CN114878000B - Multi-wavelength target emissivity distribution characteristic measuring device based on transmission type light path - Google Patents
Multi-wavelength target emissivity distribution characteristic measuring device based on transmission type light path Download PDFInfo
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- 230000005540 biological transmission Effects 0.000 title claims abstract description 8
- 230000008878 coupling Effects 0.000 claims abstract description 5
- 238000010168 coupling process Methods 0.000 claims abstract description 5
- 238000005859 coupling reaction Methods 0.000 claims abstract description 5
- 238000003384 imaging method Methods 0.000 claims description 15
- 238000002834 transmittance Methods 0.000 claims description 9
- 238000000034 method Methods 0.000 claims description 7
- 239000000463 material Substances 0.000 claims description 5
- 230000003287 optical effect Effects 0.000 abstract description 21
- 238000005259 measurement Methods 0.000 abstract description 14
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 8
- 239000010931 gold Substances 0.000 description 8
- 229910052737 gold Inorganic materials 0.000 description 8
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 3
- 230000005855 radiation Effects 0.000 description 3
- 238000002310 reflectometry Methods 0.000 description 3
- 229910052710 silicon Inorganic materials 0.000 description 3
- 239000010703 silicon Substances 0.000 description 3
- 238000010586 diagram Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 229910000661 Mercury cadmium telluride Inorganic materials 0.000 description 1
- MCMSPRNYOJJPIZ-UHFFFAOYSA-N cadmium;mercury;tellurium Chemical compound [Cd]=[Te]=[Hg] MCMSPRNYOJJPIZ-UHFFFAOYSA-N 0.000 description 1
- 238000001028 reflection method Methods 0.000 description 1
- 238000011896 sensitive detection Methods 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
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- G—PHYSICS
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- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
- G01J5/0003—Radiation pyrometry, e.g. infrared or optical thermometry for sensing the radiant heat transfer of samples, e.g. emittance meter
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/25—Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
- G01N21/31—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry
- G01N21/35—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using infrared light
- G01N21/3563—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using infrared light for analysing solids; Preparation of samples therefor
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/25—Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
- G01N21/31—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry
- G01N21/39—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using tunable lasers
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Abstract
The invention relates to a device for measuring the distribution characteristic of the emissivity of a multi-wavelength target based on a transmission type light path, which comprises: a first laser generator for generating a first wavelength laser beam; a second laser generator for generating a laser beam of a second wavelength; a third laser generator for generating a laser beam of a third wavelength; a first beam splitter for coupling the first and second wavelength laser beams; the second beam splitter is used for ensuring that the distance measuring laser and the modulated first, second and third wavelength lasers are coaxial; the laser output from the third beam splitter enters a laser incidence end; the laser incidence end is used for adjusting the space position of laser input; and a screw stepping hollow motor is adopted to connect the laser incidence end to the integrating sphere. When the device of the invention is used for carrying out emission distribution measurement on the sample piece to be measured with a three-dimensional structure, the same projection optical paths at different positions can be ensured; the coaxial design of multi-wavelength makes the device can carry out emissivity distribution measurement under different wavelengths and realize.
Description
Technical Field
The invention belongs to the technical field of radiation characteristic measurement, and particularly relates to a device for measuring the distribution characteristic of multi-wavelength target emissivity based on a transmission type optical path.
Background
In recent years, the study of the target emissivity distribution characteristics has been receiving attention in the field of radiation characteristics. For some targets to be measured with larger sizes, when emissivity measurement is carried out, people usually pay attention to emissivity distribution characteristics on different spatial positions besides paying attention to overall emissivity characteristics so as to know macroscopic radiation characteristics of the targets from different dimensions; especially for large-size blackbody surface sources, the emissivity values at different positions are also highly concerned in the related art.
