CN114919975A - Magnetic material vacuum coating machine and coating method - Google Patents

Magnetic material vacuum coating machine and coating method Download PDF

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Publication number
CN114919975A
CN114919975A CN202210537992.6A CN202210537992A CN114919975A CN 114919975 A CN114919975 A CN 114919975A CN 202210537992 A CN202210537992 A CN 202210537992A CN 114919975 A CN114919975 A CN 114919975A
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CN
China
Prior art keywords
assembly
reversing
transportation
lifting
driving element
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Pending
Application number
CN202210537992.6A
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Chinese (zh)
Inventor
张莎莎
冷长志
李启炎
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Zhejiang Yundu New Material Technology Co ltd
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Zhejiang Yundu New Material Technology Co ltd
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Application filed by Zhejiang Yundu New Material Technology Co ltd filed Critical Zhejiang Yundu New Material Technology Co ltd
Priority to CN202210537992.6A priority Critical patent/CN114919975A/en
Publication of CN114919975A publication Critical patent/CN114919975A/en
Pending legal-status Critical Current

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    • BPERFORMING OPERATIONS; TRANSPORTING
    • B65CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65GTRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G47/00Article or material-handling devices associated with conveyors; Methods employing such devices
    • B65G47/22Devices influencing the relative position or the attitude of articles during transit by conveyors
    • B65G47/24Devices influencing the relative position or the attitude of articles during transit by conveyors orientating the articles
    • B65G47/248Devices influencing the relative position or the attitude of articles during transit by conveyors orientating the articles by turning over or inverting them
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B65CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65GTRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G37/00Combinations of mechanical conveyors of the same kind, or of different kinds, of interest apart from their application in particular machines or use in particular manufacturing processes
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B65CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65GTRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G47/00Article or material-handling devices associated with conveyors; Methods employing such devices
    • B65G47/74Feeding, transfer, or discharging devices of particular kinds or types
    • B65G47/90Devices for picking-up and depositing articles or materials
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/50Substrate holders
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/52Means for observation of the coating process
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/54Controlling or regulating the coating process
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B65CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65GTRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G2203/00Indexing code relating to control or detection of the articles or the load carriers during conveying
    • B65G2203/04Detection means

Abstract

The invention provides a magnetic material vacuum coating machine, which belongs to the technical field of vacuum coating and comprises: a feed table provided with a feed transport assembly; the discharging table is provided with a discharging transportation assembly; the coating device is provided with a processing and transporting assembly; the reversing table is connected with a reversing driving element, the reversing driving element can drive the reversing table to rotate, so that the reversing table is communicated with the feeding table or the discharging table or the coating device, and the reversing table is provided with a reversing transportation assembly. Also provides a coating method, which comprises the magnetic material vacuum coating machine. The beneficial effects of the invention are as follows: thereby the switching-over drive element can drive the switching-over platform and rotate and make switching-over platform and feed table or ejection of compact platform or coating device intercommunication to can set up the ejection of compact platform beside the feed table, the staff need not to make a round trip to carry the carrying charging tray, and is very convenient.

Description

Magnetic material vacuum coating machine and coating method
Technical Field
The invention belongs to the technical field of vacuum coating, relates to a magnetic material vacuum coating machine and further relates to a coating method.
Background
In the field of rare earth magnetic material production, the prior art needs to carry out vacuum coating treatment on the surface of a neodymium iron boron substrate by using a production line, for example, an invention patent with the application number of CN201210018206.8 provides a continuous vacuum coating device, the device is formed by connecting and connecting a plurality of coating cavities in series, each coating cavity is provided with an ion beam cleaning source, and/or a filtering cathode vacuum coating film source, and/or a magnetron sputtering source and a molecular vacuum pump, the coating cavities are sealed or opened by using gate valves, the connected coating cavities are closed and opened, two ends of each connected coating cavity are respectively provided with a loading/unloading chamber and a vacuum transition chamber, a coated workpiece rotating frame platform is respectively arranged behind the loading/unloading chambers, a coated workpiece rotating frame is arranged on the coated workpiece rotating frame platform, a coated workpiece is suspended on the coated workpiece rotating frame, the coated workpiece rotating frame is transmitted to each coating cavity by a transmission roller, after the continuous coating of different requirements is sequentially and continuously implemented, the films are respectively taken out from the loading/unloading chamber at one end.
