CN106403625B - A kind of hydrogen annealing furnace exhaust treatment system and method - Google Patents
A kind of hydrogen annealing furnace exhaust treatment system and method Download PDFInfo
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- CN106403625B CN106403625B CN201610785971.0A CN201610785971A CN106403625B CN 106403625 B CN106403625 B CN 106403625B CN 201610785971 A CN201610785971 A CN 201610785971A CN 106403625 B CN106403625 B CN 106403625B
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F27—FURNACES; KILNS; OVENS; RETORTS
- F27D—DETAILS OR ACCESSORIES OF FURNACES, KILNS, OVENS, OR RETORTS, IN SO FAR AS THEY ARE OF KINDS OCCURRING IN MORE THAN ONE KIND OF FURNACE
- F27D17/00—Arrangements for using waste heat; Arrangements for using, or disposing of, waste gases
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F23—COMBUSTION APPARATUS; COMBUSTION PROCESSES
- F23G—CREMATION FURNACES; CONSUMING WASTE PRODUCTS BY COMBUSTION
- F23G7/00—Incinerators or other apparatus for consuming industrial waste, e.g. chemicals
- F23G7/06—Incinerators or other apparatus for consuming industrial waste, e.g. chemicals of waste gases or noxious gases, e.g. exhaust gases
- F23G7/061—Incinerators or other apparatus for consuming industrial waste, e.g. chemicals of waste gases or noxious gases, e.g. exhaust gases with supplementary heating
- F23G7/063—Incinerators or other apparatus for consuming industrial waste, e.g. chemicals of waste gases or noxious gases, e.g. exhaust gases with supplementary heating electric heating
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- Environmental & Geological Engineering (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Waste-Gas Treatment And Other Accessory Devices For Furnaces (AREA)
Abstract
The invention discloses a kind of hydrogen annealing furnace exhaust treatment systems, including discharge gas derived pipe, fire-retardant check valve, waste gas burner and waste discharge cylinder, the discharge gas derived pipe is connected to through the fire-retardant check valve with the inlet end of the waste gas burner, and the exhaust end of the waste gas burner is connected to the waste discharge cylinder；The present invention further discloses the waste gas processing methods of the hydrogen annealing furnace exhaust treatment system, include the following steps：S1, heating make the temperature to the burning point of hydrogen in waste gas burner or more；Exhaust gas is imported waste gas burner through fire-retardant check valve using discharge gas derived pipe, while importing air in waste gas burner by S2, exhaust gas and the oxygen combustion in air；S3, the water vapour and residual gas of generation of burning are discharged through waste discharge cylinder.The present invention has simple in structure, easy to operate.The advantages that safe.
Description
Technical field
The present invention relates to hydrogen annealing furnace more particularly to a kind of hydrogen annealing furnace exhaust treatment system and methods.
Background technology
The development of semiconductor technology is higher and higher to the quality requirements of semiconductor devices, in the silicon for studying discovery nearly ten years
The primary particle defect (COP) of small grown-in defects such as crystal, laser light scattering chromatography defect (LSTD) etc., all with the oxygen in silicon
It is related.It promotes being critical that in the silicon surface layer of making devices for Si wafer quality and forms low-oxygen area, to reduce lattice defect.Approach it
One is exactly to use hydrogen annealing process, and high annealing is carried out in hydrogen, and promoting the external diffusion of oxygen by hydrogen and reacted with oxygen will
Oxygen consumption is fallen, to improve Si wafer quality.Studies have shown that hydrogen annealing can reduce about quantity of oxidation stacking fault density in silicon chip
Grade also has positive effect for the defects of reduction silicon chip COP, LSTD.
Hydrogen annealing process is mainly completed in hydrogen annealing furnace, traditional hydrogen annealing furnace use mixed gases, one
As by measuring big nitrogen form (N with small hydrogen is measured：96%, O：4%), under the high temperature conditions, by mixed gases
Trace hydrogen reacts with the oxygen in silicon chip, and silicon chip surface layer is made to form low-oxygen area.This mixed gases have non-explosion hazard,
Belong to safe gas, reacted exhaust gas can be discharged directly.During hydrogen annealing process, the hypoxemia for formation of annealing
The quality and thickness in area by annealing temperature and annealing time in addition to being influenced, and also related to density of hydrogen, hydrogen purity is higher, impurity
Easier to be escaped from metal surface, the speed of impurity removal is faster, and effect is better.It is pure with the development of modern semiconductor technology
The demand of hydrogen annealing is increasingly apparent.In pure hydrogen annealing, process gas is inflammable, explosive hydrogen, the hydrogen in reaction tube
Gas purity is up to 99.99% or more, and the remaining hydrogen containing high-content in the exhaust gas of technical process discharge is directly discharged to air
In easily reach the explosion limit 4%-72% of hydrogen, careless slightly be likely to occur is caught fire or explosion accident.