In the existing measuring method, an experimental system constructed based on an integrating sphere reflection method can obtain the distribution characteristics of the space emissivity of the target to be measured under different wavelengths. However, since the laser beams all have a certain divergence angle, the method is not focused on the design of the optical path of the emitted laser beams. Therefore, if the target to be measured is not a flat plate, when emissivity distribution measurement at different positions is performed, the laser projection optical paths are different, so that the projection light spot sizes are different, thereby causing the measurement result to deviate from an ideal condition.
Therefore, when the emission distribution of a sample piece to be measured with a three-dimensional structure is measured, in order to ensure that the projection optical paths at different positions are the same, a novel target emissivity distribution characteristic measuring device needs to be constructed.
Disclosure of Invention
The invention aims to provide a device for measuring the emissivity distribution characteristic of a multi-wavelength target based on a transmission type optical path, wherein the optical path is coupled with a plurality of laser light sources as much as possible to obtain the measuring capability under a plurality of typical wavelengths, so as to ensure that the projection optical paths at different positions are the same and the measuring capability of the plurality of typical wavelengths is obtained.
In order to achieve the above object, the present invention provides a device for measuring multi-wavelength target emissivity distribution characteristics based on a transmissive optical path, comprising:
a first laser generator for generating a laser beam of a first wavelength; a second laser generator for generating a laser beam of a second wavelength; a third laser generator for generating a laser beam of a third wavelength;
the function generator is connected with the first laser generator, the second laser generator and the third laser generator and modulates the laser frequency emitted by the laser generators; the method is characterized in that:
a first beam splitter for coupling the first and second wavelength laser beams; a second beam splitter for guiding the first, second and third wavelength laser beams transmitted by the first beam splitter to be coupled;
the field diaphragm is arranged at a position far away from the first beam splitter and the second beam splitter and is divided into a first light path and a second light path through the field diaphragm;
the first light path is sequentially provided with an imaging lens group, a limiting diaphragm, a third beam splitter and a laser range finder, wherein the imaging lens group is used for controlling the size of a light spot projected by laser with each wavelength onto a target surface to be measured; the third beam splitter is used for ensuring that the distance measuring laser and the modulated first, second and third wavelength lasers are coaxial; the laser output from the third beam splitter enters a laser incidence end; the limiting diaphragm is used for optimizing the shape of the projected laser; the laser range finder is used for measuring the axial distance from a certain position of a target space to be measured to a light path;
the second light path is sequentially provided with a reflector and an ocular, wherein the reflector is used for reflecting a visible light signal from the field diaphragm to the ocular, and the ocular is used for observing the region to be measured;
the laser incidence end is used for adjusting the space position of laser input; connecting the laser incidence end to an integrating sphere by adopting a screw stepping hollow motor; one side of the integrating sphere is provided with a sample placing end, and a sample to be tested is arranged in the sample placing end.
The first laser generator, the second laser generator and the third laser generator can emit laser beams with the laser power range of 200-3000 mW and the laser beam band range of 10-100nm, wherein the laser beams with the laser power range of 0.8-13.0 microns can be emitted by the first laser generator, the second laser generator and the third laser generator.
Wherein, the function generator can generate sine waves, square waves and triangular waves, and the frequency range is 1-10000Hz.
Wherein the first beam splitter has a transmittance of 80% or more with respect to the laser light of the first wavelength and a reflectance of 80% or more with respect to the laser light of the second wavelength.
Wherein the second beam splitter has a transmittance of 80% or more for the first and second wavelength laser beams and a reflectance of 80% or more for the third wavelength laser beam.
The third beam splitter has a transmittance of 80% or more for the first, second and third wavelength lasers and a reflectance of 80% or more for the visible light band laser emitted by the laser range finder.
The imaging lens group consists of two convex lenses and is used for controlling the size of a light spot projected to a target surface to be measured by the laser with each wavelength.
Wherein, the limiting diaphragm valve clack is coated with an infrared high-absorptivity material and has an electric control function.
