CN114959871A - Heat radiation structure of single crystal casting furnace and single crystal casting furnace - Google Patents
Heat radiation structure of single crystal casting furnace and single crystal casting furnace Download PDFInfo
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- CN114959871A CN114959871A CN202210680971.XA CN202210680971A CN114959871A CN 114959871 A CN114959871 A CN 114959871A CN 202210680971 A CN202210680971 A CN 202210680971A CN 114959871 A CN114959871 A CN 114959871A
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- 230000005855 radiation Effects 0.000 title claims abstract description 10
- 238000009413 insulation Methods 0.000 claims abstract description 96
- 239000008186 active pharmaceutical agent Substances 0.000 claims abstract description 47
- 230000017525 heat dissipation Effects 0.000 claims abstract description 44
- 230000007246 mechanism Effects 0.000 claims abstract description 23
- 239000000463 material Substances 0.000 claims description 17
- 239000002131 composite material Substances 0.000 claims description 12
- 230000003028 elevating effect Effects 0.000 claims description 9
- 229910010293 ceramic material Inorganic materials 0.000 claims description 8
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- 229910001220 stainless steel Inorganic materials 0.000 claims description 8
- CREMABGTGYGIQB-UHFFFAOYSA-N carbon carbon Chemical compound C.C CREMABGTGYGIQB-UHFFFAOYSA-N 0.000 claims description 6
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- 229910000858 La alloy Inorganic materials 0.000 claims description 3
- 229910000990 Ni alloy Inorganic materials 0.000 claims description 2
- 239000007770 graphite material Substances 0.000 claims description 2
- 238000007789 sealing Methods 0.000 claims description 2
- 230000033001 locomotion Effects 0.000 abstract description 41
- 230000003014 reinforcing effect Effects 0.000 abstract description 2
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- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 4
- 229910002804 graphite Inorganic materials 0.000 description 4
- 239000010439 graphite Substances 0.000 description 4
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- 229910052751 metal Inorganic materials 0.000 description 1
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- 230000004048 modification Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 229910021421 monocrystalline silicon Inorganic materials 0.000 description 1
- 229910052759 nickel Inorganic materials 0.000 description 1
- PXHVJJICTQNCMI-UHFFFAOYSA-N nickel Substances [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 1
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- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B11/00—Single-crystal growth by normal freezing or freezing under temperature gradient, e.g. Bridgman-Stockbarger method
- C30B11/003—Heating or cooling of the melt or the crystallised material
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B29/00—Single crystals or homogeneous polycrystalline material with defined structure characterised by the material or by their shape
- C30B29/02—Elements
- C30B29/06—Silicon
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
- Y02P70/50—Manufacturing or production processes characterised by the final manufactured product
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- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Crystallography & Structural Chemistry (AREA)
- Materials Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
Abstract
The invention discloses a heat dissipation structure of a casting single crystal furnace, which comprises a side heat insulation plate, a lifting mechanism, a DS upright post, a DS platform, a lifting rotary heat insulation plate and a lifting heat insulation plate, wherein the lifting rotary heat insulation plate and the lifting heat insulation plate can rotate relatively; the DS platform is arranged at the top end of the DS upright post, a crucible is arranged above the DS platform, and the lifting heat-insulation plate is sleeved on the outer side of the lifting heat-insulation plate; the bottom of the lifting heat-insulation plate is connected with the top end of the lifting mechanism, the lifting rotary heat-insulation plate is rotatably arranged at the top end of the lifting mechanism, the DS upright post penetrates through the lifting rotary heat-insulation plate and is connected with the rotating mechanism, and the side heat-insulation plate is fixedly connected with the lower furnace body; the bottom heat dissipation channel rises at the center circle and revolves the heated board and can do the combined motion of circular motion and descending motion, and reinforcing heat convection improves radiating homogeneity for heat dissipation channel opens the passageway along with the lift heated board with rise to revolve the heated board and form a comprehensive spiral, the more gentle heat dissipation channel of opening, synthesize helical structure, drive the crucible and do circular motion, improve the inside heat convection of thermal field and thermal radiation's homogeneity.
Description
Technical Field
The invention belongs to the technical field of single crystal casting, and particularly relates to a heat dissipation structure of a single crystal casting furnace and the single crystal casting furnace.
Background
The growth of a cast single crystal silicon ingot needs to keep a relatively slightly convex growth interface, the growth of edge polycrystal is controlled, the maintenance of the relatively slightly convex interface needs to prevent the dissipation of lateral heat in the crystal growth process, the bottom heat dissipation mode of a conventional ingot furnace in the current photovoltaic industry usually adopts a mode of opening an upper heat insulation cage for heat dissipation, the heat dissipation mode inevitably causes the upward heat dissipation of the lateral part in a thermal field system, the lateral heat dissipation can form a concave interface, the concave interface can cause the edge polycrystal to extend inwards to grow, and the conventional thermal field heat dissipation structure is not suitable for the growth of a cast single crystal.
