CN114797518A - System of chemical supply system N2 humidification device - Google Patents

System of chemical supply system N2 humidification device Download PDF

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Publication number
CN114797518A
CN114797518A CN202210183890.9A CN202210183890A CN114797518A CN 114797518 A CN114797518 A CN 114797518A CN 202210183890 A CN202210183890 A CN 202210183890A CN 114797518 A CN114797518 A CN 114797518A
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China
Prior art keywords
pipe
tank
nitrogen
chemical
humidifying
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CN202210183890.9A
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Chinese (zh)
Inventor
李为一
孔祥振
焦明印
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Nanjing Huayitai Electronic Technology Co Ltd
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Nanjing Huayitai Electronic Technology Co Ltd
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Priority to CN202210183890.9A priority Critical patent/CN114797518A/en
Publication of CN114797518A publication Critical patent/CN114797518A/en
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    • BPERFORMING OPERATIONS; TRANSPORTING
    • B01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01JCHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J19/00Chemical, physical or physico-chemical processes in general; Their relevant apparatus
    • B01J19/14Production of inert gas mixtures; Use of inert gases in general

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  • Chemical & Material Sciences (AREA)
  • Organic Chemistry (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Control Of Non-Electrical Variables (AREA)

Abstract

The invention discloses a system of a chemical supply system N2 humidifying device, which comprises a chemical tank and a humidifying tank, wherein the chemical tank is positioned at one side of the humidifying tank, the tops of the chemical tank and the humidifying tank are both communicated with a plurality of connecting structures, and the top of the humidifying tank is communicated with a nitrogen inlet pipe, a deionized water inlet pipe and a nitrogen connecting pipe sequentially from left to right through the connecting structures. According to the invention, the nitrogen humidifier device is additionally arranged in the nitrogen supply system, nitrogen is fully humidified before being injected into the chemical tank, and concentration change caused by absorption of water in the chemical tank is avoided, the system of the N2 humidifying device of the chemical supply system has the advantages of realizing pressure balance of the nitrogen injected into the chemical tank and not influencing the concentration of a chemical liquid in the chemical tank, and in the actual use process, the nitrogen humidifying device has a simple structure and good sealing performance, has a high and low water level detection function, can realize automatic deionized water addition, realizes full-automatic operation, and saves manpower and material resources.

