CN114800546A - Manipulator is used in chip production - Google Patents

Manipulator is used in chip production Download PDF

Info

Publication number
CN114800546A
CN114800546A CN202210231949.7A CN202210231949A CN114800546A CN 114800546 A CN114800546 A CN 114800546A CN 202210231949 A CN202210231949 A CN 202210231949A CN 114800546 A CN114800546 A CN 114800546A
Authority
CN
China
Prior art keywords
suction nozzle
wheel
chip production
subassembly
driving
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CN202210231949.7A
Other languages
Chinese (zh)
Inventor
林宜龙
刘飞
黎满标
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shenzhen Gexin Integrated Circuit Equipment Co ltd
Original Assignee
Shenzhen Gexin Integrated Circuit Equipment Co ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shenzhen Gexin Integrated Circuit Equipment Co ltd filed Critical Shenzhen Gexin Integrated Circuit Equipment Co ltd
Priority to CN202210231949.7A priority Critical patent/CN114800546A/en
Publication of CN114800546A publication Critical patent/CN114800546A/en
Pending legal-status Critical Current

Links

Images

Classifications

    • BPERFORMING OPERATIONS; TRANSPORTING
    • B25HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25JMANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J11/00Manipulators not otherwise provided for
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B25HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25JMANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J15/00Gripping heads and other end effectors
    • B25J15/06Gripping heads and other end effectors with vacuum or magnetic holding means
    • B25J15/0616Gripping heads and other end effectors with vacuum or magnetic holding means with vacuum
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B25HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25JMANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J19/00Accessories fitted to manipulators, e.g. for monitoring, for viewing; Safety devices combined with or specially adapted for use in connection with manipulators

Abstract

The invention relates to the technical field of chip production, and discloses a manipulator for chip production, which comprises a guide assembly and a driving mechanism arranged on the guide assembly, wherein the guide assembly comprises a bottom plate, a guide rail is arranged on the bottom plate, a plurality of groups of movable suction nozzle assemblies are arranged on the guide rail, the driving mechanism drives the movable suction nozzle assemblies to slide along the guide rail, at least one group of fixed suction nozzle assemblies are also arranged on the bottom plate, and the movable suction nozzle assemblies and the fixed suction nozzle assemblies respectively comprise suction nozzles capable of being adjusted in a lifting mode. According to the invention, the plurality of groups of movable suction nozzle assemblies are arranged on the guide rail, the driving mechanism drives the movable suction nozzle assemblies to slide along the guide rail, and the fixed suction nozzle assemblies are arranged, so that the mutual spacing between the plurality of groups of movable suction nozzle assemblies and the fixed suction nozzle assemblies are changed in the moving process, and thus the opening and closing of the manipulator in the X direction can be realized by one group of guide rail, and the mechanical structure is simplified. Each suction nozzle can be independently adjusted in a lifting way.

