CN217443410U - Bearing equipment - Google Patents

Abstract

The embodiment of the utility model discloses bear equipment, include: the air floatation bearing device comprises a bearing layer, a spacing layer and an air path connecting layer, wherein the spacing layer is connected to one side of the bearing layer, the air path connecting layer is connected to one side of the spacing layer, which is far away from the bearing layer, and a first air pressure channel and a second air pressure channel are formed among the bearing layer, the spacing layer and the air path connecting layer; and the sealing assembly is arranged on the air floatation bearing device. The embodiment of the utility model provides a bearing equipment is through setting up first atmospheric pressure passageway and second atmospheric pressure passageway and carry out air feed respectively and exhaust to the piece that awaits measuring thereby realize the air supporting and bear, still is provided with seal assembly and is used for sealing the gas circuit interface channel in order to improve the gas tightness that bears equipment, and then improves the air supporting bearing effect who bears equipment.

Description

Bearing equipment

Technical Field

The utility model relates to the field of semiconductor technology, especially, relate to a bear equipment.

Background

When inspecting a workpiece (e.g., a wafer), the workpiece needs to be loaded first. Air-float bearing is a common bearing method at present. Generally, a positive pressure air outlet area and an air outlet area are arranged on the air floatation bearing device or equipment, the positive pressure air outlet area is used for blowing and floating the piece to be tested, and then air between the bearing device and the piece to be tested is discharged through the air outlet area.

At present, the air-floatation bearing equipment on the market has poor air tightness, and is easy to generate air leakage or reduction of positive air pressure in the air-floatation bearing equipment in the using process, so that the air-floatation bearing effect of the air-floatation bearing equipment is poor.

SUMMERY OF THE UTILITY MODEL

The embodiment of the utility model discloses a bear equipment to at least part is not enough and the defect among the prior art to improve the air supporting bearing effect who bears equipment.

Specifically, the embodiment of the utility model provides a bear equipment, for example include: the air floatation bearing device comprises a bearing layer, a spacing layer and an air path connecting layer, wherein the spacing layer is connected to one side of the bearing layer, the air path connecting layer is connected to one side of the spacing layer, which is far away from the bearing layer, and a first air pressure channel and a second air pressure channel are formed among the bearing layer, the spacing layer and the air path connecting layer; and the sealing assembly is arranged on the air floatation bearing device.

The bearing equipment provided by the embodiment is used for respectively supplying air and exhausting air to the piece to be tested through the first air pressure channel and the second air pressure channel, so that air floatation bearing is realized, the sealing assembly is further arranged and used for sealing the air path connecting channel so as to improve the air tightness of the bearing equipment, and further the air floatation bearing effect of the bearing equipment is improved.

In an embodiment of the present invention, an edge position of one side of the distance layer adjacent to the bearing layer is provided with a first annular groove, and the sealing assembly comprises a first sealing member, which is disposed in the first annular groove and abuts against the distance layer and the bearing layer.

In an embodiment of the present invention, an edge position of one side of the gas circuit connection layer adjacent to the spacing layer is provided with a second annular groove, the sealing assembly includes a second sealing member, the second sealing member is disposed in the second annular groove and abuts against the spacing layer and the gas circuit connection layer.

