CN209174483U - A kind of rinse bath - Google Patents

A kind of rinse bath Download PDF

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Publication number
CN209174483U
CN209174483U CN201821802353.3U CN201821802353U CN209174483U CN 209174483 U CN209174483 U CN 209174483U CN 201821802353 U CN201821802353 U CN 201821802353U CN 209174483 U CN209174483 U CN 209174483U
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CN
China
Prior art keywords
web plate
rinse bath
plate
item
hole
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CN201821802353.3U
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Chinese (zh)
Inventor
左国军
陈雷
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Changzhou Jiejiachuang Precision Machinery Co Ltd
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Changzhou Jiejiachuang Precision Machinery Co Ltd
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Priority to CN201821802353.3U priority Critical patent/CN209174483U/en
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    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02PCLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P70/00Climate change mitigation technologies in the production process for final industrial or consumer products
    • Y02P70/50Manufacturing or production processes characterised by the final manufactured product

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Abstract

The utility model discloses a kind of rinse baths, including rinse bath ontology, the top of the rinse bath ontology inner bottom plating is equipped with a horizontal positioned web plate, rear and front end on the web plate is respectively fixedly connected with the first placement item for extending and being parallel to each other along its left and right directions, middle part on the web plate be fixedly connected there are two with it is described first place item it is parallel second placement item, there are gaps between the web plate and the side wall of rinse bath ontology, the left and right adjusting device for being additionally provided with the front-and-back adjusting device for the web plate to be moved forward and backward in the rinse bath and being used to move left and right the web plate.Front-and-back adjusting device and left and right adjusting device of the utility model due to being equipped with web plate, so as to be conveniently adjusted the placement location of body feed tank on web plate, it is effective to avoid influencing due to manufacture and rigging error bring, it is convenient to be matched with manipulator, it adjusts and easy to operate.

