different sizes; a coupling antenna located inside the cylindrical chamber; a microwave window for transmitting microwaves; the air exhaust hole is positioned on the cavity wall of the cylindrical cavity and used for realizing vacuum inside the cavity through an external vacuum system; the sample table is positioned in the cavity and used for placing materials, and the sample table is movably connected with the cooling channel; and the cooling channel is embedded in the cavity wall and is used for cooling the microwave resonant cavity. The microwave resonant cavity has reasonable structure, and can ensure the high-efficiency coupling of microwave energy in a wider process range, thereby preparing the high-quality diamond single crystal material.
Description
Technical Field
The invention relates to the field of chemical vapor deposition, in particular to a microwave resonant cavity.
Background
Microwave Plasma Chemical Vapor Deposition (MPCVD) is a common method for preparing high-quality diamond materials, and can be used for preparing tool-level, heat sink-level, gem-level, optical-level and electronic-level diamond single crystal and polycrystalline materials. The microwave-excited plasma can produce a high-purity single crystal material or realize high-quality surface treatment of the material because of no electrode contamination caused by high voltage.
Different structural designs of the microwave resonance cavity can generate great influence on the microwave resonance effect, and if the resonant cavity is not designed reasonably, microwave reflection counteraction or heat loss is generated, so that the quality of a single crystal material is degraded and the whole chemical vapor deposition equipment is unstable; therefore, a reasonably designed resonant cavity is crucial to diamond single crystal growth.
Disclosure of Invention
The invention aims to provide a microwave resonant cavity with a reasonable structure, and the specific technical scheme is as follows.
A microwave resonant cavity, comprising:
a cylindrical chamber comprising a nested plurality of cylindrical cavities for containing a gaseous plasma, the plurality of cylindrical cavities having different sizes;
a coupling antenna located inside the cylindrical chamber;
a microwave window for transmitting microwaves;
the air exhaust hole is positioned on the cavity wall of the cylindrical cavity and used for realizing vacuum inside the cavity through an external vacuum system;
the sample table is positioned in the cavity and used for placing materials, and the sample table is movably connected with the cooling channel;
and the cooling channel is embedded in the cavity wall and is used for cooling the microwave resonant cavity.
Further, the device also comprises a back plate, and the cylindrical cavity is jointed with the back plate.
Further, the cylindrical cavity has a flange, and the flange is connected to the back plate by a plurality of screws to achieve engagement of the cylindrical cavity with the back plate.
Further, the pitch of the screws is much smaller than a quarter of the wavelength of the frequency in the microwave cavity, and/or a microwave absorbing elastic seal is arranged between the cylindrical cavity and the back plate.
Furthermore, a moving pipe which moves along the axial direction of the cooling channel is arranged in the cooling channel, one end of the moving pipe is connected with the sample stage, and the other end of the moving pipe is connected with the linear motor.
Further, the microwave oven also comprises a solid-state microwave source and a microwave transmission system; the microwave transmission system comprises a conductor and a ring coupler; the solid microwave source is positioned at one end of the water cooling channel, which is far away from the sample stage, and the conductor is connected with the solid microwave source; the conductor is coaxially arranged with the cylindrical cavity, passes through the water cooling channel, extends out of the cylindrical cavity and is connected with the annular coupler; the annular coupler is coaxially connected with one of the cylindrical cavities; the coupling antenna is connected with the loop coupler.
Further, the dimensions of the plurality of cylindrical cavities are calculated as follows:
calculating according to the optimal optimization function to obtain an optimal resonance condition;
determining the size of the plurality of cylindrical cavities according to the optimal resonance condition.
Further, in the above-mentioned case,
the size and the position of the coupling antenna are calculated according to an optimal optimization function;
the positions, the number and the sizes of the air pumping holes are calculated according to an optimal optimization function;
and the size and the position of the sample stage are calculated according to an optimal optimization function.