The field diaphragm is a reflector with a small hole in the center, the size of the center hole is 0.5-2mm, and the imaging range of a visible light observation module consisting of the field diaphragm, the reflector and an eyepiece is required to be significantly larger than light spots formed by the first, second and third wavelength lasers on the target surface to be measured.
The laser incidence end is a spherical crown with a through groove in the radius direction, and the bottom surface of the spherical crown is matched with the cutting surface of the integral sphere; for adjusting the spatial position of the laser input.
The screw stepping hollow motor is provided with an interface fixed with a laser incident end, 360-degree rotation of the screw stepping hollow motor is achieved, and the angle positioning accuracy is higher than 0.1 degree.
The integrating sphere is coated with gold or other infrared high-reflectivity materials, a baffle is arranged near the interface of the sphere wall surface detector, and the uniform effect of the integrating sphere on laser before entering the detector is improved. The integrating sphere is provided with three openings, and the diameter of the first opening is the same as that of the bottom surface of the laser incidence end; the second opening is used for being matched with the sample placing end; the third opening is used for being matched with the detector to be installed.
The three-dimensional mobile platform is provided with a program-controlled accessory, and the positioning precision of each direction is higher than 0.1mm. On one hand, the mobile platform can ensure that the projection optical paths of the laser are the same when measuring different spatial positions through the numerical values fed back by the laser range finder; on one hand, the laser projection device is linked with the screw stepping hollow motor on a plane vertical to the optical axis, so that the projection laser can be projected on the surface of the target to be measured through the slit of the laser incident end.
The invention provides a device for measuring the emissivity distribution characteristics of a multi-wavelength target based on a transmission type light path, which utilizes a plurality of laser transmitters to generate multi-wavelength laser, utilizes a plurality of beam splitters, lenses and diaphragms to form an infrared light path, utilizes a reflector and a field diaphragm to form an observation light path, and utilizes the linkage of a laser range finder and a three-dimensional mobile platform to ensure that the projection light paths at different positions are the same, thereby realizing the emissivity distribution measurement with high stability.
Additional aspects and advantages of the invention will be set forth in part in the description which follows, and in part will be obvious from the description, or may be learned by practice of the invention.
Drawings
In order to more clearly illustrate the technical solutions of the embodiments of the present invention, the drawings needed to be used in the description of the embodiments are briefly introduced below, and it is obvious that the drawings in the following description are only some embodiments of the present invention, and it is obvious for those skilled in the art to obtain other drawings based on these drawings without creative efforts.
Fig. 1 is a schematic diagram of a device for measuring emissivity distribution characteristics of a multi-wavelength target based on a transmissive optical path according to an embodiment of the present invention.
Detailed Description
Reference will now be made in detail to embodiments of the present invention, examples of which are illustrated in the accompanying drawings, wherein like reference numerals refer to the same or similar elements or elements having the same or similar function throughout. The embodiments described below with reference to the accompanying drawings are exemplary only for explaining the present invention and are not construed as limiting the present invention.
As used herein, the singular forms "a", "an", "the" and "the" are intended to include the plural forms as well, unless the context clearly indicates otherwise. It will be further understood that the terms "comprises" and/or "comprising," when used in this specification, specify the presence of stated features, integers, steps, operations, elements, and/or components, but do not preclude the presence or addition of one or more other features, integers, steps, operations, elements, components, and/or groups thereof. It will be understood that when an element is referred to as being "connected" or "coupled" to another element, it can be directly connected or coupled to the other element or intervening elements may also be present. Further, "connected" or "coupled" as used herein may include wirelessly connected or coupled. As used herein, the term "and/or" includes any and all combinations of one or more of the associated listed items.
It will be understood by those skilled in the art that, unless otherwise defined, all terms (including technical and scientific terms) used herein have the same meaning as commonly understood by one of ordinary skill in the art to which this invention belongs. It will be further understood that terms, such as those defined in commonly used dictionaries, should be interpreted as having a meaning that is consistent with their meaning in the context of the prior art and will not be interpreted in an idealized or overly formal sense unless expressly so defined herein.
