CN114859607A - Superlens, manufacturing method thereof and display device - Google Patents
Superlens, manufacturing method thereof and display device Download PDFInfo
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- CN114859607A CN114859607A CN202210442747.7A CN202210442747A CN114859607A CN 114859607 A CN114859607 A CN 114859607A CN 202210442747 A CN202210442747 A CN 202210442747A CN 114859607 A CN114859607 A CN 114859607A
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- 238000004519 manufacturing process Methods 0.000 title claims abstract description 27
- 239000000758 substrate Substances 0.000 claims abstract description 182
- 239000004973 liquid crystal related substance Substances 0.000 claims abstract description 71
- 238000000034 method Methods 0.000 claims description 21
- 238000002955 isolation Methods 0.000 claims description 15
- 239000000463 material Substances 0.000 claims description 13
- GWEVSGVZZGPLCZ-UHFFFAOYSA-N Titan oxide Chemical compound O=[Ti]=O GWEVSGVZZGPLCZ-UHFFFAOYSA-N 0.000 claims description 9
- 229910002601 GaN Inorganic materials 0.000 claims description 5
- JMASRVWKEDWRBT-UHFFFAOYSA-N Gallium nitride Chemical compound [Ga]#N JMASRVWKEDWRBT-UHFFFAOYSA-N 0.000 claims description 5
- 229910052581 Si3N4 Inorganic materials 0.000 claims description 5
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 claims description 5
- OGIDPMRJRNCKJF-UHFFFAOYSA-N titanium oxide Inorganic materials [Ti]=O OGIDPMRJRNCKJF-UHFFFAOYSA-N 0.000 claims description 5
- 238000005530 etching Methods 0.000 claims description 4
- 125000006850 spacer group Chemical group 0.000 claims description 4
- 229920002678 cellulose Polymers 0.000 abstract description 31
- 239000001913 cellulose Substances 0.000 abstract description 31
- 239000002245 particle Substances 0.000 abstract description 31
- 238000005362 photophoresis Methods 0.000 abstract description 5
- 239000012945 sealing adhesive Substances 0.000 description 17
- 230000033228 biological regulation Effects 0.000 description 12
- 238000010586 diagram Methods 0.000 description 11
- 230000033001 locomotion Effects 0.000 description 10
- 230000009286 beneficial effect Effects 0.000 description 9
- 230000000694 effects Effects 0.000 description 7
- 230000008859 change Effects 0.000 description 6
- 210000004027 cell Anatomy 0.000 description 5
- 238000002834 transmittance Methods 0.000 description 5
- 239000008393 encapsulating agent Substances 0.000 description 4
- 210000002858 crystal cell Anatomy 0.000 description 3
- 238000005516 engineering process Methods 0.000 description 3
- 230000002349 favourable effect Effects 0.000 description 3
- 239000011521 glass Substances 0.000 description 3
- 230000003287 optical effect Effects 0.000 description 3
- 230000008569 process Effects 0.000 description 3
- KRHYYFGTRYWZRS-UHFFFAOYSA-N Fluorane Chemical compound F KRHYYFGTRYWZRS-UHFFFAOYSA-N 0.000 description 2
- 230000005540 biological transmission Effects 0.000 description 2
- 238000006073 displacement reaction Methods 0.000 description 2
- 239000003292 glue Substances 0.000 description 2
- 238000003384 imaging method Methods 0.000 description 2
- AMGQUBHHOARCQH-UHFFFAOYSA-N indium;oxotin Chemical compound [In].[Sn]=O AMGQUBHHOARCQH-UHFFFAOYSA-N 0.000 description 2
- 238000005339 levitation Methods 0.000 description 2
- 229920001721 polyimide Polymers 0.000 description 2
- 230000001105 regulatory effect Effects 0.000 description 2
- 238000007789 sealing Methods 0.000 description 2
- 238000004528 spin coating Methods 0.000 description 2
- 238000004544 sputter deposition Methods 0.000 description 2
- 239000004408 titanium dioxide Substances 0.000 description 2
- 230000000007 visual effect Effects 0.000 description 2
- 239000004642 Polyimide Substances 0.000 description 1
- 230000004075 alteration Effects 0.000 description 1
- 238000000149 argon plasma sintering Methods 0.000 description 1
- 238000000231 atomic layer deposition Methods 0.000 description 1
- 238000004364 calculation method Methods 0.000 description 1
- 239000003086 colorant Substances 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 230000003247 decreasing effect Effects 0.000 description 1
- 238000001962 electrophoresis Methods 0.000 description 1
- 238000005538 encapsulation Methods 0.000 description 1
- 239000012530 fluid Substances 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 230000006698 induction Effects 0.000 description 1
- 230000010354 integration Effects 0.000 description 1
- 230000007246 mechanism Effects 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000001151 other effect Effects 0.000 description 1
- 229920002120 photoresistant polymer Polymers 0.000 description 1
- 230000000191 radiation effect Effects 0.000 description 1
- 238000010008 shearing Methods 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
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Classifications
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- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
- G02F1/1333—Constructional arrangements; Manufacturing methods
- G02F1/1339—Gaskets; Spacers; Sealing of cells
- G02F1/13394—Gaskets; Spacers; Sealing of cells spacers regularly patterned on the cell subtrate, e.g. walls, pillars
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B3/00—Simple or compound lenses
- G02B3/12—Fluid-filled or evacuated lenses
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
- G02F1/1333—Constructional arrangements; Manufacturing methods
- G02F1/1339—Gaskets; Spacers; Sealing of cells
- G02F1/13396—Spacers having different sizes
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
- G02F1/1333—Constructional arrangements; Manufacturing methods
- G02F1/1339—Gaskets; Spacers; Sealing of cells
- G02F1/13398—Spacer materials; Spacer properties
Abstract
The invention provides a superlens, a manufacturing method thereof and a display device. The superlens includes: a first substrate; a first electrode layer disposed at one side of the first substrate; the dielectric columns are arranged on one side, far away from the first substrate, of the first electrode layer at intervals, and the width of each dielectric column is gradually reduced in the extending direction from the center of the first substrate to the edge of the first substrate; the second electrode layer is arranged on one side, far away from the first substrate, of the dielectric column; the first liquid crystal is positioned on one side of the first electrode layer, which is far away from the first substrate, and is filled in gaps among the plurality of dielectric columns; and the second substrate is arranged on one side of the second electrode layer, which is far away from the first substrate. Therefore, the super lens can regulate and control the dynamic beam, can realize focusing, can capture cellulose particles by combining with the photophoresis force, and can realize space display by combining with a laser control system.
Description
Technical Field
The invention relates to the technical field of display, in particular to a superlens, a manufacturing method thereof and a display device.
