CN114777826A - Air flotation carrying equipment - Google Patents

Abstract

The air floatation bearing equipment disclosed by the embodiment of the invention comprises the following components: a carrier layer; the spacing layer is connected to one side of the bearing layer; the gas circuit connecting layer is connected to one side of the spacing layer, which is far away from the bearing layer; a first air pressure channel and a second air pressure channel for bearing the to-be-tested piece in an air floatation mode are formed among the bearing layer, the spacing layer and the air circuit connecting layer; the first air pressure channel and the second air pressure channel respectively penetrate through the bearing layer, the spacing layer and the air circuit connecting layer from one side of the bearing layer far away from the air circuit connecting layer in sequence and extend to one side of the air circuit connecting layer far away from the bearing layer. The air floatation bearing equipment provided by the invention is used for carrying out air floatation bearing on the piece to be tested by arranging the first air channel and the second air channel so as to improve the air floatation bearing effect of the air floatation bearing equipment.

Description

Air flotation bearing equipment

technical field

The invention relates to the technical field of semiconductors, and in particular, to an air flotation bearing device.

Background technique

When inspecting the object to be tested (for example, a wafer), it needs to be carried first, and air bearing is a commonly used carrying method at present. A positive pressure air outlet area and an exhaust area are provided on the air flotation carrying device. The positive pressure air outlet area is used to blow and float the object to be tested, and then the gas that blows the object to be tested is discharged through the exhaust area.

At present, most of the air flotation carrying equipment on the market realizes the air flotation carrying of the test piece by setting a positive pressure air flotation channel in the positive pressure air outlet area and setting an exhaust groove in the exhaust area. However, this method will cause the gas in the central area of the air-floating bearing device to be discharged from the edge of the bearing device along the exhaust groove, resulting in different exhaust effects of the air-bearing bearing device in different areas of the test piece, thus affecting the air-bearing bearing. The bearing effect of the equipment to be tested. In addition, when the DUT is warped, the air bearing effect of the air bearing equipment will be worse.

SUMMARY OF THE INVENTION

In view of at least some of the problems and deficiencies in the prior art, an embodiment of the present invention discloses an air flotation bearing device, wherein a first air path channel and a second air path channel are arranged for carrying the object to be measured by air flotation, so as to improve the air flotation. The air flotation bearing effect of the floating bearing equipment.

On the one hand, an air flotation bearing device provided by an embodiment of the present invention includes, for example: a bearing layer; a spacer layer, connected to one side of the bearing layer; and an air path connection layer, connected to the spacer layer away from the bearing One side of the layer; wherein, a first air pressure channel and a second air pressure channel for air-floating bearing the DUT are formed between the bearing layer, the spacer layer and the air path connection layer; the first air pressure The channel and the second air pressure channel respectively pass through the carrier layer, the spacer layer and the gas path connection layer in sequence from the side of the carrier layer away from the gas path connection layer, and extend to the air path connection layer. The gas path connection layer is on the side away from the bearing layer.

In the air flotation bearing device provided in this embodiment, a first air path channel and a second air path channel are provided for supplying air and exhausting the object to be tested, respectively, so as to improve the air flotation bearing effect of the air flotation bearing device.

In one embodiment of the present invention, the bearing layer includes a bearing surface away from the air path connection layer, the bearing surface is provided with a plurality of first air holes and a plurality of second air holes, and adjacent to the bearing layer A first main air pipe and a plurality of first branch air pipes are also arranged on the side of the spacer layer opposite to the bearing surface, and the plurality of first branch air pipes are connected to the plurality of second air pipes in a one-to-one correspondence. air holes; the spacer layer and the bearing layer are formed with a first cavity, and the first cavity is respectively connected with the plurality of first air holes and the first main air pipe; the spacer layer is also provided with a second cavity. A main trachea via hole and a plurality of first branch air duct via holes, the first main trachea passing through the first main trachea via hole, the first branch air duct passing through the first branch duct a trachea through hole; a second cavity is formed between the air path connection layer and the spacer layer, and the first branch air duct communicates with the second cavity; the air path connection layer is adjacent to the spacer layer A second main air pipe is also provided on one side, and the second main air pipe communicates with the second cavity; the air path connecting layer is also provided with a second main air pipe through hole, and the first main air pipe penetrates the A second main air conduit via hole; wherein the first air pressure channel includes the plurality of first air holes, the first cavity and the first main air conduit, and the second air pressure channel includes the plurality of first air conduits Two air holes, the plurality of first branch air tubes, the second cavity and the second main air tube.

In an embodiment of the present invention, the shape of the bearing surface is circular; the plurality of first air holes and the plurality of second air holes are alternately arranged on the bearing surface, and are formed so as to form the bearing surface. The axis of the surface is a multi-circle of air pressure holes distributed in an annular shape in the center; the multi-circle air pressure holes include an outer ring air pressure hole close to the edge of the bearing surface and an inner ring air pressure hole close to the axis of the bearing surface. The air hole density of the air pressure holes in the outer ring is greater than the air hole density of the air pressure holes in the inner ring.

In an embodiment of the present invention, the air flotation carrying device further includes an air path control component, the air path control component is connected to a side of the air path connection layer away from the carrier layer; the air path The control part includes: an air path connecting body connected to the air path connecting layer and provided with a first air path access channel and a second air path access channel, the first air path access channel communicating with the a first main air pipe, the second air path access channel is connected to the second main air pipe; a first connection pipe is connected to the first air path access channel; and a second connection pipe is connected to the second air path access channel.

In an embodiment of the present invention, the first air passage access channel includes a first longitudinal access hole and a first lateral access hole, and the first longitudinal access hole communicates with the first lateral access hole , the first longitudinal access hole is also connected to the first main air pipe; the second air path access channel includes a second longitudinal access hole and a second transverse access hole, the second longitudinal access hole communicate with the second transverse access hole, and the second longitudinal access hole also communicates with the second main air pipe; the air circuit control component further includes a first pressure regulating valve and a second pressure regulating valve, the first A pressure regulating valve communicates with the first longitudinal access hole, and the second pressure regulating valve communicates with the second longitudinal access hole. In an embodiment of the present invention, a mounting hole is provided in the middle of the bearing surface, and a first positioning hole communicated with the mounting hole and passing through the spacing layer is provided in the middle of the spacer layer. The middle part of the road connecting layer is provided with a second positioning hole which is communicated with the first positioning hole and penetrates through the air path connecting layer; the air flotation bearing device further includes a warpage correction structure, and the warpage correction structure includes : a straightening disc, fixed in the installation hole and provided with a first straightening air pressure channel; an air guide, connected to the straightening disc and arranged in the first positioning hole and the second positioning hole, the guide The air component is provided with a second correcting air pressure channel, and the second correcting air pressure channel is communicated with the first correcting air pressure channel; The air path control component is provided with a third correcting air pressure channel, and the third correcting air pressure channel communicates with the second correcting air pressure channel.

