WO2023207926A1

WO2023207926A1 - Superlens and manufacturing method therefor, and display apparatus

Info

Publication number: WO2023207926A1
Application number: PCT/CN2023/090414
Authority: WO
Inventors: 周健
Original assignee: 京东方科技集团股份有限公司; 北京京东方技术开发有限公司
Priority date: 2022-04-25
Filing date: 2023-04-24
Publication date: 2023-11-02
Also published as: CN114859607A

Abstract

A superlens and a manufacturing method therefor, and a display apparatus. The superlens (1000) comprises: a first substrate (100); a first electrode layer (200), the first electrode layer being provided on one side of the first substrate; a plurality of dielectric columns (300), the plurality of dielectric columns being arranged at intervals on the side of the first electrode layer away from the first substrate, and the widths of the dielectric columns being gradually reduced in the extension direction from the center of the first substrate to the edge of the first substrate; a second electrode layer (400), the second electrode layer being provided on the side of the dielectric columns away from the first substrate; a first liquid crystal (500), the first liquid crystal being located on the side of the first electrode layer away from the first substrate and being filled in the gaps between the plurality of dielectric columns; and a second substrate (600), the second substrate being provided on the side of the second electrode layer away from the first substrate.

Description

Hyperlens, manufacturing method and display device thereof

This application claims priority to the Chinese patent application filed with the China Patent Office on April 25, 2022, with the application number 202210442747.7 and the invention title "Metalens and its manufacturing method and display device". The content should be understood as being incorporated by reference. are incorporated into this application.

Technical field

Embodiments of the present disclosure relate to, but are not limited to, the field of display technology. Specifically, they relate to hyperlenses, their manufacturing methods, and display devices.

Background technique

Free space volume displays, or creating luminous image points in space, these display technologies can image in thin air and be visible from any angle without clipping. Because of edge boundaries, the "clipping phenomenon" (there will be differences in the displayed image when the human eye observes it at different angles, the human eye cannot observe the complete image at every angle, the "clipping phenomenon" refers to The human eye cannot observe a complete image), which limits the application of all 3D display technologies that modulate light on a two-dimensional surface, such as holographic display, nanophotonic array, plasma display and other display technologies. Although the current photophoresis display can achieve the effect of true three-dimensional display, the overall device volume is relatively large.

Contents of the invention

The following is an overview of the subject matter described in detail in this disclosure. This summary is not intended to limit the scope of the claims.

Exemplary embodiments of the present disclosure provide a metalens, including:

first substrate;

A first electrode layer, the first electrode layer is provided on one side of the first substrate;

A plurality of dielectric pillars, the plurality of dielectric pillars are spaced apart on a side of the first electrode layer away from the first substrate, in an extending direction from the center of the first substrate to the edge of the first substrate On the top, the width of the dielectric column gradually decreases;

a second electrode layer, the second electrode layer is disposed on the side of the dielectric column away from the first substrate;

A first liquid crystal, the first liquid crystal is located on the side of the first electrode layer away from the first substrate, and is filled in the gaps between the plurality of dielectric pillars;

A second substrate is provided on a side of the second electrode layer away from the first substrate.

In an exemplary embodiment, the metalens further includes:

A first alignment film, the first alignment film is disposed between the first liquid crystal and the second electrode layer.

In an exemplary embodiment, the metalens further includes:

a third electrode layer, the third electrode layer being disposed between the second electrode layer and the first liquid crystal;

Second liquid crystal, the second liquid crystal is located between the second electrode layer and the third electrode layer.

In an exemplary embodiment, the metalens further includes:

A second alignment film is provided between the second liquid crystal and the second electrode layer.

In an exemplary embodiment, the metalens further includes a plurality of spaced apart isolation pillars, and the isolation pillars are arranged between the second electrode layer and the third electrode layer.

In an exemplary embodiment, the width of the dielectric pillar is 50 nm to 200 nm.

In an exemplary embodiment, the height of the dielectric column is 450 nm to 800 nm.

In an exemplary embodiment, the material of the dielectric pillar includes at least one of silicon nitride, titanium oxide, and gallium nitride.

In an exemplary embodiment, the super lens further includes: a first sealant and a second sealant, wherein,

The first sealant is disposed on an edge area of the surface of the second alignment film away from the second substrate;

The second frame sealant is disposed on at least part of the surface of the isolation column at the edge.

Exemplary embodiments of the present disclosure also provide a method of manufacturing a hyperlens, including:

providing a first substrate and forming a first electrode layer on one side of the first substrate;

A plurality of spaced dielectric pillars are formed on the side of the first electrode layer away from the first substrate. In the extending direction from the center of the first substrate to the edge of the first substrate, the dielectric pillars have The width gradually decreases;

providing a second substrate and forming a second electrode layer on one side of the second substrate;

The first substrate and the second substrate are assembled so that the first electrode layer is located between the first substrate and the second electrode layer, and the second electrode layer is located between the second electrode layer and the second electrode layer. a side of the substrate close to the first substrate;

A first liquid crystal is injected between the first electrode layer and the second electrode layer, and the first liquid crystal is filled in the gaps between the plurality of dielectric columns.

In an exemplary embodiment, before assembling the first substrate and the second substrate, the method of making a hyperlens further includes: placing the second electrode layer away from the second substrate. A first alignment film is formed on one side.