In summary, in some existing technical solutions, magnetic material blocks need to be uniformly placed on a tray, the tray enters a process chamber of a production line from a feeding table for coating, then is taken out from a discharging table at the other end, and the whole tray is manually turned over and then is conveyed to the feeding table again, so that the problem of inconvenience in operation still exists, and a large improvement space is provided.
Disclosure of Invention
The invention aims to provide a magnetic material vacuum coating machine and a coating method aiming at the problems in the prior art.
The purpose of the invention can be realized by the following technical scheme: a magnetic material vacuum coating machine comprises:
a feed table provided with a feed transport assembly;
the discharging table is provided with a discharging transportation assembly;
the coating device is provided with a processing and transporting assembly;
the reversing table is connected with a reversing driving element, the reversing driving element can drive the reversing table to rotate so that the reversing table can be communicated with the feeding table or the discharging table or the coating device, the reversing table is provided with a reversing transportation assembly, when the reversing table is communicated with the feeding table, a material carrying disc passes through the feeding table, the material carrying disc passes through the feeding transportation assembly and the reversing transportation assembly moves to the reversing table, when the reversing table is communicated with the discharging table, the material carrying disc passes through the discharging transportation assembly and the reversing transportation assembly moves to the discharging table, and when the reversing table is communicated with the coating device, the material carrying disc can pass through the processing transportation assembly and the reversing transportation assembly and can move back and forth between the reversing table and the coating device.
In foretell magnetic material vacuum coating machine, still include the upset subassembly, the coating device set up in the upset subassembly with between the switching-over platform, the upset subassembly with the coating device intercommunication, the upset subassembly can be with the material strip turn-over of carrying the charging tray, the upset subassembly is provided with upset transportation subassembly, carries the charging tray accessible upset transportation subassembly and processing transportation subassembly is in the coating device with round trip movement between the upset subassembly.
In the magnetic material vacuum coating machine, the overturning assembly is detachably connected with an empty tray, the overturning assembly can reversely buckle the material blocks of the material loading tray into the empty tray through overturning, so that the original empty tray is used as a new material loading tray, and the original material loading tray of the emptied material blocks is detachably connected with the overturning assembly and is used as a new empty tray.
In foretell magnetic material vacuum coating machine, the upset subassembly includes bed frame, upset seat, upset drive element and two and presss from both sides tight drive element, upset drive element with the bed frame is connected, the upset seat with the linkage of upset drive element is connected, upset drive element can drive the upset seat for the bed frame rotates, two press from both sides tight drive element with the upset seat is connected, two it can drive year charging tray and empty charging tray and press from both sides tightly each other to press from both sides tight drive element.
The magnetic material vacuum coating machine further comprises a return conveying assembly, a first lifting assembly and a second lifting assembly, wherein the return conveying assembly, the coating device and the overturning assembly are arranged in a vertically corresponding mode, the first lifting assembly can be communicated with the overturning assembly or the return conveying assembly, the second lifting assembly can be communicated with the reversing table or the return conveying assembly, and the material carrying disc can move back and forth between the first lifting assembly and the second lifting assembly through the return conveying assembly.
In foretell magnetic material vacuum coating machine, still include visual detection device and snatch the subassembly, visual detection device with it all aims at to snatch the subassembly first lifting unit, visual detection device is used for shooing and detects the material piece in the material loading dish thereby judge whether the material piece is overturn, it is used for grabbing the material piece in the material loading dish to snatch the subassembly.
In foretell magnetic material vacuum coating machine, still include rotation driving element, rotor arm and place the subassembly, it passes through the rotor arm with rotation driving element links and connects to snatch the subassembly, rotation driving element can drive the rotor arm rotates thereby makes it overturn to snatch the subassembly, it can move to place the subassembly or first lifting unit, after rotation driving element drive snatch subassembly upset material piece the material piece that the subassembly snatched is put back the material piece that the subassembly snatched and is carried the charging tray.
In foretell magnetic material vacuum coating machine, first lifting unit includes first transportation subassembly and first lift drive arrangement, first transportation subassembly with first lift drive arrangement linkage connection, first lift drive arrangement can drive first transportation subassembly goes up and down, second lifting unit includes second transportation subassembly and second lift drive arrangement, second transportation subassembly with second lift drive arrangement linkage connection, second lift drive arrangement can drive second transportation subassembly goes up and down.
