CN104976996A - Nested annular MEMS oscillation gyro with period distribution type concentrated mass blocks - Google Patents
Nested annular MEMS oscillation gyro with period distribution type concentrated mass blocks Download PDFInfo
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
- G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
- G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
- G01C19/5642—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using vibrating bars or beams
- G01C19/5656—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using vibrating bars or beams the devices involving a micromechanical structure
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
- G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
- G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
- G01C19/5642—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using vibrating bars or beams
- G01C19/5649—Signal processing
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Abstract
The invention provides a nested annular MEMS oscillation gyro with period distribution type concentrated mass blocks. The gyro comprises a nested annular harmonic oscillator with the period distribution type concentrated mass blocks, and an electrode which is arranged inside/outside the nested annular harmonic oscillator; the nested annular harmonic oscillator comprises a nested annular flexible frame, the mass blocks arranged on the nested annular flexible frame, and anchors for fixing the oscillator; the whole harmonic oscillator is fixedly anchored with a base by the anchor on the center of the harmonic oscillator; the nested annular flexible frame comprises nested rings and spoke-shaped supporting beams; the mass blocks can be additionally arranged on the nested annular flexible frame in a plurality of kinds of manners; and the electrode can be arranged inside/outside the harmonic oscillator, or the electrodes are arranged inside and outside the harmonic oscillator. The gyro has the relatively high thermo-elastic property Q value, relatively large resonance oscillation mass, and relatively large driving amplitude; and as the design of the internal electrode is adopted or the design of the internal and external electrodes is adopted, the gyro also has the advantages that the capacitance detection area is large, the number of detection and control electrodes is large and the like.
Description
Technical field
The present invention relates to a kind of micro-electro-mechanical gyroscope, and in particular to a kind of MEMS oscillation gyro.
Background technology
Gyroscope is the sensor measuring the motion of carrier relative inertness Space Rotating, be the core devices in the fields such as motion measurement, inertial navigation, Guidance and control, in the high-end industrial equipments such as Aero-Space, intelligent robot, guided munition and precision strike weapon, there is very important using value.Traditional gyroscope comprises mechanical rotor gyro, electrostatic gyroscope, hemispherical reso nance gyroscope, laser gyro, optical fibre gyro, dynamic tuned gyroscope etc., although their precision are high, the aspects such as volume, power consumption, price are difficult to meet the demands.The features such as the MEMS gyro instrument based on micro electro mechanical system (MEMS) technology has that volume is little, low in energy consumption, the life-span is grown, can be mass, low price, have innate advantage in the industry of in enormous quantities and small size and weaponry are applied.But compared with conventional gyro, the precision of current MEMS gyro instrument is high not enough, application is mainly limited to the low side fields such as smart mobile phone, Micro Aerial Vehicle, vehicle steadily control, micro-inertia/satellite combined guidance system.The anti-interference anti-deception of satellite navigation, indoor navigation, the microminiature under water emerging field such as unmanned platform, individual soldier location, underground orientation with drilling system propose active demand to high-performance, small size, low-power consumption, low cost gyroscope.
Realize that the high performance key of MEMS gyro instrument is high q-factor, large tuned mass, drive amplitude and large Detection capacitance greatly, and the oscillation gyro that the oscillation gyro being operated in degenerate modes (driven-mode is identical with sensed-mode) is comparatively operated in orthogonal modes (driven-mode and sensed-mode are not identical and orthogonal) has higher Precision Potential.
The principal element affecting Q value has thermoelastic damping, supports loss, press-filming damping, slide-film damping and other dampings, under being in high vacuum environment and for W/S plane microstructure, wherein thermoelastic damping plays decisive role.