Background
Free space volume display, or creating luminescent image dots in space, these display techniques can be imaged in thin air and are visible at any angle without clipping. Due to the edge limitation, the "shearing phenomenon" (the phenomenon that the human eye cannot observe a complete image at all angles because the human eye observes the displayed images at different angles can be different), which means that the human eye cannot observe the complete image at all angles, limits the application of all 3D display technologies for modulating light on a two-dimensional surface, such as holographic display, nanophotonic array, plasma display, and the like. Although the current optical electrophoretic display can achieve the effect of true three-dimensional display, the volume of the whole device is relatively large. Therefore, there is a need to improve the conventional display technology to further reduce the volume of the device and achieve integration and miniaturization of the device on the basis of realizing spatial volume display of the device.
Disclosure of Invention
The present invention is based on the discovery and recognition by the inventors of the following facts and problems:
the american optical society group of display technologies defines "volumetric display" as the image point of a volumetric display being co-located with a light scattering (or absorbing and generating) surface. Currently, only induction plasma display, improved air display and acoustic levitation display are successfully realized in space, but plasma display cannot show RGB colors; the mechanisms for improving air display and acoustic levitation display are too crude to compete with holographic display. The current optical electrophoresis body display can realize the effect of true three-dimensional display, but the volume of the whole device is relatively large. The inventor finds that the liquid crystal and the medium column can be utilized to form a super-surface structure to realize dynamic beam regulation and focusing functions, and cellulose particles are captured by combining with the photophoretic force to realize spatial display.
To solve at least one of the technical problems in the related art to some extent, in one aspect of the present invention, the present invention provides a superlens, including: a first substrate; a first electrode layer disposed at one side of the first substrate; the dielectric pillars are arranged on one side, far away from the first substrate, of the first electrode layer at intervals, and the width of each dielectric pillar is gradually reduced in the extending direction from the center of the first substrate to the edge of the first substrate; the second electrode layer is arranged on one side, far away from the first substrate, of the dielectric column; the first liquid crystal is positioned on one side of the first electrode layer, which is far away from the first substrate, and is filled in gaps among the dielectric columns; the second substrate is arranged on one side, far away from the first substrate, of the second electrode layer. Therefore, the super lens can regulate and control the dynamic beam, can realize focusing, can capture cellulose particles by combining with the photophoresis force, and can realize space display by combining with a laser control system.
According to an embodiment of the invention, the superlens further comprises: a first alignment film disposed between the first liquid crystal and the second electrode layer. Therefore, the arrangement of the first alignment film is beneficial to improving the performance of the super lens.
According to an embodiment of the invention, the superlens further comprises: a third electrode layer provided between the second electrode layer and the first liquid crystal; a second liquid crystal located between the second electrode layer and the third electrode layer. Therefore, the regulation and the focusing of the super lens on the light beam can be better realized, and the space display is more favorably realized.
According to an embodiment of the invention, the superlens further comprises: a second alignment film disposed between the first liquid crystal and the third electrode layer. Therefore, the arrangement of the second alignment film can enable the super lens to have better overall stability.
According to an embodiment of the present invention, the superlens further includes a plurality of isolation pillars disposed at intervals, and the isolation pillars are disposed between the second electrode layer and the third electrode layer. Therefore, the isolation column can play a good supporting role, and the second liquid crystal can have better stability.
According to an embodiment of the invention, the media column satisfies at least one of the following conditions: the width of the medium column is 50 nm-200 nm; the height of the medium column is 450 nm-800 nm; the material of the dielectric column comprises at least one of silicon nitride, titanium oxide and gallium nitride. This is advantageous in further improving the performance of the superlens.
In another aspect of the present invention, the present invention provides a method of fabricating a superlens, the method of fabricating a superlens according to an embodiment of the present invention including: providing a first substrate, and forming a first electrode layer on one side of the first substrate; forming a plurality of dielectric pillars arranged at intervals on one side of the first electrode layer, which is far away from the first substrate, wherein the width of each dielectric pillar is gradually reduced in the extending direction from the center of the first substrate to the edge of the first substrate; providing a second substrate, and forming a second electrode layer on one side of the second substrate; the first substrate and the second substrate are arranged in a box, so that the first electrode layer is positioned between the first substrate and the second electrode layer, and the second electrode layer is positioned on one side of the second substrate close to the first substrate; and injecting a first liquid crystal between the first electrode layer and the second electrode layer, and filling the first liquid crystal in gaps among the dielectric columns. Therefore, the super lens prepared by the method can well regulate and control dynamic beams, can realize focusing, can capture cellulose particles by combining with a photophoresis force, and further can realize space display by combining the super lens prepared by the method with a laser control system; the method for manufacturing the super lens is beneficial to improving the yield of products.
According to an embodiment of the present invention, before the pair of the first substrate and the second substrate is boxed, the method of fabricating a superlens further includes: and forming a first alignment film on one side of the second electrode layer far away from the second substrate. Thereby, the structural stability of the superlens can be improved by providing the first alignment film.
According to an embodiment of the present invention, the method of fabricating a superlens further comprises: providing a third substrate, and forming a third electrode layer on one side of the third substrate; aligning the third substrate provided with the third electrode layer with the first substrate provided with the dielectric pillars; etching the third substrate to remove the third substrate; aligning the second substrate provided with the second electrode layer with the first substrate provided with the third electrode layer; injecting a second liquid crystal between the second electrode layer and the third electrode layer. Therefore, the second liquid crystal is arranged, and the super lens can better regulate and control the light beam.
According to an embodiment of the present invention, before the pair of the first substrate and the third substrate is loaded, further comprising: and forming a second alignment film on one side of the third electrode layer far away from the third substrate. Therefore, the arrangement of the second alignment film can enable the super lens to have better structural stability.
According to an embodiment of the present invention, before the cell-aligning the second substrate provided with the second electrode layer with the first substrate provided with the third electrode layer, the method of fabricating a superlens further includes: and forming a plurality of isolation columns arranged at intervals on one side of the second electrode layer far away from the second substrate. This can further improve the structural stability of the superlens.
In a further aspect of the present invention, the present invention provides a display device comprising the above-mentioned superlens or the superlens manufactured by the above-mentioned method, whereby the display device has all the features and advantages of the above-mentioned superlens, which will not be described herein again. Overall, the display device is capable of good control and focusing of the light beam.
According to an embodiment of the invention, the display device further comprises a laser control system, which in combination with the superlens, performs synchronization of the real-time position information and the laser information. Thus, the display device can realize spatial display.