Secondly, a coating method comprises the magnetic material vacuum coating machine and further comprises the following steps:
s1: the reversing driving element drives the reversing table to rotate and is communicated with the feeding table, the material carrying disc moves to the reversing table from the feeding table through the feeding transportation assembly and the reversing transportation assembly, and the reversing driving element drives the reversing table to rotate and is communicated with the film coating device;
s2: the material loading disc is moved from the reversing table to the film coating device through the processing and transporting assembly and the reversing transporting assembly to perform film coating, the material loading disc loading a material block to be coated is moved from the film coating device to the reversing assembly through the reversing transporting assembly and the processing and transporting assembly, the two clamping driving elements respectively drive the material loading disc and the empty material disc to be clamped mutually, the reversing driving element drives the reversing seat to rotate relative to the base frame, the material block of the material loading disc is reversely buckled into the empty material disc through reversing, so that the original empty material disc is used as a new material loading disc, and the original material loading disc of the empty material block is detachably connected with the reversing assembly and is used as a new empty material disc;
s3: the first transportation assembly is lifted to be communicated with the turnover assembly, the material carrying disc moves to the first transportation assembly from the turnover assembly, the first transportation assembly is lowered to be communicated with the return transportation assembly, the material carrying disc moves to the return transportation assembly from the first transportation assembly, the second transportation assembly is lowered to be communicated with the return transportation assembly, the material carrying disc moves to the second transportation assembly from the return transportation assembly, the second lifting assembly is lifted to be communicated with the reversing table, and the material carrying disc moves to the reversing table from the second transportation assembly;
s4: and repeating the step S2 and the step S3, after the two surfaces of the material block in the material carrying disc are coated with films, driving the reversing table to rotate by the reversing driving element and communicating with the material discharging table, and moving the material carrying disc from the reversing table to the material discharging table through the material discharging transportation assembly and the reversing transportation assembly.
In one of the above-mentioned coating methods, in step S3, when the material loading tray is located in the first transporting assembly, the vision inspection device photographs and inspects the material blocks in the material loading tray to determine whether the material blocks are turned over, the gripping assembly grips the material blocks in the material loading tray, the rotary driving element drives the gripping assembly to turn over the material blocks, and then the placing assembly returns the turned-over material blocks to the material loading tray.
Compared with the prior art, the invention has the beneficial effects that:
1. thereby the switching-over drive element can drive the switching-over platform and rotate and make switching-over platform and feed table or ejection of compact platform or coating device intercommunication to can set up the ejection of compact platform beside the feed table, the staff need not to make a round trip to carry the carrying charging tray, and is very convenient.
2. The turnover assembly can turn over the material strips of the material carrying disc and the material carrying disc can move back and forth between the film coating device and the turnover assembly through the turnover transportation assembly and the processing transportation assembly, so that the material carrying disc which is turned over can be transported to the reversing table through the processing transportation assembly.
3. The material blocks of the material loading disc are reversely buckled into the empty material disc through the overturning assembly, and the empty material blocks can be detachably connected with the overturning assembly to serve as a new empty material disc, so that the material blocks can be quickly turned over without manual operation, and the production rhythm is greatly accelerated.
4. Through another transport passage for providing of the return transport assembly, the first lifting assembly and the second lifting assembly, a plurality of material carrying discs can be placed on the magnetic material vacuum coating machine at the same time, and the material carrying discs for turning over the material blocks can return to the steering table through the return transport assembly, the first lifting assembly and the second lifting assembly, so that the production beat is accelerated.
5. The visual detection device is used for shooting and detecting the material blocks in the material carrying disc so as to judge whether the material blocks are overturned, and the grabbing assembly is used for grabbing/sucking away the material blocks in the material carrying disc and then placing the material blocks in the recovery frame to wait for manual treatment.
6. When the rotary driving element drives the grabbing component to overturn the material blocks, the placing component puts the material blocks grabbed by the grabbing component back to the material loading disc, so that manual processing is not needed, and in addition to the overturning of the whole material loading disc, the single material blocks can be independently overturned, so that the magnetic material vacuum coating machine has an automatic error correction function.
Drawings
FIG. 1 is a schematic structural view of a magnetic material vacuum coater of the present invention.
Fig. 2 is a schematic structural diagram of a feeding table, a discharging table and a reversing table of the invention.
FIG. 3 is a schematic structural diagram of a coating apparatus according to the present invention.
Fig. 4 is a schematic structural diagram of the reversing table of the invention.
Fig. 5 is a schematic structural diagram of the flip assembly of the present invention.
Fig. 6 is a schematic structural diagram of a return transport assembly of the present invention.
