CN113030913A - Laser radar device and system based on two-dimensional galvanometer - Google Patents
Laser radar device and system based on two-dimensional galvanometer Download PDFInfo
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- CN113030913A CN113030913A CN201911256482.6A CN201911256482A CN113030913A CN 113030913 A CN113030913 A CN 113030913A CN 201911256482 A CN201911256482 A CN 201911256482A CN 113030913 A CN113030913 A CN 113030913A
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01S—RADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
- G01S7/00—Details of systems according to groups G01S13/00, G01S15/00, G01S17/00
- G01S7/48—Details of systems according to groups G01S13/00, G01S15/00, G01S17/00 of systems according to group G01S17/00
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- G01S7/4817—Constructional features, e.g. arrangements of optical elements relating to scanning
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Abstract
The invention relates to the technical field of laser radars, and discloses a laser radar device based on a two-dimensional galvanometer, which comprises a laser emitting unit, a laser receiving unit and a control unit, wherein the laser emitting unit is used for emitting laser beams; the transmitting end galvanometer is used for changing the direction of transmitting laser beams and realizing the scanning of a target, and comprises a two-dimensional galvanometer which deflects in two mutually perpendicular directions; the receiving end galvanometer is used for receiving the laser beam reflected by the target to be measured and reflecting the laser beam to the laser receiving unit, the receiving end galvanometer comprises a plurality of two-dimensional galvanometers to form a two-dimensional array, each two-dimensional galvanometer deflects in two mutually perpendicular directions, and the two-dimensional galvanometers deflect synchronously or asynchronously; and the laser receiving unit is used for receiving and processing the laser beam reflected by the vibrating mirror at the receiving end. The laser radar device can reduce the background light radiation entering the device, thereby effectively improving the signal-to-noise ratio of the device, and has simple and compact structure and low production cost.
Description
Technical Field
The invention relates to the technical field of laser radars, in particular to a laser radar device and a system based on a two-dimensional galvanometer.
Background
The laser radar is an active detection system, and the working principle of the active detection system is that a laser signal is actively transmitted to a target to be detected, the laser signal reflected back by the target is received, and the information of the target to be detected is obtained by comparing and analyzing the characteristics of the transmitted and received signals. The ranging laser radar is an important type, realizes measurement of information such as target distance and contour by measuring the transmission time of laser from a transmitting end to a target, and has wide application prospects in the fields of automatic driving, topographic mapping, road detection, mine field detection, urban three-dimensional modeling and the like.
In order to obtain the distance and contour information of the target, the target needs to be spatially sampled, and a series of target point clouds are constructed. Laser radars can be classified into three types, mechanical, semi-mechanical, and all-solid, according to different sampling modes for a target space. The mechanical laser radar generally adopts a mechanical rotating mechanism to drive a scanning optical element, so that a transmitted laser beam is scanned in space according to a certain mode, and sampling detection of a target is realized. Because the mechanical scanning mechanism is generally complex, has higher requirements on the stability, the scanning speed and the like, has higher cost, and is mainly used in the two-dimensional laser radar at present. The semi-mechanical type also adopts the similar mechanical scanning mechanism as above, but it has a plurality of lasers and receivers, and the laser is vertical arrangement and covers certain angle in the space, therefore, it only needs to rotate the realization horizontal direction 360 and vertical direction certain angle detection, this kind of laser radar signal-to-noise ratio is high usually, detection distance is far away, the precision is higher, but because the system is complicated, the cost is too high, leads to this kind of laser radar to be difficult to popularize. The all-solid-state laser radar has no mechanical scanning mechanism, directly emits a laser beam with a large divergence angle to cover the whole field of view, and adopts an area array detector to synchronously receive reflected signals. The method has simple structure and greatly reduced cost, but has large instantaneous field angle, low signal-to-noise ratio and short detection distance.
Therefore, it is urgently needed to provide a laser radar system with relatively simple structure, low cost, high signal-to-noise ratio and long detection distance to make up for the defects of the prior art.
Disclosure of Invention
In order to solve at least one technical problem, the invention discloses a laser radar device based on a two-dimensional galvanometer, which comprises:
a laser emitting unit for emitting a laser beam;
the laser emission unit comprises a laser and a laser collimation subunit, wherein the laser is used for emitting laser beams, and the laser collimation subunit is used for collimating the laser beams emitted by the laser emission unit.
