CN114815276A - Uniform illumination optical system adopting fly-eye lens - Google Patents

Uniform illumination optical system adopting fly-eye lens Download PDF

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Publication number
CN114815276A
CN114815276A CN202210477191.5A CN202210477191A CN114815276A CN 114815276 A CN114815276 A CN 114815276A CN 202210477191 A CN202210477191 A CN 202210477191A CN 114815276 A CN114815276 A CN 114815276A
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sub
lenses
lens
light
fly
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朱向冰
庄亚宝
薛豪
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Anhui Normal University
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Anhui Normal University
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    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
    • G02B27/09—Beam shaping, e.g. changing the cross-sectional area, not otherwise provided for
    • G02B27/0938—Using specific optical elements
    • G02B27/095—Refractive optical elements
    • G02B27/0955—Lenses
    • G02B27/0961—Lens arrays
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F21—LIGHTING
    • F21V—FUNCTIONAL FEATURES OR DETAILS OF LIGHTING DEVICES OR SYSTEMS THEREOF; STRUCTURAL COMBINATIONS OF LIGHTING DEVICES WITH OTHER ARTICLES, NOT OTHERWISE PROVIDED FOR
    • F21V13/00—Producing particular characteristics or distribution of the light emitted by means of a combination of elements specified in two or more of main groups F21V1/00 - F21V11/00
    • F21V13/02—Combinations of only two kinds of elements
    • F21V13/04—Combinations of only two kinds of elements the elements being reflectors and refractors
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B17/00—Systems with reflecting surfaces, with or without refracting elements
    • G02B17/08—Catadioptric systems
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
    • G02B27/09—Beam shaping, e.g. changing the cross-sectional area, not otherwise provided for
    • G02B27/0938—Using specific optical elements
    • G02B27/0977—Reflective elements
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F21—LIGHTING
    • F21Y—INDEXING SCHEME ASSOCIATED WITH SUBCLASSES F21K, F21L, F21S and F21V, RELATING TO THE FORM OR THE KIND OF THE LIGHT SOURCES OR OF THE COLOUR OF THE LIGHT EMITTED
    • F21Y2115/00—Light-generating elements of semiconductor light sources
    • F21Y2115/10—Light-emitting diodes [LED]

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  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Engineering & Computer Science (AREA)
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Abstract

The application discloses a uniform illumination optical system for generating rectangular light spots by using fly-eye lenses, wherein each collimated light ray only passes through one fly-eye lens; sub-lenses in the fly-eye lens are all aplanatic lenses, the sub-lenses are all provided with rectangular sections, and the length-width ratio of the rectangular sections is consistent with the length-width ratio of light spots; the shape and material of the sub-lenses are the same; one surface of each sub-lens is a plane, the other surface of each sub-lens is a low-order aspheric surface, the low-order aspheric surfaces meet a specific equation, and rectangular light spots with uniform illumination are formed in light field overlapping areas of all the sub-lenses on the target surface. The invention has the advantages of simple structure and less stray light.

