CN114918205A - Special frame of portable spool box cleaning machine piece basket - Google Patents

Special frame of portable spool box cleaning machine piece basket Download PDF

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Publication number
CN114918205A
CN114918205A CN202210490473.9A CN202210490473A CN114918205A CN 114918205 A CN114918205 A CN 114918205A CN 202210490473 A CN202210490473 A CN 202210490473A CN 114918205 A CN114918205 A CN 114918205A
Authority
CN
China
Prior art keywords
frame
main part
main body
wafer
basket
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CN202210490473.9A
Other languages
Chinese (zh)
Inventor
张宏杰
杨路肖
刘建伟
武卫
刘姣龙
祝斌
袁祥龙
雍琪浩
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Zhonghuan Advanced Semiconductor Materials Co Ltd
Original Assignee
Zhonghuan Advanced Semiconductor Materials Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Zhonghuan Advanced Semiconductor Materials Co Ltd filed Critical Zhonghuan Advanced Semiconductor Materials Co Ltd
Priority to CN202210490473.9A priority Critical patent/CN114918205A/en
Publication of CN114918205A publication Critical patent/CN114918205A/en
Pending legal-status Critical Current

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Classifications

    • BPERFORMING OPERATIONS; TRANSPORTING
    • B08CLEANING
    • B08BCLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
    • B08B9/00Cleaning hollow articles by methods or apparatus specially adapted thereto 
    • B08B9/08Cleaning containers, e.g. tanks
    • B08B9/20Cleaning containers, e.g. tanks by using apparatus into or on to which containers, e.g. bottles, jars, cans are brought
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02PCLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P70/00Climate change mitigation technologies in the production process for final industrial or consumer products
    • Y02P70/50Manufacturing or production processes characterised by the final manufactured product

Abstract

The invention discloses a special frame for a wafer basket of a portable wafer box cleaning machine, which comprises a fixed frame main body frame, wherein a wafer basket main body supporting structure is longitudinally arranged on the inner side of the fixed frame main body frame, a wafer basket main body placing area is arranged above the wafer basket main body supporting structure, a wafer basket main body blocking structure is arranged on the fixed frame main body frame on one side of the wafer basket main body placing area, adjusting blocks are arranged at two ends of the wafer basket main body blocking structure, an adjusting rod is movably arranged on one side of the adjusting block in a penetrating mode, and a fastening ring is rotatably arranged at the inner end of the adjusting rod through a bearing. This special frame of portable spool box cleaning machine piece basket through vertically arranging the piece basket main part bearing structure who sets up in mount main part frame inboard for the major structure can be divided into about, and three piece basket can be washed simultaneously to a special frame, and the washing productivity of relative spool box improves, and special frame overall dimension is littleer simultaneously, and area is littleer, is favorable to the rational utilization change in space.