In the prior art, the following problems still exist: (1) the growth of the cast single crystal requires a slightly convex growth interface for controlling the growth of edge polycrystals and increasing the area ratio of the single crystal. The conventional ingot furnace adopts a heat insulation cage lifting mode to dissipate heat, the lateral part radiates heat and the bottom heat exchange table dissipates heat at the same time, crystal growth of the lateral part can be slowed down through the improvement of the power of the lateral part, similarly, a long grain boundary surface similar to a convex shape can also be realized, but the heat dissipation of the lateral part cannot be avoided, so that the lateral part cannot completely realize the convex shape, and a W-shaped interface similar to the convex shape is formed. This interface shape tends to cause lateral polycrystalline growth, and currently conventional ingot furnace equipment is lifted by an upper insulated cage, as shown in fig. 1 (closed state of the insulated cage) and fig. 2 (open state of the insulated cage), and this thermal field configuration is less suitable for the growth of cast single crystals.
(2) The ingot furnace side wall is basically circular, and the lateral part heated board can reciprocate, reciprocates through the lateral part heated board and opens the heat dissipation passageway, as shown in fig. 1 and 2, but thermal field space and crucible are square for crucible and oven heat dissipation space decentraction, the distance of crucible four corners and intermediate position distance oven is inconsistent, as shown in fig. 3, thereby results in the bottom heat dissipation not enough even.
(3) Uneven bottom heat dissipation leads to unevenness of seed crystals inside the crucible, influences the temperature field inside the crucible, and leads to quality reduction such as crystal growth defects.
The current solution is as follows: 1) and the plug strips 24 are added in the boss grooves on the periphery of the DS platform to improve the uniformity of heat preservation. 2) The central position of the bottom of the DS platform is increased for heat preservation. 3) Corner heat-insulating strips 25 are added at four corners of the side heat-insulating plate, as shown in fig. 3.
Disclosure of Invention
In order to solve the problems in the prior art, the invention provides a heat dissipation structure of a single crystal casting furnace and the single crystal casting furnace, and provides a bottom heat dissipation system suitable for single crystal-like growth, so that the temperature of the side part is kept in the crystal growth process, and meanwhile, the heat dissipation of the center of the bottom part is faster than that of the edge part, and a slightly convex growth interface is formed.
In order to achieve the purpose, the invention adopts the technical scheme that the heat radiation structure of the casting single crystal furnace comprises a side heat insulation plate, a DS upright post, a DS platform, a lifting mechanism, a lifting heat insulation plate and a lifting heat insulation plate, wherein the lifting heat insulation plate and the lifting heat insulation plate can rotate relatively; the DS platform is arranged at the top end of the DS upright post, a crucible is arranged above the DS platform, and the lifting heat-insulation plate is sleeved on the outer side of the lifting rotary heat-insulation plate; the bottom of lift heated board sets up the top of connecting elevating system, rises to revolve the heated board and rotationally sets up on elevating system's top, and the DS stand passes and rises to revolve the heated board, and the DS stand is connected with slewing mechanism, lateral part heated board and last furnace body fixed connection.
The lifting mechanism comprises a lifting rod, a lifting support plate is arranged at the top of the lifting rod, the top of the lifting rod is connected with the lifting support plate, the lifting support plate is connected with a lifting insulation board, and the top surface of the lifting support plate is the top end of the lifting mechanism; the lifting rod adopts a screw-nut pair, an electric push rod or a hydraulic rod.
The ball is arranged on the lifting and rotating heat insulation plate, the lifting and rotating heat insulation plate is rotatably arranged on the top surface of the lifting support plate through the ball, the ball is installed in the ball seat, the ball seat is installed in the lifting and rotating heat insulation plate, and the ball is in rolling contact with the top surface of the lifting support plate.
The lifting insulation board is installed on the lifting support board, the lifting rod and the lifting support board are driven by the linear motor to ascend and descend, the linear motor is fixedly connected with the lifting rod relatively, a supporting rod is arranged to enable the linear motor to move, the supporting rod is arranged in parallel with the lifting rod, and the supporting rod is fixedly connected with the base or fixedly connected with the lower furnace body relatively.
The rotating mechanism comprises a rotating chassis, the top of the rotating chassis is a supporting disk, the bottom surface of the supporting disk is provided with an upright post, the supporting disk and the upright post are integrally formed or respectively formed and then fixedly connected, the bottom of the DS upright post is connected with the supporting disk, and the bottom end of the upright post is connected with an output part of a driving motor.