Description

Manipulator is used in chip production
Technical Field
The invention relates to the technical field of chip production, in particular to a manipulator for chip production.
Background
With the rapid development of the integrated circuit industry, the requirements of chip packaging and detection equipment are increasing. In the production and inspection of chips, it is often necessary to take and place the chips from one location to another, and there is a lot of material handling work, so that the material handling device is an important component in the automation equipment of the chips.
However, since the IC chip industry has chips of various sizes, it is necessary to be compatible with trays of different specifications when in use. Therefore, the IC chip gripper robot needs to be opened and closed in the X direction, that is, the nozzle pitch between the X directions is variable. The common chip grabbing mechanical arm adopts a plurality of groups of guide rails or guide wheels to complete the distance change in the X direction. The mode has the disadvantages of multiple parts, complex structure, high assembly difficulty and difficult maintenance. In addition, the current suction nozzle can not be adjusted independently, and the use effect is not good.
Disclosure of Invention
In order to solve the technical problems, the invention provides the manipulator for chip production, the opening and closing of the manipulator in the X direction can be realized by using a group of guide rails, the mechanical structure is simplified, and meanwhile, each suction nozzle can be independently lifted and lowered.
The technical scheme adopted by the invention for solving the technical problems is as follows:
the utility model provides a manipulator is used in chip production, is in including direction subassembly and setting actuating mechanism on the direction subassembly, the direction subassembly includes the bottom plate, be equipped with the guide rail on the bottom plate, be equipped with multiunit activity suction nozzle subassembly on the guide rail, the actuating mechanism drive activity suction nozzle subassembly is followed the guide rail slides, still be equipped with at least a set of fixed suction nozzle subassembly on the bottom plate, the activity suction nozzle subassembly reaches fixed suction nozzle subassembly all includes the suction nozzle that the liftable was adjusted.
Preferably, the driving mechanism comprises a driving motor arranged at one end of the guide assembly, an output shaft of the driving motor is provided with a driving belt wheel, the other end of the guide assembly is provided with a driven belt wheel, a synchronous belt is connected between the driving belt wheel and the driven belt wheel, and the movable suction nozzle assembly is fixed on the synchronous belt.
Preferably, driving pulley includes the first action wheel and the second action wheel of coaxial setting, first action wheel with the diameter of second action wheel is different, driven pulley includes first driven wheel and the second driven wheel of coaxial setting, first driven wheel with the diameter of second driven wheel is different, first action wheel with connect first hold-in range between the first driven wheel, the second action wheel with connect the second hold-in range between the second driven wheel, one of them part the activity suction nozzle subassembly is connected first hold-in range, another part the activity suction nozzle subassembly is connected the second hold-in range.
Preferably, the ratio of the radius of the first driving wheel to the radius of the second driving wheel is 1.5:1 to 2.5:1, and the ratio of the radius of the first driven wheel to the radius of the second driven wheel is 1.5:1 to 2.5: 1.
Preferably, each set of the movable suction nozzle assembly comprises two movable suction nozzle mechanisms which are oppositely arranged, and each set of the fixed suction nozzle assembly comprises two fixed suction nozzle mechanisms which are oppositely arranged.
Preferably, the two guide rails are arranged oppositely, a plurality of first connecting pieces are connected between the two guide rails in a sliding manner, two movable suction nozzle mechanisms of each group of movable suction nozzle assemblies are respectively arranged at two ends of the first connecting pieces, second connecting pieces are oppositely arranged at two sides of the bottom plate, and each fixed suction nozzle mechanism is fixed on one second connecting piece.
Preferably, a sliding block is arranged on the guide rail, the first connecting piece is arranged on the sliding block, and a fixing block used for connecting the driving mechanism is arranged at the upper end of the first connecting piece.
Preferably, activity suction nozzle mechanism reaches fixed suction nozzle mechanism all includes the mounting panel of vertical setting, the upper end of mounting panel is equipped with elevator motor, be equipped with the lift action wheel on elevator motor's the output shaft, the lower extreme of mounting panel is equipped with the lift follower, the lift action wheel reaches connect the lift hold-in range between the lift follower, the suction nozzle sets up on the lift hold-in range.
