CN114879355A - Telescope structure and manufacturing method thereof - Google Patents
Telescope structure and manufacturing method thereof Download PDFInfo
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- CN114879355A CN114879355A CN202110161667.XA CN202110161667A CN114879355A CN 114879355 A CN114879355 A CN 114879355A CN 202110161667 A CN202110161667 A CN 202110161667A CN 114879355 A CN114879355 A CN 114879355A
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B23/00—Telescopes, e.g. binoculars; Periscopes; Instruments for viewing the inside of hollow bodies; Viewfinders; Optical aiming or sighting devices
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B1/00—Optical elements characterised by the material of which they are made; Optical coatings for optical elements
- G02B1/002—Optical elements characterised by the material of which they are made; Optical coatings for optical elements made of materials engineered to provide properties not available in nature, e.g. metamaterials
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Abstract
The invention discloses a telescope structure, which comprises a transparent substrate, wherein the transparent substrate comprises a first surface and a second surface which are opposite to each other, an objective lens super-structural lens with positive refractive power is directly arranged on the first surface, an eyepiece lens super-structural lens with positive refractive power is directly arranged on the second surface, and the objective lens super-structural lens and the eyepiece lens super-structural lens respectively comprise a super-structural surface array which is periodically arranged; the focus of the objective lens super-structure lens on the side facing the eyepiece lens super-structure lens and the focus of the eyepiece lens super-structure lens on the side facing the objective lens super-structure lens are mutually overlapped in the transparent substrate. The invention also discloses a manufacturing method of the telescope structure. The invention realizes the thinning of the telescope structure.
Description
Technical Field
The invention relates to the technical field of a super-structure surface, in particular to a telescope structure adopting a super-structure lens and a manufacturing method thereof.
Background
A telescope is an optical instrument that uses lenses or mirrors, as well as other optical devices, to view a remote object. The light beam passing through the lens is refracted or reflected by the concave mirror to enter the small hole and be converged to form an image, and then the image is seen through a magnifying eyepiece.
Conventional telescope structures typically employ lenses made of optical glass or optical resin. However, due to the characteristics of the optical glass or optical resin material, a lens with a low focal length ratio (the ratio of focal length to diameter of the lens) cannot be made, so that the conventional telescope structure cannot be made thin, and the application field of the telescope structure is limited.
Disclosure of Invention
Aiming at the technical problems, the invention adopts the following technical scheme:
in one aspect of the invention, a telescope structure is provided, which comprises a transparent substrate, the transparent substrate comprising a first surface and a second surface opposite to each other, the first surface having directly disposed thereon an objective lens super-structured lens having a positive refractive power, the second surface having directly disposed thereon an eyepiece lens super-structured lens having a positive refractive power, the objective lens super-structured lens and the eyepiece lens super-structured lens each comprising a periodically arranged array of super-structured surfaces; wherein the focal point of the objective lens super-structure lens on the side facing the eyepiece lens super-structure lens and the focal point of the eyepiece lens super-structure lens on the side facing the objective lens super-structure lens are overlapped with each other inside the transparent substrate.
Preferably, the array of microstructured surfaces comprises a plurality of microstructured elements made of at least one of Au, Ag, Al, or TiN and ZrN, or at least one of AlTiN, AlZrN, TiZrN, TiMgN, TiCaN, or SiO 2 、Ta 2 O 5 、ZrO 2 、Al 2 O 3 At least one of (a).
Preferably, the transparent substrate is made of optical glass or optical resin.
In another aspect of the invention, there is provided a method of making a telescope structure, the method comprising:
directly forming a first array of periodically arranged metamaterial surfaces on a first surface of a substrate to form an objective lens of positive refractive power;
forming a second array of periodic surfaces directly on a second surface of the substrate opposite the first surface to form an eyepiece lens having a positive refractive power;
wherein the focal point of the objective lens super-structure lens on the side facing the eyepiece lens super-structure lens and the focal point of the eyepiece lens super-structure lens on the side facing the objective lens super-structure lens are overlapped with each other inside the transparent substrate.
