CN114859623A

CN114859623A - Three-dimensional optical switch, three-dimensional optical network and three-dimensional optical chip

Info

Publication number: CN114859623A
Application number: CN202110190610.2A
Authority: CN
Inventors: 崔乃迪; 欧阳伯灵; 冯俊波; 郭进
Original assignee: United Microelectronics Center Co Ltd
Current assignee: United Microelectronics Center Co Ltd
Priority date: 2021-02-05
Filing date: 2021-02-05
Publication date: 2022-08-05

Abstract

A three-dimensional optical switch, a three-dimensional optical network and a three-dimensional optical chip are provided. The three-dimensional optical switch includes two-dimensional optical switches and a first interlayer optical switch. The two-dimensional optical switches are respectively arranged in the first-layer and second-layer two-dimensional optical networks and each comprise two first ports and two second ports. The first inter-layer optical switch includes two third ports and two fourth ports, one of the two third ports is arranged in the first layer two-dimensional optical network and optically connected with one of the two second ports of the two-dimensional optical switch in the first layer two-dimensional optical network, the other of the two third ports is arranged in the second layer two-dimensional optical network and optically connected with one of the two second ports of the two-dimensional optical switch in the second layer two-dimensional optical network, and the two fourth ports are respectively arranged in the first layer and the second layer two-dimensional optical network. The first interlayer optical switch is configured such that one or both of the two third ports selectively optically communicates with one or both of the two fourth ports.

Description

Three-dimensional optical switch, three-dimensional optical network and three-dimensional optical chip

Technical Field

The present disclosure relates to the field of photonic integration, and in particular, to a three-dimensional optical switch, a three-dimensional optical network, and a three-dimensional optical chip.

Background

The photonic integration industry is currently in the beginning stage of large-scale integration, and as with the development process of the integrated circuit industry, a programmable optical chip product capable of promoting the rapid development of the photonic integration industry is urgently needed in the field of photonic integration. The programmable optical chip has a great deal of potential application in the fields of optical communication, photon artificial intelligence, microwave photon, photon calculation, optical sensing and the like. Compared with the mainstream development and customization of the optical device at present, the programmable optical chip can greatly reduce the design period and be rapidly put into use, so that the design research and development efficiency and the equipment development and production efficiency are improved.

In the related art, based on the development idea of electronic integrated chips, research on programmable optical devices and optical networks has been carried out and some basic architectures have been proposed. The optical switch can be used for switching optical signals on different optical paths, and a plurality of optical switches are combined into an array or a network, so that programmable control of the optical signals can be realized, the optical switch can be used as a prototype and a core device of an optical network, and the programmable optical network has important application requirements and prospects in the fields of photon AI, laser radar, microwave photon and the like. However, there is still much room for improvement in developing new three-dimensional optical switches and new three-dimensional optical network configurations in the field of photonic integration.

Disclosure of Invention

It would be advantageous to provide a mechanism that alleviates, mitigates or even eliminates one or more of the above-mentioned problems.

According to an aspect of the present disclosure, there is provided a three-dimensional optical switch including: two-dimensional optical switch units, each two-dimensional optical switch unit comprising two corresponding first ports and two corresponding second ports, the two-dimensional optical switch units being respectively arranged in the first layer two-dimensional optical network and the second layer two-dimensional optical network; and a first inter-layer optical switch unit including two third ports and two fourth ports, one of the two third ports being arranged in the first layer two-dimensional optical network and optically connected with one of the two second ports of the two-dimensional optical switch unit in the first layer two-dimensional optical network, the other of the two third ports being arranged in the second layer two-dimensional optical network and optically connected with one of the two second ports of the two-dimensional optical switch unit in the second layer two-dimensional optical network, the two fourth ports being arranged in the first layer two-dimensional optical network and the second layer two-dimensional optical network, respectively. Each two-dimensional optical switch unit is configured such that one or both of the respective two first ports is in selective optical communication with one or both of the respective two second ports, and the first inter-layer optical switch is configured such that one or both of the two third ports is in selective optical communication with one or both of the two fourth ports.

According to another aspect of the present disclosure, there is provided a three-dimensional optical network comprising at least two layers of two-dimensional optical networks and at least one three-dimensional optical switch. Each three-dimensional optical switch comprises a three-dimensional optical switch as described above. Each three-dimensional optical switch is configured to cause a first layer of the at least two layers of two-dimensional optical networks to selectively optically communicate with a second layer of the at least two layers of two-dimensional optical networks that is different from the first layer of two-dimensional optical networks.

According to another aspect of the present disclosure, there is provided a three-dimensional optical chip including the three-dimensional optical network as described above and a plurality of input/output ports. The plurality of input/output ports are optically connected to the three-dimensional optical network to enable optical signals to enter or exit the three-dimensional optical network through the plurality of input/output ports.

These and other aspects of the disclosure will be apparent from and elucidated with reference to the embodiments described hereinafter.

Drawings

Further details, features and advantages of the disclosure are disclosed in the following description of exemplary embodiments, taken in conjunction with the accompanying drawings, in which:

FIGS. 1A-1C are schematic diagrams of a two-dimensional optical switch and a two-dimensional optical network in the related art;

fig. 2 is a schematic view of the structure of a three-dimensional optical switch according to an exemplary embodiment of the present disclosure;

FIG. 3 is a schematic view of an illustrative structure of the three-dimensional optical switch shown in FIG. 2, according to an exemplary embodiment of the present disclosure;

fig. 4 is a schematic view of the structure of a three-dimensional optical switch according to another exemplary embodiment of the present disclosure;

fig. 5 is a schematic view of the structure of a three-dimensional optical network according to an exemplary embodiment of the present disclosure;

6A-6B are schematic views of the structure of a cellular-type three-dimensional optical network according to exemplary embodiments of the present disclosure;

7A-7B are schematic views of a structure for constructing a lattice-type three-dimensional optical network from the three-dimensional optical switch shown in FIG. 3, according to an embodiment of the present disclosure;

FIG. 8 is a schematic diagram of a three-dimensional optical chip according to an exemplary embodiment of the present disclosure.

