CN114893792A - Remote ignition system and method for hydrogen bromide synthesis furnace - Google Patents
Remote ignition system and method for hydrogen bromide synthesis furnace Download PDFInfo
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- CN114893792A CN114893792A CN202210573283.3A CN202210573283A CN114893792A CN 114893792 A CN114893792 A CN 114893792A CN 202210573283 A CN202210573283 A CN 202210573283A CN 114893792 A CN114893792 A CN 114893792A
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- CPELXLSAUQHCOX-UHFFFAOYSA-N Hydrogen bromide Chemical compound Br CPELXLSAUQHCOX-UHFFFAOYSA-N 0.000 title claims abstract description 234
- 229910000042 hydrogen bromide Inorganic materials 0.000 title claims abstract description 117
- 230000015572 biosynthetic process Effects 0.000 title claims abstract description 64
- 238000003786 synthesis reaction Methods 0.000 title claims abstract description 64
- 238000000034 method Methods 0.000 title claims description 34
- GDTBXPJZTBHREO-UHFFFAOYSA-N bromine Substances BrBr GDTBXPJZTBHREO-UHFFFAOYSA-N 0.000 claims abstract description 166
- 239000001257 hydrogen Substances 0.000 claims abstract description 157
- 229910052739 hydrogen Inorganic materials 0.000 claims abstract description 157
- 229910052794 bromium Inorganic materials 0.000 claims abstract description 156
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 claims abstract description 153
- WKBOTKDWSSQWDR-UHFFFAOYSA-N Bromine atom Chemical compound [Br] WKBOTKDWSSQWDR-UHFFFAOYSA-N 0.000 claims abstract description 152
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 claims abstract description 108
- 239000007789 gas Substances 0.000 claims abstract description 85
- 230000001105 regulatory effect Effects 0.000 claims abstract description 60
- 229910052757 nitrogen Inorganic materials 0.000 claims abstract description 53
- 238000010926 purge Methods 0.000 claims abstract description 13
- 238000002485 combustion reaction Methods 0.000 claims description 16
- 230000001276 controlling effect Effects 0.000 claims description 7
- 238000012544 monitoring process Methods 0.000 claims description 7
- 150000002431 hydrogen Chemical class 0.000 claims description 5
- 230000002194 synthesizing effect Effects 0.000 claims description 5
- 230000003247 decreasing effect Effects 0.000 claims description 4
- 230000005484 gravity Effects 0.000 claims description 4
- 238000007689 inspection Methods 0.000 claims description 3
- 239000007800 oxidant agent Substances 0.000 claims description 3
- 230000001590 oxidative effect Effects 0.000 claims description 3
- 238000001816 cooling Methods 0.000 claims description 2
- 239000000047 product Substances 0.000 description 61
- 239000003570 air Substances 0.000 description 58
- 238000006243 chemical reaction Methods 0.000 description 14
- 239000002994 raw material Substances 0.000 description 9
- 239000001301 oxygen Substances 0.000 description 8
- 229910052760 oxygen Inorganic materials 0.000 description 8
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 6
- 238000005530 etching Methods 0.000 description 5
- 238000004880 explosion Methods 0.000 description 5
- 230000008569 process Effects 0.000 description 5
- 238000004519 manufacturing process Methods 0.000 description 4
- 230000008901 benefit Effects 0.000 description 3
- 238000005049 combustion synthesis Methods 0.000 description 3
- 239000012535 impurity Substances 0.000 description 3
- 230000031709 bromination Effects 0.000 description 2
- 238000005893 bromination reaction Methods 0.000 description 2
- 238000009841 combustion method Methods 0.000 description 2
- 230000007797 corrosion Effects 0.000 description 2
- 238000005260 corrosion Methods 0.000 description 2
- 229910001873 dinitrogen Inorganic materials 0.000 description 2
- 239000000203 mixture Substances 0.000 description 2
- 238000002360 preparation method Methods 0.000 description 2
- 238000006479 redox reaction Methods 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- 230000007704 transition Effects 0.000 description 2
- BMYNFMYTOJXKLE-UHFFFAOYSA-N 3-azaniumyl-2-hydroxypropanoate Chemical compound NCC(O)C(O)=O BMYNFMYTOJXKLE-UHFFFAOYSA-N 0.000 description 1
- QGZKDVFQNNGYKY-UHFFFAOYSA-N Ammonia Chemical compound N QGZKDVFQNNGYKY-UHFFFAOYSA-N 0.000 description 1
- CPELXLSAUQHCOX-UHFFFAOYSA-M Bromide Chemical class [Br-] CPELXLSAUQHCOX-UHFFFAOYSA-M 0.000 description 1
- CBENFWSGALASAD-UHFFFAOYSA-N Ozone Chemical compound [O-][O+]=O CBENFWSGALASAD-UHFFFAOYSA-N 0.000 description 1
- 229910052581 Si3N4 Inorganic materials 0.000 description 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
- 230000004913 activation Effects 0.000 description 1
- 150000001347 alkyl bromides Chemical class 0.000 description 1
- 230000008033 biological extinction Effects 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- 150000001875 compounds Chemical class 0.000 description 1
- 238000012790 confirmation Methods 0.000 description 1
- 239000000498 cooling water Substances 0.000 description 1
- 238000013461 design Methods 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005485 electric heating Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 239000012467 final product Substances 0.000 description 1
- NBVXSUQYWXRMNV-UHFFFAOYSA-N fluoromethane Chemical compound FC NBVXSUQYWXRMNV-UHFFFAOYSA-N 0.000 description 1
- 239000005431 greenhouse gas Substances 0.000 description 1
- 229910001503 inorganic bromide Inorganic materials 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 238000002156 mixing Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 239000003921 oil Substances 0.000 description 1
- 239000000843 powder Substances 0.000 description 1
- 238000000746 purification Methods 0.000 description 1
- 238000011084 recovery Methods 0.000 description 1
- 238000000926 separation method Methods 0.000 description 1
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 1
- 238000012546 transfer Methods 0.000 description 1
Images
Classifications
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F23—COMBUSTION APPARATUS; COMBUSTION PROCESSES