Description

A kind of rinse bath
Technical field
The utility model relates to solar-energy photo-voltaic cell technical fields, are to be related to a kind of rinse bath more specifically.
Background technique
With the development of solar-energy photo-voltaic cell industry, the development trend of photovoltaic cell is low cost, high efficiency, big production Amount.It is also gradually to increase that wherein industry, which pursues the yield of equipment,.Equipment type is developed at present by 200,300 in recent years 400 of mainstream or even subsequent there are also the appearance of higher yield type.In this background, equipment becomes required precision greatly Also higher and higher, to product design, also brings huge challenge;Carrying out cleaning in the silicon wafer of rinse bath interior focusing volt battery is Silicon wafer, is usually uniformly placed in body feed tank and is well placed, then grabbed by manipulator by a steps necessary in photovoltaic cell production It takes body feed tank to put it into scheduled placement location in rinse bath, in order to improve working efficiency, generally can once grab several objects Hopper is put into rinse bath simultaneously on scheduled placement location.
In the prior art, the web plate in rinse bath is fixed together with groove body, and the position of web plate cannot be adjusted, net Plate, which is equipped with, places item, and snap-gauge is equipped on placing item, and body feed tank is to be manually placed to place on item by baffle limiting by machinery.Cause For manipulator and rinse bath manufacture and assembly there are error, body feed tank placement location can not be adjusted on web plate, and manipulator is default Body feed tank placement location when being matched with the actual placement of body feed tank on web plate there are error, rinse bath is matched with manipulator When, adjustment and operation are not convenient enough.
Utility model content
The technical problem to be solved by the utility model is to provide a kind of rinse baths, solve body feed tank placement location on web plate It can not adjust, when rinse bath is matched with manipulator, adjustment and problem inconvenient for operation.
In order to achieve the above purpose, the technical solution of the utility model is:
A kind of rinse bath, including rinse bath ontology, what the top of the rinse bath ontology inner bottom plating was horizontally arranged equipped with one Web plate, the rear and front end on the web plate be respectively fixedly connected with one extend and be parallel to each other along its left and right directions first put Set item, the middle part on the web plate be fixedly connected there are two with described first the second placement item that place item parallel, the web plate There are gap between the side wall of rinse bath ontology, it is additionally provided in the rinse bath for the web plate to be moved forward and backward Front-and-back adjusting device and left and right adjusting device for moving left and right the web plate.
Specifically, the front-and-back adjusting device includes horizontally disposed forward-backward adjustment bolts, is placed on a side with second Through hole whorl connection;Front and back locking nut, is socketed on forward-backward adjustment bolts, and is located at the head and the of forward-backward adjustment bolts Two place between item;And be located between two second placement items, and the positioning plate being fixedly connected on the bottom plate, before described Afterwards adjust bolt and front and back locking nut it is each there are two, be located at the two sides of the positioning plate;Described second places item as length Strip structure, including a fixed strip, are screwed on web plate;Both ends on the fixed strip are respectively provided with a first gear Plate, the middle part on the fixed strip are equipped with a second baffle;A supporting block is equipped between first baffle and second baffle.
Specifically, the positioning plate includes the pedestal being fixedly connected with the bottom plate and projects upwards positioned at the middle of the base First protrusion;First protrusion opening set from web plate is stretched out upwards;The screw rod of the forward-backward adjustment bolts is from through-hole Inside passing through, the side of the end face of screw rod and first protrusion offsets, when rotation adjusts forward-backward adjustment bolts, adjustable the Two place the relative positional relationship between item and the first protrusion, drive web plate to move forward and backward, to adjust web plate in rinse bath Interior front-rear position, and limited by the opening.
Further, the left and right adjusting device, including left and right locating piece, are vertically fixed on web plate;It further include left and right Adjust bolt and left and right locking nut;The side of the left and right locating piece is equipped with tapped through hole, the screw rod of left and right adjusting bolt Above-mentioned tapped through hole is passed through from the Inside To Outside of left and right locating piece, the end of the screw rod and the inner sidewall of rinse bath offset; The nut is set to the outside of left and right locating piece, is socketed on left and right adjusting bolt;When rotation adjusts left and right adjusting bolt, The distance between adjustable left and right locating piece and inner sidewall drive web plate to move left and right in rinse bath, to adjust net Left-right position of the plate in rinse bath.