Description

System of chemical supply system N2 humidification device
Technical Field
The invention relates to the technical field of chemical raw material processing, in particular to a system of a N2 humidifying device of a chemical supply system.
Background
Chemical raw materials are raw materials produced by chemical methods, and include inorganic chemical products other than chemical fertilizers, inorganic pesticides, inorganic pigments, and the like, and various products manufactured mainly using polymer materials in the organic synthesis industry, and are widely used in the chemical product manufacturing industry.
Contain a large amount of chemical liquid medicines in the chemical tank, it connects chemical supply system, liquid medicine in the chemical tank is supplied into chemical supply system through the pump, because the leakproofness of chemical tank, inside liquid reduces, lead to appearing the vacuum, thereby can not effective supply, at this moment, rely on inside the nitrogen gas injection chemical tank, thereby reach chemical tank internal pressure balance, but dry nitrogen gas can absorb the water of part chemical liquid medicine, thereby lead to chemical tank liquid medicine concentration to change, influence technology, for solving above-mentioned problem, a system of chemical supply system N2 humidification device.
Disclosure of Invention
The invention aims to provide a system of a humidifying device of a chemical supply system N2, which has the advantages of realizing the pressure balance of nitrogen injected into a chemical tank and not influencing the concentration of chemical liquid in the chemical tank, and solves the problem that the dry nitrogen absorbs part of water of the chemical liquid, so that the concentration of the chemical liquid in the chemical tank is changed and the process is influenced.
In order to achieve the purpose, the invention provides the following technical scheme: a system of a chemical supply system N2 humidifying device comprises a chemical tank and a humidifying tank, wherein the chemical tank is positioned on one side of the humidifying tank, the top of the chemical tank and the top of the humidifying tank are communicated with a plurality of connecting structures, the top of the humidifying tank is communicated with a nitrogen inlet pipe, a deionized water inlet pipe and a nitrogen connecting pipe sequentially from left to right through the connecting structures, one end, away from the humidifying tank, of the nitrogen connecting pipe is communicated with the chemical tank through the connecting structures, the top of the chemical tank is communicated with a liquid medicine inlet pipe, a nitrogen discharge pipe and a deionized water discharge pipe sequentially from left to right through the connecting structures, the surfaces of the nitrogen inlet pipe, the deionized water inlet pipe, the nitrogen connecting pipe, the liquid medicine inlet pipe, the nitrogen discharge pipe and the deionized water discharge pipe are provided with automatic diaphragm valves I, the left side of the top of the humidifying tank is communicated with an upper communicating pipe, and one end, away from the humidifying tank, of the upper communicating pipe, is communicated with a liquid level pipe, the bottom of liquid level pipe leads to communicating pipe down, the one end that the liquid level pipe was kept away from to communicating pipe down is linked together with the bottom of humidification jar, the bottom intercommunication of humidification jar has the discharge structure, the center department intercommunication of chemical tank bottom has row's material pipe, the surface of arranging the material pipe is provided with automatic diaphragm valve two.
Preferably, the top of liquid level pipe one side is run through and is provided with high level sensor, the bottom of liquid level pipe one side is run through and is provided with low level sensor.
Preferably, the bottom of the nitrogen inlet pipe penetrates through the bottom of the inner cavity of the humidifying tank, and the bottoms of the nitrogen discharge pipe and the deionized water discharge pipe penetrate through the bottom of the inner cavity of the chemical tank.