Fig. 7 is a schematic structural diagram of the first lifting assembly of the present invention.
Fig. 8 is a schematic structural diagram of a second lifting assembly of the present invention.
Fig. 9 is a schematic structural diagram of the grasping assembly and the placing assembly according to the present invention.
In the figure, 100, a feeding table; 110. a feed transport assembly; 200. a discharging table; 210. a discharge transport assembly; 300. a film coating device; 310. processing the transport assembly; 400. a reversing table; 410. a commutation drive element; 420. a reversing transport assembly; 500. a turnover assembly; 510. turning over the transportation assembly; 520. an empty tray; 530. a base frame; 540. a turning seat; 550. a flip drive element; 550. a clamping drive element; 610. a pass-back transport component; 620. a first lifting assembly; 621. a first transport assembly; 622. a first elevation drive device; 630. a second lifting assembly; 631. a second transport assembly; 632. a second elevation drive device; 710. a visual inspection device; 720. a grasping assembly; 730. a rotational drive element; 740. a rotating arm; 750. placing the component; 800. and a material loading tray.
Detailed Description
The following are specific embodiments of the present invention and are further described with reference to the accompanying drawings, but the present invention is not limited to these embodiments.
It should be noted that all the directional indicators (such as up, down, left, right, front, and rear … …) in the embodiment of the present invention are only used to explain the relative position relationship between the components, the movement situation, etc. in a specific posture (as shown in the drawing), and if the specific posture is changed, the directional indicator is changed accordingly.
Moreover, descriptions of the present invention as relating to "first," "second," "a," etc. are for descriptive purposes only and are not to be construed as indicating or implying relative importance or implicit ly indicating a number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include at least one such feature. In the description of the present invention, "a plurality" means at least two, e.g., two, three, etc., unless explicitly specified otherwise.
In the present invention, unless otherwise explicitly stated or limited, the terms "connected", "fixed", and the like are to be understood broadly, for example, "fixed" may be fixedly connected, may be detachably connected, or may be integrated; can be mechanically or electrically connected; they may be directly connected or indirectly connected through intervening media, or they may be connected internally or in any other suitable relationship, unless expressly stated otherwise. The specific meanings of the above terms in the present invention can be understood by those skilled in the art according to specific situations.
In addition, the technical solutions in the embodiments of the present invention may be combined with each other, but it must be based on the realization of those skilled in the art, and when the technical solutions are contradictory or cannot be realized, such a combination of technical solutions should not be considered to exist, and is not within the protection scope of the present invention.
The specific embodiments described herein are merely illustrative of the spirit of the invention. Various modifications or additions may be made to the described embodiments or alternatives may be employed by those skilled in the art without departing from the spirit or ambit of the invention as defined in the appended claims.
As shown in fig. 1 to 9, a magnetic material vacuum coater comprises: a feeding table 100, a discharging table 200, a coating device 300 and a reversing table 400.
Wherein the feeding table 100 is provided with a feeding transport assembly 110, and the feeding transport assembly 110 is provided as a conveyor belt mechanism or a roller mechanism.
Wherein, ejection of compact platform 200 is provided with ejection of compact transportation subassembly 210, and ejection of compact transportation subassembly 210 sets up to conveyer belt mechanism or roller mechanism.
Wherein, the coating device 300 is provided with a processing and transporting assembly 310, and the processing and transporting assembly 310 is provided as a conveyor belt mechanism or a roller mechanism.
The reversing table 400 is connected with a reversing driving element 410, the reversing driving element 410 can drive the reversing table 400 to rotate, so that the reversing table 400 is communicated with the feeding table 100, the discharging table 200 or the coating device 300, the reversing table 400 is provided with a reversing transportation assembly 420, and the reversing transportation assembly 420 can be arranged as a conveyor belt mechanism or a roller shaft mechanism.
When the reversing station 400 is communicated with the feeding station 100, the material loading disc 800 moves from the feeding station 100 to the reversing station 400 through the feeding transport assembly 110 and the reversing transport assembly 420, when the reversing station 400 is communicated with the discharging station 200, the material loading disc 800 moves from the reversing station 400 to the discharging station 200 through the discharging transport assembly 210 and the reversing transport assembly 420, and when the reversing station 400 is communicated with the coating device 300, the material loading disc 800 can move back and forth between the reversing station 400 and the coating device 300 through the processing transport assembly 310 and the reversing transport assembly 420.