Drawings
FIG. 1 shows a schematic structural diagram of a superlens according to an embodiment of the present invention;
FIG. 2 shows a schematic structural diagram of a superlens according to another embodiment of the present invention;
FIG. 3 shows a schematic structural diagram of a superlens according to yet another embodiment of the present invention;
FIG. 4 illustrates a schematic structural diagram of a superlens according to yet another embodiment of the present invention;
FIG. 5 shows a schematic structural diagram of a superlens according to yet another embodiment of the present invention;
FIG. 6 shows a schematic structural diagram of a superlens according to yet another embodiment of the present invention;
FIG. 7 shows a cross-sectional view of a superlens along BB' in accordance with one embodiment of the present invention;
FIG. 8 is a graph showing phase as a function of media column diameter in one embodiment of the present invention;
FIG. 9 is a graph showing the variation of light transmittance with the diameter of a dielectric rod in an embodiment of the present invention;
FIG. 10 shows a graph of phase as a function of refractive index in one embodiment of the invention;
FIG. 11 is a schematic diagram showing the wavefront of a beam of light after passing through a superlens in accordance with embodiments of the present invention;
FIG. 12 shows a flowchart of a method of fabricating a superlens according to one embodiment of the present invention;
FIG. 13 is a flow chart of a method of fabricating a superlens according to another embodiment of the present invention;
FIG. 14 is a flow chart of a method of fabricating a superlens according to yet another embodiment of the present invention;
FIG. 15 is a flow chart of a method of fabricating a superlens according to yet another embodiment of the present invention;
FIG. 16 is a flow chart of a method of fabricating a superlens according to yet another embodiment of the present invention;
FIG. 17 is a flow chart of a method of fabricating a superlens according to yet another embodiment of the present invention;
FIG. 18 shows a schematic of cellulose particle capture and dynamic pattern display;
FIG. 19 shows a schematic beam deflection diagram;
fig. 20 shows a schematic of the focal length as the wavefront moves.
Description of reference numerals:
100: a first substrate; 200: a first electrode layer; 300: a media column; 400: a second electrode layer; 500: a first liquid crystal; 600: a second substrate; 700: a third electrode layer; 800: a second liquid crystal; 900: an isolation column; 10: a first alignment film; 20: a second alignment film; 30: first frame sealing glue; 40: second frame sealing glue; 50: a third substrate; 60: an incident beam; 70: cellulose particles; 80: a pattern; 90: the human eye.
Detailed Description
The following describes embodiments of the present invention in detail. The following examples are illustrative only and are not to be construed as limiting the invention. The examples, where specific techniques or conditions are not indicated, are to be construed according to the techniques or conditions described in the literature in the art or according to the product specifications.
In one aspect of the present invention, the present invention provides a superlens, according to an embodiment of the present invention, referring to fig. 1 to 6, a superlens 1000 includes a first substrate 100, a first electrode layer 200, a plurality of dielectric pillars 300, a second electrode layer 400, a first liquid crystal 500, and a second substrate 600, wherein the first electrode layer 200 is disposed on one side of the first substrate 100, the plurality of dielectric pillars 300 are disposed at intervals on one side of the first electrode layer 200 away from the first substrate 100, a width W of the dielectric pillars is gradually reduced in an extending direction along a center of the first substrate 100 toward an edge of the first substrate 100 (corresponding to a direction indicated by an arrow in a horizontal direction in fig. 1 to 6), the second electrode layer 400 is disposed on one side of the dielectric pillars 300 away from the first substrate 100, the first liquid crystal 500 is disposed on one side of the first electrode layer 200 away from the first substrate 100 and is filled in a gap between the plurality of dielectric pillars 300, the second substrate 600 is disposed on a side of the second electrode layer 400 away from the first substrate 100. Therefore, the super lens can realize the regulation and control of dynamic beams and the focusing, can realize the function of capturing cellulose particles by combining the photophoresis force, and can realize the space display by combining the super lens with a laser control system.
The principle that the superlens of the present invention can realize the regulation and the focusing of the dynamic beam is explained as follows: in the present invention, the width W of the dielectric rod 300 is gradually decreased in the extending direction from the center of the first substrate 100 to the edge of the first substrate 100, fig. 8 shows a graph of phase variation with the diameter of the dielectric rod, fig. 8 shows the phase of the light beam with fixed wavelength after passing through the dielectric rods with different diameters by taking the dielectric rod as a cylinder as an example, as can be seen from fig. 8, the larger the diameter of the dielectric rod is, the larger the phase of the light beam after passing through the dielectric rod is, the larger the phase delay is, after the light beam (refer to fig. 11) is irradiated onto the superlens 300, the light beam moves slowly due to the larger width of the dielectric rod at the center position, while the smaller the width of the dielectric rod at the edge position, the light beam moves rapidly, and the moving speed of the light beam gradually increases in the extending direction from the center to the edge, so that a light wavefront L1 similar to the parabola shape in fig. 11 can be formed, that the light beam focusing can be realized, the crystal axis direction of the first liquid crystal 500 can be correspondingly adjusted by adjusting the voltage at the two ends of the first liquid crystal 500, so that the refractive index of the first liquid crystal 500 is adjusted, the whole dynamic light beam can be correspondingly adjusted and controlled by the superlens, the wavefront position of the light changes, and the focus of the dynamic light beam after passing through the superlens changes correspondingly. The first liquid crystal and the dielectric column can regulate and control the movement of an incident beam in an x-y plane and can also regulate and control the movement of the incident beam in a z direction (namely, the direction perpendicular to the x-y plane), and it should be noted that the first liquid crystal and the dielectric column cannot regulate and control the movement in the x-y plane and the z direction simultaneously, so that the incident beam can be regulated and controlled in a three-dimensional space through the superlens.
Fig. 9 shows a graph of the change of the transmittance of light with respect to the diameter of the dielectric cylinder in the case where the dielectric cylinder is cylindrical, the material of the dielectric cylinder is titanium dioxide, the height is 600nm, the first liquid crystal is E7 (refractive index is 1.5 to 1.7), and the incident light of the dielectric cylinder is visible light of a fixed wavelength in the case where no voltage is applied (the refractive index of the first liquid crystal is maintained at 1.5), and it can be seen from fig. 9 that the transmittances of light are all higher than 80% when the diameter of the dielectric cylinder is set in the range of 50nm to 200 nm.
Fig. 10 shows a cylindrical dielectric column, the material of the dielectric column is titanium dioxide, the height is 600nm, the diameter is 150nm, the thickness of the liquid crystal cell is 2.7 micrometers, and a graph of the phase change after light transmission along with the refractive index change of the liquid crystal (the phase change after light transmission along with the refractive index change of the liquid crystal from 1.5 to 1.7), it should be noted that, in fig. 10, no phase is rounded (that is, the vertical coordinate is not adjusted in combination with the motion law that the period of light wave is 2 pi), as can be seen from fig. 10, the refractive index of the liquid crystal can be changed by adjusting the voltage of the liquid crystal, and the phase of the light beam transmitting through the superlens can be changed in the range of 0 to 360 degrees (corresponding to 0 to 2 pi radians), so that the wavefront of any light beam can be adjusted, and light beam focusing or off-axis focusing can also be designed.
