CN114777826A

CN114777826A - Air-float bearing equipment

Info

Publication number: CN114777826A
Application number: CN202210352833.9A
Authority: CN
Inventors: 陈鲁; 张龙; 方一; 张嵩
Original assignee: Shenzhen Zhongke Feice Technology Co Ltd
Current assignee: Shenzhen Zhongke Feice Technology Co Ltd
Priority date: 2022-04-01
Filing date: 2022-04-01
Publication date: 2022-07-22

Abstract

The air floatation bearing equipment disclosed by the embodiment of the invention comprises the following components: a carrier layer; the spacing layer is connected to one side of the bearing layer; the gas circuit connecting layer is connected to one side of the spacing layer, which is far away from the bearing layer; a first air pressure channel and a second air pressure channel for bearing the to-be-tested piece in an air floatation mode are formed among the bearing layer, the spacing layer and the air circuit connecting layer; the first air pressure channel and the second air pressure channel respectively penetrate through the bearing layer, the spacing layer and the air circuit connecting layer from one side of the bearing layer far away from the air circuit connecting layer in sequence and extend to one side of the air circuit connecting layer far away from the bearing layer. The air floatation bearing equipment provided by the invention is used for carrying out air floatation bearing on the piece to be tested by arranging the first air channel and the second air channel so as to improve the air floatation bearing effect of the air floatation bearing equipment.

Description

Air-float bearing equipment

Technical Field

The invention relates to the technical field of semiconductors, in particular to air floatation bearing equipment.

Background

When inspecting a workpiece (e.g., a wafer), it is required to carry the workpiece first, and air floatation carrying is a commonly used carrying method at present. The bearing device borne by the air floatation body is provided with a positive pressure air outlet area and an air exhaust area, the positive pressure air outlet area is used for blowing the piece to be tested to float, and then the air blowing the piece to be tested is discharged through the air exhaust area.

At present, most of air floatation bearing equipment on the market realizes air floatation bearing of a piece to be tested by arranging a positive pressure air floatation channel in a positive pressure air outlet area and arranging an exhaust groove in an exhaust area. However, this method may cause the gas in the central area of the air-floating carrier device to be exhausted from the edge of the carrier device along the exhaust slot, which causes different exhaust effects of the air-floating carrier device on different areas of the dut, thereby affecting the carrying effect of the air-floating carrier device on the dut. In addition, when the piece to be measured warps, the air floatation bearing effect of the air floatation bearing equipment on the piece to be measured is worse.

Disclosure of Invention

In order to solve at least some problems and disadvantages in the prior art, an embodiment of the invention discloses an air-flotation bearing device, wherein a first air channel and a second air channel are arranged for carrying out air-flotation bearing on a piece to be tested, so that the air-flotation bearing effect of the air-flotation bearing device is improved.

In one aspect, an air bearing apparatus provided in an embodiment of the present invention includes: a carrier layer; the spacing layer is connected to one side of the bearing layer; the gas circuit connecting layer is connected to one side of the spacing layer, which is far away from the bearing layer; a first air pressure channel and a second air pressure channel for bearing the to-be-tested piece in an air floatation mode are formed among the bearing layer, the spacing layer and the air path connecting layer; the first air pressure channel and the second air pressure channel sequentially penetrate through the bearing layer, the spacing layer and the air path connecting layer from one side, far away from the air path connecting layer, of the bearing layer respectively, and extend to one side, far away from the bearing layer, of the air path connecting layer.

The air floatation bearing equipment provided by the embodiment is used for respectively supplying air and exhausting air to a piece to be tested by arranging the first air channel and the second air channel so as to improve the air floatation bearing effect of the air floatation bearing equipment.

In an embodiment of the invention, the bearing layer comprises a bearing surface far away from the gas circuit connecting layer, the bearing surface is provided with a plurality of first air holes and a plurality of second air holes, one side of the bearing layer, which is adjacent to the spacing layer and opposite to the bearing surface, is also provided with a first main air pipe and a plurality of first branch air pipes, and the plurality of first branch air pipes are communicated with the plurality of second air holes in a one-to-one correspondence manner; the spacing layer and the bearing layer form a first cavity which is respectively communicated with the plurality of first air holes and the first main air pipe; the spacing layer is also provided with a first main air pipe through hole and a plurality of first branch air pipe through holes, the first main air pipe penetrates through the first main air pipe through holes, and the plurality of first branch air pipes penetrate through the first branch air pipe through holes; a second cavity is formed between the air path connecting layer and the spacing layer, and the first branch air guide pipe is communicated with the second cavity; a second main air pipe is further arranged on one side, adjacent to the spacing layer, of the air path connecting layer and is communicated with the second cavity; the gas circuit connecting layer is also provided with a second main gas pipe through hole, and the first main gas pipe penetrates through the second main gas pipe through hole; the first air pressure channel comprises a plurality of first air holes, a first cavity and a first main air guide pipe, and the second air pressure channel comprises a plurality of second air holes, a plurality of first air guide pipes, a second cavity and a second main air guide pipe.

In one embodiment of the invention, the bearing surface is circular in shape; the first air holes and the second air holes are alternately arranged on the bearing surface to form a plurality of circles of air pressure holes which are distributed in a circular shape by taking the axis of the bearing surface as a center; the multi-circle air pressure holes comprise outer circle air pressure holes close to the edge of the bearing surface and inner circle air pressure holes close to the axis of the bearing surface, and the air hole density of the outer circle air pressure holes is larger than that of the inner circle air pressure holes.

In an embodiment of the present invention, the air-bearing apparatus further includes an air path control component, where the air path control component is connected to a side of the air path connection layer away from the bearing layer; the gas path control part includes: the gas circuit connecting body is connected to the gas circuit connecting layer and is provided with a first gas circuit access channel and a second gas circuit access channel, the first gas circuit access channel is communicated with the first main gas pipe, and the second gas circuit access channel is communicated with the second main gas pipe; the first connecting pipe is communicated with the first air passage access channel; and the second connecting pipe is communicated with the second gas path access channel.