In this embodiment, the reversing driving element 410 can drive the reversing table 400 to rotate, so that the reversing table 400 is communicated with the feeding table 100, the discharging table 200 or the coating device 300, and the discharging table 200 can be arranged beside the feeding table 100, so that a worker does not need to move the carrying tray 800 back and forth, which is very convenient.
As shown in fig. 1, 3 and 5, on the basis of the above embodiment, the coating device further includes a turning assembly 500, the coating device 300 is disposed between the turning assembly 500 and the reversing table 400, the turning assembly 500 is communicated with the coating device 300, the turning assembly 500 can turn over the strips of the material loading tray 800, the turning assembly 500 is provided with a turning transportation assembly 510, and the material loading tray 800 can move back and forth between the coating device 300 and the turning assembly 500 through the turning transportation assembly 510 and the processing transportation assembly 310.
The reverse transport assembly 510 may be configured as a conveyor belt mechanism or a roller mechanism.
In this embodiment, the reversing assembly 500 can reverse the strips of the material loading tray 800 and the material loading tray 800 can move back and forth between the coating device 300 and the reversing assembly 500 through the reversing transportation assembly 510 and the processing transportation assembly 310, so that the reversed material loading tray 800 can be transported back to the reversing station 400 through the processing transportation assembly 310.
As shown in fig. 1 and 5, on the basis of the above embodiment, the reversing assembly 500 is detachably connected to an empty tray 520, the reversing assembly 500 can reverse the material blocks of the material loading tray 800 into the empty tray 520 through reversing, so that the empty tray 520 can be used as a new material loading tray 800, and the material loading tray 800 with empty material blocks can be detachably connected to the reversing assembly 500 and can be used as a new empty tray 520.
Specifically, the turnover assembly 500 is provided with a vacuum suction head or an electromagnet, and the turnover assembly 500 can suck the material loading tray 800 or release the empty tray 520 through the vacuum suction head or the electromagnet, so that the material loading tray 800 of the empty material is detachably connected with the turnover assembly 500.
In this embodiment, the material loading disc 800 is reversely buckled into the empty material disc 520 through the overturning assembly 500, and the material loading disc 800 which is empty and has the empty material block can be detachably connected with the overturning assembly 500 and serves as a new empty material disc 520, so that the material block can be turned quickly without manual operation, and the production rhythm is greatly accelerated.
Preferably, the flipping module 500 includes a base frame 530, a flipping base 540, a flipping driving element 550, and two clamping driving elements 550, the flipping driving element 550 is connected to the base frame 530, the flipping base 540 is connected to the flipping driving element 550 in a linkage manner, the flipping driving element 550 can drive the flipping base 540 to rotate relative to the base frame 530, the two clamping driving elements 550 are connected to the flipping base 540, and the two clamping driving elements 550 can respectively drive the material loading tray 800 and the empty tray 520 to clamp each other.
As shown in fig. 1, fig. 6, fig. 7, and fig. 8, on the basis of the above embodiment, the coating apparatus further includes a back transport assembly 610, a first lifting assembly 620, and a second lifting assembly 630, wherein the back transport assembly 610 is disposed corresponding to the coating apparatus 300 and the turnover assembly 500 up and down, the first lifting assembly 620 can be communicated with the turnover assembly 500 or the back transport assembly 610, the second lifting assembly 630 can be communicated with the reversing table 400 or the back transport assembly 610, and the carrier tray 800 can move back and forth between the first lifting assembly 620 and the second lifting assembly 630 through the back transport assembly 610.
The return transport assembly 610 may be configured as a conveyor belt mechanism or a roller mechanism.
In this embodiment, another transportation channel is provided by the pass-back transportation assembly 610, the first lifting assembly 620 and the second lifting assembly 630, so that the magnetic material vacuum coating machine can simultaneously place a plurality of material loading trays 800, and the material loading trays 800 for turning over the material blocks can return to the turning table through the pass-back transportation assembly 610, the first lifting assembly 620 and the second lifting assembly 630, thereby speeding up the production cycle.
As shown in fig. 1, 7 and 9, on the basis of the above embodiment, the apparatus further includes a visual inspection device 710 and a grasping assembly 720, the visual inspection device 710 and the grasping assembly 720 are aligned with the first lifting assembly 620, the visual inspection device 710 is used for photographing and inspecting the lumps in the material loading tray 800 to determine whether the lumps are turned over, and the grasping assembly 720 is used for grasping the lumps in the material loading tray 800.
