CN207096455U - A kind of galvanometer panoramic scanning device - Google Patents
A kind of galvanometer panoramic scanning device Download PDFInfo
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- CN207096455U CN207096455U CN201721080652.6U CN201721080652U CN207096455U CN 207096455 U CN207096455 U CN 207096455U CN 201721080652 U CN201721080652 U CN 201721080652U CN 207096455 U CN207096455 U CN 207096455U
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Abstract
The utility model provides a kind of galvanometer panoramic scanning device, including control process module and connected laser emitting module, scan module and laser pick-off module；Laser emitting module includes laser, collimation lens set, launches after the collimated collimated of exploring laser light beam of laser transmitting；Scan module includes galvanometer and the first reflector, and the exploring laser light beam after collimation is entered horizontal deflection and launched to the first reflector, reflexed to exploring laser light beam on target object by the first reflector by galvanometer；Laser pick-off module includes receiving telescope and photo-detector, and receiving telescope is incided from the return laser beam returned by target object surface reflection or diffusing reflection；Control process module, is controlled and perceives to the working condition of laser, galvanometer and photo-detector and the analysis that is for data processing.The utility model resetting difficulty is small, and without higher than the frequency of mechanical gyro unit to the adjustment one by one of multichannel range-measurement system, galvanometer frequency, sweep speed is faster.
Description
Technical field
Laser radar field is the utility model is related to, particularly a kind of galvanometer panoramic scanning device and its scan method.
Background technology
In recent years, with the development of artificial intelligence, automatic Pilot, auxiliary, which drive, rises, and has promoted laser radar civilian
The application in field.
From the point of view of technical principle, mainly there are two types for civilian scanning laser radar：The first is multiple laser
360 ° are pivoted side by side, per beam one plane of laser scanning；Second is solid-state laser radar, is scanned using optical phased array
Mode is scanned to target；The first mechanical rotation scan laser radar is by after multiple single-point distance measurement system Side by side groupings
Rotated around mechanical axis to realize three-dimensional panorama scanning；And second of solid-state laser Radar Technology is due to existing optical phased array
Scanning angle is smaller, can not also realize panoramic scanning at present.
Utility model content
The utility model in order to overcome, fix, sweep speed is low, adjustment by the Laser Radar Scanning angle that existing machinery rotates
A kind of the problems such as workload is big, there is provided new laser radar.
Realize that above-mentioned purpose the technical solution of the utility model is, a kind of galvanometer panoramic scanning device, including control process
Module and connected laser emitting module, scan module and laser pick-off module；Laser emitting module includes laser, standard
Straight lens, the exploring laser light beam that the laser is launched are launched after being collimated collimated；Scan module include galvanometer and
Exploring laser light beam steering after collimation to the first reflector will be detected and swashed by the first reflector, the galvanometer by the first reflector
Light beam is reflexed on target object；Laser pick-off module includes receiving telescope and photo-detector, from anti-by target object surface
Penetrate or return laser beam that diffusing reflection is returned incides receiving telescope；Control process module, the laser, galvanometer and light are visited
The working condition of survey device is controlled and perceived and the analysis that is for data processing.
Preferably, first speculum is conic reflector.
Preferably, the conic reflector is one kind of male-tapered reflector or inner conical reflector.
Preferably, the male-tapered reflector, exploring laser light beam enter air dielectric after being deflected by galvanometer, reach male-tapered
It is emitted after reflector through reflecting along equatorial direction；The inner conical reflector, its external surface can be cylinder, ball
Shape, square or other shapes one kind, inner conical reflector inside are tapered hollow, and taper surface is complete for inner conical reflecting surface
Reflecting surface, it is the one of the optical mediums such as the optical glass of refractive index homogeneity distribution or optical plastic between external surface and taper surface
Kind, to ensure that exploring laser light beam can be totally reflected on the reflecting surface；Exploring laser light beam first passes through taper after being deflected by galvanometer
The optical medium of reflector refractive index homogeneity distribution reaches the fully reflecting surface of conic reflector again, along equator side after total reflection
To outgoing.
Preferably, on the reflecting surface of the male-tapered reflector, or the outer profile surface of inner conical reflector, can be attached
Fine optical texture, has optimized the outgoing beam structure of exploring laser light beam.
Preferably, the laser emitting module further comprises the second speculum, and exploring laser light beam is incident from side horizontal
To the second speculum, the second speculum is plane mirror, is arranged at conic reflector top and tilts 45 ° of placements, detects light
Beam is incident on the second speculum from side horizontal, and detection light beam is incided on galvanometer vertically after being reflected by the second speculum.