Invention content
The technical problem to be solved by the present invention is to overcome the deficiencies in the prior art, provide a kind of simple in structure, safe
Hydrogen annealing furnace exhaust treatment system.The present invention further provides the exhaust-gas treatment sides based on the hydrogen annealing furnace exhaust-gas treatment
Method.
In order to solve the above technical problems, the present invention uses following technical scheme：A kind of hydrogen annealing furnace exhaust treatment system,
Including discharge gas derived pipe, fire-retardant check valve waste gas burner and waste discharge cylinder, the discharge gas derived pipe is through the fire-retardant check valve
It is connected to the inlet end of the waste gas burner, the exhaust end of the waste gas burner is connected to the waste discharge cylinder.
It is all made of VCR between the discharge gas derived pipe and fire-retardant check valve and between fire-retardant check valve and waste gas burner
It is welded to connect.
Based on the waste gas processing method of the hydrogen annealing furnace exhaust treatment system, include the following steps：
S1, heating make the temperature to the burning point of hydrogen in waste gas burner or more；
Exhaust gas is imported waste gas burner, while waste gas burner by S2 using discharge gas derived pipe through fire-retardant check valve
Middle importing air, exhaust gas and the oxygen combustion in air；
S3, the water vapour and residual gas of generation of burning are discharged through waste discharge cylinder.
As a further improvement of the above technical scheme：
The waste gas burner include combustion chamber and be set to the indoor exhaust blast pipe of combustion chamber and adding thermal resistance
Silk, the exhaust blast pipe is arranged in a vertical direction and air inlet is connected to the fire-retardant check valve, and the resistive heater is
Column is simultaneously arranged in parallel with the exhaust blast pipe, and the combustion chamber bottom is equipped with air inlet filter opening, the combustion chamber
It is connected to the waste discharge cylinder.
The resistive heater is equipped with two, and two resistive heaters are symmetrically arranged in exhaust blast pipe both sides, institute
State air inlet filter opening be equipped with it is multiple, multiple air inlet filter openings are evenly arranged in combustion chamber bottom.
Based on the waste gas processing method of the hydrogen annealing furnace exhaust treatment system, include the following steps：
S1, resistive heater are powered, and make combustion chamber indoor temperature to the burning point of hydrogen or more；
Exhaust gas is imported exhaust blast pipe by S2 using discharge gas derived pipe through fire-retardant check valve, while air is through air inlet
Filter opening enters combustion chamber, exhaust gas and the oxygen combustion in air；
S3, the water vapour and residual gas of generation of burning are discharged through waste discharge cylinder.
Hydrogen annealing furnace exhaust treatment system further includes safeguard protection component, and the safeguard protection component includes programmable control
The thermocouple of temperature at device processed, the gas outlet for detecting exhaust blast pipe, for detecting hydrogen leak in the waste discharge cylinder
The flame probe of hydrogen detection probe and spectral signal for acquiring combustion of hydrogen flame, the thermocouple are set to described useless
It is connect with the programmable controller in gas jet pipe and by a temperature controller, the hydrogen detection probe and the programmable control
Device connection processed, the flame probe is set on the side wall of the combustion chamber and height, the fire higher than the exhaust blast pipe
Flame probe is connect with the programmable controller, and the switch valve of the programmable controller and hydrogen annealing furnace air-channel system connects
It connects.