In one embodiment of the invention, said first gas access passageway comprises a first longitudinal access aperture and a first lateral access aperture, said first longitudinal access aperture communicating with said first lateral access aperture, said first longitudinal access aperture also communicating with said first main gas duct; the second air path access channel comprises a second longitudinal access hole and a second transverse access hole, the second longitudinal access hole is communicated with the second transverse access hole, and the second longitudinal access hole is also communicated with the second main air pipe; the air path control part further comprises a first pressure regulating valve and a second pressure regulating valve, the first pressure regulating valve is communicated with the first longitudinal access hole, and the second pressure regulating valve is communicated with the second longitudinal access hole. In one embodiment of the invention, the middle part of the bearing surface is provided with a mounting hole, the middle part of the spacing layer is provided with a first positioning hole which is communicated with the mounting hole and penetrates through the spacing layer, and the middle part of the gas circuit connecting layer is provided with a second positioning hole which is communicated with the first positioning hole and penetrates through the gas circuit connecting layer; the air bearing equipment further comprises a warping correction structure, and the warping correction structure comprises: the correcting disc is fixed in the mounting hole and is provided with a first correcting air pressure channel; the air guide piece is connected with the correcting disc and arranged in the first positioning hole and the second positioning hole, the air guide piece is provided with a second correcting air pressure channel, and the second correcting air pressure channel is communicated with the first correcting air pressure channel; and the gas circuit control part is connected to one side, far away from the bearing surface, of the gas circuit connecting layer, and is provided with a third correction air pressure channel communicated with the second correction air pressure channel.

In one embodiment of the present invention, the mounting hole is a circular hole; the outer side surface, adjacent to the bearing surface, of the correcting disc is circular, a plurality of axial air holes are formed in the outer side surface, a plurality of radial air holes are further formed in the correcting disc, the plurality of radial air holes are communicated with the plurality of axial air holes in a one-to-one correspondence mode, a first communication hole is formed in the inner side surface, far away from the outer side surface, of the correcting disc, the first communication hole is communicated with the plurality of radial air holes and the second correcting air pressure channel, and the plurality of axial air holes, the plurality of radial air holes and the first communication hole form the first correcting air pressure channel; the plurality of axial air holes are arranged on the outer side surface at intervals and are arranged in a circular ring shape; the plurality of radial air holes are uniformly distributed by taking the axis of the correcting disc as a center and are intersected with the first connecting through hole.

In an embodiment of the invention, the air guide piece comprises a connector and an air guide tube, one end of the connector is connected with the air guide tube, the other end of the connector is connected with the correction disc, the connector is provided with a connecting hole, the connecting hole is communicated with the first correction air pressure channel and the air guide tube, the connecting hole and the air guide tube form the second correction air pressure channel, one end of the air guide tube, far away from the connector, is connected to the air path control part, and the air guide tube is also communicated with the third correction air pressure channel.

In one embodiment of the present invention, the gas path control part includes: the gas circuit connecting body, the third connecting pipe and the conversion valve are connected between the gas circuit connecting body and the conversion valve; the air path connector is arranged on one side, far away from the bearing surface, of the air floatation bearing equipment; the gas circuit connector is provided with a first through hole and a second through hole, the first through hole is communicated with the second through hole in an intersecting manner, the gas guide pipe is inserted into the first through hole and communicated with the third correction air pressure channel, and the conversion valve is communicated with the second through hole through the connecting pipe.

In one embodiment of the present invention, air pressure control screws are respectively disposed in the first air hole and the second air hole for controlling the pressure in the first air hole and the second air hole; the outer wall of the air pressure control screw is provided with an external thread, and the air pressure control screw is connected into the first air hole and the second air hole through the external thread; and the air pressure control screw is also provided with an air pressure control hole which is communicated with the first air hole or the second air hole.

As can be seen from the above, the above technical features of the present invention may have one or more of the following advantages: the first air channel and the second air channel are arranged to be used for air supply and exhaust of the piece to be detected, and the bearing effect of the air floatation bearing equipment is improved. Furthermore, the embodiment of the invention is provided with the warpage correcting structure for correcting the warpage of the to-be-detected piece so as to improve the surface evenness of the to-be-detected piece and further improve the air floatation bearing effect of the air floatation bearing equipment on the to-be-detected piece. In addition, the embodiment of the invention is also provided with different air hole densities of the inner ring air pressure hole and the outer ring air pressure hole so as to improve the air floatation bearing effect of the air floatation bearing equipment; setting air pressure control screws in the first air hole and the second air hole so as to adjust the pressure in the first air hole and the second air hole; a pressure regulating valve is provided to more conveniently regulate the pressure in the first and second pneumatic passages. .

Drawings

In order to more clearly illustrate the technical solutions of the embodiments of the present invention, the drawings required to be used in the description of the embodiments are briefly introduced below, and it is obvious that the drawings in the description below are only some embodiments of the present invention, and it is obvious for those skilled in the art that other drawings can be obtained according to the drawings without creative efforts.

Fig. 1 is a schematic cross-sectional structure diagram of an air-bearing apparatus according to an embodiment of the present invention.

Fig. 2 is an exploded schematic view of an air bearing apparatus according to an embodiment of the present invention.

Fig. 3 is a schematic cross-sectional structure diagram of a carrier layer according to an embodiment of the invention.

Fig. 4 is a schematic cross-sectional structure diagram of a spacer layer according to an embodiment of the invention.

Fig. 5 is another schematic cross-sectional structure diagram of an air bearing apparatus according to an embodiment of the present invention.

Fig. 6 is a partially enlarged view of a portion a of fig. 5.

Fig. 7 is a partially enlarged view of a portion B in fig. 5.

Fig. 8 is a schematic cross-sectional structure diagram of the gas circuit connection layer according to an embodiment of the present invention.

Fig. 9 is a schematic cross-sectional view of an air bearing apparatus according to an embodiment of the present invention.

Fig. 10 is a partially enlarged view of portion D of fig. 9.

Fig. 11 is a partially enlarged schematic view of a portion C in fig. 5.

Fig. 12 is a schematic cross-sectional view of an air bearing apparatus according to an embodiment of the present invention.

Fig. 13 is a partially enlarged view of a portion E in fig. 12.

Fig. 14 is a schematic cross-sectional view of an air bearing apparatus according to an embodiment of the present invention.

Fig. 15 is a schematic cross-sectional view of a warp correcting structure according to an embodiment of the present invention.