Preferably, connection structure include with the connecting seat, the top of connecting seat is provided with the mount pad, the inner wall of mount pad advances pipe, deionized water respectively and advances pipe, nitrogen gas connecting pipe, liquid medicine advance pipe, nitrogen gas delivery pipe and deionized water delivery pipe fixed connection, the top of mount pad is run through and is provided with a plurality of equidistant annular distribution's fastening bolt, fastening bolt's bottom is run through to the bottom of connecting seat, fastening bolt's surface threaded connection has the nut, one side and the connecting seat contact of nut.
Preferably, the bottom fixedly connected with sealing ring of mount pad, the seal groove with sealing ring looks adaptation is seted up at the top of connecting seat, the inner chamber to the seal groove is run through to the bottom of sealing ring.
Preferably, the discharge structure includes the delivery pipe that sets up in humidification tank bottom, the fixed surface of delivery pipe is connected with the baffle, the top intercommunication of delivery pipe has the connecting thread pipe, the bottom of humidification tank be provided with the connecting thread hole of connecting thread pipe looks adaptation.
Preferably, a threaded fit is formed between the connecting threaded pipe and the connecting threaded hole.
Preferably, the liquid level pipe is circular and is made of transparent materials.
Preferably, one side cover on liquid level pipe surface is equipped with the support, one side and the humidification jar fixed connection of support.
Preferably, the automatic diaphragm valve I, the high liquid level sensor, the low liquid level sensor and the automatic diaphragm valve II are all in communication coupling with the PLC.
Compared with the prior art, the invention has the following beneficial effects:
1. according to the invention, the nitrogen humidifier device is additionally arranged in the nitrogen supply system, nitrogen is fully humidified before being injected into the chemical tank, and concentration change caused by absorption of water in the chemical tank is avoided, the system of the N2 humidifying device of the chemical supply system has the advantages of realizing pressure balance of the nitrogen injected into the chemical tank and not influencing the concentration of chemical liquid in the chemical tank, and in the actual use process, the nitrogen humidifying device has a simple structure and good sealing performance, has a high and low water level detection function, can realize automatic deionized water addition, realizes full-automatic operation, saves manpower and material resources, is convenient for a user to use, and solves the problems that dry nitrogen can absorb part of water in the chemical liquid, so that the concentration of the chemical liquid in the chemical tank is changed and the process is influenced.
2. The liquid level detection device has the advantages that the high liquid level sensor and the low liquid level sensor are matched for use, the liquid level detection effect in the liquid level pipe is achieved, data can be transmitted to the PLC when the water level is too high or too low, the pipeline connecting effect is achieved through the arrangement of the connecting structure, the height of the pipeline is limited, the sealing performance is excellent, the sealing ring and the sealing groove are matched for use, the auxiliary sealing effect is achieved, the sealing performance of the connecting structure is further improved, the drainage effect is achieved through the arrangement of the drainage structure, the support is arranged, the auxiliary fixing effect on the liquid level pipe is achieved, and the stability of the liquid level pipe is improved.
Drawings
FIG. 1 is a schematic structural view of the present invention;
FIG. 2 is an enlarged view of a portion of FIG. 1;
FIG. 3 is a partial enlarged view of B in FIG. 1 according to the present invention.
In the figure: 1. a chemical tank; 2. a humidifying tank; 3. a connecting structure; 31. a connecting seat; 32. a mounting seat; 33. fastening a bolt; 34. a nut; 35. a seal ring; 36. a sealing groove; 4. a nitrogen inlet pipe; 5. feeding deionized water into the pipe; 6. a nitrogen connecting pipe; 7. a liquid medicine inlet pipe; 8. a nitrogen gas discharge pipe; 9. a deionized water discharge pipe; 10. an automatic diaphragm valve I; 11. an upper communicating pipe; 12. a liquid level tube; 13. a lower communicating pipe; 14. a high level sensor; 15. a low level sensor; 16. a drain structure; 161. a discharge pipe; 162. a baffle plate; 163. connecting a threaded pipe; 17. a discharge pipe; 18. a second automatic diaphragm valve; 19. connecting the threaded hole; 20. and (4) a bracket.