Preferably, it there are four the front-and-back adjusting device is set altogether, is located at the four corners of web plate.
Further, the up and down adjustment device for moving up and down the web plate is additionally provided in the rinse bath, Including upper and lower locating piece, it is fixed on the inner sidewall of rinse bath ontology;Up and down adjustment block is hung down by a horizontally disposed transverse slat and one The vertical plate composition being directly arranged, one end of the transverse slat and top of vertical plate is vertical connects, up and down adjustment block is structure as a whole;The transverse slat It is equipped with the threaded hole of a vertical direction, a bolt is installed in the threaded hole, is also arranged with a locking screw on the screw rod of bolt Mother, the locking nut are located at the upside of the transverse slat;The upper side of vertical plate is equipped with waist-shaped hole, and clamping screw passes through waist-shaped hole Fixation is threadedly coupled with upper and lower locating piece;The lower end side of vertical plate is equipped with a card slot, and the rear and front end of the web plate is inserted respectively Enter the fixation that is connected together in card slot.
Preferably, the up and down adjustment device is set to the front-end and back-end of the web plate;The rear and front end of the web plate It is respectively provided with two up and down adjustment devices.
Further, it is additionally provided with support and dipping control in the middle part of the rinse bath, is used to support the middle part of web plate And high low adjustment;The support and dipping control include support column, pressing plate and fixed screw;The pressing plate passes through fixed spiral shell Silk is fixed on the pedestal of fixed plate;Threaded hole is additionally provided on pressing plate, the lower end of the support column is equipped with matched with threaded hole Screw thread, the lower end of support column pass through threaded hole and are connected and fixed with whorl of base, and the upper end of the support column is equipped with annular protrusion, institute The upper end for stating annular protrusion is withstood on the lower surface of web plate, and the top of the support column is stretched out from the tapping on web plate;It is described Adjustment hole is equipped on web plate at position corresponding with fixed screw.
Specifically, the rinse bath ontology includes a laterally disposed bottom plate and four upright side plates, four side plates End weld form an annular two-by-two, which is looped around the periphery of the bottom plate, and the bottom end of side plate and bottom plate welding connect Fixation is connect, so that four side plates and bottom plate collectively form one for placing the cavity of body feed tank.
The utility model has the beneficial effects that
Front-and-back adjusting device and left and right adjusting device of the utility model due to being equipped with web plate, so as to be conveniently adjusted The placement location of body feed tank on web plate effectively avoids influencing due to manufacture and rigging error bring, convenient and manipulator Match, adjusts and easy to operate.
Further, it is also possible to the position detecting switch of manipulator is reduced, logic of streamlining procedures.
In addition, being additionally provided with the up and down adjustment device and support and dipping control of web plate, facilitate the height for adjusting web plate.
Detailed description of the invention
Specific embodiment of the present utility model is described in further detail with reference to the accompanying drawing.
Fig. 1 is the structural schematic diagram of the utility model.
Fig. 2 is the A-A cross-sectional view of Fig. 1.
Fig. 3 is the B-B cross-sectional view of Fig. 1.
Fig. 4 is the C-C cross-sectional view of Fig. 1.
Fig. 5 is the A partial enlarged view in Fig. 4.
Fig. 6 is the B partial enlarged view in Fig. 4.
Fig. 7 is the second placement item of the utility model and the structural schematic diagram of body feed tank placement location.
Attached drawing detail is as follows:
Rinse bath ontology 1, bottom plate 2, web plate 3, the first placement item 4, the second placement item 5, forward-backward adjustment bolts 6, through-hole 7, Front and back locking nut 8, positioning plate 9, opening 10, left and right locating piece 11, left and right adjusting bolt 12, left and right locking nut 13, screw thread Through-hole 14, inner sidewall 15, upper and lower locating piece 16, up and down adjustment block 17, transverse slat 18, vertical plate 19, bolt 20, locking nut 21, waist Type hole 22, clamping screw 23, card slot 24, support column 25, pressing plate 26, fixed screw 27, threaded hole 28, annular protrusion 29, aperture 30, adjustment hole 31, side wall 32, protective plate 33, fixed strip 51, first baffle 52, second baffle 53, supporting block 54, pedestal 91, the One protrusion 92, body feed tank 100.
Specific embodiment
The technical issues of in order to solve the utility model, the technical solution of use, the technical effect of acquirement it can be readily appreciated that Below with reference to specific attached drawing, specific embodiments of the utility model will be further explained.
It should be noted that illustrating only part related with the utility model for ease of description, in attached drawing rather than complete Portion's structure.