Based on the waste gas processing method of the hydrogen annealing furnace exhaust treatment system, include the following steps：
S1, resistive heater are powered, and thermocouple detects temperature at the gas outlet of exhaust blast pipe in real time, the temperature detected
Signal is sent to programmable controller through temperature controller, at the gas outlet of exhaust blast pipe it is more than temperature to the burning point of hydrogen after, can
Programmable controller controlling switch valve is opened, and exhaust gas passes through discharge gas derived pipe successively, fire-retardant check valve imports exhaust blast pipe, simultaneously
Air enters combustion chamber through air inlet filter opening；
S2, switch valve is kept open T seconds, if flame is not detected in flame probe, sends the unburned signal of fire extremely
Programmable controller, programmable controller controlling switch valve close and send out the unburned alarm of fire；If flame probe detects fire
Flame, then send igniting normal signal to programmable controller, programmable controller controlling switch valve is kept open, exhaust gas with
Oxygen combustion in air；Hydrogen detection probe is detected in waste discharge cylinder in real time with the presence or absence of hydrogen leak, thermoelectricity in combustion process
Temperature at the gas outlet of exhaust blast pipe is occasionally detected in real time and flame probe detects whether, with flame, to let out if there is hydrogen in real time
Dew, temperature are less than hydrogen burning point or fray-out of flame, then programmable controller controlling switch valve closes and sends out hydrogen gas leakage alarm signal
Number, low alarm temperature signal or fray-out of flame alarm signal；
S3, the water vapour and residual gas of generation of burning are discharged through waste discharge cylinder.
Compared with the prior art, the advantages of the present invention are as follows：Hydrogen annealing furnace exhaust treatment system disclosed by the invention,
Fire-retardant check valve is provided between discharge gas derived pipe and waste gas burner, exhaust gas can only be flowed to from the reaction tube of hydrogen annealing furnace
Waste gas burner avoids the flame in waste gas burner and strile-backs to reaction tube and combustion of hydrogen is even in initiation reaction pipe
Explosion, it is simple in structure, it is ensured that safety.
Hydrogen annealing furnace waste gas processing method disclosed by the invention, equally have the advantages that it is above-mentioned, and by burn to exhaust gas
It is handled, energy conservation and environmental protection.
Description of the drawings
Fig. 1 is the structural schematic diagram of hydrogen annealing furnace exhaust treatment system of the present invention.
Fig. 2 is the structural schematic diagram of the burner in the present invention.
Fig. 3 is the structural schematic diagram of the burner bottom in the present invention.
Fig. 4 is the structural schematic diagram of the exhaust blast pipe in the present invention.
Fig. 5 is the structural schematic diagram of the safeguard protection component in the present invention.
Fig. 6 is the flow diagram of hydrogen annealing furnace waste gas processing method of the present invention.
Each label indicates in figure：1, discharge gas derived pipe；2, fire-retardant check valve；3, waste gas burner；31, combustion chamber；
32, exhaust blast pipe；321, air inlet；322, gas outlet；33, resistive heater；34, air inlet filter opening；4, waste discharge cylinder；5、
Safeguard protection component；51, programmable controller；52, thermocouple；53, hydrogen detection probe；54, flame probe；55, temperature controller；
6, switch valve；7, reaction tube；8, bellows.
Specific implementation mode
The present invention is described in further details below with reference to Figure of description and specific embodiment.
Embodiment one
As shown in Figure 1, the hydrogen annealing furnace exhaust treatment system of the present embodiment, including discharge gas derived pipe 1, fire-retardant check valve
2 waste gas burners 3 and waste discharge cylinder 4, discharge gas derived pipe 1 are connected to through fire-retardant check valve 2 with the inlet end of waste gas burner 3,
The exhaust end of waste gas burner 3 is connected to waste discharge cylinder 4, and the hydrogen annealing furnace exhaust treatment system is in discharge gas derived pipe 1 and gives up
Fire-retardant check valve 2 is provided between gas burner 3, exhaust gas can only flow to waste gas burning dress from the reaction tube 7 of hydrogen annealing furnace
3 are set, the flame in waste gas burner 3 is avoided and strile-backs to reaction tube 7 and combustion of hydrogen even explosion in initiation reaction pipe 7,
It is simple in structure, it is ensured that safety.In the present embodiment, hydrogen annealing furnace opens up exhaust gas discharge orifice in the forward flange of reaction tube 7, useless
Jointing is installed in the circumference of flange end face that gas discharges hole site, and one end of discharge gas derived pipe 1 is connect with jointing, another
End is connect with fire-retardant check valve 2；The exhaust end of waste gas burner 3 is connected to waste discharge cylinder 4 by bellows 8.
In the present embodiment, between discharge gas derived pipe 1 and fire-retardant check valve 2 and fire-retardant check valve 2 and waste gas burner 3 it
Between be all made of VCR (abbreviation of Vacuum Coupling Radius Seal, be usually translated into bonding in vacuum radial seal, is partly leading
Body manufacture sector application is relatively broad) it is welded to connect, compared to cutting ferrule connection conventional between pipeline, VCR is welded to connect with more
Good air-tightness.
