CN114914330A - 一种hjt异质结太阳能电池薄膜生产设备及工艺 - Google Patents
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Abstract
本发明公开了一种HJT异质结太阳能电池薄膜生产设备及工艺，包括正面设备组件，所述正面设备组件包括正面进出口腔与正面传输腔，所述正面传输腔侧面设置有正面i层腔与正面P层腔；反面设备组件，所述反面设备组件包括反面进出口腔与反面传输腔，所述反面传输腔侧面设置有反面i层腔与反面N层腔；翻转腔，所述翻转腔将正面传输腔与反面传输腔连接，所述翻转腔内对太阳能电池片进行翻片。本发明能够根据对太阳能电池片的异质结薄膜制备工艺要求，合理配置正面i层腔、正面P层腔、反面i层腔以及反面N层腔的数量，能够使太阳能电池片在镀膜过程中，匹配度更好更高。
Description
技术领域
本发明属于太阳能电池薄膜生产技术领域，尤其涉及一种HJT异质结太阳能电池薄膜生产设备及工艺。
背景技术
HJT异质结太阳能电池的基本原理是在N型硅片基底上采用非晶硅沉积的方式形成异质结并作为钝化层，这种结构的电池开路电压更高，效率也会相应的比较高。而HJT异质结太阳能电池薄膜制备过程复杂，需要多种工艺及相关设备的配合。
目前对于HJT异质结太阳能电池薄膜的制备，电池正面i层及P层镀膜时间较短，而反面i层、N层镀膜时间较长，因在实际生产中电池正反面为分开镀膜，而工艺腔在镀膜时各膜层工艺腔不能通用，导致工艺匹配度不好。
另外电池片正反面分开镀膜，正面镀膜完成后，须返回大气，翻片完成后，再进入设备中进行反面镀膜，导致电池片有一定污染，降低了电池片的光电转换效率。
发明内容
本发明克服了现有技术的不足，提供一种HJT异质结太阳能电池薄膜生产设备及工艺，以解决现有技术中存在的问题。
为达到上述目的，本发明采用的技术方案为：一种HJT异质结太阳能电池薄膜生产设备，包括
正面设备组件，所述正面设备组件包括正面进出口腔与正面传输腔，所述正面传输腔侧面设置有正面i层腔与正面P层腔，所述正面i层腔对太阳能电池片正面进行i层镀膜，所述正面P层腔对太阳能电池片正面进行p层镀膜；
反面设备组件，所述反面设备组件包括反面进出口腔与反面传输腔，所述反面传输腔侧面设置有反面i层腔与反面N层腔，所述反面i层腔对太阳能电池片反面进行i层镀膜，所述反面N层腔对太阳能电池片反面进行N层镀膜；
翻转腔，所述翻转腔将正面传输腔与反面传输腔连接，所述翻转腔内对太阳能电池片进行翻片。
本发明一个较佳实施例中，所述正面进出口腔与所述正面传输腔内部相连通，太阳能电池片经正面进出口腔进入正面传输腔内。
本发明一个较佳实施例中，所述反面进出口腔与所述反面传输腔内部连通，太阳能电池片经反面进出口腔进入反面传输腔内。
本发明一个较佳实施例中，所述正面传输腔与所述反面传输腔内均设置有真空传输手臂，所述真空传输手臂对太阳能电池片进行抓取传输。
本发明一个较佳实施例中，所述正面设备组件、反面设备组件以及翻转腔内均为真空环境。
本发明还公开了一种HJT异质结太阳能电池薄膜生产工艺，包括以下步骤：
S1、将太阳能电池片送入正面进出口腔内，等候加工；
S2、对正面设备组件、反面设备组件以及翻转腔进行全线抽真空，保证各腔室内处于真空状态；
S3、正面传输腔内的真空传输手臂将太阳能电池片依次送入正面i层腔与正面P层腔，对太阳能电池片的正面进行镀膜；
S4、正面传输腔内的真空传输手臂将正面镀膜后的太阳能电池片送入翻转腔内，将处于正面的太阳能电池片翻转为反面；
S5、反面传输腔内的真空传输手臂将处于反面的太阳能电池片依次送入反面i层腔与反面N层腔内，对太阳能电池片的反面进行镀膜；
S6、太阳能电池片反面镀膜完成后，反面传输腔内的真空传输手臂将太阳能电池片传输至反面进出口腔，破真空将太阳能电池片取出即可。
本发明解决了背景技术中存在的缺陷，本发明具备以下有益效果：