Specifically, the gripper assembly 720 may be a three-axis robot and may be provided with a vacuum chuck.
Specifically, the visual inspection device 710 may be a CCD camera or the like.
In the actual production process, the material loading tray 800 may have no turnover or no turnover error due to no full placement or other placement problems, so that the material blocks need to be subjected to turnover treatment separately.
Since the coated blocks have good metallic luster and the uncoated blocks are dark, the blocks without the turn-over or the wrong turn-over can be detected by detecting the light reflectivity of the blocks through the visual detection device 710, and a light source can be additionally added if necessary.
In the present embodiment, the vision inspection device 710 is used for photographing and inspecting the material blocks in the material loading tray 800 to determine whether the material blocks are turned over, and the grabbing component 720 is used for grabbing/sucking away the material blocks in the material loading tray 800 and then putting the material blocks into the recycling frame to wait for manual processing.
As shown in fig. 1, 7 and 9, on the basis of the above embodiment, the apparatus further includes a rotation driving element 730, a rotation arm 740 and a placing assembly 750, the grabbing assembly 720 is linked to the rotation driving element 730 through the rotation arm 740, the rotation driving element 730 can drive the rotation arm 740 to rotate so as to overturn the grabbing assembly 720, the placing assembly 750 can move to the grabbing assembly 720 or the first lifting assembly 620, and when the rotation driving element 730 drives the grabbing assembly 720 to overturn the lumps, the placing assembly 750 returns the lumps grabbed by the grabbing assembly 720 to the tray 800.
Specifically, the placement assembly 750 may be a three-axis robot and provided with a vacuum chuck.
In particular, the rotational drive member 730 may be provided as a motor, preferably a stepper motor.
In this embodiment, when the rotating driving element 730 drives the grabbing component 720 to overturn the material blocks, the placing component 750 places the material blocks grabbed by the grabbing component 720 back to the material loading tray 800, so that manual processing is not required, and besides the overturning of the whole material loading tray 800, the single material blocks can be independently overturned, so that the magnetic material vacuum coating machine has an automatic error correction function.
As shown in fig. 1, 7 and 8, in addition to the above embodiment, the first lifting assembly 620 includes a first transportation assembly 621 and a first lifting driving device 622, the first transportation assembly 621 is linked with the first lifting driving device 622, the first lifting driving device 622 can drive the first transportation assembly 621 to lift, the second lifting assembly 630 includes a second transportation assembly 631 and a second lifting driving device 632, the second transportation assembly 631 is linked with the second lifting driving device 632, and the second lifting driving device 632 can drive the second transportation assembly 631 to lift.
In this embodiment, the first and second transport units 621 and 631 may be configured as a belt mechanism or a roller mechanism, and the first and second elevation driving devices 622 and 632 may be configured as an air cylinder, a hydraulic cylinder, or a screw motor.
Next, as shown in fig. 1 to 9, a coating method includes the magnetic material vacuum coating machine, and further includes the steps of:
s1: the reversing driving element 410 drives the reversing table 400 to rotate and is communicated with the feeding table 100, the material carrying disc 800 moves to the reversing table 400 from the feeding table 100 through the feeding transportation assembly 110 and the reversing transportation assembly 420, and the reversing driving element 410 drives the reversing table 400 to rotate and is communicated with the coating device 300;
s2: the material loading disc 800 is moved from the reversing table 400 to the coating device 300 through the processing and transporting assembly 310 and the reversing transporting assembly 420 for coating, the material loading disc 800 loading a piece of coating material is moved from the coating device 300 to the reversing assembly 500 through the reversing and transporting assembly 510 and the processing and transporting assembly 310, the two clamping driving elements 550 respectively drive the material loading disc 800 and the empty disc 520 to clamp each other, the reversing driving element 550 drives the reversing seat 540 to rotate relative to the base frame 530, the piece of the material loading disc 800 is reversely buckled into the empty disc 520 through reversing, so that the empty disc 520 serves as a new material loading disc 800, and the material loading disc 800 of the emptied piece is detachably connected with the reversing assembly 500 and serves as a new empty disc 520;
s3: the first transportation assembly 621 is lifted to communicate with the turnover assembly 500, the material loading tray 800 moves from the turnover assembly 500 to the first transportation assembly 621, the first transportation assembly 621 is lowered to communicate with the return transportation assembly 610, the material loading tray 800 moves from the first transportation assembly 621 to the return transportation assembly 610, the second transportation assembly 631 is lowered to communicate with the return transportation assembly 610, the material loading tray 800 moves from the return transportation assembly 610 to the second transportation assembly 631, the second lifting assembly 630 is lifted to communicate with the reversing table 400, and the material loading tray 800 moves from the second transportation assembly 631 to the reversing table 400;
s4: repeating the step S2 and the step S3, after the two sides of the material block in the material loading tray 800 are coated with the film, the reversing driving element 410 drives the reversing table 400 to rotate and communicate with the discharging table 200, and the material loading tray 800 moves from the reversing table 400 to the discharging table 200 through the discharging transportation assembly 210 and the reversing transportation assembly 420.
