CN114602921A - Special frame of portable film box cleaning machine film box - Google Patents

Special frame of portable film box cleaning machine film box Download PDF

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Publication number
CN114602921A
CN114602921A CN202210318213.3A CN202210318213A CN114602921A CN 114602921 A CN114602921 A CN 114602921A CN 202210318213 A CN202210318213 A CN 202210318213A CN 114602921 A CN114602921 A CN 114602921A
Authority
CN
China
Prior art keywords
box
frame
main body
wafer box
wafer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CN202210318213.3A
Other languages
Chinese (zh)
Inventor
张宏杰
杨路肖
刘建伟
武卫
刘姣龙
祝斌
袁祥龙
雍琪浩
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Zhonghuan Advanced Semiconductor Materials Co Ltd
Original Assignee
Zhonghuan Advanced Semiconductor Materials Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Zhonghuan Advanced Semiconductor Materials Co Ltd filed Critical Zhonghuan Advanced Semiconductor Materials Co Ltd
Priority to CN202210318213.3A priority Critical patent/CN114602921A/en
Publication of CN114602921A publication Critical patent/CN114602921A/en
Pending legal-status Critical Current

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Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B08—CLEANING
    • B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
    • B08B13/00—Accessories or details of general applicability for machines or apparatus for cleaning
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65D—CONTAINERS FOR STORAGE OR TRANSPORT OF ARTICLES OR MATERIALS, e.g. BAGS, BARRELS, BOTTLES, BOXES, CANS, CARTONS, CRATES, DRUMS, JARS, TANKS, HOPPERS, FORWARDING CONTAINERS; ACCESSORIES, CLOSURES, OR FITTINGS THEREFOR; PACKAGING ELEMENTS; PACKAGES
    • B65D11/00—Containers having bodies formed by interconnecting or uniting two or more rigid, or substantially rigid, components made wholly or mainly of plastics material
    • B65D11/14—Containers having bodies formed by interconnecting or uniting two or more rigid, or substantially rigid, components made wholly or mainly of plastics material of skeleton or apertured construction, e.g. baskets or carriers made up of interconnected spaced bands, rods, or strips
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65D—CONTAINERS FOR STORAGE OR TRANSPORT OF ARTICLES OR MATERIALS, e.g. BAGS, BARRELS, BOTTLES, BOXES, CANS, CARTONS, CRATES, DRUMS, JARS, TANKS, HOPPERS, FORWARDING CONTAINERS; ACCESSORIES, CLOSURES, OR FITTINGS THEREFOR; PACKAGING ELEMENTS; PACKAGES
    • B65D25/00—Details of other kinds or types of rigid or semi-rigid containers
    • B65D25/02—Internal fittings
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65D—CONTAINERS FOR STORAGE OR TRANSPORT OF ARTICLES OR MATERIALS, e.g. BAGS, BARRELS, BOTTLES, BOXES, CANS, CARTONS, CRATES, DRUMS, JARS, TANKS, HOPPERS, FORWARDING CONTAINERS; ACCESSORIES, CLOSURES, OR FITTINGS THEREFOR; PACKAGING ELEMENTS; PACKAGES
    • B65D25/00—Details of other kinds or types of rigid or semi-rigid containers
    • B65D25/02—Internal fittings
    • B65D25/10—Devices to locate articles in containers
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65D—CONTAINERS FOR STORAGE OR TRANSPORT OF ARTICLES OR MATERIALS, e.g. BAGS, BARRELS, BOTTLES, BOXES, CANS, CARTONS, CRATES, DRUMS, JARS, TANKS, HOPPERS, FORWARDING CONTAINERS; ACCESSORIES, CLOSURES, OR FITTINGS THEREFOR; PACKAGING ELEMENTS; PACKAGES
    • B65D25/00—Details of other kinds or types of rigid or semi-rigid containers
    • B65D25/20—External fittings
    • B65D25/24—External fittings for spacing bases of containers from supporting surfaces, e.g. legs
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65D—CONTAINERS FOR STORAGE OR TRANSPORT OF ARTICLES OR MATERIALS, e.g. BAGS, BARRELS, BOTTLES, BOXES, CANS, CARTONS, CRATES, DRUMS, JARS, TANKS, HOPPERS, FORWARDING CONTAINERS; ACCESSORIES, CLOSURES, OR FITTINGS THEREFOR; PACKAGING ELEMENTS; PACKAGES
    • B65D7/00—Containers having bodies formed by interconnecting or uniting two or more rigid, or substantially rigid, components made wholly or mainly of metal
    • B65D7/12—Containers having bodies formed by interconnecting or uniting two or more rigid, or substantially rigid, components made wholly or mainly of metal characterised by wall construction or by connections between walls
    • B65D7/14—Containers having bodies formed by interconnecting or uniting two or more rigid, or substantially rigid, components made wholly or mainly of metal characterised by wall construction or by connections between walls of skeleton or like apertured construction, e.g. baskets or carriers formed of wire mesh, of interconnected bands, bars, or rods, or of perforated sheet metal

