CN116519012B - Method and test device for trimming unbalanced mass of vibrating gyroscope - Google Patents
Method and test device for trimming unbalanced mass of vibrating gyroscope Download PDFInfo
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Abstract
The invention belongs to the technical field of vibration gyroscopes, and particularly relates to a vibration gyroscope unbalanced mass trimming method and a testing device, wherein the method comprises the following steps: s1, driving a vibrating gyroscope to a swinging mode, and detecting and trimming second harmonic errors; s2, driving the vibrating gyroscope to a swinging mode, and detecting and trimming first harmonic errors; s3, driving the vibrating gyroscope to an upper mode and a lower mode to detect and repair third harmonic errors. The method can rapidly realize unbalanced mass detection of the vibrating gyroscope under the condition of not adding an additional structure, and has the advantages of high detection efficiency and low hardware cost.
Description
Technical Field
The invention belongs to the technical field of vibrating gyroscopes, and particularly relates to a vibrating gyroscope unbalanced mass trimming method and a testing device.
Background
The gyroscope is an instrument for measuring the angle and the angular velocity in the inertial space, and has very important application value in the fields of petroleum exploration, a stable platform, a space vehicle, an accurate guided weapon, an unmanned system and the like.
The vibrating gyroscope is one kind of gyroscope, and its working principle is that the resonant structure is in stable vibrating state by means of static electricity, piezoelectric, etc., the input angle/angular speed of the sensitive shaft produces coriolis force to change the vibrating state of the resonant structure, and the input angle/angular speed may be calculated by detecting the change amount of vibration. The resonance structure is a sensitive element of the vibrating gyroscope, and the vibration characteristic of the resonance structure directly determines the upper performance limit of the vibrating gyroscope. In actual processing, non-ideal deviations in the geometry of the resonant structure occur due to material and structural dimensional errors, which are often described by unbalanced masses. Wherein the first harmonic error, the second harmonic error, the third harmonic error, and the fourth harmonic error are the main components of the unbalanced mass.
The fourth harmonic error can cause the resonance frequency of the driving mode and the detection mode of the working mode (n=2 elliptic mode) of the resonance structure to have a difference value, so that the sensitivity of the gyroscope is reduced, and an orthogonal error is caused. The second harmonic error causes a frequency difference between the two parasitic modes of the n=1 swing mode of the resonant structure. In addition, the first harmonic error, the second harmonic error and the third harmonic error enable the mass center of the resonant structure to vibrate when the resonant structure vibrates in a driving mode or a detection mode, the mass center vibration can reduce the quality factor of the resonant structure, and the dynamic performance of the gyroscope in impact and vibration environments is reduced.
Mass leveling is an important step in the fabrication process of frequency-matched vibratory gyroscopes, with the aim of reducing and eliminating the main unbalanced mass of the resonant structure. The mass leveling process comprises two steps of unbalanced mass detection and unbalanced mass trimming. The method comprises the steps of measuring the azimuth and the magnitude of a first harmonic error, a second harmonic error, a third harmonic error and a fourth harmonic error, reducing and eliminating unbalanced mass by removing or adding mass, and improving the performance of the gyroscope. Unbalanced mass detection is an important step in mass leveling, and the detection accuracy directly determines the accuracy of mass leveling. The micro-vibration gyro resonance structure has small size and vibration amplitude, and can only detect the fourth harmonic error and repair and regulate according to the frequency difference value of the driving mode and the detection mode at present, but does not detect and repair the first harmonic error, the second harmonic error and the third harmonic error, and has negative influence on the dynamic performance of the gyro in impact and vibration environments.
Disclosure of Invention
The invention aims to solve the technical problem of providing an efficient and high-precision method for trimming unbalanced mass of a vibrating gyroscope.