- F23Q—IGNITION; EXTINGUISHING-DEVICES
- F23Q21/00—Devices for effecting ignition from a remote location
-
- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
- C01B7/00—Halogens; Halogen acids
- C01B7/09—Bromine; Hydrogen bromide
- C01B7/093—Hydrogen bromide
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
- Y02E60/00—Enabling technologies; Technologies with a potential or indirect contribution to GHG emissions mitigation
- Y02E60/30—Hydrogen technology
- Y02E60/32—Hydrogen storage
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- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Organic Chemistry (AREA)
- Combustion & Propulsion (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Inorganic Chemistry (AREA)
- Hydrogen, Water And Hydrids (AREA)
Abstract
The invention discloses a remote ignition system for a hydrogen bromide synthetic furnace, which comprises a bromine vapor control unit, a compressed air control unit, a hydrogen control unit, a tail gas control unit and a hydrogen bromide product control unit; the hydrogen control unit comprises a hydrogen product pipeline and an emergency nitrogen replacement pipeline which are arranged in parallel; the tail gas discharge end is provided with a tail gas control unit, the tail gas control unit comprises a tail gas switch valve and a tail gas regulating valve which are arranged in parallel, and the outlet of the tail gas discharge end is provided with a second hydrogen concentration online monitor; and when the in-furnace hydrogen concentration of the synthesis furnace exceeds a set threshold value, the bromine steam control unit, the compressed air control unit and the hydrogen control unit are closed, the tail gas switch valve and the nitrogen switch valve are opened, nitrogen purging replacement is carried out on a gas system in the hydrogen bromide synthesis furnace, and nitrogen is blown in to reduce the hydrogen concentration.
Description
Technical Field
The invention relates to the technical field of hydrogen bromide synthesis, in particular to a remote ignition system and a remote ignition method for a bromination synthesis furnace.
Background
Hydrogen bromide, a binary compound known as hydrobromic acid, HBr, is highly corrosive, reacts with some reactive metal powders, and is a basic raw material for the manufacture of various inorganic bromides and certain alkyl bromides. The strong corrosiveness of the silicon nitride can be applied to an etching process in the semiconductor industry. In the prior art, the plasma hydrogen bromide etching technology can accurately control the etching depth and the verticality, does not damage an ozone layer, does not generate greenhouse gas and is a good substitute of fluorocarbon etching gas. With the development of the semiconductor industry, it has raised higher requirements on the purity of electronic grade hydrogen bromide used for etching the main process of the manufacturing process, and in the manufacturing process, if impurities are polluted, the damage of the circuit function in the wafer is easily caused, so that the failure of the integrated circuit and the formation of the geometrical characteristics are affected, and therefore, the hydrogen bromide gas with high purity is required.
The prior art methods for synthesizing hydrogen bromide include direct combustion synthesis of bromine and hydrogen, and others. For example, in a device and a method for synthesizing hydrogen bromide disclosed in chinese patent CN110523351A, hydrogen bromide is obtained by reacting bromine with ammonia gas to generate hydrogen bromide and nitrogen gas, and then separating out the nitrogen gas. The final product hydrogen bromide of the methods contains more impurities, increases the difficulty of separation and purification, and hinders the utilization of the hydrogen bromide in the direction of electronic grade hydrogen bromide.
Therefore, the direct combustion synthesis method is the main method for synthesizing electronic grade hydrogen bromide in order to obtain high purity hydrogen bromide gas. However, the reaction conditions are severe, the nozzle design of the combustion equipment is demanding and complicated, and uneven mixing of the raw materials is likely to occur. The invention discloses a hydrogen bromide synthesis furnace which adopts a replacement ignition method, firstly, oxygen and hydrogen are ignited for combustion reaction, after flame is stabilized, bromine vapor is used for replacing oxygen for hydrogen bromide synthesis reaction, and the method not only reduces impurities in the hydrogen bromide product, but also solves the problem of unstable flame caused by direct ignition of bromine and hydrogen. However, the replacement ignition method adopted by the method needs to be ignited on site by operators in the ignition process, and has more ignition operation steps, and the replacement ignition method needs the operators to perform gradual operation strictly according to the operation steps, so that the operators are easy to operate by mistake in the ignition process to extinguish flame, the hydrogen is excessive and seriously reaches the explosion limit to cause flash explosion, and the control room cannot judge the flame state in the normal production process. Clearly, there is a significant safety risk associated with this field ignition method. Therefore, the invention further improves the ignition system of the synthesis furnace on the basis of the hydrogen bromide synthesis furnace, and improves the on-site ignition system into a remote ignition system.
Disclosure of Invention
The invention aims to provide a remote ignition system and a remote ignition method for bromination synthesis, which do not need to ignite on site by operators, can leave the site to remotely control the ignition system only by checking whether the states of all valves and equipment are in initial preparation states on site by the operators, and can avoid the safety problem caused by artificial misoperation.