In an exemplary embodiment, the method of manufacturing a metalens further includes:

providing a third substrate and forming a third electrode layer on one side of the third substrate;

Align the third substrate provided with the third electrode layer and the first substrate provided with the dielectric pillar;

Etching the third substrate to remove the third substrate;

Aligning the second substrate provided with the second electrode layer and the first substrate provided with the third electrode layer;

A second liquid crystal is injected between the second electrode layer and the third electrode layer.

In an exemplary embodiment, before assembling the first substrate and the third substrate, the method of making a hyperlens further includes: placing the third electrode layer away from the third substrate. A second alignment film is formed on one side.

In an exemplary embodiment, before assembling the second substrate provided with the second electrode layer and the first substrate provided with the third electrode layer, the manufacturing of the super lens of The method further includes: forming a plurality of spaced apart isolation pillars on a side of the second electrode layer away from the second substrate.

In an exemplary embodiment,

Before assembling the third substrate and the first substrate, the method of making a hyperlens further includes: coating a first encapsulant on a side of the third electrode layer away from the third substrate. , wherein the first sealant is coated on the edge portion of the surface of the second alignment film away from the third substrate;

After assembling the third substrate and the first substrate, the method of making a super lens further includes: UV curing the first sealant;

Before assembling the second substrate and the first substrate, the method of making a hyperlens further includes: applying a second frame sealing glue on at least part of the surface of the isolation column at the edge portion;

After assembling the second substrate and the first substrate, the method of making a super lens further includes: UV curing the second frame sealant.

Exemplary embodiments of the present disclosure also provide a display device, including any of the above-mentioned hyperlenses or a hyperlens produced using any of the above-mentioned methods of producing a hyperlens.

In an exemplary embodiment, the display device further includes a laser control system, which is combined with the super lens to synchronize real-time position information and laser information.

Other aspects will be apparent after reading and understanding the drawings and detailed description.

Description of drawings

Figure 1 shows a schematic structural diagram of a metalens according to an exemplary embodiment of the present disclosure;

Figure 2 shows a schematic structural diagram of a metalens according to another exemplary embodiment of the present disclosure;

Figure 3 shows a schematic structural diagram of a metalens according to yet another exemplary embodiment of the present disclosure;

Figure 4 shows a schematic structural diagram of a metalens according to yet another exemplary embodiment of the present disclosure;

Figure 5 shows a schematic structural diagram of a metalens according to yet another exemplary embodiment of the present disclosure;

Figure 6 shows a schematic structural diagram of a metalens according to yet another exemplary embodiment of the present disclosure;

Figure 7 shows a cross-sectional view along BB' of a metalens according to an exemplary embodiment of the present disclosure;

Figure 8 shows a graph of phase variation with the diameter of a dielectric column in an exemplary embodiment of the present disclosure;

Figure 9 shows a graph of light transmittance as a function of the diameter of a dielectric column in an exemplary embodiment of the present disclosure;

Figure 10 shows a graph of phase as a function of refractive index in an exemplary embodiment of the present disclosure;

Figure 11 shows a schematic diagram of the wavefront of a beam of light after passing through a super lens according to an embodiment of the present disclosure;

Figure 12 shows a flow chart of a method for manufacturing a metalens according to an exemplary embodiment of the present disclosure;

Figure 13 shows a flow chart of a method of manufacturing a metalens according to another exemplary embodiment of the present disclosure;

Figure 14 shows a flow chart of a method of manufacturing a metalens according to yet another exemplary embodiment of the present disclosure;

Figure 15 shows a flow chart of a method for manufacturing a metalens according to yet another exemplary embodiment of the present disclosure;

Figure 16 shows a flow chart of a method of manufacturing a metalens according to yet another exemplary embodiment of the present disclosure;

Figure 17 shows a flow chart of a method of manufacturing a metalens according to yet another exemplary embodiment of the present disclosure;

Figure 18 shows a schematic diagram of cellulose particle capture and dynamic pattern display;

Figure 19 shows a schematic diagram of beam deflection;

Figure 20 shows a schematic diagram of the focal length moving with the wavefront.

Detailed ways

Embodiments of the present disclosure are described in detail below. The embodiments described below are illustrative and are only used to explain the present disclosure and are not to be construed as limitations of the present disclosure. If specific techniques or conditions are not specified in the examples, the techniques or conditions described in literature in the field or product instructions will be followed.

The embodiments and features of the embodiments in the present disclosure may be combined with each other without conflict. The present disclosure will be described in detail below in conjunction with embodiments with reference to the accompanying drawings.

At present, there is an urgent need to improve the existing display technology so that the device can realize spatial volume display, further reduce the size of the device, and achieve integration and miniaturization of the device.

This disclosure is based on the inventor's discovery and understanding of the following facts and problems:

The Display Technology Group of the Optical Society of America defines "volumetric display" as the image point of a volumetric display with Light scattering (or absorbing and generating) surfaces are located at the same location. At present, only inductive plasma display, improved air display, and acoustic levitation display have been successfully implemented in space, but plasma displays fail to display RGB colors; the mechanisms of improved air display and acoustic levitation display are too crude and cannot compete with holographic displays. The current photophoresis display can achieve the effect of true three-dimensional display, but the overall device volume is relatively large. The inventor found that liquid crystals and dielectric columns can be used to form a metasurface metasurface structure to achieve dynamic beam control and focusing functions, and combined with photophoretic force to capture cellulose particles to achieve spatial display.