Preferably, the galvanometer is MEMS 2-D vibration mirrors.
Preferably, the type of drive of 2-D vibration mirror has：Electrostatic drive, electromagnetic drive and Piezoelectric Driving.
Preferably, the maximum twist angle of the 2-D vibration mirror is β, while the maximum twist angle of two dimensions is β, is passed through
Adjust maximum twist angle and the phase of 2-D vibration mirror so that two dimension vibration frequencies of adjustment control galvanometer are identical, phase differenceIt is constant, according to the two of optical mirror times of angular dependences, from galvanometer surface vertical incidence and by vibration mirror reflected
Exploring laser light beam trajectory is the β of semi-cone angle 2 ring taper, i.e., the exploring laser light beam after galvanometer deflects forms ring conical scan rail
Mark.
Preferably, the exploring laser light beam reflects after laser emitting module outgoing from side horizontal incidence or from taper
Scan module is incided downwards through conic reflector above device.
Preferably, the return laser beam reflected by target object surface incides receiving telescope successively and light is visited
Device is surveyed, after return laser beam is received by photo-detector and is converted into electric signal, by control process resume module.
Preferably, the galvanometer panoramic scanning device also includes the output module being connected with control process module, works as control
After processing module processing integration measurement data and transmit to the output module, by output module output data.
Preferably, the receiving telescope is one kind of Kepler telescope, Cassegrain telescope or other telescopes；
The photo-detector is avalanche photodide, photomultiplier, semiconductor photo diode, photoelectric coupled device, complementary gold
Belong to one kind of oxide semiconductor or electric charge injector.
Preferably, the control process module can control the power of laser, go out light frequency, pulsewidth and MEMS galvanometers
Vibration angle and vibration frequency etc.；The simultaneously responsible scan data integrated processing photo-detector and gathered of control process module is simultaneously right
Scan data is calculated, and calculates the states such as target object location, speed, posture and rotation, calculates target object letter
Transmit after breath to output module and shown data output by output module.
Preferably, a kind of galvanometer panoramic scanning device and its scan method, comprise the following steps：
For a certain single-point on target object, laser emitting module is launched collimated probe laser beam and is incident to be swept step 1)
Retouch module；
Step 2) galvanometer enters horizontal deflection to exploring laser light beam, by controlling galvanometer maximum twist angle and phase difference, makes detection
Ring conical scan track is formed after laser beam deflection；
The speculum of step 3) first galvanometer is deflected after exploring laser light beam secondary reflection again, exploring laser light beam is along equatorial direction
Outgoing；
The a certain single-point of step 4) exploring laser light beam scanning target object, form return laser beam and connect by laser pick-off module
Receive；
Step 5) control process module calculates the distance and angle information for determining the single-point, completes the spot measurement.
Step 6) circulation step 1) to step 5) until all single-points of target object complete scanning survey.
Preferably, a kind of described galvanometer panoramic scanning device and its scan method, step 2) comprise the following steps：
After forming conical scan track after step 21) exploring laser light beam steering, galvanometer is to its wink of control process module feedback
When torsion angle.
Preferably, a kind of described galvanometer panoramic scanning device and its scan method, step 3) comprise the following steps：
Step 31) exploring laser light beam carries out 360 ° of scannings in the first speculum equatorial direction；
Exploring laser light beam after step 32) scanning is emitted along equatorial direction.
Preferably, the orientation angles θ of 360 ° of scannings determines method in step 31) equatorial direction：Fed back according to galvanometer
The β of instantaneous torsion anglexAnd βy, the synthesis of phase difference ± pi/2 and two mutually perpendicular simple harmonic motions, that is, haveCos θ=βx/β。
Preferably, a kind of described galvanometer panoramic scanning device and its scan method, step 5) comprise the following steps：
The distance of the step 51) single-point：D=0.5ct；
Wherein：C is the light velocity；T is that the transmitting of exploring laser light beam and photo-detector receive the exploring laser light beam time difference；C is constant,
T is handled according to laser radar internal circuit and obtained；
Step 52) the single-point is in meridian direction luffing angle：γ=90 ° -2 (alpha-beta), the β of α ＞ 2.
Wherein：β is galvanometer maximum deflection angle；α is the semi-cone angle of conic reflector；α is predefined, and β feeds back according to galvanometer
Instantaneous torsion angle obtain.