Fig. 16 is a schematic cross-sectional view of an orthodontic disc provided in accordance with an embodiment of the present invention.

Fig. 17 is a schematic cross-sectional view of an air guide according to an embodiment of the present invention.

Fig. 18 is a schematic cross-sectional structural view of an air passage control component according to an embodiment of the present invention.

Fig. 19 is a schematic structural diagram of an air path control component according to an embodiment of the present invention.

Description of the main element symbols:

10 is air-float bearing equipment; 100 is a bearing layer; 110 is a bearing surface; 111 is a first air hole; 1111 is a pneumatic control screw; 1112 is a gas pressure control hole; 112 is a second air hole; 1121 is a pneumatic control screw; l122 is a gas pressure control hole; (ii) a 113 is a sixth mounting hole; 120 is a first main air pipe; 130 is a first branch air duct; 131 is a thick main gas guide pipe end; 132 is the end of a thin branch gas duct; 1321 is an external thread; numeral 133 is a third annular groove; 140 is a first mounting hole; 150 is a fourth mounting hole; 200 is a spacing layer; 210 is a first main gas pipe via hole; 220 is a first branch gas-guide tube via hole; 221 is a first chamfer; 230 is a first annular groove; 240 is a second annular groove; 250 is a second mounting hole; 260 is a first fastener via; 270 is a fifth mounting hole; 280 is a first positioning hole; 300 is a gas circuit connecting layer; 310 is a second main air duct through hole; 320 is a second main air pipe; 330 is a third mounting hole; 340 is a second fastener via; 350 is a second positioning hole; 410 is a first pneumatic channel; 420 is a second air pressure channel; 510 is a first cavity; 520 is a second cavity; 610 is a first seal; 620 is a second seal; 630 is a third seal; 710 is a first fastener; 720 is a second fastener; 730 is a third fastener; 740 is a fourth fastener; 800 is a warp-straightening structure; 810 is a correcting disc; 811 is a first corrective air pressure channel; 812 is an axial air hole; 813 is a radial air hole; 814 is a first via hole; 820 is a gas guide; 821 is a second correcting air pressure channel; 822 is a connecting head; 8221 is a connecting hole; 823 is a gas-guide tube; 830 is a gas path control component; 831 is a third straightening air pressure channel; 832 is a gas circuit connector; 8321 is a first through hole; 8322 is a second via hole; 8323 is a first air passage access passage; 8324 is a first longitudinal access hole; 8325 is a first lateral access hole; 8326 is a second gas path access passage; 8327 is a second longitudinal access hole; 8328 is a second lateral access hole; 833 is a third connecting tube; 834 is a switching valve; 835 is a first connecting pipe; 836 is a second connecting pipe; 837 is a first pressure regulating valve; 838 is a second pressure regulating valve.

Detailed Description

In order to make the objects, technical solutions and advantages of the present invention more apparent, the technical solutions of the present invention will be clearly and completely described below with reference to the specific embodiments of the present invention and the accompanying drawings. It is to be understood that the described embodiments are merely exemplary of the invention, and not restrictive of the full scope of the invention. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.

It should be noted that directional terms, such as "upper", "lower", "front", "rear", "left", "right", "inner", "outer", "side", etc., used in the embodiments of the present invention are only referring to the directions of the appended drawings. Accordingly, the directional terminology is used for purposes of illustration and understanding and is in no way limiting. For understanding and ease of description, the size and thickness of each component shown in the drawings are arbitrarily illustrated, but the present invention is not limited thereto.

It will be understood that when an element such as a layer, film, region or substrate is referred to as being "on" another element, it can be directly on the other element or intervening elements may also be present. In addition, in the description, unless explicitly described to the contrary, the word "comprise" will be understood to mean the inclusion of stated elements but not the exclusion of any other elements. Further, in the specification, "on.

Some embodiments of the invention are described in detail below with reference to the accompanying drawings. The embodiments described below and the features of the embodiments can be combined with each other without conflict.

The embodiment of the invention provides air floatation bearing equipment. The air bearing apparatus 10 is used for air bearing a workpiece, such as a wafer. Referring to fig. 1 and fig. 2, an air bearing apparatus 10 according to an embodiment of the present invention includes: a bearing layer 100, a spacing layer 200 and an air path connecting layer 300. Wherein, the spacing layer 200 is connected to one side of the bearing layer 100, and the air path connecting layer 300 is connected to one side of the spacing layer 200 far away from the bearing layer 100. Further, a first air pressure channel 410 and a second air pressure channel 420 for air bearing the to-be-tested object may be formed between the bearing layer 100, the spacing layer 200 and the air path connecting layer 300. Specifically, the first air pressure channel 410 and the second air pressure channel 420 respectively pass through the bearing layer 100, the spacer layer 200 and the air channel connecting layer 300 in sequence from the side of the bearing layer 100 far away from the air channel connecting layer 300, and extend to the side of the air channel connecting layer 300 far away from the bearing layer 100. The air pressure of the air flow in the first air pressure channel 410 is greater than the-air pressure threshold, that is, the air flow in the channel is positive pressure air, that is, the first air pressure channel 410 is, for example, a positive air pressure channel. The air pressure of the air flow in the second air pressure channel 420 is less than the air pressure threshold, i.e. the air flow in the channel is negative pressure air, i.e. the second air pressure channel 420 is for example a negative air pressure channel. The first air pressure channel 410 is configured to send out an air flow to blow and float the to-be-tested object, and the second air pressure channel 420 is configured to discharge an air flow blocked by the to-be-tested object between the air floatation carrying device 10 and the to-be-tested object, so that the air floatation carrying device 10 can perform air floatation carrying on the to-be-tested object by matching with the air flow sent out by the first air pressure channel 410.

Furthermore, a first cavity 510 is formed between the spacer layer 200 and the carrier layer 100, and a second cavity 520 is formed between the air path connecting layer 300 and the spacer layer 200. Wherein, the air pressure of the air flow in the first cavity 510 is greater than an air pressure threshold, that is, the relative pressure is a positive value; the air pressure of the air flow in the second cavity 520 is less than the air pressure threshold, i.e. the relative pressure is negative. It should be noted that the above-mentioned pressure threshold may be determined according to actual requirements, such as standard atmospheric pressure or zero.