The lifting and rotating insulation board and the lifting insulation board are arranged into an upper layer and a lower layer, wherein the diameter of the upper layer insulation board of the lifting insulation board is smaller than that of the lower layer insulation board, the side insulation board is arranged into an inner layer and an outer layer, the inner layer insulation board is in contact with the side face of the upper layer insulation board of the lifting insulation board, and the outer layer insulation board of the lifting insulation board is in contact with the side face of the lower layer insulation board to form a step-shaped sealing structure; the upper and lower layers of the heat-insulating plates at the edges of the lifting heat-insulating plate and the heat-insulating plate are arranged into a step-shaped gap structure.
The lifting support plate and the ball are made of stainless steel: 316L, 310S, 210S, high temperature resistant moly-lanthanum alloy, high nickel alloy containing material or non-metallic high temperature resistant material: composite carbon-carbon materials, graphite materials or ceramic materials; or the lifting support plate is made of composite plates, the part of the lifting support plate, which is in contact with the ball, is made of composite carbon-carbon materials or ceramic materials, and the part of the lifting support plate, which is connected with the lifting rod, is made of stainless steel materials or ceramic materials.
The DS stand outside sets up the stand cover, sets up the stand protective sheath between stand cover and the rising heated board of revolving.
An overflow groove is formed in the lifting heat-insulation plate, an overflow hole is formed below the overflow groove, and the overflow hole is a straight hole or an inclined hole.
The invention also provides a single crystal casting furnace, and the heat dissipation structure of the single crystal casting furnace is adopted.
Compared with the prior art, the invention has at least the following beneficial effects:
the bottom heat dissipation channel can do circular motion and descending motion composite motion by rotating the heat insulation board upwards on the central ring, heat convection is enhanced, heat dissipation uniformity is improved, the bottom heat insulation board is decomposed into an inner ring and an outer ring, the outer ring is lifted and lowered in the axial direction, and the inner ring is lifted and rotated to be made circular motion in the axial direction. The two composite motion structures are ingenious in design, simple in structure, convenient and fast to install and good in reliability, and the circular motion and the lifting motion are independent and related to each other; the heat dissipation channel forms a comprehensive spiral opening channel along with the lifting heat insulation plate and the lifting heat insulation plate, so that the heat dissipation channel is opened more gently and the uniformity of a heat dissipation surface of a thermal field is improved. Meanwhile, the comprehensive spiral structure drives the crucible to do circular motion, and the uniformity of thermal convection and thermal radiation in the thermal field is improved.
Drawings
FIG. 1 is a schematic view of a conventional polycrystalline ingot furnace.
FIG. 2 is a schematic view of another state of a conventional polycrystalline ingot furnace structure shown in FIG. 1.
FIG. 3 is a schematic structural view of a prior art for improving the uniformity of heat preservation by using a plug strip heat preservation strip.
Fig. 4 is a schematic diagram of a heat dissipation structure in accordance with an embodiment of the present invention.
Fig. 5 is a schematic view of an operation state of the heat dissipation structure according to the present invention.
FIG. 6 is a schematic view of a partial structure between the DS pillar and the lifting and rotating insulation board of the present invention.
FIG. 7 is a schematic view of the ball joint structure of the present invention.
In the attached drawing, 1-a side heat-insulation board, 2-DS upright posts, 3-DS stands, 4-a lifting heat-insulation board, 5-a lifting heat-insulation board, 6-a crucible, 7-a lower furnace body, 8-a graphite bottom plate, 9-a lifting rod, 10-a lifting support plate, 11-balls, 12-a ball seat, 13-a rotating chassis, 14-upright posts, 15-upright post protective sleeves, 16-upright post sleeves, 17-overflow grooves, 18-overflow holes, 19-fastening screws, 20-fastening nuts, 21-opposite-top nuts and 22-a graphite protective plate.
Detailed Description
The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are some, not all, embodiments of the present invention. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.
In the description of the present invention, it is to be understood that the terms "center", "longitudinal", "lateral", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "one side", "one end", "one side", and the like indicate orientations or positional relationships based on those shown in the drawings, merely for convenience of description and simplification of description, and do not indicate or imply that the device or element referred to must have a particular orientation, be constructed in a particular orientation, and be operated, and therefore, are not to be construed as limiting the present invention. Furthermore, the terms "first", "second" and "first" are used for descriptive purposes only and are not to be construed as indicating or implying relative importance or implicitly indicating the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include one or more of that feature. In the description of the present invention, "a plurality" means two or more unless otherwise specified.