According to some embodiments of the present invention, referring to fig. 6, the width W of the dielectric cylinder 300 may be 50nm to 200nm, for example, W may be 50nm, 60nm, 80nm, 100nm, 120nm, 150nm, 180nm, 200nm, etc., and the width of the dielectric cylinder is set in the above range, the dielectric cylinder has good light transmittance, and the regulation of the incident light beam in the three-dimensional space by the superlens may be achieved. The width W of the media column 300 means the dimension of the media column 300 in the direction indicated by the horizontal arrow in fig. 6, and when the media column 300 is cylindrical, the width W of the media column 300 means the diameter of the media column 300, and when the media column 300 is rectangular parallelepiped (the cross section of the media column along BB 'is square), the width W of the media column 300 means the side length of the cross section of the media column along BB'. Fig. 7 is a cross-sectional view taken along line BB' of fig. 1, and it can also be seen from fig. 7 that the width of the dielectric pillars 300 gradually decreases in the direction extending from the center of the first substrate 100 to the edge of the first substrate 100. It should be noted that the cross section of the superlens along BB' may be circular (as shown in fig. 7) or square, as long as the width of the dielectric pillar is gradually reduced in the extending direction from the center of the first substrate to the edge of the first substrate, so that the incident light beam can be modulated and focused in three-dimensional space.
According to an embodiment of the present invention, the material of the dielectric pillar 300 may include at least one of silicon nitride, titanium oxide, and gallium nitride, for example, the dielectric pillar 300 may be formed of one of silicon nitride, titanium oxide, or gallium nitride, and the dielectric pillar 300 may also be formed of two or more of silicon nitride, titanium oxide, and gallium nitride, and all of the above materials have good visible light transmittance, which is beneficial to improving the control effect of the superlens on the incident light beam.
According to some embodiments of the present invention, the first substrate 100 and the second substrate 600 may be made of glass, and the specific type of glass may be selected by a person skilled in the art according to actual needs, as long as the first substrate 100 and the second substrate 600 have certain strength and provide good supporting function.
According to some embodiments of the present invention, the first electrode layer 200 and the second electrode layer 400 may be made of ITO (indium tin oxide), so that the first electrode layer and the second electrode layer have better electrical conductivity, which is more favorable for adjusting the refractive index of the liquid crystal by applying a voltage to the liquid crystal, thereby facilitating the realization of the regulation of the superlens on the incident light beam.
According to some embodiments of the present invention, referring to fig. 2, the superlens 1000 may further include a first alignment film 10, and the first alignment film 10 is disposed between the first liquid crystal 500 and the second electrode layer 400, in these embodiments, the first alignment film 10 may be disposed such that the first liquid crystal 500 is aligned along the grooves of the first alignment film 10 (the grooves of the first alignment film are not shown in fig. 2), so that the first liquid crystal 10 has better stability, thereby facilitating to improve the overall stability of the superlens 1000.
According to other embodiments of the present invention, referring to fig. 3, the superlens 1000 may further include a third electrode layer 700 and a second liquid crystal 800, wherein the third electrode layer 700 is disposed between the second electrode layer 400 and the first liquid crystal 500, and the second liquid crystal 800 is disposed between the second electrode layer 400 and the third electrode layer 700. In this case, the first liquid crystal and the dielectric column can regulate the movement of the incident beam in the x-y plane, and the second liquid crystal can regulate the movement of the incident beam in the z direction (i.e., the direction perpendicular to the x-y plane), so that the incident beam can be more conveniently moved in three-dimensional space.
According to some embodiments of the present invention, the third electrode layer 700 may be made of ITO (indium tin oxide), so that the third electrode layer also has a better conductivity, which facilitates adjusting the refractive index of the liquid crystal, and further facilitates adjusting the movement of the incident light beam in the three-dimensional space by using the super lens.
According to still other embodiments of the present invention, referring to fig. 4 to 6, the superlens 1000 may further include a second alignment film 20, the second alignment film 20 is disposed between the first liquid crystal 500 and the third electrode layer 700, in which case the first liquid crystal 500 may be arranged along the groove of the second alignment film 20 (the groove of the second alignment film is not shown in fig. 4 to 6) so that the first liquid crystal 10 has good stability, and at this time, the first alignment film 10 is disposed between the second electrode layer 400 and the second liquid crystal 800 so that the second liquid crystal 800 may be arranged along the groove of the first alignment film 10 (the groove of the first alignment film is not shown in fig. 4 to 6) so that the second liquid crystal 800 has better stability, thereby further facilitating to improve the overall stability of the superlens 1000.
According to some embodiments of the present invention, the first alignment film 10 and the second alignment film 20 may be made of PI (polyimide), and the polyimide film layer may be rubbed (roughened) to form grooves on the surface thereof, so that the liquid crystal is aligned along the grooves.
According to some embodiments of the present invention, referring to fig. 5 and 6, the superlens 1000 may further include a plurality of spaced-apart pillars 900, wherein the pillars 900 are disposed between the second electrode layer 400 and the third electrode layer 700. Therefore, the isolation column can play a good supporting role, and the super lens has better overall stability. According to some embodiments of the present invention, the isolation pillars 900 may be disposed on a surface of the second electrode layer 400 away from the second substrate 600. According to other embodiments of the present invention, referring to fig. 5 and 6, the spacers 900 may also be disposed on the surface of the first alignment film 10 away from the second substrate 600.
According to some embodiments of the present invention, referring to fig. 6, the superlens 1000 may further include a first frame sealing adhesive 30 and a second frame sealing adhesive 40, wherein the first frame sealing adhesive 30 may be disposed on an edge region of the surface of the second alignment film 20 away from the second substrate 600, the second frame sealing adhesive 40 may be disposed on at least a portion of the surface of the isolation pillar 900 at the edge position, and the first frame sealing adhesive and the second frame sealing adhesive are disposed to better constrain the first liquid crystal and the second liquid crystal, so as to further improve the overall stability of the superlens. The material of the first frame sealing adhesive and the second frame sealing adhesive is not particularly limited in the present invention, and those skilled in the art can select and set the first frame sealing adhesive and the second frame sealing adhesive according to actual needs as long as the first frame sealing adhesive and the second frame sealing adhesive have good adhesion performance. It should be noted that, when the isolation pillar is not disposed, the second frame sealing adhesive 40 may be disposed on the surface of the second electrode layer 400 or the surface of the first alignment film 10 away from the second substrate 600.
According to some embodiments of the present invention, referring to fig. 6, the height H1 of the dielectric pillar 300 may be 450nm to 800nm, for example, H1 may be 450nm, 480nm, 500nm, 530nm, 550nm, 570nm, 600nm, 630nm, 650nm, 670nm, 700nm, 750nm, 780nm, 800nm, etc., thereby facilitating phase adjustment of an incident light beam without significantly increasing the difficulty of manufacturing the dielectric pillar.
