CN114894173A - Mass stiffness decoupling ring type MEMS resonator structure and trimming method - Google Patents
Mass stiffness decoupling ring type MEMS resonator structure and trimming method Download PDFInfo
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- CN114894173A CN114894173A CN202210501799.7A CN202210501799A CN114894173A CN 114894173 A CN114894173 A CN 114894173A CN 202210501799 A CN202210501799 A CN 202210501799A CN 114894173 A CN114894173 A CN 114894173A
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
- G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
- G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
- G01C19/567—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using the phase shift of a vibration node or antinode
- G01C19/5677—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using the phase shift of a vibration node or antinode of essentially two-dimensional vibrators, e.g. ring-shaped vibrators
- G01C19/5684—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using the phase shift of a vibration node or antinode of essentially two-dimensional vibrators, e.g. ring-shaped vibrators the devices involving a micromechanical structure
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
- G01C25/00—Manufacturing, calibrating, cleaning, or repairing instruments or devices referred to in the other groups of this subclass
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Abstract
The invention discloses a mass stiffness decoupling ring type MEMS resonator structure and a trimming method. The mass stiffness decoupling ring type MEMS resonator structure comprises an anchor point, a resonance ring and a supporting beam positioned between the anchor point and the resonance ring, wherein raised mass blocks are uniformly distributed in the circumferential direction of the resonance ring. According to the invention, the mode of adding the raised mass block on the resonance ring is adopted, the mass rigidity decoupling of the harmonic oscillator is realized, the equivalent vibration mass of the system is improved, the frequency of the system is reduced, the mode trimming of the harmonic oscillator can be quickly realized, and the aims of improving the sensitivity, the resolution ratio, the signal-to-noise ratio and the like of the system are finally achieved.
Description
Technical Field
The invention relates to the technical field of resonators, in particular to a mass stiffness decoupling ring type MEMS resonator structure and a trimming method.
Background
The frequency cracking is to develop a stumbling block on a high-performance gyro road, and the frequency cracking will seriously affect the sensitivity, resolution, signal-to-noise ratio and other performances of the gyro. The trimming of the ring gyroscope is always a major subject of great attention in the research field, and many research institutions are constantly searching for a design or trimming method of a new structure to solve the problem of mode mismatching caused by processing errors. The Chinese invention patent with the patent number ZL201910811367.4 provides that a mass block is removed at a corresponding position on the inner side of a resonance ring through a laser trimming method, and the situation of rigidity mismatch of a gyro driving shaft and a detection shaft is changed. In the traditional mechanical trimming process, the ring type MEMS gyroscope can only remove or add mass on the ring, so that the mass and rigidity distribution of the gyroscope harmonic oscillator can be influenced simultaneously, and the trimming process is complicated and difficult. Therefore, it is necessary to design a mass-stiffness decoupling ring MEMS resonator structure and a trimming method.
Disclosure of Invention
The invention aims to provide a mass stiffness decoupling ring type MEMS resonator structure and a trimming method, which are used for overcoming the defects in the prior art.
In order to achieve the purpose, the technical scheme adopted by the invention is as follows:
the mass and rigidity decoupling ring type MEMS resonator structure comprises an anchor point, a resonance ring and a supporting beam positioned between the anchor point and the resonance ring, wherein raised mass blocks are uniformly distributed in the circumferential direction of the resonance ring.
Further, the number of the mass blocks is a multiple of 8.
Further, the mass block is of any structure with mass.
Furthermore, the mass blocks are uniformly distributed in the circumferential direction of the resonant ring to meet the rotational symmetry condition.
The invention also provides a trimming method of the mass stiffness decoupling ring type MEMS resonator structure, which comprises the following steps:
s1, frequency cracking is determined through frequency sweep test, and the position of a low-frequency rigid shaft is judged;
s2, selecting the mass block closest to the rigid shaft to adjust, and monitoring whether the rigid shaft is aligned in real time;
and S3, after the rigid shaft is aligned, trimming the two mass blocks aligned with the rigid shaft in equal quantity at the same time until the frequency difference reaches the set requirement.
Further, the step S1 is specifically implemented by the following method:
the signal input/output end of the phase-locked amplifier is connected with the signal output/input end of the gyro, the harmonic oscillator is excited by a power supply to measure the phase and amplitude of the signal at the driving shaft end of the gyro,
if two peak values exist in the amplitude signal, the rigid shaft has a certain deflection angle, the abscissa corresponding to the peak value is the frequency value of the mode, and the difference between the two abscissas is the frequency cracking value;
if the amplitude signal has only one peak value, the rigid shaft is aligned, the frequency sweeping is continued by replacing the other rigid shaft, and the frequency difference of the two frequency sweeping is a frequency cracking value.