In an embodiment of the present invention, the mounting hole is a circular hole; the outer side surface of the straightening disc adjacent to the bearing surface is circular, and a plurality of axial air holes are provided on the outer surface, and the straightening disc is provided with a plurality of axial air holes. There are also a plurality of radial air holes, which are connected to the plurality of axial air holes in a one-to-one correspondence, and a first communication hole is arranged on the inner side of the straightening disc away from the outer side, so The first communication hole communicates with the plurality of radial air holes and the second correction air pressure passage, and the plurality of axial air holes, the plurality of radial air holes and the first communication hole form the first correction Air pressure channel; the plurality of axial air holes are spaced apart from each other on the outer surface and are arranged in a ring shape; the plurality of radial air holes are evenly distributed with the axis of the straightening disc as the center, and meet at the the first communication hole.

In an embodiment of the present invention, the air guide includes a connector and an air tube, one end of the connector is connected to the air tube, the other end of the connector is connected to the correction disc, and the connector A connecting hole is provided, the connecting hole communicates with the first corrective air pressure channel and the air duct, the connecting hole and the air duct form the second corrective air pressure channel, and the air duct is far away from the connecting head One end of the airway is connected to the air circuit control part, and the air conduit is also communicated with the third correction air pressure channel.

In an embodiment of the present invention, the air circuit control component includes: an air circuit connecting body, a third connecting pipe and a switching valve, the connecting pipe is connected between the gas circuit connecting body and the switching valve; The air path connecting body is installed on the side of the air flotation bearing device away from the bearing surface; the air path connecting body is provided with a first through hole and a second through hole, and the first through hole is connected to the The second through holes communicate with each other, the air conduit is inserted into the first through hole, and communicates with the third correction air pressure channel, and the conversion valve communicates with the second through hole through the connecting pipe.

In an embodiment of the present invention, air pressure control screws are respectively provided in the first air hole and the second air hole, so as to control the pressure in the first air hole and the second air hole; the air pressure The outer wall of the control screw is provided with an external thread, and the air pressure control screw is connected in the first air hole and the second air hole through the external thread; the air pressure control screw is also provided with an air pressure control hole, and the air pressure control The hole communicates with the first air hole or the second air hole.

As can be seen from the above, the above-mentioned technical features of the present invention can have one or more of the following beneficial effects: by setting the first air path channel and the second air path channel for air supply and exhaust of the object to be tested, the air flotation bearing equipment is improved. bearing effect. Furthermore, the embodiment of the present invention is provided with a warpage correction structure for correcting the warpage of the object to be tested, so as to improve the surface flatness of the object to be tested, thereby improving the air-bearing bearing effect of the air-lift bearing device of the object to be tested. . In addition, in the embodiment of the present invention, different air hole densities of the air pressure holes in the inner and outer rings are set to improve the air flotation bearing effect of the air flotation bearing device; air pressure control screws are arranged in the first air hole and the second air hole to facilitate the adjustment of the first air hole and the pressure in the second air hole; a pressure regulating valve is provided to more conveniently adjust the pressure in the first air pressure channel and the second air pressure channel. .

Description of drawings

In order to illustrate the technical solutions of the embodiments of the present invention more clearly, the following briefly introduces the accompanying drawings used in the description of the embodiments. Obviously, the drawings in the following description are only some embodiments of the present invention. For those of ordinary skill in the art, other drawings can also be obtained from these drawings without any creative effort.

FIG. 1 is a schematic cross-sectional structural diagram of an air flotation bearing device provided by an embodiment of the present invention.

FIG. 2 is a schematic diagram of an explosion structure of an air flotation bearing device provided by an embodiment of the present invention.

FIG. 3 is a schematic cross-sectional structural diagram of a carrier layer provided by an embodiment of the present invention.

FIG. 4 is a schematic cross-sectional structure diagram of a spacer layer provided by an embodiment of the present invention.

FIG. 5 is another schematic cross-sectional structural diagram of the air flotation bearing device provided by the embodiment of the present invention.

FIG. 6 is a partial enlarged schematic view of part A in FIG. 5 .

FIG. 7 is a partial enlarged schematic view of part B in FIG. 5 .

FIG. 8 is a schematic cross-sectional structure diagram of a gas path connection layer provided by an embodiment of the present invention.

FIG. 9 is another cross-sectional structural schematic diagram of the air flotation bearing device provided by the embodiment of the present invention.

FIG. 10 is a partial enlarged schematic diagram of part D in FIG. 9 .

FIG. 11 is a partial enlarged schematic view of part C in FIG. 5 .

FIG. 12 is another cross-sectional structural schematic diagram of the air flotation bearing device provided by the embodiment of the present invention.

FIG. 13 is a partial enlarged schematic view of part E in FIG. 12 .

FIG. 14 is another cross-sectional structural schematic diagram of the air flotation bearing device provided by the embodiment of the present invention.

FIG. 15 is a schematic cross-sectional structural diagram of a warpage correction structure provided by an embodiment of the present invention.

FIG. 16 is a schematic cross-sectional structural diagram of a correction disk provided by an embodiment of the present invention.

17 is a schematic cross-sectional structural diagram of an air guide provided by an embodiment of the present invention.

FIG. 18 is a schematic cross-sectional structural diagram of a gas path control component provided by an embodiment of the present invention.

FIG. 19 is a schematic structural diagram of a gas path control component provided by an embodiment of the present invention.