Preferably, be equipped with first slide rail and second sliding block on the mounting panel, sliding connection has first sliding block on the first slide rail, the connecting block has set firmly on the first sliding block, the connecting block passes through the hold-in range briquetting and connects the lift hold-in range, sliding connection has the second slide rail on the second sliding block, the one end of second slide rail is connected the suction nozzle, the other end of second slide rail is connected the connecting block.
Preferably, a spring seat is arranged on the connecting block, a guide shaft is connected between the spring seat and the connecting block, a buffer spring is sleeved on the guide shaft, a buffer connecting piece is arranged at the upper end of the second sliding rail, and the buffer connecting piece is sleeved on the guide shaft and is abutted to the lower end of the buffer spring.
Preferably, a pressure sensor for feeding back the pressure of the suction nozzle sucking the chip in real time is arranged in the buffer connecting piece.
Preferably, a heating element is provided on the suction nozzle.
Compared with the prior art, the manipulator for chip production provided by the embodiment of the invention has the beneficial effects that: through set up multiunit activity suction nozzle subassembly on the guide rail to slide along the guide rail through actuating mechanism drive activity suction nozzle subassembly, set up fixed suction nozzle subassembly simultaneously on the bottom plate, make multiunit activity suction nozzle subassembly remove the in-process interval each other and with fixed suction nozzle subassembly between the interval all change, thereby a set of guide rail can realize the manipulator at opening and shutting of X direction, has simplified mechanical structure. In addition, the movable suction nozzle assembly and the fixed suction nozzle assembly comprise suction nozzles capable of being adjusted in a lifting mode, so that each suction nozzle can be independently adjusted in a lifting mode. The invention has simple structure, good use effect and easy popularization and use.
Drawings
Fig. 1 is a schematic structural view of a robot for chip production according to the present invention.
Fig. 2 is a schematic structural view of a driving mechanism of the chip manufacturing robot according to the present invention.
Fig. 3 is a schematic structural view of a guide assembly of the robot for chip production according to the present invention.
Fig. 4 is a schematic view showing the construction of a nozzle assembly of the robot for chip production according to the present invention.
Wherein: 1-a guide component, 11-a bottom plate, 12-a guide rail, 13-a first connecting piece, 14-a second connecting piece, 15-a fixed block, 2-a driving mechanism, 21-a driving motor, 22-a first driving wheel, 23-a second driving wheel, 24-a first driven wheel, 25-a second driven wheel, 26-a first synchronous belt, 27-a second synchronous belt, 3-a movable suction nozzle component, 31-a suction nozzle, 32-a mounting plate, 33-a lifting motor, 34-a lifting synchronous belt, 35-a first sliding rail, 36-a second sliding rail, 37-a connecting piece, 38-a spring seat, 39-a buffer spring, 3 a-a buffer connecting piece, 3 b-a pressure sensor and 4-a fixed suction nozzle component.
Detailed Description
In the description of the present invention, it should be noted that, unless otherwise explicitly specified or limited, the terms "mounted," "connected," and "connected" are to be construed broadly and may be, for example, fixedly connected, detachably connected, or integrally connected; can be mechanically or electrically connected; they may be connected directly or indirectly through intervening media, or they may be interconnected between two elements. The specific meanings of the above terms in the present invention can be understood in specific cases to those skilled in the art.
The following detailed description of embodiments of the present invention is provided in connection with the accompanying drawings and examples. The following examples are intended to illustrate the invention but are not intended to limit the scope of the invention.
As shown in fig. 1 to 4, a manipulator for chip production according to a preferred embodiment of the present invention includes a guide assembly 1 and a driving mechanism 2 disposed on the guide assembly 1, where the guide assembly 1 includes a bottom plate 11, and the bottom plate 11 can be mounted on a six-axis manipulator or an XY-axis moving platform through an adaptor to implement spatial movement. Be equipped with guide rail 12 on the bottom plate 11, be equipped with multiunit activity suction nozzle subassembly 3 on the guide rail 12, actuating mechanism 2 drive activity suction nozzle subassembly 3 is followed guide rail 12 slides, still be equipped with at least a set of fixed suction nozzle subassembly 4 on the bottom plate 11, activity suction nozzle subassembly 3 reaches fixed suction nozzle subassembly 4 all includes the suction nozzle 31 of liftable regulation, suction nozzle 31 is used for absorbing the chip.