In order to achieve the purpose of the invention, the technical scheme of the invention is as follows:
a remote ignition system for a hydrogen bromide synthetic furnace is provided, wherein a nozzle is arranged at the bottom of the hydrogen bromide synthetic furnace, a tail gas discharge end and a product output end are arranged at the top of the hydrogen bromide synthetic furnace, and the remote ignition system comprises a bromine vapor control unit, a compressed air control unit, a hydrogen control unit, a tail gas control unit and a hydrogen bromide product control unit; the bromine vapor control unit, the compressed air control unit and the hydrogen control unit are respectively connected with the nozzle; the hydrogen control unit comprises a hydrogen product pipeline and an emergency nitrogen replacement pipeline which are arranged in parallel; a nitrogen switch valve and a nitrogen pipeline check valve are arranged on the emergency nitrogen replacement pipeline; the output end of the product is provided with a hydrogen bromide product control unit; the tail gas discharge end is provided with a tail gas control unit, the tail gas control unit comprises a tail gas switch valve and a tail gas regulating valve which are arranged in parallel, and the outlet of the tail gas discharge end is provided with a second hydrogen concentration online monitor for detecting the hydrogen concentration of the port; and when the in-furnace hydrogen concentration of the synthesis furnace exceeds a set threshold value, the bromine steam control unit, the compressed air control unit and the hydrogen control unit are closed, the tail gas switch valve and the nitrogen switch valve are opened, nitrogen purging replacement is carried out on a gas system in the hydrogen bromide synthesis furnace, and nitrogen is blown in to reduce the hydrogen concentration.
Further, an air input port, a hydrogen input port and a bromine steam input port are arranged on the nozzle; the bromine vapor control unit, the compressed air control unit, and the hydrogen control unit are connected to the bromine vapor input port, the air input port, and the hydrogen input port, respectively.
Furthermore, the bromine vapor control unit comprises a bromine product pipeline connected with a bromine vapor input port, and a bromine high-level tank, a bromine flowmeter, a bromine flow regulating valve, a liquid bromine switch valve, a bromine evaporator, a bromine vapor temperature control device and a bromine vapor switch valve which are sequentially arranged on the bromine product pipeline; the bromine high-level tank is arranged at the top end of the bromine product pipeline and provides bromine for the hydrogen bromide synthesis furnace; and the bromine flow meter and the bromine flow regulating valve control the flow of bromine flowing into the bromine evaporator from the bromine high-level tank.
Furthermore, the arrangement height range of the bromine high-level tank is 3-7 m, so that bromine automatically flows into the bromine evaporator through gravity; the temperature of bromine vapor at the outlet of the bromine evaporator is 75-150 ℃.
Furthermore, the compressed air control unit comprises an air product pipeline fixedly connected with the air input port, and an air flow meter, an air regulating valve and an air switch valve which are sequentially arranged on the air product pipeline; the air flow meter of the air product pipeline and the air flow regulating valve are used for controlling and regulating the flow of compressed air, and the flow of the compressed air is 30-50% of the flow of bromine.
Further, the hydrogen control unit comprises a hydrogen product pipeline connected with the hydrogen input port, and a hydrogen flow meter, a hydrogen flow regulating valve, a hydrogen product pipeline, a hydrogen switch valve and a hydrogen pipeline check valve which are sequentially arranged on the hydrogen product pipeline; the hydrogen flowmeter and the hydrogen flow regulating valve are used for controlling the flow of hydrogen, and the molar flow ratio of hydrogen to bromine is 1.05-1.15: 1.
Further, a flame arrestor is arranged on the hydrogen product pipeline close to the hydrogen input port; the emergency nitrogen replacement pipeline is arranged between the hydrogen pipeline check valve and the flame arrester and is connected with the hydrogen product pipeline in parallel.
Furthermore, the hydrogen bromide product control unit comprises a hydrogen bromide product pipeline, and a hydrogen bromide regulating valve, a hydrogen bromide cooler and a first hydrogen concentration online monitor which are sequentially arranged on the hydrogen bromide product pipeline; the first hydrogen concentration on-line monitoring instrument is used for detecting the concentration of hydrogen at the output end of a product, and when the concentration of the hydrogen exceeds a threshold value set by the first hydrogen concentration on-line monitoring instrument, the bromine switch valve, the bromine steam switch valve, the hydrogen switch valve and the hydrogen bromide regulating valve are automatically closed, the nitrogen switch valve and the tail gas switch valve are automatically opened, a gas system in a furnace of the hydrogen bromide synthetic furnace is subjected to nitrogen purging replacement, and nitrogen is blown in to reduce the concentration of the hydrogen in the furnace.
Further, a flame monitor and an SIS interlock are arranged on the outer wall of the hydrogen bromide synthetic furnace within the flame height range, the flame monitor automatically detects the flame combustion condition in the hydrogen bromide synthetic furnace, when the flame detector gives an alarm, the bromine switch valve, the bromine steam switch valve, the hydrogen switch valve and the hydrogen bromide regulating valve are automatically closed, the nitrogen switch valve and the tail gas switch valve are opened, and the nitrogen purging replacement of the hydrogen bromide synthetic furnace is realized.
The ignition method adopting the remote ignition system comprises the following operation steps:
s1, confirming the initial state of the inspection system on site: checking that the liquid bromine switch valve, the bromine steam switch valve, the bromine regulating valve, the air switch valve, the nitrogen switch valve, the hydrogen bromide regulating valve and the tail gas switch valve are all in a closed state; the tail gas regulating valve is in a full-open state; the bromine evaporator is in a hot standby state; the hydrogen bromide cooler is in a cold standby state.
S2, igniting a central control room: after the initial state is confirmed to be correct on site, the central control room carries out one-key ignition, and the ignition step comprises the following steps:
(1) opening the air switch valve and starting timing at the same time, wherein the time for the compressed air to enter the nozzle from the air switch valve is T 1 ；
(2)T 1 After the time, the automatic igniter ignites, and the ignition condition of the automatic igniter is monitored through a flame monitor;
(3) after the flame monitor monitors that the flame state of the automatic igniter is normal, a hydrogen switch valve is opened, and hydrogen enters the hydrogen bromide synthetic furnace to carry out combustion reaction;
(4) after the temperature of the hydrogen bromide synthesis furnace reaches a preset temperature, opening a liquid bromine switch valve and a bromine steam switch valve;
(5) respectively adjusting a bromine adjusting valve and an air adjusting valve, wherein the adjusting amplitude is 5% each time, the adjusting interval time is 3-10 min, and gradually replacing an oxidant in the furnace of the hydrogen bromide synthetic furnace with bromine steam from air;
(6) and after the replacement is finished and the flame is stabilized, gradually increasing the hydrogen bromide regulating valve and decreasing the tail gas regulating valve, switching the synthesized hydrogen bromide product into a hydrogen bromide cooler, and collecting and storing the hydrogen bromide product after cooling.