Description of main component symbols:

10 is the air bearing equipment; 100 is the bearing layer; 110 is the bearing surface; 111 is the first air hole; 1111 is the air pressure control screw; 1112 is the air pressure control hole; 112 is the second air hole; 1121 is the air pressure control screw; 113 is the sixth installation hole; 120 is the first main air pipe; 130 is the first branch air pipe; 131 is the thick main air pipe end; 132 is the thin branch air pipe end; 1321 is the external thread; 133 is the third 140 is the first installation hole; 150 is the fourth installation hole; 200 is the spacer layer; 210 is the first main air pipe through hole; 220 is the first branch air pipe through hole; 221 is the first chamfer; 230 240 is the first annular groove; 240 is the second annular groove; 250 is the second installation hole; 260 is the first fastener through hole; 270 is the fifth installation hole; 280 is the first positioning hole; 300 is the air path 310 is the second main air pipe via hole; 320 is the second main air pipe; 330 is the third installation hole; 340 is the second fastener via hole; 350 is the second positioning hole; 410 is the first air pressure channel; 420 is the second air pressure channel; 510 is the first cavity; 520 is the second cavity; 610 is the first seal; 620 is the second seal; 630 is the third seal; 710 is the first fastener; 720 is the second fastener; 730 is the third fastener; 740 is the fourth fastener; 800 is the warpage correction structure; 810 is the correction disk; 811 is the first correction air pressure channel; 812 is the axial air hole; 813 is a radial air hole; 814 is a first communication hole; 820 is an air guide; 821 is a second correction air pressure channel; 822 is a connecting head; 8221 is a connecting hole; 832 is the air path connecting body; 8321 is the first through hole; 8322 is the second through hole; 8323 is the first air path access channel; 8324 is the first longitudinal access hole; A transverse access hole; 8326 is the second gas access channel; 8327 is the second longitudinal access hole; 8328 is the second transverse access hole; 833 is the third connecting pipe; 834 is the conversion valve; 835 is the first connecting pipe; 836 is the second connecting pipe; 837 is the first pressure regulating valve; 838 is the second pressure regulating valve.

Detailed ways

In order to make the objectives, technical solutions and advantages of the present invention clearer, the technical solutions of the present invention will be clearly and completely described below with reference to the specific embodiments of the present invention and the corresponding drawings. Obviously, the described embodiments are only some, but not all, embodiments of the present invention. Based on the embodiments of the present invention, all other embodiments obtained by those of ordinary skill in the art without creative efforts shall fall within the protection scope of the present invention.

It should be noted that the directional terms mentioned in the embodiments of the present invention, such as "up", "down", "front", "rear", "left", "right", "inside", "outside", "side" ”, etc., only refer to the directions of the attached drawings. Therefore, the directional terms used are for describing and understanding the present invention, not for limiting the present invention. The size and thickness of each component shown in the accompanying drawings are arbitrarily shown for understanding and ease of description, but the present invention is not limited thereto.

It will be understood that when an component such as a layer, film, region or substrate is referred to as being "on" another component, the component can be directly on the other component or intervening components may also be present. Additionally, in the specification, unless explicitly described to the contrary, the word "comprising" will be understood to mean the inclusion of stated components, but not the exclusion of any other components. Furthermore, in the specification, "on" means above or below the target component, and does not mean necessarily above the top based on gravity.

Some embodiments of the present invention will be described in detail below with reference to the accompanying drawings. The following embodiments and features of the embodiments may be combined with each other without conflict.

Embodiments of the present invention provide an air-float bearing device. The air-floating supporting device 10 is used for air-floating bearing a DUT, where the DUT may be, for example, a wafer. Referring to FIG. 1 and FIG. 2 , the air flotation bearing device 10 provided by the embodiment of the present invention includes, for example, a bearing layer 100 , a spacer layer 200 , and an air path connection layer 300 . Wherein, the spacer layer 200 is connected to the side of the carrier layer 100 , and the gas path connection layer 300 is connected to the side of the spacer layer 200 away from the carrier layer 100 . Further, for example, a first air pressure channel 410 and a second air pressure channel 420 for air bearing the DUT may be formed between the carrier layer 100 , the spacer layer 200 and the air path connection layer 300 . Specifically, the first air pressure channel 410 and the second air pressure channel 420 respectively pass through the carrier layer 100 , the spacer layer 200 and the air path connection layer 300 from the side of the carrier layer 100 away from the air path connection layer 300 , and extend to the air path The connection layer 300 is on the side away from the carrier layer 100 . The air pressure of the air flow in the first air pressure channel 410 is greater than the - air pressure threshold, that is, the air flow in the channel is positive pressure gas, that is, the first air pressure channel 410 is, for example, a positive air pressure channel. The air pressure of the air flow in the second air pressure channel 420 is less than the air pressure threshold, that is, the air flow in the channel is negative pressure gas, that is, the second air pressure channel 420 is, for example, a negative air pressure channel. The first air pressure channel 410 is used to send out the air flow to blow and float the object to be tested, and the second air pressure channel 420 is used to discharge the air flow blocked by the object to be tested between the air flotation carrying device 10 and the object to be tested, and further communicates with the first air pressure channel. The combination of the air flow sent by the 410 enables the air bearing device 10 to perform the air bearing on the object to be tested.

Furthermore, a first cavity 510 is formed between the spacer layer 200 and the carrier layer 100 , and a second cavity 520 is formed between the gas path connection layer 300 and the spacer layer 200 . Wherein, the air pressure of the air flow in the first cavity 510 is greater than an air pressure threshold, that is, the relative pressure is a positive value; the air pressure of the air flow in the second cavity 520 is less than the air pressure threshold, that is, the relative pressure is a negative value . It should be noted that the pressure threshold mentioned above can be determined according to actual needs, such as standard atmospheric pressure or zero.