According to the manipulator for chip production based on the technical characteristics, the plurality of groups of movable suction nozzle assemblies 3 are arranged on the guide rail 12, the movable suction nozzle assemblies 3 are driven by the driving mechanism 2 to slide along the guide rail 12, meanwhile, the fixed suction nozzle assemblies 4 are arranged on the bottom plate 11, so that the distance between the groups of movable suction nozzle assemblies 3 in the moving process and the distance between the groups of movable suction nozzle assemblies 3 and the fixed suction nozzle assemblies 4 are changed, the opening and closing of the manipulator in the X direction can be realized by the group of guide rails 12, and the mechanical structure is simplified. In addition, because the movable suction nozzle assembly 3 and the fixed suction nozzle assembly 4 both include the suction nozzles 31 which can be adjusted in a lifting manner, each suction nozzle 31 can be independently adjusted in a lifting manner. The invention has simple structure, good use effect and easy popularization and use.
Referring to fig. 2, in this embodiment, the driving mechanism 2 includes a driving motor 21 disposed at one end of the bottom plate 11 of the guiding assembly 1, and a motor fixing seat may be disposed during specific installation, where the driving motor 21 is disposed on the motor fixing seat, and the motor fixing seat is fixed on the bottom plate 11. An output shaft of the driving motor 21 is provided with a driving belt wheel, the other end of the bottom plate 11 of the guide assembly 1 is provided with a driven belt wheel, and the driven belt wheel is supported by a supporting seat arranged on the bottom plate 11. A synchronous belt is connected between the driving belt wheel and the driven belt wheel, and the movable suction nozzle component 3 is fixed on the synchronous belt. When the manipulator needs to be opened and closed in the X direction, the driving motor 21 is started to drive the driving belt wheel to rotate, the synchronous belt drives the movable suction nozzle component 3 to move, and the X direction of the manipulator is opened and closed.
In addition, for improving the scope of regulation, fixed suction nozzle subassembly 4 sets up adjacent two sets of between the activity suction nozzle subassembly 3, simultaneously driving pulley includes coaxial setting's first action wheel 22 and second action wheel 23, first action wheel 22 with the diameter of second action wheel 23 is different, driven pulley includes coaxial setting's first driven wheel 24 and second driven wheel 25, first driven wheel 24 with the diameter of second driven wheel 25 is different, first action wheel 22 with connect first hold-in range 26 between the first driven wheel 24, second action wheel 23 with connect second hold-in range 27 between the second driven wheel 25, wherein partly activity suction nozzle subassembly 3 is connected first hold-in range 26, another part activity suction nozzle subassembly 3 is connected second hold-in range 27. Since the radii of the first driving pulley 22 and the second driving pulley 23 are different, but the rotational speeds thereof, i.e., the angular speeds thereof, are the same, the linear speeds of the first driving pulley 22 and the second driving pulley 23 are different, i.e., the moving speeds of the first synchronous belt 26 and the second synchronous belt 27 are different, and therefore, when the adjacent movable nozzle assemblies 3 are respectively fixed on the first synchronous belt 26 and the second synchronous belt 27, the moving speeds of the adjacent movable nozzle assemblies 3 are different, and the distances between the adjacent movable nozzle assemblies 3 and the fixed nozzle assemblies 4 are naturally different, thereby increasing the distance adjustment range. Specifically, the ratio of the radius of the first driving wheel 22 to the radius of the second driving wheel 23 is 1.5:1 to 2.5:1, preferably 2: 1. The ratio of the radius of the first driven wheel 24 to the radius of the second driven wheel 25 is 1.5:1 to 2.5:1, preferably 2: 1.
In this embodiment, each group of the movable suction nozzle assemblies 3 includes two movable suction nozzle mechanisms which are arranged oppositely, and each group of the fixed suction nozzle assemblies 4 includes two fixed suction nozzle mechanisms which are arranged oppositely. Thereby, the number of the suction nozzles 31 can be increased, and a plurality of chips can be sucked at one time. For example, three sets of the movable nozzle assemblies 3 and one set of the fixed nozzle assemblies 4 are provided, so that eight chips can be sucked at a time.