Preferably, γ can just can be born, and can be achieved to be less than on meridian direction by controlling the maximum twist angle beta of galvanometer to change
The scanning of 180 degree.
The beneficial effects of the utility model：The apparatus structure is succinct, and skill is scanned relative to hybrid solid-state of the prior art
Art, the device resetting difficulty is small, without to the adjustment one by one of multichannel range-measurement system；Secondly, scanning means no mechanical rotary part, both
360 ° of scannings in conic reflector equatorial direction can be achieved, can realize that meridian direction scans within the specific limits on demand again,
Meridian direction scanning angle is less than 180 °, and controllability is strong；In the device, galvanometer frequency is higher than mechanical gyro unit, and scans speed
Degree is faster；The 2-D vibration mirror angle of minimum resolution of the device up to 0.05 °, accurately control accordingly exploring laser light beam send the time with
Reach exploring laser light beam with 2-D vibration mirror highly to coordinate, realize that adjustable high accuracy points to measurement.
Brief description of the drawings
Fig. 1 is modular structure block diagram of the present utility model；
Fig. 2 is preferred embodiment general structure block diagram of the present utility model；
Fig. 3 is preferred embodiment galvanometer panoramic scanning operation principle schematic diagram of the present utility model；
Fig. 4 is simplified embodiment general structure block diagram of the present utility model；
Fig. 5 is simplified embodiment galvanometer panoramic scanning operation principle schematic diagram of the present utility model；
Fig. 6 is a kind of inner conical reflector schematic diagram of the present utility model.
In figure, control process module 100, laser emitting module 200, laser 201, collimation lens 202, scan module
300, MEMS 2-D vibration mirrors 301, the first reflector 302, the second speculum 303, laser pick-off module 400, receiving telescope
401, photo-detector 402, output module 500.
Embodiment
Reference picture 1- Fig. 3, a kind of galvanometer panoramic scanning device, including control process module 100 and connected laser
Transmitter module 200, scan module 300 and laser pick-off module 400；It is saturating that laser emitting module 200 includes laser 201, collimation
Mirror 202, the exploring laser light beam that the laser 201 is launched, which is collimated after lens 202 collimate, to be launched；Scan module 300 wraps
Galvanometer and the first reflector 302 are included, for the galvanometer by the exploring laser light beam steering after collimation to the first reflector 302, first is anti-
It is male-tapered reflector to penetrate mirror, and male-tapered reflector outer wall, i.e. the reflecting surface of male-tapered reflector is smooth and is coated with reflectance coating, subtracts
The reflection optical losses of few exploring laser light beam, are reflexed to exploring laser light beam on target object by the first reflector 302；Laser pick-off
Module 400 includes receiving telescope 401 and photo-detector 402, from the laser returned by target object surface reflection or diffusing reflection
Echo incides receiving telescope 401；Control process module 100, to the laser 201, galvanometer 301 and photo-detector 402
Working condition be controlled and perceive and the analysis that is for data processing.
Laser emitting module 200 further comprises the second speculum 303, and exploring laser light beam is incident to second from side horizontal
Speculum 303, the second speculum 303 are plane mirror, are arranged at conic reflector top and tilt 45 ° of placements, detect light
Beam is incident on the second speculum 303 from side horizontal, and detection light beam incides galvanometer vertically after being reflected by the second speculum 303
On, galvanometer is MEMS 2-D vibration mirrors 301, and galvanometer is worked using electrostatic drive mode.
The maximum twist angle of MEMS 2-D vibration mirrors 301 is β, and the maximum twist angle of two dimensions is β, passes through adjustment
The maximum twist angle of MEMS 2-D vibration mirrors 301 and phase difference so that 301 two dimension vibration frequencies of adjustment control MEMS 2-D vibration mirrors
Rate is identical, phase differenceIt is constant, according to the two of optical mirror times of angular dependences, from MEMS 2-D vibration mirrors 301 just on
The ring taper that Fang Shuzhi incidences and the exploring laser light beam trajectory reflected by MEMS 2-D vibration mirrors 301 are the β of semi-cone angle 2, i.e., through MEMS
Exploring laser light beam after 2-D vibration mirror 301 deflects forms ring conical scan track.