2 and 3 , the carrier layer 100 may include, for example, a carrier surface 110 away from the spacer layer 200 . For example, the bearing surface 110 may be provided with a plurality of first air holes 111 and a plurality of second air holes 112 . Among them, the plurality of first air holes 111 are used for sending out air flow to float the DUT, and the plurality of second air holes 112 are used for discharging excess air flow between the air flotation carrying device 10 and the DUT. The air flow sent from the first air hole 111 and the air flow discharged from the second air hole 112 cooperate with each other, so that the air flotation carrying device 10 can carry the object to be tested by air flotation. For example, the plurality of first air holes 111 and the plurality of second air holes 112 may be alternately arranged on the bearing surface 110 to form multiple rings of air pressure holes distributed in an annular shape with the axis of the bearing surface 110 as the center. In this way, the air supply efficiency of the plurality of first air holes 111 can be similar to the exhaust efficiency of the plurality of second air holes 112 , so that the air float bearing device 10 has a better air float bearing effect. Further, the multiple rings of air pressure holes may include, for example, an outer ring air pressure hole close to the edge of the bearing surface 110 and an inner ring air pressure hole close to the axis of the bearing surface 110 . The pore densities of the ring air holes are not equal. Preferably, the air hole density of the air pressure holes in the outer ring is greater than the air hole density of the air pressure holes in the inner ring. In this way, the air flotation carrying device 10 can make the exhaust efficiency of the central area and the edge area of the object to be tested similar, thereby reducing the large difference between the exhaust efficiency of the central area and the edge area of the object to be tested by the air flotation carrying device 10 This leads to uneven air bearing load in different areas of the test piece. Furthermore, the aperture range of the first air hole 111 can be, for example, 0.03-0.07 mm, which can prevent the aperture of the first air hole 111 in the central area of the carrier layer 100 from being too large and reducing the air pressure of the positive pressure gas, thereby causing the air flotation effect. In addition, it can also avoid that the diameter of the first air hole 111 is too small, resulting in a small blowing air flow, thereby resulting in poor air flotation effect. Preferably, the pore size of the first air holes 111 may be, for example, 0.05 mm. The pore size range of the second air holes 112 can also be, for example, 0.03-0.07 mm, and preferably, the pore size of the second air holes 112 can also be, for example, 0.05 mm.

Based on the above, the carrier layer 100 is provided with, for example, a first main air pipe 120 and a plurality of first branch air pipes 130 on the side of the carrier layer 100 adjacent to the spacer layer 200 and opposite to the carrier surface 110 . The first main air pipe 120 can be, for example, a hollow circular pipe, which is disposed near the center of the carrier layer 100 and communicated with the first cavity 510 . The plurality of first air holes 111 , the first main air pipe 120 and the first cavity 510 may, for example, form a first air pressure channel 410 . The first branch air pipes 130 can also be, for example, a hollow tubular structure, and the plurality of first branch air pipes 130 are connected to the plurality of second air holes 112 in a one-to-one correspondence. Furthermore, a plurality of first mounting holes 140 may be provided at an edge of the carrier layer 100 , for example, and the plurality of first mounting holes 140 may, for example, penetrate through the carrier layer 100 .

As mentioned above, referring to FIG. 4 , the spacer layer 200 is provided with a first main air pipe via hole 210 corresponding to the first main air pipe 120 , and the first main air pipe via hole 210 penetrates the spacer layer 200 . The first main gas pipe 120 passes through the first main gas pipe via hole 210 and extends to the side of the spacer layer 200 away from the carrier layer 100 . Further, referring to FIG. 5 and FIG. 6 , a first annular groove 230 is provided at the edge of the spacer layer 200 adjacent to the side of the carrier layer 100 , and a first annular groove 230 is provided at the edge of the spacer layer 200 adjacent to the gas path connecting layer 300 . Two annular grooves 240 . For example, a first sealing member 610 may be disposed in the first annular groove 230, and the first sealing member 610 abuts against the spacer layer 200 and the carrier layer 100; for example, a second sealing member 620 may be disposed in the second annular groove 240 , the second sealing member 620 abuts against the spacer layer 200 and the gas path connection layer 300 . For example, the first seal 610 and the second seal 620 may be, for example, sealing rings such as rubber O-rings. The arrangement of the first sealing member 610 and the second sealing member 620 can seal the space between the spacer layer 200 and the bearing layer 100 and between the spacer layer 200 and the air path connecting layer 300 to ensure the positive pressure in the first air pressure channel 410 The airtightness of the gas and the negative pressure gas in the second air pressure channel 420 maintains the air pressure stability of the first air pressure channel 410 and the second air pressure channel 420 and improves the air flotation effect of the air flotation carrying device 10 .

Furthermore, referring to FIG. 4 , the spacer layer 200 is further provided with a plurality of first branch air conduit via holes 220 , and the plurality of first branch air conduit via holes 220 respectively penetrate the spacer layer 200 . The plurality of first branch airway through holes 220 are in one-to-one correspondence with the plurality of first branch airway tubes 130 , and the plurality of first branch airway tubes 130 pass through the plurality of first branch airway through holes 220 and extend to the spacer layer 200 The side away from the carrier layer 100 is connected to the second cavity 520 . Further, referring to FIG. 7 , each of the first branch air tubes 130 may include, for example, a thick branch air tube end 131 and a thin branch air tube end 132 , and the thick branch air tube end 131 communicates with the thin branch air tube end. 132 , and a stepped surface is formed at the connection between the thick branch airway end 131 and the thin branch airway end 132 . For example, the end 132 of the thin airway can be inserted into the first branch airway through hole 220 corresponding to the first branch airway 130 , and the stepped surface abuts on the side of the spacer layer 200 adjacent to the carrier layer 100 . For example, a third annular groove 133 may be disposed on the step surface, and a third sealing member 630 may be disposed in the third annular groove 133, for example, and the third sealing member 630 may, for example, abut against the spacer layer 200 and the thick branch. The end 131 of the airway is close to one end of the spacer layer 200 . Wherein, the third sealing member 630 may be, for example, a sealing ring such as an O-ring rubber ring. The end of the thin airway pipe end 132 away from the bearing layer 100 may, for example, be further provided with an external thread 1321, and the spacer layer 200 is further provided with a plurality of tightening nuts (not shown in the figure), and the tightening nuts are connected to the first through the external thread 1321. An air guide tube 130 abuts on the side of the spacer layer 200 away from the bearing layer 100 . The arrangement of the fastening nut is beneficial to sealing between the bearing layer 100 and the spacer layer 200 , and can further improve the connection tightness of the air-floating bearing device 10 .