Referring to fig. 3, in this embodiment, the two guide rails 12 are disposed oppositely, a plurality of first connecting pieces 13 are slidably connected between the two guide rails 12, two movable suction nozzle mechanisms of each group of movable suction nozzle assemblies 3 are respectively disposed at two ends of the first connecting pieces 13, second connecting pieces 14 are oppositely disposed at two sides of the bottom plate 11, and each fixed suction nozzle mechanism is fixed on one of the second connecting pieces 14. During specific installation, a sliding block is arranged on the guide rail 12, and the first connecting piece 13 is arranged on the sliding block. Meanwhile, the upper end of the first connecting piece 13 is provided with a fixing block 15 for connecting the driving mechanism, and the fixing pieces on the different first connecting pieces 13 can be the same or different in structure. Specifically, the fixed block 15 is connected to the timing belt.
Referring to fig. 4, in the present embodiment, the movable suction nozzle mechanism and the fixed suction nozzle mechanism have the same structure, and both include a vertically disposed mounting plate 32, a lifting motor 33 is disposed at an upper end of the mounting plate 32, a lifting driving wheel is disposed on an output shaft of the lifting motor 33, a lifting driven wheel is disposed at a lower end of the mounting plate 32, a lifting synchronous belt 34 is connected between the lifting driving wheel and the lifting driven wheel, and the suction nozzle 31 is disposed on the lifting synchronous belt 34. When the suction nozzle 31 needs to be lifted, the lifting motor 33 is started to drive the lifting driving wheel to rotate, so that the lifting synchronous belt 34 is driven to drive the suction nozzle 31 to move up and down. Simultaneously, for guaranteeing the moving stability of suction nozzle 31, be equipped with first slide rail 35 and second sliding block on the mounting panel 32, sliding connection has first sliding block on the first slide rail 35, connecting block 37 has set firmly on the first sliding block, connecting block 37 passes through the hold-in range briquetting and connects lift hold-in range 34, sliding connection has second slide rail 36 on the second sliding block, the one end of second slide rail 36 is connected suction nozzle 31, the other end of second slide rail 36 is connected connecting block 37. When the lifting synchronous belt 34 moves, it drives the connecting block 37 and the first sliding block are along the first sliding rail 35 moves, and simultaneously the second sliding rail 36 drives the suction nozzle 31 to move along the second sliding block under the effect of the connecting block 37, the stability of the movement of the suction nozzle 31 is ensured under the dual action of the first sliding rail 35 and the second sliding rail 36. In addition, the mounting plate 32 is a plate structure, and two mounting holes are formed in the side edge of the mounting plate, and the mounting holes can be rapidly mounted with the first connecting piece 13 and the second connecting piece 14. In addition, the suction nozzle 31 is provided with a heating element, the heating element can detect the temperature of the suction nozzle 31 in real time, so that the temperature of the suction nozzle 31 can be accurately changed from 0 ℃ to 200 ℃, and the temperature of a chip cannot be changed in the taking, placing and carrying processes in a high-temperature test.
Simultaneously, during concrete setting, elevator motor 33 sets up on the motor cabinet, the driven wheel setting of going up and down is on the wheel seat, the motor cabinet with the wheel seat passes through the reinforcing plate to be connected, improves the bulk strength of suction nozzle subassembly.
In this embodiment, a spring seat 38 is arranged on the connecting block 37, a guide shaft is connected between the spring seat 38 and the connecting block 37, a buffer spring 39 is sleeved on the guide shaft, a buffer connecting piece 3a is arranged at the upper end of the second slide rail 36, and the buffer connecting piece 3a is sleeved on the guide shaft and is abutted against the lower end of the buffer spring 39. Through setting up buffer spring 39 to with buffer connector 3a with buffer spring 39's lower extreme butt, thereby make suction nozzle 31 has certain cushioning effect, avoids causing the damage to the chip at the in-process of absorbing the chip. In a specific setting, the buffer stroke of the suction nozzle 31 should be greater than 3 mm. And simultaneously, be equipped with in the buffering connecting piece 3a and be used for real-time feedback the suction nozzle 31 absorbs the pressure sensor 3b of the pressure of chip, through setting up pressure sensor 3b feeds back in real time the pressure when chip is absorbed to suction nozzle 31 can push down according to pressure sensor 3b feedback data adjustment and absorb the distance to protection chip that can be fine avoids damaging the chip in the pressure of absorption in-process.
The above description is only a preferred embodiment of the present invention, and it should be noted that, for those skilled in the art, various modifications and substitutions can be made without departing from the technical principle of the present invention, and these modifications and substitutions should also be regarded as the protection scope of the present invention.