Description

Special frame of portable spool box cleaning machine piece basket
Technical Field
The invention relates to the technical field of silicon wafer production, in particular to a special frame for a wafer basket of a portable wafer box cleaning machine.
Background
16 ten thousand transistors can be integrated on a silicon wafer with large grains of rice, which is another milestone of scientific and technical progress, the silicon element with the content of 25.8 percent in the crust provides an inexhaustible source for the production of monocrystalline silicon, and as the silicon element is one of the most abundant elements in the crust, for the products of solar cells which are destined to enter large-scale markets, the reserve is also one of the reasons that the silicon becomes the main material of photovoltaic, the silicon wafer needs to be stored through the blue wafer in the production process, and the blue wafer needs to be cleaned and disinfected before being used.
The existing large-scale cleaning machine with the increase of the size of the silicon wafer and the existing special frame for the wafer blue cleaning machine is large in size, so that the occupied area is large, the reasonable utilization of the space is not facilitated, meanwhile, the special frame structure is generally fixed, real-time adjustment cannot be performed according to the actual wafer basket type number specification, and the flexibility of use is small and the limitation is large.
Disclosure of Invention
The invention aims to provide a special frame for a wafer basket of a portable wafer box cleaning machine, which aims to solve the problems that the conventional wafer basket cleaning machine is large-sized along with the increase of the size of a silicon wafer, the conventional special frame for the wafer basket cleaning machine is large in size, so that the occupied area is large, the reasonable utilization of space is not facilitated, and meanwhile, the special frame is generally fixed in structure, cannot be adjusted in real time according to the actual size of the wafer basket, and is small in use flexibility and large in limitation.
In order to achieve the purpose, the invention provides the following technical scheme: the utility model provides a special frame of portable spool box cleaning machine piece basket, includes mount main body frame, mount main body frame's inboard is vertically arranged and is provided with piece basket main part bearing structure, piece basket main part bearing structure's top is provided with piece basket main part and places the district, it blocks the structure to be provided with piece basket main part on one side mount main body frame in district is placed to piece basket main part, piece basket main part blocks the both ends of structure and all is provided with the regulating block, one side of regulating block is run through movable mounting and is had the regulation pole, the inner of adjusting the pole is rotated through the bearing and is installed the tighrening ring, piece basket main part bearing structure's top both sides all are provided with piece basket main part and place the track.
Preferably, the surface of adjusting the pole and all be provided with the twist screw thread with the regulating block junction inner wall, and the outer end of adjusting the pole all is provided with the knob.
Preferably, the inner side surface of the fastening ring is provided with fastening convex tips in a surrounding arrangement, and the shape of the fastening convex tips is conical.
Preferably, the surface of the adjusting block is provided with a movable port, and the movable port is movably sleeved with the fixed frame main body frame.
Preferably, a rolling groove is formed in the inner side surface of the movable opening, a connecting rod is fixedly mounted on the inner side of the rolling groove, and a ball is movably mounted on the surface of the connecting rod.
Preferably, the ball encircles the setting along the inner wall of activity mouth, the quantity of ball is three, and all is provided with the fretwork opening below the upper and lower face of mount main part frame, and all other structures all adopt the skeleton framework.
Compared with the prior art, the invention has the beneficial effects that:
this special frame of portable spool box cleaning machine piece basket is carrying out daily in-process, through vertically arranging the inboard piece basket main part bearing structure of setting at mount main part frame for major structure can divide into from top to bottom, and three piece basket can be washed simultaneously to a special frame, and the washing productivity of relative spool box improves, and special frame overall dimension is littleer simultaneously, and area is littleer, is favorable to the rational utilization change in space.
This special frame of portable spool box cleaning machine piece basket, in-process carrying out daily use, can be different according to abluent piece basket model specification of actual need, adjust the pole through artifical wrench movement at the flexible regulation of regulating block surface screw thread twist, make regulating block and mount main body frame take place not hard up, block the structure with the piece basket main part and reciprocate, the realization blocks the distance between the structure to the piece basket main part and adjusts in real time, make the piece basket main part block the structure can carry out more accurate blockking with the piece basket, avoid the piece basket atress to take place to empty the problem that drops.
Drawings
FIG. 1 is a front view of the present invention;
FIG. 2 is a partial top view of the conditioning block of the present invention;
FIG. 3 is a schematic view of a connecting structure of an adjusting lever and a fastening ring according to the present invention;
FIG. 4 is a sectional view of the inner wall of the movable port of the present invention.
In the figure: 1. a fixed frame main body frame; 2. a tablet basket body placement area; 3. a wafer basket body support structure; 4. a sheet basket main body placing rail; 5. a wafer basket body blocking structure; 6. a regulating block; 7. a ball bearing; 8. a movable opening; 9. adjusting a rod; 10. a knob; 11. fastening the convex tip; 12. a fastening ring; 13. a bearing; 14. twisting the threads; 15. a connecting rod; 16. a rolling groove; 17. and (6) hollowing out the opening.