Specifically, referring to fig. 2 and fig. 3, the supporting layer 100 may include a supporting surface 110 away from the spacing layer 200, the supporting surface 110 may be circular, and the device under test may be supported on the supporting surface 100 by air floatation. The carrying surface 110 may have a plurality of first air holes 111 and a plurality of second air holes 112. The first air holes 111 are used for sending air flow to blow and float the piece to be tested, and the second air holes 112 are used for discharging redundant air flow between the air floating bearing equipment 10 and the piece to be tested. The air flow sent by the first air hole 111 and the air flow discharged by the second air hole 112 cooperate with each other to enable the air bearing apparatus 10 to perform air bearing on the to-be-tested object. The first air holes 111 and the second air holes 112 may be alternately disposed on the bearing surface 110, for example, and form a plurality of circles of air holes distributed in a circular shape with the axis of the bearing surface 110 as the center. In this way, the air supply efficiency of the first air holes 111 is similar to the air exhaust efficiency of the second air holes 112, so that the air bearing apparatus 10 has a better air bearing effect. Further, the multi-turn air pressure holes may include, for example, an outer-turn air pressure hole near the edge of the bearing surface 110 and an inner-turn air pressure hole near the axis of the bearing surface 110, where the air hole density of the outer-turn air pressure hole is not equal to the air hole density of the inner-turn air pressure hole. Preferably, the air hole density of the outer ring of air pressure holes is greater than the air hole density of the inner ring of air pressure holes. Therefore, the air-floating bearing equipment 10 has similar air-discharging efficiency to the central area and the edge area of the to-be-detected piece, and the uneven air-floating bearing to different areas of the to-be-detected piece caused by the overlarge air-discharging efficiency difference of the air-floating bearing equipment 10 to the central area and the edge area of the to-be-detected piece is reduced. Furthermore, the aperture of the first air holes 111 may be, for example, 0.03-0.07mm, which can prevent the first air holes 111 in the central area of the supporting layer 100 from being too large to reduce the pressure of the positive pressure gas, thereby resulting in poor air floating effect; in addition, the problem that the air floatation effect is poor due to small blown air flow caused by the undersize aperture of the first air hole 111 can be avoided. Preferably, the pore size of the first air hole 111 may be, for example, 0.05 mm. The pore size of the second air holes 112 may also be in the range of 0.03-0.07mm, for example, and preferably, the pore size of the second air holes 112 may also be 0.05mm, for example.

As mentioned above, the side of the carrying layer 100 adjacent to the spacing layer 200 and opposite to the carrying surface 110 is provided with, for example, a first main air duct 120 and a plurality of first sub air ducts 130. The first main air pipe 120 may be, for example, a hollow circular pipe, and is disposed near the center of the bearing layer 100 and communicates with the first cavity 510. The plurality of first air holes 111, the first main air pipe 120 and the first cavity 510 may form, for example, a first air pressure channel 410. The first air ducts 130 may also be, for example, hollow tubular structures, and the plurality of first air ducts 130 are communicated with the plurality of second air holes 112 in a one-to-one correspondence manner. Furthermore, the edge position of the bearing layer 100 may be provided with a plurality of first mounting holes 140, for example, and the plurality of first mounting holes 140 may penetrate through the bearing layer 100, for example.

As described above, referring to fig. 4, a first main air duct through hole 210 corresponding to the first main air duct 120 is disposed on the spacing layer 200, and the first main air duct through hole 210 penetrates through the spacing layer 200. The first main gas pipe 120 passes through the first main gas pipe passing hole 210 and extends to a side of the spacer layer 200 far from the bearing layer 100. Further, referring to fig. 5 and 6, a first annular groove 230 is disposed at an edge position of one side of the spacing layer 200 adjacent to the bearing layer 100, and a second annular groove 240 is disposed at an edge position of one side of the spacing layer 200 adjacent to the air path connecting layer 300. A first seal 610 may, for example, be disposed within the first annular groove 230, the first seal 610 abutting the distance layer 200 and the load bearing layer 100; a second seal 620 may be disposed within the second annular groove 240, for example, the second seal 620 abutting the spacer layer 200 and the gas circuit connecting layer 300. For example, the first seal 610 and the second seal 620 may be, for example, sealing rings such as rubber O-rings. The first sealing element 610 and the second sealing element 620 are arranged to seal the space layer 200 and the bearing layer 100, and the space layer 200 and the air path connecting layer 300, so as to ensure the tightness of the positive pressure gas in the first air pressure channel 410 and the negative pressure gas in the second air pressure channel 420, thereby maintaining the air pressure stability of the first air pressure channel 410 and the second air pressure channel 420, and improving the air flotation effect of the air flotation bearing apparatus 10.

Furthermore, referring to fig. 4, a plurality of first air duct through holes 220 are further disposed on the spacer layer 200, and the plurality of first air duct through holes 220 respectively penetrate through the spacer layer 200. The plurality of first branch gas-guide tube through holes 220 correspond to the plurality of first branch gas-guide tubes 130 one by one, and the plurality of first branch gas-guide tubes 130 pass through the plurality of first branch gas-guide tube through holes 220, extend to one side of the spacing layer 200 far away from the bearing layer 100 and are communicated with the second cavity 520. Further, referring to fig. 7, each of the first branch gas conduits 130 may, for example, include a wide branch gas conduit end 131 and a narrow branch gas conduit end 132, the wide branch gas conduit end 131 being communicated with the narrow branch gas conduit end 132, and a step surface being formed at a junction of the wide branch gas conduit end 131 and the narrow branch gas conduit end 132. The thin branch airway end 132 may be inserted into the first airway passage hole 220 corresponding to the first airway 130, for example, and the step surface abuts against the side of the spacer layer 200 adjacent to the carrying layer 100. The step surface may for example be provided with a third annular groove 133, and a third seal 630 may for example be provided in the third annular groove 133, said third seal 630 may for example abut the distance layer 200 and the end of the wide branch gas duct end 131 close to said distance layer 200. Wherein the third seal 630 may be, for example, a sealing ring such as an O-ring rubber. The end of the thin branch airway tube end 132 away from the bearing layer 100 may, for example, be further provided with an external thread 1321, and the spacer layer 200 is further provided with a plurality of fastening nuts (not shown in the figure), which are connected to the first branch airway tube 130 through the external thread 1321 and abut against the side of the spacer layer 200 away from the bearing layer 100. The fastening nuts are arranged to facilitate sealing between the bearing layer 100 and the spacing layer 200, and can further improve the connection tightness of the air bearing device 10.