Further, the trimming method in step S2 includes adding a conductive adhesive in a point manner, removing a mass with a femtosecond laser, or adding a mass; if the conductive adhesive is added in a point mode, determining the position of the high-frequency rigid shaft through the step S1, and determining the mass block closest to the high-frequency rigid shaft for dispensing; if the mass is removed by the femtosecond laser, the position of the low-frequency rigid axis is determined in step S1, and the mass block closest to the high-frequency rigid axis is determined to be perforated.
Further, the step S3 of trimming the two mass blocks with the aligned rigid axes simultaneously and equally includes adding a mass block by dot-adding a conductive adhesive or removing a mass block by femtosecond laser; and if the femtosecond laser is adopted for frequency modulation, determining that two mass blocks corresponding to the low-frequency rigid shaft simultaneously punch holes.
Further, the trimming also comprises a combination of mass removal and mass addition and a combination of mass blocks.
Further, the trimming also comprises balanced trimming, wherein the balanced trimming comprises the same mass which is removed or added at four equivalent symmetrical positions simultaneously.
Compared with the prior art, the invention has the advantages that: according to the mass stiffness decoupling ring type MEMS resonator structure and the trimming method provided by the invention, the mass stiffness decoupling of the harmonic oscillator is realized by adding the raised mass block on the resonance ring, the equivalent vibration mass of the system is improved, the frequency of the system is reduced, the mode trimming of the harmonic oscillator can be quickly realized, the aims of improving the sensitivity, resolution, signal to noise ratio and the like of the system are finally achieved, meanwhile, the combined trimming is convenient and flexible, the trimming position is easy to determine, and the balance trimming is utilized.
Drawings
In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings used in the description of the embodiments or the prior art will be briefly described below, it is obvious that the drawings in the following description are only some embodiments of the present invention, and for those skilled in the art, other drawings can be obtained according to the drawings without creative efforts.
FIG. 1 is a schematic structural diagram of a mass-stiffness decoupled ring MEMS resonator according to the present invention;
FIG. 2 is a topological structure diagram of a harmonic oscillator with decoupled mass and stiffness;
FIG. 3 is a schematic diagram of a first mode and a second mode of a harmonic oscillator with decoupled mass and stiffness according to the present invention;
FIG. 4 is a schematic diagram of trimming of a harmonic oscillator combination with decoupled mass and stiffness according to the present invention;
FIG. 5 is a schematic diagram of a method for trimming a mass stiffness decoupled ring MEMS sensitive structure of the present invention;
FIG. 6 is a schematic diagram of the mode mismatch error based on quadrature detection according to the present invention.
Detailed Description
The preferred embodiments of the present invention will be described in detail below with reference to the accompanying drawings so that the advantages and features of the present invention can be more easily understood by those skilled in the art, and the scope of the present invention will be more clearly and clearly defined.
Referring to fig. 1 and 2, the embodiment discloses a mass and rigidity decoupling ring type MEMS resonator structure, wherein an overall frame is anchored at four sides, and includes an anchor point 100, a resonant ring 200, and a support beam 300 located between the anchor point 100 and the resonant ring 200, as shown in fig. 1, a typical embodiment is that convex mass blocks 400 are uniformly distributed in a circumferential direction of the resonant ring, so that a decoupling effect of mass and rigidity can be achieved, that is, the mass distribution of the structure is only affected by changing the mass on the convex mass blocks by using femtosecond laser or other mechanical trimming methods, and the rigidity of the structure is not affected.
In some embodiments, the beam width, the thickness and the angle of the protruding mass block of the gyro harmonic oscillator can be designed according to the requirements of a specific use environment, and the final performance of the gyro can be influenced by changing the parameters. In other embodiments, the number and shape of the raised masses may be varied, the topology of which is shown in FIG. 2.
In this embodiment, the number of the mass blocks is a multiple of 8, and may be 8, 16, or the like.
In this embodiment, the mass block has any structure with mass, and the shape is not limited.
In this embodiment, the mass blocks are uniformly distributed in the circumferential direction of the resonant ring to satisfy the rotational symmetry condition.
The ring type MEMS gyroscope operates in n-2 mode, and the angle between the intrinsic stiffness axes of the first mode and the second mode is 45 °, as shown in fig. 3.