The invention provides a method for trimming unbalanced mass of a vibrating gyroscope, which comprises the following steps:
s1, driving a vibrating gyroscope to a swinging mode, and detecting and trimming second harmonic errors, wherein the method comprises the following steps:
carrying out sweep frequency response analysis on the resonance structure, and measuring response amplitude values of different positions on the resonance structure in the vibration gyro; trimming all first trimming points containing low-frequency resonance peaks in the response amplitude and second positions, which are 180 degrees apart from the first trimming points, so as to reduce the frequency splitting of the swing mode to be within the bandwidth;
s2, driving the vibrating gyroscope to a swinging mode, and detecting and trimming first harmonic errors, wherein the method comprises the following steps:
carrying out sweep frequency response analysis on the resonant structure, measuring displacement response amplitude values of different positions on the resonant structure along the direction of the central symmetry axis, calculating the amplitude value and the phase of a first harmonic error according to the displacement response amplitude values of different positions along the direction of the central symmetry axis, and trimming the resonant structure according to the calculated amplitude value and the calculated phase of the first harmonic error;
s3, driving the vibrating gyroscope to an upper mode and a lower mode, and detecting and trimming third harmonic errors, wherein the method comprises the following steps:
and carrying out sweep frequency response analysis on upper and lower modes of the resonant structure, measuring response amplitude values of different positions on the resonant structure, calculating the azimuth and the magnitude of a third harmonic error according to the response amplitude values of the different positions, and trimming the resonant structure according to the calculated azimuth and the magnitude of the third harmonic error.
Still further, step S1 includes:
s11, excitation is applied to the anchor point of the resonant structure along the central symmetry axis direction of the resonant structure, and the vibrating gyroscope is driven to a swinging mode;
s12, carrying out sweep frequency response analysis on the resonance structure, and measuring response amplitude values of different positions on the resonance structure in the vibration gyro;
s13, taking the position containing the low-frequency resonance peak in the response amplitude as a first trimming point, and removing the same mass m1 at the first trimming point and a second trimming point which is 180 degrees away from the first trimming point;
s14, repeating the steps S12-S13, and completing measurement and trimming of all positions including low-frequency resonance peaks in response amplitude values, so that frequency splitting of a swing mode is reduced to be within a bandwidth.
Further, in step S13, the magnitude of the removed identical mass m1 is positively correlated with the frequency splitting of the swing mode.
Still further, step S2 includes:
s21, excitation is applied to the anchor point of the resonant structure along the central symmetry axis direction of the resonant structure, and the vibrating gyroscope is driven to a swinging mode;
s22, taking the first edge position of the resonant structure as a first test position, and obtaining a response amplitude of the first test position by carrying out sweep frequency response analysis on the resonant structure; the included angle between the first edge position and the initial angle is phi 1;
s23, switching a second edge position along the circumferential direction of the resonant structure to serve as a second test position, and obtaining a response amplitude of the second test position by carrying out sweep response analysis on the resonant structure; the included angle between the second edge position and the initial angle is phi 2, and the included angle between phi 2 and phi 1 is smaller than 15 degrees;
s24, repeating the step S23 until the sweep response analysis of all preset measurement positions within the 360-degree range of the edge of the resonant structure is completed;
s25, extracting response amplitude peak values of each edge position sweep response analysis, taking the angle of the test position as an abscissa, taking the peak value of the response curve as an ordinate, fitting a curve graph of the response amplitude peak values changing along with the test position, wherein the angle corresponding to the point with the largest amplitude value in the curve graph is the phase of the first harmonic error of the resonant structure, and the difference value between the maximum value and the minimum value in the curve graph is the amplitude of the first harmonic error;
s26, removing the mass at the antinode position of the first harmonic error according to the test result of the step S25;
s27, repeating the steps S21-S26 until no obvious peaks and no obvious troughs exist in the graph in the step S25.
Still further, step S2 further includes:
s28, repeating the step S1, and finishing the detection and trimming of the second harmonic error again.
Still further, step S3 includes:
s31, excitation is applied to the anchor point of the resonant structure along the central symmetry axis direction of the resonant structure, and the vibrating gyroscope is driven to an upper mode and a lower mode;
s32, taking the first edge position of the resonant structure as a first test position, and obtaining a response amplitude of the first test position by carrying out sweep frequency response analysis on the resonant structure; the included angle between the first edge position and the initial angle is phi 1;
s33, switching the second edge position along the circumferential direction of the resonant structure to serve as a second test position, and obtaining a response amplitude of the second test position by carrying out sweep response analysis on the resonant structure; the included angle between the second edge position and the initial angle is phi 2, and the included angle between phi 2 and phi 1 is smaller than 15 degrees;
s34, repeating the step S23 until the sweep response analysis of all preset measurement positions within the 360-degree range of the edge of the resonant structure is completed;
s35, extracting response amplitude peak values of each edge position sweep response analysis, taking a test position angle as an abscissa, taking a response curve peak value as an ordinate, fitting a curve graph of the response amplitude peak values changing along with the test position, carrying out Fourier decomposition on the fitted curve, wherein the amplitude and the phase corresponding to components in the same period as the third harmonic error in the decomposition result are the amplitude and the phase of the third harmonic error;
s36, removing the mass at the antinode position of the third harmonic error according to the test result of the step S35;
s37, repeating the steps S31-S36 until no obvious peaks and no obvious valleys exist in the graph in the step S35.