In an embodiment of the present invention, the bearing layer includes a bearing surface far away from the spacer layer, the bearing surface is provided with a plurality of first air holes and a plurality of second air holes, one side of the bearing layer near the spacer layer is further provided with a plurality of first air ducts and a first main air duct, and the plurality of first air ducts are communicated with the plurality of second air holes in a one-to-one correspondence; a first cavity is formed on one side of the spacing layer and the bearing layer, which is far away from the bearing surface, and the first cavity is respectively communicated with the plurality of first air holes and the first main air pipe; a first main air pipe through hole and a plurality of first branch air pipe through holes are further formed in one side, far away from the bearing layer, of the spacing layer, the first main air pipe penetrates through the first main air pipe through holes and extends to one side, far away from the bearing layer, of the spacing layer, and the plurality of first branch air pipes penetrate through the plurality of first branch air pipe through holes and extend to one side, far away from the bearing layer, of the spacing layer; the first air pressure channel comprises a plurality of first air holes, a first cavity and a first main air guide pipe, and the second air pressure channel comprises a plurality of second air holes, a plurality of first air guide pipes and a second cavity; each first branch air guide pipe comprises a thick branch air guide pipe end and a thin branch air guide pipe end, the thick branch air guide pipe end is communicated with the thin branch air guide pipe end, a step surface is formed at the joint of the thick branch air guide pipe end and the thin branch air guide pipe end, a third annular groove is formed in the step surface, the thin branch air guide pipe end of the first branch air guide pipe is inserted into a first branch air guide pipe through hole corresponding to the first branch air guide pipe, and the step surface abuts against one side, adjacent to the bearing layer, of the spacing layer; the seal assembly includes a third seal disposed in the third annular groove and abutting the blank layer and an end of the stub air conduit end proximate the blank layer.

In an embodiment of the present invention, a first chamfer is further disposed on one side of the via hole of the first branch gas duct, which is far away from the bearing layer; the seal assembly includes a fourth seal disposed within the first chamfer and abutting the first chamfer and the thin branch air duct end.

In an embodiment of the present invention, a second cavity is formed on one side of the gas circuit connecting layer and the spacing layer away from the bearing layer, and the plurality of first gas branch tubes communicate with the second cavity; the gas circuit connecting layer is also provided with a second main gas guide pipe and a second main gas guide pipe through hole, the second main gas guide pipe is communicated with the second cavity, and the first main gas guide pipe penetrates through the second main gas guide pipe through hole; the second pneumatic channel further includes the second main pneumatic tube.

In an embodiment of the present invention, the air floating bearing device further includes an air path control component, the air path control component is connected to a side of the air path connection layer away from the spacing layer; the gas circuit control component comprises a gas circuit connector, the gas circuit connector is connected to the gas circuit connecting layer and is provided with a first gas circuit access channel and a second gas circuit access channel; the first air passage access channel comprises a first longitudinal access hole and a first transverse access hole, the first longitudinal access hole is communicated with the first transverse access hole, and the first longitudinal access hole is also communicated with the first main air pipe; a fourth annular groove is formed in one side, abutted against the air path connecting layer, of the air path connecting body, and the fourth annular groove is arranged around the first longitudinal access hole; the sealing assembly comprises a fifth sealing element which is arranged in the fourth annular groove and is abutted against the air path connecting layer and the air path connecting body; the second air path access channel comprises a second longitudinal access hole and a second transverse access hole, the second longitudinal access hole is communicated with the second transverse access hole, and the second longitudinal access hole is also communicated with the second main air pipe; a fifth annular groove is formed in one side, abutted against the air path connecting layer, of the air path connecting body, and the fifth annular groove is arranged around the second longitudinal access hole; the sealing assembly comprises a sixth sealing element, and the sixth sealing element is arranged in the fifth annular groove and is abutted to the gas path connecting layer and the gas path connecting body.

In an embodiment of the present invention, the gas circuit control component further includes a first pressure regulating valve and a second pressure regulating valve, the first pressure regulating valve is disposed on the gas circuit connector and is communicated with the first vertical access hole, the second pressure regulating valve is disposed on the gas circuit connector and is communicated with the second vertical access hole.

In one embodiment of the present invention, the carrying surface is circular in shape; the first air holes and the second air holes are alternately arranged on the bearing surface to form a plurality of circles of air pressure holes which are circularly distributed by taking the axis of the bearing surface as the center.

In an embodiment of the present invention, the multi-ring air pressure hole includes an outer ring air pressure hole close to the edge of the bearing surface and an inner ring air pressure hole close to the axis of the bearing surface, and the air hole density of the outer ring air pressure hole is greater than the air hole density of the inner ring air pressure hole.