And the transmitting end vibrating mirror is used for changing the direction of the transmitted laser beam and realizing the scanning of the target. The transmitting end galvanometer comprises a two-dimensional galvanometer, and the two-dimensional galvanometer deflects in two mutually perpendicular directions;
the receiving end vibrating mirror is used for receiving the laser beam reflected by the target to be measured and reflecting the laser beam to the laser receiving unit,
the receiving end galvanometer comprises a plurality of two-dimensional galvanometers which form a two-dimensional array, each two-dimensional galvanometer deflects in two mutually perpendicular directions, and the two-dimensional galvanometers deflect synchronously or asynchronously;
the effective clear aperture of the transmitting end vibrating mirror and the receiving end vibrating mirror is larger than the diameter of the laser beam.
And reflecting films are coated on the vibrating mirrors of the transmitting end vibrating mirror and the receiving end vibrating mirror, and the reflecting wavelength of each reflecting film is matched with the output wavelength of the laser transmitting unit.
And the laser receiving unit is used for receiving and processing the laser beam reflected by the receiving end galvanometer.
The laser receiving unit comprises a detector, and the detector is used for receiving a laser signal and converting the laser signal into an electric signal to be output.
The laser receiving unit further comprises an optical filter, the transmission wavelength and the transmission bandwidth of the optical filter are respectively matched with the output wavelength and the output bandwidth of the laser emitting unit, and the optical filter is a narrow-band optical filter.
Further, along a preset light path, the laser receiving unit is arranged behind the receiving end vibrating mirror, and a light receiving surface of the laser receiving unit faces to a reflecting surface of the receiving end vibrating mirror.
Furthermore, the deflection directions of the vibrating mirrors on the receiving end vibrating mirrors are completely consistent and synchronously changed, a receiving lens unit is arranged between the laser receiving unit and the receiving end vibrating mirrors along a preset light path, the detector is arranged at the position of a focal plane of the receiving lens unit,
or the like, or, alternatively,
and each galvanometer on the receiving end galvanometer deflects asynchronously, the light beam convergence is realized by adjusting the deflection angle of each galvanometer on the receiving end galvanometer, and the detector is arranged at the position of a convergence point.
Furthermore, the central line of the receiving end galvanometer is coincident with the optical axis of the laser receiving unit.
Further, the aperture of the receiving lens unit, the focal length of the receiving lens unit and the detector size are matched with the field angle;
further, the laser radar device further comprises a vibrating mirror driving unit for adjusting the deflection angles of the transmitting end vibrating mirror and the receiving end vibrating mirror.
Furthermore, the invention also provides a laser radar system based on the two-dimensional galvanometer, and the laser radar system comprises the laser radar device.
By adopting the technical scheme, the laser radar device and the system based on the two-dimensional galvanometer have the following beneficial effects:
1) the field of view of the receiving end galvanometer in the laser radar device can change along with the change of the scanning angle of the transmitting end galvanometer, so that the instantaneous field angle at each moment can be controlled to be very small, the influence of background light is greatly reduced, the signal-to-noise ratio is correspondingly improved, and the detection distance is obviously increased;
2) the transmitting end and the receiving end of the laser radar device are adjusted and scanned by two-dimensional galvanometers, so that the structure is simpler and more compact on the premise of ensuring higher scanning frequency;
3) the laser radar device of the invention does not need a complex mechanical scanning mechanism, and can work only by one laser light source and one detector, thereby greatly reducing the cost.
Drawings
In order to more clearly illustrate the technical solutions in the embodiments of the present invention, the drawings needed to be used in the description of the embodiments will be briefly introduced below, and it is obvious that the drawings in the following description are only some embodiments of the present invention, and it is obvious for those skilled in the art to obtain other drawings based on these drawings without creative efforts.
Fig. 1 is a schematic optical path diagram of a laser radar apparatus according to embodiment 1 of the present invention;
FIG. 2 is a schematic view of a transmitting side galvanometer of the lidar apparatus of the present disclosure;
FIG. 3 is a schematic view of a receiving end galvanometer of the lidar apparatus of the present disclosure;
fig. 4 is a schematic optical path diagram of a laser radar apparatus according to embodiment 2 of the present invention;
fig. 5 is a schematic optical path diagram of a laser radar apparatus according to embodiment 3 of the present invention;
fig. 6 is a schematic view of the field angle of a conventional lidar apparatus;
FIG. 7 is a schematic view of the field of view of a lidar apparatus according to the present disclosure;
in the figure, 1-laser emitting unit, 2-emitting end vibrating mirror, 3-receiving end vibrating mirror, 4-receiving lens unit, 5-laser receiving unit, 6-object to be measured, 700, 800, 701, 801-emitted laser beam, 702, 802, 710, 720, 730, 810, 820, 830-reflected laser beam, 711, 721, 731, 811, 821, 831-converged laser beam.