Description

Uniform illumination optical system adopting fly-eye lens
Technical Field
The invention relates to the field of illumination, in particular to an illumination optical system for generating rectangular light spots with uniform illumination intensity by adopting a fly-eye lens.
Background
Uniform illumination is required in many situations. In the automatic recognition image, if the illumination light is not uniform, the recognition effect is poor, and the recognition accuracy is reduced. In the processes of photosensitive curing, integrated circuit photoetching and the like, if the illumination light is not uniform, the quality of products is reduced, and the yield is reduced.
The compound eye illumination system can realize uniform illumination, the compound eye illumination system usually uses a light source, two compound eye lenses and a focusing lens, collimated light enters the first compound eye lens, is focused on the second compound eye lens through a sub-lens in the first compound eye lens, and then irradiates on a target surface through the focusing lens, light field areas formed by the sub-lenses are mutually overlapped, and when the aperture of the sub-lens is smaller, the collimated local uniform light is dispersed to the whole target surface by the sub-lens.
A light uniformizing method using a fly-eye lens is disclosed in Yunzhu, Poplar, Panshuai and the like in optical instruments 2020, volume 42, No. 3, so that large-area uniform rectangular illumination spots are realized, and the specific method is as follows: the light emitted by the point light source is collimated by the convex lens and sequentially passes through the two fly-eye lenses in sequence to form uniform light spots on the target surface, and the distance between the two fly-eye lenses is strictly limited in the scheme.
In chinese patent application CN112462528A entitled "zoned uniform illumination optical system, projection system including the same, and electronic device", a microlens array is used to receive light beams emitted from a VCSEL zoned light source, and then a lens is used to image.
In the existing compound eye illumination system, the optical system is complex, the size is large, the assembly requirement of the system is high, and the problem that the development of a uniform illumination optical system with a simple structure is urgently needed to be solved is solved.
Disclosure of Invention
In view of at least one of the drawbacks of the prior art, the present invention provides a uniform illumination optical system using a fly-eye lens, including a point light source, a parabolic reflector, a fly-eye lens, a target surface;
the point light source is positioned on the focus of the parabolic reflector;
the parabolic reflector collimates the light emitted by the point light source; the collimated light passes through a fly-eye lens; each ray only passes through one fly-eye lens;
the target surface is vertical to the symmetry axis of the parabolic reflector;
the fly-eye lens comprises a plurality of sub-lenses;
the sub-lenses are aspherical lenses, the straight surfaces of the sub-lenses through which light passes and low-order aspheric surfaces, the straight surfaces of all the sub-lenses are in the same plane, and the plane is perpendicular to the symmetry axis of the parabolic reflector; in the plane, all the sub-lenses have rectangular projections; the collimated light rays enter the sub-lens from the flat surface of the sub-lens;
the shapes and materials of all the sub-lenses are the same, and the optical axes of all the sub-lenses are parallel to the symmetry axis of the parabolic reflector;
after the sub-lens focuses the light, the light continuously propagates to reach a target surface; the light field areas formed by the sub-lenses on the target surface are mutually overlapped, and rectangular light spots with uniform illumination are formed in the light field overlapping areas of all the sub-lenses on the target surface;
the length-width ratio of the rectangular projection of the sub-lens is consistent with the length-width ratio of the rectangular light spot on the target surface.
The low-order aspheric surface satisfies the following expression:
Figure 985973DEST_PATH_IMAGE001
wherein:
Figure 927254DEST_PATH_IMAGE002
is the rise of the sub-lens curve,
Figure 195424DEST_PATH_IMAGE003
is the curvature of the vertex of the low-order aspheric surface,
Figure 125334DEST_PATH_IMAGE004
is the radius of the vector, and the radius of the vector,
Figure 86336DEST_PATH_IMAGE005
is in the range of minus 1 to minus 5.
The invention has the beneficial effects that: (1) the illumination optical system disclosed by the application is simple, each light ray can be subjected to light uniformizing and projection on a target surface only through one fly eye lens, the cost is low, the size is small, the assembly is easy, and the production and the processing are easy; (2) the spherical aberration of the sub-lenses is eliminated, the uniformity of the rectangular light spot irradiance on the target surface is good, the light energy utilization rate is high, the shapes and materials of all the sub-lenses are the same, the processing is convenient, and the cost is reduced. (3) The light after the collimation gets into sub lens from sub lens's straight surface, and the incident angle of light is unanimous when getting into sub lens, has reduced the degree of difficulty of sub lens surface coating, and the cost is reduced, if the incident angle of light at surperficial each point is inconsistent, and the reflectivity of each point is different, accomplishes hardly all to eliminate the reverberation, and stray light is more, and this application has also reduced stray light, has improved light energy utilization.
Drawings
The accompanying drawings, which are included to provide a further understanding of the invention and are incorporated in and constitute a part of this specification, illustrate embodiments of the invention and together with the description serve to explain the principles of the invention and not to limit the invention.
Fig. 1 is a schematic view of a uniform illumination optical system in an embodiment of the present invention.
Fig. 2 is a schematic diagram of a fly-eye lens and a target surface in an embodiment of the invention.
FIG. 3 is a schematic diagram of the optical path of a single sub-lens of an embodiment of the present invention.
Fig. 4 is a radiation characteristic of a point light source of an embodiment of the present invention.
FIG. 5 is a schematic view of an embodiment of the present invention.
FIG. 6 is a schematic view of a single sub-lens of an embodiment of the present invention.
Fig. 7 is an irradiance distribution on a target plane for an embodiment of the present invention.
Fig. 8 is an irradiance distribution in the X-direction on the target surface of the embodiment.