As shown in FIG. 4, the raised mass blocks are numbered in sequence and are 1-16 respectively, and different matching modes are selected for trimming according to actual needs in the trimming process. According to the trimming theory, the trimming effect on the raised mass blocks at 90 ° apart is equivalent. When balance adjustment is not considered, when the high-frequency rigid shaft is opposite to the center of the No. 1 raised mass block, shaft adjustment and frequency modulation can be carried out on the No. 1 rigid shaft; when the deflection of the high-frequency rigid shaft is small, such as between No. 1 and No. 16, the frequency can be continuously adjusted on No. 1 and No. 16 or No. 2 and No. 3 simultaneously after the adjustment of the axis alignment by adjusting the mass block closest to the axis; when the high-frequency rigid shaft deflection angle is large, such as between No. 1 and No. 2, the frequency can be adjusted on No. 1 and No. 16 or No. 2 and No. 3 simultaneously after the two mass blocks are simultaneously adjusted in shaft alignment. When considering balance adjustment, changing the mass on a certain convex mass must change the same mass on masses separated by 90 ° or 180 ° at the same time. For example, the size of the high frequency rigid shaft deflection angle can be adjusted on numbers 1 and 9 or numbers 1, 5, 9 and 13 at the same time according to the initial frequency splitting and the size of the high frequency rigid shaft deflection angle. In the shaft adjusting process, a certain combined mass block is not fixedly selected, and the selected mass block can be timely changed according to the deflection direction change of the high-frequency rigid shaft, namely, the shaft is flexibly and quickly adjusted. For example, when the deflection angle of the high-frequency rigid shaft is large, the shaft adjustment is carried out on No. 1 and No. 2, but in the process, the high-frequency rigid shaft can be slowly aligned, namely the deflection angle is gradually reduced, and the shaft adjustment can be continuously carried out only on No. 1 at the later stage. The combined continuous trimming is not only the combination between the raised mass blocks, but also the combination of trimming modes. For example, tuning may be performed by removing mass on number 1, while tuning may be performed by adding mass on numbers 2 and 3.
The trimming method of the embodiment utilizes femtosecond laser to remove mass to realize frequency matching of the ring type MEMS sensitive structure. The femtosecond laser removes quality trimming, and needs to be positioned to a high-frequency rigid shaft with lower frequency, so as to increase the frequency corresponding to the high-frequency rigid shaft to reduce the frequency difference. The femtosecond laser is used to remove mass on the raised mass block, and it is necessary to ensure that the whole structure of the resonator is not damaged excessively, i.e. the removed mass has to have a certain limit, generally based on 1/10 which is the total mass of the raised mass block designed in this embodiment. The center or other positions on the convex mass block can be selected for the mass removing position, and the distribution of the structural rigidity cannot be influenced due to the decoupling of the mass rigidity. According to the use characteristics of femtosecond laser equipment, the removal mass is generally perforated in the shape of a cylinder and extends around the center of the convex mass as the center of a circle. The size of the femtosecond laser path and the drilling depth are selected according to the high-frequency rigid shaft deflection angle and the size of frequency cracking.
The general idea of the trimming method of the ring type MEMS sensitive structure is to adjust the shaft first and then adjust the frequency. In the process of adjusting the rigid axis, the key point is to accurately identify the alignment problem of the rigid axis, as shown in fig. 5, wherein three position lines, namely, line 17 and line 18 are separated by 45 degrees, and line 19 is an angular bisector of the two lines, and is mainly used for explaining the position of the rigid axis in the process of repairing and adjusting. The initial rigid axis deflection angle of the harmonic oscillator is in the range of 0-22.5 ° (assuming that the rigid axis is deflected to the right). The angle difference between the harmonic oscillator driving shaft and the harmonic oscillator detection shaft is 45 degrees, the included angle between every two center angles of the convex mass blocks is 22.5 degrees, and it can be known that the rigid shaft possibly deviates from the two originally aligned convex mass blocks. In order to reduce the introduction of unstable error factors caused in the gyro trimming process as much as possible, the quality of trimming should be distributed symmetrically. The mode mismatching error identification in the trimming method of the invention is mainly based on orthogonal detection, as shown in fig. 6, due to the deflection of the rigid shaft, the driving shaft and the detection shaft of the gyro harmonic oscillator are simultaneously excited to generate orthogonal signals. Sinusoidal components in the orthogonal signals correspond to frequency differences introduced by rigid axis deflection one by one, and whether the rigid axes are aligned or not can be judged according to the frequency differences.
Taking a garland resonator as an example, the trimming method for the mass stiffness decoupling ring type MEMS resonator structure of the embodiment includes the following steps:
and step S1, frequency cracking is determined through frequency sweep test, and the position of the low-frequency rigid axis is judged.