Detailed Description

It will be understood that, although the terms first, second, third, etc. may be used herein to describe various elements, components, regions, layers and/or sections, these elements, components, regions, layers and/or sections should not be limited by these terms. These terms are only used to distinguish one element, component, region, layer or section from another element, component, region, layer or section. Thus, a first element, component, region, layer or section discussed below could be termed a second element, component, region, layer or section without departing from the teachings of the present disclosure.

Spatially relative terms such as "below …," "below …," "lower," "below …," "above …," "upper," and the like may be used herein for ease of description to describe one element or feature's relationship to another element(s) or feature(s) as illustrated in the figures. It will be understood that these spatially relative terms are intended to encompass different orientations of the device in use or operation in addition to the orientation depicted in the figures. For example, if the device in the figures is turned over, elements described as "below" or "beneath" or "under" other elements or features would then be oriented "above" the other elements or features. Thus, the exemplary terms "below …" and "below …" may encompass both an orientation above … and below …. Terms such as "before …" or "before …" and "after …" or "next" may similarly be used, for example, to indicate the order in which light passes through the elements. The devices may be otherwise oriented (rotated 90 degrees or at other orientations) and the spatially relative descriptors used herein interpreted accordingly. In addition, it will also be understood that when a layer is referred to as being "between" two layers, it can be the only layer between the two layers, or one or more intervening layers may also be present.

The terminology used herein is for the purpose of describing particular embodiments only and is not intended to be limiting of the disclosure. As used herein, the singular forms "a", "an" and "the" are intended to include the plural forms as well, unless the context clearly indicates otherwise. It will be further understood that the terms "comprises" and/or "comprising," when used in this specification, specify the presence of stated features, integers, steps, operations, elements, and/or components, but do not preclude the presence or addition of one or more other features, integers, steps, operations, elements, components, and/or groups thereof. As used herein, the term "and/or" includes any and all combinations of one or more of the associated listed items, and the phrase "at least one of a and B" refers to a alone, B alone, or both a and B.

It will be understood that when an element or layer is referred to as being "on," "connected to," "coupled to" or "adjacent to" another element or layer, it can be directly on, connected to, coupled to or adjacent to the other element or layer or intervening elements or layers may be present. In contrast, when an element is referred to as being "directly on," "directly connected to," "directly coupled to," or "directly adjacent to" another element or layer, there are no intervening elements or layers present. However, neither "on … nor" directly on … "should be construed as requiring that one layer completely cover an underlying layer in any event.

Embodiments of the present disclosure are described herein with reference to schematic illustrations (and intermediate structures) of idealized embodiments of the present disclosure. As such, variations from the shapes of the illustrations as a result, for example, of manufacturing techniques and/or tolerances, are to be expected. Thus, embodiments of the present disclosure should not be construed as limited to the particular shapes of regions illustrated herein but are to include deviations in shapes that result, for example, from manufacturing. Thus, the regions illustrated in the figures are schematic in nature and their shapes are not intended to illustrate the actual shape of a region of a device and are not intended to limit the scope of the present disclosure.

Unless otherwise defined, all terms (including technical and scientific terms) used herein have the same meaning as commonly understood by one of ordinary skill in the art to which this disclosure belongs. It will be further understood that terms, such as those defined in commonly used dictionaries, should be interpreted as having a meaning that is consistent with their meaning in the context of the relevant art and/or the present specification and will not be interpreted in an idealized or overly formal sense unless expressly so defined herein.

As used herein, the term "substrate" may refer to a substrate of a diced wafer, or may refer to a substrate of an unslit wafer. Similarly, the terms chip and die (die) may be used interchangeably unless such interchange causes a conflict. It should be understood that the term "layer" includes films and, unless otherwise specified, should not be construed as indicating a vertical or horizontal thickness.

In the related art, some basic architectures of programmable optical devices and optical networks have been proposed. For example, various two-dimensional programmable optical network structures such as triangular lattice, square lattice, and hexagonal lattice have been proposed to realize programmable operation of optical signals in a chip plane. The square grid network type architecture and the cellular type architecture are widely applied at present due to strong programmable characteristics. However, for photonic integration technology, different semiconductor materials have their own advantages and application limitations, and the integration of multi-material systems also provides the possibility of operation of three-dimensional programmable optical networks perpendicular to the chip plane. At present, the prior art only realizes a two-dimensional programmable optical network of a chip plane, and cannot realize three-dimensional programmable optical interconnection vertical to the chip plane.

Fig. 1A to 1C are schematic diagrams of a two-dimensional optical switch and a two-dimensional optical network in the related art. Referring to fig. 1A, a basic structure of a mach-zehnder interferometer (MZI) type two-dimensional optical switch 100A is shown. The MZI-type two-dimensional optical switch 100A includes four

ports

120, 130, 140, and 150 for inputting or outputting an optical signal 110, two directional couplers 160, and a pair of electrodes 170. Optical signal 110, input to either

port

120 or 130, may be delivered to one or both of port 140 and port 150 via coupling of directional coupler 160 and modulation of the control voltage applied to electrode 170. However, the MZI type two-dimensional optical switch 100A can only realize optical signal transmission within the two-dimensional optical chip plane, and cannot realize optical signal transmission perpendicular to the two-dimensional optical chip plane.

Optical switch 100A' is a simplified diagram of a MZI type optical switch 100A, with like reference numerals indicating like elements from 100A. Likewise, optical switch 100A' cannot implement optical signal transmission perpendicular to the plane of the two-dimensional optical chip.

Fig. 1B is a schematic structural diagram of a lattice-type two-dimensional optical network 100B in the related art, and like reference numerals denote like elements as in fig. 1A. As shown in fig. 1B, the lattice-type two-dimensional optical network 100B includes an optical switch 100A'. The lattice-type two-dimensional optical network 100B is capable of realizing ring optical signal transmission within a two-dimensional optical chip plane. However, since the optical switch 100A' cannot realize optical signal transmission perpendicular to the plane of the two-dimensional optical chip, the lattice-type two-dimensional optical network 100B cannot realize optical signal transmission with another two-dimensional optical network stacked with each other in a direction perpendicular to the plane of the optical chip.