To facilitate understanding of the embodiments of the present invention, the following detailed description will be given by way of example with reference to the accompanying drawings.
Fig. 1 is a schematic diagram of a device for measuring emissivity distribution characteristics of a multi-wavelength target based on a transmissive optical path. As shown in fig. 1, the apparatus includes a three-dimensional moving platform, preferably an optical platform, the three-dimensional moving platform is used for implementing three-dimensional movement of a projection light path, and the three-dimensional moving platform is provided with: a first laser generator for generating a first wavelength laser beam; a second laser generator for generating a laser beam of a second wavelength; a third laser generator for generating a laser beam of a third wavelength; the function generator is connected with the first laser generator, the second laser generator and the third laser generator and is used for modulating the laser frequency emitted by the laser generators; a first beam splitter for coupling first and second wavelength laser beams, the first laser generator emitting laser light to illuminate a first face of the first beam splitter, the second laser generator emitting laser light to illuminate a second face of the first beam splitter;
the second beam splitter is far away from the first beam splitter and comprises a first surface and a second surface, the laser guided from the first beam splitter is transmitted to the first surface of the second beam splitter, and the laser generated by the third laser generator irradiates the second surface of the second beam splitter; the second beam splitter is used for coupling the third wavelength laser beam and the first and second wavelength laser beams;
the field diaphragm is arranged at a position far away from the first beam splitter and the second beam splitter, is used for controlling the observation range of the ocular lens, and is divided into a first light path and a second light path through the field diaphragm.
The first light path is sequentially provided with an imaging lens group, a limiting diaphragm, a third beam splitter and a laser range finder, wherein the imaging lens group is used for controlling the size of a light spot projected by each wavelength of laser onto a target surface to be measured; the third beam splitter is used for ensuring that the distance measuring laser and the modulated first, second and third wavelength lasers are coaxial; the limiting diaphragm is used for further optimizing the shape of the projected laser; and the laser range finder is used for measuring the axial distance from a certain position of the target space to be measured to the light path.
The second light path is provided with a reflector and an eyepiece in sequence, wherein the reflector is used for reflecting visible light signals from the field diaphragm to the eyepiece, and the eyepiece is used for observing an area to be measured.
The laser generator, the beam splitter, the reflector, the transparent group, the diaphragm and other optical components with different functions can be arranged on the three-dimensional moving platform, and can be actually placed according to requirements, and are not limited to be arranged on the three-dimensional moving platform, and other optical components can be arranged on the three-dimensional moving platform.
The multi-wavelength target emissivity distribution characteristic measuring device further comprises: the laser incidence end is used for adjusting the space position of laser input; the screw stepping hollow motor is used for fixing the laser incidence end and realizing 360-degree rotation of the laser incidence end; the integrating sphere is used for realizing multiple reflection of incident laser, the integrating sphere comprises a port on one side and a convex part on the other side, the laser incident end is preferably in a spherical crown form, the laser incident end is attached to the port of the integrating sphere, and the maximum size position of the laser incident end is matched with the port of the integrating sphere; a sample piece placing end is arranged on the convex part of the integrating sphere and used for installing a sample piece to be tested; a connecting port is arranged on the integrating sphere, a detector is arranged at the connecting port, and the detector is used for converting the collected optical signals into electric signals; and the phase-locked amplifier is connected with the detector and is used for accurately obtaining the electric signal obtained by reflecting the modulated laser on the detector.