Based on the waste gas processing method of above-mentioned hydrogen annealing furnace exhaust treatment system, include the following steps：
S1, heating make the temperature to the burning point of hydrogen in waste gas burner 3 or more；
Exhaust gas is imported waste gas burner 3 by S2 using discharge gas derived pipe 1 through fire-retardant check valve 2, while waste gas burning fills
Air, exhaust gas and the oxygen combustion in air are imported in setting 3；
S3, the water vapour and residual gas of generation of burning are discharged through waste discharge cylinder 4.
Embodiment two
As shown in Figure 2, Figure 3 and Figure 4, on the basis of embodiment one, the hydrogen annealing furnace exhaust-gas treatment system of the present embodiment
System, waste gas burner 3 include combustion chamber 31 and the exhaust blast pipe 32 in combustion chamber 31 and resistive heater
33, exhaust blast pipe 32 is arranged in a vertical direction and air inlet 321 is connected to fire-retardant check valve 2, and 31 bottom of combustion chamber is equipped with
Air inlet filter opening 34, the air in external environment continuously enter combustion chamber 31 through air inlet filter opening 34, are not necessarily to
Additional oxygen supply is provided, combustion chamber 31 is connected to waste discharge cylinder 4, resistive heater 33 be column and with exhaust blast pipe 32
Parallel arrangement is more advantageous to air and reaches exhaust blast pipe compared to the conventional structure for winding resistance wire on exhaust blast pipe 32
It burns with the hydrogen ejected at 32 gas outlet 322.
In the present embodiment, resistive heater 33 is equipped with two, and two resistive heaters 33 are symmetrically arranged in exhaust blast pipe
32 both sides are more advantageous to and are evenly heated to exhaust blast pipe 32；Air inlet filter opening 34 is equipped with multiple, multiple air inlet filter openings
34 are evenly arranged in 31 bottom of combustion chamber so that the air in external environment can equably reach exhaust gas spray from all directions
It penetrates at the gas outlet 322 of pipe 32.
Based on the waste gas processing method of above-mentioned hydrogen annealing furnace exhaust treatment system, include the following steps：
S1, resistive heater 33 are powered, make in combustion chamber 31 more than temperature to the burning point of hydrogen；
Exhaust gas is imported exhaust blast pipe 32 by S2 using discharge gas derived pipe 1 through fire-retardant check valve 2, while air is through air
Air inlet filter opening 34 enters combustion chamber 31, exhaust gas and the oxygen combustion in air；
S3, the water vapour and residual gas of generation of burning are discharged through waste discharge cylinder 4.
Embodiment three
As shown in figure 5, on the basis of embodiment two, the hydrogen annealing furnace exhaust treatment system of the present embodiment further includes
Safeguard protection component 5, safeguard protection component 5 include programmable controller 51, the gas outlet 322 for detecting exhaust blast pipe 32
Locate the thermocouple 52 of temperature, the hydrogen detection probe 53 for detecting hydrogen leak in waste discharge cylinder 4 and for acquiring hydrogen combustion
Make a fire flame spectral signal flame probe 54, thermocouple 52 be set to exhaust blast pipe 32 in and by a temperature controller 55 with can compile
Range controller 51 connects, and hydrogen detection probe 53 is connect with programmable controller 51, and flame probe 54 is pacified by a transition lumen
On side wall loaded on combustion chamber 31 and height is higher than exhaust blast pipe 32, and flame probe 54 is connect with programmable controller 51,
Programmable controller 51 is connect with the switch valve 6 of hydrogen annealing furnace air-channel system, and setting safeguard protection component 5 can avoid high-purity
Exhaust gas without burn direct emission, further increase waste gas burning processing safety.