Synthesizing high-purity hydrogen bromide gas by adopting a replacement ignition method; the replacement ignition method is to mix hydrogen and compressed air, ignite and burn the mixture to generate oxidation-reduction reaction, and gradually replace the compressed air with bromine vapor to react with the hydrogen to synthesize hydrogen bromide.
In the replacement ignition method, the gas in the synthesis furnace has the transition from hydrogen-oxygen two reaction gases to hydrogen-oxygen-bromine steam three reaction gases to hydrogen-bromine steam two reaction gases.
Because the direct synthesis of bromine vapor and hydrogen by the combustion method requires high activation energy, the temperature of a combustion chamber is generally 800 ℃, while the bromine vapor needs to be preheated to more than 350 ℃ before the reaction, more importantly, the combustion reaction of hydrogen and bromine gas is extremely easy to explode, and the danger coefficient is very high.
However, the synthesis of hydrogen bromide by a combustion method has the advantages of good stability and strong continuity and operability, so that on the basis of the prior art, the invention adopts a replacement ignition method, realizes remote control ignition by regulating and controlling the conditions of raw material gas and product gas at an input end and an output end, avoids direct ignition and combustion of hydrogen and bromine vapor, adopts the existing method of carrying out combustion reaction on hydrogen and oxygen, then introduces bromine vapor to carry out combustion with hydrogen, gradually increases the content of the bromine vapor, reduces the content of oxygen until the bromine vapor completely replaces the oxygen, realizes the combustion synthesis of the bromine vapor and the hydrogen, generates hydrogen bromide gas, and has the advantages of extremely easy reaction and simple operation.
In summary, the present invention adopts the above technical solutions to obtain the following technical effects:
1. by adopting the technical scheme of the invention, the remote control ignition is realized by regulating and controlling the conditions of the raw material gas and the product gas at the input end and the output end, and an operator only needs to check whether the states of each valve and equipment are in an initial preparation state before reaction, so that the field operation of the operator is not required, and the ignition device is safe and reliable.
2. The high-level bromine tank is arranged at the height position of 3m or more and h or less than 7m, and bromine automatically flows into the bromine evaporator through gravity, so that the bromine is prevented from being conveyed by a pump, and corrosion and leakage are reduced.
3. The remote ignition system has a simple structure, can be matched with the synthesis furnace in the prior art for use, is convenient to operate, saves the manual operation cost, and improves the economic benefit.
4. The remote ignition system of the invention combines the replacement ignition method in the prior art, firstly uses the compressed air and the hydrogen for ignition to carry out combustion reaction, and then uses the bromine vapor to replace the compressed air, thereby greatly reducing the danger coefficient of direct reaction of the bromine vapor and the hydrogen.
5. The invention is based on a replacement ignition method, adopts the synthesis furnace in the prior art to carry out remote ignition control, further improves the synthesis safety, reduces the danger coefficient caused by personnel misoperation and improves the ignition operation accuracy on the basis of realizing the synthesis of high-purity hydrogen bromide.
6. The invention is additionally provided with a nitrogen control unit, a nitrogen purging mode can be automatically started according to the monitoring of the on-line hydrogen concentration, the flame combustion condition in a synthesis path is automatically detected, SIS interlocking is also arranged, when a flame detector gives an alarm, the switch valves of all pipelines are automatically closed, and meanwhile, the nitrogen switch valve and the tail gas switch valve are opened, the nitrogen purging replacement is carried out on the synthesis furnace, the hydrogen concentration in the synthesis furnace is reduced, and the risk of explosion is eliminated.
Drawings
Fig. 1 is a schematic structural view of embodiment 1 of the present invention.
The labels in the figure are: bromine high-level tank 1, bromine product pipeline 2, bromine flowmeter 3, bromine regulating valve 4, liquid bromine flow switch valve 5, bromine evaporator 6, bromine steam switch valve 7, bromine steam delivery port 8, air product pipeline 9, air flowmeter 10, air regulating valve 11, air switch valve 12, air delivery port 13, nitrogen switch valve 14, hydrogen flowmeter 15, hydrogen flow regulating valve 16, hydrogen product pipeline 17, hydrogen switch valve 18, hydrogen pipeline check valve 19, hydrogen delivery port 20, automatic igniter 21, flame monitor 22, hydrogen bromide regulating valve 23, furnace pressure control device 24, emergency nitrogen replacement pipeline 25, furnace temperature control device 26, hydrogen bromide cooler 27, first hydrogen concentration on-line monitor 28, hydrogen bromide product pipeline 29, tail gas switch valve 30, tail gas regulating valve 31, second hydrogen concentration on-line monitor 32, hydrogen gas replacement pipeline 25, furnace temperature control device 26, hydrogen bromide on-line monitor 28, hydrogen bromide product pipeline 29, tail gas switch valve 30, tail gas control valve 31, hydrogen concentration on-line monitor 32, Rupture disk 33, nozzle 34, synthesis furnace 35, bromine vapor temperature control device 36, nitrogen pipeline check valve 37, flame arrester 38.
