CN114823273A - High-sensitivity hot cathode ionization gauge with lower measurement lower limit for high-intensity magnetic field environment - Google Patents

High-sensitivity hot cathode ionization gauge with lower measurement lower limit for high-intensity magnetic field environment Download PDF

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Publication number
CN114823273A
CN114823273A CN202210494570.5A CN202210494570A CN114823273A CN 114823273 A CN114823273 A CN 114823273A CN 202210494570 A CN202210494570 A CN 202210494570A CN 114823273 A CN114823273 A CN 114823273A
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China
Prior art keywords
anode grid
magnetic field
ion collector
filament
cathode
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CN202210494570.5A
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Chinese (zh)
Inventor
王国栋
黄�俊
张航
蔡洋洋
刘霄
王娇龙
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Hefei University of Technology
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Hefei University of Technology
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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J41/00—Discharge tubes for measuring pressure of introduced gas or for detecting presence of gas; Discharge tubes for evacuation by diffusion of ions
    • H01J41/02—Discharge tubes for measuring pressure of introduced gas or for detecting presence of gas
    • H01J41/04—Discharge tubes for measuring pressure of introduced gas or for detecting presence of gas with ionisation by means of thermionic cathodes

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Abstract

The invention discloses a high-sensitivity hot cathode ionization gauge with lower measurement lower limit for a high-intensity magnetic field environment, which mainly comprises a cathode filament, an anode grid, an ion collector and a metal shell; the cathode filament is of a spiral thick filament structure and is used for resisting ampere force in a strong magnetic field; the anode grid is of a spiral structure or a cage-shaped structure, comprises a left anode grid and a right anode grid and is symmetrically arranged by taking the cathode filament as a center; the ion collector is of a metal filament structure and comprises a left ion collector and a right ion collector; the metal shell is of a cylindrical structure, and the potential of the metal shell is arranged in a grounding mode; the cathode filament, the anode grid, the ion collector and the metal shell are coaxially arranged, and when the ion collector works in a magnetic field environment, the arrangement direction of the axis of the electrode is parallel to the direction of the magnetic field. Compared with the traditional hot cathode ionization gauge used in a strong magnetic field environment, the cathode filament ionization gauge can effectively prolong the service life of the cathode filament, improve the sensitivity of the ionization gauge, and can extend the lower measurement limit to 10 ‑9 Pa。