In one aspect of the present disclosure, an exemplary embodiment of the present disclosure provides a hyper lens. According to the exemplary embodiment of the present disclosure, with reference to FIGS. 1 to 6 , the hyper lens 1000 includes a first substrate 100 and a first electrode layer 200 , a plurality of dielectric pillars 300, a second electrode layer 400, a first liquid crystal 500 and a second substrate 600, wherein the first electrode layer 200 is arranged on one side of the first substrate 100, and the plurality of dielectric pillars 300 are arranged at intervals on the first substrate 100. The side of the electrode layer 200 away from the first substrate 100 is in the direction extending from the center of the first substrate 100 to the edge of the first substrate 100 (equivalent to the direction indicated by the horizontal arrow A in FIGS. 1 to 6 (above), the width W of the dielectric pillar gradually decreases, the second electrode layer 400 is located on the side of the dielectric pillar 300 away from the first substrate 100, and the first liquid crystal 500 is located on the side of the first electrode layer 200 away from the first substrate 100, And filled in the gaps between the plurality of dielectric pillars 300 , the second substrate 600 is disposed on the side of the second electrode layer 400 away from the first substrate 100 . As a result, the metalens can control dynamic beams and focus. Combined with photophoretic force, it can capture cellulose particles. Combining the metalens with a laser control system can achieve spatial display.

The following is a description of the principle that the metalens according to the exemplary embodiment of the present disclosure can control and focus the dynamic beam: In the exemplary embodiment of the present disclosure, the width W of the dielectric column 300 is set along the center of the first substrate 100 toward the first substrate. 100 gradually decreases in the extending direction of the edge. Figure 8 shows the graph of the change of phase with the diameter of the dielectric column. Figure 8 takes the dielectric column as a cylinder as an example to show that a fixed wavelength beam passes through dielectric columns of different diameters. The subsequent phase, as can be seen from Figure 8, is that the larger the diameter of the dielectric column, the greater the phase of the light beam after passing through the dielectric column, and the greater the phase delay. After the light beam (refer to Figure 11) irradiates the super lens 300, due to the dielectric column at the center position, The width is larger, and the beam moves slower, while the width of the dielectric column at the edge is smaller, and the beam moves faster. In the direction extending from the center to the edge, the beam moving speed gradually increases, and a shape similar to that in Figure 11 can be formed. The parabolic light wavefront L1 can realize beam focusing, and by adjusting the voltage at both ends of the first liquid crystal 500, the crystal axis direction of the first liquid crystal 500 can be adjusted accordingly, and then the refractive index of the first liquid crystal 500 can be adjusted accordingly. In order to realize the overall control of the dynamic beam by the hyperlens, so that the position of the light wavefront changes, the focus of the dynamic beam after passing through the hyperlens will change accordingly. The first liquid crystal and dielectric column can regulate the movement of the incident light beam in the xy plane, and can also regulate the movement of the incident light beam in the z direction (that is, the direction perpendicular to the xy plane). In an exemplary embodiment, The first liquid crystal and the dielectric column cannot control the movement in the xy plane and the z direction at the same time. Therefore, the incident light beam can be controlled in three-dimensional space through the super lens.

Figure 9 shows that the dielectric column is cylindrical. The dielectric column is made of titanium dioxide and has a height of 600 nm. The first liquid crystal is E7 (refractive index 1.5 to 1.7). When no voltage is applied (refractive index of the first liquid crystal Maintaining 1.5), under the condition that the incident light of the dielectric column is visible light of a fixed wavelength, the transmittance of the light changes with the diameter of the dielectric column. It can be seen from Figure 9 that when the diameter of the dielectric column is set in the range of 50nm to 200nm , the light transmittance is higher than 80%.

Figure 10 shows that the dielectric column is cylindrical. The material of the dielectric column is titanium dioxide, the height is 600nm, the diameter is 150nm, the thickness of the liquid crystal cell is 2.7 microns, and the phase of the light after transmission changes with the refractive index of the liquid crystal ( As the refractive index of the liquid crystal changes from 1.5 to 1.7, the phase after the light is transmitted), in an exemplary embodiment, the phase is not rounded in Figure 10 (that is, the period of the light wave is not combined with 2π The movement law adjusts the ordinate). As shown in Figure 10, the refractive index of the liquid crystal can be changed by adjusting the voltage of the liquid crystal, so that the phase of the light beam passing through the super lens is in the range of 0° to 360° (corresponding to 0 to 2π radians) changes, so that the light wavefront of any beam can be adjusted, and the beam focusing or off-axis focusing can also be designed.

According to some exemplary embodiments of the present disclosure, referring to FIG. 6 , the width W of the dielectric pillar 300 may be 50 nm to 200 nm, for example, W may be 50 nm, 60 nm, 80 nm, 100 nm, 120 nm, 150 nm, 180 nm, 200 nm, etc., and the width W of the dielectric pillar When the width is set within the above range, the dielectric column has good light transmittance, and the super lens can control the incident light beam in three-dimensional space. In an exemplary embodiment, the width W of the dielectric column 300 refers to the size of the dielectric column 300 in the direction indicated by the horizontal arrow in FIG. 6 . When the dielectric column 300 is cylindrical, the width of the dielectric column 300 W refers to the diameter of the dielectric column 300. When the dielectric column 300 is a rectangular parallelepiped (the cross-section of the dielectric column along BB' is square), the width W of the dielectric column 300 refers to the side length of the cross-section of the dielectric column along BB'. . FIG. 7 is a cross-sectional view along BB′ in FIG. 1 . It can also be clearly seen from FIG. 7 that the width of the dielectric pillar 300 is in the extending direction from the center of the first substrate 100 to the edge of the first substrate 100 . slowing shrieking. In an exemplary embodiment, the cross section of the metalens along BB' may be circular (as shown in FIG. 7 ) or square, as long as the dielectric column can be directed toward the first substrate along the center of the first substrate. In the extending direction of the edge of the substrate, the width of the dielectric column gradually decreases, which can control and focus the incident light beam in three-dimensional space.