Still further, the method also comprises a step S4,
s4, driving the vibrating gyroscope to an elliptical mode, and detecting and trimming fourth harmonic errors, wherein the method comprises the following steps:
carrying out sweep frequency response analysis on the resonance structure, and measuring response amplitude values of different positions on the resonance structure in the vibration gyro; and trimming all the first trimming points containing the low-frequency resonance peak in the response amplitude and the second trimming points, the third trimming points and the fourth trimming points which are 90 degrees, 180 degrees and 270 degrees apart from the first trimming points, so that the frequency splitting of the elliptical mode is reduced until the obvious amplitude cannot be measured.
Still further, including the vacuum chamber, set up the moving platform in the vacuum chamber, the vibration top sets up on the moving platform, be provided with the optical observation window that is used for observing the vibration top on the vacuum chamber, still include towards the laser Doppler vibrometer that optical observation window set up to and connect the controller of electrode base in laser Doppler vibrometer and the vibration top respectively.
The method has the beneficial effects that the first harmonic error, the second harmonic error and the third harmonic error of the resonant structure are calculated by detecting the vibration displacement of a plurality of modes of the resonant structure and by the distribution of the vibration displacement of the plurality of modes. Compared with the conventional piezoelectric probe detection, the non-contact measurement is adopted, and vibration interference of the contact measurement on the resonance structure is avoided. Meanwhile, the measuring mode can be suitable for resonance structures with various sizes and shapes under the condition of not changing measuring hardware, has remarkable advantages in the aspect of unbalanced mass detection of the micro-scale resonance structure, and is suitable for batch and online unbalanced detection and trimming systems.
In addition, since the trimming of the lower order harmonic error can generate obvious interference on the higher order harmonic error, but the trimming of the higher order harmonic error is very weak to the trimming of the lower order harmonic error, the ideal detection and trimming sequence is the first harmonic error, the second harmonic error, the third harmonic error and the fourth harmonic error. The detection and trimming sequences adopted by the invention are the second harmonic error, the first harmonic error and the third harmonic error, the first harmonic error and the second harmonic error are detected through the swing mode, and the influence of the second harmonic error on the frequency splitting and the vibration mode distribution of the swing mode is obviously larger than the first harmonic error, so that the detection and trimming of the second harmonic error are firstly carried out, and the high precision of the detection and the trimming of the first harmonic error can be ensured.
Drawings
FIG. 1 is a schematic flow chart of the method of the present invention;
FIG. 2 is a three-quarter perspective cross-sectional view of a resonant structure of the present invention;
FIG. 3 is a half-sectional view of a resonant structure of the present invention;
fig. 4 is a front view of the resonant structure of the present invention in a stationary state;
FIG. 5 is a top view of the resonant structure of the present invention in a resting state;
FIG. 6 is a front view of a first swing mode of the resonant structure of the present invention;
FIG. 7 is a top view of a first swing mode of the resonant structure of the present invention;
FIG. 8 is a front view of a second swing mode of the resonant structure of the present invention;
FIG. 9 is a top view of a second swing mode of the resonant structure of the present invention;
FIG. 10 is a front view of the upper and lower modes of the resonant structure of the present invention;
FIG. 11 is a top view of the upper and lower modes of the resonant structure of the present invention;
FIG. 12 is a front view of a first elliptical mode of the resonant structure of the present invention;
FIG. 13 is a top view of a first elliptical mode of the resonant structure of the present invention;
FIG. 14 is a front view of a second elliptical mode of the resonant structure of the present invention;
FIG. 15 is a top view of a second elliptical mode of the resonant structure of the present invention;
FIG. 16 is a schematic diagram of an imbalance quality test apparatus according to the present invention;
fig. 17 is a schematic diagram of the vibration displacement testing position of the present invention.
In the figure, a 1-resonant structure; 2-a central anchor point; a 3-electrode substrate; 4-a mobile platform; 5-vacuum chamber; 6-conducting wires; 7-a controller; 8-a signal output port; 9-laser Doppler vibration meter; 10-an optical viewing window; 11-a signal input port; 12-vibration displacement measurement points; 13-central symmetry axis.