Fig. 1C is a schematic structural diagram of a cellular type two-dimensional optical network 100C in the related art, and like reference numerals thereof denote like elements as in fig. 1A and 1B. As shown in fig. 1C, the cellular two-dimensional optical network 100C may enable transmission of optical signals in loops and through in the plane of the two-dimensional optical chip. Similarly, since the optical switch 100A' cannot realize optical signal transmission perpendicular to the plane of the two-dimensional optical chip, the cellular-type two-dimensional optical network 100C cannot realize optical signal transmission with another two-dimensional optical network stacked with each other in a direction perpendicular to the plane of the optical chip.

Fig. 2 is a schematic view of the structure of a three-dimensional optical switch 200 according to an exemplary embodiment of the present disclosure. As shown in fig. 2, the three-dimensional optical switch 200 may include two-dimensional

optical switch cells

220 and 230, and a first interlayer optical switch cell 210.

The two-dimensional

optical switch units

220 and 230 may each include a respective two first ports and a respective two second ports. Illustratively, the optical switch unit 220 may include

first ports

226 and 228, and

second ports

222 and 224. The optical switch unit 230 may include

first ports

236 and 238, and

second ports

232 and 234. Two-dimensional

optical switch units

220 and 230 are arranged in a first-layer two-dimensional optical network 240 and a second-layer two-dimensional optical network 250, respectively.

The first interlayer optical switching unit 210 may include two

third ports

216 and 218, and two

fourth ports

212 and 214. One of the two

third ports

216 and 218, for example, the third port 216, may be disposed in the first layer two-dimensional optical network 240, and may be optically connected with one of the two

second ports

222 and 224, for example, the second port 224, of the two-dimensional optical switching unit 220 in the first layer two-dimensional optical network 240. Illustratively, the third port 216 and the second port 224 may be connected by a waveguide disposed in the first layer two-dimensional optical network 240.

Further, the other of the two

third ports

216 and 218, for example, the third port 218, may be arranged in the second-layer two-dimensional optical network 250, and may be optically connected with one of the two

second ports

232 and 234, for example, the second port 234, of the two-dimensional optical switching unit 230 in the second-layer two-dimensional optical network 250. Illustratively, the third port 218 and the second port 234 may be connected by a waveguide disposed in the second-tier two-dimensional optical network 250.

Further, the two

fourth ports

212 and 214 of the first interlayer optical switch may be arranged in the first layer two-dimensional optical network 240 and the second layer two-dimensional optical network 250, respectively.

Further, each of the two-dimensional

optical switch units

220 and 230 may be configured such that one or both of the respective two first ports selectively optically communicates with one or both of the respective two second ports. Illustratively, the two-dimensional optical switch unit 220 may have one or both of the two

first ports

226 and 228 selectively in optical communication with one or both of the two

second ports

222 and 224. The two-dimensional optical switch 230 may enable one or both of the two

first ports

236 and 238 to selectively optically communicate with one or both of the two

second ports

232 and 234.

Further, the first interlayer optical switch 210 may be configured such that one or both of the two

third ports

216 and 218 selectively optically communicate with one or both of the two

fourth ports

212 and 214.

In some exemplary embodiments, the two-dimensional

optical switch units

220 and 230 may each be a mach-zehnder type interferometer (MZI) optical switch.

In some embodiments, an optical signal input by any of the

first ports

226 or 228 of the two-dimensional optical switch unit 220 in the first-tier two-dimensional optical network 240 may be delivered to the

second ports

222 or 224 through the two-dimensional optical switch unit 220. Illustratively, when an optical signal is delivered to the second port 222, the transfer of the optical signal within the first layer two-dimensional optical network 240 is achieved. Alternatively, when the optical signal is delivered to the second port 224, the optical signal is transmitted to the third port 216 since the second port 224 is optically connected to the third port 216 of the first interlayer optical switching unit 210 disposed in the first layer two-dimensional optical network 240. Next, the first interlayer optical switching unit 210 may deliver the optical signal from the third port 216 to the fourth port 212 arranged in the first layer two-dimensional optical network 240 or the fourth port 214 arranged in the second layer two-dimensional optical network 250. Illustratively, when the optical signal is delivered to the fourth port 214, interlayer transmission of the optical signal from the first layer two-dimensional optical network 240 to the second layer optical network 250 is achieved.

Optionally, the optical signal input by the

first port

236 or 238 in the second layer two-dimensional optical network 250 can also deliver the optical signal to the fourth port 212 in the first layer two-dimensional optical network 240 by the similar delivery manner as described above.

Optionally, the optical signal input by the first interlayer optical switch 210 at the fourth port 212 of the first layer two-dimensional optical network 240 may also deliver the optical signal to one or both of the

first ports

236 and 238 of the second layer two-dimensional optical network 250 by a similar delivery manner as described above. Optionally, the optical signal input by the first interlayer optical switch 210 at the fourth port 214 of the second-layer two-dimensional optical network 250 may also deliver the optical signal to one or both of the

first ports

226 and 228 of the first-layer two-dimensional optical network 240 by a similar delivery manner as described above.

In some exemplary embodiments, the first interlayer optical switch unit 210 may include a first waveguide disposed in the first layer two-dimensional optical network 240 for optically connecting the fourth port 212 disposed in the first layer two-dimensional optical network 240 to the third port 216 disposed in the first layer two-dimensional optical network 240. The first interlayer optical switch unit 210 further comprises a second waveguide arranged in the second layer two-dimensional optical network 250 for optically connecting the fourth port 214 arranged in the second layer two-dimensional optical network 250 to the third port 218 arranged in the second layer two-dimensional optical network 250.

In some exemplary embodiments, the first interlayer optical switching unit 210 may further include a first optical coupler 211, a second optical coupler 213, and a phase shifter 215. The first optical coupler 211 may be disposed at one end of the first waveguide and the second waveguide for coupling optical power between the first waveguide and the second waveguide. A second optical coupler 213 may be disposed at the other ends of the first waveguide and the second waveguide for coupling optical power between the first waveguide and the second waveguide. A phase shifter 215 may be disposed on the first and second waveguides and between the first and second

optical couplers

211 and 213 for changing phases of optical signals transmitted in the first and second waveguides.