Description

High-sensitivity hot cathode ionization gauge with lower measurement lower limit for high-intensity magnetic field environment
Technical Field
The invention belongs to the technical field of vacuum measurement, and particularly relates to a high-sensitivity hot cathode ionization gauge with lower measurement lower limit in a high-intensity magnetic field environment.
Background
With the continuous development of scientific technology, the vacuum pressure measurement technology is widely applied to the frontier fields of nuclear fusion, particle accelerators and the like, and the special magnetic field environment brings great challenges to the traditional vacuum pressure measurement. Under the magnetic field environment, the motion of charged particles in the ionization gauge is influenced by Lorentz force, the motion track of the charged particles is changed, and the ion signal sensitivity of the ionization gauge is obviously changed, so that the traditional ionization gauge is difficult to normally work under the magnetic field environment. Therefore, researchers at home and abroad carry out further optimization design based on the traditional ionization gauge so as to meet the vacuum measurement requirement in the magnetic field environment.
A fast response ionization vacuum gauge with high anti-interference capability is disclosed in a patent document with a publication number of CN101046423A, a flat plate type collector, a grid and a control electrode are adopted in the fast response ionization vacuum gauge, a vacuum gauge is arranged in a shielding case, and the vacuum gauge is connected with a control power supply through a shielding cable, so that the characteristic that a common ionization gauge cannot work in a strong magnetic field environment is overcome, and the response speed and the anti-interference capability of the gauge are improved. In the method, however, all the functional electrodes are arranged only on one side of the emission cathode, so that the utilization rate of the heat emission electrons is reduced; the electrode adopts a flat plate structure, so that the motion track of charged particles can be limited in the horizontal direction only, and the ion collector is greatly influenced by the X-ray effect, thereby limiting the sensitivity and the lower measurement limit of the vacuum gauge.
Patent document CN107527786A discloses "a carbon nanotube cathode ionization gauge with lower measurement lower limit", which uses a carbon nanotube cathode as a field emission electron source and directly extracts electrons by using the top end face of a cage-shaped anode grid, thereby improving the effective utilization rate of ionized electrons. However, the cold cathode ionization gauge has the problems of nonlinearity, instability, high pumping speed, discharge delay effect under low pressure, current and pressure discontinuity in a wide pressure range and the like; in addition, in the method, the gap between the carbon nanotube cathode and the anode grid is extremely small, the installation operation requirement is high, high-voltage operation is generally adopted, and the problems of complicated measuring line and leakage of the gauge tube can be caused by excessively high electrode voltage.
Therefore, there is a need for a new ionization gauge, which can overcome the problems caused by the high voltage of the electrode of the cold cathode ionization gauge, and at the same time, can ensure that the ionization gauge has a longer service life in a magnetic field environment, and has higher sensitivity and lower measurement limit.
Disclosure of Invention
In view of the above defects or improvement needs of the prior art, the present invention aims to provide a high-sensitivity hot cathode ionization gauge with a low measurement lower limit in a high-intensity magnetic field environment, which can effectively prolong the service life of a cathode filament and improve the sensitivity of the ionization gauge, wherein the measurement lower limit can be extended to 10 degrees in the high-intensity magnetic field environment with a magnetic field strength less than 6T -9 Pa。
The technical scheme of the invention is as follows:
the high-sensitivity hot cathode ionization gauge can be used for measuring a low lower limit in a high-intensity magnetic field environment, and is characterized by comprising the following components: the cathode lamp filament, the anode grid, the ion collector and the metal shell; wherein, the cathode filament is a spiral thick filament structure; the anode grid comprises a right anode grid and a left anode grid; the ion collector comprises a right ion collector and a left ion collector; the metal shell is of a cylindrical structure; the cathode filament, the right anode grid, the right ion collector, the metal shell, the left anode grid and the left ion collector are coaxially arranged.
Furthermore, the cathode filament is of a spiral thick filament structure and is used for resisting ampere force in a strong magnetic field, and the filament is made of tungsten or tungsten alloy.
Furthermore, the number of turns of the spiral of the cathode filament is 1.5 turns, the diameter of the filament is 0.2 mm-0.6 mm, the diameter of the spiral is 2 mm-10 mm, and the cathode filament adopts a direct current power supply or alternating current power supply mode.
Furthermore, the anode grid is of a spiral structure or a cage-shaped structure and comprises a right anode grid and a left anode grid, and the left anode grid and the right anode grid are symmetrically arranged by taking the cathode filament as a center.
Furthermore, the left end and the right end of the left anode grid and the right anode grid are of net structures, the inner diameter of the anode grid is 6 mm-16 mm, and the wire diameter of the grid net is 0.1 mm-0.4 mm.
Furthermore, the ion collector is of a metal filament structure, the diameter of the ion collector is 0.4-0.8 mm, the ion collector comprises a left ion collector and a right ion collector, the left ion collector and the right ion collector are respectively positioned on the axial lines of the left anode grid and the right anode grid, and the left ion collector and the right ion collector are symmetrically arranged by taking the cathode filament as a center.
Furthermore, the metal shell is of a cylindrical structure, is connected and installed at the middle position, is grounded in potential, and has an inner diameter of 20-40 mm.
Further, the cathode filament, the right anode grid, the right ion collector, the metal shell, the left anode grid and the left ion collector are coaxially arranged, and when the cathode filament works in a magnetic field environment, the axis arrangement direction of the cathode filament is set to be parallel to the magnetic field direction.