(1)本发明能够根据对太阳能电池片的异质结薄膜制备工艺要求，合理配置正面i层腔、正面P层腔、反面i层腔以及反面N层腔的数量，能够使太阳能电池片在镀膜过程中，匹配度更好更高；
(2)在正面设备组件与反面设备组件之间增设翻转腔，并且在操作过程中始终处于真空状态下进行，并未暴露在大气中，能够避免太阳能电池片在翻转过程中受到污染，提高太阳能电池片的光电转换效率。
附图说明
下面结合附图和实施例对本发明进一步说明；
图1为本发明优选实施例的整体结构示意图；
图2为本发明优选实施例的流程图；
具体实施方式
以下将以图式揭露本发明的多个实施方式，为明确说明起见，许多实务上的细节将在以下叙述中一并说明。然而，应了解到，这些实务上的细节不应用以限制本发明。也就是说，在本发明的部分实施方式中，这些实务上的细节是非必要的。此外，为简化图式起见，一些习知惯用的结构与组件在图式中将以简单的示意的方式绘示之。
另外，在本发明中如涉及“第一”、“第二”等的描述仅用于描述目的，并非特别指称次序或顺位的意思，亦非用以限定本发明，其仅仅是为了区别以相同技术用语描述的组件或操作而已，而不能理解为指示或暗示其相对重要性或者隐含指明所指示的技术特征的数量。由此，限定有“第一”、“第二”的特征可以明示或者隐含地包括至少一个该特征。另外，各个实施例之间的技术方案可以相互结合，但是必须是以本领域普通技术人员能够实现为基础，当技术方案的结合出现相互矛盾或无法实现时应当认为这种技术方案的结合不存在，也不在本发明要求的保护范围之内。
如图1所示，一种HJT异质结太阳能电池薄膜生产设备，包括
正面设备组件，正面设备组件包括正面进出口腔与正面传输腔，正面传输腔侧面设置有正面i层腔与正面P层腔，正面i层腔对太阳能电池片正面进行i层镀膜，正面P层腔对太阳能电池片正面进行p层镀膜，正面i层腔与正面P层腔的数量可根据异质结薄膜制备工艺要求进行合理配置，加强对太阳能电池片的匹配度。
具体地，正面进出口腔与正面传输腔内部相连通，太阳能电池片经正面进出口腔进入正面传输腔内。
反面设备组件，反面设备组件包括反面进出口腔与反面传输腔，反面传输腔侧面设置有反面i层腔与反面N层腔，反面i层腔对太阳能电池片反面进行i层镀膜，反面N层腔对太阳能电池片反面进行N层镀膜，反面i层腔与反面N层腔的数量可根据异质结薄膜制备工艺要求进行合理配置，加强对太阳能电池片的匹配度。
具体地，反面进出口腔与反面传输腔内部连通，太阳能电池片经反面进出口腔进入反面传输腔内。
翻转腔，翻转腔将正面传输腔与反面传输腔连接，翻转腔内对太阳能电池片进行翻片。
进一步地，在本实施例中，正面传输腔与反面传输腔内均设置有真空传输手臂，真空传输手臂对太阳能电池片进行抓取传输。
在本实施例中，正面设备组件、反面设备组件以及翻转腔内均为真空环境，使太阳能电池片在操作过程中始终处于真空状态下进行，并未暴露在大气中，能够避免太阳能电池片在翻转过程中受到污染，提高太阳能电池片的光电转换效率。
如图2所示，一种HJT异质结太阳能电池薄膜生产工艺，包括以下步骤：
S1、将太阳能电池片送入正面进出口腔内，等候加工；
S2、对正面设备组件、反面设备组件以及翻转腔进行全线抽真空，保证各腔室内处于真空状态；
S3、正面传输腔内的真空传输手臂将太阳能电池片依次送入正面i层腔与正面P层腔，对太阳能电池片的正面进行镀膜；
S4、正面传输腔内的真空传输手臂将正面镀膜后的太阳能电池片送入翻转腔内，将处于正面的太阳能电池片翻转为反面；
S5、反面传输腔内的真空传输手臂将处于反面的太阳能电池片依次送入反面i层腔与反面N层腔内，对太阳能电池片的反面进行镀膜；
S6、太阳能电池片反面镀膜完成后，反面传输腔内的真空传输手臂将太阳能电池片传输至反面进出口腔，破真空将太阳能电池片取出即可。