Referring to fig. 7 again, a first chamfer 221 is further disposed on a side of the first branch gas guiding tube via hole 220 away from the bearing layer 100, and the first chamfer 221 may be, for example, a tapered groove. A fourth seal (not shown) may be disposed within the first chamfer 221, for example, and may abut the first chamfer 221 and the thin branch airway end 132, for example. Preferably, the fourth seal may be a glue seal, for example, which may be formed, for example, by providing glue within the first chamfer 221. The air-floatation bearing equipment 10 can be improved in air tightness by arranging various sealing structures, and further the air-floatation bearing effect is improved.

As described above, referring to fig. 4, 5 and 6, the edge position of the spacing layer 200 may be provided with a plurality of second mounting holes 250, for example, wherein a first portion of the second mounting holes 250 may be provided in one-to-one correspondence with the plurality of first mounting holes 140, for example, and the projection centers of the plurality of first mounting holes 140 and the plurality of second mounting holes 250 on the bearing layer 100 may be located on the same circumference, for example. The plurality of first fasteners 710 may, for example, pass through the plurality of first mounting holes 140 and connect within the first portion of second mounting holes 250 corresponding to the plurality of first mounting holes 140, for example, the first fasteners 710 may, for example, be threaded fasteners. In this way, the connection between the bearing layer 100 and the spacing layer 200 can be more fastened, so as to improve the fastening strength of the air floatation bearing device 10, and further improve the air floatation bearing effect of the air floatation bearing device 10.

Referring to fig. 8, a second main air pipe through hole 310 corresponding to the first main air pipe through hole 210 is disposed on the air path connection layer 300, and the second main air pipe through hole 310 penetrates through the air path connection layer 300. The first main air pipe 120 sequentially penetrates through the first main air pipe through hole 210 and the second main air pipe through hole 310, and extends to one side of the air path connecting layer 300 away from the spacing layer 200. In addition, the air path connecting layer 300 is further provided with a second main air pipe 320, and the second main air pipe 320 is communicated with the second cavity 520. The second plurality of air holes 112, the first plurality of air ducts 130, the second main air duct 320 and the second cavity 520 may form, for example, a second air pressure passage 420. In addition, referring to fig. 9 and 10, an edge position of the air path connection layer 300 may be provided with a plurality of third mounting holes 330, for example, the plurality of third mounting holes 330 may be located at an edge position of the air path connection layer 300, for example, and the plurality of third mounting holes 330 may be provided in one-to-one correspondence with second portion second mounting holes of the plurality of second mounting holes 250, for example. The projection centers of the second mounting holes 250 and the third mounting holes 330 on the bearing layer 100 may be located on the same circumference, for example. Furthermore, the projections of the first mounting holes 140 and the third mounting holes 330 on the bearing layer 100 are spaced from each other and arranged alternately on the circumference. A plurality of second fasteners 720 may, for example, pass through the plurality of third mounting holes 330 and be coupled within the second portion of second mounting holes 250 corresponding to the plurality of third mounting holes 330, for example, the plurality of second fasteners 720 may, for example, be threaded fasteners. Thus, the connection between the spacing layer 200 and the air path connection layer 300 can be more fastened, so as to improve the fastening strength of the air bearing device 10, and further improve the air bearing effect of the air bearing device 10.

In an embodiment of the present embodiment, referring to fig. 5 and 11, for example, a pneumatic control screw 1111 and a pneumatic control screw 1121 may be respectively disposed in the first air hole 111 and the second air hole 112 for controlling and adjusting the pressure in the first air hole 111 and the second air hole 112. Specifically, referring to fig. 11, inner walls of the first air hole 111 and the second air hole 112 are respectively provided with inner threads, outer walls of the air pressure control screw 1111 and the air pressure control screw 1121 may be provided with outer threads, for example, and the air pressure control screw 1111 and the air pressure control screw 1121 may be coupled inside the first air hole 111 and the second air hole 112 through the outer threads and the inner threads, for example. Further, a pneumatic control hole 1112 is disposed on the pneumatic control screw 1111, and the pneumatic control hole 1112 communicates the first air hole 111 and the first cavity 510. An air pressure control hole 1122 is formed in the air pressure control screw 1121, and the air pressure control hole 1122 is communicated with the second air hole 112 and the second cavity 520. The pressure within the first and

second air vents

111, 112 may be adjusted, for example, by adjusting the pore size of the air

pressure control apertures

1112 and 1122.

In another specific embodiment of the present embodiment, referring to fig. 12 and fig. 13, a plurality of fourth mounting holes 150 are further disposed on a side of the bearing layer 100 away from the bearing surface 110, and a first fastener through hole 260 corresponding to the plurality of fourth mounting holes 150 may be disposed on the spacing layer 200, for example. The plurality of third fasteners 730 pass through the plurality of first fastener through holes 260 and are connected in the plurality of fourth mounting holes 150, respectively. For example, the third fastener 730 may be, for example, a fastening screw. Referring to fig. 13 again, a plurality of fifth mounting holes 270 may be further disposed on a side of the spacing layer 200 away from the bearing surface 110, for example, and a plurality of second fastener through holes 340 corresponding to the fifth mounting holes 270 are further disposed on the air path connecting layer 300. The plurality of fourth fasteners 740 pass through the plurality of second fastener through holes 340, respectively, and are connected in the plurality of fifth mounting holes 270. For example, the fourth fastener 740 may also be a fastening screw, for example. The provision of the plurality of third fastening members 730 and the plurality of fourth fastening members 740 is advantageous to increase the strength of the load-bearing device 10, thereby improving the fastening strength of the load-bearing device 10.