Preferably, forming the first and second array of surfaces comprises:
positioning marks corresponding to each other are respectively arranged on the first surface and the second surface;
coating a first photoresist layer on the first surface, and carrying out exposure and development on the first photoresist layer according to the positioning marks to form a first pattern layer;
after depositing a metal material on the first pattern layer, stripping the first pattern layer to form the first array of surfaces;
coating a second photoresist layer on the second surface, and carrying out exposure and development on the second photoresist layer according to the positioning marks to form a second pattern layer;
after depositing a metal material on the second pattern layer, peeling off the second pattern layer to form the second array of metamaterial surfaces.
Preferably, the exposing and developing the first photoresist layer or the second photoresist layer includes:
obtaining pattern information of the first or second array of surfaces with preset optical properties by numerical simulation;
exposing the first photoresist layer according to the pattern information of the first super-structured surface array, or exposing the second photoresist layer according to the pattern information of the second super-structured surface array;
and developing the exposed first photoresist layer or the exposed second photoresist layer to form the first pattern layer or the second pattern layer.
In a further aspect of the invention there is provided a telescope structure testing system comprising:
image generating means for generating a light beam capable of forming a preset image;
image compression means for reducing the light beam;
the telescope structure test system further comprises a sample stage and an image amplification device, wherein the sample stage and the image amplification device are sequentially arranged along the reduced light path of the light beam, the sample stage is used for supporting the telescope structure to be tested and enabling the light beam to pass through the telescope structure to be tested, and the image amplification device is used for amplifying the light beam passing through the telescope structure to be tested and enabling the light beam to be imaged and then subjected to imaging measurement.
Preferably, the image generating apparatus includes: the laser device comprises a laser device, and a spatial filter, a USAF resolution plate, a first linear polarizer and a first circular polarizer which are sequentially arranged along the optical path of a light beam generated by the laser device; wherein the light beam generated by the laser sequentially passes through the spatial filter, the USAF resolution plate, the linear polarizer and the circular polarizer to form the preset image.
Preferably, the image compression device comprises a first convex lens and a second convex lens which are sequentially arranged along the optical path of the light beam, and the focal length of the first convex lens is greater than that of the second convex lens; wherein a focal point of the first convex lens on a side facing the second convex lens and a focal point of the second convex lens on a side facing the first convex lens overlap each other.
Preferably, the image magnification device comprises an objective lens, a sleeve lens, a second circular polarizer, a second linear polarizer and a CCD camera which are sequentially arranged along the optical path of the light beam, and the CCD camera is used for comparing the compressed light beam before and after passing through the telescope structure to be measured.
Compared with the traditional telescope structure, the telescope structure of the invention adopts the super-structure lens, so that the focal length ratio (the focal length to the diameter ratio of the lens) of the lens can be greatly reduced, and the thin telescope structure is favorably formed and can be further used in the aiming system of a military helmet with a complex structure.
Drawings
FIG. 1 is a schematic structural diagram of a telescope configuration according to an embodiment of the invention;
FIGS. 2a to 2h are process diagrams of a telescope structure according to an embodiment of the invention;
FIG. 3 is a schematic diagram of a telescope configuration test system according to an embodiment of the invention.
Detailed Description
In order to make the objects, technical solutions and advantages of the present invention more apparent, embodiments of the present invention are described in detail below with reference to the accompanying drawings. Examples of these preferred embodiments are illustrated in the accompanying drawings. The embodiments of the invention shown in the drawings and described in accordance with the drawings are exemplary only, and the invention is not limited to these embodiments. It should be noted that, in order to avoid obscuring the present invention with unnecessary details, only the structures and/or processing steps closely related to the scheme according to the present invention are shown in the drawings, and other details not so relevant to the present invention are omitted.