As shown in figs. 1-7, it is a specific embodiment of the utility model, provides a kind of specific structure of rinse bath. The rinse bath is mainly used in the production process of photovoltaic cell, the silicon wafer of photovoltaic cell is placed in it and using some clear Washing lotion cleans silicon wafer.It is that first multiple silicon wafers are placed in body feed tank to be well placed when practical operation, reuses manipulator Body feed tank is grabbed, is placed it in rinse bath on preset placement position.It is under normal conditions manipulator once while grabs several A body feed tank is placed on together on the default placement position in rinse bath, and the particular number of body feed tank is placed according in rinse bath Block board on item determines.
In the present embodiment, rinse bath includes rinse bath ontology 1, mainly by a horizontal direction place bottom plate 2 and enclose The side wall 32 for being wound on the vertical direction on its periphery forms, and side wall 32 has 4, and the wherein side of bottom plate 2 slightly tilts down, lower Side is equipped with sewage draining exit (being not drawn into figure), is convenient for blowdown.Bottom plate 2 and side wall 32 are welded to connect, and are welded between the both ends of side wall 32 It connects in succession, a cavity is collectively formed in bottom plate 2 and side wall 32, for placing body feed tank.The accident collision pair of external force in order to prevent Rinse bath ontology 1 damages, and is also respectively provided with a protective plate 33 positioned at the outside of the side wall 32 of the left and right sides, protective plate 33 Bottom end and bottom plate 2 are welded to connect, and the both ends of protective plate 33 are welded with the side wall 32 for being located at rear and front end respectively.
The top of 1 inner bottom plating 2 of rinse bath ontology is equipped with a horizontal positioned web plate 3, and spiral shell is respectively used in the rear and front end on web plate 3 Silk is fixedly connected with the first placement item 4 for extending and being parallel to each other along its left and right directions, the middle part screw on web plate 3 It is fixedly connected there are two the second placement item 5 parallel with the first placement item 4, is stayed between web plate 3 and the side wall 32 of rinse bath ontology 1 There is gap, in order to adjust web plate 3 as needed in the relative positional relationship in rinse bath ontology 1 between side wall 32.
Second places item 5 as string configuration, including a fixed strip 51, is screwed on web plate 3;Fixed strip 51 On both ends be respectively provided with a first baffle 52, the middle part on fixed strip 51 be equipped with a second baffle 53;First baffle 52 with A supporting block 54 is equipped between second baffle 53.The structure that first structure for placing item 4 places item 5 with second is essentially identical. When body feed tank 100 is placed in rinse bath ontology 1, it is located in the second placement item 5 and first and places on item 4, and put with second Corresponding baffle limiting on first baffle 52 and second baffle 53 limit on item 5 and the first placement item 4 is set (not draw in figure Out).The placement location of 4 body feed tanks 100 is equipped in the present embodiment altogether, i.e., can once be grabbed simultaneously by manipulator and place 4 A body feed tank 100 is cleaned in rinse bath on preset placement location (with reference to Fig. 7 and Fig. 1).
Because of the influence that the accuracy of manufacture of rinse bath and manipulator, installation are horizontal, the default placement location of body feed tank 100 with By, there are error, needing that multiple position detecting switch are arranged on a robotic arm between the actual placement of manipulator operation, Programmed logic is complicated, operates very inconvenient.
Therefore, in order to reduce the position detecting switch of manipulator, simplify programmed logic, easy to operate, the present embodiment setting Front-and-back adjusting device for web plate 3 to be moved forward and backward and the left and right adjusting dress for being used to moving left and right web plate 3 It sets, adjusts the placement location of body feed tank 100 and the placement location of manipulator by adjusting front and back and the left-right position of web plate 3 Match.
The front-and-back adjusting device includes horizontally disposed forward-backward adjustment bolts 6, and the through-hole on 5 side of item is placed with second 7 are threadedly coupled;Front and back locking nut 8 is socketed on forward-backward adjustment bolts 6, and is located at the head and second of forward-backward adjustment bolts 6 It places between item 5;It further include being located between two second placement items 5, and be fixedly connected with positioning plate 9 on a base plate 2, front and back tune Save bolt 6 and front and back locking nut 8 it is each there are two, be located at the two sides of positioning plate 9.
Positioning plate 9 includes the pedestal 91 being fixedly connected with bottom plate 2 and first projected upwards in the middle part of pedestal 91 protrusion 92;First protrusion 92 is stretched out from set opening 10 upwards from web plate 3;The screw rod of forward-backward adjustment bolts 6 is passed through out of through-hole 7, The end face of screw rod and the side of the first protrusion 92 offset, and when rotation adjusts forward-backward adjustment bolts 6, adjustable second places item 5 and the first relative positional relationship between protrusion 92, drive web plate 3 to move forward and backward, to adjust web plate 3 in rinse bath Front-rear position, and limited by opening 10.