Detailed Description
In order to make the technical solutions of the present invention better understood, the technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.
Reference herein to "one embodiment" or "an embodiment" means that a particular feature, structure, or characteristic may be included in at least one implementation of the invention. In the description of the present invention, it is to be understood that the terms "upper", "top", "bottom", and the like, indicate orientations or positional relationships based on those shown in the drawings, and are used only for convenience in describing the present invention and for simplicity in description, and do not indicate or imply that the referenced devices or elements must have a particular orientation, be constructed in a particular orientation, and be operated, and thus, are not to be construed as limiting the present invention.
Example 1:
the embodiment discloses a laser radar device and system based on two-dimensional galvanometer, the laser radar system based on two-dimensional galvanometer includes the laser radar device based on two-dimensional galvanometer, now combines fig. 1, fig. 2 and fig. 3, and is right the laser radar device based on two-dimensional galvanometer introduces in detail.
Specifically, the laser radar device based on the two-dimensional galvanometer includes:
the laser emitting unit 1 is used for emitting laser beams, the laser emitting unit 1 comprises a laser and a laser collimation subunit, the laser is used for emitting the laser beams, and the laser collimation unit is used for collimating the laser beams emitted by the laser emitting unit;
and the transmitting end vibrating mirror 2 is used for changing the direction of the transmitted laser beam and realizing the scanning of the target. The transmitting end galvanometer 2 comprises a two-dimensional galvanometer which deflects in two mutually perpendicular directions;
a receiving end vibrating mirror 3 for receiving the laser beam reflected by the target 6 and reflecting the laser beam to a laser receiving unit 5,
the receiving end galvanometer 3 comprises a plurality of two-dimensional galvanometers which form a two-dimensional array, each two-dimensional galvanometer can deflect in two mutually perpendicular directions, and the two-dimensional galvanometers deflect synchronously or asynchronously;
the laser receiving unit 5 is used for receiving and processing the laser beam reflected by the receiving end galvanometer 3;
the receiving lens unit 4 is configured to focus the light beam reflected by the receiving-end galvanometer 3 on the laser receiving unit 5, a lens aperture of the receiving lens unit 4 and a focal length of the receiving lens unit 4 are matched with a field angle, an antireflection film is coated on a lens surface of the receiving lens unit 4, and laser light transmittance is improved by coating the antireflection film.
In most cases, the surface of the target object 6 is a diffuse reflection surface, and the surface shape is not necessarily regular, so for convenience of analysis, the surface is usually considered as a lambertian reflection surface.
Further, the laser radar apparatus further includes a mirror vibration driving unit for adjusting the deflection angles of the transmitting-end mirror vibration 2 and the receiving-end mirror vibration 3.
Specifically, referring to fig. 1, a laser emitting unit 1 emits a laser beam to the emission end galvanometer 2. Preferably, the laser emitting unit 1 includes a laser and a laser collimating subunit, and preferably, the laser collimating subunit is a beam collimating lens, and the laser may be a semiconductor laser. Preferably, the laser beam output by the laser has a wavelength of 905nm or 1550nm, which is commonly used, or other suitable wavelengths. The laser beam emitted by the laser is collimated by the beam collimating lens, so that the divergence angle of the beam is reduced.