Thermoelastic damping is caused by hot-fluid irreversible in structure, and for girder construction, the beam side tension bent under vibrational state, opposite side pressurized, makes stress field and temperature field occur being coupled by the hot expansion property of material.Zener is at document [C.Zener, " Internal Friction in Solids II:General Theory of Thermoelastic Internal Friction; " PhysicalReview, vol.53, pp.230 – 235,1938.] in give the general expression of vibrational structure thermoelastic damping:
Wherein E is young modulus of material, and α is material thermal expansion coefficient, T
0for nominal medial temperature 300K, C
vfor the thermal capacity of material, ω is mechanical resonant frequency, and τ is thermal relaxation time, for simple girder construction, has:
Wherein b is the width of beam, and κ is material thermal conductivity.
The Phenomenological Explanation of this machinery-thermal coupling is: structure pressurized side temperature raises, and tension side temperature reduces, thus produces thermograde, and this thermograde causes heat transfer to cause energy loss.The physical significance of thermal relaxation time τ claimed for the time needed for from cold and hot imbalance to cold and hot balance.When the vibration period t of structure and thermal relaxation time τ close to time, the loss of energy reaches maximum.If vibration period t is much larger than thermal relaxation time τ, then structure is roughly in thermal equilibrium state in vibration, and claim such state to be " isothermal " state, under this state, the energy of structural loss is less; If vibration period t is much smaller than thermal relaxation time τ, the thermal unbalance of vibrational structure has little time relaxation, claims such state to be " thermal insulation " state, and under this state, same energy loss is less.
Thermoelasticity Q value (Q
tED) influence curve as shown in Figure 1, in figure, horizontal ordinate is structural natural frequencies f and thermal relaxation frequency f
0ratio, wherein thermal relaxation frequency is the inverse of thermal relaxation time, that is: f
0=1/ τ.Therefore high Q is obtained
tEDthe key of value makes the resonance frequency of arrangement works mode avoid thermal relaxation frequency by structural design.For silicon materials microstructure, its thermal relaxation time is shorter, and the less thermal relaxation time of structure is shorter.
Because silicon is a kind of high thermal conductivity material, from (2) formula, if the yardstick producing the structure of deformation is very little, then very little thermal relaxation time τ (very large thermal relaxation frequency f can be realized
0).Common high Q
tEDvalue silicon micro element is in " Isothermal Condition ", i.e. f<<f
0, such as, harmonic oscillator described in patent CN102388292A, this harmonic oscillator adopts nested multiple resonant ring compositions, the Q of this design
tEDvalue is in 10
5magnitude, multiple nested rings also provides larger tuned mass.But the quality of this design and rigidity are couplings, namely will realize the increase that larger tuned mass must cause rigidity, the mechanical resonant frequency of structure
Wherein m* and k* is respectively structural equivalents quality and equivalent stiffness, and rigidity of structure increase must cause construction machine resonance frequency to increase, and is unfavorable for the lifting of Q value, and have employed distributed mass.Although this design embodies higher performance, the Q value of this structure and tuned mass still have much room for improvement.
Also micro element is made to be in " adiabatic condition " to realize high Q
tEDvalue, such as, harmonic oscillator described in patent CN101553734A, this design realizes high natural frequency (MHz rank) and relatively low thermal relaxation frequency by abundant structure, i.e. f>>f
0.Although this structure has higher Q value and larger tuned mass, very little driving amplitude limits the raising of its performance.
Summary of the invention
For the deficiency that prior art exists, the object of this invention is to provide a kind of nested ring type MEMS oscillation gyro with period profile lumped mass block.
Technical scheme of the present invention is:
A kind of nested ring type MEMS oscillation gyro with period profile lumped mass block, comprise the nested ring type harmonic oscillator of band period profile lumped mass block and be arranged on harmonic oscillator inside or/and the electrode of outside, described harmonic oscillator comprises nested ring type flexible frame, be arranged on the anchor point of mass on nested ring type flexible frame and fixing harmonic oscillator, whole harmonic oscillator is firmly anchored by the anchor point and substrate being positioned at harmonic oscillator center, described nested ring type flexible frame entirety is axially symmetric structure, described nested ring type flexible frame is made up of nested rings and spoke-like brace summer, the annulus in described nested rings to be multiple with anchor point the be center of circle and between annulus equidistantly, by the support and connection of many equally distributed spoke-like brace summers between adjacent nested rings and between the nested rings and anchor point of innermost layer, mass is arranged in the ring between adjacent nested rings, multiple mass is evenly distributed in multiple ring in the circumference cycle, be arranged in all mass distribution of same ring circumferentially same, the number of the mass in each ring is equal.