Be described as follows by taking situation in Fig. 4 as an example: the forward-backward adjustment bolts 6 on the right are first unscrewed, then the front and back on the left side is adjusted Bolt 6 is tightened, and since fixed plate 9 is that fixation is motionless on a base plate 2, the second placement item 5 is fixed on web plate 3, before the left side The right-hand end for adjusting 6 screw rod of bolt afterwards withstands the first protrusion 92, and web plate 3 will move to the left, to drive first to place Item 4 and the second placement item 5 move to left simultaneously, and the placement location of body feed tank 100 also moves to the left accordingly.
The left and right adjusting device, including left and right locating piece 11, vertical welding are fixed on web plate 3;Left and right adjusting bolt 12 And left and right locking nut 13;The side of left and right locating piece 11 is equipped with tapped through hole 14, and the screw rod of left and right adjusting bolt 12 is from a left side The Inside To Outside of right locating piece 11 passes through above-mentioned tapped through hole 14, and the end of screw rod and the inner sidewall 15 of rinse bath offset;Spiral shell Mother 13 is set to the outside of left and right locating piece 11, is socketed on left and right adjusting bolt 12;When rotation adjusts left and right adjusting bolt 12 When, the distance between adjustable left and right locating piece 11 and inner sidewall 15 drive web plate 3 to move left and right in rinse bath, from And adjust left-right position of the web plate 3 in rinse bath.
There are four front-and-back adjusting device is set altogether, it is located at the four corners of web plate 3.
It is described as follows by taking situation in Fig. 3 as an example: first being loosened the left and right adjusting bolt 12 in left side is left-handed, then by right side 12 dextrorotation of left and right adjusting bolt tightened, the right part of left and right adjusting bolt 12 will withstand inner sidewall 15 and make web plate 3 It moves to the left.
As a further improvement, the up and down adjustment device for moving up and down web plate 3 is additionally provided in rinse bath, Including upper and lower locating piece 16, the inner sidewall 15(for being fixed on rinse bath ontology 1 is the inner wall of side wall 32) on;Up and down adjustment block 17, it is made of a horizontally disposed transverse slat 18 and a vertically disposed vertical plate 19;One end of transverse slat 18 and the top of vertical plate 19 are hung down Direct-connected to connect, up and down adjustment block 17 is structure as a whole;Transverse slat 18 is equipped with the threaded hole (being not drawn into figure) of a vertical direction, the spiral shell One bolt 20 is installed in pit, a locking nut 21 is also arranged on the screw rod of bolt 20, which is located at transverse slat 18 upside;The upper side of vertical plate 19 is equipped with waist-shaped hole 22, and clamping screw 23 passes through waist-shaped hole 22 and upper and lower locating piece 16 It is threadedly coupled and fixes, clamping screw 23 and waist-shaped hole 22 are respectively provided with 2;The lower end side of vertical plate 19 is equipped with a card slot 24, net The fixation that is connected together is inserted into card slot 24 in the rear and front end of plate 3 respectively.
Up and down adjustment device is set to the front-end and back-end of web plate 3;The rear and front end of web plate 3 is respectively provided with two up and down adjustments Device.
As a further improvement, it is additionally provided with support and dipping control in the middle part of rinse bath, is used to support web plate 3 Middle part and high low adjustment can also prevent the middle part of web plate 3 from sinking, increase its intensity;Support and dipping control include branch Dagger 25, pressing plate 26 and fixed screw 27;Pressing plate 26 is fixed on the pedestal 91 of positioning plate 9 by fixed screw 27;Pressing plate 26 On be additionally provided with threaded hole 28, the lower end of support column 25, which is equipped with, passes through spiral shell with the matched screw thread of threaded hole 28, the lower end of support column 25 Pit 28 is threadedly coupled fixation with pedestal 91, and the upper end of support column 25 is equipped with annular protrusion 29, the upper end of the annular protrusion 29 Face is withstood on the lower surface of web plate 3, and the top of support column 25 is stretched out from the aperture 30 on web plate 3;On web plate 3 with fixed screw Adjustment hole 31 is equipped at 27 corresponding positions.Fixed screw 27 can be adjusted with screwdriver by adjustment hole 31, pressing plate 26 Effect is its high and low position can be adjusted on the top of support column 25 by screwdriver, to adjust for locking support column 25 The high and low position of web plate 3.
Above embodiments and attached drawing are merely to illustrate the technical solution of the utility model, not constitute to the utility model Limitation, it should be noted that those of ordinary skill in the art can modify to technical solution documented by previous embodiment, Or part of or all technical features are equivalently replaced, and these are modified or replaceed should be included in the utility model In the range of claims protection.