According to some embodiments of the present invention, the first liquid crystal may be E7 (refractive index 1.5-1.7). According to some embodiments of the present invention, referring to fig. 6, the height (i.e. the cell thickness of the first liquid crystal) H2 of the first liquid crystal 500 may be 2.7 micrometers to 8 micrometers, for example, may be 2.7 micrometers, 3 micrometers, 3.5 micrometers, 4 micrometers, 4.5 micrometers, 5 micrometers, 5.5 micrometers, 6 micrometers, 6.5 micrometers, 7 micrometers, 7.5 micrometers, 8 micrometers, and so on, thereby being more beneficial to improving the regulation effect of the superlens on the incident light beam and being more beneficial to improving the overall stability of the superlens.
According to some embodiments of the present invention, the second liquid crystal may also be E7 (refractive index of 1.5-1.7). According to some embodiments of the present invention, the height of the second liquid crystal 800 (i.e. the cell thickness of the second liquid crystal) may also be 2.7 to 8 microns, thereby facilitating further improving the regulation effect of the superlens on the incident light beam and further improving the overall stability of the superlens.
In addition, the superlens provided by the invention can realize dynamic modulation of electro-optic, magneto-optic and other effects.
In general, the super lens provided by the invention can realize direction regulation of any wavefront in a dynamic regulation space, integrates the wavefront regulation and the light beam focusing in the same super lens, is beneficial to miniaturization of devices, and can obviously reduce the volume of a display device when the super lens is applied to three-dimensional space display.
In another aspect of the present invention, the present invention provides a method of fabricating a superlens, the method of fabricating a superlens according to an embodiment of the present invention, with reference to fig. 12, including:
s100: a first substrate 100 is provided, and a first electrode layer 200 is formed on one side of the first substrate 100.
In this step, the first substrate 100 is provided, and the first electrode layer 200 is formed on one side of the first substrate 100. According to some embodiments of the present invention, the first electrode layer 200 may be formed on one side surface of the first substrate 100 by a sputtering method, and thus, the first electrode layer may be formed by a well-established process, which is beneficial to improving the yield of products and reducing the manufacturing cost of the superlens.
The materials of the first substrate 100 and the first electrode layer 200 have been described above, and are not described herein again.
S200: a plurality of dielectric pillars 300 are formed at intervals on a side of the first electrode layer 200 away from the first substrate 100.
After the first electrode layer 200 is formed, a plurality of dielectric pillars 300 are formed at intervals on a side of the first electrode layer 200 away from the first substrate 100, wherein the width of the dielectric pillars 300 is gradually reduced in an extending direction from the center of the first substrate 100 to the edge of the first substrate 100.
According to some embodiments of the present invention, the specific steps of forming the plurality of spaced apart dielectric pillars 300 include: forming a whole dielectric layer on the surface of the first electrode layer 200 far from the first substrate 100 by using an atomic layer deposition method, spin-coating a PR (photoresist) on one side of the dielectric layer far from the first substrate, etching to obtain a plurality of dielectric columns 300 arranged at intervals, and removing the residual PR.
The material and size of the dielectric pillars 300 are also described in detail above, and will not be described herein.
S300: a second substrate 600 is provided, and a second electrode layer 400 is formed on one side of the second substrate 600.
In this step, the second substrate 600 is provided, and the second electrode layer 400 is formed on one side of the second substrate 600. The order of step S300 and step S100 is not particularly limited, and the first substrate may be provided first, and the first electrode layer may be formed on one side of the first substrate, or the second substrate may be provided first, and the second electrode layer may be formed on one side of the second substrate, and of course, step S300 and step S100 may be performed simultaneously.
According to some embodiments of the present invention, the second electrode layer 400 may be formed on the surface of the second substrate 600 by a sputtering method, and thus, the second electrode layer may be formed by a well-established process, which is beneficial to improving the yield of products and reducing the manufacturing cost.
The materials of the second substrate 600 and the second electrode layer 400 are also described above, and are not described herein again.
S400: the first substrate 100 and the second substrate 600 are aligned to a cassette.
In this step, the first substrate 100 and the second substrate 600 are aligned such that the first electrode layer 200 is positioned between the first substrate 100 and the second electrode layer 400, and the second electrode layer 400 is positioned on the side of the second substrate 600 near the first substrate 100, as shown in fig. 12.
According to some embodiments of the invention, step S400 may be performed under vacuum conditions.
S500: the first liquid crystal 500 is injected between the first electrode layer 200 and the second electrode layer 400.
In this step, the first liquid crystal 500 is injected between the first electrode layer 200 and the second electrode layer 400, and the first liquid crystal 500 is filled in the gaps between the plurality of dielectric pillars 300.
The super lens manufactured by the method can regulate and control the movement of an incident beam in a three-dimensional space, realize the focusing of the beam, further capture cellulose particles, and realize three-dimensional space display by combining with a laser control system; the method is simple and convenient to operate, is beneficial to improving the yield of products, and does not obviously increase the manufacturing cost.
According to some embodiments of the present invention, referring to fig. 13, before the first substrate 100 and the second substrate 600 are aligned to a cassette, the method of fabricating the superlens may further include: the first alignment film 10 is formed on the second electrode layer 400 on a side away from the second substrate 600. In these embodiments, after the first alignment film 10 is formed, the second substrate 600 provided with the first alignment film 10 is aligned with the first substrate, and after aligning the cells, the first alignment film 10 is disposed between the dielectric pillars 300 and the second electrode layer 400. According to some embodiments of the present invention, the first alignment film 10 may be formed by spin coating, so that the first alignment film is manufactured by a well-established process to further improve the yield of the product, and the arrangement of the first alignment film is favorable for improving the overall stability of the superlens.
According to other embodiments of the present invention, referring to fig. 14, the method of fabricating a superlens further comprises: providing a third substrate 50, and forming a third electrode layer 700 on one side of the third substrate 50; aligning the third substrate 50 provided with the third electrode layer 700 and the first substrate 100 provided with the dielectric pillars 300, and after aligning the cells, etching the third substrate 50 to remove the third substrate 50; the second substrate 600 provided with the second electrode layer 400 and the first substrate 100 provided with the third electrode layer 700 are aligned, and the second liquid crystal 800 is injected between the second electrode layer 400 and the third electrode layer 700. In these embodiments, after the third substrate 50 provided with the third electrode layer 700 and the first substrate 100 provided with the dielectric pillars 300 are aligned, the first liquid crystal is injected between the second electrode layer 400 and the first electrode layer 200, and then the third substrate 50 is etched to remove the third substrate 50. According to an embodiment of the present invention, the third substrate 50 may be made of glass, and after the first substrate 100 and the third substrate 50 are mounted to each other, the third substrate 50 may be etched by hydrofluoric acid to remove the third substrate 50.