Fig. 9 is the irradiance distribution in the Y-direction on the target surface of the example.
Fig. 10 is a sub-lens coordinate system of the embodiment.
In the figure: 1. the light source comprises a point light source, 2 a parabolic reflector, 3 a fly-eye lens, 31 a sub-lens, 311 a straight surface, 312 a low-order aspheric surface, 4 a target surface, 41 a rectangular light spot and 5 rays.
Detailed Description
In the following, only certain exemplary embodiments are briefly described. As those skilled in the art will recognize, the described embodiments may be modified in various different ways, all without departing from the spirit or scope of the present invention. Accordingly, the drawings and description are to be regarded as illustrative in nature, and not as restrictive.
In the description of the present invention, it is to be understood that: the terms "central," "longitudinal," "lateral," "length," "width," "thickness," "upper," "lower," "front," "rear," "left," "right," "vertical," "horizontal," "top," "bottom," "inner," "outer," "clockwise," "counterclockwise," and the like are used in an orientation or positional relationship indicated in the drawings for convenience and simplicity of description only and are not intended to indicate or imply that the referenced device or element must have a particular orientation or be constructed and operated in a particular orientation and is therefore not to be construed as limiting the invention. In the description of the present invention, "a plurality" means two or more unless specifically defined otherwise.
The following provides different embodiments or examples for implementing different configurations of the present invention. To simplify the disclosure of the present invention, the components and arrangements of specific examples are described below. Of course, they are merely examples and are not intended to limit the present invention. Furthermore, the present invention may repeat reference numerals and/or letters in the various examples, such repetition is for the purpose of simplicity and clarity and does not in itself dictate a relationship between the various embodiments and/or configurations discussed.
Fig. 1 and 2 are schematic diagrams of a uniform illumination optical system using a fly-eye lens in an embodiment of the present invention, in which the illumination optical system includes a point light source, a parabolic mirror, a fly-eye lens, and a target surface; the horizontal direction is a Z coordinate, the right direction is a positive direction, the vertical direction is a Y coordinate, the upward direction is a positive direction, the vertex at the lower left of the parabolic reflector is a coordinate origin, the point light source is positioned on the focus of the parabolic reflector, and the parabolic reflector collimates the light emitted by the point light source; the collimated light rays pass through fly-eye lenses, and each light ray only passes through one fly-eye lens; the target surface is perpendicular to the axis of symmetry of the parabolic mirror.
In fig. 2, the fly-eye lens projects the light beam onto the target surface, the fly-eye lens includes a plurality of sub-lenses, the sub-lenses are aspheric lenses, the optical path of a single sub-lens is as shown in fig. 3, the light passes through the flat surface and the low-order aspheric surface of the sub-lens, the collimated light enters the sub-lens from the flat surface of the sub-lens, the sub-lens focuses the light, and then the light continues to propagate to reach the target surface; the light field areas formed by the sub-lenses on the target surface are mutually overlapped, and rectangular light spots with uniform illumination are formed in the light field overlapping areas of all the sub-lenses on the target surface.
In fig. 1 and 2, the flat surfaces of all the sub-lenses are in the same plane, which is perpendicular to the axis of symmetry of the parabolic mirror; the optical axes of all the sub-lenses are parallel to the symmetry axis of the parabolic reflector; the shapes and materials of all the sub-lenses are the same, so that the processing is convenient, and the cost is reduced.
In the embodiment, the LED is used as the point light source, and when the size of the light emitting part of the light source is much smaller than the focal length of the parabolic reflector, the light source can be regarded as the point light source. The angular radiation characteristic of the LED is shown in fig. 4, referring to fig. 1, the main direction of the LED light source is upward, the light directly above the LED light source is strong, the light directed to the upper left and upper right is weak, after being reflected by the paraboloid, the light beam is strong in center and weak in periphery, and the light beam intensity distribution is not uniform before entering the fly eye lens. The fly-eye lens is arranged at the downstream of the optical path of the paraboloid reflector, the light beam with uneven intensity distribution passes through the fly-eye lens, and the light beam is uniformly irradiated on the target surface.
Referring to fig. 5, a beam of light parallel to the optical axis is irradiated to a sub-lens, and is converged by the sub-lens, if the sub-lens has no aberration, the light will converge at a focal point F ', and the light AB at the edge of the sub-lens is refracted by the sub-lens to be CF'; if the lens has spherical aberration, the sub-lens refracts the edge ray AB to F 0 ’，F 0 'to the left of the image focus F', CF 0 'Angle from optical axis is compared to ideal value (CF' from optical axis)Included angle) is large, which causes the decrease of irradiance of light at the edge of a light spot on a target surface, and the center of the illumination of the light spot on the target surface is strong and the edge is weak; the larger the aperture of the sub-lens, the more the marginal ray angle deviates and the more non-uniform the spot.
The flat surfaces of all the sub-lenses are in the same plane, and the plane is perpendicular to the symmetry axis of the parabolic reflector; in the plane, all the sub-lenses have rectangular projections; referring to fig. 6, EFGH is a flat surface of the sub-lenses, the plane of the EFGH is perpendicular to the optical axis of the sub-lenses, the optical axis of the sub-lenses is parallel to the symmetry axis of the parabolic mirror, and the plane of the EFGH is perpendicular to the symmetry axis of the parabolic mirror, all the sub-lenses have a rectangular projection in the plane, and the projection of the sub-lenses in fig. 6 on the plane is the rectangular EFGH.