总而言之，本发明能够根据对太阳能电池片的异质结薄膜制备工艺要求，合理配置正面i层腔、正面P层腔、反面i层腔以及反面N层腔的数量，能够使太阳能电池片在镀膜过程中，匹配度更好更高，而在正面设备组件与反面设备组件之间增设翻转腔，并且在操作过程中始终处于真空状态下进行，并未暴露在大气中，能够避免太阳能电池片在翻转过程中受到污染，提高太阳能电池片的光电转换效率。
以上依据本发明的理想实施例为启示，通过上述的说明内容，相关人员完全可以在不偏离本项发明技术思想的范围内，进行多样的变更以及修改。本项发明的技术性范围并不局限于说明书上的内容，必须要根据权利要求范围来确定技术性范围。
Claims (6)
1.一种HJT异质结太阳能电池薄膜生产设备，其特征在于，包括
正面设备组件，所述正面设备组件包括正面进出口腔与正面传输腔，所述正面传输腔侧面设置有正面i层腔与正面P层腔，所述正面i层腔对太阳能电池片正面进行i层镀膜，所述正面P层腔对太阳能电池片正面进行p层镀膜；
反面设备组件，所述反面设备组件包括反面进出口腔与反面传输腔，所述反面传输腔侧面设置有反面i层腔与反面N层腔，所述反面i层腔对太阳能电池片反面进行i层镀膜，所述反面N层腔对太阳能电池片反面进行N层镀膜；
翻转腔，所述翻转腔将正面传输腔与反面传输腔连接，所述翻转腔内对太阳能电池片进行翻片。
2.根据权利要求1所述的HJT异质结太阳能电池薄膜生产设备，其特征在于，所述正面进出口腔与所述正面传输腔内部相连通，太阳能电池片经正面进出口腔进入正面传输腔内。
3.根据权利要求1所述的HJT异质结太阳能电池薄膜生产设备，其特征在于，所述反面进出口腔与所述反面传输腔内部连通，太阳能电池片经反面进出口腔进入反面传输腔内。
4.根据权利要求1所述的HJT异质结太阳能电池薄膜生产设备，其特征在于，所述正面传输腔与所述反面传输腔内均设置有真空传输手臂，所述真空传输手臂对太阳能电池片进行抓取传输。
5.根据权利要求1所述的HJT异质结太阳能电池薄膜生产设备，其特征在于，所述正面设备组件、反面设备组件以及翻转腔内均为真空环境。
6.一种HJT异质结太阳能电池薄膜生产工艺，应用于权利要求1-5任一所述的HJT异质结太阳能电池薄膜生产设备，其特征在于，包括以下步骤：
S1、将太阳能电池片送入正面进出口腔内，等候加工；
S2、对正面设备组件、反面设备组件以及翻转腔进行全线抽真空，保证各腔室内处于真空状态；
S3、正面传输腔内的真空传输手臂将太阳能电池片依次送入正面i层腔与正面P层腔，对太阳能电池片的正面进行镀膜；
S4、正面传输腔内的真空传输手臂将正面镀膜后的太阳能电池片送入翻转腔内，将处于正面的太阳能电池片翻转为反面；
S5、反面传输腔内的真空传输手臂将处于反面的太阳能电池片依次送入反面i层腔与反面N层腔内，对太阳能电池片的反面进行镀膜；
S6、太阳能电池片反面镀膜完成后，反面传输腔内的真空传输手臂将太阳能电池片传输至反面进出口腔，破真空将太阳能电池片取出即可。
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| CN213388871U (zh) * | 2020-08-04 | 2021-06-08 | 隆基绿能科技股份有限公司 | 一种双面镀膜翻片装置及镀膜机 |
| CN114121732A (zh) * | 2021-11-26 | 2022-03-01 | 苏州昶明微电子科技合伙企业(有限合伙) | 一种高效电池生产工艺及设备 |
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| CN213388871U (zh) * | 2020-08-04 | 2021-06-08 | 隆基绿能科技股份有限公司 | 一种双面镀膜翻片装置及镀膜机 |
| CN114121732A (zh) * | 2021-11-26 | 2022-03-01 | 苏州昶明微电子科技合伙企业(有限合伙) | 一种高效电池生产工艺及设备 |
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