The laser generated by the first laser generator is preferably 1.0 micron, the laser generated by the second laser generator is preferably 1.5 microns, the laser generated by the third laser generator is preferably 4.0 microns, the laser power is preferably 500mW, and the laser band range is preferably 30nm; the function generator preferably generates a square wave, preferably with a frequency of 35Hz; the first beam splitter preferably has a transmittance of 80% for the first wavelength laser beam and a reflectance of 80% for the second wavelength laser beam; the second beam splitter preferably has a transmittance of 80% for the first and second wavelength laser beams and a reflectance of 80% for the third wavelength laser beam; the third beam splitter preferably has a transmittance of 80% or more for the first, second and third wavelength lasers and a reflectance of 80% or more for the visible light band laser emitted by the laser range finder; the imaging lens group is preferably two plano-convex lenses and is used for controlling the size of a light spot projected to a target surface to be measured by the laser with each wavelength; the limiting diaphragm valve clack is coated with an infrared high-absorptivity material and has an electric control function; the field diaphragm is a reflector with a small hole in the center, the size of the central hole is preferably 1mm, and the imaging range of a visible light observation module consisting of the field diaphragm, the reflector and an eyepiece is larger than light spots formed by the first, second and third wavelength lasers on the target surface to be detected; the laser incidence end is a spherical crown with a through groove in the radius direction, and the bottom surface of the spherical crown is matched with the cutting surface of the integral sphere and used for adjusting the space position of laser input; the screw rod stepping hollow motor is provided with an interface fixed with a laser incident end, 360-degree rotation of the screw rod stepping hollow motor is achieved, and the angle positioning precision is preferably 0.05 degrees. The indicating laser light emitted by the laser rangefinder is preferably red light, and the divergence angle is preferably 2 mrad.
The integrating sphere is coated with gold or other infrared high-reflectivity materials, and a baffle is arranged near the interface of the sphere wall surface detector, so that the uniform effect of the integrating sphere on laser before entering the detector is improved. As shown in the cross-sectional view of fig. 1, the integrating sphere has three openings, a first opening is butted with the bottom surface of the laser incidence end and the diameter of the opening is the same as that of the bottom surface of the laser incidence end, and the laser incidence end is attached to the integrating sphere; the second opening is connected with the sample placing end and is used for placing a sample; and the detector is arranged at the third opening.
The three-dimensional laser ranging device comprises a first laser generator, a second laser generator, a third laser generator, first to third beam splitters, an imaging lens group, a limiting diaphragm, a field diaphragm, a reflector, an eyepiece and a laser range finder, wherein the three-dimensional moving platform surface is placed under the positioning of a relevant auxiliary support. The three-dimensional moving platform surface is provided with a program-controlled accessory, the positioning precision in each direction is preferably 0.05mm, and on one hand, the projection optical paths of laser are ensured to be the same when different spatial position measurement is carried out through the numerical value fed back by a laser range finder; on one hand, the laser projection device is linked with the screw stepping hollow motor on a plane vertical to the optical axis, so that the projection laser can be projected to a specific spatial position on the surface of the target to be measured through a slit at the laser incident end. The first, second and third wavelength lasers are coaxial with the red indicating laser emitted by the laser range finder.
As a preferred embodiment of the present invention, the following examples are given to illustrate the specific measurement process:
firstly, starting the first laser generator to generate a laser beam with the central wavelength of 1.0 micron and the power of 500mW; after the laser generator works stably, starting the function generator to modulate the first laser generator to obtain a modulation frequency of 35Hz, and transmitting the frequency to the phase-locked amplifier; starting the laser range finder to generate red indicating laser; and a silicon detector is arranged at the third opening of the integrating sphere and is used for measuring a 1.0-micrometer laser reflection signal.