The return laser beam reflected by target object surface incides receiving telescope 401 and photo-detector 402 successively,
After return laser beam is received by photo-detector 402 and is converted into electric signal, handled by control process module 100；When control process mould
After the processing integration measurement data of block 100 and transmit to output module 500, by the output data of output module 500；Wherein, at control
Reason module 100 can control the power of laser 201, go out light frequency, pulsewidth and MEMS 2-D vibration mirrors 301 vibration angle and shake
Dynamic frequency etc.；Control process module 100 is responsible for integrating the scan data that processing photo-detector 402 is gathered and to scanning number simultaneously
According to being calculated, the states such as target object location, speed, posture and rotation are calculated, are passed after calculating information on target object
Output module 500 is transported to be shown data output by output module 500.
In the preferred embodiment, laser 201 as outgoing light source, be laser diode, on target object certain
One single-point, laser diode launch exploring laser light beam, and exploring laser light beam incidence collimation lens 202 is collimated, after collimation
Exploring laser light beam is incident to the plane mirror for being arranged at male-tapered reflector top and tilting 45 ° of placements from side horizontal, visits
Light-metering beam is incided on MEMS 2-D vibration mirrors 301 vertically after being reflected by plane mirror, and MEMS 2-D vibration mirrors 301 are driven using electrostatic
Flowing mode works, and the maximum twist angle of MEMS 2-D vibration mirrors 301 is β, and the maximum twist angle of two dimensions is β, passes through tune
The maximum twist angle of whole MEMS 2-D vibration mirrors 301 and phase difference so that the 301 two dimension vibrations of adjustment control MEMS 2-D vibration mirrors
Frequency is identical, phase difference ± pi/2 is constant, according to the two of optical mirror times of angular dependences, is hung down directly over MEMS 2-D vibration mirrors 301
The ring taper that exploring laser light beam trajectory that is straight incident and being reflected by MEMS 2-D vibration mirrors 301 is the β of semi-cone angle 2, i.e., through MEMS two dimensions
Exploring laser light beam after galvanometer 301 deflects forms ring conical scan track, and conical scan track is formed after exploring laser light beam steering
Afterwards, MEMS 2-D vibration mirrors 301 feed back its instantaneous torsion angle β to control process module 100xAnd βy。
Male-tapered reflector MEMS 2-D vibration mirrors 301 are deflected after exploring laser light beam secondary reflection again, exploring laser light beam edge
Equatorial direction is emitted, and male-tapered reflector outer wall is covered with reflectance coating, the reflection optical losses of reduction exploring laser light beam, exploring laser light
Beam along equatorial direction be emitted when, 360 ° of scannings are carried out in conic reflector equatorial direction, the sides of 360 ° of scanning in equatorial direction
Parallactic angle degree is set to θ and determines method：The β of the instantaneous torsion angle fed back according to MEMS 2-D vibration mirrors 301xAnd βy, phase difference ± pi/2 and
The synthesis of two mutually perpendicular simple harmonic motions, that is, have Cos θ=βx/β；Exploring laser light beam is along equator side
It is scanned to being emitted on target object, the return laser beam reflected by target object surface incides Kepler's prestige successively
Remote mirror and semiconductor photo diode, after return laser beam is received by semiconductor photo diode and is converted into electric signal, by controlling
Processing module 100 is handled, and control process module 100 controls the power of laser 201, goes out light frequency, pulsewidth and MEMS two dimensions
The vibration angle of galvanometer 301 and vibration frequency etc.；Control process module 100 is responsible for integration processing photo-detector 402 and adopted simultaneously
The scan data of collection is simultaneously calculated scan data, calculates the states such as target object location, speed, posture and rotation,
Calculate to transmit to output module 500 after information on target object and shown data output by output module 500.
Control process module 100 calculates the distance and angle information for determining the single-point, wherein, the distance of the single-point：D=
0.5ct, c are the light velocity；T is that the transmitting of exploring laser light beam and photo-detector 402 receive the exploring laser light beam time difference；The single-point is in meridian
Direction luffing angle：γ=90 ° -2 (alpha-beta), α ＞ 2 β, β are the maximum deflection angle of MEMS 2-D vibration mirrors 301；α is conic reflector
Semi-cone angle；γ can just can be born, and be can be achieved by controlling the maximum twist angle beta of MEMS 2-D vibration mirrors 301 to change on meridian direction
Less than the scanning of 180 degree, the spot measurement is completed；Above-mentioned steps are circulated until all single-points of target object complete scanning survey.