As shown in fig. 6, the waste gas processing method based on above-mentioned hydrogen annealing furnace exhaust treatment system, includes the following steps：
S1, resistive heater 33 are powered, and thermocouple 52 detects temperature at the gas outlet 322 of exhaust blast pipe 32, inspection in real time
The temperature signal measured is sent to programmable controller 51 through temperature controller 55, and temperature is extremely at the gas outlet 322 of exhaust blast pipe 32
After more than the burning point of hydrogen, 51 controlling switch valve 6 of programmable controller is opened, and exhaust gas passes through discharge gas derived pipe 1, fire-retardant list successively
Exhaust blast pipe 32 is imported to valve 2, while air enters combustion chamber 31 through air inlet filter opening 34；
S2, start-up study protective program, i.e. switch valve 6 are kept open T seconds (concrete numerical value are set according to actual conditions
Set), if flame is not detected in T seconds in flame probe 54, the unburned signal of fire is sent to programmable controller 51, may be programmed
51 controlling switch valve 6 of controller closes and sends out the unburned alarm of fire；If flame probe 54 detects flame, igniting is being sent just
Regular signal to programmable controller 51,51 controlling switch valve 6 of programmable controller is kept open, exhaust gas and the oxygen in air
Gas burns；Detection waste discharge cylinder 4 is interior real-time with the presence or absence of hydrogen leak, thermocouple 52 in real time for hydrogen detection probe 53 in combustion process
It detects temperature at the gas outlet 322 of exhaust blast pipe 32 and flame probe 54 is detected whether with flame in real time, if there is hydrogen
Leakage, temperature are less than hydrogen burning point or fray-out of flame, then 51 controlling switch valve 6 of programmable controller closes and sends out hydrogen gas leakage report
Alert signal, low alarm temperature signal or fray-out of flame alarm signal；
S3, the water vapour and residual gas of generation of burning are discharged through waste discharge cylinder 4.
Although the present invention has been disclosed as a preferred embodiment, however, it is not intended to limit the invention.It is any to be familiar with ability
The technical staff in domain, without deviating from the scope of the technical scheme of the present invention, all using the technology contents pair of the disclosure above
Technical solution of the present invention makes many possible changes and modifications, or is revised as the equivalent embodiment of equivalent variations.Therefore, every
Without departing from the content of technical solution of the present invention, according to the present invention technical spirit any simple modification made to the above embodiment,
Equivalent variations and modification, all shall fall within the protection scope of the technical scheme of the invention.
Claims (3)
1. a kind of waste gas processing method of hydrogen annealing furnace exhaust treatment system, hydrogen annealing furnace exhaust treatment system includes exhaust gas
Delivery line（1）, fire-retardant check valve（2）, waste gas burner（3）And waste discharge cylinder（4）, the discharge gas derived pipe（1）Through the resistance
Fire check valve（2）With the waste gas burner（3）Inlet end connection, the waste gas burner（3）Exhaust end and institute
State waste discharge cylinder（4）Connection, the waste gas burner（3）Including combustion chamber（31）And it is set to combustion chamber（31）Interior is useless
Gas jet pipe（32）And resistive heater（33）, the exhaust blast pipe（32）It is arranged in a vertical direction and air inlet（321）With
The fire-retardant check valve（2）Connection, the resistive heater（33）For column and with the exhaust blast pipe（32）Parallel arrangement,
The combustion chamber（31）Bottom is equipped with air inlet filter opening（34）, the combustion chamber（31）With the waste discharge cylinder（4）Connection,
Hydrogen annealing furnace exhaust treatment system further includes safeguard protection component（5）, the safeguard protection component（5）Including PLC technology
Device（51）, for detecting exhaust blast pipe（32）Gas outlet（322）Locate the thermocouple of temperature（52）, for detecting the waste discharge
Cylinder（4）The hydrogen detection probe of interior hydrogen leak（53）And the flame probe of the spectral signal for acquiring combustion of hydrogen flame
（54）, the thermocouple（52）Set on the exhaust blast pipe（32）It is interior and pass through a temperature controller（55）With the PLC technology
Device（51）Connection, the hydrogen detection probe（53）With the programmable controller（51）Connection, the flame probe（54）If
In the combustion chamber（31）Side wall on and height than the exhaust blast pipe（32）Height, the flame probe（54）With it is described
Programmable controller（51）Connection, the programmable controller（51）With the switch valve of hydrogen annealing furnace air-channel system（6）Connection,
It is characterized in that：Waste gas processing method includes the following steps：
S1, resistive heater（33）It is powered, thermocouple（52）Detection exhaust blast pipe in real time（32）Gas outlet（322）Place's temperature
Degree, the temperature signal detected is through temperature controller（55）It is sent to programmable controller（51）, exhaust blast pipe（32）Gas outlet
（322）After locating temperature to the burning point of hydrogen or more, programmable controller（51）Controlling switch valve（6）It opens, exhaust gas passes through successively
Discharge gas derived pipe（1）, fire-retardant check valve（2）Import exhaust blast pipe（32）, while air is through air inlet filter opening（34）Into
Combustion chamber（31）；
S2, switch valve（6）T seconds are kept open, flame probe（54）If flame is not detected, the unburned signal of fire is sent
To programmable controller（51）, programmable controller（51）Controlling switch valve（6）It closes and sends out the unburned alarm of fire；Flame probe
（54）If detecting flame, igniting normal signal is sent to programmable controller（51）, programmable controller（51）Control
Switch valve（6）It is kept open, exhaust gas and the oxygen combustion in air；Hydrogen detection probe in combustion process（53）Inspection in real time
Survey waste discharge cylinder（4）It is interior to whether there is hydrogen leak, thermocouple（52）Detection exhaust blast pipe in real time（32）Gas outlet（322）Place
Temperature and flame probe（54）It detects whether in real time with flame, if there is hydrogen leak, temperature is less than hydrogen burning point or flame
Extinguish, then programmable controller（51）Controlling switch valve（6）Close and send out hydrogen gas leakage alarm signal, low alarm temperature signal or
Fray-out of flame alarm signal；
S3, the water vapour and residual gas for generation of burning are through waste discharge cylinder（4）Discharge.