In view of the above, the above technical features of the present invention can have one or more of the following advantages: the first air pressure channel and the second air pressure channel are arranged to respectively supply air and exhaust air to the piece to be detected, so that air floatation bearing is realized; the sealing assembly is arranged and used for sealing the air path connecting channel so as to improve the air tightness of the bearing equipment, and further improve the air floatation bearing effect of the bearing equipment. Moreover, the air flotation bearing effect of the bearing equipment is improved by setting different air hole densities of the inner ring air pressure hole and the outer ring air pressure hole; first and second pressure regulating valves are provided to more conveniently regulate the pressures in the first and second pneumatic passages.

Drawings

In order to more clearly illustrate the technical solutions of the embodiments of the present invention, the drawings used in the description of the embodiments will be briefly introduced below, and it is obvious that the drawings in the following description are only some embodiments of the present invention, and it is obvious for those skilled in the art that other drawings can be obtained according to these drawings without creative efforts.

Fig. 1 is a schematic cross-sectional structure diagram of a carrying device according to an embodiment of the present invention.

Fig. 2 is an exploded schematic view of an air floatation bearing device according to an embodiment of the present invention.

Fig. 3 is a schematic cross-sectional view of a carrier layer according to an embodiment of the present invention.

Fig. 4 is a schematic cross-sectional structure view of a spacer layer according to an embodiment of the present invention.

Fig. 5 is a position relationship between the sealing assembly and the bearing layer and the spacing layer according to an embodiment of the present invention.

Fig. 6 is a partially enlarged view of a portion a in fig. 5.

Fig. 7 is a partially enlarged view of a portion B in fig. 5.

Fig. 8 is a schematic cross-sectional structure view of the gas circuit connection layer provided in the embodiment of the present invention.

Fig. 9 is another schematic cross-sectional structure diagram of a carrying apparatus according to an embodiment of the present invention.

Fig. 10 is a schematic cross-sectional structural view of the gas circuit control component according to an embodiment of the present invention.

Fig. 11 is a partially enlarged view of a portion C in fig. 10.

Fig. 12 is a partially enlarged view of a portion D in fig. 10.

Description of the main element symbols:

10 is a bearing device; 20 is an air-float bearing device; 210 is a first air pressure channel; 220 is a second pneumatic channel; 230 is a bearing layer; 231 is a bearing surface; 232 is a first air hole; 233 is a second air hole; 234 is a first main air pipe; 235 is a first branch air duct; 2351 is a main thick air duct end; 2352 is the end of a thin branch airway; 1321 is an external thread; 2353 is a third annular groove; 240 is a spacer layer; 241 is a first annular groove; 242 is a second annular groove; 243 is a first main air pipe through hole; 244 is a first branch airway via hole; 2441 is a first chamfer; 250 is a gas circuit connecting layer; 251 is a second main air pipe through hole; 252 is a second main air duct; 253 is a first mounting hole; 260 is a first cavity; 270 is a second cavity; 280 is a gas path control component; 281 is a gas circuit connector; 2811 is a second mounting hole; 2812 is a first air passage access channel; 2813 is a first longitudinal access hole; 2814 is a first lateral access hole; 2815 is a fourth annular groove; 2816 is a second gas path access channel; 2817 is a second longitudinal access hole; 2818 is a second lateral access hole; 2819 is a fifth annular groove; 282 is a first pressure regulating valve; 283 is a second pressure regulating valve; 30 is a seal assembly; 310 is a first seal; 320 is a second seal; 330 is a third seal; 340 is a fifth seal; 350 is a sixth seal.

Detailed Description

To make the purpose, technical solution and advantages of the present invention clearer, the following will combine the embodiments of the present invention and the corresponding drawings to clearly and completely describe the technical solution of the present invention. It is to be understood that the disclosed embodiments are merely exemplary of the invention, and are not intended to limit the invention to the precise embodiments disclosed. Based on the embodiments in the present invention, all other embodiments obtained by a person skilled in the art without creative work belong to the protection scope of the present invention.