Scanning means no mechanical rotary part, 360 ° of scannings in conic reflector equatorial direction can be both realized, again can be real
Existing meridian direction scans within the specific limits on demand, and meridian direction scanning angle is less than 180 °；In the device, MEMS two dimensions are shaken
The frequency of mirror 301 is higher than mechanical gyro unit, and sweep speed is faster；The angle of minimum resolution of MEMS 2-D vibration mirrors 301 of the device can
Up to 0.05 °, exploring laser light beam is accurately controlled accordingly and sends the time to reach exploring laser light beam and the height of MEMS 2-D vibration mirrors 301
Coordinate, realize that adjustable high accuracy points to measurement.
As embodiment is simplified, reference picture 1, Fig. 4-Fig. 5, relative to preferred embodiment, it is anti-that simplified embodiment withdraws second
Mirror 303 is penetrated, laser diode launches exploring laser light beam, and exploring laser light beam incidence collimation lens 202 is collimated, after collimation
Exploring laser light beam incides on MEMS 2-D vibration mirrors 301 vertically above male-tapered reflector through male-tapered reflector, MEMS
2-D vibration mirror 301 is worked using electrostatic drive mode, and the maximum twist angle of MEMS 2-D vibration mirrors 301 is β, and two dimensions are most
Big torsion angle is β, by the maximum twist angle and the phase difference that adjust MEMS 2-D vibration mirrors 301 so that adjustment control MEMS bis-
Dimension 301 two dimension vibration frequencies of galvanometer are identical, phase differenceIt is constant, closed according to the two of optical mirror times of angles
System, the exploring laser light beam trajectory reflected from the surface vertical incidence of MEMS 2-D vibration mirrors 301 and by MEMS 2-D vibration mirrors 301 is half
The β of cone angle 2 ring taper, i.e. the exploring laser light beam after the deflection of MEMS 2-D vibration mirrors 301 form ring conical scan track, and detection swashs
After forming conical scan track after light beam deflection, MEMS 2-D vibration mirrors 301 feed back its instantaneous torsion angle to control process module 100
βxAnd βy。
Male-tapered reflector MEMS 2-D vibration mirrors 301 are deflected after exploring laser light beam secondary reflection again, exploring laser light beam edge
Equatorial direction is emitted, and male-tapered reflector outer wall is covered with reflectance coating, the reflection optical losses of reduction exploring laser light beam, exploring laser light
Beam along equatorial direction be emitted when, 360 ° of scannings are carried out in conic reflector equatorial direction, the sides of 360 ° of scanning in equatorial direction
Parallactic angle degree is set to θ and determines method：The β of the instantaneous torsion angle fed back according to MEMS 2-D vibration mirrors 301xAnd βy, phase difference ± pi/2 and
The synthesis of two mutually perpendicular simple harmonic motions, that is, have Cos θ=βx/β；Exploring laser light beam is along equatorial direction
It is emitted on target object and is scanned, the return laser beam reflected by target object surface incides Kepler successively looks in the distance
Mirror and semiconductor photo diode, after return laser beam is received by semiconductor photo diode and is converted into electric signal, by control
Reason module 100 is handled, and control process module 100 controls the power of laser 201, goes out light frequency, pulsewidth and MEMS two dimensions and shake
The vibration angle of mirror 301 and vibration frequency etc.；Control process module 100 is responsible for integration processing photo-detector 402 and gathered simultaneously
Scan data and scan data is calculated, calculate the states such as target object location, speed, posture and rotation, solve
Calculate to transmit to output module 500 after information on target object and shown data output by output module 500.
Control process module 100 calculates the distance and angle information for determining the single-point, wherein, the distance of the single-point：D=
0.5ct, c are the light velocity；T is that the transmitting of exploring laser light beam and photo-detector 402 receive the exploring laser light beam time difference；The single-point is in meridian
Direction luffing angle：γ=90 ° -2 (alpha-beta), α ＞ 2 β, β are the maximum deflection angle of MEMS 2-D vibration mirrors 301；α is conic reflector
Semi-cone angle；γ can just can be born, and be can be achieved by controlling the maximum twist angle beta of MEMS 2-D vibration mirrors 301 to change on meridian direction
Less than the scanning of 180 degree, the spot measurement is completed；Above-mentioned steps are circulated until all single-points of target object complete scanning survey.