Detailed Description
The invention adopts a replacement ignition method to synthesize high-purity hydrogen bromide gas; the replacement ignition method is to mix hydrogen and compressed air, ignite and burn the mixture to generate oxidation-reduction reaction, and gradually replace the compressed air with bromine vapor to react with the hydrogen to synthesize hydrogen bromide. In the replacement ignition method, the gas in the synthesis furnace has the transition from hydrogen-oxygen two reaction gases to hydrogen-oxygen-bromine steam three reaction gases to hydrogen-bromine steam two reaction gases. Based on a replacement ignition method, a synthesis furnace in the prior art is adopted for remote ignition control, and on the basis of realizing the synthesis of high-purity hydrogen bromide, the safety of synthesis is further improved, the danger coefficient caused by misoperation of personnel is reduced, and the accuracy of ignition operation is improved.
The technical solutions in the embodiments of the present invention are clearly and completely described below with reference to the specific contents of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments of the present invention without making any creative effort, shall fall within the protection scope of the present invention.
Example 1
The hydrogen bromide synthesis furnace selected in the embodiment is the structure of the synthesis furnace disclosed in the Chinese invention patent CN 113501500A.
The synthesis furnace 35 comprises a nozzle 34 arranged at the bottom and a tail gas discharge end and a product output end arranged at the top. The nozzle 34 is provided with a material delivery port. The raw material gas is conveyed into the synthesis furnace 35 through the raw material conveying port for reaction, the tail gas is discharged through the tail gas discharge port, and the product is output through the product output port.
In this embodiment, the nozzle 34 extends into the interior of the synthesis furnace 35, and an automatic igniter 21 is provided at the furnace exit of the nozzle 34.
The raw material conveying ports are all arranged on the nozzle 34, comprise an air inlet port 13, a hydrogen inlet port 20 and a bromine steam inlet port 8, and are respectively connected with an air product pipeline 9, a hydrogen product pipeline 17 and a bromine product pipeline 2 to convey air, hydrogen and bromine into the synthesis furnace 35 through the nozzle 34.
The synthesized hydrogen bromide is withdrawn via hydrogen bromide product line 29. Other tail gas passes through the tail gas discharge port
Referring to fig. 1, in the present embodiment, three control units, namely, a bromine vapor control unit, a compressed air control unit and a hydrogen control unit, are connected to the nozzle 34.
Specifically, the bromine vapor control unit includes a bromine product line 2 connected to a bromine vapor input port 8; the bromine vapor recovery device further comprises a bromine high-level tank 1, a bromine flowmeter 3, a bromine flow regulating valve 4, a liquid bromine switch valve 5, a bromine evaporator 6, a bromine vapor temperature control device 36 and a bromine vapor switch valve 7 which are sequentially arranged on a bromine product pipeline 2. The bromine high-level tank 1 is arranged at the top end of a bromine product pipeline 2 and provides bromine reaction raw materials for the synthesis furnace 35.
Preferably, the required range of the arrangement height h of the bromine high-level tank 1 is 3 m-7 m, and the bromine raw material is arranged at a high level, so that bromine automatically flows into the bromine evaporator 6 by gravity, the delivery by a pump is avoided, and the corrosion and leakage are reduced. And the bromine flow is controlled by a bromine flow meter 3 and a bromine flow regulating valve 4.
More preferably, the heat source of the bromine evaporator 6 can use electric heating, steam or heat transfer oil, etc., and the temperature of bromine vapor at the outlet of the bromine evaporator 6 is required to be in the range of 75 ℃ to t 150 ℃.
The compressed air control unit comprises an air product pipeline 9 fixedly connected with an air input port 13, and further comprises an air flow meter 10, an air regulating valve 11 and an air switch valve 12 which are sequentially arranged on the air product pipeline 9.
Preferably, the air flow meter 10 and the air flow regulating valve 11 of the air product line 9 are used to control and regulate the flow of compressed air, which is 30% to 50% of the bromine flow.
The hydrogen control unit comprises a hydrogen product pipeline 17 fixedly connected with a hydrogen input port 20, and further comprises a hydrogen flow meter 15, a hydrogen flow regulating valve 16, a hydrogen product pipeline 17, a hydrogen switch valve 18 and a hydrogen pipeline check valve 19 which are sequentially arranged on the hydrogen product pipeline 17.
Preferably, the hydrogen product pipeline 17 is provided with a hydrogen flow meter 15 and a hydrogen flow regulating valve 16 for controlling the hydrogen flow, and the molar flow ratio of hydrogen to bromine is automatically regulated to 1.05-1.15: 1 through proportion control.
Further, the hydrogen product line 17 is provided with a flame arrestor 38 near the hydrogen input port 20 to prevent flame flashback and explosion.
In this embodiment, an emergency nitrogen replacement pipeline 25 is provided between the hydrogen pipeline check valve 19 and the flame arrester 38, and is used for performing nitrogen purging replacement on the whole system in the synthesis furnace under the conditions of failed ignition, flame extinction and shutdown of the synthesis furnace 35, so as to prevent explosion.
Preferably, the nitrogen product line 25 is connected in parallel with the hydrogen product line 17 and is fixedly connected to the hydrogen input port 20, and the nitrogen product line 25 is provided with a nitrogen switch valve 14 and a nitrogen line check valve 37.
Further, a hydrogen bromide product control unit and a tail gas control unit are respectively arranged at a tail gas discharge end and a product output end at the top end of the synthesis furnace 35.
Wherein, hydrogen bromide product control unit includes hydrogen bromide product pipeline 29 to and set gradually hydrogen bromide governing valve 23, hydrogen bromide cooler 27 and the online monitor 28 of first hydrogen concentration on hydrogen bromide product pipeline 29. The first hydrogen concentration on-line monitor 28 is used for detecting the concentration of hydrogen at the product end.
The hydrogen bromide cooler 27 is used to cool the hydrogen bromide product. Meanwhile, the first hydrogen concentration on-line monitor 28 is used for monitoring the hydrogen concentration of the hydrogen bromide product pipeline 29 on line, when the detection value of the first hydrogen concentration on-line monitor 28 exceeds a set value, the bromine switch valve 5, the bromine steam switch valve 7, the hydrogen switch valve 18 and the hydrogen bromide regulating valve 23 are automatically closed, the nitrogen switch valve 13 and the tail gas switch valve 30 are automatically opened, and nitrogen purging replacement is carried out on a gas system in the synthesis furnace 35.