Claims (12)

1. A manipulator is used in chip production which characterized in that: including direction subassembly and setting driving mechanism on the direction subassembly, the direction subassembly includes the bottom plate, be equipped with the guide rail on the bottom plate, be equipped with the multiunit activity suction nozzle subassembly on the guide rail, the actuating mechanism drive activity suction nozzle subassembly is followed the guide rail slides, still be equipped with at least a set of fixed suction nozzle subassembly on the bottom plate, the activity suction nozzle subassembly reaches fixed suction nozzle subassembly all includes the suction nozzle of liftable regulation.
2. A chip manufacturing robot according to claim 1, wherein: the driving mechanism comprises a driving motor arranged at one end of the guide assembly, a driving belt wheel is arranged on an output shaft of the driving motor, a driven belt wheel is arranged at the other end of the guide assembly, a synchronous belt is connected between the driving belt wheel and the driven belt wheel, and the movable suction nozzle assembly is fixed on the synchronous belt.
3. A chip production robot according to claim 2, wherein: the driving pulley includes first action wheel and the second action wheel of coaxial setting, first action wheel with the diameter of second action wheel is different, driven pulley includes first follower and the second follower of coaxial setting, first follower with the diameter of second follower is different, first action wheel with connect first hold-in range between the first follower, the second action wheel with connect the second hold-in range between the second follower, one of them part the activity suction nozzle subassembly is connected first hold-in range, another part the activity suction nozzle subassembly is connected the second hold-in range.
4. A chip production robot as defined in claim 3, wherein: the ratio of the radius of the first driving wheel to the radius of the second driving wheel is 1.5: 1-2.5: 1, and the ratio of the radius of the first driven wheel to the radius of the second driven wheel is 1.5: 1-2.5: 1.
5. A chip production robot as defined in claim 1, wherein: each group of movable suction nozzle assembly comprises two movable suction nozzle mechanisms which are arranged oppositely, and each group of fixed suction nozzle assembly comprises two fixed suction nozzle mechanisms which are arranged oppositely.
6. A chip production robot according to claim 5, wherein: the two guide rails are oppositely arranged, a plurality of first connecting pieces are slidably connected between the two guide rails, two movable suction nozzle mechanisms of each group of movable suction nozzle assembly are respectively arranged at two ends of the first connecting pieces, second connecting pieces are oppositely arranged at two sides of the bottom plate, and each fixed suction nozzle mechanism is fixed on one second connecting piece.
7. A chip production robot according to claim 6, wherein: the guide rail is provided with a sliding block, the first connecting piece is arranged on the sliding block, and the upper end of the first connecting piece is provided with a fixing block used for being connected with the driving mechanism.
8. A chip production robot according to claim 5, wherein: the movable suction nozzle mechanism reaches fixed suction nozzle mechanism all includes the mounting panel of vertical setting, the upper end of mounting panel is equipped with elevator motor, be equipped with the lift action wheel on elevator motor's the output shaft, the lower extreme of mounting panel is equipped with the lift follower, the lift action wheel reaches connect the lift hold-in range between the lift follower, the suction nozzle sets up on the lift hold-in range.
9. A chip production robot according to claim 8, wherein: be equipped with first slide rail and second sliding block on the mounting panel, sliding connection has first sliding block on the first slide rail, the connecting block has set firmly on the first sliding block, the connecting block passes through the hold-in range briquetting and connects the lift hold-in range, sliding connection has the second slide rail on the second sliding block, the one end of second slide rail is connected the suction nozzle, the other end of second slide rail is connected the connecting block.
10. A chip production robot according to claim 9, wherein: the buffer connecting piece is sleeved on the guide shaft and is abutted against the lower end of the buffer spring.
11. A chip manufacturing robot according to claim 10, wherein: and a pressure sensor for feeding back the pressure of the suction nozzle sucking the chip in real time is arranged in the buffer connecting piece.
12. A chip production robot as defined in any one of claims 1 to 11, wherein: and a heating element is arranged on the suction nozzle.
CN202210231949.7A 2022-03-09 2022-03-09 Manipulator is used in chip production Pending CN114800546A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN202210231949.7A CN114800546A (en) 2022-03-09 2022-03-09 Manipulator is used in chip production