Referring to fig. 1 and 2, in the embodiment of the present invention, the axis of symmetry of the parabolic mirror is along the horizontal direction, the light spot of the target surface has a length of 8m and a width of 3m, and the horizontal distance between the target surface and the fly eye lens is 25 m. The aspect ratio of the rectangular projection of the sub-lens is consistent with that of the rectangular light spot on the target surface, the aspect ratio of the rectangular light spot on the target surface is 8:3, and the aspect ratio (FG: GH) of the rectangular projection EFGH of the sub-lens in FIG. 6 is also 8: 3; the length of the sub-lens is 0.8mm, the width is 0.3mm, the thickness of the sub-lens is 3mm, and the focal length is 2.5 mm. FIG. 7 is an irradiance distribution on a target surface of an embodiment, with darker colors indicating higher illuminance; FIG. 8 is irradiance distribution in X direction on the target surface, FIG. 8 is irradiance for each point given along the horizontal line at the center of the rectangular spot of FIG. 7, with the X coordinate at the center of the rectangular spot being 0 and the spot being 8 meters long; FIG. 9 is the irradiance distribution in the Y direction on the target surface, and FIG. 9 is the irradiance given at each point along the vertical line at the center of the rectangular spot of FIG. 7, with the Y coordinate at the center point of the rectangular spot being 0 and the spot being 3 meters wide; the ordinate in fig. 8 and 9 represents irradiance, which in fig. 7, 8, 9 is in Watts/cm 2 。
In the coordinate system of fig. 10, the lower-order aspherical surface of the sub-lens satisfies the following expression:
Figure 718175DEST_PATH_IMAGE001
which isThe method comprises the following steps:
Figure 790036DEST_PATH_IMAGE002
being the rise of the sub-lens curve, representing the point of the low-order aspheric surface
Figure 433507DEST_PATH_IMAGE006
Coordinates;
Figure 175198DEST_PATH_IMAGE003
is the curvature of the low order aspheric vertex, which is at the origin of coordinates in fig. 10;
Figure 435278DEST_PATH_IMAGE004
is the sagittal diameter, point to point of the low order aspheric surface
Figure 169885DEST_PATH_IMAGE006
Distance of the shaft;
Figure 199021DEST_PATH_IMAGE005
is the coefficient of the cone, and,
Figure 111613DEST_PATH_IMAGE005
is in the range of minus 1 to minus 5,
Figure 858989DEST_PATH_IMAGE004
the larger the size of the tube is,
Figure 741495DEST_PATH_IMAGE005
to pair
Figure 761490DEST_PATH_IMAGE007
The larger the influence, the more the surface profile deviates from the spherical surface.
In an embodiment, the calculation is performed using optical design software
Figure 235196DEST_PATH_IMAGE003
And
Figure 79655DEST_PATH_IMAGE005
first, the optics of the individual sub-lenses and the object plane are establishedModel of will
Figure 31431DEST_PATH_IMAGE003
And
Figure 159793DEST_PATH_IMAGE005
setting as variable, appointing in software to eliminate spherical aberration, optimizing to obtain lens parameters for completely eliminating spherical aberration
Figure 538822DEST_PATH_IMAGE003
And
Figure 464052DEST_PATH_IMAGE005
then, a complete optical model containing the point light source, the parabolic reflector, the fly-eye lens and the target surface is established, and the parameters of all the sub-lenses are set to be obtained through the optimization
Figure 94885DEST_PATH_IMAGE003
And
Figure 953119DEST_PATH_IMAGE005
manually and/or automatically modifying software according to the illumination uniformity requirement in the light spot
Figure 893263DEST_PATH_IMAGE005
And then simulating to calculate the uniformity of the light spot, and if the uniformity of the light spot cannot meet the requirement, adjusting again
Figure 836948DEST_PATH_IMAGE005
Until the uniformity of illumination within the spot meets the requirement.
Zemax is a commonly used optical design software, and in an embodiment, using the sequential modes in Zemax, an optical model of a single sub-lens and a target surface is created as shown in FIG. 3, resulting in lens parameters that completely eliminate spherical aberration
Figure 599367DEST_PATH_IMAGE003
And
Figure 187475DEST_PATH_IMAGE005
in this case, the light rays in fig. 5 converge at point F', and then a complete optical model including a point light source, a parabolic mirror, a fly-eye lens and a target surface is built according to fig. 1 and 2 using the non-sequential pattern in Zemax, and the parameters of all the sub-lenses are set to those obtained by the optimization described above
Figure 173885DEST_PATH_IMAGE003
And
Figure 729500DEST_PATH_IMAGE005
at this time, the illuminance inside the light spot on the target surface is not uniform, and since the illuminance uniformity of the region of interest in the light spot required by the client is better than 0.9 (the illuminance minimum value is divided by the illuminance maximum value), the software needs to be manually and/or automatically modified by the client
Figure 233294DEST_PATH_IMAGE005
The value is obtained. In the examples
Figure 800542DEST_PATH_IMAGE005
Has a final value of-1.82,
Figure 426695DEST_PATH_IMAGE003
is-0.825 mm -1 ，
Figure 469606DEST_PATH_IMAGE004
Is from 0 to 0.427mm, calculated by the above formula
Figure 104987DEST_PATH_IMAGE002
. Lens parameters can also be obtained by those skilled in the art using other optical simulation software
Figure 667686DEST_PATH_IMAGE003
And
Figure 995900DEST_PATH_IMAGE005
。
generally, the power of an LED light source is limited, if the numerical value of the illumination of light spots on a target surface is required to be large, and a single LED light source cannot meet the numerical value requirement of the illumination of the target surface, a plurality of illumination optical systems are constructed according to the scheme disclosed by the application, each illumination optical system forms light spots with uniform illumination on the target surface, the light spots formed by the plurality of illumination optical systems are overlapped with each other, and in the overlapped area, the illumination can reach a large numerical value and is uniform.
According to the scheme disclosed by the application, a plurality of illumination optical systems are constructed, the plurality of illumination optical systems share one fly eye lens and/or one parabolic reflector and/or one point light source, light spots formed by the plurality of illumination optical systems are overlapped with each other, and in the overlapped area, the illumination intensity is still uniform, so that the plurality of illumination optical systems disclosed by the application are simply overlapped.
Although the present invention has been described in detail with reference to the foregoing embodiments, it will be apparent to those skilled in the art that changes may be made in the embodiments and/or equivalents thereof without departing from the spirit and scope of the invention. Any modification, equivalent replacement, or improvement made within the spirit and principle of the present invention should be included in the protection scope of the present invention.