In some demonstrative embodiments, an optical signal from third port 216 of first inter-layer optical switch 210 in first-layer two-dimensional optical network 240 may pass through first optical coupler 211 via a first waveguide. Illustratively, the first optical coupler 211 may couple the optical signal to a second waveguide in the second-tier two-dimensional optical network 250. The phase shifter 215 may change a phase of a portion of the optical signal passing through the first optical coupler 211 and located in the first layer of the two-dimensional optical network 240 and change a phase of another portion of the optical signal coupled by the first optical coupler 211 to the second waveguide in the second layer of the two-dimensional optical network 250. The second optical coupler 213 may couple power of a portion of the optical signal located on the first waveguide and another portion of the optical signal located on the second waveguide, thereby enabling the optical signal to be output from one or both of the

fourth ports

212 and 214.

Optionally, the optical signal input by the

fourth port

212 or 214 may also be delivered to one or more of the

first ports

226, 228, 236, and 238 in a similar manner, which will not be described herein.

To sum up, the three-dimensional optical switch 200 arranges the port of one interlayer optical switch unit 210 in the two-dimensional optical networks of different layers, and optically connects the port of the interlayer optical switch unit 210 with one two-dimensional optical switch unit in the two-dimensional optical network of each layer. Therefore, in the plane of the two-dimensional

optical network

240 or 250, the optical signal can be transmitted in the layer through the two-dimensional

optical switch unit

220 or 230, and the optical signal can be transmitted between the two-dimensional optical networks through the interlayer optical switch unit 210, so that the optical power distribution and the controllable switching of the three-dimensional optical switch 200 to the optical signal in the plane and between the layers perpendicular to the plane are realized.

Fig. 3 is a schematic view of an illustrative structure 300 of the three-dimensional optical switch 200 shown in fig. 2, according to an exemplary embodiment of the present disclosure. As shown in fig. 3, an illustrative configuration of optical switch 200 may be shown as configuration 300. The illustrative architecture 300 includes a first inter-layer optical switch unit 310, a two-dimensional optical switch unit 320 disposed in a first-layer two-dimensional optical network 340, and a two-dimensional optical switch unit 330 disposed in a second-layer two-dimensional optical network 350.

The upper and lower layers of interlayer optical switch 310 are shown separately for clarity of illustration. As illustrated, a portion 317 of the interlayer optical switch 310 is disposed in a first layer two dimensional optical network 340 and another portion 319 of the interlayer optical switch 310 is disposed in a second layer two dimensional optical network 350.

Illustratively, the first interlayer optical switch unit 310 may include a fourth port 312 disposed at the first-layer two-dimensional optical network 340, and a fourth port 314 disposed at the second-layer two-dimensional optical network 350. Illustratively, the

fourth ports

312 and 314 may represent the

ports

212 and 214, respectively, in the three-dimensional optical switch 200.

The two-dimensional optical switch unit 320 may include

first ports

326 and 328 arranged in a first-layer two-dimensional optical network 340, and a second port 322. Illustratively, the

first ports

326 and 328, and the second port 322 may represent the

ports

226, 228, and 222, respectively, in the three-dimensional optical switch 200.

The two-dimensional optical switching unit 330 may include

first ports

336 and 338, and a second port 332, which are arranged in the second-layer two-dimensional optical network 350. Illustratively, the

first ports

336 and 338, and the second port 332 may represent the

ports

236, 238, and 232, respectively, in the three-dimensional optical switch 200.

Illustratively, the delivery characteristics of the illustrative structure 300 of the three-dimensional optical switch to the optical signal may be the same as those of the three-dimensional optical switch 200 and will not be described in detail herein.

Fig. 4 is a schematic view of the structure of a three-dimensional optical switch 400 according to another exemplary embodiment of the present disclosure. Like reference numerals in fig. 4 refer to like elements in fig. 2 and are not described again. As shown in fig. 4, the three-dimensional optical switch 400 may further include a second interlayer optical switch 460, as compared to the three-dimensional optical switch 200 of fig. 2. The second interlayer optical switch 460 may include two

fifth ports

462 and 464 and two

sixth ports

466 and 468.

Further, one of the two

fifth ports

462 and 464, for example, the fifth port 462, may be disposed in the first layer two-dimensional optical network 240 and optically connected with one of the two

first ports

226 and 228, for example, the first port 226, of the two-dimensional optical switching unit 220 in the first layer two-dimensional optical network 240. Illustratively, the other of the two

fifth ports

462 and 464, for example, the fifth port 464, may be arranged in the second-layer two-dimensional optical network 250 and optically connected with one of the two

first ports

236 and 238, for example, the first port 236, in the two-dimensional optical switching unit 230 in the second-layer two-dimensional optical network 250. Illustratively, two

sixth ports

466 and 468 may be arranged in the first-layer two-dimensional optical network 240 and the second-layer two-dimensional optical network 250, respectively.

Further, the second interlayer optical switch 460 may be configured such that one or both of the two

fifth ports

462 and 464 selectively optically communicates with one or both of the two

sixth ports

466 and 468.

In some exemplary embodiments, the second interlayer optical switch 460 may further include a third waveguide disposed in the first layer two-dimensional optical network 240 for optically connecting a fifth port 462 disposed in the first layer two-dimensional optical network 240 to a sixth port 466 disposed in the first layer two-dimensional optical network 240. The second interlayer optical switch 460 may further include a fourth waveguide disposed in the second layer two-dimensional optical network 250 for optically connecting the fifth port 464 disposed in the second layer two-dimensional optical network 250 to the sixth port 468 disposed in the second layer two-dimensional optical network 250.