The method comprises the steps of installing a standard gold plate at a sample placing end, controlling a hollow rotating motor, rotating a laser incidence end to a certain position, adjusting a three-dimensional moving platform, enabling indication laser to align with a starting point of the laser incidence end and conduct distance measurement, and then closing the indication laser. The first wavelength laser beam modulated by the function generator passes through the imaging lens combination limiting diaphragm, enters the integrating sphere through the laser incidence end and is projected to the standard gold plate, multiple reflection is formed inside the integrating sphere, wherein a part of reflected light enters the silicon detector and generates an electric signal, and the electric signal is transmitted to the phase-locked amplifier and is accurately obtained after phase-sensitive detection. The detected position can be observed before each measurement through an observation light path (second light path) consisting of the field diaphragm, the reflecting mirror and the ocular lens. Keeping the angle of the laser incidence end unchanged, adjusting the three-dimensional moving platform to enable the incident laser to move along the radial direction of the groove of the laser incidence end, repeating the measuring steps, completing the line scanning in the radius direction, and obtaining a standard gold plate measuring result in the radius. And then, rotating the laser incidence end to another angle by using the rotary hollow motor, and repeating the measuring steps to obtain a measuring result along the groove radius direction of the laser incidence end at another angle. And repeating the steps to obtain the electric signal measurement results of the standard gold plate at different positions.
And withdrawing the standard gold plate from the sample placing end, placing the measuring sample piece, and repeating the steps to obtain the electric signal measuring results of the sample piece to be measured at different positions. The reflectivity of the gold plate is a known condition, so that emissivity information of different positions of the sample piece to be detected under the first laser wavelength can be obtained by a comparison method.
And (3) closing the first laser, starting the second laser, replacing the silicon detector with an indium-gallium-arsenic detector, and repeating the steps to obtain emissivity information of different positions of the sample piece to be detected under the second laser wavelength.
The second laser is closed, the third laser is opened, the indium-gallium-arsenic detector is changed into the mercury-cadmium-telluride detector, and the steps are repeated to obtain the emissivity information of the sample piece to be measured at different positions under the third laser wavelength
It should be noted that, for a sample piece to be measured with a certain structure, because the surface to be measured may have a certain convex structure, before performing signal measurement of each spatial position point, the three-dimensional moving platform needs to be adjusted according to the projection distance fed back by the laser range finder, so that the projection optical path is the same, and the stability and reliability of the measurement result are ensured.
The invention provides a multi-wavelength target emissivity distribution characteristic measuring device based on a transmission type optical path, which mainly comprises: the device comprises a first laser transmitter, a second laser transmitter, a third laser transmitter, a function generator, a first beam splitter, a second beam splitter, a third beam splitter, an imaging lens, a limiting diaphragm, a field diaphragm, a lock-in amplifier, a laser incidence end, an integrating sphere, an infrared detector and the like.
It will be appreciated by those skilled in the art that the foregoing types of applications are merely exemplary, and that other types of applications, whether presently existing or later to be developed, that may be suitable for use with the embodiments of the present invention, are also intended to be encompassed within the scope of the present invention and are hereby incorporated by reference.
It will be appreciated by those skilled in the art that the number of various elements shown in fig. 1 for simplicity only may be less than that in an actual system, but such omissions are clearly not to be made without affecting the clarity and completeness of the disclosure of the embodiments of the invention.
The above description is only for the preferred embodiment of the present invention, but the scope of the present invention is not limited thereto, and any changes or substitutions that can be easily conceived by those skilled in the art within the technical scope of the present invention are included in the scope of the present invention. Therefore, the protection scope of the present invention shall be subject to the protection scope of the claims.