Further, the described mass in the present invention has multiple set-up mode, and mass can be set directly on spoke-like brace summer, and namely described mass is all fixed on spoke-like brace summer.
Further, described mass of the present invention can adopt the mode of " suspension " to arrange, namely the present invention also comprises the semi-girder for arranging mass, many semi-girders are evenly arranged on the medial/lateral of nested rings, semi-girder one end is fixedly connected in nested rings, the end of semi-girder stretches in the ring of nested rings medial/lateral, and the adjacent cantilever beam in same ring and the spacing between adjacent cantilever beam with spoke-like brace summer equal, the end of every root semi-girder is all fixed with a mass.
Further, described mass of the present invention can be set directly on spoke-like brace summer, and the mode of " suspension " that simultaneously also adopt is arranged.Namely the present invention also comprises the semi-girder for arranging mass, many semi-girders are evenly arranged on the medial/lateral of nested rings, semi-girder one end is fixedly connected in nested rings, the end of semi-girder stretches in the ring of nested rings medial/lateral, and the adjacent cantilever beam in same ring and the spacing between adjacent cantilever beam with spoke-like brace summer equal, be positioned on the semi-girder of same ring and spoke-like brace summer and be provided with mass.
Further, the nested ring type harmonic oscillator of band period profile lumped mass block of the present invention adopts high thermal conductivity material to be made.
Further, the nested ring type harmonic oscillator of band period profile lumped mass block of the present invention adopts monocrystalline silicon to be made.
Further, electrode of the present invention is arranged on harmonic oscillator outside, and multiple electrode is evenly distributed on the periphery of harmonic oscillator in the circumference cycle, and the ring formed between adjacent nested rings is provided with in circumference cycle equally distributed mass.
Further, electrode of the present invention is arranged on harmonic oscillator inside, be distributed with in circumference cycle equally distributed multiple electrode at least one ring formed by adjacent nested rings, be provided with in circumference cycle equally distributed mass in the ring that all the other adjacent nested rings are formed.
Further, harmonic oscillator outside of the present invention and inside are provided with electrode, multiple electrode is evenly distributed on the periphery of harmonic oscillator in the circumference cycle, and be distributed with in circumference cycle equally distributed multiple electrode at least one ring formed by adjacent nested rings, be provided with in circumference cycle equally distributed mass in the ring that all the other adjacent nested rings are formed.
Further, harmonic oscillator inside of the present invention is provided with electrode, multiple rings of described harmonic oscillator inside are used for built-in electrode, near anchor point two adjacent rings in place two circle electrodes and this two circle electrode be used for drive and trim, the ring circle away from anchor point built-in two circle electrodes and this two circle electrode be used for detect and trim.
The present invention realizes the decoupling zero of quality and rigidity by the lumped mass block adding period profile on axisymmetric nested ring type flexible frame, namely increase and can not to affect after tuned mass or the rigidity of only minimal effect structure, the feature that nested ring type flexible frame should have is that rigidity is low, and be axially symmetric structure, in a particular embodiment of the present invention, flexible frame is nested multiple ring structures, is connected between nested rings by circumference cycle equally distributed spoke-like brace summer.
It is avoid affecting integrally-built rigidity that nested ring type flexible frame adds the main points arranging period profile lumped mass block as far as possible, can on nested ring type flexible frame, the mode of " suspension " be adopted to add mass, namely a semi-girder is stretched out from nested ring type flexible frame, then lumped mass block is added at the end of semi-girder, if the width of this semi-girder is little, this mode only produces slight influence to the rigidity of nested rings framework.