Further, calculating according to an optimal optimization function to obtain the thermal region characteristics of the resonant cavity, and determining the position and the size of the cooling channel and the flow rate of the cooling liquid in the cooling channel according to the thermal region characteristics.
Further, the optimization target of the optimal optimization function is that the area of the sample platform is uniform by more than 2 inches and the area of the sample platform is 10 inches 5 A microwave intensity of V/m or higher.
Has the advantages that: the invention provides a microwave resonant cavity which is reasonable in structure, can ensure that the high-efficiency coupling of microwave energy can be realized in a wider process range, simultaneously avoids the excitation of secondary plasma, cannot etch a cavity and a microwave window, and can be used for preparing a high-quality diamond single crystal material.
Drawings
The invention is described in further detail below with reference to the figures and specific embodiments.
Fig. 1 is a schematic structural diagram of a microwave resonant cavity provided in this embodiment.
Reference numerals: 1. a cylindrical chamber; 11. a first cylindrical cavity; 12. a second cylindrical cavity; 13. a third cylindrical cavity; 2. a coupled antenna; 3. a microwave window; 4. a sample stage; 5. a cooling channel; 61. a ring coupler; 62. a conductor; 7. moving the tube; 8. a solid state microwave source.
Detailed Description
The technical solutions of the present invention will be described clearly and completely with reference to the accompanying drawings, and it should be understood that the described embodiments are some, but not all embodiments of the present invention. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.
In the description of the present invention, it should be noted that the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", etc., indicate orientations or positional relationships based on the orientations or positional relationships shown in the drawings, and are only for convenience of description and simplicity of description, but do not indicate or imply that the device or element being referred to must have a particular orientation, be constructed and operated in a particular orientation, and thus, should not be construed as limiting the present invention. Furthermore, the terms "first," "second," and "third" are used for descriptive purposes only and are not to be construed as indicating or implying relative importance.
In the description of the present invention, it should be noted that, unless otherwise explicitly specified or limited, the terms "mounted," "connected," and "connected" are to be construed broadly, e.g., as meaning either a fixed connection, a removable connection, or an integral connection; can be mechanically or electrically connected; they may be connected directly or indirectly through intervening media, or they may be interconnected between two elements. The specific meanings of the above terms in the present invention can be understood in specific cases to those skilled in the art. In addition, the technical features involved in the different embodiments of the present invention described below may be combined with each other as long as they do not conflict with each other.
Examples
The embodiment provides a microwave resonant cavity which comprises a cylindrical cavity 1, a coupling antenna 2, a sample stage 4, a cooling channel 5, a solid-state microwave source 8 and a microwave transmission system.
Referring to fig. 1, the cylindrical chamber 1 includes a first cylindrical chamber 11, a second cylindrical chamber 12, and a third cylindrical chamber 13, which are sequentially nested from top to bottom.
A cooling channel 5 is embedded in the third cylindrical cavity 13, and flowing cooling liquid is filled in the cooling channel 5; the cooling channel 5 greatly reduces the heat of the microwave resonant cavity, improves the heat dissipation efficiency, further improves the working stability of the microwave resonant cavity under the condition of high-power microwave input, and realizes a high-density plasma resonant cavity.
A sample table 4 and a microwave window 3 are arranged in the second cylindrical cavity 12, and an air suction hole is formed in the cavity wall; the sample stage 4 is connected with the cooling channel 5 through a moving pipe 7, and the sample stage 4 can move up and down along the axial direction of the cooling channel 5 so as to form the optimal resonance condition of the microwave together with the inner wall of the cylindrical chamber 1; the lower end of the moving pipe 7 is connected with a linear motor, and the linear motor drives the moving pipe 7 to move up and down;
the microwave window 3 is used for transmitting microwaves, an electric insulating material is arranged between the microwave window 3 and the second cylindrical cavity 12, the interface between the microwave window 3 and the second cylindrical cavity 12 is sealed, and the electric insulating material can be Teflon or ceramic; the microwave window 3 adopts a high-purity quartz or sapphire window, and the microwave absorption loss of the microwave window 3 is not more than 0.1%.