In the description of the present invention, it should be noted that, unless otherwise explicitly specified or limited, the terms "mounted," "connected," and "connected" are to be construed broadly, e.g., as meaning either a fixed connection, a removable connection, or an integral connection; can be mechanically or electrically connected; they may be connected directly or indirectly through intervening media, or they may be interconnected between two elements. The specific meanings of the above terms in the present invention can be understood in specific cases to those skilled in the art.
It should be further understood that the term "and/or" as used in this specification and the appended claims refers to and includes any and all possible combinations of one or more of the associated listed items.
Various structural schematics according to the disclosed embodiments of the invention are shown in the drawings. The figures are not drawn to scale, wherein certain details are exaggerated and possibly omitted for clarity of presentation. The shapes of various regions, layers and their relative sizes and positional relationships shown in the drawings are merely exemplary, and deviations may occur in practice due to manufacturing tolerances or technical limitations, and a person skilled in the art may additionally design regions/layers having different shapes, sizes, relative positions, according to actual needs.
Referring to fig. 4, the bottom insulation board is divided into two parts, one part is a central inner ring, the central inner ring is a lifting and rotating insulation board 4, circular motion and lifting motion can be achieved simultaneously, uniformity of a thermal field heat dissipation space and a temperature field inside a crucible 6 can be greatly adjusted, the other part is an outer ring, the outer ring is a lifting insulation board 5, lifting motion can be achieved, the size of a heat dissipation channel can be adjusted, a DS upright post 2 penetrates through the lifting and rotating insulation board 4, and the lifting insulation board 5 is sleeved on the outer side of the lifting and rotating insulation board 4.
The heat dissipation structure of the casting single crystal furnace comprises a bottom heat insulation plate, a side heat insulation plate, a lifting mechanism, a DS upright post 2 and a DS platform 3, wherein the DS platform 3 is arranged at the top end of the DS upright post 2, a crucible 6 is arranged above the DS platform 3, the bottom heat insulation plate comprises a lifting and rotating heat insulation plate 4 and a lifting and heat insulation plate 5 which can rotate relatively, and the lifting and heat insulation plate 5 is sleeved on the outer side of the lifting and rotating heat insulation plate 4; the bottom of lift heated board 5 sets up the top of connecting elevating system, rises and revolves heated board 4 and rotationally set up on elevating system's top, and DS stand 2 passes and rises and revolves heated board 4, and DS stand 2 is connected with slewing mechanism, lateral part heated board and last furnace body fixed connection.
The lifting mechanism comprises a lifting rod 9, a lifting support plate is arranged at the top of the lifting rod 9, the top of the lifting rod 9 is simultaneously connected with a lifting support plate 10 and a lifting heat insulation plate 5, and the top surface of the lifting support plate is the top end of the lifting mechanism; the lifting rod 9 can adopt a screw nut pair, an electric push rod or a hydraulic rod.
Optionally, the lifting rod 9 is a screw-nut pair, a screw-nut is arranged on the screw rod, a driving end of the screw rod is connected with an output end of the driving motor, a driven end of the screw rod is connected with the lifting insulation board 5 through a bearing seat, the screw-nut and the lower furnace body 7 are relatively fixedly arranged, and the screw-nut is arranged on a fixed part on the lower furnace body or below the furnace body.
Optionally, the lifting heat-insulating plate 5 is installed on the lifting support plate, and can adopt the linear motor M2 to drive the lifting rod 9 and the lifting support plate 10 to realize ascending and descending accurate positioning, the linear motor M2 is fixedly connected with the lifting rod 9 relatively, a support rod is arranged to move the linear motor, the support rod is arranged in parallel with the lifting rod, and the support rod is fixedly connected with the base or fixedly connected with the lower furnace body 7 relatively.
The lifting heat-insulating plate 5 is provided with an overflow groove 17, the bottom of the overflow groove 17 is provided with a straight hole or an inclined hole as an overflow hole 18, and the quick response and safety of overflow detection are improved.
Set up ball 11 on rising to revolve heated board 4, rise to revolve heated board 4 and rotationally set up the top surface at the lift backup pad through ball 11, ball 11 installs in the ball seat, and the ball seat is installed in rising to revolve heated board 4, ball 11 and the top surface rolling contact of lift backup pad.