Detailed Description
The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.
Referring to fig. 1-3, the present invention provides a technical solution: a system of a chemical supply system N2 humidifying device comprises a chemical tank 1 and a humidifying tank 2, wherein the chemical tank 1 is positioned on one side of the humidifying tank 2, the tops of the chemical tank 1 and the humidifying tank 2 are both communicated with a plurality of connecting structures 3, the top of the humidifying tank 2 is communicated with a nitrogen inlet pipe 4, a deionized water inlet pipe 5 and a nitrogen connecting pipe 6 sequentially from left to right through the connecting structures 3, one end of the nitrogen connecting pipe 6, which is far away from the humidifying tank 2, is communicated with the chemical tank 1 through the connecting structures 3, the top of the chemical tank 1 is communicated with a liquid medicine inlet pipe 7, a nitrogen discharge pipe 8 and a deionized water discharge pipe 9 sequentially from left to right through the connecting structures 3, the nitrogen inlet pipe 4, the deionized water inlet pipe 5, the nitrogen connecting pipe 6, the liquid medicine inlet pipe 7, the nitrogen discharge pipe 8 and the deionized water discharge pipe 9 are all provided with automatic diaphragm valves 10 on the surfaces, the left side of the top of the humidifying tank 2 is communicated with an upper communicating pipe 11, one end of the upper communicating pipe 11, which is far away from the humidifying tank 2, is communicated with a liquid level pipe 12, the top of one side of the liquid level pipe 12 is provided with a high liquid level sensor 14 in a penetrating way, the bottom of one side of the liquid level pipe 12 is provided with a low liquid level sensor 15 in a penetrating way, the liquid level in the liquid level pipe 12 is detected by matching the high liquid level sensor 14 with the low liquid level sensor 15, data can be transmitted to a PLC controller when the water level is too high or too low, one side of the surface of the liquid level pipe 12 is sleeved with a bracket 20, one side of the bracket 20 is fixedly connected with the humidifying tank 2, the liquid level pipe 12 is assisted and fixed by arranging the bracket 20, the stability of the liquid level pipe 12 is improved, the bottom of the liquid level pipe 12 is communicated with a lower communicating pipe 13, one end, which is far away from the liquid level pipe 12, of the lower communicating pipe 13 is communicated with the bottom of the humidifying tank 2, the bottom of the humidifying tank 2 is communicated with a discharge structure 16, discharge structure 16 includes the discharge pipe 161 who sets up in humidification jar 2 bottom, and the fixed surface of discharge pipe 161 is connected with baffle 162, and the top intercommunication of discharge pipe 161 has connecting threaded pipe 163, and humidification jar 2's bottom is provided with the connecting threaded hole 19 with connecting threaded pipe 163 looks adaptation, through discharge structure 16's setting, has played the effect of drainage, and the center department intercommunication of chemistry jar 1 bottom has row material pipe 17, and the surface of arranging material pipe 17 is provided with automatic diaphragm valve two 18.
In the invention: the bottom of the nitrogen inlet pipe 4 penetrates through the bottom of the inner cavity of the humidifying tank 2, and the bottoms of the nitrogen discharge pipe 8 and the deionized water discharge pipe 9 both penetrate through the bottom of the inner cavity of the chemical tank 1.
In the invention: connection structure 3 includes and connecting seat 31, the top of connecting seat 31 is provided with mount pad 32, the inner wall of mount pad 32 advances pipe 4 with nitrogen gas respectively, deionized water advances pipe 5, nitrogen gas connecting pipe 6, the liquid medicine advances pipe 7, nitrogen gas delivery pipe 8 and deionized water delivery pipe 9 fixed connection, the fastening bolt 33 that is provided with a plurality of equidistant annular distributions is run through at the top of mount pad 32, fastening bolt 33's bottom is run through to connecting seat 31's bottom, fastening bolt 33's surperficial threaded connection has nut 34, one side and the connecting seat 31 contact of nut 34, setting through connection structure 3, connecting tube's effect has been played, highly inject the pipeline, and possess good sealing performance.