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)

Abstract

The invention discloses a special frame for a wafer box of a portable wafer box cleaning machine, which comprises a fixing frame main body frame, wherein a wafer box main body placing area is arranged on the inner side of the fixing frame main body frame, wafer box main body placing rails are arranged on two sides of the top of the wafer box main body placing area, a wafer box cover placing area is arranged below the wafer box main body placing area, wafer box cover inclined rails are arranged on two sides of the top of the wafer box cover placing area, and a wafer box cover blocking structure is arranged on one side of the wafer box cover placing area. This special frame of portable film box cleaning machine film box places the district and the district is placed to the film box lid through vertically arranging the setting at the inboard film box main part of mount main body frame, can carry out the film box multilayer and place, and mount main body frame surface is hollow out construction simultaneously, is convenient for carry out the washing of pure water and the operation of the stoving process that spin-dries, can effectually reduce the overall dimension and the area of special frame, is favorable to the rational utilization change in space.

Description

Special frame of portable film box cleaning machine film box
Technical Field
The invention relates to the technical field of silicon wafer production, in particular to a wafer box special frame of a portable wafer box cleaning machine.
Background
On a silicon wafer with large grains of rice, 16 ten thousand transistors can be integrated, which is another milestone of scientific and technical progress, the silicon element with the content of 25.8 percent in the crusta provides an inexhaustible source for the production of monocrystalline silicon, and as the silicon element is one of the most abundant elements in the crusta, for the products of solar cells which are destined to enter large-scale markets, the storage advantage is one of the reasons that the silicon becomes the main material of photovoltaic, the chip made of the silicon wafer is the famous 'miracle' and has remarkable operational capability, the silicon wafer needs to be stored and placed through a wafer box during production, and therefore the wafer box needs to be cleaned and sterilized before use.
At present, along with the increase of the size of a silicon wafer, the wafer box cleaning machine is large in size, and a placing rack for cleaning the wafer box cleaning machine and the wafer box is large in size, so that the occupied area is large, the reasonable utilization of the space is not facilitated, and meanwhile, the stability is poor due to stress easily in the cleaning process.
Disclosure of Invention
The invention aims to provide a special wafer box frame of a portable wafer box cleaning machine, which solves the problems that the wafer box cleaning machine is large in size along with the increase of the size of a silicon wafer, a placing frame for cleaning equipment of the wafer box cleaning machine and the wafer box is large in size, occupied area is large, space is not beneficial to reasonable utilization, and stability is poor easily caused by stress in the cleaning process.
In order to achieve the purpose, the invention provides the following technical scheme: the utility model provides a special frame of portable spool box cleaning machine spool box, includes mount main body frame, mount main body frame's inboard is provided with the spool box main part and places the district, the top both sides that the district was placed to the spool box main part all are provided with the spool box main part and place the track, the below that the district was placed to the spool box main part is provided with the spool box lid and places the district, the top both sides that the district was placed to the spool box lid all are provided with spool box lid slope track, one side that the district was placed to the spool box lid is provided with the spool box lid and blocks the structure, one side that the district was placed to the spool box main part is close to both ends department and all is provided with the inside bearing structure of spool box main part, the spool box lid is placed one side both ends and all is provided with the spool box main part and blocks the structure.
Preferably, the surface of the frame of the fixing frame main body is of a hollow structure, and the surface of the containing area of the box main body is provided with a flow guide opening.
Preferably, the bottom of the fixing frame main body frame is provided with a connecting seat, the bottom of the connecting seat is fixedly provided with a universal wheel, and the universal wheel is provided with a brake.