In summary, the air floatation bearing device 10 provided in the embodiment of the present invention is provided with the first air channel and the second air channel to perform air floatation bearing on the to-be-tested piece. Specifically, the embodiment of the invention provides a specific air path structure including a first air hole and a second air hole for carrying out air floatation on the piece to be tested, so as to improve the bearing effect of the air floatation bearing equipment. On one hand, the embodiment of the invention is provided with a plurality of fasteners for fastening and connecting the bearing layer, the spacing layer and the air path connecting layer so as to improve the fastening strength and the air floatation bearing effect of the air floatation bearing equipment; on the other hand, the embodiment of the invention is provided with a plurality of sealing elements for sealing the gas path connecting channel so as to improve the air tightness of the air floatation bearing equipment, thereby improving the air floatation bearing effect of the air floatation bearing equipment. In addition, the embodiment of the invention is also provided with different air hole densities of the inner ring air pressure hole and the outer ring air pressure hole so as to improve the air floatation bearing effect of the air floatation bearing equipment; the pore sizes of the first air holes and the second air holes are set to improve the air floatation bearing effect; and air pressure adjusting screws are arranged in the first air hole and the second air hole so as to adjust the pressure in the first air hole and the second air hole.

In a specific implementation of this embodiment, referring to fig. 14, the air bearing apparatus 10 may further include a warpage-correcting structure 800. The warpage correction structure 800 is used for correcting warpage of a to-be-tested piece when the to-be-tested piece has a warpage condition. In short, the warpage condition of the to-be-detected piece can include, for example, a protruded warpage condition in the middle of the to-be-detected piece and a recessed warpage condition in the middle of the to-be-detected piece. When the middle part of the piece to be detected is raised and warped, the warping correction component 800 adsorbs the middle part of the piece to be detected; when the piece to be detected has the middle sunken buckling condition, the buckling correction part 800 supplies air to the middle sunken part of the piece to be detected, so that the buckling correction is completed, the surface flatness of the piece to be detected is improved, and the detection precision of the piece to be detected is improved.

Specifically, referring to fig. 3, 4 and 8, the middle portion of the carrying surface 110 may be provided with, for example, a sixth mounting hole 113, the middle portion of the spacing layer 200 may be provided with, for example, a first positioning hole 280 communicating with the sixth mounting hole 113 and penetrating through the spacing layer 200, and the middle portion of the air path connecting layer 300 is provided with a second positioning hole 350 communicating with the first positioning hole 280 and penetrating through the air path connecting layer 300. Further, referring to fig. 15, the warp-correcting structure 800 may, for example, include a correcting disk 810, an air guide 820, and an air passage control member 830. The leveling disk 810 may be fixedly disposed within the sixth mounting hole 113, for example, and the leveling disk 810 is provided with a first leveling air pressure channel 811. The air guide 820 is connected to a side of the correcting disc 810 far from the bearing surface 110 and disposed in the first positioning hole 280 and the second positioning hole 350. The air guide 820 is provided with a second correcting air pressure channel 821, and the second correcting air pressure channel 821 is communicated with the first correcting air pressure channel 811. The air path control component 830 is disposed on a side of the air path connecting layer 300 away from the bearing surface 110, and is provided with a third correcting air pressure channel 831, and the third correcting air pressure channel 831 is communicated with the second correcting air pressure channel 821. The first correcting air pressure channel 811, the second correcting air pressure channel 821 and the third correcting air pressure channel 831 are matched with each other, so that the air floatation bearing device 10 can correct the warping condition of the to-be-detected piece.

Specifically, referring to fig. 16, the outer side surface of the correcting disc 810 adjacent to the bearing surface 110 is circular, and a plurality of axial air holes 812 are disposed on the outer side surface of the correcting disc 810, for example, the plurality of axial air holes 812 are used for correcting the warping condition of the dut. The axial air holes 812 are spaced apart from each other on the outer side of the correction disc 810 and are arranged in a circular shape. Thus, the air supply efficiency or the adsorption efficiency of the plurality of axial air holes 812 are similar, and the effect of correcting the warping condition of the workpiece is improved. The orthotic disc 810 is also provided with a plurality of radial air holes 813, and the plurality of radial air holes 813 may communicate with the plurality of axial air holes 812, for example, in a one-to-one correspondence. A first communicating hole 814 is formed in the center of one side of the correcting disc 810, which is far away from the outer side surface of the correcting disc 810, and the first communicating hole 814 communicates the plurality of radial air holes 813 and the second correcting air pressure passage 821. The plurality of radial air holes 813 are uniformly distributed around the axis of the correcting disk 810 and intersect with the first communication hole 814, and the plurality of radial air holes 813 are used for communicating the plurality of axial air holes 812 and the first communication hole 814. The plurality of axial air holes 812, the plurality of radial air holes 813, and the first communication hole 814 may, for example, form the first corrective air pressure passageway 811.

Referring to fig. 17, the air guide 820 may, for example, include a connector 822 and an air guide tube 823, wherein one end of the connector 822 is connected to a side of the leveling plate 810 away from the bearing surface 110, and the other end of the connector 822 is connected to the air guide tube 823. Specifically, the connecting head 822 may be, for example, a cylinder and is correspondingly disposed at the first through hole 814. The connecting head 822 may be, for example, provided with a connecting hole 8221, and the connecting hole 8221 may be, for example, disposed at an axis of the connecting head 822, and penetrates through the connecting head 822 and communicates with the air duct 823. The connecting hole 8221 is used to connect the first corrective air pressure channel 811 and the air duct 823, and the connecting hole 8221 and the air duct 823 may form a second corrective air pressure channel 821, for example. The air duct 823 may be, for example, a hollow cylinder, and one end of the air duct 823, which is far away from the connector 822, penetrates through the first positioning hole 280 and the second positioning hole 350, and is connected to the air path control unit 830.

As mentioned above, referring to fig. 18, the air path control component 830 may include: air path connectors 832. The air path connector 832 is disposed on the side of the air path connector layer 300 away from the spacer layer 100. The air path connector 832 is provided with a first through hole 8321 and a second through hole 8322, the first through hole 8321 and the second through hole 8322 are communicated in an intersecting manner, wherein one end of the air duct 823, which is far away from the connector 822, penetrates through the first positioning hole 280 and the second positioning hole 350 and extends into the first through hole 8321, so as to be connected to the air path control component 830. The first through hole 8321 may, for example, extend through the air path connector 832, and an end of the first through hole 8321 away from the air duct 823 is communicated with an external air source. The first through hole 8321 and the second through hole 8322 may form a third correcting air pressure channel 831, for example, and an end of the air guide tube 823 far away from the connector 822 extends into the first through hole 8321 and communicates with the third correcting air pressure channel 831, that is, the first correcting air pressure channel 811 may communicate with the third correcting air pressure channel 831 through the second correcting air pressure channel 821, for example.