The tail gas control unit comprises a tail gas switch valve 30, a tail gas regulating valve 31 and a rupture disc 33 which are arranged in parallel, and a second hydrogen concentration online monitor 32 is arranged at a tail gas discharge end and used for detecting the hydrogen concentration of a port; the rupture disk 33 is used to prevent overpressure rupture of the synthesis furnace 35.
Specifically, the second hydrogen concentration on-line monitor 32 is configured to monitor the concentration of hydrogen in the synthesis furnace 35 in an ignition state, and once the hydrogen concentration exceeds a set threshold, automatically close the air switch valve 12 and the hydrogen switch valve 18, automatically open the nitrogen switch valve 13 and the tail gas switch valve 30, perform nitrogen purging replacement on the gas system in the synthesis furnace 35, blow nitrogen to reduce the hydrogen concentration, allow re-ignition when the second hydrogen concentration on-line monitor 32 shows that the hydrogen concentration in the synthesis furnace 35 is lower than a required concentration, otherwise, each switch valve is in a locked state and cannot be operated.
Preferably, the synthetic furnace 35 is made of transparent quartz glass, so that internal flame combustion hydrogen can be conveniently monitored, the flame monitor 22 is arranged on the outer wall of the synthetic furnace 35 within the flame height range, the flame combustion condition in the synthetic furnace 35 can be automatically detected, SIS interlocking is arranged, when the flame monitor 22 gives an alarm, the bromine switch valve 5, the bromine steam switch valve 7, the hydrogen switch valve 18 and the hydrogen bromide regulating valve 23 are automatically closed, and the nitrogen switch valve 13 and the tail gas switch valve 30 are opened, so that nitrogen purging and replacement of the synthetic furnace 35 are realized.
The SIS interlock refers to a safety instrumentation system (SIS for short), is one of interlock systems, generally implements safety protection control of plant process equipment, and sometimes includes unit safety protection control. The method can be realized by adopting the prior art.
Preferably, the outer wall of the synthesis furnace 35 is provided with an outer jacket, and circulating cooling water is introduced into the jacket for removing heat generated in the reaction process and preventing the heat in the synthesis furnace from accumulating to cause overtemperature.
Further, a furnace pressure control device 24 and a furnace temperature control device 26 are respectively provided in the synthesis furnace 35 for monitoring the temperature and pressure of the synthesis furnace. Preferably, the pressure control device 24 is a pressure transmission, and when the pressure in the synthesis furnace exceeds a set value, the tail gas switch valve 36 is automatically opened, so that the synthesis furnace is prevented from being over-pressurized, and the replacement of rupture discs is reduced.
The system device is adopted for remote ignition, and comprises the following operation steps:
1. initial state of the field confirmation inspection system: checking that the liquid bromine switch valve 5, the bromine steam switch valve 7, the bromine regulating valve 4, the air regulating valve 11, the air switch valve 12, the nitrogen switch valve 13, the hydrogen switch valve 18, the hydrogen bromide regulating valve 23 and the tail gas switch valve 30 are all in a closed state; the tail gas regulating valve 31 is in a fully open state; the bromine evaporator 6 is in a hot standby state; the hydrogen bromide cooler 27 is in a cold-standby state.
2. Igniting a central control room: after the initial state is confirmed to be correct on site, the central control room carries out one-key ignition, and the ignition specific steps comprise:
(1) the air switch valve 12 is opened and at the same time, the timing is started and the time for the compressed air to enter the nozzle 34 from the air switch valve 12 is T 1 。
(2)T 1 After the time, the automatic igniter 21 ignites, the ignition condition is monitored through the flame monitor 22, and whether the flame state is normal or not is continuously monitored after the ignition is successful.
(3) The hydrogen switch valve 18 is opened, and hydrogen enters the nozzle 34 from the hydrogen switch valve 18 to perform combustion reaction with oxygen
(4) And after the temperature of the synthesis furnace thermometer reaches the preset temperature, opening the liquid bromine switch valve 5 and the bromine steam switch valve 7.
(5) And (3) gradually increasing the opening degree of the bromine regulating valve 4, decreasing the opening degree of the air regulating valve 11, regulating the amplitude by 5% each time, and regulating the interval time for 3-10 min, so that the oxidant in the synthesis furnace 35 is gradually replaced by bromine steam from air.
(6) After the replacement is finished and the flame is stabilized, the hydrogen bromide regulating valve 23 is gradually increased, the opening degree of the tail gas regulating valve 31 is decreased, the synthesized hydrogen bromide product is switched to the hydrogen bromide cooler 27, and the hydrogen bromide product is collected and stored after being cooled.
The previous description of the disclosed embodiments is provided to enable any person skilled in the art to make or use the present invention. Various modifications to these embodiments will be readily apparent to those skilled in the art, and the generic principles defined herein may be applied to other embodiments without departing from the spirit or scope of the invention. Thus, the present invention is not intended to be limited to the embodiments shown herein but is to be accorded the widest scope consistent with the principles and novel features disclosed herein.