In addition, when an element such as a layer, film, region, or substrate is referred to as being "on" another element or a surface of another element, the element may be directly on the other element or the surface of the other element or intervening elements may also be present. Alternatively, when an element is referred to as being "directly on" another element or a surface of another element, there are no intervening elements present.
As described in the background art, the conventional telescope structure using a lens made of optical glass or optical resin cannot be made thin due to its own limitations.
In view of the above-mentioned problems of the prior art, embodiments according to the present invention provide a telescope structure and a method for manufacturing the telescope structure. The telescope structure adopts a super lens (Metallens) to replace the traditional lens. The focal length of the super-structure lens is determined by phase distribution, and different optical characteristics can be embodied by changing the arrangement mode of the super-surface units. For example: a super-structured lens having a positive refractive power can be manufactured. Since the focal length of the super-structure lens is not determined by the refractive index and the curvature radius of the material in the traditional lens but by the phase distribution, the focal length ratio can be greatly reduced, and the thin telescope structure is favorably formed.
Example 1
The present embodiment provides a telescope structure, as shown in fig. 1, comprising a transparent substrate 1. The transparent substrate 1 includes a first surface 1a and a second surface 1b opposite to each other. An objective lens 2 with positive refractive power is directly arranged on the first surface 1a, and an eyepiece lens 3 with positive refractive power is directly arranged on the second surface 1 b. The objective lens 2 and the eyepiece lens 3 respectively comprise periodically arranged super-structure surface arrays. Wherein, the focus of the objective lens 2 facing the eyepiece lens 3 and the focus of the eyepiece lens 3 facing the objective lens 2 are overlapped with each other inside the transparent substrate 1 to form a telescope structure (specifically, a keplerian type telescope structure).
Preferably, the array of the surface of the super structure of the embodiment includes a plurality of microstructure units a, the shape of the microstructure unit a is a cuboid (200nm × 100nm × 80nm), the unit period is 250nm, and the design operating wavelength is 632.8 nm. The phase regulation and control mode adopts a unit rotation method (namely geometric phase), and a phase regulation and control range of 360 degrees can be obtained by rotating the microstructure unit A by 180 degrees, so that the incident wavefront can be completely regulated and controlled. Before the objective lens super-structure lens 2 and the eyepiece lens super-structure lens 3 are formed, numerical simulation is carried out on a super-structure surface unit by utilizing COMSOL or CST electromagnetic numerical simulation software, plane wave excitation is used during simulation, and the periodic boundary condition is set to simulate the optical characteristics of the super-structure surface array formed by the micro-structure units A, so that the purpose that the focus of the objective lens super-structure lens 2 and the focus of the eyepiece lens super-structure lens 3 are overlapped in the transparent substrate 1 is achieved.
The array of super-structured surfaces formed by the above design has positive refractive power (i.e., a light condensing effect), and thus can be used as a convex lens.
Further, the phase retardation of the microstructure unit a of the present embodiment satisfies the following formula:
wherein f refers to the focal length from the focal point of the super-structure lens to the central point of the super-structure lens, and phi (x, y) refers to the phase delay at the corresponding position of the cuboid structure; phi (0, 0) refers to the phase corresponding to the geometric center position of the super-structure lens; x refers to the x-axis coordinate of the position corresponding to the cuboid structure, y refers to the y-axis coordinate of the position corresponding to the cuboid structure, lambda is the incident wavelength, and n is any positive integer.
The size of the microstructure unit a of this embodiment is a sub-wavelength, and is generally set to 200nm to 400nm in a visible light band. Wherein, the microstructure unit A has difference in length and width, and can generate 180 ° transmission phase difference in length direction and width direction, thereby satisfying the condition of applying geometric phase (Pancharatnam-Berry phase). The central rotation angle of the cuboid is 0-180 degrees.