Detailed Description
The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.
Referring to fig. 1-4, the present invention provides a technical solution: a portable special frame for a wafer basket of a wafer box cleaning machine comprises a fixed frame main body frame 1, wherein a wafer basket main body supporting structure 3 is longitudinally arranged on the inner side of the fixed frame main body frame 1, so that the main body structure can be divided into an upper part, a middle part and a lower part, and one special frame can simultaneously clean three wafer baskets, so that the cleaning effect is better and the cleaning efficiency is improved, a wafer basket main body placing area 2 is arranged above the wafer basket main body supporting structure 3, a wafer basket main body blocking structure 5 is arranged on one side of the wafer basket main body placing area 2 of the fixed frame main body frame 1, the wafer basket to be cleaned can be placed to the top of the wafer basket main body supporting structure 3 through a wafer basket main body placing track 4, the wafer baskets are limited and fixed in real time, adjusting blocks 6 are arranged at two ends of the wafer basket main body blocking structure 5, an adjusting rod 9 is movably arranged at one side of each adjusting block 6 in a penetrating manner, a fastening ring 12 is rotatably arranged at the inner end of each adjusting rod 9 through a bearing 13, can be different according to abluent piece basket type number specification of actual need, adjust pole 9 through artifical wrench movement at 6 surperficial screw thread wrench movement flexible regulations of regulating block, make regulating block 6 and mount main body frame 1 take place not hard up, block structure 5 with the piece basket main part and reciprocate, the realization blocks the distance between the structure 5 to the piece basket main part and adjusts in real time, make the piece basket main part block structure 5 can carry out more accurate with the piece basket and block, the top both sides of piece basket main part bearing structure 3 all are provided with piece basket main part and place track 4, can wholly remove arbitrary washing position in real time with special frame, it is more convenient sparingly strength to operate.
The surface of the adjusting rod 9 and the inner wall of the joint of the adjusting rod 9 and the adjusting block 6 are provided with twisting threads 14, the outer end of the adjusting rod 9 is provided with a knob 10, the inner side surface of a fastening ring 12 is provided with fastening convex points 11 in a surrounding manner, the fastening convex points 11 are conical in shape, the fixing frame main body frame 1 and the adjusting block 6 can be fastened in a clamping manner, the problem of automatic falling off in the using process is avoided, the surface of the adjusting block 6 is provided with movable openings 8, the movable openings 8 are movably sleeved with the fixing frame main body frame 1, the inner side surface of the movable openings 8 is provided with rolling grooves 16, the inner sides of the rolling grooves 16 are fixedly provided with connecting rods 15, the surfaces of the connecting rods 15 are movably provided with rolling balls 7, the rolling balls 7 are arranged in a surrounding manner along the inner wall of the movable openings 8, the friction force generated when the fixing frame main body frame 1 and the adjusting block 6 move can be reduced, so that the moving adjustment can be smoother, the quantity of ball 7 is three, can carry out diversified support spacing to mount main body frame 1 and regulating block 6, avoids removing the in-process and takes place the slope card and hinder, and the mount main body frame 1 all is provided with fretwork opening 17 from top to bottom, and all the other structures all adopt the skeleton framework, can make the washing contact can be more comprehensive for the better efficiency of abluent whole effect is higher.
The working principle is as follows: when the silicon wafer basket cleaning work is required, firstly, the wafer basket to be cleaned can be placed on the top of a supporting structure 3 of a main body of the wafer basket through a placing track 4 of the main body of the wafer basket, the wafer basket is limited and fixed in real time, then the wafer basket can be cleaned according to different specifications of the model of the wafer basket to be cleaned in actual need, the adjusting block 6 and a main frame 1 of a fixing frame are loosened by twisting and telescopic adjustment of threads on the surface of the adjusting block 6 through a manual twisting adjusting rod 9, a blocking structure 5 of the main body of the wafer basket is moved up and down, the distance between the blocking structures 5 of the main body of the wafer basket is adjusted in real time, the blocking structure 5 of the main body of the wafer basket can be blocked with the wafer basket more accurately, a hollow structure is adopted by the fixing frame 1 except the upper surface and the lower surface, the rest structures all adopt framework structures, the main structure can be divided into an upper structure, a middle structure and a lower structure, and a special frame can be used for cleaning three wafer baskets simultaneously, the cleaning effect is better, and the cleaning efficiency is improved.
It is noted that, herein, relational terms such as first and second, and the like may be used solely to distinguish one entity or action from another entity or action without necessarily requiring or implying any actual such relationship or order between such entities or actions. Also, the terms "comprises," "comprising," or any other variation thereof, are intended to cover a non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements does not include only those elements but may include other elements not expressly listed or inherent to such process, method, article, or apparatus.
Although embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that various changes, modifications, substitutions and alterations can be made in these embodiments without departing from the principles and spirit of the invention, the scope of which is defined in the appended claims and their equivalents.