Specifically, a signal input end and a signal output end of a phase-locked amplifier are connected with a signal output end of the gyroscope, and the harmonic oscillator is excited by a power supply to measure the phase and the amplitude of a signal at the driving (or detecting) shaft end of the gyroscope. If two peak values exist in the amplitude signal, the rigid shaft has a certain deflection angle, the abscissa corresponding to the peak value is the frequency value of the mode, and the difference between the two abscissas is the frequency splitting value; if the amplitude signal has only one peak value, the rigid axis is aligned, then the frequency sweeping is continued by changing the other axis, and the frequency difference of the two frequency sweeps is the frequency cracking value. Due to the symmetrical structure, as shown in fig. 5, the black lines 17 and 18 are the corresponding positions of the driving shaft and the detecting shaft under the ideal condition, and the included angle is 45 degrees. Assuming the stiffness axis is biased to the right, the low frequency stiffness axis can be determined to be approximately between 17 and 19 or 18 and 19 based on the drive or sense electrode position and the frequency magnitude of the frequency sweep. In general, the initial frequency of the harmonic oscillator is cracked to be tens of hertz, and the included angle between the rigid axis and the ideal position is within 11.25 degrees.
And step S2, selecting the mass block closest to the rigid shaft to start trimming, and monitoring whether the rigid shaft is aligned in real time.
Specifically, the main purpose of this step is to adjust the rigid shaft to a desired position, and the adjustment method adopted may be: adding conductive adhesive in a point mode, and removing the mass by femtosecond laser. Wherein: point-type conductive adhesive addition belongs to a mass-adding trimming mode, the position of a high-frequency rigid shaft is determined through the step S1 according to the relation between frequency and mass, and a protruding mass block closest to the high-frequency rigid shaft is found for point dispensing; the femtosecond laser removal mass belongs to a modification mode of the removal mass, the position of the low-frequency rigid shaft is determined through the step S1, and the protruding mass block closest to the high-frequency rigid shaft is found for punching.
The simplified second-order kinetic equation of the ring type MEMS gyro harmonic oscillator is as follows:
wherein m is the equivalent mass, c 1 、c 2 To equivalent damping sum k 1 、k 2 For equivalent stiffness, the x-direction is the drive mode and the y-direction is the detection mode. Ideally, the driving force f is directed towards the drive shaft at a driving frequency w d In-plane application of an angular velocity in the z-direction, A g Is the angular gain.
As shown in fig. 6, due to the deflection of the rigid axis, the driving axis and the detection axis of the gyro-resonator are excited simultaneously, generating orthogonal signals. The expression of the orthogonal signal can be obtained according to the formulas (1) and (2) as follows:
wherein K is a related coefficient of the control system, and only the component in phase with the drive mode displacement in the mass block detection mode displacement expression contains angular velocity omega z And (4) information. From equation 3, it can be seen that when the sinusoidal component of the quadrature error signal is zero, the stiffness axis deflection angle, i.e., θ w Is zero.
In the process of adjusting the axis, the output signal end of the gyroscope can be connected with an oscilloscope, and whether the sinusoidal component of the orthogonal signal is zero or not is monitored in real time so as to judge whether the axis is aligned or not. In order to make the trimming effect more beneficial, the trimming can not be performed on only one raised mass block, and the equal trimming should be performed on symmetrical positions.
And step S3, after the rigid shaft is aligned, trimming the two mass blocks aligned with the rigid shaft in equal quantity at the same time until the frequency difference reaches the set requirement.
Specifically, after the rigid alignment, i.e., tuning, is completed, the purpose of this step is to perform tuning. And two convex mass blocks are arranged on the rigid shaft correspondingly, the trimming mode is consistent with the trimming mode adopted in the step S2, and if femtosecond laser is adopted for frequency modulation, the two convex mass blocks corresponding to the low-frequency rigid shaft are found, and holes are punched on the two convex mass blocks. In order to determine when the frequency modulation is finished, the phase-locked amplifier is required to be used for carrying out axis-changing frequency-sweeping observation in real time, when the axis-changing frequency-sweeping meets the index requirement, the frequency modulation is considered to be finished, and the equal trimming is carried out on the symmetrical positions.
TABLE 1 typical parameters of flower-ring MEMS gyroscope resonance submodel
TABLE 2 influence of trimming position and shape (quality uniformity) on raised Mass blocks
In the embodiment, the mode of adding the convex mass block on the resonance ring is adopted, so that the mass rigidity decoupling of the harmonic oscillator is realized, the equivalent vibration mass of the system is improved, the frequency of the system is reduced, the mode trimming of the harmonic oscillator can be quickly realized, and the aims of improving the sensitivity, the resolution ratio, the signal to noise ratio and the like of the system are finally achieved. The simulation results show that the influence of the shape and position of the trimming on the convex mass block on the tuning capability of the harmonic oscillator is shown in table 2 under the model parameters shown in table 1. The same mass is removed from the raised mass block, the position or shape is changed, the trimming effect of the harmonic oscillator is not influenced, and the frequency difference values are consistent.