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN202210231949.7A CN114800546A (en) 2022-03-09 2022-03-09 Manipulator is used in chip production

Publications (1)

Publication Number Publication Date
CN114800546A true CN114800546A (en) 2022-07-29

Family

ID=82528028

Family Applications (1)

Application Number Title Priority Date Filing Date
CN202210231949.7A Pending CN114800546A (en) 2022-03-09 2022-03-09 Manipulator is used in chip production

Country Status (1)

Country Link
CN (1) CN114800546A (en)

Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH07154097A (en) * 1993-11-29 1995-06-16 Matsushita Electric Ind Co Ltd Electronic parts sucking device
US20160325438A1 (en) * 2015-05-08 2016-11-10 Hongfujin Precision Electronics (Chengdu) Co., Ltd. Manipulator gripper
CN106737800A (en) * 2017-01-17 2017-05-31 深圳格兰达智能装备股份有限公司 A kind of device for automatically adjusting spacing and crawl object
CN108639749A (en) * 2018-06-20 2018-10-12 深圳市浦洛电子科技有限公司 A kind of suction nozzle automatic space adjustment mechanism
CN110076814A (en) * 2019-05-07 2019-08-02 三峡大学 A kind of displacement draws manipulator and operating method
CN110815273A (en) * 2019-11-20 2020-02-21 昆山宝锦激光拼焊有限公司 Robot sucking disc frame for plate shearing
CN113104580A (en) * 2021-03-09 2021-07-13 深圳格芯集成电路装备有限公司 Material picking and placing device
CN113618768A (en) * 2021-09-06 2021-11-09 深圳市涌固精密治具有限公司 Variable-spacing suction nozzle device

Patent Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH07154097A (en) * 1993-11-29 1995-06-16 Matsushita Electric Ind Co Ltd Electronic parts sucking device
US20160325438A1 (en) * 2015-05-08 2016-11-10 Hongfujin Precision Electronics (Chengdu) Co., Ltd. Manipulator gripper
CN106737800A (en) * 2017-01-17 2017-05-31 深圳格兰达智能装备股份有限公司 A kind of device for automatically adjusting spacing and crawl object
CN108639749A (en) * 2018-06-20 2018-10-12 深圳市浦洛电子科技有限公司 A kind of suction nozzle automatic space adjustment mechanism
CN110076814A (en) * 2019-05-07 2019-08-02 三峡大学 A kind of displacement draws manipulator and operating method
CN110815273A (en) * 2019-11-20 2020-02-21 昆山宝锦激光拼焊有限公司 Robot sucking disc frame for plate shearing
CN113104580A (en) * 2021-03-09 2021-07-13 深圳格芯集成电路装备有限公司 Material picking and placing device
CN113618768A (en) * 2021-09-06 2021-11-09 深圳市涌固精密治具有限公司 Variable-spacing suction nozzle device

Similar Documents

Publication Publication Date Title
CN107020503A (en) FMC applied to Complex Assembly
CN111716330B (en) Synchronous parallel side 6-freedom branched chain leg and 6-freedom parallel posture adjusting platform thereof
CN114193432A (en) Unloading clamping jaw mechanism and electric core assembly production line on electric core
CN112758672A (en) Lithium battery duplex carrying manipulator and application method
CN114800546A (en) Manipulator is used in chip production
CN111017546A (en) Loading and unloading device for hub
CN101459100B (en) Automatic conveying device for compact wafer
CN112453859A (en) Automatic production line device
CN114084599A (en) High-precision pitch-changing equipment, pitch-changing method thereof and pitch-changing method of pitch-changing mechanism
CN117352449A (en) Automatic assembly device for IGBT module outer frames
CN113732532B (en) Automatic production device and method
CN113526142B (en) Stack alignment apparatus and alignment method thereof
CN209973681U (en) Opening and closing mechanism of integrated circuit material grabbing and placing device
CN209901752U (en) Intelligent testing and sorting device for radio frequency microwave devices
CN207953432U (en) Rubber numerical control edge grinding machine
CN215325570U (en) Z-axis moving mechanism and material picking and placing device
CN215325504U (en) Y-axis moving mechanism and material picking and placing device
CN218319384U (en) Suction nozzle mechanism and variable-pitch suction nozzle device
CN217239429U (en) Device for rotationally taking and placing chips
CN218453735U (en) Turnover and steering conveying platform and operation equipment
CN216180519U (en) High-speed workpiece taking manipulator equipment
CN212421304U (en) Double-end mechanical arm
CN112340470A (en) Alignment machine for vertical unit bodies
CN209614052U (en) Thermoforming production line
CN219135568U (en) High-efficient conversion line that turns over moves carries conveyor

Legal Events

Date Code Title Description
PB01 Publication
PB01 Publication
SE01 Entry into force of request for substantive examination
SE01 Entry into force of request for substantive examination