In addition, period profile lumped mass block can be added at the position less to nested ring type flexible frame stiffness effect, the brace summer of the spoke-like of nested ring type flexible frame such as, add period profile lumped mass block.The mode of all interpolation lumped mass blocks all must consider the impact (deformation of flexible frame that mass gravity cause and connection semi-girder) of gravity for flexible structure, due under microscale, the impact of gravity equal-volume power is slight, the flexible structure deformation that gravity causes is less, and the mode of therefore adding lumped mass block is particularly suitable for quality and the rigidity Decoupling design of microstructure.
The nested ring type harmonic oscillator of band period profile lumped mass block of the present invention has lower equivalent stiffness and larger equivalent mass, therefore has lower natural frequency.And the nested ring type harmonic oscillator of band period profile lumped mass block of the present invention adopts the high thermal conductivity materials such as monocrystalline silicon to make, construction machine-the thermal coupling of thermoelastic damping is caused to appear on the nested ring type flexible frame of structure, but nested ring type flexible frame can realize very thin design, therefore structure can realize very little thermal relaxation time (namely very high thermal relaxation frequency).Lower natural frequency f and higher thermal relaxation frequency f is learnt by Fig. 1
0very high Q can be obtained
tEDvalue.
The nested ring type MEMS oscillation gyro of band period profile lumped mass block of the present invention is a kind of micro-oscillation gyro being typically operated in degenerate modes, and namely the driven-mode of its harmonic oscillator is the same with sensed-mode.The principle of work of the nested ring type MEMS oscillation gyro with period profile lumped mass block is: by static-electronic driving mode, harmonic oscillator first mode as shown in Figure 2 A (i.e. driven-mode) is gone out with specific frequency excitation, its first mode to be hoop wave number be 2 standing wave, wherein the amplitude at antinodal point place is maximum, the amplitude at nodal point place is zero, and antinodal point line forms intrinsic rigidity axle system; When there being axial turning rate input, harmonic oscillator produces the second mode (i.e. sensed-mode) of another intrinsic rigidity axle system as shown in Figure 2 B under the effect of coriolis force, the vibration of harmonic oscillator second mode is by capacitance detecting mode, convert sensitive electrical signal to, this sensitive electrical signal is directly proportional to input angular velocity, involves the process such as amplification after filtration and can obtain input angular velocity information.
In addition because harmonic oscillator unavoidably exists certain foozle, the vibration shape skew that this error causes and frequency cracking are the principal elements affecting gyro performance, need to adopt electrostatic to trim the mobile equilibrium realizing gyro, by applying trimming on control electrode of ad-hoc location the adjustment that bias voltage realizes system equivalent stiffness, thus realize mode vectors correlation and the mobile equilibrium of harmonic oscillator.
Nested ring type MEMS oscillation gyro with period profile lumped mass block adopt the mode of electrostatic/electric capacity realize harmonic oscillator driving, detect and trim, therefore the design of electrode has important impact for the performance of MEMS oscillation gyro.Nested ring type MEMS oscillation gyro with period profile lumped mass block can adopt the design of the external electrode be looped around around harmonic oscillator, also can at the void designs built-in electrode of harmonic oscillator inside, external electrode and built-in electrode can also be adopted and the design of depositing simultaneously.If electrode number is more, the capacity area of single electrode is larger, then electrode driving, to detect and trim effect better.
Advantageous Effects of the present invention:
The present invention makes full use of the microscopic heat conduction of microstructure, adopts the lumped mass block adding period profile on flexible frame, achieves quality and the rigidity decoupling zero of harmonic oscillator, makes structure can possess larger tuned mass and the less rigidity of structure simultaneously.This design can reach many outstanding speciality being of value to gyro performance: high Q
tEDvalue, large tuned mass and large driving amplitude, if adopt built-in electrode design or inside and outsidely put electrode and deposit design, can also realize large Detection capacitance and abundant trim electrode number.
In order to further understand feature of the present invention and technology contents, refer to following detailed description for the present invention, accompanying drawing and subordinate list, but institute's accompanying drawing only provides reference and explanation, is not used for being limited the present invention.