Claims (6)

1. The utility model provides a special frame of portable spool box cleaning machine piece basket, includes mount main part frame (1), its characterized in that: the inboard of mount main part frame (1) is vertically arranged and is provided with piece basket main part bearing structure (3), the top of piece basket main part bearing structure (3) is provided with the piece basket main part and places district (2), it blocks structure (5) to be provided with the piece basket main part on one side mount main part frame (1) of district (2) is placed to the piece basket main part, the both ends that the piece basket main part blockked structure (5) all are provided with regulating block (6), one side of regulating block (6) is run through movable mounting and is adjusted pole (9), the inner of adjusting pole (9) is rotated through bearing (13) and is installed tighrening ring (12), the top both sides of piece basket main part bearing structure (3) all are provided with the piece basket main part and place track (4).
2. The special frame for a portable wafer box cleaning machine wafer basket according to claim 1, characterized in that: the surface of the adjusting rod (9) and the inner wall of the joint of the adjusting rod and the adjusting block (6) are provided with twisting threads (14), and the outer end of the adjusting rod (9) is provided with a knob (10).
3. The special frame for a portable wafer box cleaning machine wafer basket according to claim 1, characterized in that: the inner side surface of the fastening ring (12) is provided with fastening convex tips (11) in a surrounding arrangement mode, and the fastening convex tips (11) are conical in shape.
4. The special frame for a portable chip basket of a chip box cleaning machine according to claim 1, characterized in that: the surface of the adjusting block (6) is provided with a movable port (8), and the movable port (8) is movably sleeved with the fixing frame main body frame (1).
5. The special frame for a portable wafer box cleaning machine wafer basket according to claim 1, characterized in that: the rolling groove (16) has been seted up to the inboard surface of activity mouth (8), the inboard fixed mounting in rolling groove (16) has connecting rod (15), and the surface activity of connecting rod (15) installs ball (7).
6. The special frame for a portable wafer box cleaning machine wafer basket according to claim 1, characterized in that: the ball (7) encircle the setting along the inner wall of activity mouth (8), the quantity of ball (7) is three, and all is provided with fretwork opening (17) about the mount main part frame (1), and all other structures all adopt the skeleton framework.
CN202210490473.9A 2022-05-07 2022-05-07 Special frame of portable spool box cleaning machine piece basket Pending CN114918205A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN202210490473.9A CN114918205A (en) 2022-05-07 2022-05-07 Special frame of portable spool box cleaning machine piece basket

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN202210490473.9A CN114918205A (en) 2022-05-07 2022-05-07 Special frame of portable spool box cleaning machine piece basket

Publications (1)

Publication Number Publication Date
CN114918205A true CN114918205A (en) 2022-08-19

Family

ID=82807511

Family Applications (1)

Application Number Title Priority Date Filing Date
CN202210490473.9A Pending CN114918205A (en) 2022-05-07 2022-05-07 Special frame of portable spool box cleaning machine piece basket

Country Status (1)

Country Link
CN (1) CN114918205A (en)