Illustratively, the second interlayer optical switch 460 further includes a third optical coupler 461, a fourth optical coupler 463, and a phase shifter 465. A third optical coupler 461 may be arranged at one end of the third waveguide and the fourth waveguide for coupling optical power between the third waveguide and the fourth waveguide. A fourth optical coupler 463 may be disposed at the other ends of the third and fourth waveguides for coupling optical power between the third and fourth waveguides. A phase shifter 465 may be disposed on the third and fourth waveguides between the third and fourth

optical couplers

461 and 463 for changing phases of optical signals transmitted in the third and fourth waveguides.

In some exemplary embodiments, each of the first optical coupler 211, the second optical coupler 213, the third optical coupler 461, and the fourth optical coupler 463 may be a multi-mode interferometer (MMI) or a directional coupler.

In some exemplary embodiments, the optical signal may be input by any one of the second port 222 of the two-dimensional optical switch 220 or the second port 232 of the two-dimensional optical switch 230 in the three-dimensional optical switch 400. Illustratively, an optical signal is input by the second port 222 and delivered to the first port 226 via a two-dimensional optical switch 240 arranged in a first layer two-dimensional optical network 240. Since the first port 226 is optically connected with the fifth port 462 of the second interlayer optical switch 460, an optical signal can be transmitted to the fifth port 462. Next, the second interlayer optical switch 460 may deliver the optical signal to one or both of the

sixth ports

466 and 468. Optionally, the optical signal may be delivered to the sixth port 468, thereby enabling inter-layer delivery of the optical signal input to the second port 222 of the two-dimensional optical switch unit 220 in the first-layer two-dimensional optical network 240 to the second-layer two-dimensional optical network 250. Similarly, an optical signal input to the second port 232 of the two-dimensional optical switch 230 in the second-layer two-dimensional optical network 250 may also be delivered to the first-layer two-dimensional optical network 240 by layers.

In summary, the three-dimensional optical switch 400 realizes transmission of optical signals input from any port in and between layers by arranging the second interlayer optical switch 460, thereby further perfecting optical power distribution and controllable switching of the three-dimensional optical switch 400 for optical signals in and between layers perpendicular to a plane.

Fig. 5 is a schematic view of the structure of a three-dimensional optical network 500 according to an exemplary embodiment of the present disclosure. As shown in fig. 5, the three-dimensional optical network 500 includes at least two layers of two-dimensional optical networks, such as two-dimensional

optical networks

510, 520, and 530. The three-dimensional optical network 500 further comprises at least one three-dimensional optical switch 570. The three-dimensional optical switch 570 may be an embodiment of a three-dimensional optical switch as shown in fig. 2, 3, or 4 or described in this disclosure. The three-dimensional optical switch 570 is configured to selectively optically communicate a first one of the at least two-layer two-dimensional

optical networks

510, 520, and 530, such as the two-dimensional optical network 510, with a second one of the at least two-layer two-dimensional optical networks, different from the first one, such as the two-dimensional optical network 520.

In some demonstrative embodiments, at least two layers of two-dimensional

optical networks

510, 520 and 530 in three-dimensional optical network 500 may be disposed in at least two

dielectric layers

540, 550 and 560, respectively. In other words, at least two-dimensional

optical networks

510, 520, and 530 may be formed in

dielectric layers

540, 550, and 560, respectively, of different materials.

It will be appreciated that the number of at least two-dimensional optical network layers and at least two media layers shown in fig. 5 is exemplary, and in other embodiments, the three-dimensional optical network 500 may include more or fewer two-dimensional optical network layers and media layers.

Illustratively, each of the at least two

dielectric layers

540, 550, and 560 may include one selected from the group consisting of: the device comprises a silicon-on-insulator active layer, a silicon nitride optical network layer, a lithium niobate modulation layer and an indium phosphide active layer.

In summary, the three-dimensional optical network 500 includes at least one three-dimensional optical switch 570. Due to the technical features of the three-dimensional optical switch 570 for controlling optical path transmission, the three-dimensional optical network 500 can implement optical signal transmission in each layer and optical signal transmission between layers through the three-dimensional optical switch 570, thereby implementing the architecture of the three-dimensional optical network 500 with controllable power of multilayer optical signals. Further, since the dielectric layers made of different semiconductor materials have respective advantages and application limitations, the heterogeneous structural characteristics of the multi-material dielectric layer system improve the performance of the three-dimensional optical network 500, and also provide more functions and application possibilities.

In some example embodiments, each of the at least two layers of the two-dimensional optical network may be a lattice-type optical network or a cellular-type optical network. Illustratively, the lattice optical network may be a two-dimensional

optical network

510, 520, or 530 in a three-dimensional optical network 500.

Fig. 6A is a schematic view of the structure of a cellular-type three-dimensional optical network 600A according to an example embodiment of the present disclosure. As shown in fig. 6A, each of the at least two layers of the two-dimensional optical network in the cellular three-dimensional optical network 600A may be a cellular two-dimensional optical network 100C as in fig. 1C. Illustratively, the configuration of the at least one three-dimensional optical switch 670 of the cellular three-dimensional optical network 600A may be perpendicular to a corresponding plane in which the at least two layers of two-dimensional optical networks reside.

Fig. 6B is a schematic view of the structure of a cellular three-dimensional optical network 600B according to another exemplary embodiment of the present disclosure. As shown in fig. 6, the configuration of the at least one three-dimensional optical switch 670' in the cellular three-dimensional optical network 600B may not be perpendicular to the corresponding plane in which the at least two layers of two-dimensional optical networks are located.

Fig. 7A-7B are schematic views of a structure of a three-dimensional optical network 500 formed by the three-dimensional optical switch shown in fig. 3 according to an embodiment of the present disclosure. Fig. 7A shows a schematic view of the structure of a first layer two-dimensional optical network 700A of at least two layers of two-dimensional optical networks in a three-dimensional optical network 500. Accordingly, fig. 7B shows a schematic view of the structure of a second-layer two-dimensional optical network 700B of the at least two-layer two-dimensional optical network in the three-dimensional optical network 500. It should be understood that fig. 7A and 7B illustrate

different layers

700A and 700B in the same three-dimensional optical network 500 and that the two layers are in optical communication via at least one three-dimensional optical switch.