Detailed Description
The following description of the embodiments of the present invention will be made clearly and fully with reference to the accompanying drawings, in which it is evident that the embodiments described are only some, but not all embodiments of the invention. All other embodiments, which can be made by those skilled in the art based on the embodiments of the invention without making any inventive effort, are intended to be within the scope of the invention.
It should be noted that all directional indicators (such as up, down, left, right, front, and rear … …) in the embodiments of the present invention are merely used to explain the relative positional relationship, movement, etc. between the components in a particular posture (as shown in the drawings), and if the particular posture is changed, the directional indicator is changed accordingly.
Furthermore, descriptions such as those referred to as "first," "second," and the like, are provided for descriptive purposes only and are not to be construed as indicating or implying a relative importance or implying an order of magnitude of the indicated technical features in the present disclosure. Thus, a feature defining "a first" or "a second" may explicitly or implicitly include at least one such feature. In the description of the present invention, the meaning of "plurality" means at least two, for example, two, three, etc., unless specifically defined otherwise.
In the present invention, unless specifically stated and limited otherwise, the terms "connected," "affixed," and the like are to be construed broadly, and for example, "affixed" may be a fixed connection, a removable connection, or an integral body; the device can be mechanically connected, electrically connected, physically connected or wirelessly connected; either directly or indirectly, through intermediaries, or both, may be in communication with each other or in interaction with each other, unless expressly defined otherwise. The specific meaning of the above terms in the present invention can be understood by those of ordinary skill in the art according to the specific circumstances.
In addition, the technical solutions of the embodiments of the present invention may be combined with each other, but it is necessary to be based on the fact that those skilled in the art can implement the technical solutions, and when the technical solutions are contradictory or cannot be implemented, the combination of the technical solutions should be considered as not existing, and not falling within the scope of protection claimed by the present invention.
As shown in fig. 2, the resonant structure of the present invention is a central symmetrical shell structure, the resonant structure 1 is fixedly connected to the electrode substrate 3 through the central anchor point 2, and a driving signal is applied to the resonant structure 1 through the electrode substrate 3.
Referring to fig. 3 to 15, fig. 3 to 5 are fixed states of the resonance mechanism 1, fig. 6 and 7 are front and top views of a first swing mode of a low-order mode of the resonance structure, fig. 8 and 9 are front and top views of a second swing mode, fig. 10 and 11 are front and top views of an up-down mode, fig. 12 and 13 are front and top views of a first elliptical mode, and fig. 14 and 15 are front and top views of a second elliptical mode, respectively.
As shown in the attached figure 1, the invention provides a method for trimming unbalanced mass of a vibrating gyroscope, which comprises the following steps:
s1, driving a vibrating gyroscope to a swinging mode, and detecting and trimming second harmonic errors, wherein the method comprises the following steps:
carrying out sweep frequency response analysis on the resonance structure, and measuring response amplitude values of different positions on the resonance structure in the vibration gyro; trimming all first trimming points containing low-frequency resonance peaks in the response amplitude and second positions, which are 180 degrees apart from the first trimming points, so as to reduce the frequency splitting of the swing mode to be within the bandwidth; the frequency splitting and the vibration mode distribution of the swinging mode are dominated by the second harmonic error, and the second harmonic error distribution is directly calculated by the frequency splitting and the vibration mode angle of the swinging mode, so that the detection efficiency and the detection accuracy are improved.
S2, driving the vibrating gyroscope to a swinging mode, and detecting and trimming first harmonic errors, wherein the method comprises the following steps:
applying excitation at an anchor point of the resonant structure along the central symmetry axis direction of the resonant structure, carrying out sweep frequency response analysis on the resonant structure, measuring displacement response amplitudes of different positions on the resonant structure along the central symmetry axis direction, and carrying out trimming on the resonant structure according to the calculated amplitudes and phases of the first harmonic errors because the frequency splitting of the second harmonic errors is reduced to be within the bandwidth at the moment, wherein the response amplitudes of the resonant structure under the excitation condition are related to the amplitudes and phases of the first harmonic errors, so that the amplitudes and phases of the first harmonic errors are calculated according to the displacement response amplitudes of different positions along the central symmetry axis direction; after the trimming of the second harmonic error is completed, the vibration displacement of the swinging mode directly reflects the azimuth and the size of the first harmonic error under the same excitation. Compared with other modes, the vibration displacement of the swinging mode is most sensitive to the first harmonic error, and the highest-precision detection can be realized.