Accompanying drawing explanation
Fig. 1 shows thermoelasticity Q
tEDvalue and structural natural frequencies f and thermal relaxation frequency f
0the relation curve of ratio;
Fig. 2 A shows first mode (driven-mode) schematic diagram of the degenerate modes gyro harmonic oscillators such as the nested ring type MEMS oscillation gyro of band period profile lumped mass block;
Fig. 2 B shows second mode (sensed-mode) schematic diagram of the degenerate modes gyro harmonic oscillators such as the nested ring type MEMS oscillation gyro of band period profile lumped mass block;
Fig. 3 A shows topological form (left side) and the structural representation (right side) of the nested ring type harmonic oscillator of the lumped mass block adding period profile on the spoke-like brace summer of nested ring type flexible frame;
Fig. 3 B shows in each nested rings of nested ring type flexible frame, add the nested ring type harmonic oscillator of the lumped mass block of 8 period profile in the mode of " suspension " topological form (left side) and structural representation (right side);
Fig. 3 C shows in each nested rings of nested ring type flexible frame, add the nested ring type harmonic oscillator of the lumped mass block of 16 period profile in the mode of " suspension " topological form (left side) and structural representation (right side);
On the spoke-like brace summer of nested ring type flexible frame with nested rings, topological form (left side) and the structural representation (right side) of the nested ring type harmonic oscillator of period profile lumped mass block is added the while that Fig. 3 D showing;
Fig. 4 shows and removes some inner mass to form the structural representation that vacancy places the nested ring type harmonic oscillator of the band period profile lumped mass block of built-in electrode;
Fig. 5 shows static(al) simulation result, for illustration of the miniature nested ring type harmonic oscillator very little static deformation under gravity adding period profile lumped mass block;
Fig. 6 A shows the first mode bending vibation mode picture of the nested ring type harmonic oscillator of band period profile lumped mass block;
Fig. 6 B shows the second mode bending vibation mode picture of the nested ring type harmonic oscillator of band period profile lumped mass block;
Fig. 7 A shows the nested ring type MEMS oscillation gyro structural representation of the band period profile lumped mass block adopting the equally distributed multiple external electrode of circumference;
Fig. 7 B shows the nested ring type MEMS oscillation gyro structural representation of the band period profile lumped mass block adopting multiple built-in electrode;
Fig. 7 C shows the nested ring type MEMS oscillation gyro structural representation simultaneously adopting external electrode and the band period profile lumped mass block of built-in electrode.
Embodiment
The present invention, by adding the decoupling zero that lumped mass block realizes quality and rigidity on axisymmetric nested ring type flexible frame, namely increases and can not to affect after tuned mass or the rigidity of only minimal effect structure.The topological schematic diagram (left figure) being depicted as four embodiments of nested ring type flexible frame adding the harmonic oscillator of lumped mass block as Fig. 3 A, 3B, 3C, 3D is made up of nested rings 2 and spoke-like brace summer 3 with nested ring type flexible frame 1 in structural representation (right figure) embodiment, and total is firmly anchored by anchor point 4 and substrate.
In Fig. 3 A illustrated embodiment, the spoke-like brace summer 3 of nested ring type flexible frame 1 arranges mass 5, between adjacent nested rings 2, spacing is equal and form ring between adjacent nested rings 2, all connected by 8 equally distributed brace summers 3 between adjacent nested rings 2, be equipped with 8 equally distributed masses 6 of circumferential cycle in each ring, mass 6 is arranged on brace summer 3.