Compared with the prior art, the invention has the beneficial effects that:
1. the high-sensitivity hot cathode ionization gauge with low measurement lower limit for the high-intensity magnetic field environment can simultaneously meet the requirement of vacuum measurement work in the high-intensity magnetic field or non-magnetic field environment, and overcomes the defect that the common ionization gauge cannot work in the high-intensity magnetic field environment.
2. The cathode filament is of a spiral thick filament structure and is used for resisting the ampere force applied to the cathode filament in a strong magnetic field, the spiral structure enables the ampere force applied to the cathode filament to face inwards, and the service life of the cathode filament in the magnetic field environment is prolonged.
3. The anode grid is of a spiral structure or a cage-shaped structure, so that the motion trail of the cathode emitted electrons is effectively prolonged, the collision probability of the emitted electrons and gas molecules is increased, and the sensitivity of the hot cathode ionization gauge is effectively improved.
4. The ion collector adopts a metal filament structure, the area of the ion collector is reduced, the adverse effect of an X-ray effect is further reduced, and the lower measurement limit of the hot cathode ionization gauge can be extended to 10 under the strong magnetic field environment with the magnetic field intensity of less than 6T -9 Pa。
5. The invention takes the cathode filament as the center, and the anode grids and the ion collectors are symmetrically arranged on two sides, so that emitted electrons can oscillate back and forth in the ionization regions of the left part and the right part, the reciprocating motion path of the emitted electrons in the anode grid mesh space is improved, the sensitivity of the ionization gauge is further improved, the proportion of the emitted electrons returning to the cathode filament is reduced, and the utilization rate of the emitted electrons is increased.
Drawings
FIG. 1 is a schematic structural diagram of a high-sensitivity hot cathode ionization gauge with a low lower limit for measurement in a high-intensity magnetic field environment according to the present invention;
reference numbers in the figures: 1-cathode filament; 2-right anode grid; 3-right ion collector; 4-a metal housing; 5-left anode grid; 6-left ion collector.
Detailed Description
The present invention will be further described in detail with reference to the accompanying drawings, as shown in fig. 1, the present embodiment of a high-sensitivity hot cathode ionization gauge with a low measurement lower limit for a high magnetic field environment includes: a cathode filament 1, an anode grid, an ion collector and a metal shell 4; wherein, the cathode filament 1 is a spiral thick filament structure; the anode grids comprise a right anode grid 2 and a left anode grid 5; the ion collectors include a right ion collector 3 and a left ion collector 6; the metal shell 4 is of a cylindrical structure; the cathode filament 1, the right anode grid 2, the right ion collector 3, the metal shell 4, the left anode grid 5 and the left ion collector 6 are coaxially arranged.
The cathode filament 1 is a spiral thick filament structure for resisting ampere force in a strong magnetic field, the filament is made of tungsten or tungsten alloy, and doped LaB is selected in the embodiment 6 The tungsten wire of (1).
The number of turns of the spiral of the cathode filament 1 is 1.5 turns, the diameter of the filament is 0.2 mm-0.6 mm, the diameter of the spiral is 2 mm-10 mm, and the filament is heated by adopting a direct current power supply or alternating current power supply mode to provide emitted thermal electrons. In this embodiment, the diameter of the filament is 0.4mm, the diameter of the spiral is 3mm, and a direct current power supply mode is adopted.
The anode grid is a spiral structure or a cage-shaped structure, the spiral structure is selected in the embodiment, the anode grid comprises a right anode grid 2 and a left anode grid 5, the left anode grid 5 and the right anode grid 2 are symmetrically arranged by taking the cathode filament 1 as a center, high potential is introduced to the anode grid, an extraction electric field is provided for hot electrons emitted by the cathode filament 1, and the hot electrons are accelerated to increase the energy of electrons, so that the oscillation back and forth inside and outside the anode grid is realized, the motion trail of the electrons is increased, and the electrons collide with space gas molecules to generate ionization.
The left and right ends of the left anode grid 5 and the right anode grid 2 are of net structures, so that positive ions generated by ionization in the anode space are favorably repelled to an ion collecting electrode with lower potential to be received, the inner diameter of the anode grids is between 6mm and 16mm, and the inner diameter of the anode grids is 15mm in the embodiment; the wire diameter of the grid mesh is 0.1 mm-0.4 mm, and the wire diameter of the grid mesh is 0.2mm in the embodiment.
The ion collector is metal filament structure, has reduced the ion collector area, and then has reduced the adverse effect of x ray effect, has effectively prolonged the measurement lower limit, and its filament diameter is between 0.4mm ~ 0.8mm, and this embodiment is 0.6mm, and it includes left ion collector 6 and right ion collector 3, and is located the axis of left anode grid 5 and right anode grid 2 respectively, and use cathode filament 1 to be central symmetrical arrangement for collect the positive ion that is ionized out in the ionization region.
The metal shell 4 is a cylindrical structure, is connected and installed at the middle position, and the potential of the metal shell is grounded to prevent electrons from escaping, so that the electrons are kept oscillating inside and outside the anode grid, and the inner diameter is 20 mm-40 mm, 30mm in the embodiment.
In this embodiment, the cathode filament 1, the right anode grid 2, the right ion collector 3, the metal casing 4, the left anode grid 5, and the left ion collector 6 are coaxially arranged, and when the device works in a magnetic field environment, the axis arrangement direction of the device is set to be parallel to the magnetic field direction, so that emitted electrons perform reciprocating spiral motion in a direction parallel to the magnetic field under the restriction of the magnetic field.
The above description is only exemplary of the invention, and it should be understood that various changes, substitutions and alterations can be made herein without departing from the spirit and scope of the invention as defined by the appended claims.