The air exhaust hole is used for realizing vacuum inside the cavity through an external vacuum system, and is a component inside the resonant cavity; the air suction hole is positioned below the second cavity, the second cavity is provided with a flange, and the flange is connected to the back plate through a plurality of screws so as to realize the joint of the cylindrical cavity and the back plate; the pitch of the screws is much smaller than a quarter of the wavelength of the frequency in the microwave resonant cavity, and/or a microwave absorbing elastic seal is arranged between the cylindrical resonant cavity and the back plate.
The solid microwave source 8 generates microwaves, and the microwaves are transmitted through a microwave transmission system; the microwave transmission system comprises a connector comprising a conductor 62 and a ring coupler 61; the solid-state microwave source 8 is positioned at the lower end of the cylindrical cavity 1, and the conductor 62 is connected with the solid-state microwave source 8; the conductor 62 is arranged coaxially with the cylindrical cavity 1, penetrates through the water cooling channel and extends out of the top of the cylindrical cavity 1, and an insulator is arranged between the conductor 62 and the cylindrical cavity; the annular coupler 61 is positioned at the top of the cylindrical cavity and is coaxially connected with the first cylindrical cavity 11, and the conductor 62 extends out of the first cylindrical cavity 11 and is connected with the annular coupler 61; the coupling antenna 2 is connected with the annular coupler 61 and extends into the cylindrical chamber 1; the ring coupler 61 comprises a current path from the connector through the ring coupler 61 and a return path along the inner surface of the cylindrical chamber 1. The conductor 62, the insulation and the flange between the conductor 62 and the cylindrical cavity form a portion of the known impedance of the conductor 62. In this embodiment, the conductor 62 may be formed integrally with the ring coupler 61 and be an extension of the ring coupler 61. The microwave power is coupled into the cavity by using a ring coupler 61 of the coupler, the ring coupler 61 being as large in diameter as possible to minimize self-inductance.
Specifically, the dimensions of the first cylindrical cavity 11, the second cylindrical cavity 12 and the third cylindrical cavity 13 are calculated as follows:
calculating according to the optimal optimization function to obtain an optimal resonance condition;
the dimensions of the first, second and third cylindrical cavities 11, 12, 13 are determined according to the optimal resonance condition.
The sizes of the plurality of cylindrical cavities accord with specific microwave resonance conditions, namely resonance conditions of 2.45GHz and 915MHz wavelengths are met, the microwaves form reflection conditions inside the cylindrical cavity 1, and space superposition of the microwaves is formed in the area above the sample table 4, so that plasma is excited; the dimensions of the plurality of cylindrical cavities in this embodiment meet the optimal resonance conditions to optimize the effectiveness of the excited plasma. The size of the cylindrical chamber 1 is composed of a space size and a processing precision, wherein the space size is related to a half wavelength of the microwave, and the processing precision is related to the reflection loss of the microwave on the inner wall of the cylindrical chamber 1.
Specifically, the size and the position of the coupling antenna 2 are calculated according to an optimal optimization function, and in this embodiment, the diameter of the coupling antenna 2 is not more than 3 cm;
the positions, the number and the sizes of the air exhaust holes are calculated according to an optimal optimization function, the number of the air exhaust holes is two, and the air exhaust holes are symmetrically distributed about the axis of the second cylindrical cavity 12;
the size and position of the sample stage 4 is calculated according to an optimal optimization function, in this embodiment the size of the sample stage 4 is between 2 and 6 inches.
Specifically, the method comprises the steps of simulating microwave input, resonant reflection, microwave absorption, microwave aggregation and plasma excitation states, calculating according to an optimal optimization function to obtain the thermal region characteristics of the resonant cavity, determining the position and the size of the cooling channel 5 and the flow rate of cooling liquid in the cooling channel 5 according to the thermal region characteristics, and achieving efficient and accurate cooling.