S3, driving the vibrating gyroscope to an upper mode and a lower mode, and detecting and trimming third harmonic errors, wherein the method comprises the following steps:
applying excitation at the anchor point of the resonant structure along the central symmetry axis direction of the resonant structure, carrying out sweep frequency response analysis on the upper and lower modes of the resonant structure, measuring response amplitude values at different positions on the resonant structure, calculating the azimuth and the magnitude of the third harmonic error according to the response amplitude values at different positions, and trimming the resonant structure according to the calculated azimuth and the magnitude of the third harmonic error. The third harmonic error acts on the same as the first harmonic error in the swing mode, and at the moment, the first harmonic error and the third harmonic error cannot be directly distinguished from the displacement distribution of the swing mode, so that the invention changes an upper mode and a lower mode and separates the third harmonic error through the displacement distribution of the upper mode and the lower mode.
According to the invention, through detecting the vibration displacement of the resonant structure, the first harmonic error, the second harmonic error and the third harmonic error of the resonant structure are calculated through the vibration displacement of a plurality of modes. The method can rapidly realize the unbalanced mass detection of the vibrating gyroscope without adding additional structures, has the advantages of high detection efficiency and low hardware cost,
the invention only detects the vibration displacement of a plurality of modes of the resonance structure, and calculates the first harmonic error, the second harmonic error and the third harmonic error of the resonance structure through the distribution of the vibration displacement of the plurality of modes. Compared with the conventional piezoelectric probe detection, the non-contact measurement is adopted, and vibration interference of the contact measurement on the resonance structure is avoided. Meanwhile, the measuring mode can be suitable for resonance structures with various sizes and shapes under the condition of not changing measuring hardware, has remarkable advantages in the aspect of unbalanced mass detection of the micro-scale resonance structure, and is suitable for batch and online unbalanced detection and trimming systems.
In addition, since the trimming of the lower order harmonic error can generate obvious interference on the higher order harmonic error, but the trimming of the higher order harmonic error is very weak to the trimming of the lower order harmonic error, the ideal detection and trimming sequence is the first harmonic error, the second harmonic error, the third harmonic error and the fourth harmonic error. The detection and trimming sequences adopted by the invention are the second harmonic error, the first harmonic error and the third harmonic error, the first harmonic error and the second harmonic error are detected through the swing mode, and the influence of the second harmonic error on the frequency splitting and the vibration mode distribution of the swing mode is obviously larger than the first harmonic error, so that the detection and trimming of the second harmonic error are firstly carried out, and the high precision of the detection and the trimming of the first harmonic error can be ensured.
In one embodiment, step S1 includes:
s11, excitation is applied to an anchor point of the resonant structure along the central symmetry axis direction of the resonant structure, the vibrating gyroscope is driven to a swinging mode, and the resonant structure is driven to the swinging mode in a static or piezoelectric excitation mode;
s12, carrying out sweep frequency response analysis on the resonant structure, preferably carrying out sweep frequency response analysis by adopting a laser Doppler detection mode, and measuring response amplitudes at different positions on the resonant structure in the vibration gyro, wherein the response amplitudes at different positions comprise low-frequency and high-frequency resonance peaks due to unbalanced mass of the resonant structure, the frequencies of the two resonance peaks at different positions are the same, the amplitudes are different, and specific values of the low-frequency and the high-frequency are determined by the resonant structure;
s13, taking the positions which only contain low-frequency resonance peaks in response amplitudes at different positions on the resonance structure as a first trimming point, and removing the same mass m1 at the first trimming point and a second trimming point which is 180 degrees away from the first trimming point;
s14, repeating the steps S12-S13, completing measurement and trimming of all positions including low-frequency resonance peaks in response amplitude, reducing frequency splitting of a swing mode to be within a bandwidth, and completing detection and trimming of a second harmonic error.
In this embodiment, in step S13, the magnitude of the removed identical mass m1 is positively correlated with the frequency splitting of the swing mode.
In one embodiment, step S2 includes:
s21, excitation is applied to the anchor point of the resonant structure along the central symmetry axis direction of the resonant structure, and the vibrating gyroscope is driven to a swinging mode;
s22, taking the first edge position of the resonant structure as a first test position, and obtaining a response amplitude of the first test position by carrying out sweep frequency response analysis on the resonant structure; the included angle between the first edge position and the initial included angle (the horizontal or vertical direction of equipment and a clamp in the unbalanced mass detection and adjustment process) is phi 1; as shown in fig. 17, the test positions 12 are the portions of the surface of the resonant structure 1 near the edges, and the distances L between each test position 12 and the central symmetry axis 13 of the resonant structure are equal to reduce the randomness error caused by the variation of the test positions 12 in the measurement result.