As shown in fig. 7A and 7B, each of the at least two layers of the two-dimensional optical network 500 comprises a lattice-type optical network. The lattice type optical network of each layer of the two-dimensional optical network comprises a plurality of grids which are distributed along the two-dimensional direction of the layer of the two-dimensional optical network and are adjacent to each other. For ease of description, for each square in fig. 7A and 7B, the top, left, bottom, and right edges are referred to in a counterclockwise order as a first edge, a second edge, a third edge, and a fourth edge, respectively.

In the example of fig. 7A and 7B, the first three-dimensional optical switch 740 is disposed on the first edge of a first square of the plurality of squares of the first layer of the two-dimensional optical network 700A (which includes the port 742 and the port 744), the third edge of one square of the plurality of squares of the first layer of the two-dimensional optical network 700A that is adjacent to the first edge of the first square (which includes the port 746 and the port 748), the first edge of a second square of the plurality of squares of the second layer of the two-dimensional optical network 700B (which includes the port 746 'and the port 748'), and the third edge of one square of the plurality of squares of the second layer of the two-dimensional optical network 700B that is adjacent to the first edge of the second square (which includes the port 742 'and the port 744').

The second three-dimensional optical switch 750 is disposed on the second side of the first square, the fourth side of one of the squares of the first layer of the two-dimensional optical network 700A that is adjacent to the second side of the first square, the second side of the second square, and the fourth side of one of the squares of the second layer of the two-dimensional optical network 700B that is adjacent to the second side of the second square.

The third three-dimensional optical switch 760 is disposed on the third side of the first square, the first side of a square adjacent to the third side of the first square among the squares of the first layer of the two-dimensional optical network 700A, the third side of the second square, and the first side of one square adjacent to the third side of the second square among the squares of the second layer of the two-dimensional optical network 700B.

The fourth three-dimensional optical switch 770 is disposed on the fourth side of the first cell, the second side of a cell adjacent to the fourth side of the first cell among the cells of the first layer two-dimensional optical network 700A, the fourth side of the second cell, and the second side of one cell adjacent to the fourth side of the second cell among the cells of the second layer two-dimensional optical network 700B.

In some exemplary embodiments, each of the three-dimensional

optical switches

740, 750, 760, and 770 may have the illustrative structure 300 of the three-dimensional optical switch 200 shown in fig. 3. Illustratively, the three-dimensional optical switch 740 includes: a first interlayer optical switch unit disposed in the first-layer two-dimensional optical network 700A and the second-layer two-dimensional optical network 700B, a two-dimensional optical switch unit 720 disposed in the first-layer two-dimensional optical network 700A, and a two-dimensional optical switch unit 730 disposed in the second-layer two-dimensional optical network 700B. Further, the first inter-layer optical switch includes a portion 717 disposed in the first-layer two-dimensional optical network 700A and other portions 719 disposed in the second-layer two-dimensional optical network 700B.

In some exemplary embodiments, the first edge of the first layer 700A includes one of the two fourth ports 742 of the first three-dimensional optical switch 740 and one of the two first ports 744 of the first three-dimensional optical switch 740 that are located in the same layer 700A as the fourth port 742.

In some exemplary embodiments, the second side of the first two-dimensional optical network 700A includes one of the two second ports 752 of the second three-dimensional optical switch 750 and one of the two first ports 754 of the second three-dimensional optical switch 750 located in the same layer 700A as the second port 752, and the second port 752 of the second side is optically connected to the fourth port 742 of the first side by a waveguide.

In some exemplary embodiments, the third side of the first layer 700A includes one of the two second ports 762 of the third three-dimensional optical switch 760 and one of the two first ports 764 of the third three-dimensional optical switch 760 located in the same layer 700A as the second port 762, and the second port 762 of the third side is optically connected to the first port 754 of the second side by a waveguide.

In some exemplary embodiments, the fourth side of the first layer two-dimensional optical network 700A includes one fourth port 774 of the two fourth ports of the fourth three-dimensional optical switch 770 and one first port 772 of the two first ports of the fourth three-dimensional optical switch 770 located in the same layer 700A as the fourth port 774, the fourth port 774 of the fourth side is optically connected to the first port 744 of the first side by a waveguide, and the first port 772 of the fourth side is optically connected to the first port 764 of the third side by a waveguide.

Illustratively, the ports of the first 740, second 750, third 760 and fourth 770 three-dimensional optical switches that are located in the first layer 700A of the two-dimensional optical network are arranged on respective sides of the second layer 700B of the three-dimensional optical network. The three-dimensional optical switches on each side of the second-layer three-dimensional optical network 700B are arranged as described above with reference to fig. 2 and 3, and are not described again here.

As an example, the three-dimensional optical switch 740 may be a three-dimensional optical switch as shown in fig. 2. The port 742 of the three-dimensional optical switch 740 in the first layer two-dimensional optical network 700A may represent the port 212, the port 744 may represent the port 226, the port 746 may represent the port 222, and the port 748 may represent the port 228. Accordingly, port 742 'of the three-dimensional optical switch 740 in the second-tier two-dimensional optical network 700B may represent port 214, port 744' may represent port 236, port 746 'may represent port 232, and port 748' may represent port 238. Illustratively, the three-dimensional

optical switches

750, 760, and 770 may be arranged in a similar manner, respectively, and will not be described in detail herein.

It should be understood that the configuration of the three-dimensional optical switch in the three-dimensional optical network in the present application is not limited to the connection manner shown in fig. 7A and 7B. Embodiments are also possible in which the three-dimensional optical network is formed by other means of connection.

In summary, each layer of the lattice-type two-dimensional optical network layer in the three-dimensional optical network 500 may arrange the three-dimensional optical switches as described in fig. 2 and 3 through the structures as described in fig. 7A and 7B, so that optical signals can be optically communicated not only within the layer but also between the layers of other lattice-type two-dimensional optical networks, thereby implementing a multi-layer optical path controllable architecture of the lattice-type three-dimensional optical network.