Claims (10)
1. A multi-wavelength target emissivity distribution characteristic measuring device based on a transmission type light path comprises:
a first laser generator for generating a laser beam of a first wavelength; a second laser generator for generating a laser beam of a second wavelength; a third laser generator for generating a laser beam of a third wavelength;
the function generator is connected with the first, second and third laser generators and modulates the laser frequency emitted by the laser generators; the method is characterized in that:
a first beam splitter for coupling the first and second wavelength laser beams; a second beam splitter for guiding the first, second and third wavelength laser beams transmitted by the first beam splitter to be coupled;
the field diaphragm is arranged at a position far away from the first beam splitter and the second beam splitter and is divided into a first light path and a second light path through the field diaphragm;
the first light path is sequentially provided with an imaging lens group, a limiting diaphragm, a third beam splitter and a laser range finder, wherein the imaging lens group is used for controlling the size of a light spot projected by laser with each wavelength onto a target surface to be measured; the third beam splitter is used for ensuring that the distance measuring laser and the modulated first, second and third wavelength lasers are coaxial; the laser output from the third beam splitter enters a laser incidence end; the limiting diaphragm is used for optimizing the shape of the projected laser; the laser range finder is used for measuring the axial distance from a certain position of a target space to be measured to a light path;
the second light path is sequentially provided with a reflector and an ocular, wherein the reflector is used for reflecting a visible light signal from the field diaphragm to the ocular, and the ocular is used for observing the region to be measured;
the laser incidence end is used for adjusting the space position of laser input; connecting the laser incidence end to an integrating sphere by adopting a screw stepping hollow motor; one side of the integral sphere is provided with a sample placing end, and a sample to be tested is arranged in the sample placing end.
2. The apparatus of claim 1, wherein the first, second, and third laser generators emit laser beams having a wavelength of 0.8 to 13.0 microns, a laser power in a range of 200mW to 3000mW, and a laser beam band in a range of 10 nm to 100nm.
3. The apparatus of claim 1, wherein said function generator generates sine, square and triangle waves with a frequency range of 1-10000Hz.
4. The apparatus according to claim 1, wherein the first beam splitter has a transmittance of 80% or more with respect to the laser light of the first wavelength and a reflectance of 80% or more with respect to the laser light of the second wavelength.
5. The apparatus according to claim 1, wherein the second beam splitter has a transmittance of 80% or more for the laser light of the first and second wavelengths and a reflectance of 80% or more for the laser light of the third wavelength.
6. The apparatus according to claim 1, wherein the third beam splitter has a transmittance of 80% or more for the first, second and third wavelength laser beams and a reflectance of 80% or more for the visible wavelength laser beam emitted from the laser range finder.
7. The apparatus of claim 1, wherein the imaging lens group comprises two convex lenses for controlling the spot size of the laser light of each wavelength projected onto the target surface to be measured.
8. The apparatus of claim 1, wherein the limiting diaphragm flap is coated with an infrared high-absorptivity material and is electrically controlled.
9. The device of claim 1, wherein the field stop is a mirror with a small hole at the center, the size of the central hole is 0.5-2mm, and the imaging range of the visible observation module consisting of the field stop, the mirror and the eyepiece is significantly larger than the spots formed by the first, second and third wavelength lasers on the target surface to be measured.
10. The device according to claim 1, characterized in that the screw stepping hollow motor is provided with an interface fixed with the laser incidence end and realizes 360-degree rotation thereof, and the angular positioning precision is higher than 0.1 degrees.
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Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5517315A (en) * | 1993-10-29 | 1996-05-14 | The United States Of America As Represented By The Secretary Of The Navy | Reflectometer employing an integrating sphere and lens-mirror concentrator |
| CN111678608A (en) * | 2020-06-11 | 2020-09-18 | 上海卫星装备研究所 | High-precision cavity infrared emissivity measuring system and measuring method |
| CN114034391A (en) * | 2021-11-09 | 2022-02-11 | 中国计量科学研究院 | Target emissivity distribution characteristic measuring device |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
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| JP2006098295A (en) * | 2004-09-30 | 2006-04-13 | Ube Ind Ltd | Emissivity measurement apparatus |
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Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5517315A (en) * | 1993-10-29 | 1996-05-14 | The United States Of America As Represented By The Secretary Of The Navy | Reflectometer employing an integrating sphere and lens-mirror concentrator |
| CN111678608A (en) * | 2020-06-11 | 2020-09-18 | 上海卫星装备研究所 | High-precision cavity infrared emissivity measuring system and measuring method |
| CN114034391A (en) * | 2021-11-09 | 2022-02-11 | 中国计量科学研究院 | Target emissivity distribution characteristic measuring device |
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