S23, switching a second edge position along the circumferential direction of the resonant structure to serve as a second test position, and obtaining a response amplitude of the second test position by carrying out sweep response analysis on the resonant structure; the included angle between the second edge position and the initial angle is phi 2, and the included angle between phi 2 and phi 1 is smaller than 15 degrees, so that the measuring efficiency and accuracy are ensured;
s24, repeating the step S23 until the sweep response analysis of all preset measuring positions (the preset measuring positions comprise a first testing position and a second testing position … … nth testing position, and the intervals of all the testing positions are consistent) within the 360-degree range of the edge of the resonant structure is completed;
s25, extracting response amplitude peak values of each edge position sweep response analysis, taking the angle of the test position as an abscissa, taking the peak value of the response curve as an ordinate, fitting a curve graph of the response amplitude peak values changing along with the test position, wherein the angle corresponding to the point with the largest amplitude value in the curve graph is the phase of the first harmonic error of the resonant structure, and the difference value between the maximum value and the minimum value in the curve graph is the amplitude of the first harmonic error;
s26, removing mass at the antinode position of the first harmonic error by adopting a femtosecond laser or ion beam mode according to the test result of the step S25;
s27, repeating the steps S21-S26 until the graph in the step S25 has no obvious wave crest and wave trough, and finishing the detection and trimming of the first harmonic error.
In this embodiment, step S2 further includes:
s28, repeating the step S1, and finishing the detection and trimming of the second harmonic error again.
The first harmonic error trimming can interfere the second harmonic error, so that the second harmonic error is increased, and after the first harmonic error trimming is completed, the second harmonic error is detected and trimmed again, so that the trimming effect of the second harmonic error is ensured.
In one embodiment, step S3 includes:
s31, excitation is applied to the anchor point of the resonant structure along the central symmetry axis direction of the resonant structure, and the vibrating gyroscope is driven to an upper mode and a lower mode;
s32, taking the first edge position of the resonant structure as a first test position, and obtaining a response amplitude of the first test position by carrying out sweep frequency response analysis on the resonant structure; the included angle between the first edge position and the initial angle is phi 1;
s33, switching the second edge position along the circumferential direction of the resonant structure to serve as a second test position, and obtaining a response amplitude of the second test position by carrying out sweep response analysis on the resonant structure; the included angle between the second edge position and the initial angle is phi 2, and the included angle between phi 2 and phi 1 is smaller than 15 degrees;
s34, repeating the step S23 until the sweep response analysis of all preset measurement positions within the 360-degree range of the edge of the resonant structure is completed;
s35, extracting response amplitude peak values of each edge position sweep response analysis, taking a test position angle as an abscissa, taking a response curve peak value as an ordinate, fitting a curve graph of the response amplitude peak values changing along with the test position, carrying out Fourier decomposition on the fitted curve, wherein the amplitude and the phase corresponding to components in the same period as the third harmonic error in the decomposition result are the amplitude and the phase of the third harmonic error;
s36, removing mass at the antinode position of the third harmonic error by adopting a femtosecond laser or ion beam mode according to the test result of the step S35;
s37, repeating the steps S31-S36 until the graph in the step S35 has no obvious wave crest and wave trough, and finishing the detection and trimming of the third harmonic error.
In one embodiment, the method further comprises a step S4,
s4, driving the vibrating gyroscope to an elliptical mode, and detecting and trimming fourth harmonic errors, wherein the method comprises the following steps:
carrying out sweep frequency response analysis on the resonance structure, and measuring response amplitude values of different positions on the resonance structure in the vibration gyro; and trimming all the first trimming points containing the low-frequency resonance peak in the response amplitude and the second trimming points, the third trimming points and the fourth trimming points which are 90 degrees, 180 degrees and 270 degrees apart from the first trimming points, so that the frequency splitting of the elliptical mode is reduced until the obvious amplitude cannot be measured. Thus, the detection and trimming of the first harmonic error, the second harmonic error, the third harmonic error and the fourth harmonic error of the resonant structure are completed.