Referring to FIG. 7 again, a first chamfer 221 is further provided on the side of the first branch air duct via hole 220 away from the bearing layer 100 , and the first chamfer 221 may be, for example, a conical groove. For example, a fourth sealing member (not shown in the figure) may be disposed in the first chamfer 221 , and the fourth sealing member may, for example, abut against the first chamfer 221 and the end 132 of the thin airway. Preferably, the fourth sealing member may be, for example, a glue sealing structure, for example, the glue sealing structure may be formed by, for example, arranging glue in the first chamfer 221 . Providing various sealing structures can improve the air tightness of the air flotation bearing device 10, thereby improving the air flotation bearing effect.

4 , 5 and 6 , the edge positions of the spacer layer 200 may be provided with, for example, a plurality of second mounting holes 250 , wherein the first part of the second mounting holes of the plurality of second mounting holes 250 may be, for example, similar to The plurality of first installation holes 140 are provided in a one-to-one correspondence, and the projection centers of the plurality of first installation holes 140 and the plurality of second installation holes 250 on the carrier layer 100 may be located on the same circumference, for example. The plurality of first fasteners 710 may, for example, pass through the plurality of first mounting holes 140 and be connected in the first portion of the second mounting holes 250 corresponding to the plurality of first mounting holes 140 . The fasteners 710 may be, for example, threaded fasteners. In this way, the connection between the bearing layer 100 and the spacer layer 200 can be made tighter, so as to improve the fastening strength of the air bearing device 10 , thereby improving the air bearing effect of the air bearing device 10 .

Referring to FIG. 8 , the gas path connecting layer 300 is provided with a second main gas pipe via hole 310 corresponding to the first main gas pipe via hole 210 , and the second main gas pipe via hole 310 penetrates the gas path connecting layer 300 . The first main air pipe 120 passes through the first main air pipe via hole 210 and the second main air pipe via hole 310 in sequence, and extends to the side of the air path connecting layer 300 away from the spacer layer 200 . In addition, the air path connection layer 300 is further provided with a second main air pipe 320 , and the second main air pipe 320 communicates with the second cavity 520 . The plurality of second air holes 112 , the plurality of first branch air tubes 130 , the second main air tube 320 and the second cavity 520 may, for example, form a second air pressure channel 420 . In addition, referring to FIG. 9 and FIG. 10 , a plurality of third mounting holes 330 may be provided at the edge position of the gas path connection layer 300, for example, and the plurality of third mounting holes 330 may be located at the edge position of the gas path connection layer 300, for example, The plurality of third mounting holes 330 may be provided, for example, in a one-to-one correspondence with the second portion of the second mounting holes of the plurality of second mounting holes 250 . The projection centers of the plurality of second installation holes 250 and the plurality of third installation holes 330 on the carrier layer 100 may be located on the same circumference, for example. Furthermore, the projections of the plurality of first installation holes 140 and the plurality of third installation holes 330 on the carrier layer 100 are spaced apart and alternately arranged on the circumference. A plurality of second fasteners 720 may, for example, pass through the plurality of third mounting holes 330 and be connected within the second portion of the second mounting holes 250 corresponding to the plurality of third mounting holes 330, for example, a plurality of The second fastener 720 may be, for example, a threaded fastener. In this way, the connection between the spacer layer 200 and the air path connection layer 300 can be made more secure, so as to improve the fastening strength of the air bearing device 10 , thereby improving the air bearing effect of the air bearing device 10 .

In a specific implementation of this embodiment, referring to FIG. 5 and FIG. 11 , the first air hole 111 and the second air hole 112 may be provided with, for example, an air pressure control screw 1111 and an air pressure control screw 1121, respectively, for controlling and adjusting the first air hole. 111 and the pressure in the second air hole 112. Specifically, referring to FIG. 11 , the inner walls of the first air hole 111 and the second air hole 112 are respectively provided with internal threads, and the outer walls of the air pressure control screw 1111 and the air pressure control screw 1121 may be provided with external threads, for example, the air pressure control screw 1111 and the air pressure control screw 1111 and the air pressure control screw 1121. The control screw 1121 can be connected in the first air hole 111 and the second air hole 112 through external threads and internal threads, for example. Further, the air pressure control screw 1111 is provided with an air pressure control hole 1112 , and the air pressure control hole 1112 communicates with the first air hole 111 and the first cavity 510 . The air pressure control screw 1121 is provided with an air pressure control hole 1122 , and the air pressure control hole 1122 communicates with the second air hole 112 and the second cavity 520 . The pressure in the first air hole 111 and the second air hole 112 can be adjusted, for example, by adjusting the pore size of the air pressure control hole 1112 and the air pressure control hole 1122 .

In another specific implementation of this embodiment, referring to FIGS. 12 and 13 , a plurality of fourth mounting holes 150 are further provided on the side of the carrier layer 100 away from the carrier surface 110 , and the spacer layer 200 may be provided with, for example, a plurality of fourth mounting holes 150 . The plurality of fourth mounting holes 150 correspond to the first fastener via holes 260 . The plurality of third fasteners 730 respectively pass through the plurality of first fastener via holes 260 and are connected in the plurality of fourth mounting holes 150 . For example, the third fastener 730 may be, for example, a fastening screw. Referring to FIG. 13 again, a plurality of fifth mounting holes 270 may be provided on the side of the spacer layer 200 away from the bearing surface 110 , for example, and a plurality of fifth mounting holes 270 may be provided on the air path connection layer 300 one by one. A corresponding plurality of second fastener vias 340 . The plurality of fourth fasteners 740 respectively pass through the plurality of second fastener via holes 340 and are connected in the plurality of fifth mounting holes 270 . For example, the fourth fastener 740 may also be, for example, a fastening screw. Providing a plurality of third fasteners 730 and a plurality of fourth fasteners 740 is beneficial to increase the strength of the carrying device 10 , thereby enhancing the fastening strength of the carrying device 10 .