The lifting and rotating heat insulation plate 4 and the lifting and supporting plate are contacted through the ball 11, the lifting and rotating heat insulation plate 4 and the lifting and supporting plate 5 are assembled in a clearance separation way, the ball 11 is arranged in the ball seat 12, the heat-insulating plate is arranged in a rotation-elevating heat-insulating plate 4 through a fastening screw rod 19 and a fastening nut 20, a through hole for installing a ball seat 12 is formed in the rotation-elevating heat-insulating plate 4, the fastening nut 20 is arranged at one end of the fastening screw rod 19, the ball seat 12 is arranged at the other end of the fastening screw rod 19, the fastening screw rod 19 is in threaded connection with the ball seat 12, an abutting nut 21 is arranged at the upper end of the ball seat 12 and used for fastening the ball seat 12 and the fastening screw rod 19, the fastening nut 20 is used for fastening the abutting nut 21, the fastening screw rod 19 and the rotation-elevating heat-insulating plate 4, as shown in fig. 5, the lifting and rotating heat-insulating plate 4 is relatively at the same horizontal position or relatively stationary in the horizontal direction with respect to the lifting and heat-insulating plate 5, and the lifting and heat-insulating plates are kept to synchronously ascend and descend.
The ball 11 play two roles, on one hand with rise to revolve heated board 4 and form the circumference roll in the lift backup pad, on the other hand with the support bracket bearing rise to revolve heated board 4 and do the up-and-down motion. The ball 11 can be fixed in the ball seat 12 and can move, and the ball 11 can not be taken out, as shown in fig. 7, or can move in the ball seat 12 and can be taken out, as shown in fig. 6. The top of the ball seat 12 can be added with a butt nut to form self-locking, so that the looseness of the ball seat 12 and a fastening screw rod is avoided. The number of the balls 11 can be three or more, and a rolling groove can be formed in the top surface of the lifting support plate 12, along which the balls 11 roll; the bottom surface of the rolling groove can be a plane or an arc surface, so that friction is reduced when the plane is adopted, and a larger supporting surface can be provided when the arc surface is adopted.
Of course, the ball 11 and the ball seat 12 may be replaced by a pivoting support, and the pivoting support has two end faces connected to the bottom surface of the lifting and rotating heat insulation board 4 and the top surface of the lifting support board 10, respectively.
The rotating mechanism comprises a rotating chassis 13, the top of the rotating chassis 13 is provided with a supporting disc, the bottom surface of the supporting disc is provided with an upright post 14, the bottom of the DS upright post 2 is connected with the supporting disc, the bottom end of the upright post 14 is connected with an output part of a driving motor, and a speed reducer is arranged between an output shaft of the driving motor and the bottom end of the upright post 14 or the output shaft of the driving motor is coaxially connected with the bottom end of the upright post 14.
The lifting rotary heat-insulation plate 4 can be driven by a motor M1 to perform circular motion relative to the lifting heat-insulation plate 5, a lifting rotary bottom plate is arranged at the bottom of the lifting rotary heat-insulation plate 4, the lifting rotary heat-insulation plate 4 is provided with three or more than three mounting holes and a DS upright post 2 which are matched, a DS platform 3 is arranged at the top end of the DS upright post 2, the DS platform 3 and a rotating chassis 13 form a whole motion part, and the whole motion part performs circular motion under the driving of the motor M1. Circle and elevating movement can be done simultaneously to the heated board 4 that revolves rises, as shown in fig. 5, the heated board 4 that revolves rises follows motor M1 on the one hand and is circumferential motion, follows the lift backup pad on the one hand and does linear motion from top to bottom for the passageway is opened along with the lift heated board 5 and the heated board 4 that revolves that rises forms a comprehensive spiral, thereby more gently opens the homogeneity of heat dissipation passageway and improvement heat field cooling surface. Meanwhile, the comprehensive spiral structure drives the crucible to do circular motion, and the uniformity of thermal convection and thermal radiation in the thermal field is improved.
The DS stand 2 outside sets up stand cover 16, sets up stand protective sheath 15 between stand cover 16 and the rising heated board 4 of revolving.
The motor M1 drives the lifting heat-insulating plate 5 to rotate, and the motor M1 is connected with the rotating chassis 13, and the output shaft of the motor M1 is also connected with the rotating chassis 13 through a chain transmission mechanism, a gear transmission mechanism or a belt transmission mechanism, that is, the rotating mechanism has multiple possibilities of implementation.
The balls 11 may be replaced by sliders, and the circular motion between the lifting support plate 10 and the balls may be point contact, line contact or surface contact, and the cross section of the slider may be triangular, square or trapezoidal, and corresponds to a slide rail having the same cross section as the slider provided on the lifting support plate 10, so that the circular motion between the balls 11 and the lifting support plate 10 is not limited thereto, and may be a rail-type slide. When the slide block is adopted, the top surface of the lifting support plate 10 below the slide block can be provided with a slide rail, and the slide block is arranged in the slide rail in a sliding manner; it is also possible to replace the balls with rolling bearings, which roll along the slide rails.