In the invention: bottom fixedly connected with sealing ring 35 of mount pad 32, the seal groove 36 with sealing ring 35 looks adaptation is seted up at the top of connecting seat 31, and the inner chamber to seal groove 36 is run through to the bottom of sealing ring 35, uses through the cooperation of sealing ring 35 and seal groove 36, has played supplementary sealed effect, has further improved connection structure 3's sealing performance.
In the invention: the connection threaded pipe 163 and the connection threaded hole 19 form a threaded fit therebetween.
In the invention: the liquid level pipe 12 is circular and made of transparent material.
In the invention: the automatic diaphragm valve I10, the high liquid level sensor 14, the low liquid level sensor 15 and the automatic diaphragm valve II 18 are all in communication coupling with the PLC.
The working principle is as follows: when the invention is used, a user sets a nitrogen inlet on the top of the chemical tank 1, when the liquid in the chemical tank 1 is reduced, nitrogen is injected to ensure the pressure balance in the chemical tank 1, the humidifying tank 2 is arranged between the chemical tank 1 and a nitrogen supply pipeline, after the equipment is started, an automatic diaphragm valve I10 and an automatic diaphragm valve D I supply system on the surface of the deionized water inlet pipe 5 are opened to supply a proper amount of deionized water into the inner cavity of the humidifying tank 2, when the liquid level of the deionized water reaches a designed position, a high liquid level sensor 14 is arranged to send out a signal, the automatic diaphragm valve I10 on the surface of the deionized water inlet pipe 5 is controlled to be closed through a PLC (programmable logic controller), liquid injection is stopped, the automatic diaphragm valve I10 on the surface of the nitrogen inlet pipe 4 is opened, nitrogen is injected into the bottom of the inner cavity of the humidifying tank 2, the nitrogen entering the humidifying tank 2 is contacted with the deionized water for the first time, and is fully mixed with the deionized water, so that the nitrogen reaches a certain humidity, along with the continuous injection of nitrogen gas, 2 inner chamber pressure increase of humidification jar, thereby will have the nitrogen gas of humidity, nitrogen gas outlet connection to 1 import of chemical tank through 2 tops of humidification jar set up, nitrogen gas passes through nitrogen gas connecting pipe 6 from the inner chamber of humidification jar 2 and gets into the inner chamber of chemical tank 1, consequently, the moisture of dry nitrogen gas suction chemical tank 1 interior liquid medicine has been avoided, thereby cause the change of concentration, along with supply system's continuous work, deionized water in humidification jar 2 can progressively consume, when the liquid level that reaches liquid level pipe 12 reaches the early warning position, the low level sensor 15 signals of design this moment, PLC automatic control deionized water advances automatic diaphragm valve 10 on pipe 5 surfaces and opens, pour into the deionized water into once more, reach the liquid level height of design, thereby accomplish the automatic replenishment of the inside deionized water of humidification jar 2, in time stop the process of moisturizing.
It is noted that, herein, relational terms such as first and second, and the like may be used solely to distinguish one entity or action from another entity or action without necessarily requiring or implying any actual such relationship or order between such entities or actions. Also, the terms "comprises," "comprising," or any other variation thereof, are intended to cover a non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements does not include only those elements but may include other elements not expressly listed or inherent to such process, method, article, or apparatus.
Although embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that changes, modifications, substitutions and alterations can be made in these embodiments without departing from the principles and spirit of the invention, the scope of which is defined in the appended claims and their equivalents.