To sum up, the air flotation carrying device 10 provided by the embodiment of the present invention is used for carrying the object under test by air flotation by setting the first air path channel and the second air path channel. Specifically, in the embodiment of the present invention, a specific air path structure including a first air hole and a second air hole is provided for air bearing the object to be tested, so as to improve the bearing effect of the air bearing device. On the one hand, the embodiment of the present invention is provided with a plurality of fasteners to fasten and connect the bearing layer, the spacer layer, and the air path connection layer, so as to improve the fastening strength and air bearing effect of the air bearing equipment; on the other hand In this embodiment of the present invention, a plurality of seals are provided for sealing the air path connecting channel to improve the air tightness of the air flotation bearing device, thereby improving the air flotation bearing effect of the air flotation bearing device. In addition, in the embodiment of the present invention, different air hole densities of the air pressure holes in the inner and outer rings are set to improve the air flotation bearing effect of the air flotation bearing equipment; appropriate pore sizes of the first air hole and the second air hole are set to improve the air flotation bearing effect. Effect: the air pressure adjusting screw is arranged in the first air hole and the second air hole so as to adjust the pressure in the first air hole and the second air hole.

In a specific implementation of this embodiment, referring to FIG. 14 , the air-floating carrying device 10 may, for example, further include a warpage correction structure 800 . The warpage correction structure 800 is used to correct the warpage of the test piece when the test piece is warped. In simple terms, the warpage of the DUT may include, for example, the warpage of the convexity in the middle of the DUT and the warpage of the depression in the middle of the DUT. When the central convex warpage of the DUT occurs, the warpage correcting component 800 adsorbs the central convex portion of the DUT; when the DUT is warped with a central depression, the warping correcting component 800 The concave part in the middle of the test piece is supplied with air to complete the warpage correction, so that the surface flatness of the test piece can be improved, thereby improving the detection accuracy of the test piece.

Specifically, referring to FIGS. 3 , 4 and 8 , the middle portion of the bearing surface 110 may be provided with, for example, a sixth mounting hole 113 , and the middle portion of the spacer layer 200 may be provided, for example, with a sixth mounting hole 113 that communicates with and penetrates the spacer layer. In the first positioning hole 280 of 200 , a second positioning hole 350 that communicates with the first positioning hole 280 and penetrates through the gas path connecting layer 300 is provided in the middle of the gas path connecting layer 300 . Further, referring to FIG. 15 , the warpage correction structure 800 may include, for example, a correction disk 810 , an air guide 820 and an air path control part 830 . The straightening disc 810 can be, for example, fixedly arranged in the sixth installation hole 113 , and the straightening disc 810 is provided with a first straightening air pressure channel 811 . The air guide 820 is connected to the side of the straightening disc 810 away from the bearing surface 110 , and is disposed in the first positioning hole 280 and the second positioning hole 350 . The air guide 820 is provided with a second correction air pressure channel 821 , and the second correction air pressure channel 821 communicates with the first correction air pressure channel 811 . The air path control component 830 is disposed on the side of the air path connection layer 300 away from the bearing surface 110 , and is provided with a third correction air pressure channel 831 , and the third correction air pressure channel 831 communicates with the second correction air pressure channel 821 . The first correcting air pressure channel 811 , the second correcting air pressure channel 821 and the third correcting air pressure channel 831 cooperate to enable the air bearing device 10 to correct the warpage of the test piece.

Specifically, referring to FIG. 16 , the outer surface of the correction disk 810 adjacent to the bearing surface 110 is circular, and the outer side of the correction disk 810 is provided with a plurality of axial air holes 812 . For example, the plurality of axial air holes 812 are used for the test to be measured. Correct the warpage of the parts. Among them, the plurality of axial air holes 812 are spaced apart from each other on the outer surface of the straightening disc 810 and arranged in a circular ring. In this way, the air supply efficiency or adsorption efficiency of the plurality of axial air holes 812 is similar, thereby improving the effect of correcting the warpage of the test piece. The straightening disc 810 is also provided with a plurality of radial air holes 813 , and the plurality of radial air holes 813 may be connected to the plurality of axial air holes 812 in a one-to-one correspondence, for example. A first communication hole 814 is provided in the center of one side of the straightening disc 810 away from the outer surface of the straightening disc 810 , and the first communication hole 814 communicates with the plurality of radial air holes 813 and the second straightening air pressure channel 821 . The plurality of radial air holes 813 are evenly distributed around the axis of the straightening disc 810 , and meet the first communication hole 814 . The plurality of axial air holes 812 , the plurality of radial air holes 813 and the first communication hole 814 may, for example, form the first straightening air pressure channel 811 .

17 , the air guide 820 may include, for example, a connector 822 and an air tube 823 . One end of the connector 822 is connected to the side of the correction disc 810 away from the bearing surface 110 , and the other end of the connector 822 is connected to the air tube 823 . Specifically, the connecting head 822 can be, for example, a cylinder, and is correspondingly disposed at the first communication hole 814 . The connection head 822 may be provided with, for example, a connection hole 8221 , and the connection hole 8221 may be provided at, for example, an axis of the connection head 822 , penetrate through the connection head 822 and communicate with the air conduit 823 . The connecting hole 8221 is used to communicate the first correcting air pressure channel 811 and the air conduit 823 , and the connecting hole 8221 and the air conduit 823 may, for example, form a second correcting air pressure channel 821 . The air conduit 823 can be, for example, a hollow cylinder. One end of the air conduit 823 away from the connecting head 822 penetrates the first positioning hole 280 and the second positioning hole 350 and is connected to the air path control component 830 .

As mentioned above, referring to FIG. 18 , the air circuit control component 830 may include, for example, an air circuit connecting body 832 . The gas path connecting body 832 is disposed on the side of the gas path connecting layer 300 away from the spacer layer 100 . The air path connecting body 832 is provided with a first through hole 8321 and a second through hole 8322, the first through hole 8321 and the second through hole 8322 intersect and communicate, wherein the end of the air conduit 823 away from the connecting head 822 penetrates through The first positioning hole 280 and the second positioning hole 350 extend into the first through hole 8321 so as to be connected to the air path control component 830 . The first through hole 8321 may, for example, penetrate through the air path connecting body 832 , and one end of the first through hole 8321 away from the air conduit 823 is communicated with an external air source. The first through hole 8321 and the second through hole 8322 may, for example, form a third correction air pressure channel 831 , and the end of the air conduit 823 away from the connector 822 extends into the first through hole 8321 and communicates with the third correction air pressure The passage 831 , that is, the first straightening air pressure passage 811 can be communicated with the third straightening air pressure passage 831 , for example, through the second straightening air pressure passage 821 .