According to an exemplary embodiment of the present disclosure, the material of the dielectric pillar 300 may include at least one of silicon nitride, titanium oxide, and gallium nitride. For example, the dielectric pillar 300 may be made of silicon nitride, titanium oxide, or gallium nitride. The dielectric pillar 300 may also be formed of one of materials such as silicon nitride, titanium oxide, and gallium nitride. The above materials all have good visible light transmittance, which is beneficial to improving the super lens. The control effect on the incident light beam.

According to some exemplary embodiments of the present disclosure, both the first substrate 100 and the second substrate 600 may be made of glass. As for the specific type of glass, those skilled in the art can select it according to actual needs, as long as the first substrate 100 and the second substrate 600 are made of glass. The second substrate 600 only needs to have a certain strength and provide good support.

According to some exemplary embodiments of the present disclosure, the material of the first electrode layer 200 and the second electrode layer 400 may both be ITO (indium tin oxide). Therefore, both the first electrode layer and the second electrode layer have better The conductivity of the liquid crystal is more conducive to adjusting the refractive index of the liquid crystal by applying voltage to the liquid crystal, thereby facilitating the control of the incident light beam by the super lens.

According to some exemplary embodiments of the present disclosure, referring to FIG. 2 , the super lens 1000 may further include a first alignment film 10 disposed between the first liquid crystal 500 and the second electrode layer 400 . In these examples In a specific embodiment, the first alignment film 10 can be arranged so that the first liquid crystal 500 is arranged along the grooves of the first alignment film 10 (the grooves of the first alignment film are not shown in FIG. 2 ), so that the first liquid crystal 10 It has better stability, thereby helping to improve the overall stability of the super lens 1000.

According to other exemplary embodiments of the present disclosure, referring to FIG. 3 , the super lens 1000 may further include a third electrode layer 700 and a second liquid crystal 800 , wherein the third electrode layer 700 is disposed between the second electrode layer 400 and the first liquid crystal. 500, the second liquid crystal 800 is located between the second electrode layer 400 and the third electrode layer 700. In this case, the first liquid crystal and the dielectric column can regulate the movement of the incident light beam in the xy plane, and the second liquid crystal can regulate the movement of the incident light beam in the z direction (that is, the direction perpendicular to the xy plane), so that It is easier to move the incident beam in three-dimensional space.

According to some exemplary embodiments of the present disclosure, the material of the third electrode layer 700 may be ITO (indium tin oxide). Therefore, the third electrode layer also has good electrical conductivity, which facilitates adjustment of the refractive index of the liquid crystal. , which facilitates the use of hyperlenses to control the movement of the incident beam in three-dimensional space.

According to further exemplary embodiments of the present disclosure, referring to FIGS. 4 to 6 , the super lens 1000 may further include a second alignment film 20 disposed between the first liquid crystal 500 and the third electrode layer 700 , In this case, the first liquid crystal 500 may be arranged along the grooves of the second alignment film 20 (the grooves of the second alignment film are not shown in FIGS. 4 to 6 ), so that the first liquid crystal 10 has good stability. At this time, the first alignment film 10 is disposed between the second electrode layer 400 and the second liquid crystal 800 so that the second liquid crystal 800 can follow the groove of the first alignment film 10 (not shown in FIGS. 4 to 6 shows the groove) arrangement of the first alignment film, thereby making the second liquid crystal 800 have better stability, which is more conducive to improving the overall stability of the super lens 1000.

According to some exemplary embodiments of the present disclosure, the first alignment film 10 and the second alignment film 20 may both be made of PI (polyimide), and the polyimide film layer may be rubbed (roughened) so that Grooves are formed on its surface, and the liquid crystals are arranged along the grooves.

According to some exemplary embodiments of the present disclosure, referring to FIGS. 5 and 6 , the super lens 1000 may further include a plurality of spaced apart isolation pillars 900 , wherein the isolation pillars 900 are provided between the second electrode layer 400 and the third electrode layer 700 . between. As a result, the isolation column can play a good supporting role, thereby making the super lens have better overall stability. According to some exemplary embodiments of the present disclosure, the isolation pillar 900 may be disposed on a surface of the second electrode layer 400 away from the second substrate 600 . According to other exemplary embodiments of the present disclosure, referring to FIGS. 5 and 6 , the isolation pillar 900 may also be disposed on the surface of the first alignment film 10 away from the second substrate 600 .

According to some exemplary embodiments of the present disclosure, referring to FIG. 6 , the super lens 1000 may further include a first sealant 30 and a second sealant 40 , wherein the first sealant 30 may be disposed in a second alignment. The film 20 is away from the edge area of the surface of the second substrate 600, and the second frame sealing glue 40 can be disposed on at least part of the surface of the isolation column 900 at the edge position. By arranging the first frame sealing glue and the second frame sealing glue, it can be more The first liquid crystal and the second liquid crystal are well constrained, thereby further improving the overall stability of the super lens. Regarding the materials of the first frame sealing glue and the second frame sealing glue, there are no special limitations in the exemplary embodiments of the present disclosure. Those skilled in the art can select and set according to actual needs, as long as the first frame sealing glue and the second frame sealing glue The frame glue only needs to have good bonding properties. In an exemplary embodiment, When isolation pillars are not provided, the second frame sealant 40 may be disposed on the surface of the second electrode layer 400 or the first alignment film 10 away from the second substrate 600 .