Embodiment shown in Fig. 3 B, 3C is in the nested rings 2 of nested ring type flexible frame 1, adopt " suspension " mode to arrange the mass 6 of varying number.Many semi-girders 7 are evenly arranged on the inner side of nested rings 2 in annular, and the adjacent cantilever beam 7 in same ring and the spacing between adjacent cantilever beam 7 with brace summer 3 equal, described mass 6 is all fixed on semi-girder 7.In figure 3b, each nested rings 2 is provided with 8 semi-girders 7, and semi-girder 7 one end is connected with nested rings 2, and the end of semi-girder 7 is used for arranging mass 6, be equipped with 8 equally distributed masses 6 of circumferential cycle in ring between adjacent nested rings 2, mass 6 is arranged on the end of hanging beam 7.In fig. 3 c, each nested rings 2 is provided with 16 semi-girders, and be equipped with 16 equally distributed masses 6 of circumferential cycle in the ring between 7 adjacent nested rings 2, mass 6 is all arranged on the end of hanging beam 7.Mass 6 adopts the mode of " suspension " to be connected with nested ring type flexible frame, and the stiffness effect for framework is very little;
Embodiment shown in Fig. 3 D is " suspension " mass 6 in the nested rings 2 of nested ring type flexible frame 1, arranges mass 5 on the spoke-like brace summer 3 of nested ring type flexible frame 1 simultaneously.
Increasing electrode number can increasing detection capacitance area, can also promote gyro simultaneously and drive and control efficiency, can promote gyro performance further.In the embodiment shown in fig. 4, the nested ring type harmonic oscillator 11 that the band circumference cycle is uniformly distributed lumped mass block comprises nested ring type flexible box 1, be arranged on the anchor point 4 of mass 6 on nested ring type flexible frame 1 and fixing harmonic oscillator 11, whole harmonic oscillator 11 is firmly anchored with substrate by the anchor point 4 being positioned at harmonic oscillator 11 center, described nested ring type flexible frame 1 entirety is axially symmetric structure, described nested ring type flexible frame 1 is made up of nested rings 2 and spoke-like brace summer 3, described nested rings 2 be multiple with anchor point 4 annulus that is the center of circle and between annulus equidistantly, by the support and connection of many equally distributed brace summers 3 between adjacent nested rings 2 and between the nested rings 2 and anchor point 4 of innermost layer, the distribution in spoke-like of whole brace summer 3 entirety, the ring 8 that mass or electrode are set is formed between adjacent nested rings 2, can by vacant for multiple ring 8 for placing built-in electrode, to increase electrode number.
Under microscopic heat conduction, the impact of gravity equal-volume power is slight, and the mass hung by thinner semi-girder can not produce larger sagging deflections, and thinner nested ring type framework also can support the structure of larger quality and not produce moderate finite deformation simultaneously.Added the static deformation of nested ring type harmonic oscillator under axial acceleration of gravity effect of mass by finite element software emulation, in simulation analysis, gravity acceleration g is set to 9.81m/s
2, direction is along harmonic oscillator axially.In emulation, nested these structural parameters of ring type Harmonic oscillator basis of each example belt period profile lumped mass block are as shown in table 1, the artificial material of harmonic oscillator is monocrystalline silicon, (displacement in figure amplifies process as shown in Figure 5 to emulate the nested ring type harmonic oscillator sagging deflections obtaining being with period profile lumped mass block, to observe deformation better), the harmonic oscillator maximum distortion numerical value under gravity of each embodiment is as shown in table 2.Shown by simulation result, although the nested ring type harmonic oscillator of band period profile lumped mass block has hung mass, gravity sag displacement has all been in the minimum level of nanometer scale, and the normal work for gyro can not have an impact.
Table 1 emulates nested these structural parameters of ring type Harmonic oscillator basis with period profile lumped mass block in each embodiment adopted
Table 2 emulates the nested ring type harmonic oscillator gravity sag displacement with period profile lumped mass block in each embodiment obtained
The harmonic oscillator of the present embodiment has lower equivalent stiffness and larger equivalent mass, therefore has lower natural frequency.Appear on the nested ring type flexible frame of structure owing to causing the construction machine-thermal coupling of thermoelastic damping, but nested ring type flexible frame thickness can realize very thin design, therefore structure has very little thermal relaxation time (namely very high thermal relaxation frequency).Lower natural frequency f and higher thermal relaxation frequency f is learnt by Fig. 1
0very high Q can be obtained
tEDvalue.