Further, referring to FIG. 19 , the air circuit control component 830 may further include, for example, a third connecting pipe 833 and a switching valve 834 . One end of the third connecting pipe 833 may be connected into the second through hole 8322, for example, and specifically, the third connecting pipe 833 may be, for example, an elbow connecting member. The switching valve 834 can be disposed at the end of the third connecting pipe 833 away from the second through hole 8322, for example, the switching valve 834 can be communicated with the second through hole 8322 through the third connecting pipe 833, for example, the switching valve 834 can be communicated with the third correction air pressure channel 831 , for example, through the third connecting pipe 833 . In addition, the end of the switching valve 834 away from the third connecting pipe 833 can also be connected to, for example, a positive pressure air source or a negative pressure air source. The switching valve 834 can be used to switch the third straightening air pressure channel 831 to connect with the positive pressure air source or the negative pressure air source, so that the plurality of axial air holes 812 on the straightening disc 810 can be supplied with air or adsorbed, thereby enabling the air flotation carrying device 10 to realize Warp correction is performed on the warpage of the test piece.

As mentioned above, referring to FIG. 18 again, the air path connecting body 832 may be provided with, for example, a first air path access channel 8323 and a second air path access channel 8326 . Wherein, the first air path access channel 8323 may be provided corresponding to the second main air pipe via hole 310 , for example, and the first air path access channel 8323 may be communicated with the first main air pipe 120 , for example. Specifically, the first air passage access channel 8323 includes a first longitudinal access hole 8324 and a first lateral access hole 8325, and the first longitudinal access hole 8324 communicates with the first lateral access hole 8325 and the first main air pipe 120, the first lateral access hole 8325 may be communicated, for example, to an external positive pressure gas source. Based on the above, the second air path access channel 8326 may be provided corresponding to the second main air pipe 320 , for example, and the second air path access channel 8326 may be communicated with the second main air pipe 320 , for example. Specifically, the second air passage access channel 8326 includes a second longitudinal access hole 8327 and a second lateral access hole 8328, and the second longitudinal access hole 8327 communicates with the second lateral access hole 8328 and the second lateral access hole 8327. The main air pipe 320 and the second lateral access hole 8328 can be connected to an external negative pressure air source, for example.

Also, referring to FIG. 19 , the air circuit control part 830 may include, for example, a first connecting pipe 835 and a second connecting pipe 836 . One end of the first connecting pipe 835 may be connected to, for example, the first gas path access channel 8323 , and the other end of the first connecting pipe 835 may be connected, for example, to an external positive pressure air source. Specifically, one end of the first connecting pipe 835 may be communicated with the first lateral access hole 8325 , for example, and the first main air pipe 120 may be communicated with the first connecting pipe 835 through the first longitudinal access hole 8324 , for example. One end of the second connecting pipe 836 can be connected to the second gas path access channel 8326, for example, and the other end of the second connecting pipe 836 can be connected to an external negative pressure air source, for example. Specifically, one end of the second connecting pipe 836 can be communicated with the second lateral access hole 8328 , for example, and the second main air pipe 320 can be communicated with the second connecting pipe 836 through the second longitudinal access hole 8327 , for example.

In a specific implementation method of this embodiment, referring to FIG. 18 , the air circuit control component 830 may further include, for example, a first pressure regulating valve 837 and a second pressure regulating valve 838 . The first pressure regulating valve 837 communicates with the first longitudinal access hole 8324 for controlling the pressure in the first air pressure passage 410, and the second pressure regulating valve 838 communicates with the second longitudinal access hole 8327 for controlling the second air pressure pressure in channel 420.

To sum up, the air flotation carrying device 10 provided by the embodiment of the present invention is used for carrying the object under test by air flotation by setting the first air path channel and the second air path channel. On the one hand, the embodiment of the present invention is provided with a plurality of fasteners to fasten and connect the bearing layer, the spacer layer, and the air path connection layer, so as to improve the fastening strength and air bearing effect of the air bearing equipment; on the other hand In this embodiment of the present invention, a plurality of seals are provided for sealing the air path connecting channel to improve the air tightness of the air flotation bearing device, thereby improving the air flotation bearing effect of the air flotation bearing device. Furthermore, the embodiment of the present invention is provided with a warpage correction structure for correcting the warpage of the object to be tested, so as to improve the surface flatness of the object to be tested, thereby improving the air-bearing bearing effect of the air-lift bearing device of the object to be tested. . In addition, in the embodiment of the present invention, different air hole densities of the air pressure holes in the inner and outer rings are set to improve the air flotation bearing effect of the air flotation bearing equipment; appropriate pore sizes of the first air hole and the second air hole are set to improve the air flotation bearing effect. Effect: the air pressure adjusting screw is arranged in the first air hole and the second air hole so as to adjust the pressure in the first air hole and the second air hole.

It can be understood that the foregoing embodiments are only exemplary descriptions of the present invention, and the technical solutions of the various embodiments can be arbitrarily combined and used in conjunction with the premise that the technical features do not conflict, the structures do not contradict, and do not violate the purpose of the invention of the present invention. .

Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of the present invention, but not to limit them; although the present invention has been described in detail with reference to the foregoing embodiments, those of ordinary skill in the art should understand that it can still be The technical solutions described in the foregoing embodiments are modified, or some technical features thereof are equivalently replaced; and these modifications or replacements do not make the essence of the corresponding technical solutions deviate from the spirit and scope of the technical solutions of the embodiments of the present invention.

Claims (10)

1. An air bearing apparatus, comprising:

a carrier layer;

the spacing layer is connected to one side of the bearing layer;

the gas path connecting layer is connected to one side of the spacing layer, which is far away from the bearing layer;

a first air pressure channel and a second air pressure channel for bearing the to-be-tested piece in an air floatation mode are formed among the bearing layer, the spacing layer and the air path connecting layer; the first air pressure channel and the second air pressure channel sequentially penetrate through the bearing layer, the spacing layer and the air circuit connecting layer from one side, far away from the air circuit connecting layer, of the bearing layer respectively, and extend to one side, far away from the bearing layer, of the air circuit connecting layer.