Specifically, the method includes the steps of carrying out sweep response analysis on n=2 elliptical modes of a resonant structure by means of electrostatic or piezoelectric excitation and laser Doppler detection, measuring response amplitudes at different positions on the resonant structure, taking the position, which only contains a low-frequency resonance peak, in the response amplitudes as a trimming point 1, removing the same mass m2 at a first trimming point, a second trimming point, a third trimming point and a fourth trimming point which are 90 degrees, 180 degrees and 270 degrees away from the first trimming point, and removing positive correlation between the size of the mass m2 and frequency splitting of the n=2 elliptical modes. The frequency splitting of the n=2 elliptical modes is reduced to be within the bandwidth by adopting the same method through multiple measurements and trimming.
The invention also provides a testing device for realizing the unbalanced mass trimming method of the vibrating gyroscope, which comprises a vacuum cavity 5, a movable platform 4 arranged in the vacuum cavity 5, wherein the vibrating gyroscope is arranged on the movable platform 4, an optical observation window 10 for observing the vibrating gyroscope is arranged on the vacuum cavity 5, and the testing device further comprises a laser Doppler vibration meter 9 arranged towards the optical observation window 10, and a controller 7 respectively connected with the laser Doppler vibration meter 9 and the electrode substrate 3 in the vibrating gyroscope.
Specifically, as shown in fig. 16 to 17, the resonant structure 1 and the electrode substrate 3 are placed on the moving platform 4, the resonant structure 1, the electrode substrate 3 and the moving platform 4 are placed together in the vacuum chamber 5, a driving signal is applied to the resonant structure 1 by a wire 6 by piezoelectric or electrostatic means, and the driving signal is supplied from a signal output port 8 of the controller 7. The laser Doppler vibration meter 9 measures vibration signals of the resonant structure 1 through the optical observation window 10, and the measuring position of the laser Doppler vibration meter 9 on the resonant structure 1 can be adjusted through the mobile platform 4. The detection signal of the laser Doppler vibration meter 9 is input to a signal input port 11 of the controller 7, the processing of the excitation signal and the detection signal is completed in the controller 7, and the response amplitude and the phase of each measurement position are output and recorded.
What is not described in detail in this specification is prior art known to those skilled in the art.
Claims (6)
1. The method for trimming unbalanced mass of the vibrating gyroscope is characterized by comprising the following steps of:
s1, driving a vibrating gyroscope to a swinging mode, and detecting and trimming second harmonic errors, wherein the method comprises the following steps:
carrying out sweep frequency response analysis on the resonance structure, and measuring response amplitude values of different positions on the resonance structure in the vibration gyro; trimming a first trimming point containing a low-frequency resonance peak in the response amplitude and a second position which is 180 degrees away from the first trimming point, and reducing the frequency splitting of the swing mode to be within the bandwidth;
s2, driving the vibrating gyroscope to a swinging mode, and detecting and trimming first harmonic errors, wherein the method comprises the following steps:
carrying out sweep frequency response analysis on the resonant structure, measuring displacement response amplitude values of different positions on the resonant structure along the direction of the central symmetry axis, calculating the amplitude value and the phase of a first harmonic error according to the displacement response amplitude values of different positions along the direction of the central symmetry axis, and trimming the resonant structure according to the calculated amplitude value and the calculated phase of the first harmonic error;
s3, driving the vibrating gyroscope to an upper mode and a lower mode, and detecting and trimming third harmonic errors, wherein the method comprises the following steps:
carrying out sweep frequency response analysis on upper and lower modes of the resonant structure, measuring response amplitude values of different positions on the resonant structure, calculating the azimuth and the magnitude of a third harmonic error according to the response amplitude values of the different positions, and trimming the resonant structure according to the calculated azimuth and magnitude of the third harmonic error;
the step S2 comprises the following steps:
s21, excitation is applied to the anchor point of the resonant structure along the central symmetry axis direction of the resonant structure, and the vibrating gyroscope is driven to a swinging mode;
s22, taking the first edge position of the resonant structure as a first test position, and obtaining a response amplitude of the first test position by carrying out sweep frequency response analysis on the resonant structure; the included angle between the first edge position and the initial angle is phi 1;
s23, switching a second edge position along the circumferential direction of the resonant structure to serve as a second test position, and obtaining a response amplitude of the second test position by carrying out sweep response analysis on the resonant structure; the included angle between the second edge position and the initial angle is phi 2, and the included angle between phi 2 and phi 1 is smaller than 15 degrees;
s24, repeating the step S23 until the sweep response analysis of all preset measurement positions within the 360-degree range of the edge of the resonant structure is completed;
s25, extracting response amplitude peak values of each edge position sweep response analysis, taking the angle of the test position as an abscissa, taking the peak value of the response curve as an ordinate, fitting a curve graph of the response amplitude peak values changing along with the test position, wherein the angle corresponding to the point with the largest amplitude value in the curve graph is the phase of the first harmonic error of the resonant structure, and the difference value between the maximum value and the minimum value in the curve graph is the amplitude of the first harmonic error;
s26, removing the mass at the antinode position of the first harmonic error according to the test result of the step S25;
s27, repeating the steps S21-S26 until no obvious wave crest and no obvious wave trough exist in the graph in the step S25;
step S2 further includes:
s28, repeating the step S1, and finishing the detection and trimming of the second harmonic error again.