According to some exemplary embodiments of the present disclosure, referring to Figure 6, the height H1 of the dielectric column 300 may be 450nm to 800nm, for example, H1 may be 450nm, 480nm, 500nm, 530nm, 550nm, 570nm, 600nm, 630nm, 650nm, 670nm, 700nm, 750nm, 780nm, 800nm, etc., which is more conducive to achieving phase adjustment of the incident beam, and will not significantly increase the difficulty of manufacturing dielectric columns.

According to some exemplary embodiments of the present disclosure, the first liquid crystal may be E7 (refractive index 1.5 to 1.7). According to some exemplary embodiments of the present disclosure, referring to FIG. 6 , the height H2 of the first liquid crystal 500 (ie, the cell thickness of the first liquid crystal) may be 2.7 microns to 8 microns, for example, it may be 2.7 microns, 3 microns, 3.5 microns, 4 microns, 4.5 microns, 5 microns, 5.5 microns, 6 microns, 6.5 microns, 7 microns, 7.5 microns, 8 microns, etc., which is more conducive to improving the control effect of the super lens on the incident beam, and is more conducive to improving the Overall stability of the metalens.

According to some exemplary embodiments of the present disclosure, the second liquid crystal may also be E7 (refractive index 1.5 to 1.7). According to some exemplary embodiments of the present disclosure, the height of the second liquid crystal 800 (ie, the cell thickness of the second liquid crystal) may also be 2.7 microns to 8 microns, which is beneficial to further improving the control effect of the super lens on the incident light beam. Moreover, it is helpful to further improve the overall stability of the super lens.

In an exemplary implementation, the hyperlens proposed in exemplary embodiments of the present disclosure can also achieve dynamic modulation of electro-optical, magneto-optical and other effects.

In general, the hyperlens proposed in the exemplary embodiments of the present disclosure can realize the direction control of any wavefront in the dynamic control space, and integrates the wavefront control and beam focusing in the same hyperlens, which is conducive to the miniaturization of the device. , when applying metalens to three-dimensional space display, the volume of the display device can be significantly reduced.

In another aspect of the present disclosure, an exemplary embodiment of the present disclosure proposes a method of manufacturing a hyperlens. According to an exemplary embodiment of the present disclosure, with reference to FIG. 12 , the method of manufacturing a hyperlens includes:

S100: Provide a first substrate 100, and form a first electrode layer 200 on one side of the first substrate 100.

In this step, the first substrate 100 is provided, and the first electrode layer 200 is formed on one side of the first substrate 100 . According to some exemplary embodiments of the present disclosure, the first electrode layer 200 may be formed by sputtering The first electrode layer can be formed on one side surface of the first substrate 100 by the injection method. Therefore, the first electrode layer can be formed through a mature process, which is beneficial to improving product yield and reducing the manufacturing cost of the super lens.

The materials of the first substrate 100 and the first electrode layer 200 have been introduced previously and will not be described again here.

S200: Form a plurality of spaced apart dielectric pillars 300 on the side of the first electrode layer 200 away from the first substrate 100.

After the first electrode layer 200 is formed, a plurality of spaced dielectric pillars 300 are formed on the side of the first electrode layer 200 away from the first substrate 100 , wherein, along the center of the first substrate 100 toward the edge of the first substrate 100 In the extending direction, the width of the dielectric column 300 gradually decreases.

According to some exemplary embodiments of the present disclosure, the step of forming a plurality of spaced apart dielectric pillars 300 includes: using an atomic layer deposition method to form an entire dielectric layer on the surface of the first electrode layer 200 away from the first substrate 100, Afterwards, PR glue (photoresist) is spin-coated on the side of the dielectric layer away from the first substrate, etched to obtain a plurality of spaced dielectric pillars 300, and the remaining PR glue is removed.

The material, size and other characteristics of the dielectric column 300 have been described in detail above and will not be described again here.

S300: Provide a second substrate 600, and form a second electrode layer 400 on one side of the second substrate 600.

In this step, a second substrate 600 is provided, and the second electrode layer 400 is formed on one side of the second substrate 600 . Exemplary embodiments of the present disclosure do not specifically limit the order of step S300 and step S100. The first substrate may be provided first and the first electrode layer is formed on one side of the first substrate, or the second substrate may be provided first and then the first electrode layer is formed on one side of the first substrate. A second electrode layer is formed on one side of the substrate. Of course, the above steps S300 and S100 can also be performed at the same time.

According to some exemplary embodiments of the present disclosure, the second electrode layer 400 can be formed on the surface of the second substrate 600 by a sputtering method. Therefore, the second electrode layer can be formed through a mature process, which is beneficial to improving the quality of the product. yield and reduce production costs.

The materials of the second substrate 600 and the second electrode layer 400 have been described previously and will not be described again here.

S400: Assemble the first substrate 100 and the second substrate 600.

In this step, the first substrate 100 and the second substrate 600 are aligned as shown in Figure 12, so that the first substrate 100 and the second substrate 600 are An electrode layer 200 is located between the first substrate 100 and the second electrode layer 400 , and the second electrode layer 400 is located on a side of the second substrate 600 close to the first substrate 100 .