Circular motion between ball 11 and the lift backup pad 10 can also realize through the rack and pinion, lift backup pad 10 sets up intermeshing's bevel gear pair with rising between the heated board 4 soon, the radial dimension of bevel gear all is greater than the radial dimension of the bevel gear on the heated board 4 soon of rising in lift backup pad 10, the gear axle level of the bevel gear on the heated board 4 soon of rising sets up, the bevel gear on the heated board 4 soon of rising is connected with 4 bottom surfaces of the heated board soon of rising, wherein the bevel gear on the lift backup pad 10 can also adopt the crown wheel.
Based on the heat radiation structure that this application provided, can also provide a casting single crystal growing furnace, DS platform 3 sets up the top at DS stand 2, DS platform 3 top sets up crucible 6, crucible 6 adopts quartz crucible, the crucible outside sets up the graphite backplate, set up the graphite bottom plate between the bottom of crucible 6 and DS platform 3, provide the bottom cooling system who is adapted to class single crystal growth, keep lateral part temperature at long brilliant in-process, make the central heat dissipation of bottom faster than limit portion simultaneously, help forming little convex growth interface.
The lifting support plate 10 comprises an inner ring and an outer ring, the height of the inner ring is lower than that of the outer ring, the inner ring is in contact with the ball 11, and the outer ring is connected with the lifting heat-insulation plate 5, wherein the lifting support plate 10 and the ball 11 are made of stainless steel: 316L, 310S, 210S, high-temperature-resistant Mo-La alloy, high-nickel-containing alloy material or non-metal high-temperature-resistant material: the lifting support plate 10 is made of composite plates made of different materials in a stacked mode, for example, the outer ring is made of stainless steel, the inner ring can also be made of stainless steel, and the plane of the inner ring, which is in contact with the balls 11, can be made of a non-metal structural material such as a composite carbon-carbon material or a ceramic material; the part connected with the lifting rod 9 is made of stainless steel or ceramic material; the lifting rod 9 is made of the same material as the lifting support plate 10, and can be made of a metal material or a composite carbon-carbon material.
To sum up, this application heated board bottom motion structure includes bottom heated board and lift backup pad 10, and circular motion is to the central circle that decomposes into to the bottom heated board, and elevating movement's structural style is to the outer lane. The circular motion and the lifting motion are independent and related to each other, a key structure is mainly formed by a circular ball 11 and a ball seat 12, and the ball 11 is made of high-temperature-resistant and high-strength materials, can be made of metal or nonmetal. The bottom heat dissipation channel rises at the center circle and revolves heated board 4 and can do the combined motion of circular motion and descending motion, and reinforcing heat convection improves radiating homogeneity, and the bottom heated board decomposes into interior outer lane, and outer lane lift heated board 5 is the elevating movement in the axial, and the rising of inner circle revolves heated board 4 and is the circular motion in the axial. The two composite motion structures are ingenious in design, simple in structure, convenient and fast to install and good in reliability, and the circular motion and the lifting motion are independent and related to each other; the heat dissipation channel forms a comprehensive spiral opening channel along with the lifting heat insulation plate 5 and the lifting heat insulation plate 4, so that the heat dissipation channel is opened more gently and the uniformity of a heat dissipation surface of a thermal field is improved. Meanwhile, the comprehensive spiral structure drives the crucible to do circular motion, and the uniformity of thermal convection and thermal radiation in the thermal field is improved.
The above-mentioned contents are only for illustrating the technical idea of the present invention, and the protection scope of the present invention is not limited thereby, and any modification made on the basis of the technical idea of the present invention falls within the protection scope of the claims of the present invention.
Claims (10)
1. A heat radiation structure of a casting single crystal furnace is characterized in that a side heat insulation plate (1), a DS upright post (2), a DS platform (3), a lifting mechanism, a lifting and rotating heat insulation plate (4) and a lifting heat insulation plate (5) which can rotate relatively are arranged on the side heat insulation plate; the DS platform (3) is arranged at the top end of the DS upright post (2), a crucible (6) is arranged above the DS platform (3), and a lifting heat-insulation plate (5) is sleeved on the outer side of the lifting heat-insulation plate (4); the bottom of lift heated board (5) sets up the top of connecting elevating system, rises and revolves heated board (4) and rotationally sets up on elevating system's top, and DS stand (2) pass and rise and revolve heated board (4), and DS stand (2) are connected with slewing mechanism, lateral part heated board (1) and last furnace body fixed connection.
2. The heat dissipation structure of the single crystal casting furnace according to claim 1, wherein the lifting mechanism comprises a lifting rod (9), a lifting support plate (10) is arranged at the top of the lifting rod (9), the top of the lifting rod (9) is connected with the lifting support plate (10), the lifting support plate (10) is connected with the lifting insulation plate (5), and the top surface of the lifting support plate (10) is the top end of the lifting mechanism; the lifting rod (9) adopts a screw-nut pair, an electric push rod or a hydraulic rod.