In the embodiment, the reversing driving element 410 drives the reversing table 400 to reverse, so that the automatic loading tray 800, the automatic unloading tray 800 and the reversed loading tray 800 are automatically transported into the coating device 300, the automatic production line is automatically produced, and the whole loading tray 800 is transported to the feeding table 100 again without manually reversing the material blocks.
As shown in fig. 1, 7 and 9, based on the above embodiment, in step S3, when the tray 800 is located in the first transporting assembly 621, the visual inspection device 710 photographs and inspects the lumps in the tray 800 to determine whether the lumps are turned over, the grabbing assembly 720 grabs the lumps in the tray 800, the rotary driving element 730 drives the grabbing assembly 720 to turn over the lumps, and the placing assembly 750 places the turned lumps back into the tray 800.
In this embodiment, after the rotating driving element 730 drives the grabbing component 720 to overturn the material blocks, the placing component 750 places the material blocks grabbed by the grabbing component 720 back to the material loading tray 800, so that manual processing is not needed, and in addition to the overturning of the whole material loading tray 800, a single material block can be independently overturned, so that the magnetic material vacuum coating machine has an automatic error correction function.

Claims (10)

1. A magnetic material vacuum coating machine is characterized by comprising:
a feed table provided with a feed transport assembly;
the discharging table is provided with a discharging transportation assembly;
the coating device is provided with a processing and transporting assembly;
the reversing table is connected with a reversing driving element, the reversing driving element can drive the reversing table to rotate so that the reversing table can be communicated with the feeding table or the discharging table or the coating device, the reversing table is provided with a reversing transportation assembly, when the reversing table is communicated with the feeding table, a material carrying disc passes through the feeding table, the material carrying disc passes through the feeding transportation assembly and the reversing transportation assembly moves to the reversing table, when the reversing table is communicated with the discharging table, the material carrying disc passes through the discharging transportation assembly and the reversing transportation assembly moves to the discharging table, and when the reversing table is communicated with the coating device, the material carrying disc can pass through the processing transportation assembly and the reversing transportation assembly and can move back and forth between the reversing table and the coating device.
2. The magnetic material vacuum coating machine of claim 1, characterized in that: the turnover conveying assembly is provided with a turnover conveying assembly, the material carrying disc can pass through the turnover conveying assembly and the processing conveying assembly to move back and forth between the coating device and the turnover assembly.
3. The magnetic material vacuum coating machine of claim 2, characterized in that: the overturning assembly is detachably connected with an empty tray, the overturning assembly can reversely buckle the material blocks of the material loading tray into the empty tray through overturning, so that the original empty tray is used as a new material loading tray, and the original material loading tray of the material emptying block is detachably connected with the overturning assembly and is used as a new empty tray.
4. A magnet vacuum coater as claimed in claim 3 wherein: the turnover assembly comprises a base frame, a turnover seat, a turnover driving element and two clamping driving elements, wherein the turnover driving element is connected with the base frame, the turnover seat is connected with the turnover driving element in a linkage manner, the turnover driving element can drive the turnover seat to rotate relative to the base frame, the clamping driving element is connected with the turnover seat, and the clamping driving element can respectively drive the material carrying disc and the empty material disc to clamp each other.
5. A magnet vacuum coater as claimed in claim 2 wherein: the material conveying device comprises a film coating device and a turnover assembly, and is characterized by further comprising a return conveying assembly, a first lifting assembly and a second lifting assembly, wherein the return conveying assembly, the film coating device and the turnover assembly are arranged in a vertically corresponding mode, the first lifting assembly can be communicated with the turnover assembly or the return conveying assembly, the second lifting assembly can be communicated with the reversing table or the return conveying assembly, and a material carrying disc can move back and forth between the first lifting assembly and the second lifting assembly through the return conveying assembly.