COMSOL Multiphysics software is adopted to carry out the thermoelastic damping simulation study of the operation mode of the nested ring type harmonic oscillator being with period profile lumped mass block, in emulation, the material of harmonic oscillator is set to monocrystalline silicon, wherein the operation mode of harmonic oscillator to be hoop wave number be 2 standing wave mode, as shown in Figure 6.By the thermoelastic properties of simulation architecture parameter each embodiment harmonic oscillator as shown in table 1, contrast simulation does not add the thermoelastic properties of the nested rings framework of mass simultaneously, and simulation result is as shown in table 3.Simulation result shows, adds the nested ring type harmonic oscillator of mass compared to the Q of nested rings frame work mode not adding lumped mass
tEDvalue improves several times.
Table 3 emulates the thermoelasticity Q of the nested ring type harmonic oscillator operation mode with period profile lumped mass block in each embodiment obtained
tEDvalue
The principle of work of the nested ring type MEMS oscillation gyro with period profile lumped mass block in embodiment is: by static-electronic driving mode, motivate harmonic oscillator driven-mode as shown in Figure 6A, when there being axial turning rate input, harmonic oscillator produces sensed-mode as shown in Figure 6B under the effect of coriolis force, the vibration of harmonic oscillator sensed-mode is by capacitance detecting mode, convert sensitive electrical signal to, this sensitive electrical signal is directly proportional to input angular velocity, involves the process such as amplification after filtration and can obtain input angular velocity information.
The setting of electrode has important impact for the performance of MEMS oscillation gyro.In the embodiment shown in Fig. 7 A, nested ring type MEMS oscillation gyro with period profile lumped mass block adopts external electrode design, electrode number can be designed according to actual needs, general 8 equally distributed electrodes of circumferential cycle can make gyro normally work, but the foozle of harmonic oscillator can affect the performance of gyro, therefore better mode arranges 16 or more circumference cycle equally distributed electrodes, electrode corresponding to (x '-O-y ') driving shaft (x-O-y) and sensitive axes is used for driving and the detection of gyro, the electrostatic force that residue electrode is used for gyro trims, realize the mobile equilibrium of gyro.
In the embodiment shown in Fig. 7 B, nested ring type MEMS oscillation gyro with period profile lumped mass block adopts built-in electrode design, built-in electrode is arranged in the inner collar of harmonic oscillator 11, the inner multiple ring of harmonic oscillator is used for built-in electrode, two circle electrodes 12 can be placed in a ring circle of harmonic oscillator anchor point, these built-in electrodes may be used for driving and trimming, also can place two circle electrodes 13 away from a ring circle of harmonic oscillator anchor point, these built-in electrodes may be used for detecting and trimming.Compared to external electrode design, built-in electrode design can increase electrode number, is conducive to gyro performance boost.
In the embodiment shown in Fig. 7 C, nested ring type MEMS oscillation gyro with period profile lumped mass block adopts external electrode and built-in electrode and the design of depositing, the two circle built-in electrodes 12 near anchor point may be used for driving and trimming, the two circle built-in electrodes 13 away from harmonic oscillator anchor point can be used for detecting and trimming, and external electrode 14 also can be used for detecting and trimming.
More than contain the explanation of the preferred embodiment of the present invention; this is to describe technical characteristic of the present invention in detail; be not want summary of the invention to be limited in the concrete form described by embodiment, other amendments carried out according to content purport of the present invention and modification are also protected by this patent.The purport of content of the present invention defined by claims, but not defined by the specific descriptions of embodiment.