Further, referring to fig. 19, the pneumatic control unit 830 may further include a third connection pipe 833 and a switching valve 834, for example. One end of the third connection pipe 833 may be connected into the second through hole 8322, for example, and specifically, the third connection pipe 833 may be an elbow connection part, for example. A switching valve 834 may be, for example, disposed at an end of the third connection pipe 833 away from the second through hole 8322, and the switching valve 834 may communicate with the second through hole 8322 through the third connection pipe 833, for example, that the switching valve 834 may communicate with the third correction air pressure passage 831 through the third connection pipe 833, for example. In addition, the end of the switching valve 834 far from the third connecting pipe 833 can be connected with a positive pressure air source or a negative pressure air source, for example. The conversion valve 834 may be configured to convert the third correction air pressure channel 831 to communicate with the positive pressure air source or the negative pressure air source, so that the plurality of axial air holes 812 on the correction disc 810 can supply air or absorb air, and the air floatation carrying device 10 can correct the warpage of the to-be-detected part.

As mentioned above, referring again to fig. 18, the air passage connector 832 may be provided with a first air passage access passage 8323 and a second air passage access passage 8326, for example. The first air passage access passage 8323 may be disposed corresponding to the second main air pipe through hole 310, for example, and the first air passage access passage 8323 may communicate with the first main air pipe 120, for example. Specifically, the first gas passage access passage 8323 includes a first longitudinal access hole 8324 and a first transverse access hole 8325, the first longitudinal access hole 8324 communicates with the first transverse access hole 8325 and the first main gas pipe 120, and the first transverse access hole 8325 may be communicated to an external positive pressure gas source, for example. As mentioned above, the second air path access passage 8326 may be disposed corresponding to the second main air pipe 320, for example, and the second air path access passage 8326 may communicate with the second main air pipe 320, for example. Specifically, the second air passage access passage 8326 comprises a second longitudinal access hole 8327 and a second transverse access hole 8328, the second longitudinal access hole 8327 is communicated with the second transverse access hole 8328 and the second main air pipe 320, and the second transverse access hole 8328 can be communicated with an external negative pressure air source, for example.

Still referring to fig. 19, the airway control component 830 may, for example, include a first connecting tube 835 and a second connecting tube 836. First connector 835 can have one end in communication with, for example, the first gas access passage 8323 and the other end of first connector 835 can be in communication with, for example, an external positive pressure gas source. Specifically, one end of the first connection pipe 835 may communicate with the first transverse access hole 8325, for example, and the first main air pipe 120 may communicate with the first connection pipe 835 through the first longitudinal access hole 8324, for example. One end of the second connection tube 836 may be connected to the second air passage access channel 8326, and the other end of the second connection tube 836 may be connected to an external negative pressure source. Specifically, one end of the second connection pipe 836 may communicate with the second transverse access hole 8328, for example, and the second main air pipe 320 may communicate with the second connection pipe 836 through the second longitudinal access hole 8327, for example.

In one specific implementation of the present embodiment, referring to fig. 18, the air path control component 830 may further include a first pressure regulating valve 837 and a second pressure regulating valve 838, for example. A first pressure regulating valve 837 communicates with the first longitudinal access port 8324 for controlling the pressure in the first pneumatic passage 410, and a second pressure regulating valve 838 communicates with the second longitudinal access port 8327 for controlling the pressure in the second pneumatic passage 420.

In summary, the air floatation bearing device 10 provided in the embodiment of the present invention is provided with the first air passage and the second air passage for carrying out air floatation bearing on the to-be-tested piece. On one hand, the embodiment of the invention is provided with a plurality of fasteners for fastening and connecting the bearing layer, the spacing layer and the air path connecting layer so as to improve the fastening strength and the air floatation bearing effect of the air floatation bearing equipment; on the other hand, the embodiment of the invention is provided with a plurality of sealing elements for sealing the gas path connecting channel so as to improve the air tightness of the air floatation bearing equipment, and further improve the air floatation bearing effect of the air floatation bearing equipment. Furthermore, the embodiment of the invention is provided with the warpage correcting structure for correcting the warpage of the to-be-detected piece so as to improve the surface flatness of the to-be-detected piece and further improve the air floatation bearing effect of the air floatation bearing equipment on the to-be-detected piece. In addition, the embodiment of the invention is also provided with different air hole densities of the inner ring air pressure hole and the outer ring air pressure hole so as to improve the air floatation bearing effect of the air floatation bearing equipment; the proper aperture sizes of the first air holes and the second air holes are set to improve the air floatation bearing effect; and air pressure adjusting screws are arranged in the first air hole and the second air hole so as to adjust the pressure in the first air hole and the second air hole.

It should be understood that the foregoing embodiments are merely exemplary of the present invention, and the technical solutions of the embodiments can be arbitrarily combined and collocated without conflict between technical features and structural contradictions, which do not violate the purpose of the present invention.

Finally, it should be noted that: the above examples are only intended to illustrate the technical solution of the present invention, but not to limit it; although the present invention has been described in detail with reference to the foregoing embodiments, it should be understood by those of ordinary skill in the art that: the technical solutions described in the foregoing embodiments may still be modified, or some technical features may be equivalently replaced; and such modifications or substitutions do not depart from the spirit and scope of the corresponding technical solutions of the embodiments of the present invention.

Claims

1. An air bearing apparatus, comprising:

a carrier layer;

the spacing layer is connected to one side of the bearing layer;

the gas path connecting layer is connected to one side of the spacing layer, which is far away from the bearing layer;

a first air pressure channel and a second air pressure channel for bearing the to-be-tested piece in an air floatation mode are formed among the bearing layer, the spacing layer and the air path connecting layer; the first air pressure channel and the second air pressure channel sequentially penetrate through the bearing layer, the spacing layer and the air circuit connecting layer from one side, far away from the air circuit connecting layer, of the bearing layer respectively, and extend to one side, far away from the bearing layer, of the air circuit connecting layer.