6. The magnetic material vacuum coater of claim 5, wherein: the material loading plate comprises a first lifting assembly, a second lifting assembly, a vision detection device and a grabbing assembly, wherein the first lifting assembly is aligned with the second lifting assembly, the vision detection device is used for shooting and detecting a material block in the material loading plate so as to judge whether the material block is overturned, and the grabbing assembly is used for grabbing the material block in the material loading plate.
7. The magnetic material vacuum coating machine of claim 6, characterized in that: still include rotation driving element, rotor arm and place the subassembly, it passes through to snatch the subassembly the rotor arm with the linkage of rotation driving element is connected, rotation driving element can drive thereby the rotor arm rotates and makes it snatchs the subassembly upset, it can move extremely to place the subassembly snatch the subassembly perhaps first lifting unit works as rotation driving element drives it will to snatch behind the subassembly upset material piece place the subassembly will it puts back the material loading dish to snatch the material piece that the subassembly snatched.
8. The magnetic material vacuum coater of claim 5, wherein: the first lifting assembly comprises a first transportation assembly and a first lifting driving device, the first transportation assembly is in linkage connection with the first lifting driving device, the first lifting driving device can drive the first transportation assembly to lift, the second lifting assembly comprises a second transportation assembly and a second lifting driving device, the second transportation assembly is in linkage connection with the second lifting driving device, and the second lifting driving device can drive the second transportation assembly to lift.
9. A coating method comprising the magnet vacuum coater according to any one of claims 1 to 8, further comprising the steps of:
s1: the reversing driving element drives the reversing table to rotate and is communicated with the feeding table, the material carrying disc moves to the reversing table from the feeding table through the feeding transportation assembly and the reversing transportation assembly, and the reversing driving element drives the reversing table to rotate and is communicated with the film coating device;
s2: the material loading disc is moved from the reversing table to the film coating device through the processing and transporting assembly and the reversing transporting assembly to perform film coating, the material loading disc loading a material block to be coated is moved from the film coating device to the reversing assembly through the reversing transporting assembly and the processing and transporting assembly, the two clamping driving elements respectively drive the material loading disc and the empty material disc to be clamped mutually, the reversing driving element drives the reversing seat to rotate relative to the base frame, the material block of the material loading disc is reversely buckled into the empty material disc through reversing, so that the original empty material disc is used as a new material loading disc, and the original material loading disc of the empty material block is detachably connected with the reversing assembly and is used as a new empty material disc;
s3: the first transportation assembly is lifted and communicated with the overturning assembly, the material carrying disc moves from the overturning assembly to the first transportation assembly, the first transportation assembly is lowered and communicated with the return transportation assembly, the material carrying disc moves from the first transportation assembly to the return transportation assembly, the second transportation assembly is lowered and communicated with the return transportation assembly, the material carrying disc moves from the return transportation assembly to the second transportation assembly, the second lifting assembly is lifted and communicated with the reversing table, and the material carrying disc moves from the second transportation assembly to the reversing table;
s4: and repeating the step S2 and the step S3, after the two sides of the material block in the material carrying disc are coated with films, driving the reversing table to rotate by the reversing driving element and communicating with the material discharging table, and moving the material carrying disc from the reversing table to the material discharging table through the material discharging transportation assembly and the reversing transportation assembly.
10. A plating method according to claim 9, wherein: in step S3, when the material loading tray is located in the first transportation assembly, the vision inspection device photographs and inspects the material blocks in the material loading tray to determine whether the material blocks are turned over, the grabbing assembly grabs the material blocks in the material loading tray, the rotary driving element drives the grabbing assembly to turn over the material blocks, and then the placing assembly puts the turned material blocks back into the material loading tray.
CN202210537992.6A 2022-05-18 2022-05-18 Magnetic material vacuum coating machine and coating method Pending CN114919975A (en)

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CN202210537992.6A CN114919975A (en) 2022-05-18 2022-05-18 Magnetic material vacuum coating machine and coating method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN202210537992.6A CN114919975A (en) 2022-05-18 2022-05-18 Magnetic material vacuum coating machine and coating method

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CN114919975A true CN114919975A (en) 2022-08-19

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN115449770A (en) * 2022-09-01 2022-12-09 江苏宝浦莱半导体有限公司 Production equipment of silicon-based thin film material

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN115449770A (en) * 2022-09-01 2022-12-09 江苏宝浦莱半导体有限公司 Production equipment of silicon-based thin film material

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