According to still further embodiments of the present invention, referring to fig. 15, before the pairing of the first substrate 100 and the third substrate 50 to the cartridge, the method of fabricating a superlens may further include: a second alignment film 20 is formed on a side of the third electrode layer 700 away from the third substrate 50. In these embodiments, after the second alignment film 20 is formed, the third substrate 50 provided with the second alignment film 20 is aligned with the spacer pillars provided with the dielectric pillars 300. The material of the second alignment film 20 has been described above, and is not described herein.
According to still further embodiments of the present invention, referring to fig. 16, before the cell aligning the second substrate 600 provided with the second electrode layer 400 and the first substrate 100 provided with the third electrode layer 700, the method of fabricating a superlens further includes: a plurality of isolation pillars 900 are formed at intervals on a side of the second electrode layer 400 away from the second substrate 600. Therefore, the isolation column can play a good supporting role, and the overall stability of the superlens is improved. According to some embodiments of the present invention, referring to fig. 16, a first alignment film 10 is disposed on a side of the second electrode layer 400 away from the second substrate 600, and a plurality of spaced-apart spacers 900 may be disposed on a side of the first alignment film 10 away from the second substrate 600.
According to still other embodiments of the present invention, referring to fig. 17, before the first substrate 100 provided with the dielectric pillars 300 and the third substrate 50 provided with the third electrode layer 700 are aligned, a first encapsulant 30 may be coated on a side of the third electrode layer 700 away from the third substrate 50, in some embodiments, the first encapsulant 30 may be coated on an edge portion of a side surface of the second alignment film 20 away from the third substrate 50 (as shown in fig. 17), the first encapsulant 30 is used to bond the two portions, and after the first substrate 100 and the third substrate 50 are aligned, the first encapsulant 30 may be cured by ultraviolet light to bond the two portions firmly and achieve encapsulation; before the first substrate 100 provided with the third electrode layer 700 and the second substrate 600 provided with the isolation pillar 900 are aligned, the second frame sealing adhesive 40 may be coated on at least part of the surface of the isolation pillar at the edge portion, the two portions are bonded by the second frame sealing adhesive 40, and after the first substrate 100 and the second substrate 600 are aligned, the second frame sealing adhesive 40 may be subjected to ultraviolet curing, so that the two portions are firmly bonded and packaged. Of course, when the isolation pillar is not disposed, the second frame sealing adhesive 40 may be formed on the edge region of the surface of the second electrode layer 400 or the first dielectric layer 10 away from the second substrate 600.
In general, the superlens manufactured by the method provided by the invention can realize the regulation and the focusing of an incident beam in a three-dimensional space, further realize the function of capturing cellulose particles, and the superlens manufactured by the method is favorable for improving the yield of the superlens.
In a further aspect of the invention, the invention provides a display device comprising a superlens as described above or a superlens made by a method as described above. Thus, the display device has all the features and advantages of the superlens described above, and thus, the description thereof is omitted. In general, the display device can realize three-dimensional space display using a superlens.
Referring to fig. 18 and 19, the display apparatus may further include a laser control system 2000 in addition to the superlens 1000, and the laser control system 2000 may be combined with the superlens 1000 to synchronize the real-time position information and the laser information according to some embodiments of the present invention. Fig. 18 is a schematic diagram showing cellulose particle capturing and dynamic pattern display, in which a super lens 1000 can focus an incident light beam 60 passing through the super lens, and the focal point of the light beam can move in a three-dimensional space, after the light beam is focused and irradiated to the cellulose particles 70, the cellulose particles 70 are heated unevenly, the light beam focuses the cellulose particles 70, which is equivalent to the cellulose particles 70 captured in the space by the light beam, which is called a photophoresis force, when the super lens 1000 controls the focal distance of the light beam to move, the cellulose particles 70 move correspondingly, when the cellulose particles 70 move, a laser beam is irradiated by a laser control system 2000, the laser beam and the light beam focused by the super lens 1000 are deflected to the same position, a pattern to be displayed is edited by the laser control system 2000, pixels corresponding to the pattern are irradiated to the cellulose particles 70 by the laser control system 2000, the pattern information edited by the laser control system 2000 corresponds to the light beam at each position and irradiates onto the cellulose particle 70, then the cellulose particle 70 scatters, the cellulose particle 70 scatters in the whole three-dimensional space, the movement speed of the cellulose particle 70 reaches a certain degree, based on the vision residual (POV) of the human eye 90, the three-dimensional full-color volume imaging can be formed, and the human eye 90 can observe the edited color pattern 80 through each visual angle.
Fig. 19 shows a schematic diagram of beam deflection, and the following formula (1) is used as a calculation formula of beam steering in the present invention:
wherein the content of the first and second substances,
x and y correspond to the coordinates of the plane in which the surface of the superlens of FIG. 19 lies, and x 'and y' correspond to the coordinates of the plane in which the dynamically adjustable focal point of FIG. 19 lies, representing the amount of displacement of the focal point in the x direction and the amount of displacement in the y direction relative to a (0,0) point on that plane, λ i Which is representative of the wavelength of the light,
for the phase, when the wavelength of the incident beam is fixed, the value of r' can be obtained through the coordinate of the focus, the focal length f is a set value, the coordinate of the focus on the plane where the super lens is located can also be set, r can also be obtained correspondingly, and then the phase can be obtained
The value of (2) can make the light beam focus on the set position by adjusting the voltage of each electrode layer of the super lens, and simultaneously, the phase of the pixel unit conforms to the formula, so that the focal point of the laser emitted by the laser control system is the same as that of the light beam of the super lens and shows dynamic change, and accordingly, the edited image can be displayed in a three-dimensional space. FIG. 19 shows the focus effect plots for the focus shifts of 3 microns, 0 microns, and-3 microns in the y' direction for the dynamically adjustable focus plane (plot of focus effect versus focus offset)19 the rightmost color chip is shown) it can be seen that the image can be made to vary accordingly by the focal position.
Fig. 20 shows a schematic diagram of the focal length moving with the wavefront, in fig. 20, t is the thickness of the liquid crystal cell (the thickness of the liquid crystal cell), Δ n is the variation of the refractive index of the whole liquid crystal and the dielectric column, the focal length is f when the wavefront corresponds to the position of L, and after the refractive index is adjusted, the wavefront corresponds to the position of L', and the focal length is (f + Δ f) at this time, that is, when the wavefront position moves, the focal length moves accordingly.