The laser beam that laser emission unit 1 transmitted incides after the transmission end shakes on the mirror 2, the light beam direction changes, and is specific, transmission end shakes mirror 2 and includes a two-dimentional mirror that shakes shake under mirror drive unit's the drive, the two-dimentional mirror that shakes takes place to deflect along two mutually perpendicular's directions, and the deflection about and from top to bottom is realized promptly to the direction of the laser beam that changes and shines on the target 6 that awaits measuring. After the laser beam is reflected by the target 6 to be measured, one beam of the laser beam irradiates the receiving end galvanometer 3. The receiving end galvanometer 3 comprises a plurality of two-dimensional galvanometers, the two-dimensional galvanometers form a two-dimensional array, and each two-dimensional galvanometer deflects along two mutually perpendicular directions under the driving of the galvanometer driving unit, namely, the deflection from left to right or up and down is realized, so that light beams irradiated on the receiving end galvanometer 3 are reflected to the laser receiving unit 5. The two-dimensional galvanometer array of the receiving end galvanometer 3 consists of M multiplied by N arranged two-dimensional galvanometers, wherein M is more than or equal to 2, and N is more than or equal to 2. As shown in fig. 3, M has a value of 4, and N also has a value of 4. In the optical path shown in fig. 1, the center line of the receiving-side galvanometer 3, the optical axis of the receiving lens unit 4, and the center of the laser receiving unit 5 are on a straight line. The effective light-passing aperture of the vibrating mirrors of the transmitting end vibrating mirror 2 and the receiving end vibrating mirror 3 is larger than the diameter of the laser beam. And a reflecting film is coated on the reflecting surface of the vibrating mirror, and the reflecting wavelength of the reflecting film is matched with the output wavelength of the laser emission unit 1.
As a preferred embodiment, this implementation gives an exemplary description that the deflection angle is θ, and specifically as shown in fig. 1, after the emitted laser beam 100 is incident on the emitting end mirror 2, it is reflected by the emitting end mirror 2, and at this time, the laser beam follows a first path: 100 → 701 → 702, and then transmitted to the laser light receiving unit 5 via the receiving lens unit 4. After the transmitting end galvanometer 2 deflects by an angle θ, the transmitting laser beam 100 is reflected by the transmitting end galvanometer 2 after being incident on the transmitting end galvanometer 2, and at the moment, the laser beam is along a first path: 100 → 801 → 802, and then transmitted to the laser light receiving unit 5 via the receiving lens unit 4.
The laser receiving unit 5 comprises a detector, the response wavelength range of the detector covers the output wavelength of the laser, and preferably, the detector is an avalanche diode (APD), which can effectively improve the signal gain. The laser receiving unit 5 further comprises an optical filter, the optical filter is arranged in front of the detector, the transmission wavelength and the transmission bandwidth of the optical filter are respectively matched with the output wavelength and the output bandwidth of the laser emitting unit 1, and the optical filter is a narrow-band-pass filter.
Specifically, in the above optical path, in the process of deflecting the optical path from the first reflection path to the second reflection path, all the mirrors in the receiving-end galvanometer 3 deflect synchronously in the same direction.
It should be noted that fig. 1 is a schematic diagram, and for clarity of description, only one light ray transmitted along the optical axis is drawn, and the optical path diagram is not drawn according to actual proportion and angle, and in practical application, the distance L from the target to the laser radar may reach several meters or even hundreds of meters, and the internal optical path dimensions w and h of the laser radar are usually only in the order of centimeters and much smaller than L, so that the deviation angle θ is actually very small and may be only in the order of mrad or smaller. Then, by synchronously deflecting the angle of the two-dimensional galvanometer on the receiving galvanometer 3, the light reflected by the galvanometer is converged by the receiving lens unit 4 and received by the laser receiving unit 5. By adopting the mode, the deflection angles of the transmitting end galvanometer 2 and the receiving end galvanometer 3 are changed in sequence and rapidly, so that the whole detected target can be scanned, and point cloud data of distances corresponding to different positions on the target can be obtained.
It can be known that the deflection directions of the vibrating mirrors on the receiving end vibrating mirror 3 are completely the same and synchronously changed, so that the same reflection effect of a common whole-piece reflector can be achieved, further, the vibration frequency of hundreds of even more than kilohertz can be achieved by applying a driving signal to each vibrating mirror on the receiving end vibrating mirror 3 to enable the vibrating mirror to work under the resonance frequency, the high scanning detection of a target is realized, and the adjustment is simpler and more stable.
Example 2:
referring to fig. 4, in this embodiment, another schematic optical path diagram of a laser radar apparatus based on two-dimensional galvanometers is shown, and in this embodiment, different from embodiment 1, the deflection directions of the two-dimensional galvanometers on the receiving-end galvanometer 3 are not completely the same, and the convergence of light beams is realized by accurately adjusting the deflection angles of the two-dimensional galvanometers on the receiving-end galvanometer 3, so that the system is simplified more, and the apparatus of the laser radar is compact in structure.