Claims (10)
1. A remote ignition system for a hydrogen bromide synthetic furnace is characterized in that the remote ignition system comprises a bromine vapor control unit, a compressed air control unit, a hydrogen control unit, a tail gas control unit and a hydrogen bromide product control unit;
the bromine vapor control unit, the compressed air control unit and the hydrogen control unit are respectively connected with the nozzle;
the hydrogen control unit comprises a hydrogen product pipeline and an emergency nitrogen replacement pipeline which are arranged in parallel; a nitrogen switch valve and a nitrogen pipeline check valve are arranged on the emergency nitrogen replacement pipeline;
the output end of the product is provided with a hydrogen bromide product control unit;
the tail gas discharge end is provided with a tail gas control unit, the tail gas control unit comprises a tail gas switch valve and a tail gas regulating valve which are arranged in parallel, and the outlet of the tail gas discharge end is provided with a second hydrogen concentration online monitor for detecting the hydrogen concentration of the port;
and when the in-furnace hydrogen concentration of the synthesis furnace exceeds a set threshold value, the bromine steam control unit, the compressed air control unit and the hydrogen control unit are closed, the tail gas switch valve and the nitrogen switch valve are opened, nitrogen purging replacement is carried out on a gas system in the hydrogen bromide synthesis furnace, and nitrogen is blown in to reduce the hydrogen concentration.
2. The remote ignition system for a hydrogen bromide synthesis furnace as claimed in claim 1, wherein said nozzle is provided with an air input port, a hydrogen input port and a bromine vapor input port; the bromine vapor control unit, the compressed air control unit, and the hydrogen control unit are connected to the bromine vapor input port, the air input port, and the hydrogen input port, respectively.
3. The remote ignition system for the hydrogen bromide synthesis furnace as claimed in claim 2, wherein the bromine vapor control unit comprises a bromine product pipeline connected with a bromine vapor input port, and a bromine high-level tank, a bromine flow meter, a bromine flow regulating valve, a liquid bromine switch valve, a bromine evaporator, a bromine vapor temperature control device and a bromine vapor switch valve which are sequentially arranged on the bromine product pipeline;
the bromine high-level tank is arranged at the top end of the bromine product pipeline and provides bromine for the hydrogen bromide synthesis furnace;
and the bromine flow meter and the bromine flow regulating valve control the flow of bromine flowing into the bromine evaporator from the bromine high-level tank.
4. The remote ignition system for a hydrogen bromide synthesis furnace as claimed in claim 3, wherein said bromine head tank is disposed at a height ranging from 3m to 7m, such that bromine flows by gravity into said bromine evaporator; the temperature of bromine vapor at the outlet of the bromine evaporator is 75-150 ℃.
5. The remote ignition system for the furnace for synthesizing hydrogen bromide according to claim 3, wherein the compressed air control unit comprises an air product pipeline fixedly connected with the air input port, and an air flow meter, an air regulating valve and an air switch valve which are sequentially arranged on the air product pipeline; the air flow meter of the air product pipeline and the air flow regulating valve are used for controlling and regulating the flow of compressed air, and the flow of the compressed air is 30-50% of the flow of bromine.
6. The remote ignition system for a hydrogen bromide synthesis furnace as claimed in claim 3, wherein the hydrogen control unit comprises a hydrogen product pipeline connected with the hydrogen input port, and a hydrogen flow meter, a hydrogen flow regulating valve, a hydrogen product pipeline, a hydrogen switch valve and a hydrogen pipeline check valve which are arranged on the hydrogen product pipeline in sequence; the hydrogen flowmeter and the hydrogen flow regulating valve are used for controlling the flow of hydrogen, and the molar flow ratio of hydrogen to bromine is 1.05-1.15: 1.
7. The remote ignition system for a hydrogen bromide synthesis furnace as claimed in claim 6, wherein the hydrogen product line is provided with a flame arrestor proximate the hydrogen input port; the emergency nitrogen replacement pipeline is arranged between the hydrogen pipeline check valve and the flame arrester and is connected with the hydrogen product pipeline in parallel.
8. The remote ignition system for the hydrogen bromide synthesis furnace as claimed in claim 6, wherein the hydrogen bromide product control unit comprises a hydrogen bromide product pipeline, and a hydrogen bromide regulating valve, a hydrogen bromide cooler and a first hydrogen concentration on-line monitor which are sequentially arranged on the hydrogen bromide product pipeline; the first hydrogen concentration on-line monitoring instrument is used for detecting the concentration of hydrogen at the output end of a product, and when the concentration of the hydrogen exceeds a threshold value set by the first hydrogen concentration on-line monitoring instrument, the bromine switch valve, the bromine steam switch valve, the hydrogen switch valve and the hydrogen bromide regulating valve are automatically closed, the nitrogen switch valve and the tail gas switch valve are automatically opened, a gas system in a furnace of the hydrogen bromide synthetic furnace is subjected to nitrogen purging replacement, and nitrogen is blown in to reduce the concentration of the hydrogen in the furnace.
9. The remote ignition system for a hydrogen bromide synthesis furnace as claimed in claim 6,
the outer wall of the hydrogen bromide synthetic furnace is provided with a flame monitor and an SIS interlock in a flame height range, the flame monitor automatically detects the flame combustion condition in the furnace of the hydrogen bromide synthetic furnace, when the flame detector gives an alarm, the bromine switch valve, the bromine steam switch valve, the hydrogen switch valve and the hydrogen bromide regulating valve are automatically closed, the nitrogen switch valve and the tail gas switch valve are opened, and the nitrogen purging replacement of the hydrogen bromide synthetic furnace is realized.
10. A method of remote ignition employing the system of any one of claims 1-9, comprising the steps of:
s1, confirming the initial state of the inspection system on site: checking that the liquid bromine switch valve, the bromine steam switch valve, the bromine regulating valve, the air switch valve, the nitrogen switch valve, the hydrogen bromide regulating valve and the tail gas switch valve are all in a closed state; the tail gas regulating valve is in a full-open state; the bromine evaporator is in a hot standby state; the hydrogen bromide cooler is in a cold standby state.