In general, in the present invention, the photophoretic force dominates after the light beam strikes the cellulose particles (and may be several orders of magnitude greater than the scattering or gradient forces), the radiation effect causes the cellulose particles to be heated unevenly and the thermal creep causes the generation of the photophoretic force, the photophoretic force resulting from uneven heating of cellulose particles in fluid and gaseous media is generally repulsive, and, the cellulose particles are captured by focusing the light beam in an attempt to push the cellulose particles away from the region of maximum light intensity by the photophoretic force, at which time the laser is irradiated onto the cellulose particles, the cellulose particles can be regulated and controlled to move in a three-dimensional space through the super lens, along with the movement of the cellulose particles, laser emitted by the laser control system can move along with the cellulose particles, corresponding pixel signals are continuously irradiated onto the cellulose particles, and space full-color body imaging can be formed on the basis of visual residues of human eyes. It should be noted that, of course, the corresponding liquid crystal voltage control program in the superlens should also be set to match the laser control system, so as to realize the display of any pattern in three-dimensional space and realize the miniaturization of true three-dimensional display device.
The terms "first", "second" and "first" are used herein for descriptive purposes only and are not to be construed as indicating or implying relative importance or to implicitly indicate the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include one or more of that feature. In the description of the present invention, "a plurality" means two or more unless specifically defined otherwise.
In the description herein, reference to the term "one embodiment," "another embodiment," "some embodiments," "some specific embodiments," or "other specific embodiments," etc., means that a particular feature, structure, material, or characteristic described in connection with the embodiment or example is included in at least one embodiment or example of the invention. In this specification, the schematic representations of the terms used above are not necessarily intended to refer to the same embodiment or example. Furthermore, the particular features, structures, materials, or characteristics described may be combined in any suitable manner in any one or more embodiments or examples. Furthermore, various embodiments or examples and features of different embodiments or examples described in this specification can be combined and combined by one skilled in the art without contradiction.
Although embodiments of the present invention have been shown and described above, it is understood that the above embodiments are exemplary and should not be construed as limiting the present invention, and that variations, modifications, substitutions and alterations can be made to the above embodiments by those of ordinary skill in the art within the scope of the present invention.
Claims (13)
1. A superlens, comprising:
a first substrate;
a first electrode layer disposed at one side of the first substrate;
the dielectric pillars are arranged on one side, far away from the first substrate, of the first electrode layer at intervals, and the width of each dielectric pillar is gradually reduced in the extending direction from the center of the first substrate to the edge of the first substrate;
the second electrode layer is arranged on one side, far away from the first substrate, of the dielectric column;
the first liquid crystal is positioned on one side of the first electrode layer, which is far away from the first substrate, and is filled in gaps among the dielectric columns;
the second substrate is arranged on one side, far away from the first substrate, of the second electrode layer.
2. A superlens of claim 1, further comprising:
a first alignment film disposed between the first liquid crystal and the second electrode layer.
3. A superlens of claim 1, further comprising:
a third electrode layer provided between the second electrode layer and the first liquid crystal;
a second liquid crystal located between the second electrode layer and the third electrode layer.
4. A superlens of claim 3, further comprising:
a second alignment film disposed between the second liquid crystal and the second electrode layer.
5. A superlens as claimed in claim 3, further comprising a plurality of spaced-apart spacers disposed between the second and third electrode layers.
6. A superlens according to any one of claims 1 to 5, wherein the dielectric cylinder satisfies at least one of the following conditions:
the width of the medium column is 50 nm-200 nm;
the height of the medium column is 450 nm-800 nm;
the material of the dielectric column comprises at least one of silicon nitride, titanium oxide and gallium nitride.
7. A method of making a superlens, comprising:
providing a first substrate, and forming a first electrode layer on one side of the first substrate;
forming a plurality of dielectric pillars arranged at intervals on one side of the first electrode layer, which is far away from the first substrate, wherein the width of each dielectric pillar is gradually reduced in the extending direction from the center of the first substrate to the edge of the first substrate;
providing a second substrate, and forming a second electrode layer on one side of the second substrate;
the first substrate and the second substrate are arranged in a box, so that the first electrode layer is positioned between the first substrate and the second electrode layer, and the second electrode layer is positioned on one side of the second substrate close to the first substrate;
and injecting a first liquid crystal between the first electrode layer and the second electrode layer, and filling the first liquid crystal in gaps among the dielectric columns.
8. The method of claim 7, further comprising, prior to the pair of the first substrate and the second substrate being boxed: and forming a first alignment film on one side of the second electrode layer far away from the second substrate.
9. The method of claim 7, further comprising:
providing a third substrate, and forming a third electrode layer on one side of the third substrate;
aligning the third substrate provided with the third electrode layer with the first substrate provided with the dielectric pillars;
etching the third substrate to remove the third substrate;
aligning the second substrate provided with the second electrode layer with the first substrate provided with the third electrode layer;
injecting a second liquid crystal between the second electrode layer and the third electrode layer.
10. The method of claim 9, further comprising, prior to the step of binning the first and third substrates: and forming a second alignment film on one side of the third electrode layer far away from the third substrate.
11. The method according to claim 9 or 10, wherein before the cell-aligning the second substrate provided with the second electrode layer with the first substrate provided with the third electrode layer, further comprising: and forming a plurality of isolation columns arranged at intervals on one side of the second electrode layer far away from the second substrate.
12. A display device comprising the superlens according to any one of claims 1 to 6 or the superlens manufactured by the method according to any one of claims 7 to 11.
13. The display device of claim 12, further comprising a laser control system, the laser control system being coupled to the superlens to synchronize the real-time position information and the laser information.