3. The heat dissipation structure of the casting single crystal furnace according to claim 2, wherein balls (11) are arranged on the lifting and rotating heat insulation plate (4), the lifting and rotating heat insulation plate (4) is rotatably arranged on the top surface of the lifting and rotating support plate (10) through the balls (11), the balls (11) are arranged in ball seats (12), the ball seats (12) are arranged in the lifting and rotating heat insulation plate (5), and the balls (11) are in rolling contact with the top surface of the lifting and rotating support plate (10).
4. The heat dissipation structure of the casting single crystal furnace according to claim 2, wherein the lifting heat insulation plate (5) is mounted on a lifting support plate, a linear motor is used for driving the lifting rod (9) and the lifting support plate (10) to ascend and descend, the linear motor is fixedly connected with the lifting rod (9) relatively, a support rod is arranged for the linear motor to move, the support rod is arranged in parallel with the lifting rod, and the support rod is fixedly connected with a base or fixedly connected with a lower furnace body (9) relatively.
5. The heat dissipation structure of the single crystal casting furnace according to claim 1, wherein the rotating mechanism comprises a rotating base plate (13), the top of the rotating base plate (13) is provided with a support plate, the bottom surface of the support plate is provided with a column (14), the support plate and the column (14) are integrally or respectively formed and then fixedly connected, the bottom of the DS column (2) is connected with the support plate, and the bottom end of the column (14) is connected with an output part of a driving motor.
6. The heat dissipation structure of the casting single crystal furnace according to claim 1, wherein the lifting and rotating heat insulation plate (4) and the lifting heat insulation plate (5) are arranged into an upper layer and a lower layer, the diameter of the upper layer heat insulation plate of the lifting heat insulation plate (5) is smaller than that of the lower layer heat insulation plate, the side heat insulation plate (1) is arranged into an inner layer and an outer layer, the inner layer heat insulation plate is in contact with the side face of the upper layer heat insulation plate of the lifting heat insulation plate (5), and the outer layer heat insulation plate of the lifting heat insulation plate (5) is in contact with the side face of the lower layer heat insulation plate to form a step-shaped sealing structure; the upper and lower layers of the heat-insulating plates at the edges of the lifting heat-insulating plate (4) and the lifting heat-insulating plate (5) are arranged to be of a step-shaped gap structure.
7. The heat dissipation structure of a single crystal casting furnace according to claim 1, wherein the lifting support plate (10) and the balls (11) are made of stainless steel: 316L, 310S, 210S, high temperature resistant moly-lanthanum alloy, high nickel alloy containing material or non-metallic high temperature resistant material: composite carbon-carbon materials, graphite materials or ceramic materials; or the lifting support plate (10) is made of composite plates, the part of the lifting support plate (10) in contact with the ball (11) is made of composite carbon-carbon materials or ceramic materials, and the part of the lifting support plate connected with the lifting rod (9) is made of stainless steel materials or ceramic materials.
8. The heat dissipation structure of the casting single crystal furnace according to claim 1, wherein a column sleeve (16) is arranged outside the DS column (2), and a column protective sleeve (15) is arranged between the column sleeve (16) and the rising-rotating heat insulation plate (4).
9. The heat dissipation structure of the single crystal casting furnace according to claim 1, wherein the lifting heat insulation plate (5) is provided with an overflow trough (17), an overflow hole (18) is formed below the overflow trough (17), and the overflow hole (18) is a straight hole or an inclined hole.
10. A single crystal casting furnace, characterized in that the heat radiation structure of the single crystal casting furnace according to any one of claims 1 to 9 is employed.