Claims (10)

1. A system of a chemical supply system N2 humidifying device, comprising a chemical tank (1) and a humidifying tank (2), characterized in that: the chemical tank (1) is positioned on one side of the humidifying tank (2), the top of the chemical tank (1) and the top of the humidifying tank (2) are communicated with a plurality of connecting structures (3), the top of the humidifying tank (2) is communicated with a nitrogen inlet pipe (4), a deionized water inlet pipe (5) and a nitrogen connecting pipe (6) through the connecting structures (3) from left to right, one end of the nitrogen connecting pipe (6), which is far away from the humidifying tank (2), is communicated with the chemical tank (1) through the connecting structures (3), the top of the chemical tank (1) is communicated with a liquid medicine inlet pipe (7), a nitrogen outlet pipe (8) and a deionized water outlet pipe (9) through the connecting structures (3) from left to right, the surfaces of the nitrogen inlet pipe (4), the deionized water inlet pipe (5), the nitrogen connecting pipe (6), the liquid medicine inlet pipe (7), the nitrogen outlet pipe (8) and the deionized water outlet pipe (9) are all provided with an automatic diaphragm valve (10), the left side intercommunication at humidification jar (2) top has last communicating pipe (11), the one end intercommunication of going up communicating pipe (11) and keeping away from humidification jar (2) has liquid level pipe (12), the bottom of liquid level pipe (12) leads to down communicating pipe (13), the one end that liquid level pipe (12) were kept away from to communicating pipe (13) is linked together with the bottom of humidification jar (2) down, the bottom intercommunication of humidification jar (2) has discharge structure (16), the center department intercommunication of chemistry jar (1) bottom has row material pipe (17), the surface of arranging material pipe (17) is provided with automatic diaphragm valve two (18).
2. The system of claim 1 for a chemical supply system N2 humidifying device, wherein: the top of liquid level pipe (12) one side is run through and is provided with high level sensor (14), the bottom of liquid level pipe (12) one side is run through and is provided with low level sensor (15).
3. The system of claim 1 for a chemical supply system N2 humidifying device, wherein: the bottom that nitrogen gas advanced pipe (4) runs through to the bottom of humidification jar (2) inner chamber, the bottom of nitrogen gas delivery pipe (8) and deionized water delivery pipe (9) all runs through to the bottom of chemical tank (1) inner chamber.
4. The system of claim 1 for a chemical supply system N2 humidifying device, wherein: connection structure (3) include with connecting seat (31), the top of connecting seat (31) is provided with mount pad (32), the inner wall of mount pad (32) advances pipe (4), deionized water respectively and advances pipe (5), nitrogen gas connecting pipe (6), liquid medicine advance pipe (7), nitrogen gas delivery pipe (8) and deionized water delivery pipe (9) fixed connection, the top of mount pad (32) is run through and is provided with a plurality of equidistant annular distribution's fastening bolt (33), the bottom of fastening bolt (33) is run through to the bottom of connecting seat (31), the surface threaded connection of fastening bolt (33) has nut (34), one side and connecting seat (31) contact of nut (34).
5. The system of claim 4 for a chemical supply system N2 humidifying device, wherein: the bottom fixedly connected with sealing ring (35) of mount pad (32), seal groove (36) with sealing ring (35) looks adaptation are seted up at the top of connecting seat (31), the inner chamber to seal groove (36) is run through to the bottom of sealing ring (35).
6. The system of claim 1 for a chemical supply system N2 humidifying device, wherein: discharge structure (16) include and set up in discharge pipe (161) of humidification jar (2) bottom, the fixed surface of discharge pipe (161) is connected with baffle (162), the top intercommunication of discharge pipe (161) has connection screwed pipe (163), the bottom of humidification jar (2) is provided with the connection screw hole (19) with connection screwed pipe (163) looks adaptation.
7. The system of claim 6 for a chemical supply system N2 humidifying device, wherein: the connecting threaded pipe (163) and the connecting threaded hole (19) form a threaded fit.
8. The system of claim 1 for a chemical supply system N2 humidifying device, wherein: the liquid level pipe (12) is circular and made of transparent materials.
9. The system of claim 1 for a chemical supply system N2 humidifying device, wherein: one side cover on liquid level pipe (12) surface is equipped with support (20), one side and humidification jar (2) fixed connection of support (20).
10. The system of claim 2 for a chemical supply system N2 humidifying device, wherein: and the automatic diaphragm valve I (10), the high liquid level sensor (14), the low liquid level sensor (15) and the automatic diaphragm valve II (18) are all in communication coupling with the PLC.
CN202210183890.9A 2022-02-25 2022-02-25 System of chemical supply system N2 humidification device Pending CN114797518A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN202210183890.9A CN114797518A (en) 2022-02-25 2022-02-25 System of chemical supply system N2 humidification device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN202210183890.9A CN114797518A (en) 2022-02-25 2022-02-25 System of chemical supply system N2 humidification device

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CN114797518A true CN114797518A (en) 2022-07-29

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Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN206045822U (en) * 2016-09-13 2017-03-29 冠礼控制科技(上海)有限公司 The small-sized nitrogen damping device of grinding fluid for silicon chip
CN212762852U (en) * 2020-05-25 2021-03-23 上海吉啸电子科技有限公司 Chemical grinding fluid supply system
CN214051114U (en) * 2020-11-17 2021-08-27 上海盛剑环境系统科技股份有限公司 Quantitative adding device, waste gas treatment system and chemical liquid medicine supply system

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN206045822U (en) * 2016-09-13 2017-03-29 冠礼控制科技(上海)有限公司 The small-sized nitrogen damping device of grinding fluid for silicon chip
CN212762852U (en) * 2020-05-25 2021-03-23 上海吉啸电子科技有限公司 Chemical grinding fluid supply system
CN214051114U (en) * 2020-11-17 2021-08-27 上海盛剑环境系统科技股份有限公司 Quantitative adding device, waste gas treatment system and chemical liquid medicine supply system

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