According to some exemplary embodiments of the present disclosure, step S400 may be performed under vacuum conditions.

S500: Inject the first liquid crystal 500 between the first electrode layer 200 and the second electrode layer 400.

In this step, the first liquid crystal 500 is injected between the first electrode layer 200 and the second electrode layer 400 , and the first liquid crystal 500 is filled in the gaps between the plurality of dielectric pillars 300 .

The metalens produced by the above method can regulate the movement of the incident beam in three-dimensional space and focus the beam, thereby capturing cellulose particles. Combined with the laser control system, three-dimensional space display can be achieved; the above method is easy to operate and It is beneficial to improve product yield and will not significantly increase production costs.

According to some exemplary embodiments of the present disclosure, with reference to FIG. 13 , before assembling the first substrate 100 and the second substrate 600 , the method of making the hyperlens may further include: placing the second electrode layer 400 away from the second substrate 600 The first alignment film 10 is formed on one side. In these exemplary embodiments, after the first alignment film 10 is formed, the second substrate 600 provided with the first alignment film 10 is aligned with the first substrate. After alignment, the first alignment film 10 is disposed on the medium. between the pillar 300 and the second electrode layer 400. According to some exemplary embodiments of the present disclosure, the first alignment film 10 may be formed by a spin coating method. Therefore, using a mature process to produce the first alignment film can further improve the yield of the product, and the first alignment film 10 may be formed by spin coating. The arrangement of the membrane is beneficial to improving the overall stability of the super lens.

According to other exemplary embodiments of the present disclosure, with reference to FIG. 14 , the method of manufacturing a hyperlens further includes: providing a third substrate 50 and forming a third electrode layer 700 on one side of the third substrate 50 ; disposing a third The third substrate 50 of the electrode layer 700 is aligned with the first substrate 100 provided with the dielectric pillar 300. After the alignment, the third substrate 50 is etched to remove the third substrate 50; the second electrode layer 400 is The second substrate 600 is aligned with the first substrate 100 provided with the third electrode layer 700, and the second liquid crystal 800 is injected between the second electrode layer 400 and the third electrode layer 700. In these exemplary embodiments, after the third substrate 50 provided with the third electrode layer 700 is aligned with the first substrate 100 provided with the dielectric pillar 300 , between the second electrode layer 400 and the first electrode layer 200 The first liquid crystal is injected intermittently, and then the third substrate 50 is etched to remove the third substrate 50 . According to an exemplary embodiment of the present disclosure, the material of the third substrate 50 may also be glass, and the first substrate 50 may be made of glass. After 100 and the third substrate 50 are assembled, the third substrate 50 can be etched with hydrofluoric acid to remove the third substrate 50 .

According to some exemplary embodiments of the present disclosure, with reference to FIG. 15 , before assembling the first substrate 100 and the third substrate 50 , the method of making a super lens may further include: positioning the third electrode layer 700 away from the third substrate 50 The second alignment film 20 is formed on one side of the film. In these exemplary embodiments, after the second alignment film 20 is formed, the third substrate 50 provided with the second alignment film 20 and the isolation pillar provided with the dielectric pillar 300 are aligned. The material of the second alignment film 20 has been described previously and will not be described again here.

According to further exemplary embodiments of the present disclosure, with reference to FIG. 16 , before aligning the second substrate 600 provided with the second electrode layer 400 and the first substrate 100 provided with the third electrode layer 700 , a metalens is produced. The method further includes: forming a plurality of spaced apart isolation pillars 900 on a side of the second electrode layer 400 away from the second substrate 600 . Therefore, the isolation column can play a good supporting role, which is beneficial to improving the overall stability of the super lens. According to some exemplary embodiments of the present disclosure, referring to FIG. 16 , a first alignment film 10 is provided on a side of the second electrode layer 400 away from the second substrate 600 , and a plurality of spaced apart isolation pillars 900 may be provided on the first alignment film. The side of the film 10 away from the second substrate 600 .

According to further exemplary embodiments of the present disclosure, with reference to FIG. 17 , before the first substrate 100 provided with the dielectric pillar 300 and the third substrate 50 provided with the third electrode layer 700 are assembled, the third electrode layer may be The first encapsulant 30 is coated on the side of the layer 700 away from the third substrate 50. In some exemplary embodiments, the first encapsulant 30 may be coated on the side surface of the second alignment film 20 away from the third substrate 50. At the edge part (as shown in Figure 17), the two parts are bonded through the first sealant 30. After the first substrate 100 and the third substrate 50 are aligned, the first sealant 30 can be subjected to UV Light curing makes the two parts of the structure firmly bonded and encapsulated; before the first substrate 100 provided with the third electrode layer 700 and the second substrate 600 provided with the isolation pillar 900 are assembled, the edge portion can be isolated At least part of the surface of the column is coated with a second frame sealing glue 40, and the two parts are bonded through the second frame sealing glue 40. After the first substrate 100 and the second substrate 600 are aligned, the second frame sealing can be The glue 40 is cured by UV light to firmly bond the two parts of the structure and achieve encapsulation. Of course, when isolation pillars are not provided, the second frame sealant 40 may be formed in the edge area of the surface of the second electrode layer 400 or the first dielectric layer 10 away from the second substrate 600 .

In general, the super lens produced by the method proposed in the exemplary embodiments of the present disclosure can control and focus the incident light beam in three-dimensional space, thereby realizing the function of capturing cellulose particles, and using this method to make a super lens The lens is beneficial to improve the yield of the super lens.