When conic reflector selects the inner conical reflector such as Fig. 6, its external surface is cylindrical, in inner conical reflector
Portion is tapered hollow, and taper surface is the fully reflecting surface of inner conical reflecting surface, is refractive index homogeneity point between external surface and taper surface
The optical glass of cloth, to ensure that exploring laser light beam can be totally reflected on the reflecting surface；After exploring laser light beam is deflected by galvanometer
The optical medium for first passing through the distribution of conic reflector refractive index homogeneity reaches the fully reflecting surface of conic reflector again, by total reflection
It is emitted afterwards along equatorial direction.
The utility model is described in detail above, it is described above, only the preferred embodiment of the utility model and
, it is when the utility model practical range can not be limited, i.e., all to make equivalent changes and modifications according to the application scope, it all should still belong to this
In utility model covering scope.
Claims (9)
1. a kind of galvanometer panoramic scanning device, including control process module and connected laser emitting module, scan module
With laser pick-off module；Characterized in that,
Laser emitting module includes laser, collimation lens, and the exploring laser light beam of the laser transmitting is collimated collimated
After launch；
Scan module includes galvanometer and the first reflector, and the galvanometer reflects the exploring laser light beam steering after collimation to first
Device, exploring laser light beam is reflexed on target object by the first reflector；Laser pick-off module includes receiving telescope and light is visited
Device is surveyed, receiving telescope is incided from the return laser beam returned by target object surface reflection or diffusing reflection；
Control process module, the working condition of the laser, galvanometer and photo-detector is controlled and perceived and makees data
Treatment Analysis.
2. a kind of galvanometer panoramic scanning device according to claim 1, it is characterised in that first speculum is taper
Reflector.
3. a kind of galvanometer panoramic scanning device according to claim 2, it is characterised in that the conic reflector is outer cone
One kind of shape reflector or inner conical reflector.
4. a kind of galvanometer panoramic scanning device according to claim 1, it is characterised in that the laser emitting module enters one
Step includes the second speculum, and exploring laser light beam is incident to the second speculum from side horizontal, and exploring laser light beam is by the second speculum
Reflection is incident to galvanometer vertically.
5. a kind of galvanometer panoramic scanning device according to claim 4, it is characterised in that the galvanometer is that MEMS two dimensions are shaken
Mirror.
A kind of 6. galvanometer panoramic scanning device according to claim 5, it is characterised in that the maximum twist angle of the galvanometer
For β, by adjusting maximum twist angle and the phase difference of galvanometer, two dimension vibration frequencies of adjustment control galvanometer are identical, phase difference
Constant, the exploring laser light beam after galvanometer deflects forms ring conical scan track.
7. a kind of galvanometer panoramic scanning device according to claim 1, it is characterised in that the exploring laser light beam is from laser
After transmitter module outgoing, scanning mould is incided downwards through conic reflector from side horizontal incidence or above conic reflector
Block.
8. a kind of galvanometer panoramic scanning device according to claim 7, it is characterised in that described anti-by target object surface
It is emitted back towards the return laser beam come and incides receiving telescope and photo-detector successively, return laser beam is received and is converted into by photo-detector
After electric signal, by control process resume module.
9. a kind of galvanometer panoramic scanning device according to claim 1, it is characterised in that also include and control process module
The output module of connection, after control process resume module integrates measurement data and transmit to the output module, by output mould
Block output data.
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| CN107356930A (en) * | 2017-08-28 | 2017-11-17 | 广州市杜格数控设备有限公司 | A kind of galvanometer panoramic scanning device and its scan method |
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| CN110133842B (en) * | 2019-06-28 | 2024-03-12 | 岗春激光科技（江苏）有限公司 | Galvanometer scanning device and system |
| CN110133842A (en) * | 2019-06-28 | 2019-08-16 | 岗春激光科技（江苏）有限公司 | A kind of galvanometer scanning device and system |
| CN110456323A (en) * | 2019-07-09 | 2019-11-15 | 深圳奥比中光科技有限公司 | A kind of light emitting unit, light emitting devices and distance-measuring equipment |
| CN112986958A (en) * | 2021-03-24 | 2021-06-18 | 浙江大学 | Large-range laser scanning device based on high-density echo analysis and control system thereof |
| CN112986958B (en) * | 2021-03-24 | 2024-02-09 | 浙江大学 | Large-range laser scanning device based on high-density echo analysis and control system thereof |
| CN113866111A (en) * | 2021-09-27 | 2021-12-31 | 唐山市智明电子科技有限公司 | Tunnel internal scanning laser sensing system |
| WO2023157454A1 (en) * | 2022-02-15 | 2023-08-24 | 富士フイルム株式会社 | Ranging device |
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