Specifically, as shown in fig. 4, by precisely adjusting the deflection angle of each two-dimensional galvanometer on the receiving-end galvanometer 3 to change the shape of the wave surface of the light beam, the reflected light beam 810, the reflected light beam 820 and the reflected light beam 830 of the object 6 to be measured are respectively converted into a reflected light beam 811, a reflected light beam 821 and a reflected light beam 831, so that the receiving-end galvanometer 3 achieves a convergence effect similar to that of a concave mirror and finally converges at the laser receiving unit. Further, as can be seen from the figure, along a preset optical path, the laser receiving unit 5 is disposed behind the receiving-end galvanometer 3, and a receiving surface of the laser receiving unit 5 faces a reflecting surface of the receiving-end galvanometer 3.
Example 3:
referring to fig. 5, in this embodiment, another schematic optical path diagram of a laser radar apparatus based on two-dimensional galvanometers is shown, and in this embodiment, similar to embodiment 2, the deflection directions of the two-dimensional galvanometers on the receiving-end galvanometer 3 are not completely the same, and by accurately adjusting the deflection angles of the two-dimensional galvanometers on the receiving-end galvanometer 3, the convergence of light beams is realized, so that the system is simplified, and the apparatus structure of the laser radar is compact. Different from embodiment 2, the receiving end of embodiment 3 adopts an off-axis optical path layout, that is, the incident light and the reflected light on the two-dimensional galvanometer of the receiving end galvanometer 3 are non-coaxial, so that the receiving energy loss caused by the shielding of the optical path by the laser receiving unit 5 can be avoided.
Specifically, as shown in fig. 4, the shape of the wave surface of the light beam is changed by precisely adjusting the deflection angle of each two-dimensional galvanometer on the receiving-end galvanometer 3, and the reflected light beam 710, the reflected light beam 720 and the reflected light beam 730 of the target object 6 to be measured are respectively converted into the reflected light beam 711, the reflected light beam 721 and the reflected light beam 731, so that the receiving-end galvanometer 3 achieves a convergence effect similar to that of a concave mirror and finally converges at the laser receiving unit 5.
As for the above embodiments 2 and 3, the size of each galvanometer of the receiving-side galvanometer 3 needs to be appropriately reduced, and by increasing the density and number of the galvanometers, the light beam converging effect is improved, and the energy loss is reduced.
In the above embodiment, the two-dimensional galvanometer adopted by the transmitting-end galvanometer 2 and the two-dimensional array composed of a plurality of two-dimensional galvanometers adopted by the receiving-end galvanometer 3 simplify and compact the structure of the laser radar, and the instantaneous field angle can be designed to be small enough to reduce the influence of the background light as much as possible, which will be described below with reference to fig. 6 and 7.
Specifically, FIG. 6 is a schematic view of the field of view of a conventional lidar apparatus, i.e., at the laserA receiving end of the radar device does not adopt a galvanometer, but directly adopts a lens group for receiving. Of course, there are also lidar devices that employ sets of mirrors or combinations of lenses and mirrors, such as the cassegrain system, which are essentially identical. The lens group shown in fig. 6 is only taken as an example for analysis here. In fig. 6, the emitting end uses a common reflector or a galvanometer to receive the detection laser beam to change the scanning direction of the laser beam, so as to achieve full coverage of the whole target. However, since the lens and the detector cannot move and deflect at the receiving end, the receiving end instantaneous viewing angle is designed so that the diffuse reflection light from the position of the target can be received
Must be large enough, for example, the vertical field angle is often more than 20 degrees for the traditional multiline laser radar, then
It is also necessary to reach above 20 deg. to get a lot of background stray light into the lidar, resulting in a low signal to noise ratio. To overcome the above disadvantages, many manufacturers employ multiple lasers and multiple detectors, each of which corresponds to only a small field of view in space. But this adds significantly to the hardware cost of the lidar.
Whereas in the present invention, its instantaneous field of view can be analyzed according to fig. 7. Because each moment only needs to ensure that the receiving lens unit 4 and the laser receiving unit 5 can receive a laser beam with a small divergence angle reflected by the receiving end galvanometer 3, and each moment does not need to cover the full field of view, the instantaneous field of view of the laser radar in the invention
Instantaneous field of view of conventional lidar as described with respect to FIG. 6
Much smaller. For example, if the aperture of the detector is 1mm, the focal length of the lens is 50mm, and the aperture of the receiving-end galvanometer 3 is large enough, the aperture is not limited to the above-mentioned oneThe instantaneous field angle is only 20mrad, which is much smaller than that of the conventional lidar. The instantaneous field angle can be further reduced by increasing the focal length of the lens or reducing the caliber of the detector. Therefore, the laser radar of the embodiment of the invention can greatly reduce the background light radiation entering the system, thereby effectively improving the signal-to-noise ratio of the system.