In yet another aspect of the present disclosure, exemplary embodiments of the present disclosure provide a display device that includes any of the aforementioned metalens or a metalens produced using any of the aforementioned methods. Therefore, the display device has all the features and advantages of the aforementioned hyperlens, which will not be described again here. In general, this display device can realize three-dimensional space display using super lenses.

According to some exemplary embodiments of the present disclosure, referring to Figures 18 and 19, in addition to the super lens 1000, the display device may further include a laser control system 2000. The laser control system 2000 is combined with the super lens 1000 to perform real-time position information and Synchronization of laser information. Figure 18 is a schematic diagram of cellulose particle capture and dynamic pattern display. In this display device, the super lens 1000 can focus the incident light beam 60 passing through it, and the focus of the light beam can move in three-dimensional space, and the light beam is focused and illuminated on the cellulose particles. After 70, the cellulose particles 70 are heated unevenly, and the light beam will focus the cellulose particles 70, which is equivalent to the light beam capturing the cellulose particles 70 in space. This is called photophoretic force. When the super lens 1000 controls the focal length of the light beam to move , the cellulose particles 70 will move accordingly. When the cellulose particles 70 move, a laser beam is irradiated in through the laser control system 2000. The laser and the beam focused by the super lens 1000 are also deflected to the same position. Controlled by the laser The system 2000 edits the pattern to be displayed, and the pixels corresponding to the pattern are irradiated onto the cellulose particles 70 one by one through the laser control system 2000. This is equivalent to the pattern information edited by the laser control system 2000 corresponding to the beam irradiating the fiber at each position. On the cellulose particles 70, the cellulose particles 70 will then scatter. The cellulose particles 70 scatter throughout the three-dimensional space. The movement speed of the cellulose particles 70 reaches a certain level. Based on the persistence of vision (POV) of the human eye 90, A full-color volume imaging in three-dimensional space can be formed, and the human eye 90 can observe the edited color pattern 80 through multiple viewing angles.

Figure 19 shows a schematic diagram of beam deflection. In an exemplary embodiment of the present disclosure, the following formula (1) is used as the calculation formula for beam control:

in, x and y correspond to the surface of the hyperlens in Figure 19 The coordinates of the plane where the focus is located, and x' and y' correspond to the coordinates of the plane where the dynamically adjustable focus is located in Figure 19, representing the offset sum of the focus in the x direction relative to the (0,0) point on the plane. The offset in the y direction, λ _i represents the wavelength of the light, is the phase. When the wavelength of the incident beam is constant, the value of r' can be obtained through the coordinates of the focus. The focal length f is the set value. The coordinates of the focus on the plane where the hyperlens is located can also be set, and r can also be obtained accordingly. Then we can know the phase The value of If the focus is the same and changes dynamically, the edited image can be displayed in the three-dimensional space accordingly. Figure 19 shows the focus effect diagram when the focus offsets in the y' direction of the plane where the dynamically adjustable focus is located are 3 microns, 0 microns, and -3 microns respectively (shown on the far right of Figure 19 (Color card), it can be seen that the image can be changed accordingly through the focus position.

Figure 20 shows a schematic diagram of the focal length moving with the wavefront. In Figure 20, t is the thickness of the liquid crystal cell (liquid crystal cell thickness), Δn is the change in the refractive index of the liquid crystal and the dielectric column as a whole, and the wavefront corresponds to where L The focal length is f at the position, and after adjusting the refractive index, the wavefront corresponds to the position of L', and the focal length at this time is (f+Δf). In other words, if the wavefront position moves, the focal length will move accordingly.

Generally speaking, in the exemplary embodiments of the present disclosure, after the light beam irradiates the cellulose particles, the photophoretic force dominates (and may be several orders of magnitude larger than the scattering force or gradient force), and the radiation effect causes uneven heating of the cellulose particles. And thermal creep leads to the generation of photophoretic forces. Photophoretic forces originating from uneven heating of cellulose particles in fluid and gaseous media are usually repulsive, and the photophoretic forces try to push cellulose particles away from the area of maximum light intensity. The beam focusing can capture the cellulose particles. At this time, the laser irradiates the cellulose particles, and the movement of the cellulose particles in the three-dimensional space can be controlled through the super lens. As the cellulose particles move, the laser emitted by the laser control system will follow the movement of the cellulose particles. As the cellulose particles move, the corresponding pixel signals are continuously irradiated onto the cellulose particles. Based on the visual residue of the human eye, spatial full-color volume imaging can be formed. In an exemplary embodiment, the corresponding liquid crystal voltage control program in the hyperlens should also be set to match the laser control system, thereby realizing the display of any pattern in three-dimensional space and miniaturizing the true three-dimensional display device.

The terms "first" and "second" in this article are only used for descriptive purposes and cannot be understood as indicating or implying relative importance or implicitly indicating the quantity of indicated technical features. Therefore, features defined as "first" and "second" may explicitly or implicitly include one or more of these features. In the description of the present disclosure , “plurality” means two or more, unless otherwise expressly limited.

In the description of the present disclosure, reference to the terms "one embodiment," "another embodiment," "some embodiments," "some exemplary embodiments," "other exemplary embodiments," etc. is intended to be descriptive. It means that a specific feature, structure, material, or characteristic described in connection with the embodiment or example is included in at least one embodiment or example of the disclosure. In this disclosure, the schematic representations of the above terms are not necessarily directed to the same embodiment or example. Furthermore, the specific features, structures, materials or characteristics described may be combined in any suitable manner in any one or more embodiments or examples. Furthermore, those skilled in the art may combine and combine different embodiments or examples and features of different embodiments or examples described in this specification unless they are inconsistent with each other.