Still further, the microstructure unit a of the present embodiment is made of at least one of Au, Ag, and Al, or at least one of TiN and ZrN, or at least one of AlTiN, AlZrN, TiZrN, TiMgN, TiCaN, or SiO 2 、Ta 2 O 5 、ZrO 2 、Al 2 O 3 At least one of (a). The transparent substrate 1 is made of optical glass or optical resin.
Example 2
The present embodiment discloses a method for manufacturing the telescope structure of embodiment 1. The manufacturing method comprises the following steps:
step S1, forming a first array of periodic surfaces 2a directly on the first surface 1a of the substrate to form the objective lens 2 with positive refractive power.
Step S2, forming a second array of unstructured surfaces 3a arranged periodically directly on a second surface 1b of the substrate opposite to the first surface 1a to form an eyepiece unstructured lens 3 having positive refractive power.
Wherein a focal point of the objective lens 2 after formation on a side facing the eyepiece super lens 3 and a focal point of the eyepiece super lens 3 on a side facing the objective lens super lens 2 are overlapped with each other inside the transparent substrate 1 to form a telescope structure.
Specifically, as shown in fig. 2a to 2h, the method of forming the first and second array of nanostructured surfaces 2a and 3a includes:
positioning marks (not shown in the figure) corresponding to each other are respectively arranged on the first surface 1a and the second surface 1b through a double-sided exposure positioning technology to determine the positions of the first and second metamaterial surface arrays 2a and 3a on the first and second surfaces 1a and 1b, so that the objective lens 2 and the eyepiece lens 3 formed subsequently are precisely aligned.
After the positioning marks are arranged, coating a first photoresist layer 1a 'on the first surface 1a, and exposing and developing the first photoresist layer 1a' according to the positioning marks to form a first pattern layer 1a "; after depositing the metal material B on the first pattern layer 1a ", the first pattern layer 1 a" and the metal material B deposited on the first pattern layer 1a "are stripped to form the first array of meta-surfaces 2 a.
Similarly, a second photoresist layer 1b 'is coated on the second surface 1b, and the second photoresist layer 1b' is exposed and developed according to the positioning marks to form a second pattern layer 1b "; after depositing the metal material B on the second pattern layer 1B ", the second pattern layer 1B" and the metal material B deposited on the second pattern layer 1B "are stripped off to form the second array of meta-surfaces 3 a.
In this embodiment, the method for exposing and developing the first photoresist layer 1a 'or the second photoresist layer 1b' includes:
pattern information of the first or second array of nanostructured surfaces 2a, 3a having preset optical characteristics is obtained by numerical simulation.
The first photoresist layer 1a 'is exposed according to the pattern information of the first array of nanostructured surfaces 2a, or the second photoresist layer 1b' is exposed according to the pattern information of the second array of nanostructured surfaces 3 a.
Developing the exposed first photoresist layer 1a 'or the second photoresist layer 1b' to form the first pattern layer 1a ″ or the second pattern layer 1b ″.
As an example of exposure and development, the photoresist is PMMAA4 photoresist, and spin coating is performed by using a spin coater, wherein the spin coating speed is 4000r/min for 30 seconds. Preferably, a layer of Cr with a thickness of 10nm is sputtered on the surface of the photoresist to increase the conductivity. After exposure with an electron beam exposure machine, the Cr layer was removed with a Cr etching solution. Then, development was performed, and the resultant was immersed in a developer for 100 seconds. Finally, fixing and soaking in isopropanol solution for 30 seconds. Gold was evaporated to a thickness of 80nm using an electron beam evaporation apparatus. Finally, the sample wafer is placed in acetone to complete the peeling and complete the array of the nanostructured surface of the first surface 1 a. Then, the sample wafer is turned over, and the above process is repeated to complete the array of the super-structured surface of the second surface 1b, and the telescope structure is obtained.
Preferably, the diameter of the objective lens 2 is 600um, and the diameter of the eyepiece lens 3 is 400 um.