FIG. 8 is a schematic diagram of a three-dimensional optical chip 800 according to an example embodiment of the present disclosure. As shown in fig. 8, the three-dimensional optical chip 800 (e.g., a three-dimensional programmable chip) may include one of the embodiments of the three-dimensional optical network shown in fig. 5 to 7 or described in this disclosure, which will not be described herein again.

The three-dimensional optical chip 800 may also include a plurality of input/output ports 820. The plurality of input/output ports 820 are connected to the three-dimensional optical network such that the optical signal 810 can enter or exit the three-dimensional optical network through the plurality of input/output ports 820.

It will be understood that the number of input/output ports 820 shown in fig. 8 is exemplary, and in other embodiments, the three-dimensional optical chip 800 may include more or fewer input/output ports 820.

To sum up, the three-dimensional optical chip 800 includes the structure of the three-dimensional optical network as described in the embodiments of the present disclosure, and since the embodiments of the three-dimensional optical network of the present disclosure implement optical power distribution and controllable switching between different waveguide layers/functional layers, the three-dimensional optical chip 800 can implement gating and logic control between multiple functional layers. Further, the heterogeneous multi-material system of the three-dimensional optical network and the three-dimensional optical interconnection characteristics of the multilayer stack provide performance improvement for the three-dimensional optical chip 800, and also provide more functions and application possibilities.

While the disclosure has been illustrated and described in detail in the drawings and foregoing description, such illustration and description are to be considered illustrative and exemplary and not restrictive; the present disclosure is not limited to the disclosed embodiments. Variations to the disclosed embodiments can be understood and effected by those skilled in the art in practicing the claimed subject matter, from a study of the drawings, the disclosure, and the appended claims. In the claims, the word "comprising" does not exclude other elements or steps not listed, the indefinite article "a" or "an" does not exclude a plurality, and the term "a plurality" means two or more. The mere fact that certain measures are recited in mutually different dependent claims does not indicate that a combination of these measures cannot be used to advantage.

Aspect 1a three-dimensional optical switch, comprising:

two-dimensional optical switch units, each comprising two corresponding first ports and two corresponding second ports, the two-dimensional optical switch units being arranged in a first-layer two-dimensional optical network and a second-layer two-dimensional optical network, respectively; and

a first inter-layer optical switch unit including two third ports and two fourth ports, one of the two third ports being arranged in the first layer two-dimensional optical network and optically connected with one of the two second ports of the two-dimensional optical switch unit in the first layer two-dimensional optical network, the other of the two third ports being arranged in the second layer two-dimensional optical network and optically connected with one of the two second ports of the two-dimensional optical switch unit in the second layer two-dimensional optical network, the two fourth ports being arranged in the first layer two-dimensional optical network and the second layer two-dimensional optical network, respectively,

wherein each two-dimensional optical switch unit is configured such that one or both of the respective two first ports selectively optically communicates with one or both of the respective two second ports, and

wherein the first interlayer optical switch is configured such that one or both of the two third ports selectively optically communicates with one or both of the two fourth ports.

Aspect 2 the three-dimensional optical switch of aspect 1, wherein the first interlayer optical switch further comprises:

a first waveguide disposed in the first layer two-dimensional optical network for optically connecting a fourth port disposed in the first layer two-dimensional optical network to a third port disposed in the first layer two-dimensional optical network;

a second waveguide arranged in the second-layer two-dimensional optical network for optically connecting a fourth port arranged in the second-layer two-dimensional optical network to a third port arranged in the second-layer two-dimensional optical network;

a first optical coupler disposed at one end of the first and second waveguides for coupling optical power between the first and second waveguides;

a second optical coupler arranged at the other ends of the first and second waveguides for coupling optical power between the first and second waveguides; and

and a phase shifter disposed on the first and second waveguides between the first and second optical couplers for changing a phase of the optical signal transmitted in the first and second waveguides.

Aspect 3 the three-dimensional optical switch of aspect 1 or 2, further comprising:

a second inter-layer optical switch including two fifth ports and two sixth ports, one of the two fifth ports being arranged in the first layer two-dimensional optical network and optically connected with one of the two first ports of the two-dimensional optical switch unit in the first layer two-dimensional optical network, the other of the two fifth ports being arranged in the second layer two-dimensional optical network and optically connected with one of the two first ports of the two-dimensional optical switch unit in the second layer two-dimensional optical network, the two sixth ports being arranged in the first layer two-dimensional optical network and the second layer two-dimensional optical network, respectively,

wherein the second interlayer optical switch is configured such that one or both of the two fifth ports selectively optically communicate with one or both of the two sixth ports.

Aspect 4 the three-dimensional optical switch of aspect 3, wherein the second interlayer optical switch further comprises:

a third waveguide disposed in the first layer two-dimensional optical network for optically connecting a fifth port disposed in the first layer two-dimensional optical network to a sixth port disposed in the first layer two-dimensional optical network;

a fourth waveguide arranged in the second-layer two-dimensional optical network for optically connecting a fifth port arranged in the second-layer two-dimensional optical network to a sixth port arranged in the second-layer two-dimensional optical network;

a third optical coupler arranged at one end of the third and fourth waveguides for coupling optical power between the third and fourth waveguides;

a fourth optical coupler arranged at the other ends of the third and fourth waveguides for coupling optical power between the third and fourth waveguides; and

and a phase shifter disposed on the third and fourth waveguides between the third and fourth optical couplers for changing a phase of the optical signal transmitted in the third and fourth waveguides.

Aspect 5 the three-dimensional optical switch of aspect 4, wherein each of the first, second, third and fourth optical couplers includes one selected from the group consisting of: multimode interferors and directional couplers.

Aspect 6. a three-dimensional optical network, comprising:

at least two layers of two-dimensional optical networks; and

at least one three-dimensional optical switch, each three-dimensional optical switch comprising a three-dimensional optical switch according to any of aspects 1 to 5,

wherein each three-dimensional optical switch is configured to cause a first one of the at least two-layer two-dimensional optical networks to selectively optically communicate with a second one of the at least two-layer two-dimensional optical networks that is different from the first one.