Furthermore, the transmitting end (mainly comprising the laser transmitting unit 1 and the transmitting end galvanometer 2) and the receiving end (mainly comprising the receiving end galvanometer 3 and the laser receiving unit 5) of the laser radar device based on the two-dimensional galvanometer both adopt the two-dimensional galvanometer, so that the scanning speed which is much higher than that of the traditional laser radar can be achieved, and the instantaneous field angle can be greatly reduced, thereby greatly reducing the interference of background light and greatly improving the signal-to-noise ratio. Because the two-dimensional galvanometer scanning is adopted to replace a mechanical scanning mechanism, the laser radar works more stably, mechanical abrasion can be avoided, and the service life is longer. Meanwhile, the weight and the volume of the system are greatly reduced, and the production and manufacturing cost is also greatly reduced.
The above description is only for the purpose of illustrating the preferred embodiments of the present invention and is not to be construed as limiting the invention, and any modifications, equivalents, improvements and the like that fall within the spirit and principle of the present invention are intended to be included therein.
Claims (12)
1. A lidar device based on a two-dimensional galvanometer, the lidar device comprising:
a laser emitting unit for emitting a laser beam;
the transmitting end galvanometer is used for changing the direction of the transmitted laser beam and comprises a two-dimensional galvanometer which deflects in two mutually perpendicular directions to realize the scanning of a target;
a receiving end vibrating mirror for receiving the laser beam reflected by the target to be measured,
the receiving end galvanometer comprises a plurality of two-dimensional galvanometers which form a two-dimensional array, each two-dimensional galvanometer deflects in two mutually perpendicular directions, and the two-dimensional galvanometers deflect synchronously or asynchronously;
and the laser receiving unit is used for receiving and processing the laser beam reflected by the receiving end galvanometer.
2. The two-dimensional galvanometer-based lidar apparatus of claim 1, wherein the laser receiving unit is disposed behind the receiving galvanometer along a predetermined optical path, and a light receiving surface of the laser receiving unit faces a reflecting surface of the receiving galvanometer.
3. The two-dimensional galvanometer-based lidar apparatus of claim 1, wherein the laser emitting unit comprises a laser and a laser collimating subunit, the laser being configured to emit a laser beam, the laser collimating subunit being configured to collimate the laser beam emitted by the laser emitting unit.
4. The lidar apparatus according to claim 1 or 2, wherein an effective clear aperture of the transmitting galvanometer and the receiving galvanometer is larger than a diameter of the laser beam.
5. The lidar device according to claim 4, wherein the reflecting films are coated on the galvanometers of the transmitting-end galvanometer and the receiving-end galvanometer, and the reflecting wavelength of the reflecting film is matched with the output wavelength of the laser emitting unit.
6. The lidar apparatus according to claim 1, wherein the laser receiving unit comprises a detector, and the detector is configured to receive a laser signal and convert the laser signal into an electrical signal for output.
7. The lidar device according to claim 1, wherein the laser receiving unit further comprises an optical filter, a transmission wavelength and a transmission bandwidth of the optical filter are respectively matched with an output wavelength and an output bandwidth of the laser emitting unit, and the optical filter is a narrow-band optical filter.
8. The lidar device according to claim 2, wherein the deflection directions of the galvanometers at the receiving end are identical and synchronously changed, a receiving lens unit is disposed between the laser receiving unit and the galvanometer at the receiving end, and the detector is disposed at the focal plane position of the receiving lens unit,
or the like, or, alternatively,
and each galvanometer on the receiving end galvanometer deflects asynchronously, the light beam convergence is realized by adjusting the deflection angle of each galvanometer on the receiving end galvanometer, and the detector is arranged at the position of a convergence point.
9. The two-dimensional galvanometer-based lidar apparatus of claim 8, wherein a center line of the receiving galvanometer coincides with an optical axis of the laser receiving unit.
10. The two-dimensional galvanometer-based lidar apparatus of claim 9, wherein an aperture of the receive lens unit, the receive lens unit focal length, and the detector size are matched to a field angle.
11. The lidar apparatus according to claim 5, further comprising a galvanometer driving unit for adjusting a deflection angle of the transmitting galvanometer and the receiving galvanometer.
12. A two-dimensional galvanometer-based lidar system including the lidar means of any of claims 1-11.
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