2. The air bearing apparatus of claim 1,

the bearing layer comprises a bearing surface far away from the gas circuit connecting layer, a plurality of first air holes and a plurality of second air holes are formed in the bearing surface, a first main air pipe and a plurality of first air branch pipes are further arranged on one side, close to the spacing layer and opposite to the bearing surface, of the bearing layer, and the plurality of first air branch pipes are communicated with the plurality of second air holes in a one-to-one correspondence mode;

the spacing layer and the bearing layer form a first cavity which is respectively communicated with the plurality of first air holes and the first main air pipe; the spacing layer is also provided with a first main air pipe through hole and a plurality of first branch air pipe through holes, the first main air pipe penetrates through the first main air pipe through holes, and the plurality of first branch air pipes penetrate through the first branch air pipe through holes;

a second cavity is formed between the air path connecting layer and the spacing layer, and the first branch air guide pipe is communicated with the second cavity; a second main air pipe is further arranged on one side, adjacent to the spacing layer, of the air path connecting layer and is communicated with the second cavity; the gas circuit connecting layer is also provided with a second main gas guide pipe through hole, and the first main gas guide pipe penetrates through the second main gas guide pipe through hole;

the first air pressure channel comprises a plurality of first air holes, a first cavity and a first main air pipe, and the second air pressure channel comprises a plurality of second air holes, a plurality of first branch air pipes, a second cavity and a second main air pipe.

3. The air bearing apparatus of claim 2, wherein the bearing surface is circular in shape; the first air holes and the second air holes are alternately arranged on the bearing surface to form a plurality of circles of air pressure holes which are distributed in a circular shape by taking the axis of the bearing surface as a center; the multi-circle air pressure holes comprise outer circle air pressure holes close to the edge of the bearing surface and inner circle air pressure holes close to the axis of the bearing surface, and the air hole density of the outer circle air pressure holes is larger than that of the inner circle air pressure holes.

4. The air-bearing apparatus as claimed in claim 2, further comprising an air path control component connected to a side of the air path connection layer away from the bearing layer; the gas circuit control part includes:

the gas circuit connecting body is connected to the gas circuit connecting layer and is provided with a first gas circuit access channel and a second gas circuit access channel, the first gas circuit access channel is communicated with the first main gas guide pipe, and the second gas circuit access channel is communicated with the second main gas guide pipe;

the first connecting pipe is communicated with the first air passage access channel; and

and the second connecting pipe is communicated with the second gas path access channel.

5. The air bearing apparatus of claim 4, wherein said first air passage access passage comprises a first longitudinal access aperture and a first lateral access aperture, said first longitudinal access aperture communicating with said first lateral access aperture, said first longitudinal access aperture further communicating with said first main air duct;

the second air path access channel comprises a second longitudinal access hole and a second transverse access hole, the second longitudinal access hole is communicated with the second transverse access hole, and the second longitudinal access hole is also communicated with the second main air pipe;

the gas path control part further comprises a first pressure regulating valve and a second pressure regulating valve, the first pressure regulating valve is communicated with the first longitudinal access hole, and the second pressure regulating valve is communicated with the second longitudinal access hole.

6. The air bearing device as claimed in claim 1, wherein a mounting hole is formed in the middle of the bearing surface, a first positioning hole communicated with the mounting hole and penetrating through the spacer layer is formed in the middle of the spacer layer, and a second positioning hole communicated with the first positioning hole and penetrating through the air path connecting layer is formed in the middle of the air path connecting layer;

the air bearing equipment further comprises a warping correction structure, and the warping correction structure comprises:

the correcting disc is fixed in the mounting hole and is provided with a first correcting air pressure channel;

the air guide piece is connected with the correcting disc and arranged in the first positioning hole and the second positioning hole, the air guide piece is provided with a second correcting air pressure channel, and the second correcting air pressure channel is communicated with the first correcting air pressure channel; and

the gas circuit control part is connected to one side, away from the bearing surface, of the gas circuit connecting layer, and is provided with a third correction air pressure channel communicated with the second correction air pressure channel.

7. The air bearing apparatus of claim 6, wherein said mounting holes are round holes; the outer side surface, adjacent to the bearing surface, of the correcting disc is circular, a plurality of axial air holes are formed in the outer side surface, a plurality of radial air holes are further formed in the correcting disc, the plurality of radial air holes are communicated with the plurality of axial air holes in a one-to-one correspondence mode, a first communication hole is formed in the inner side surface, far away from the outer side surface, of the correcting disc, the first communication hole is communicated with the plurality of radial air holes and the second correcting air pressure channel, and the plurality of axial air holes, the plurality of radial air holes and the first communication hole form the first correcting air pressure channel; the plurality of axial air holes are arranged on the outer side surface at intervals and are arranged in a circular ring shape; the plurality of radial air holes are uniformly distributed by taking the axis of the correcting disc as a center and are intersected with the first communicating hole.

8. The air-bearing carrier device as claimed in claim 7, wherein the air-guiding member includes a connector and an air-guiding tube, one end of the connector is connected to the air-guiding tube, the other end of the connector is connected to the calibration plate, the connector is provided with a connecting hole, the connecting hole is communicated with the first calibration air pressure channel and the air-guiding tube, the connecting hole and the air-guiding tube form the second calibration air pressure channel, one end of the air-guiding tube, which is far away from the connector, is connected to the air path control unit, and the air-guiding tube is further communicated with the third calibration air pressure channel.

9. The air bearing apparatus of claim 8, wherein the air path control component comprises: the gas circuit connector, the third connecting pipe and the conversion valve are connected between the gas circuit connector and the conversion valve; the air path connector is arranged on one side, far away from the bearing surface, of the air floatation bearing equipment; the gas circuit connector is provided with a first through hole and a second through hole, the first through hole is communicated with the second through hole in an intersecting manner, the gas guide pipe is inserted into the first through hole and communicated with the third correction air pressure channel, and the conversion valve is communicated with the second through hole through the connecting pipe.

10. The air bearing apparatus of claim 2, wherein a pressure control screw is disposed in each of the first air hole and the second air hole for controlling a pressure in each of the first air hole and the second air hole; the outer wall of the air pressure control screw is provided with an external thread, and the air pressure control screw is connected into the first air hole and the second air hole through the external thread; and the air pressure control screw is also provided with an air pressure control hole which is communicated with the first air hole or the second air hole.

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