2. The method for trimming unbalanced mass of a vibrating gyroscope of claim 1, wherein step S1 comprises:
s11, excitation is applied to the anchor point of the resonant structure along the central symmetry axis direction of the resonant structure, and the vibrating gyroscope is driven to a swinging mode;
s12, carrying out sweep frequency response analysis on the resonance structure, and measuring response amplitude values of different positions on the resonance structure in the vibration gyro;
s13, taking the position containing the low-frequency resonance peak in the response amplitude as a first trimming point, and removing the same mass m1 at the first trimming point and a second trimming point which is 180 degrees away from the first trimming point;
s14, repeating the steps S12-S13, and completing measurement and trimming of all positions including low-frequency resonance peaks in response amplitude values, so that frequency splitting of a swing mode is reduced to be within a bandwidth.
3. The method for trimming unbalanced mass of a vibrating gyroscope of claim 2, wherein in step S13, the magnitude of the removed identical mass m1 is positively correlated with frequency splitting of the swinging mode.
4. The vibratory gyroscope unbalance mass trimming method according to any one of claims 1 to 3, wherein step S3 includes:
s31, excitation is applied to the anchor point of the resonant structure along the central symmetry axis direction of the resonant structure, and the vibrating gyroscope is driven to an upper mode and a lower mode;
s32, taking the first edge position of the resonant structure as a first test position, and obtaining a response amplitude of the first test position by carrying out sweep frequency response analysis on the resonant structure; the included angle between the first edge position and the initial angle is phi 1;
s33, switching the second edge position along the circumferential direction of the resonant structure to serve as a second test position, and obtaining a response amplitude of the second test position by carrying out sweep response analysis on the resonant structure; the included angle between the second edge position and the initial angle is phi 2, and the included angle between phi 2 and phi 1 is smaller than 15 degrees;
s34, repeating the step S23 until the sweep response analysis of all preset measurement positions within the 360-degree range of the edge of the resonant structure is completed;
s35, extracting response amplitude peak values of each edge position sweep response analysis, taking a test position angle as an abscissa, taking a response curve peak value as an ordinate, fitting a curve graph of the response amplitude peak values changing along with the test position, carrying out Fourier decomposition on the fitted curve, wherein the amplitude and the phase corresponding to components in the same period as the third harmonic error in the decomposition result are the amplitude and the phase of the third harmonic error;
s36, removing the mass at the antinode position of the third harmonic error according to the test result of the step S35;
s37, repeating the steps S31-S36 until no obvious peaks and no obvious valleys exist in the graph in the step S35.
5. The method for trimming unbalanced mass of a vibrating gyroscope according to any one of claims 1 to 3, further comprising step S4,
s4, driving the vibrating gyroscope to an elliptical mode, and detecting and trimming fourth harmonic errors, wherein the method comprises the following steps:
carrying out sweep frequency response analysis on the resonance structure, and measuring response amplitude values of different positions on the resonance structure in the vibration gyro; and trimming all the first trimming points containing the low-frequency resonance peak in the response amplitude and the second trimming points, the third trimming points and the fourth trimming points which are 90 degrees, 180 degrees and 270 degrees apart from the first trimming points, so that the frequency splitting of the elliptical mode is reduced to be within the bandwidth.
6. A test device for implementing the method for trimming unbalanced mass of a vibrating gyroscope according to any one of claims 1 to 5, comprising a vacuum chamber (5), a mobile platform (4) arranged in the vacuum chamber (5), wherein the vibrating gyroscope is arranged on the mobile platform (4), an optical observation window (10) for observing the vibrating gyroscope is arranged on the vacuum chamber (5), a laser doppler vibrometer (9) arranged towards the optical observation window (10) is further included, and a controller (7) respectively connected with the laser doppler vibrometer (9) and the electrode substrate (3) in the vibrating gyroscope.
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