Although the embodiments of the present invention have been described with reference to the accompanying drawings, various changes or modifications may be made by the patentees within the scope of the appended claims, and within the scope of the invention, as long as they do not exceed the scope of the invention described in the claims.
Claims (10)
1. The mass and rigidity decoupling ring type MEMS resonator structure is characterized by comprising an anchor point, a resonance ring and a supporting beam positioned between the anchor point and the resonance ring, wherein raised mass blocks are uniformly distributed in the circumferential direction of the resonance ring.
2. The mass stiffness decoupled ring MEMS resonator structure of claim 1, wherein the number of masses is a multiple of 8.
3. The mass-stiffness decoupled ring MEMS resonator structure of claim 1, wherein the mass is any structure with mass.
4. The mass stiffness decoupled ring MEMS resonator structure of claim 1, wherein the mass is uniformly distributed in a circumferential direction of the resonating ring to satisfy a rotational symmetry condition.
5. The method for trimming a mass stiffness decoupled ring MEMS resonator structure according to any of claims 1-4, characterized by the steps of:
s1, frequency cracking is determined through frequency sweep test, and the position of a low-frequency rigid shaft is judged;
s2, selecting the mass block closest to the rigid shaft to adjust, and monitoring whether the rigid shaft is aligned in real time;
and S3, after the rigid shaft is aligned, trimming the two mass blocks aligned with the rigid shaft in equal quantity at the same time until the frequency difference reaches the set requirement.
6. The trimming method according to claim 5, wherein the step S1 is specifically realized by the following method:
the signal input/output end of the phase-locked amplifier is connected with the signal output/input end of the gyro, the harmonic oscillator is excited by a power supply to measure the phase and amplitude of the signal at the driving electrode end of the gyro,
if two peak values exist in the amplitude signal, the rigid shaft has a certain deflection angle, the abscissa corresponding to the peak value is the frequency value of the mode, and the difference between the two abscissas is the frequency cracking value;
if the amplitude signal has only one peak value, the rigid shaft is aligned, the frequency sweeping is continuously carried out by replacing the rigid shaft at the end of the detection electrode, and the frequency difference of the two frequency sweeps is a frequency cracking value.
7. The trimming method according to claim 5, wherein the trimming method in step S2 includes removing mass by femtosecond laser or adding mass by spot-adding conductive adhesive; if the conductive adhesive is added in a point mode, determining the position of the high-frequency rigid shaft through the step S1, and determining the mass block closest to the high-frequency rigid shaft for dispensing; if the mass is removed by the femtosecond laser, the position of the low-frequency rigid axis is determined in step S1, and the mass block closest to the high-frequency rigid axis is determined to be perforated.
8. The trimming method according to claim 5, wherein the trimming simultaneously and equally performed on the two mass blocks with the aligned rigid axes in step S3 comprises point-type addition of conductive adhesive, femtosecond laser mass removal or mass addition; and if the femtosecond laser is adopted for frequency modulation, determining that two mass blocks corresponding to the low-frequency rigid shaft simultaneously punch holes.
9. The trimming method according to claim 5, wherein the trimming further comprises a combination of a removed mass and an added mass, a combination of masses.
10. The trimming method according to claim 5, further comprising a balance trimming comprising the same mass being removed or added at four equivalent symmetric positions simultaneously.
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN115615463A (en) * | 2022-11-22 | 2023-01-17 | 中国船舶集团有限公司第七〇七研究所 | Hemispherical resonator gyroscope mass-rigidity combined trimming method |
| CN117647237A (en) * | 2024-01-30 | 2024-03-05 | 中国人民解放军国防科技大学 | Annular micro-electromechanical gyroscope and mode matching trimming method thereof |
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Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN115615463A (en) * | 2022-11-22 | 2023-01-17 | 中国船舶集团有限公司第七〇七研究所 | Hemispherical resonator gyroscope mass-rigidity combined trimming method |
| CN117647237A (en) * | 2024-01-30 | 2024-03-05 | 中国人民解放军国防科技大学 | Annular micro-electromechanical gyroscope and mode matching trimming method thereof |
| CN117647237B (en) * | 2024-01-30 | 2024-04-09 | 中国人民解放军国防科技大学 | Annular micro-electromechanical gyroscope and mode matching trimming method thereof |
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