Example 3
The present embodiment provides a test system for testing the telescope structure of embodiment 1, the test system comprising: image generating means for generating a light beam capable of forming a preset image; and the image compression device is used for reducing the light beam. In addition, the telescope structure test system of this embodiment further includes a sample stage and an image magnifying device that are sequentially disposed along the optical path of the reduced light beam.
The sample platform is used for supporting a telescope structure to be measured and enabling the light beam to pass through the telescope structure to be measured, and the image amplification device is used for amplifying the light beam passing through the telescope structure to be measured and enabling the light beam to be imaged and then be subjected to imaging measurement. The telescope structure C to be measured supported by the sample stage is the telescope structure of embodiment 1.
Specifically, as shown in fig. 3 (a sample stage is not shown), the image generating apparatus includes: a laser 41, and a spatial filter 42, a USAF resolution plate 43, a first linear polarizer 44, and a first circular polarizer 45, which are disposed in this order along an optical path of a light beam generated by the laser 41; the laser 41 is preferably a helium-neon laser 41, and after the light beam generated by the laser 41 is processed by a light beam collimation system, a plane wave with uniform amplitude and phase is generated, and the plane wave irradiates the USAF resolution plate 43 to generate a preset image, and after the preset image passes through the first linear polarizer 44 and the first circular polarizer 45, the preset image capable of generating circular polarization can be generated.
Since the telescope structure C to be measured has a small area, the beam needs to be compressed. The image compression device comprises a first convex lens 51 and a second convex lens 52 which are sequentially arranged along the optical path of the light beam, and the focal length of the first convex lens 51 is greater than that of the second convex lens 52. Wherein a focal point of the first convex lens 51 on the side facing the second convex lens 52 and a focal point of the second convex lens 52 on the side facing the first convex lens 51 overlap each other. The light beam is compressed and then irradiates on the telescope structure C to be tested.
The image magnifying apparatus includes an objective lens 71, a sleeve lens 72, a second circular polarizing plate 73, a second linear polarizing plate 74, and a CCD camera 75, which are sequentially disposed along the optical path of the light beam. The light beam passing through the telescope structure C to be measured will be irradiated on the objective lens 71, and the light beam is magnified by the objective lens 71 and then passes through the sleeve lens 72, the second circular polarizer 73 and the second linear polarizer 74 in sequence to be imaged on the CCD camera 75. The CCD camera 75 is used for imaging contrast of the compressed light beam before and after passing through the telescope structure C to be measured.
In the above process, when the image imaged on the CCD camera 75 is the inverted preset image, and the ratio between the size of the image formed by the light beam irradiated on the telescope structure to be measured C and the size of the image formed by the light beam passing through the telescope structure to be measured C is equal to the preset view angle magnification of the telescope structure to be measured C, the function of the telescope structure to be measured C can be verified.
It is noted that, herein, relational terms such as first and second, and the like may be used solely to distinguish one entity or action from another entity or action without necessarily requiring or implying any actual such relationship or order between such entities or actions. Also, the terms "comprises," "comprising," or any other variation thereof, are intended to cover a non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements does not include only those elements but may include other elements not expressly listed or inherent to such process, method, article, or apparatus. Without further limitation, an element defined by the phrase "comprising an … …" does not exclude the presence of other identical elements in a process, method, article, or apparatus that comprises the element.
Although embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that changes, modifications, substitutions and alterations can be made in these embodiments without departing from the principles and spirit of the invention, the scope of which is defined in the appended claims and their equivalents.
Claims (10)
1. A telescope structure, comprising a transparent substrate, the transparent substrate comprising a first surface and a second surface opposite to each other, the first surface having directly disposed thereon an objective lens super-structured lens having a positive refractive power, the second surface having directly disposed thereon an eyepiece lens super-structured lens having a positive refractive power, the objective lens super-structured lens and the eyepiece lens super-structured lens each comprising a periodically arranged array of super-structured surfaces; wherein the focal point of the objective lens super-structure lens on the side facing the eyepiece lens super-structure lens and the focal point of the eyepiece lens super-structure lens on the side facing the objective lens super-structure lens are overlapped with each other inside the transparent substrate.