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| CN202210680971.XA CN114959871A (en) | 2022-06-16 | 2022-06-16 | Heat radiation structure of single crystal casting furnace and single crystal casting furnace |
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Citations (15)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2002134428A (en) * | 2000-10-20 | 2002-05-10 | Tokyo Electron Ltd | Heat treating apparatus |
| KR200345132Y1 (en) * | 2003-08-13 | 2004-03-18 | 코리아티타늄주식회사 | A centrifugal apparatus provide with vacuum chamber for titanium metal |
| JP2013069523A (en) * | 2011-09-22 | 2013-04-18 | Mitsubishi Heavy Ind Ltd | Induction heating apparatus and induction heating method |
| CN103590096A (en) * | 2013-11-15 | 2014-02-19 | 英利集团有限公司 | Ingot furnace and method for controlling retaining height of seed crystals during casting of quasi-single crystal |
| CN104674341A (en) * | 2015-03-20 | 2015-06-03 | 重庆大全新能源有限公司 | Polycrystalline ingot furnace and directional solidification device and polycrystalline ingot method thereof |
| WO2016082525A1 (en) * | 2014-11-27 | 2016-06-02 | 吕铁铮 | Device for moving small heat insulating plate at bottom of polycrystalline silicon ingot furnace and polycrystalline silicon ingot furnace |
| CN105970283A (en) * | 2016-07-28 | 2016-09-28 | 江苏协鑫硅材料科技发展有限公司 | Ingot furnace thermal field structure and preparation technology |
| CN205676556U (en) * | 2016-05-30 | 2016-11-09 | 江西旭阳雷迪高科技股份有限公司 | A kind of polycrystalline cast ingot furnace bottom attemperator |
| CN205741277U (en) * | 2016-05-17 | 2016-11-30 | 江西旭阳雷迪高科技股份有限公司 | A kind of can be with the polycrystalline ingot furnace of Homogeneouslly-radiating |
| CN206089880U (en) * | 2016-08-16 | 2017-04-12 | 河南华沐通途新能源科技有限公司 | Ingot furnace heat radiation structure |
| WO2017181758A1 (en) * | 2016-04-23 | 2017-10-26 | 万达文化旅游规划研究院有限公司 | Combined dynamic stage for use in coordinated movement having multiple degrees of freedom |
| CN107587194A (en) * | 2017-10-31 | 2018-01-16 | 河南省博宇新能源有限公司 | Polycrystal silicon ingot ingot furnace and method |
| CN207109142U (en) * | 2017-08-12 | 2018-03-16 | 河北高富氮化硅材料有限公司 | Crystal growing furnace |
| CN207498520U (en) * | 2017-11-17 | 2018-06-15 | 晶科能源有限公司 | Polycrystalline cast ingot DS blocks |
| CN208104602U (en) * | 2018-02-28 | 2018-11-16 | 连云港达科电子材料科技有限公司 | A kind of silicon ingot Casting Equipment |
-
2022
- 2022-06-16 CN CN202210680971.XA patent/CN114959871A/en active Pending
Patent Citations (15)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2002134428A (en) * | 2000-10-20 | 2002-05-10 | Tokyo Electron Ltd | Heat treating apparatus |
| KR200345132Y1 (en) * | 2003-08-13 | 2004-03-18 | 코리아티타늄주식회사 | A centrifugal apparatus provide with vacuum chamber for titanium metal |
| JP2013069523A (en) * | 2011-09-22 | 2013-04-18 | Mitsubishi Heavy Ind Ltd | Induction heating apparatus and induction heating method |
| CN103590096A (en) * | 2013-11-15 | 2014-02-19 | 英利集团有限公司 | Ingot furnace and method for controlling retaining height of seed crystals during casting of quasi-single crystal |
| WO2016082525A1 (en) * | 2014-11-27 | 2016-06-02 | 吕铁铮 | Device for moving small heat insulating plate at bottom of polycrystalline silicon ingot furnace and polycrystalline silicon ingot furnace |
| CN104674341A (en) * | 2015-03-20 | 2015-06-03 | 重庆大全新能源有限公司 | Polycrystalline ingot furnace and directional solidification device and polycrystalline ingot method thereof |
| WO2017181758A1 (en) * | 2016-04-23 | 2017-10-26 | 万达文化旅游规划研究院有限公司 | Combined dynamic stage for use in coordinated movement having multiple degrees of freedom |
| CN205741277U (en) * | 2016-05-17 | 2016-11-30 | 江西旭阳雷迪高科技股份有限公司 | A kind of can be with the polycrystalline ingot furnace of Homogeneouslly-radiating |
| CN205676556U (en) * | 2016-05-30 | 2016-11-09 | 江西旭阳雷迪高科技股份有限公司 | A kind of polycrystalline cast ingot furnace bottom attemperator |
| CN105970283A (en) * | 2016-07-28 | 2016-09-28 | 江苏协鑫硅材料科技发展有限公司 | Ingot furnace thermal field structure and preparation technology |
| CN206089880U (en) * | 2016-08-16 | 2017-04-12 | 河南华沐通途新能源科技有限公司 | Ingot furnace heat radiation structure |
| CN207109142U (en) * | 2017-08-12 | 2018-03-16 | 河北高富氮化硅材料有限公司 | Crystal growing furnace |
| CN107587194A (en) * | 2017-10-31 | 2018-01-16 | 河南省博宇新能源有限公司 | Polycrystal silicon ingot ingot furnace and method |
| CN207498520U (en) * | 2017-11-17 | 2018-06-15 | 晶科能源有限公司 | Polycrystalline cast ingot DS blocks |
| CN208104602U (en) * | 2018-02-28 | 2018-11-16 | 连云港达科电子材料科技有限公司 | A kind of silicon ingot Casting Equipment |
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