Preferably, the two sides of the connecting seat are provided with limiting plates, the surfaces of the limiting plates are provided with limiting holes, and the inner sides of the limiting holes are movably provided with limiting bolts.
Preferably, the both sides of the bottom of the fixing frame main body frame are provided with loop bars, the inner sides of the loop bars are movably provided with lifting rods, and the outer side surfaces of the lifting rods and the inner walls of the loop bars are provided with threads.
Preferably, the bottom of lifter all rotates and installs the locating plate, the constant head tank has been seted up to the bottom surface of locating plate, and the inboard of constant head tank all fixed mounting have the location sucking disc
Preferably, the area is placed to the spool box main part and the area is placed to the spool box lid and vertically arranges along the mount main part frame is inboard, and the spool box main part blocks that structure quantity is four.
Compared with the prior art, the invention has the beneficial effects that:
this special frame of portable spool box cleaning machine spool box carries out the in-process of daily use, places the district and the district is placed to the spool box lid through vertically arranging the setting at the inboard spool box main part of mount main body frame, can carry out and place the spool box multilayer, and mount main body frame surface is hollow out construction simultaneously, is convenient for carry out the washing of pure water and the operation of the stoving process of spin-drying, whole size and the area that can effectual reduction special frame are favorable to the rational utilization in infrastructure in space.
This special frame of portable spool box cleaning machine spool box carries out daily in-process, and the artifical lifter of wrench movement of accessible carries out real-time extension at the inboard screw thread wrench movement drive of loop bar for locating plate and location sucking disc can carry out real time contact with the cleaning plane and adsorb fixedly, avoid the atress to take place to empty among the cleaning process, greatly increased cleaning process's overall stability.
Drawings
FIG. 1 is a perspective view of the present invention;
FIG. 2 is a front view of the present invention;
FIG. 3 is a bottom view of the positioning plate of the present invention;
FIG. 4 is a schematic view of the connecting structure of the loop bar and the lifting bar of the present invention;
fig. 5 is a schematic view of an installation structure of the connecting seat and the limiting plate of the invention.
In the figure: 1. a fixed frame main body frame; 2. a cassette main body placing area; 3. a cassette main body placing rail; 4. a cassette body blocking structure; 5. a cassette body interior support structure; 6. a box cover placing area of the box; 7. the box cover of the film box inclines the orbit; 8. a cassette cover blocking structure; 9. a brake; 10. a universal wheel; 11. positioning a plate; 12. positioning a sucker; 13. positioning a groove; 14. a loop bar; 15. a lifting rod; 16. a thread; 17. a flow guide opening; 18. a limiting hole; 19. a limiting plate; 20. a connecting seat; 21. and a limiting bolt.
Detailed Description
The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.
Referring to fig. 1-5, the present invention provides a technical solution: a portable special frame for a wafer box of a wafer box cleaning machine comprises a fixed frame main body frame 1, a wafer box main body placing area 2 is arranged on the inner side of the fixed frame main body frame 1, wafer box main body placing rails 3 are arranged on two sides of the top of the wafer box main body placing area 2, a wafer box cover placing area 6 is arranged below the wafer box main body placing area 2, wafer box cover inclined rails 7 are arranged on two sides of the top of the wafer box cover placing area 6, the rails are arranged to be inclined, the inner side of the high-speed turning road is mainly simulated to be low and the outer side is high, partial centrifugal force is counteracted by gravity, a wafer box cover blocking structure 8 is arranged on one side of the wafer box cover placing area 6, a wafer box main body inner supporting structure 5 is arranged on one side of the wafer box main body placing area 2 close to two ends, wafer box main body blocking structures 4 are arranged on two ends of one side of the wafer box cover placing area 6, a wafer box to be cleaned can slide into the top of the main body placing area 2 along the wafer box main body placing rails 3, block structure 4 through four spool box main parts and be used for blockking that the spool box slides, two spool box main part internal support structures 5 in both sides are used for fixed inner structure, then will wait to wash the spool box lid and put into along the slope track on the spool box lid places district 6, carry out blockking of lid by two vertical structures that block, 1 surface of mount main body frame all adopts fretwork formula structure, and the spool box main part is placed the surface of district 2 and all is provided with water conservancy diversion opening 17, it is more convenient to make the in-process of pure water washing and drying, it is more abundant to make abluent process simultaneously.