Specifically, the optimization goal of the optimal optimization function is large-area uniformity and high microwave intensity. In this example, the sample stage has a uniform area of 42 inches or more and 10 5 A microwave intensity of V/m or higher.
The optimization method can adopt various simulation software and models, parameters such as plasma, microwave field distribution, thermal field distribution, electron density distribution and the like can be comprehensively considered in the simulation process, the optimal characteristic size and parameters of the microwave resonant cavity are obtained, and data input is provided for cavity processing and solid-state microwave source 8 input.
According to the microwave resonant cavity provided by the embodiment, the optimal microwave resonant frequency and mode can be obtained through calculation according to the processing cavity precision and the shape parameters of the microwave resonant cavity, and then the optimal microwave resonant frequency and mode are fed back to the solid-state microwave source 8, so that the real-time dynamic adjustment of the frequency and the power of the solid-state microwave source 8 is realized, the optimal microwave resonant and plasma excitation state is realized, and the plasma with a longer size and a larger volume can be realized. The microwave resonant cavity can ensure that the high-efficiency coupling of microwave energy is realized in a wider process range, simultaneously avoid the excitation of secondary plasma, and cannot etch the cavity and the microwave window 3, thereby preparing the high-quality diamond single crystal material. Furthermore, the cavity of the present invention does not require a tuner and is more stable during operation.
It should be understood that the above examples are only for clarity of illustration and are not intended to limit the embodiments. Other variations and modifications will be apparent to persons skilled in the art in light of the above description. This need not be, nor should it be exhaustive of all embodiments. And obvious variations or modifications of the invention may be made without departing from the spirit or scope of the invention.
Claims (10)
1. A microwave resonant cavity, comprising:
a cylindrical chamber (1) comprising a plurality of nested cylindrical cavities for containing a gaseous plasma, the plurality of cylindrical cavities having different dimensions;
a coupling antenna (2) located inside the cylindrical chamber (1);
a microwave window (3) for transmitting microwaves;
the air exhaust hole is positioned on the cavity wall of the cylindrical cavity and used for realizing vacuum inside the cavity through an external vacuum system;
the sample stage (4) is positioned in the cavity and used for placing materials, and the sample stage (4) is movably connected with the cooling channel (5);
and the cooling channel (5) is embedded in the cavity wall and is used for cooling the microwave resonant cavity.
2. A microwave resonant cavity as recited in claim 1, further comprising a back plate, the cylindrical cavity being joined to the back plate.
3. A microwave resonant cavity according to claim 2, wherein the cylindrical cavity has a flange, the flange being connected to the backplate by a plurality of screws to effect engagement of the cylindrical cavity with the backplate.
4. A microwave resonant cavity according to claim 3, wherein the screws are spaced apart by a distance substantially less than a quarter of a wavelength of a frequency in the microwave resonant cavity, and/or a microwave absorbing elastomeric seal is provided between the cylindrical resonant cavity and the back plate.
5. A microwave resonance cavity according to claim 4, wherein a moving tube (7) is arranged in the cooling channel (5) and moves along the axial direction of the cooling channel, and one end of the moving tube (7) is connected with the sample stage (4) and the other end is connected with the linear motor.
6. A microwave resonant cavity according to claim 5, further comprising a solid state microwave source (8) and a microwave transmission system; the microwave transmission system comprises a conductor (62) and a ring coupler (61); the solid microwave source (8) is positioned at one end of the water cooling channel, which is far away from the sample stage (4), and the conductor (62) is connected with the solid microwave source (8); the conductor (62) is arranged coaxially with the cylindrical chamber (1), passes through the water cooling channel, extends out of the cylindrical chamber (1) and is connected with the annular coupler (61); the annular coupler (61) is coaxially connected with one of the cylindrical cavities; the coupling antenna (2) is connected to the loop coupler (61).
7. A microwave resonant cavity according to claim 6, wherein the dimensions of the plurality of cylindrical cavities are calculated as follows:
calculating according to the optimal optimization function to obtain an optimal resonance condition;
determining the size of the plurality of cylindrical cavities according to the optimal resonance condition.