Aspect 7 the three-dimensional optical network of aspect 6, wherein the at least two layers of two-dimensional optical networks each comprise at least one selected from the group consisting of: a lattice-type optical network and a cellular-type optical network.

Aspect 8 the three-dimensional optical network of aspect 7, wherein the at least two layers of two-dimensional optical networks each comprise a lattice optical network, the lattice optical network of each layer of two-dimensional optical network comprising a plurality of squares distributed along the two-dimensional direction of the layer of two-dimensional optical network and adjacent to each other, wherein,

a first three-dimensional optical switch of the at least one three-dimensional optical switch is arranged on a first side of a first square of the plurality of squares of the first layer of two-dimensional optical network, a third side of one square of the plurality of squares of the first layer of two-dimensional optical network that is adjacent to the first side of the first square, a first side of a second square of the plurality of squares of the second layer of two-dimensional optical network, and a third side of one square of the plurality of squares of the second layer of two-dimensional optical network that is adjacent to the first side of the second square,

a second three-dimensional optical switch of the at least one three-dimensional optical switch is disposed on a second side of the first square, a fourth side of one of the plurality of squares of the first layer of two-dimensional optical network that is adjacent to the second side of the first square, a second side of the second square, and a fourth side of one of the plurality of squares of the second layer of two-dimensional optical network that is adjacent to the second side of the second square,

a third three-dimensional optical switch of the at least one three-dimensional optical switch is disposed on a third side of the first square, a first side of one of the plurality of squares of the first layer of two-dimensional optical network that is adjacent to the third side of the first square, a third side of the second square, and a first side of one of the plurality of squares of the second layer of two-dimensional optical network that is adjacent to the third side of the second square,

a fourth three-dimensional optical switch of the at least one three-dimensional optical switch is disposed on a fourth side of the first square, a second side of one of the plurality of squares of the first layer of two-dimensional optical network that is adjacent to the fourth side of the first square, a fourth side of the second square, and a second side of one of the plurality of squares of the second layer of two-dimensional optical network that is adjacent to the fourth side of the second square.

Aspect 9 the three-dimensional optical network of aspect 8, wherein each of the at least one three-dimensional optical switch is the three-dimensional optical switch described in any one of aspects 1 to 2,

wherein a first edge of the first layer two-dimensional optical network includes one of two fourth ports of the first three-dimensional optical switch and one of two first ports of the first three-dimensional optical switch located at the same layer as the fourth port,

wherein a second side of the first layer two-dimensional optical network comprises one of two second ports of the second three-dimensional optical switch and one of two first ports of the second three-dimensional optical switch located at the same layer as the second port, the second port of the second side and the fourth port of the first side are optically connected by a waveguide,

wherein a third side of the first layer two-dimensional optical network includes one of the two second ports of the third three-dimensional optical switch and one of the two first ports of the third three-dimensional optical switch located at the same layer as the second port, and the second port of the third side is optically connected to the first port of the second side by a waveguide,

wherein the fourth side of the first layer of the two-dimensional optical network includes one of two fourth ports of the fourth three-dimensional optical switch and one of two first ports of the fourth three-dimensional optical switch located in the same layer as the fourth port, the fourth port of the fourth side is optically connected to the first port of the first side through a waveguide, and the first port of the fourth side is optically connected to the first port of the third side through a waveguide.

Aspect 10 the three-dimensional optical network of aspect 6, wherein the at least two-dimensional optical networks are respectively disposed in at least two dielectric layers.

The three-dimensional optical network of aspect 10, wherein each of the at least two dielectric layers comprises one selected from the group consisting of:

the device comprises a silicon-on-insulator active layer, a silicon nitride optical network layer, a lithium niobate modulation layer and an indium phosphide active layer.

Aspect 12 is a three-dimensional optical chip, comprising:

the three-dimensional optical network of any one of aspects 6 to 11; and

a plurality of input/output ports optically connected to the three-dimensional optical network to enable optical signals to enter or exit the three-dimensional optical network through the plurality of input/output ports.

Claims

1. A three-dimensional optical switch, comprising:

wherein the first interlayer optical switch unit is configured such that one or both of the two third ports selectively optically communicates with one or both of the two fourth ports.

2. The three dimensional optical switch of claim 1, wherein the first interlayer optical switch further comprises:

3. The three-dimensional optical switch of claim 1 or 2, further comprising:

4. The three dimensional optical switch of claim 3, wherein the second interlayer optical switch further comprises:

a third waveguide arranged in the first layer two-dimensional optical network for optically connecting a fifth port arranged in the first layer two-dimensional optical network to a sixth port arranged in the first layer two-dimensional optical network;

a fourth optical coupler disposed at the other ends of the third and fourth waveguides for coupling optical power between the third and fourth waveguides; and

5. A three-dimensional optical network comprising:

at least two layers of two-dimensional optical networks; and

at least one three-dimensional optical switch, each three-dimensional optical switch comprising the three-dimensional optical switch of any one of claims 1 to 4,

6. The three-dimensional optical network of claim 5 wherein the at least two-layer two-dimensional optical networks each comprise at least one selected from the group consisting of: a lattice-type optical network and a cellular-type optical network.

7. The three-dimensional optical network of claim 6 wherein the at least two layers of two-dimensional optical networks each comprise a lattice optical network, the lattice optical network of each layer of two-dimensional optical networks comprising a plurality of squares distributed along a two-dimensional direction of the layer of two-dimensional optical networks and adjacent to each other, wherein,

8. The three-dimensional optical network of claim 7 wherein each of the at least one three-dimensional optical switch is a three-dimensional optical switch as described in any one of claims 1 to 2,

wherein a third side of the first layer two-dimensional optical network includes one of two second ports of the third three-dimensional optical switch and one of two first ports of the third three-dimensional optical switch located at the same layer as the second port, the second port of the third side is optically connected to the first port of the second side by a waveguide, and

9. The three-dimensional optical network of claim 5, wherein the at least two-dimensional optical networks are disposed in at least two dielectric layers, respectively.

10. A three-dimensional optical chip, comprising:

the three-dimensional optical network of any of claims 5 to 9; and