Although the embodiments of the present disclosure have been shown and described above, it can be understood that the above-mentioned embodiments are illustrative and should not be construed as limitations of the present disclosure. Those of ordinary skill in the art can make modifications to the above-mentioned embodiments within the scope of the present disclosure. The embodiments are subject to changes, modifications, substitutions and variations.

Claims

A hyperlens consisting of:

first substrate;

A first electrode layer, the first electrode layer is provided on one side of the first substrate;

A plurality of dielectric pillars, the plurality of dielectric pillars are spaced apart on a side of the first electrode layer away from the first substrate, in an extending direction from the center of the first substrate to the edge of the first substrate On the top, the width of the dielectric column gradually decreases;

a second electrode layer, the second electrode layer is disposed on the side of the dielectric column away from the first substrate;

A first liquid crystal, the first liquid crystal is located on the side of the first electrode layer away from the first substrate, and is filled in the gaps between the plurality of dielectric pillars;

A second substrate is provided on a side of the second electrode layer away from the first substrate.
The metalens according to claim 1, further comprising:

A first alignment film, the first alignment film is disposed between the first liquid crystal and the second electrode layer.
The metalens according to claim 1, further comprising:

a third electrode layer, the third electrode layer being disposed between the second electrode layer and the first liquid crystal;

Second liquid crystal, the second liquid crystal is located between the second electrode layer and the third electrode layer.
The metalens according to claim 3, further comprising:

A second alignment film is provided between the second liquid crystal and the second electrode layer.
The metalens according to claim 3, further comprising: a plurality of spaced apart isolation pillars, the isolation pillars being arranged between the second electrode layer and the third electrode layer.
The metalens according to any one of claims 1 to 5, wherein the dielectric column satisfies at least one of the following conditions:

The width of the dielectric pillar is 50nm to 200nm.
The metalens according to any one of claims 1 to 5, wherein the height of the dielectric pillar is 450nm to 800nm.
The metalens according to any one of claims 1 to 5, wherein the material of the dielectric pillar includes at least one of silicon nitride, titanium oxide and gallium nitride.
The metalens according to claim 5, further comprising: a first sealant and a second sealant, wherein,

The first sealant is disposed on an edge area of the surface of the second alignment film away from the second substrate;

The second frame sealant is disposed on at least part of the surface of the isolation column at the edge.
A method of making a hyperlens, including:

providing a first substrate and forming a first electrode layer on one side of the first substrate;

A plurality of spaced dielectric pillars are formed on the side of the first electrode layer away from the first substrate. In the extending direction from the center of the first substrate to the edge of the first substrate, the dielectric pillars have The width gradually decreases;

providing a second substrate and forming a second electrode layer on one side of the second substrate;

The first substrate and the second substrate are assembled so that the first electrode layer is located between the first substrate and the second electrode layer, and the second electrode layer is located between the second electrode layer and the second electrode layer. a side of the substrate close to the first substrate;

A first liquid crystal is injected between the first electrode layer and the second electrode layer, and the first liquid crystal is filled in the gaps between the plurality of dielectric columns.
The method of making a hyperlens according to claim 10, wherein before assembling the first substrate and the second substrate, the method of making a hyperlens further includes: placing the second electrode layer away from the A first alignment film is formed on one side of the second substrate.
The method of making a hyperlens according to claim 10, further comprising:

providing a third substrate and forming a third electrode layer on one side of the third substrate;

The third substrate provided with the third electrode layer and the third substrate provided with the dielectric pillar are One substrate is used for box alignment;

Etching the third substrate to remove the third substrate;

Aligning the second substrate provided with the second electrode layer and the first substrate provided with the third electrode layer;

A second liquid crystal is injected between the second electrode layer and the third electrode layer.
The method of making a hyperlens according to claim 12, wherein before assembling the first substrate and the third substrate, the method of making a hyperlens further includes: placing the third electrode layer away from the A second alignment film is formed on one side of the third substrate.
The method of making a hyperlens according to claim 13, wherein before aligning the second substrate provided with the second electrode layer and the first substrate provided with the third electrode layer , the method of making a hyperlens further includes: forming a plurality of spaced apart isolation pillars on a side of the second electrode layer away from the second substrate.
The method of making a hyperlens according to claim 14, wherein,

Before assembling the third substrate and the first substrate, the method of making a hyperlens further includes: coating a first encapsulant on a side of the third electrode layer away from the third substrate. , wherein the first sealant is coated on the edge portion of the surface of the second alignment film away from the third substrate;

After assembling the third substrate and the first substrate, the method of making a super lens further includes: UV curing the first sealant;

Before assembling the second substrate and the first substrate, the method of making a hyperlens further includes: applying a second frame sealing glue on at least part of the surface of the isolation column at the edge portion;

After assembling the second substrate and the first substrate, the method of making a super lens further includes: UV curing the second frame sealant.
A display device, comprising the hyperlens according to any one of claims 1 to 9 or a hyperlens produced by the method for producing a hyperlens according to any one of claims 10 to 15.
The display device according to claim 15, further comprising a laser control system, the laser control system is combined with the super lens to synchronize the real-time position information and the laser information.