Claims (10)
1. the nested ring type MEMS oscillation gyro with period profile lumped mass block, it is characterized in that: comprise the nested ring type harmonic oscillator of band period profile lumped mass block and be arranged on harmonic oscillator inside or/and the electrode of outside, described harmonic oscillator comprises nested ring type flexible frame, be arranged on the anchor point of mass on nested ring type flexible frame and fixing harmonic oscillator, whole harmonic oscillator is firmly anchored by the anchor point and substrate being positioned at harmonic oscillator center, described nested ring type flexible frame entirety is axially symmetric structure, described nested ring type flexible frame is made up of nested rings and spoke-like brace summer, the annulus in described nested rings to be multiple with anchor point the be center of circle and between annulus equidistantly, by the support and connection of many equally distributed spoke-like brace summers between adjacent nested rings and between the nested rings and anchor point of innermost layer, mass is arranged in the ring between adjacent nested rings, multiple mass is evenly distributed in multiple ring in the circumference cycle, be arranged in all mass distribution of same ring circumferentially same, the number of the mass in each ring is equal.
2. the nested ring type MEMS oscillation gyro of band period profile lumped mass block according to claim 1, is characterized in that: described mass is all fixed on spoke-like brace summer.
3. the nested ring type MEMS oscillation gyro of band period profile lumped mass block according to claim 1, it is characterized in that: also comprise the semi-girder for arranging mass, many semi-girders are evenly arranged on the medial/lateral of nested rings, semi-girder one end is fixedly connected in nested rings, the end of semi-girder stretches in the ring of nested rings medial/lateral, and the adjacent cantilever beam in same ring and the spacing between adjacent cantilever beam with spoke-like brace summer equal, the end of every root semi-girder is all fixed with a mass.
4. the nested ring type MEMS oscillation gyro of band period profile lumped mass block according to claim 1, it is characterized in that: also comprise the semi-girder for arranging mass, many semi-girders are evenly arranged on the medial/lateral of nested rings, semi-girder one end is fixedly connected in nested rings, the end of semi-girder stretches in the ring of nested rings medial/lateral, and the adjacent cantilever beam in same ring and the spacing between adjacent cantilever beam with spoke-like brace summer equal, be positioned on the semi-girder of same ring and spoke-like brace summer and be provided with mass.
5. the nested ring type MEMS oscillation gyro of the band period profile lumped mass block according to claim 1,2,3 or 4, is characterized in that: the nested ring type harmonic oscillator of band period profile lumped mass block adopts high thermal conductivity material to be made.
6. the nested ring type MEMS oscillation gyro of band period profile lumped mass block according to claim 5, is characterized in that: the nested ring type harmonic oscillator of band period profile lumped mass block adopts monocrystalline silicon to be made.
7. the nested ring type MEMS oscillation gyro of band period profile lumped mass block according to claim 6, it is characterized in that: described electrode is arranged on harmonic oscillator outside, multiple electrode is evenly distributed on the periphery of harmonic oscillator in the circumference cycle, and the ring formed between adjacent nested rings is provided with in circumference cycle equally distributed mass.
8. the nested ring type MEMS oscillation gyro of band period profile lumped mass block according to claim 6, it is characterized in that: described electrode is arranged on harmonic oscillator inside, be distributed with in circumference cycle equally distributed multiple electrode at least one ring formed by adjacent nested rings, be provided with in circumference cycle equally distributed mass in the ring that all the other adjacent nested rings are formed.
9. the nested ring type MEMS oscillation gyro of band period profile lumped mass block according to claim 6, it is characterized in that: described harmonic oscillator outside and inside are provided with electrode, multiple electrode is evenly distributed on the periphery of harmonic oscillator in the circumference cycle, and be distributed with in circumference cycle equally distributed multiple electrode at least one ring formed by adjacent nested rings, be provided with in circumference cycle equally distributed mass in the ring that all the other adjacent nested rings are formed.
10. the nested ring type MEMS oscillation gyro of band period profile lumped mass block according to claim 8 or claim 9, it is characterized in that: described harmonic oscillator inside is provided with electrode, multiple rings of described harmonic oscillator inside are used for built-in electrode, near anchor point two adjacent rings in place two circle electrodes and this two circle electrode be used for drive and trim, the ring circle away from anchor point built-in two circle electrodes and this two circle electrode be used for detect and trim.
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