Claims (8)

1. The high-sensitivity hot cathode ionization gauge which can be used for measuring the low lower limit in the strong magnetic field environment is characterized by comprising the following components: the cathode lamp filament (1), the anode grid, the ion collector and the metal shell (4); wherein, the cathode filament (1) is a spiral thick filament structure; the anode grid comprises a right anode grid (2) and a left anode grid (5); the ion collector comprises a right ion collector (3) and a left ion collector (6); the metal shell (4) is of a cylindrical structure; the cathode filament (1), the right anode grid (2), the right ion collector (3), the metal shell (4), the left anode grid (5) and the left ion collector (6) are coaxially arranged.
2. The high-sensitivity hot cathode ionization gauge for the high magnetic field environment with a low measurement lower limit as claimed in claim 1, wherein: the cathode filament (1) is of a spiral thick filament structure and is used for resisting ampere force in a strong magnetic field, and the filament is made of tungsten or tungsten alloy.
3. The high-sensitivity hot cathode ionization gauge for the high magnetic field environment with a low measurement lower limit as claimed in claim 2, wherein: the number of turns of the spiral of the cathode filament (1) is 1.5 turns, the diameter of the filament is 0.2-0.6 mm, the diameter of the spiral is 2-10 mm, and the cathode filament adopts a direct current power supply or alternating current power supply mode.
4. The high-sensitivity hot cathode ionization gauge for the high magnetic field environment with a low measurement lower limit as claimed in claim 1, wherein: the anode grid is of a spiral structure or a cage-shaped structure and comprises a right anode grid (2) and a left anode grid (5), and the left anode grid (5) and the right anode grid (2) are symmetrically arranged by taking the cathode filament (1) as a center.
5. The high-sensitivity hot cathode ionization gauge for the high magnetic field environment with a low measurement lower limit as claimed in claim 4, wherein: the left end and the right end of the left anode grid (5) and the right end of the right anode grid (2) are of net structures, the inner diameter of the anode grid is between 6mm and 16mm, and the wire diameter of the grid net is between 0.1mm and 0.4 mm.
6. The high-sensitivity hot cathode ionization gauge for the high magnetic field environment with a low measurement lower limit as claimed in claim 1, wherein: the ion collector is of a metal filament structure, the diameter of the ion collector is 0.4-0.8 mm, the ion collector comprises a left ion collector (6) and a right ion collector (3), the ion collector is respectively positioned on the axes of a left anode grid (5) and a right anode grid (2), and the ion collector is symmetrically arranged by taking a cathode filament (1) as a center.
7. The high-sensitivity hot cathode ionization gauge for the high magnetic field environment with a low measurement lower limit as claimed in claim 1, wherein: the metal shell (4) is of a cylindrical structure, is connected and installed in the middle, is grounded in potential, and has an inner diameter of 20-40 mm.
8. The high-sensitivity hot cathode ionization gauge for the high magnetic field environment with a low measurement lower limit as claimed in claim 1, wherein: the cathode filament (1), the right anode grid (2), the right ion collector (3), the metal shell (4), the left anode grid (5) and the left ion collector (6) are coaxially arranged, and when the cathode filament works in a magnetic field environment, the axis arrangement direction of the cathode filament is parallel to the magnetic field direction.
CN202210494570.5A 2022-05-07 2022-05-07 High-sensitivity hot cathode ionization gauge with lower measurement lower limit for high-intensity magnetic field environment Pending CN114823273A (en)

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CN202210494570.5A CN114823273A (en) 2022-05-07 2022-05-07 High-sensitivity hot cathode ionization gauge with lower measurement lower limit for high-intensity magnetic field environment

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN202210494570.5A CN114823273A (en) 2022-05-07 2022-05-07 High-sensitivity hot cathode ionization gauge with lower measurement lower limit for high-intensity magnetic field environment

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CN114823273A true CN114823273A (en) 2022-07-29

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