2. the waste gas processing method of hydrogen annealing furnace exhaust treatment system according to claim 1, it is characterised in that：It is described
Resistive heater（33）Equipped with two, two resistive heaters（33）It is symmetrically arranged in the exhaust blast pipe（32）Both sides, institute
State air inlet filter opening（34）Equipped with multiple, multiple air inlet filter openings（34）It is evenly arranged in combustion chamber（31）Bottom.
3. the waste gas processing method of hydrogen annealing furnace exhaust treatment system according to claim 1, it is characterised in that：Institute
State discharge gas derived pipe（1）With fire-retardant check valve（2）Between and fire-retardant check valve（2）With waste gas burner（3）Between be all made of
VCR is welded to connect.
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| CN201610785971.0A CN106403625B (en) | 2016-08-31 | 2016-08-31 | A kind of hydrogen annealing furnace exhaust treatment system and method |
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| CN201610785971.0A CN106403625B (en) | 2016-08-31 | 2016-08-31 | A kind of hydrogen annealing furnace exhaust treatment system and method |
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| CN106403625B true CN106403625B (en) | 2018-09-25 |
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| CN114904355B (en) * | 2022-05-31 | 2023-10-13 | 北京北方华创微电子装备有限公司 | Tail gas treatment device |
| CN115325437A (en) * | 2022-07-22 | 2022-11-11 | 北京航天试验技术研究所 | Liquid hydrogen safe processing system and processing method thereof |
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| JP2007218584A (en) * | 1997-11-21 | 2007-08-30 | Ebara Corp | Combustor for treating exhaust gas |
| CN203938689U (en) * | 2014-07-02 | 2014-11-12 | 武汉钢铁(集团)公司 | The residual hydrogen burning device of high-temperature annealing furnace for a kind of test |
| CN204100294U (en) * | 2014-07-17 | 2015-01-14 | 东风德纳车桥有限公司 | Heat treatment carburizer Waste gas outlet automatic ignition system |
| CN105349755A (en) * | 2015-12-14 | 2016-02-24 | 中国电子科技集团公司第四十八研究所 | Sealing and waste gas treatment device used for reaction tube of hydrogen annealing furnace |
| CN105470168A (en) * | 2015-11-20 | 2016-04-06 | 中国电子科技集团公司第四十八研究所 | Hydrogen-oxygen synthesis apparatus and system for high-temperature oxidation furnace |
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2016
- 2016-08-31 CN CN201610785971.0A patent/CN106403625B/en active Active
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2007218584A (en) * | 1997-11-21 | 2007-08-30 | Ebara Corp | Combustor for treating exhaust gas |
| CN203938689U (en) * | 2014-07-02 | 2014-11-12 | 武汉钢铁(集团)公司 | The residual hydrogen burning device of high-temperature annealing furnace for a kind of test |
| CN204100294U (en) * | 2014-07-17 | 2015-01-14 | 东风德纳车桥有限公司 | Heat treatment carburizer Waste gas outlet automatic ignition system |
| CN105470168A (en) * | 2015-11-20 | 2016-04-06 | 中国电子科技集团公司第四十八研究所 | Hydrogen-oxygen synthesis apparatus and system for high-temperature oxidation furnace |
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