Claims (9)

1. a kind of rinse bath, including rinse bath ontology (1), it is horizontal that the top of rinse bath ontology (1) inner bottom plating (2) is equipped with one The web plate (3) of placement, the rear and front end on the web plate (3) are respectively fixedly connected with one and extend along its left and right directions and mutually Parallel first places item (4), and the middle part on the web plate (3) is fixedly connected parallel there are two item (4) are placed with described first Second place item (5), it is characterised in that: be additionally provided in the rinse bath for the web plate (3) to be moved forward and backward Front-and-back adjusting device and the left and right adjusting device for being used to move left and right the web plate (3).
2. rinse bath according to claim 1, it is characterised in that: the front-and-back adjusting device includes horizontally disposed front and back It adjusts bolt (6), is threadedly coupled with the through-hole (7) on second placement item (5) side;Front and back locking nut (8) is socketed on front and back It adjusts on bolt (6), and is located at the head of forward-backward adjustment bolts (6) and second and places between item (5);And it is located at two second It places between item (5), and the positioning plate (9) being fixedly connected on the bottom plate (2), the forward-backward adjustment bolts (6) and front and back There are two locking nut (8) is each, it is located at the two sides of the positioning plate (9);Described second places item (5) as strip knot Structure, including a fixed strip (51), are screwed on web plate (3);Both ends on the fixed strip (51) are respectively provided with one First baffle (52), the middle part on the fixed strip (51) are equipped with a second baffle (53);First baffle (52) and second gear A supporting block (54) is equipped between plate (53).
3. rinse bath according to claim 2, it is characterised in that: the positioning plate (9) includes fixed with the bottom plate (2) The pedestal (91) of connection and first raised (92) projected upwards in the middle part of pedestal (91);First raised (92) are from web plate (3) it is stretched out upwards at set opening (10) on;The screw rod of the forward-backward adjustment bolts (6) is passed through out of through-hole (7), the end of screw rod The side of face and first raised (92) offsets, and when rotating adjusting forward-backward adjustment bolts (6) simultaneously, adjustable second is put The relative positional relationship between item (5) and first raised (92) is set, drives web plate (3) to move forward and backward, to adjust web plate (3) Front-rear position in rinse bath, and limited by opening (10).
4. rinse bath according to claim 1, it is characterised in that: the left and right adjusting device includes left and right locating piece (11), it is vertically fixed on web plate (3);Left and right adjusting bolt (12) and left and right locking nut (13);The left and right locating piece (11) side is equipped with tapped through hole (14), and the inside of screw rod from the left and right locating piece (11) of left and right adjusting bolt (12) is outside Side passes through above-mentioned tapped through hole (14), and the end of the screw rod and the inner sidewall (15) of rinse bath offset;The nut (13) sets It is placed in the outside of left and right locating piece (11), is socketed on left and right adjusting bolt (12);When rotation adjusts left and right adjusting bolt (12) When, the distance between adjustable left and right locating piece (11) and inner sidewall (15) drive web plate (3) to make left and right in rinse bath and move It is dynamic, to adjust left-right position of the web plate (3) in rinse bath.
5. rinse bath according to claim 4, it is characterised in that: there are four the front-and-back adjusting device is set altogether, difference position At the four corners of web plate (3).
6. rinse bath according to claim 1, it is characterised in that: be additionally provided in the rinse bath for by the web plate (3) the up and down adjustment device moved up and down, including upper and lower locating piece (16), are fixed on the inner sidewall of rinse bath ontology (1) (15) on;Up and down adjustment block (17) is made of, transverse slat a horizontally disposed transverse slat (18) and a vertically disposed vertical plate (19) (18) one end is vertical with the top of vertical plate (19) to be connect, and up and down adjustment block (17) is structure as a whole;It is set on the transverse slat (18) There is the threaded hole of a vertical direction, be equipped in the threaded hole bolt (20), is also arranged with a lock on the screw rod of bolt (20) Tight nut (21), the locking nut (21) are located at the upside of the transverse slat (18);The upper side of vertical plate (19) is equipped with waist type Hole (22), clamping screw (23) pass through waist-shaped hole (22) and are threadedly coupled fixation with upper and lower locating piece (16);The lower end of vertical plate (19) Side is equipped with a card slot (24), and the fixation that is connected together is inserted into card slot (24) in the rear and front end of the web plate (3) respectively.
7. rinse bath according to claim 6, it is characterised in that: the up and down adjustment device is set to the web plate (3) Front-end and back-end;The rear and front end of the web plate (3) is respectively provided with two up and down adjustment devices.
8. rinse bath according to claim 1-7, it is characterised in that: be additionally provided with branch in the middle part of the rinse bath Support and dipping control, be used to support web plate (3) middle part and high low adjustment;The support and dipping control include branch Dagger (25), pressing plate (26) and fixed screw (27);The pressing plate (26) is fixed on positioning plate (9) by fixed screw (27) On pedestal (91);It is additionally provided on pressing plate (26) threaded hole (28), the lower end of the support column (25) is equipped with and threaded hole (28) The screw thread matched, the lower end of support column (25) pass through threaded hole (28) and are threadedly coupled fixation, the support column (25) with pedestal (91) Upper end be equipped with annular protrusion (29), the upper end of the annular protrusion (29) withstands on the lower surface of web plate (3), the support column (25) top is stretched out at the aperture (30) on web plate (3);Position corresponding with fixed screw (27) on the web plate (3) Place is equipped with adjustment hole (31).
9. rinse bath according to claim 1, it is characterised in that: the rinse bath ontology (1) includes one laterally disposed Bottom plate (2) and four upright side plates (32), the end of four side plates (32) is welded two-by-two forms an annular, the annular ring It is wound on the periphery of the bottom plate (2), the bottom end and bottom plate (2) of side plate (32), which are welded to connect, to be fixed, so that four side plates (32) one is collectively formed with bottom plate (2) for placing the cavity of body feed tank.
CN201821802353.3U 2018-11-02 2018-11-02 A kind of rinse bath Active CN209174483U (en)