The bottom of the fixing frame main body frame 1 is provided with a connecting seat 20, the bottom of the connecting seat 20 is fixedly provided with a universal wheel 10, the universal wheel 10 is provided with a brake 9, the special frame can be integrally moved to a corresponding cleaning equipment position, the moving efficiency is improved by more saving manpower and material resources, both sides of the connecting seat 20 are provided with limiting plates 19, the surfaces of the limiting plates 19 are provided with limiting holes 18, the inner sides of the limiting holes 18 are movably provided with limiting bolts 21, the connecting seat 20 and the fixing frame main body frame 1 can be installed in real time for limiting and quickly disassembling and replacing, both sides of the bottom of the fixing frame main body frame 1 are provided with loop bars 14, the inner sides of the loop bars 14 are movably provided with lifting rods 15, the outer side surfaces of the lifting rods 15 and the inner walls of the loop bars 14 are provided with threads 16, and the loop bars 14 and the lifting rods 15 can move relatively through the twisting drive of the threads 16, the external extension length of the lifting rod 15 is realized, so that the positioning sucker 12 can be contacted with the cleaning plane, the bottom ends of the lifting rod 15 are rotatably provided with the positioning plate 11, the bottom surface of the positioning plate 11 is provided with the positioning groove 13, the inner sides of the positioning groove 13 are fixedly provided with the positioning sucker 12, the adsorption capacity of the special frame and the cleaning plane can be increased, the falling caused by the washing stress can be avoided, the stability of the special frame is effectively increased, the cassette main body placing area 2 and the cassette cover placing area 6 are longitudinally arranged along the inner side of the fixing frame main body frame 1, the cassette main bodies arranged in a multilayer way can be placed, the occupied space is greatly saved, meanwhile, the number of the wafer box main bodies which can be placed is more, the number of the blocking structures 4 of the wafer box main bodies is four, the range that can block the spool box main part is more strengthened, avoids spool box to take place to sway the phenomenon of rocking.
The working principle is as follows: when silicon wafers are needed to be cleaned and placed, firstly, a wafer box to be cleaned can slide along a wafer box main body placing rail 3 to enter the top of a wafer box main body placing area 2, four wafer box main body blocking structures 4 are used for blocking the sliding of the wafer box, two wafer box main body internal supporting structures 5 on two sides are used for fixing internal structures, then a wafer box cover to be cleaned is placed on a wafer box cover placing area 6 along an inclined rail, two vertical blocking structures are used for blocking the cover, the rail is set to be an inclined structure, the rail mainly simulates the inner side low and the outer side high of a high-speed turning road, partial centrifugal force is offset by gravity, finally, a universal wheel 10 is moved to a cleaning device by a manual pushing device, the lifting rod 15 can be manually twisted on the inner side thread 16 of the loop rod 14 to be driven to extend in real time, so that the positioning plate 11 and the positioning sucker 12 can be in real-time contact with a cleaning plane for adsorption and fixation, the phenomenon that the cleaning process is toppled under stress is avoided, and the overall stability of the cleaning process is greatly improved.
It is noted that, herein, relational terms such as first and second, and the like may be used solely to distinguish one entity or action from another entity or action without necessarily requiring or implying any actual such relationship or order between such entities or actions. Also, the terms "comprises," "comprising," or any other variation thereof, are intended to cover a non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements does not include only those elements but may include other elements not expressly listed or inherent to such process, method, article, or apparatus.
Although embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that various changes, modifications, substitutions and alterations can be made in these embodiments without departing from the principles and spirit of the invention, the scope of which is defined in the appended claims and their equivalents.