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| PCT/CN2023/090414 WO2023207926A1 (en) | 2022-04-25 | 2023-04-24 | Superlens and manufacturing method therefor, and display apparatus |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2023207926A1 (en) * | 2022-04-25 | 2023-11-02 | 京东方科技集团股份有限公司 | Superlens and manufacturing method therefor, and display apparatus |
Citations (19)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102243402A (en) * | 2011-07-13 | 2011-11-16 | 深圳超多维光电子有限公司 | Liquid crystal lens grating and stereo display device thereof |
| CN203433171U (en) * | 2013-08-21 | 2014-02-12 | 信利光电股份有限公司 | Zoom lens and camera module |
| CN103913879A (en) * | 2014-04-14 | 2014-07-09 | 重庆卓美华视光电有限公司 | Liquid crystal lens, method for forming same and stereoscopic display device |
| CN104020625A (en) * | 2014-06-25 | 2014-09-03 | 重庆卓美华视光电有限公司 | 3D (Three Dimensional) optical splitter and three-dimensional display device |
| CN206002779U (en) * | 2016-09-14 | 2017-03-08 | 合肥鑫晟光电科技有限公司 | Naked eye three-dimensional display device |
| CN106970483A (en) * | 2016-01-13 | 2017-07-21 | 三星电子株式会社 | Tunable electro-optic wave filter |
| US20170277012A1 (en) * | 2016-03-25 | 2017-09-28 | Samsung Display Co., Ltd. | Liquid crystal lens and display device including the same |
| CN107422570A (en) * | 2017-08-16 | 2017-12-01 | 集美大学 | double-layer liquid crystal lens device and preparation method thereof |
| CN108873505A (en) * | 2018-07-27 | 2018-11-23 | 京东方科技集团股份有限公司 | Liquid crystal lens, mould group, augmented reality equipment, glasses, display methods |
| CN110192145A (en) * | 2016-11-18 | 2019-08-30 | 奇跃公司 | Liquid crystal diffraction equipment and its manufacturing method with nano-scale patterns |
| CN111103739A (en) * | 2019-12-31 | 2020-05-05 | 中国工程物理研究院流体物理研究所 | Electric control zoom plane lens |
| CN111290164A (en) * | 2020-03-31 | 2020-06-16 | 京东方科技集团股份有限公司 | Transparent display panel, display device and glasses |
| CN111722423A (en) * | 2020-06-22 | 2020-09-29 | 中国科学院上海光学精密机械研究所 | Continuous variable-focus superlens combining liquid crystal and super surface |
| CN111880347A (en) * | 2020-08-27 | 2020-11-03 | 南京南辉智能光学感控研究院有限公司 | Terahertz lens with adjustable focal length and preparation method and application thereof |
| CN112099285A (en) * | 2020-11-03 | 2020-12-18 | 南昌虚拟现实研究院股份有限公司 | Liquid crystal lens device and virtual reality zooming method |
| CN113467117A (en) * | 2021-07-06 | 2021-10-01 | 南京大学 | Temperature-controlled vector vortex light beam detector, preparation method thereof and detection device |
| CN113504678A (en) * | 2021-07-22 | 2021-10-15 | 北京京东方技术开发有限公司 | Lens, depth of field sensor, depth of field measuring system and manufacturing method of lens |
| CN113589535A (en) * | 2021-08-16 | 2021-11-02 | 北京京东方技术开发有限公司 | Optical imaging system and head-mounted display device |
| CN113687515A (en) * | 2021-09-01 | 2021-11-23 | 北京京东方技术开发有限公司 | Near-to-eye display device, preparation method and wearable equipment |
Family Cites Families (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN203858434U (en) * | 2014-04-14 | 2014-10-01 | 重庆卓美华视光电有限公司 | Liquid crystal lens and three-dimensional display device |
| CN208384249U (en) * | 2018-07-27 | 2019-01-15 | 京东方科技集团股份有限公司 | A kind of AR glasses |
| CN111399262B (en) * | 2020-04-27 | 2023-10-31 | 南京南辉智能光学感控研究院有限公司 | Adjustable terahertz lens and preparation method and application thereof |
| CN212647221U (en) * | 2020-08-27 | 2021-03-02 | 南京南辉智能光学感控研究院有限公司 | Terahertz lens with adjustable focal length |
| CN114859607A (en) * | 2022-04-25 | 2022-08-05 | 北京京东方技术开发有限公司 | Superlens, manufacturing method thereof and display device |
-
2022
- 2022-04-25 CN CN202210442747.7A patent/CN114859607A/en active Pending
-
2023
- 2023-04-24 WO PCT/CN2023/090414 patent/WO2023207926A1/en unknown
Patent Citations (19)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102243402A (en) * | 2011-07-13 | 2011-11-16 | 深圳超多维光电子有限公司 | Liquid crystal lens grating and stereo display device thereof |
| CN203433171U (en) * | 2013-08-21 | 2014-02-12 | 信利光电股份有限公司 | Zoom lens and camera module |
| CN103913879A (en) * | 2014-04-14 | 2014-07-09 | 重庆卓美华视光电有限公司 | Liquid crystal lens, method for forming same and stereoscopic display device |
| CN104020625A (en) * | 2014-06-25 | 2014-09-03 | 重庆卓美华视光电有限公司 | 3D (Three Dimensional) optical splitter and three-dimensional display device |
| CN106970483A (en) * | 2016-01-13 | 2017-07-21 | 三星电子株式会社 | Tunable electro-optic wave filter |
| US20170277012A1 (en) * | 2016-03-25 | 2017-09-28 | Samsung Display Co., Ltd. | Liquid crystal lens and display device including the same |
| CN206002779U (en) * | 2016-09-14 | 2017-03-08 | 合肥鑫晟光电科技有限公司 | Naked eye three-dimensional display device |
| CN110192145A (en) * | 2016-11-18 | 2019-08-30 | 奇跃公司 | Liquid crystal diffraction equipment and its manufacturing method with nano-scale patterns |
| CN107422570A (en) * | 2017-08-16 | 2017-12-01 | 集美大学 | double-layer liquid crystal lens device and preparation method thereof |
| CN108873505A (en) * | 2018-07-27 | 2018-11-23 | 京东方科技集团股份有限公司 | Liquid crystal lens, mould group, augmented reality equipment, glasses, display methods |
| CN111103739A (en) * | 2019-12-31 | 2020-05-05 | 中国工程物理研究院流体物理研究所 | Electric control zoom plane lens |
| CN111290164A (en) * | 2020-03-31 | 2020-06-16 | 京东方科技集团股份有限公司 | Transparent display panel, display device and glasses |
| CN111722423A (en) * | 2020-06-22 | 2020-09-29 | 中国科学院上海光学精密机械研究所 | Continuous variable-focus superlens combining liquid crystal and super surface |
| CN111880347A (en) * | 2020-08-27 | 2020-11-03 | 南京南辉智能光学感控研究院有限公司 | Terahertz lens with adjustable focal length and preparation method and application thereof |
| CN112099285A (en) * | 2020-11-03 | 2020-12-18 | 南昌虚拟现实研究院股份有限公司 | Liquid crystal lens device and virtual reality zooming method |
| CN113467117A (en) * | 2021-07-06 | 2021-10-01 | 南京大学 | Temperature-controlled vector vortex light beam detector, preparation method thereof and detection device |
| CN113504678A (en) * | 2021-07-22 | 2021-10-15 | 北京京东方技术开发有限公司 | Lens, depth of field sensor, depth of field measuring system and manufacturing method of lens |
| CN113589535A (en) * | 2021-08-16 | 2021-11-02 | 北京京东方技术开发有限公司 | Optical imaging system and head-mounted display device |
| CN113687515A (en) * | 2021-09-01 | 2021-11-23 | 北京京东方技术开发有限公司 | Near-to-eye display device, preparation method and wearable equipment |
Non-Patent Citations (1)
| Title |
|---|
| D. E. SMALLEY,ETALS: "A photophoretic-trap volumetric display", vol. 553, pages 486 - 490 * |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2023207926A1 (en) * | 2022-04-25 | 2023-11-02 | 京东方科技集团股份有限公司 | Superlens and manufacturing method therefor, and display apparatus |
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| Publication number | Publication date |
|---|---|
| WO2023207926A1 (en) | 2023-11-02 |
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