Citations (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN202779109U (en) * 2012-08-31 2013-03-13 浙江吉利汽车研究院有限公司杭州分公司 Fixing bracket in ultrasonic defoaming device
CN204264794U (en) * 2014-10-22 2015-04-15 浙江省海洋开发研究院 A kind of shelf peculiar to vessel
US20170266703A1 (en) * 2016-03-15 2017-09-21 Iwt S.R.L. Containment Basket Adapted for Bottles or Similar Containers, in Particular for Washing Operations
CN208036972U (en) * 2018-02-01 2018-11-02 深圳供电局有限公司 A kind of novel cable transport fixing device
CN209597833U (en) * 2019-03-09 2019-11-08 石家庄新世纪胶囊有限公司 A kind of rack for cleaning of capsule shells mold
CN209827766U (en) * 2019-04-04 2019-12-24 台州恩泽医疗中心(集团) Multifunctional flushing device
CN211191218U (en) * 2019-09-12 2020-08-07 内蒙古中环光伏材料有限公司 Wafer rack for loading oversized monocrystalline silicon wafers
CN212166462U (en) * 2020-04-23 2020-12-18 黄玉娣 Liftable basketball stands who adjusts
CN213134275U (en) * 2020-07-27 2021-05-07 上海斯瑞文特种油品科技有限公司 Frame for cleaning automobile parts
CN213407680U (en) * 2020-07-09 2021-06-11 湖南华同智能装备有限公司 Novel walking wheel fixing structure
CN214104728U (en) * 2020-09-10 2021-09-03 马小娟 A locating support for placing scaler
CN214556108U (en) * 2021-03-01 2021-11-02 东莞汉涛金属制造有限公司 Multifunctional cleaning frame
CN215746277U (en) * 2021-09-27 2022-02-08 邵武市美钰机械制造有限公司 Preparation disappears mould casting thousand moulds stoving and uses support
CN216180370U (en) * 2021-10-25 2022-04-05 无锡水登机械有限公司 Adjustable hydraulic pipe support
CN218340576U (en) * 2022-05-07 2023-01-20 中环领先半导体材料有限公司 Special frame of portable spool box cleaning machine piece basket

Patent Citations (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN202779109U (en) * 2012-08-31 2013-03-13 浙江吉利汽车研究院有限公司杭州分公司 Fixing bracket in ultrasonic defoaming device
CN204264794U (en) * 2014-10-22 2015-04-15 浙江省海洋开发研究院 A kind of shelf peculiar to vessel
US20170266703A1 (en) * 2016-03-15 2017-09-21 Iwt S.R.L. Containment Basket Adapted for Bottles or Similar Containers, in Particular for Washing Operations
CN208036972U (en) * 2018-02-01 2018-11-02 深圳供电局有限公司 A kind of novel cable transport fixing device
CN209597833U (en) * 2019-03-09 2019-11-08 石家庄新世纪胶囊有限公司 A kind of rack for cleaning of capsule shells mold
CN209827766U (en) * 2019-04-04 2019-12-24 台州恩泽医疗中心(集团) Multifunctional flushing device
CN211191218U (en) * 2019-09-12 2020-08-07 内蒙古中环光伏材料有限公司 Wafer rack for loading oversized monocrystalline silicon wafers
CN212166462U (en) * 2020-04-23 2020-12-18 黄玉娣 Liftable basketball stands who adjusts
CN213407680U (en) * 2020-07-09 2021-06-11 湖南华同智能装备有限公司 Novel walking wheel fixing structure
CN213134275U (en) * 2020-07-27 2021-05-07 上海斯瑞文特种油品科技有限公司 Frame for cleaning automobile parts
CN214104728U (en) * 2020-09-10 2021-09-03 马小娟 A locating support for placing scaler
CN214556108U (en) * 2021-03-01 2021-11-02 东莞汉涛金属制造有限公司 Multifunctional cleaning frame
CN215746277U (en) * 2021-09-27 2022-02-08 邵武市美钰机械制造有限公司 Preparation disappears mould casting thousand moulds stoving and uses support
CN216180370U (en) * 2021-10-25 2022-04-05 无锡水登机械有限公司 Adjustable hydraulic pipe support
CN218340576U (en) * 2022-05-07 2023-01-20 中环领先半导体材料有限公司 Special frame of portable spool box cleaning machine piece basket

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