Claims (7)

1. The utility model provides a special frame of portable spool box cleaning machine spool box, includes mount main part frame (1), its characterized in that: the inboard of mount main part frame (1) is provided with the spool box main part and places district (2), the top both sides that the spool box main part was placed district (2) all are provided with the spool box main part and place track (3), the below that the spool box main part was placed district (2) is provided with the spool box lid and places district (6), the top both sides that the spool box lid was placed district (6) all are provided with spool box lid slope track (7), one side that the spool box lid was placed district (6) is provided with the spool box lid and blocks structure (8), one side that the spool box main part was placed district (2) is close to both ends department and all is provided with spool box main part inner support structure (5), the spool box lid is placed district (6) one side both ends and all is provided with the spool box main part and blocks structure (4).
2. The special frame for the wafer box of the portable wafer box cleaning machine according to claim 1, characterized in that: the surface of the fixing frame main body frame (1) is of a hollow structure, and the surface of the box main body placing area (2) is provided with a flow guide opening (17).
3. The special frame for the wafer box of the portable wafer box cleaning machine according to claim 1, characterized in that: the fixing frame is characterized in that a connecting seat (20) is arranged at the bottom of the fixing frame main body frame (1), a universal wheel (10) is fixedly mounted at the bottom of the connecting seat (20), and a brake (9) is arranged on the universal wheel (10).
4. The special frame for the wafer box of the portable wafer box cleaning machine according to claim 3, characterized in that: limiting plates (19) are arranged on two sides of the connecting seat (20), limiting holes (18) are formed in the surfaces of the limiting plates (19), and limiting bolts (21) are movably mounted on the inner sides of the limiting holes (18).
5. The special frame for the wafer box of the portable wafer box cleaning machine according to claim 1, characterized in that: both sides of the bottom of the fixing frame main body frame (1) are provided with sleeve rods (14), the inner sides of the sleeve rods (14) are movably provided with lifting rods (15), and the outer side surfaces of the lifting rods (15) and the inner walls of the sleeve rods (14) are provided with threads (16).
6. The special frame for the wafer box of the portable wafer box cleaning machine according to claim 5, wherein: the bottom of lifter (15) all rotates and installs locating plate (11), locating groove (13) have been seted up to the bottom surface of locating plate (11), and the inboard of locating groove (13) all fixed mounting have location sucking disc (12).
7. The special frame for the wafer box of the portable wafer box cleaning machine according to claim 1, characterized in that: district (2) is placed to the spool box main part and spool box lid is placed district (6) and vertically arranges along mount main part frame (1) inboard, and the spool box main part blocks structure (4) quantity and is four.
CN202210318213.3A 2022-03-29 2022-03-29 Special frame of portable film box cleaning machine film box Pending CN114602921A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN202210318213.3A CN114602921A (en) 2022-03-29 2022-03-29 Special frame of portable film box cleaning machine film box

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN202210318213.3A CN114602921A (en) 2022-03-29 2022-03-29 Special frame of portable film box cleaning machine film box

Publications (1)

Publication Number Publication Date
CN114602921A true CN114602921A (en) 2022-06-10

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CN202210318213.3A Pending CN114602921A (en) 2022-03-29 2022-03-29 Special frame of portable film box cleaning machine film box

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN115870265A (en) * 2022-12-14 2023-03-31 杭州中欣晶圆半导体股份有限公司 Cleaning device and method for silicon wafer box

Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1802222A (en) * 2003-04-10 2006-07-12 安堤格里斯公司 Wafer carrier cleaning system
CN104085552A (en) * 2014-07-02 2014-10-08 无锡大拇指机电科技有限公司 Automatic cover distributing and feeding machine
CN108662375A (en) * 2018-07-22 2018-10-16 佛山拧西乐信息技术有限公司 A kind of lift communication apparatus support device
CN208496952U (en) * 2018-06-29 2019-02-15 格林美（武汉）新能源汽车服务有限公司 Bar code case rack
CN209281538U (en) * 2019-01-22 2019-08-20 长沙大荒机器人有限公司 Product rack of vending machine and automatically vending system
CN211075977U (en) * 2019-11-13 2020-07-24 鹤山市胜利厨具有限公司 Disinfection cabinet movable vehicle convenient to take
CN214732087U (en) * 2021-02-04 2021-11-16 三菱电机(广州)压缩机有限公司 Workpiece tray and unpowered transmission mechanism
CN217222864U (en) * 2022-03-29 2022-08-19 中环领先半导体材料有限公司 Special frame of portable film box cleaning machine film box

Patent Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1802222A (en) * 2003-04-10 2006-07-12 安堤格里斯公司 Wafer carrier cleaning system
CN104085552A (en) * 2014-07-02 2014-10-08 无锡大拇指机电科技有限公司 Automatic cover distributing and feeding machine
CN208496952U (en) * 2018-06-29 2019-02-15 格林美（武汉）新能源汽车服务有限公司 Bar code case rack
CN108662375A (en) * 2018-07-22 2018-10-16 佛山拧西乐信息技术有限公司 A kind of lift communication apparatus support device
CN209281538U (en) * 2019-01-22 2019-08-20 长沙大荒机器人有限公司 Product rack of vending machine and automatically vending system
CN211075977U (en) * 2019-11-13 2020-07-24 鹤山市胜利厨具有限公司 Disinfection cabinet movable vehicle convenient to take
CN214732087U (en) * 2021-02-04 2021-11-16 三菱电机(广州)压缩机有限公司 Workpiece tray and unpowered transmission mechanism
CN217222864U (en) * 2022-03-29 2022-08-19 中环领先半导体材料有限公司 Special frame of portable film box cleaning machine film box

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN115870265A (en) * 2022-12-14 2023-03-31 杭州中欣晶圆半导体股份有限公司 Cleaning device and method for silicon wafer box

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