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Application Number Priority Date Filing Date Title
CN201821802353.3U CN209174483U (en) 2018-11-02 2018-11-02 A kind of rinse bath

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Application Number Priority Date Filing Date Title
CN201821802353.3U CN209174483U (en) 2018-11-02 2018-11-02 A kind of rinse bath

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Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN111243996A (en) * 2020-03-23 2020-06-05 北京半导体专用设备研究所(中国电子科技集团公司第四十五研究所) Positioning device in wafer cleaning equipment
CN112811856A (en) * 2020-12-31 2021-05-18 万建建设有限公司 Novel energy-saving environment-friendly building material and processing method thereof

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN111243996A (en) * 2020-03-23 2020-06-05 北京半导体专用设备研究所(中国电子科技集团公司第四十五研究所) Positioning device in wafer cleaning equipment
CN111243996B (en) * 2020-03-23 2023-03-14 北京半导体专用设备研究所(中国电子科技集团公司第四十五研究所) Positioning device in wafer cleaning equipment
CN112811856A (en) * 2020-12-31 2021-05-18 万建建设有限公司 Novel energy-saving environment-friendly building material and processing method thereof
CN112811856B (en) * 2020-12-31 2023-01-03 贝林集团有限公司 Energy-saving environment-friendly building material processing equipment

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