S2, igniting a central control room: after the initial state is confirmed to be correct on site, the central control room carries out one-key ignition, and the ignition step comprises the following steps:
(1) opening the air switch valve and starting timing at the same time, wherein the time for the compressed air to enter the nozzle from the air switch valve is T 1 ；
(2)T 1 After the time, the automatic igniter ignites, and the ignition condition of the automatic igniter is monitored through a flame monitor;
(3) after the flame monitor monitors that the flame state of the automatic igniter is normal, a hydrogen switch valve is opened, and hydrogen enters the hydrogen bromide synthetic furnace to carry out combustion reaction;
(4) after the temperature of the hydrogen bromide synthesis furnace reaches a preset temperature, opening a liquid bromine switch valve and a bromine steam switch valve;
(5) respectively adjusting a bromine adjusting valve and an air adjusting valve, wherein the adjusting amplitude is 5% each time, the adjusting interval time is 3-10 min, and gradually replacing an oxidant in the furnace of the hydrogen bromide synthetic furnace with bromine steam from air;
(6) and after the replacement is finished and the flame is stabilized, gradually increasing the hydrogen bromide regulating valve and decreasing the tail gas regulating valve, switching the synthesized hydrogen bromide product into a hydrogen bromide cooler, and collecting and storing the hydrogen bromide product after cooling.
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113754165A (en) * | 2021-09-08 | 2021-12-07 | 山东瑞纳特化工有限公司 | Initiator waste acid recycling device system and method |
| CN115120994A (en) * | 2022-08-16 | 2022-09-30 | 苏州金宏气体股份有限公司 | Bromine evaporator and bromine evaporation system |
Citations (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4107263A (en) * | 1974-01-30 | 1978-08-15 | Hoechst Aktiengesellschaft | Process for the preparation of bromine and hydrogen bromide from ammonium bromide |
| US4203813A (en) * | 1978-11-01 | 1980-05-20 | United Technologies Corporation | Method for producing HBr |
| JPH06345410A (en) * | 1993-06-01 | 1994-12-20 | Kanegafuchi Chem Ind Co Ltd | Production of high-purity hydrochloric acid |
| CN1175549A (en) * | 1996-06-28 | 1998-03-11 | 埃勒夫阿托化学有限公司 | Process for production of hydrogen bromide gas and device for its implementation |
| US20080200006A1 (en) * | 2007-02-16 | 2008-08-21 | Hynix Semiconductor Inc. | Method for Forming Shallow Trench Isolation of Semiconductor Device |
| CN201313817Y (en) * | 2008-10-26 | 2009-09-23 | 滨化集团股份有限公司 | A fully-automatic ignition and fully-automatic control chloride hydride production device |
| CN103395745A (en) * | 2013-08-07 | 2013-11-20 | 内蒙古君正化工有限责任公司 | Interlock signal system for preventing perchlorination of hydrogen chloride gas, and method thereof |
| CN110562924A (en) * | 2019-09-12 | 2019-12-13 | 天津中科拓新科技有限公司 | Preparation method of electronic grade hydrogen bromide |
| CN113501500A (en) * | 2021-08-16 | 2021-10-15 | 苏州金宏气体股份有限公司 | Synthesis process and synthesis furnace of high-purity hydrogen bromide |
| CN215667146U (en) * | 2019-12-26 | 2022-01-28 | 陕西金泰氯碱化工有限公司 | Hydrogen chloride synthetic furnace interlocking protection system |
| CN114225649A (en) * | 2020-09-09 | 2022-03-25 | 金川集团股份有限公司 | Hydrogen chloride synthesis furnace tail gas absorption system provided with explosion-proof device |
-
2022
- 2022-05-24 CN CN202210573283.3A patent/CN114893792B/en active Active
Patent Citations (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4107263A (en) * | 1974-01-30 | 1978-08-15 | Hoechst Aktiengesellschaft | Process for the preparation of bromine and hydrogen bromide from ammonium bromide |
| US4203813A (en) * | 1978-11-01 | 1980-05-20 | United Technologies Corporation | Method for producing HBr |
| JPH06345410A (en) * | 1993-06-01 | 1994-12-20 | Kanegafuchi Chem Ind Co Ltd | Production of high-purity hydrochloric acid |
| CN1175549A (en) * | 1996-06-28 | 1998-03-11 | 埃勒夫阿托化学有限公司 | Process for production of hydrogen bromide gas and device for its implementation |
| US20080200006A1 (en) * | 2007-02-16 | 2008-08-21 | Hynix Semiconductor Inc. | Method for Forming Shallow Trench Isolation of Semiconductor Device |
| CN201313817Y (en) * | 2008-10-26 | 2009-09-23 | 滨化集团股份有限公司 | A fully-automatic ignition and fully-automatic control chloride hydride production device |
| CN103395745A (en) * | 2013-08-07 | 2013-11-20 | 内蒙古君正化工有限责任公司 | Interlock signal system for preventing perchlorination of hydrogen chloride gas, and method thereof |
| CN110562924A (en) * | 2019-09-12 | 2019-12-13 | 天津中科拓新科技有限公司 | Preparation method of electronic grade hydrogen bromide |
| CN215667146U (en) * | 2019-12-26 | 2022-01-28 | 陕西金泰氯碱化工有限公司 | Hydrogen chloride synthetic furnace interlocking protection system |
| CN114225649A (en) * | 2020-09-09 | 2022-03-25 | 金川集团股份有限公司 | Hydrogen chloride synthesis furnace tail gas absorption system provided with explosion-proof device |
| CN113501500A (en) * | 2021-08-16 | 2021-10-15 | 苏州金宏气体股份有限公司 | Synthesis process and synthesis furnace of high-purity hydrogen bromide |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113754165A (en) * | 2021-09-08 | 2021-12-07 | 山东瑞纳特化工有限公司 | Initiator waste acid recycling device system and method |
| CN115120994A (en) * | 2022-08-16 | 2022-09-30 | 苏州金宏气体股份有限公司 | Bromine evaporator and bromine evaporation system |
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|---|---|
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