2. The air bearing apparatus of claim 1,

the bearing layer comprises a bearing surface far away from the gas circuit connecting layer, a plurality of first air holes and a plurality of second air holes are formed in the bearing surface, a first main air pipe and a plurality of first air branch pipes are further arranged on one side, close to the spacing layer and opposite to the bearing surface, of the bearing layer, and the plurality of first air branch pipes are communicated with the plurality of second air holes in a one-to-one correspondence mode;

the spacing layer and the bearing layer form a first cavity which is respectively communicated with the plurality of first air holes and the first main air pipe; the spacing layer is also provided with a first main air pipe through hole and a plurality of first branch air pipe through holes, the first main air pipe penetrates through the first main air pipe through holes, and the plurality of first branch air pipes penetrate through the first branch air pipe through holes;

a second cavity is formed between the air path connecting layer and the spacing layer, and the first branch air guide pipe is communicated with the second cavity; a second main air pipe is further arranged on one side, adjacent to the spacing layer, of the air path connecting layer and is communicated with the second cavity; the gas circuit connecting layer is also provided with a second main gas guide pipe through hole, and the first main gas guide pipe penetrates through the second main gas guide pipe through hole;

the first air pressure channel comprises a plurality of first air holes, a first cavity and a first main air pipe, and the second air pressure channel comprises a plurality of second air holes, a plurality of first branch air pipes, a second cavity and a second main air pipe.

3. The air bearing apparatus of claim 2, wherein the bearing surface is circular in shape; the first air holes and the second air holes are alternately arranged on the bearing surface to form a plurality of circles of air pressure holes which are distributed in a circular shape by taking the axis of the bearing surface as a center; the multi-circle air pressure holes comprise outer circle air pressure holes close to the edge of the bearing surface and inner circle air pressure holes close to the axis of the bearing surface, and the air hole density of the outer circle air pressure holes is larger than that of the inner circle air pressure holes.

4. The air-bearing apparatus as claimed in claim 2, further comprising an air path control component connected to a side of the air path connection layer away from the bearing layer; the gas circuit control part includes:

the gas circuit connecting body is connected to the gas circuit connecting layer and is provided with a first gas circuit access channel and a second gas circuit access channel, the first gas circuit access channel is communicated with the first main gas guide pipe, and the second gas circuit access channel is communicated with the second main gas guide pipe;

the first connecting pipe is communicated with the first air passage access channel; and

and the second connecting pipe is communicated with the second gas path access channel.

5. The air bearing apparatus of claim 4, wherein said first air passage access passage comprises a first longitudinal access aperture and a first lateral access aperture, said first longitudinal access aperture communicating with said first lateral access aperture, said first longitudinal access aperture further communicating with said first main air duct;

the second air path access channel comprises a second longitudinal access hole and a second transverse access hole, the second longitudinal access hole is communicated with the second transverse access hole, and the second longitudinal access hole is also communicated with the second main air pipe;

the gas path control part further comprises a first pressure regulating valve and a second pressure regulating valve, the first pressure regulating valve is communicated with the first longitudinal access hole, and the second pressure regulating valve is communicated with the second longitudinal access hole.

6. The air bearing device as claimed in claim 1, wherein a mounting hole is formed in the middle of the bearing surface, a first positioning hole communicated with the mounting hole and penetrating through the spacer layer is formed in the middle of the spacer layer, and a second positioning hole communicated with the first positioning hole and penetrating through the air path connecting layer is formed in the middle of the air path connecting layer;

the air bearing equipment further comprises a warping correction structure, and the warping correction structure comprises:

the correcting disc is fixed in the mounting hole and is provided with a first correcting air pressure channel;

the air guide piece is connected with the correcting disc and arranged in the first positioning hole and the second positioning hole, the air guide piece is provided with a second correcting air pressure channel, and the second correcting air pressure channel is communicated with the first correcting air pressure channel; and

the gas circuit control part is connected to one side, away from the bearing surface, of the gas circuit connecting layer, and is provided with a third correction air pressure channel communicated with the second correction air pressure channel.

7. The air bearing apparatus of claim 6, wherein said mounting holes are round holes; the outer side surface, adjacent to the bearing surface, of the correcting disc is circular, a plurality of axial air holes are formed in the outer side surface, a plurality of radial air holes are further formed in the correcting disc, the plurality of radial air holes are communicated with the plurality of axial air holes in a one-to-one correspondence mode, a first communication hole is formed in the inner side surface, far away from the outer side surface, of the correcting disc, the first communication hole is communicated with the plurality of radial air holes and the second correcting air pressure channel, and the plurality of axial air holes, the plurality of radial air holes and the first communication hole form the first correcting air pressure channel; the plurality of axial air holes are arranged on the outer side surface at intervals and are arranged in a circular ring shape; the plurality of radial air holes are uniformly distributed by taking the axis of the correcting disc as a center and are intersected with the first communicating hole.

8. The air-bearing carrier device as claimed in claim 7, wherein the air-guiding member includes a connector and an air-guiding tube, one end of the connector is connected to the air-guiding tube, the other end of the connector is connected to the calibration plate, the connector is provided with a connecting hole, the connecting hole is communicated with the first calibration air pressure channel and the air-guiding tube, the connecting hole and the air-guiding tube form the second calibration air pressure channel, one end of the air-guiding tube, which is far away from the connector, is connected to the air path control unit, and the air-guiding tube is further communicated with the third calibration air pressure channel.

9. The air bearing apparatus of claim 8, wherein the air path control component comprises: the gas circuit connector, the third connecting pipe and the conversion valve are connected between the gas circuit connector and the conversion valve; the air path connector is arranged on one side, far away from the bearing surface, of the air floatation bearing equipment; the gas circuit connector is provided with a first through hole and a second through hole, the first through hole is communicated with the second through hole in an intersecting manner, the gas guide pipe is inserted into the first through hole and communicated with the third correction air pressure channel, and the conversion valve is communicated with the second through hole through the connecting pipe.

10. The air bearing apparatus of claim 2, wherein a pressure control screw is disposed in each of the first air hole and the second air hole for controlling a pressure in each of the first air hole and the second air hole; the outer wall of the air pressure control screw is provided with an external thread, and the air pressure control screw is connected into the first air hole and the second air hole through the external thread; and the air pressure control screw is also provided with an air pressure control hole which is communicated with the first air hole or the second air hole.