2. The telescope structure according to claim 1, wherein the array of surfaces comprises a plurality of microstructure elements made of at least one of Au, Ag, Al, or at least one of TiN and ZrN, or at least one of AlTiN, AlZrN, TiZrN, TiMgN, TiCaN, or SiO 2 、Ta 2 O 5 、ZrO 2 、Al 2 O 3 At least one of (a).
3. The telescope structure according to claim 1 or 2, wherein the transparent substrate is made of optical glass or optical resin.
4. A method for manufacturing a telescope structure, the method comprising:
directly forming a first array of periodically arranged metamaterial surfaces on a first surface of a substrate to form an objective lens of positive refractive power;
forming a second array of periodic surfaces directly on a second surface of the substrate opposite the first surface to form an eyepiece lens having a positive refractive power;
wherein the focal point of the objective lens super-structure lens on the side facing the eyepiece lens super-structure lens and the focal point of the eyepiece lens super-structure lens on the side facing the objective lens super-structure lens are overlapped with each other inside the transparent substrate.
5. The method of manufacturing of claim 4, wherein forming the first and second array of surfaces comprises:
positioning marks corresponding to each other are respectively arranged on the first surface and the second surface;
coating a first photoresist layer on the first surface, and carrying out exposure and development on the first photoresist layer according to the positioning marks to form a first pattern layer;
after depositing a metal material on the first pattern layer, stripping the first pattern layer to form the first array of surfaces;
coating a second photoresist layer on the second surface, and carrying out exposure and development on the second photoresist layer according to the positioning marks to form a second pattern layer;
after depositing a metal material on the second pattern layer, peeling off the second pattern layer to form the second array of metamaterial surfaces.
6. The method of claim 5, wherein exposing and developing the first photoresist layer or the second photoresist layer comprises:
obtaining pattern information of the first or second array of surfaces with preset optical properties by numerical simulation;
exposing the first photoresist layer according to the pattern information of the first super-structured surface array, or exposing the second photoresist layer according to the pattern information of the second super-structured surface array;
and developing the exposed first photoresist layer or the exposed second photoresist layer to form the first pattern layer or the second pattern layer.
7. A telescope structure testing system, comprising:
image generating means for generating a light beam capable of forming a preset image;
image compression means for reducing the light beam;
and the sample stage and the image amplifying device are sequentially arranged along the reduced optical path of the light beam, the sample stage is used for supporting the telescope structure to be tested and enabling the light beam to pass through the telescope structure to be tested, and the image amplifying device is used for amplifying the light beam passing through the telescope structure to be tested and enabling the light beam to be imaged and then be subjected to imaging measurement.
8. The telescope structure testing system of claim 7, wherein the image generation device comprises: the laser device comprises a laser device, and a spatial filter, a USAF resolution plate, a first linear polarizer and a first circular polarizer which are sequentially arranged along the optical path of a light beam generated by the laser device; wherein the light beam generated by the laser sequentially passes through the spatial filter, the USAF resolution plate, the linear polarizer and the circular polarizer to form the preset image.
9. The telescope structure test system of claim 8, wherein the image compression device comprises a first convex lens and a second convex lens sequentially disposed along the optical path of the light beam, the first convex lens having a focal length greater than a focal length of the second convex lens; wherein a focal point of the first convex lens on a side facing the second convex lens and a focal point of the second convex lens on a side facing the first convex lens overlap each other.
10. The telescope structure test system according to claim 9, wherein the image magnifying device comprises an objective lens, a sleeve lens, a second circular polarizer, a second linear polarizer and a CCD camera arranged in sequence along the optical path of the light beam, the CCD camera being configured to image the compressed light beam before and after passing through the telescope structure under test.
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| CN115113308A (en) * | 2022-07-06 | 2022-09-27 | 重庆大学 | Super-resolution imaging lens with angle amplification function |
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