Claims (1)

1. A kind of uniform lighting optical system using fly-eye lens, its characteristic is:
the device comprises a point light source, a parabolic reflector, a fly-eye lens and a target surface;
the point light source is positioned on the focus of the parabolic reflector;
the parabolic reflector collimates the light emitted by the point light source; the collimated light passes through a fly-eye lens; each ray only passes through one fly-eye lens;
the target surface is vertical to the symmetry axis of the parabolic reflector;
the fly-eye lens comprises a plurality of sub-lenses;
the sub-lenses are aspherical lenses, the straight surfaces of the sub-lenses through which light passes and low-order aspheric surfaces, the straight surfaces of all the sub-lenses are in the same plane, and the plane is perpendicular to the symmetry axis of the parabolic reflector; in said plane, the sub-lenses all have a rectangular projection; the collimated light rays enter the sub-lens from the flat surface of the sub-lens;
the shapes and materials of all the sub-lenses are the same, and the optical axes of all the sub-lenses are parallel to the symmetry axis of the parabolic reflector;
after the sub-lens focuses the light, the light continuously propagates to reach a target surface; the light field areas formed by the sub-lenses on the target surface are mutually overlapped, and rectangular light spots with uniform illumination are formed in the light field overlapping areas of all the sub-lenses on the target surface;
the length-width ratio of the rectangular projection of the sub-lens is consistent with the length-width ratio of the rectangular light spot on the target surface;
the low-order aspheric surface satisfies the following expression:
Figure 999233DEST_PATH_IMAGE001
wherein:
Figure 509849DEST_PATH_IMAGE002
is the rise of the sub-lens curve,
Figure 820745DEST_PATH_IMAGE003
is the curvature of the vertex of the low-order aspheric surface,
Figure 402905DEST_PATH_IMAGE004
is the radius of the vector, and the radius of the vector,
Figure 623802DEST_PATH_IMAGE005
is in the range of minus 1 to minus 5.
CN202210477191.5A 2022-05-03 2022-05-03 Uniform illumination optical system adopting fly-eye lens Withdrawn CN114815276A (en)

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