8. A microwave resonant cavity according to claim 7,
the size and the position of the coupling antenna (2) are calculated according to an optimal optimization function;
the positions, the number and the sizes of the air pumping holes are calculated according to an optimal optimization function;
and the size and the position of the sample stage (4) are calculated according to an optimal optimization function.
9. A microwave resonator according to claim 8, characterized in that the thermal zone characteristics of the resonator are calculated according to an optimal optimisation function, and the position and size of the cooling channels (5) and the flow rate of the cooling liquid in the cooling channels (5) are determined on the basis of the thermal zone characteristics.
10. A microwave resonant cavity according to claim 9, characterized in that the optimization objectives of the optimal optimization function are a sample stage (4) with an area uniformity of more than 2 inches and a surface uniformity of 10 inches 5 A microwave intensity of V/m or higher.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
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| CN202210698835.3A CN114976559A (en) | 2022-06-20 | 2022-06-20 | Microwave resonant cavity |
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| Application Number | Priority Date | Filing Date | Title |
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| CN202210698835.3A CN114976559A (en) | 2022-06-20 | 2022-06-20 | Microwave resonant cavity |
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Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104388910A (en) * | 2014-12-13 | 2015-03-04 | 太原理工大学 | High-power microwave plasma reaction unit for chemical vapor deposition of diamond films |
| US20170040145A1 (en) * | 2014-06-16 | 2017-02-09 | Element Six Technologies Limited | A microwave plasma reactor for manufacturing synthetic diamond material |
| CN108468086A (en) * | 2018-04-24 | 2018-08-31 | Fd3M公司 | Microwave plasma CVD device and its application |
| CN212441165U (en) * | 2020-05-28 | 2021-02-02 | 深圳优普莱等离子体技术有限公司 | High-power microwave plasma powder processing apparatus |
| CN112647126A (en) * | 2020-12-02 | 2021-04-13 | 哈尔滨工业大学 | Embedded water cooling table for large-particle MPCVD single crystal diamond temperature-control continuous growth and application thereof |
| CN214032685U (en) * | 2020-12-29 | 2021-08-24 | 长沙新材料产业研究院有限公司 | Microwave suppression structure for MPCVD equipment |
-
2022
- 2022-06-20 CN CN202210698835.3A patent/CN114976559A/en active Pending
Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20170040145A1 (en) * | 2014-06-16 | 2017-02-09 | Element Six Technologies Limited | A microwave plasma reactor for manufacturing synthetic diamond material |
| CN104388910A (en) * | 2014-12-13 | 2015-03-04 | 太原理工大学 | High-power microwave plasma reaction unit for chemical vapor deposition of diamond films |
| CN108468086A (en) * | 2018-04-24 | 2018-08-31 | Fd3M公司 | Microwave plasma CVD device and its application |
| CN212441165U (en) * | 2020-05-28 | 2021-02-02 | 深圳优普莱等离子体技术有限公司 | High-power microwave plasma powder processing apparatus |
| CN112647126A (en) * | 2020-12-02 | 2021-04-13 | 哈尔滨工业大学 | Embedded water cooling table for large-particle MPCVD single crystal diamond temperature-control continuous growth and application thereof |
| CN214032685U (en) * | 2020-12-29 | 2021-08-24 | 长沙新材料产业研究院有限公司 | Microwave suppression structure for MPCVD equipment |
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Inventor after: Lin Weiqun Inventor after: Yue Weiping Inventor after: Zhang Bing Inventor after: Yao Zhiyi Inventor after: Tang Yahai Inventor after: Guo Lei Inventor after: Liu Tao Inventor before: Lin Weiqun Inventor before: Yue Weiping Inventor before: Dai Bing Inventor before: Zhang Bing Inventor before: Yao Zhiyi Inventor before: Tang Yahai Inventor before: Guo Lei Inventor before: Liu Tao |
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