It should be noted that directional terms, such as "upper", "lower", "front", "rear", "left", "right", "inner", "outer", "side", and the like, used in the embodiments of the present invention are only directions referring to the attached drawings. Accordingly, the directional terms used are used for describing and understanding the present invention, and are not used for limiting the present invention. For understanding and ease of description, the size and thickness of each component shown in the drawings are arbitrarily illustrated, but the present invention is not limited thereto.

It will be understood that when an element such as a layer, film, region or substrate is referred to as being "on" another element, it can be directly on the other element or intervening elements may also be present. In addition, in the description, unless explicitly described to the contrary, the word "comprise" will be understood to mean that the recited components are included, but not to exclude any other components. Further, in the specification, "above" means above or below the target component, and does not mean that it must be on top of gravity-based.

Some embodiments of the present invention will be described in detail below with reference to the accompanying drawings. The embodiments described below and the features of the embodiments can be combined with each other without conflict.

Referring to fig. 1, a carrying apparatus 10 provided in an embodiment of the present invention includes: an air bearing device 20 and a seal assembly 30. The air bearing device 20 is used for bearing a to-be-tested object, such as a wafer, by air bearing, and the sealing element 30 may be disposed on the air bearing device 20, for example, and is used for sealing the air bearing device 20 to improve the air tightness of the bearing apparatus 10.

Referring to fig. 1 and 2, the air bearing device 20 may, for example, include a bearing layer 230, a spacer layer 240, and an air passage connection layer 250. Wherein, the spacing layer 240 is connected to one side of the bearing layer 230, and the air path connecting layer 250 is connected to one side of the spacing layer 240 far away from the bearing layer 230. The bearing layer 230, the spacer layer 240 and the air path connecting layer 250 may have a first air pressure channel 210 and a second air pressure channel 220 formed therebetween, for example. The air pressure of the air flow in the first air pressure channel 210 is greater than an air pressure threshold, that is, the air flow in the channel is a positive pressure air, that is, the first air pressure channel 210 is, for example, a positive air pressure channel. The air pressure of the air flow in the second air pressure channel 220 is less than the air pressure threshold, i.e. the air flow in the channel is a negative pressure air, i.e. the second air pressure channel 220 is, for example, a negative pressure channel. The pressure threshold may be determined according to actual needs, such as standard atmospheric pressure or zero. The first air pressure channel 210 is used for sending out air flow to blow and float the piece to be tested, the second air pressure channel 220 is used for discharging air flow blocked by the piece to be tested between the air floating bearing device 20 and the piece to be tested, and further the air flow sent out by the first air pressure channel 210 is matched to enable the bearing equipment 10 to carry out air floating bearing on the piece to be tested.

Further, referring again to fig. 1, 4 and 7, the edge position of the spacer layer 240 adjacent to one side of the carrier layer 230 is provided with a first annular groove 241. The seal assembly 30 includes a first seal 310 disposed within the first annular groove 241 and abutting the spacer layer 240 and the carrier layer 230. The first seal 310 may be, for example, a seal ring. In addition, the spacer layer 240 is provided with a second annular groove 242 at an edge position adjacent to one side of the air path connection layer 250. The seal assembly 30 includes a second seal 320, the second seal 320 disposed within the second annular groove 242 and abutting the spacer layer 240 and the gas circuit connecting layer 250. The second seal 320 may also be, for example, a gasket. The first sealing element 310 and the second sealing element 320 are arranged to seal the space between the spacing layer 240 and the bearing layer 230 and the space between the spacing layer 240 and the air path connecting layer 250, so as to prevent positive pressure gas in the first air pressure channel 210 or negative pressure gas in the second air pressure channel 220 from being released through connecting gaps between the layers, thereby affecting air pressure in the first air pressure channel 210 and/or the second air pressure channel 220, and causing poor air floatation effect of the bearing apparatus 10.

In addition, referring to fig. 1, the spacing layer 240 is connected to the side of the carrier layer 230 to form a first cavity 260 with the carrier layer 230, and the air path connecting layer 250 is connected to the side of the spacing layer 240 away from the carrier layer 230 to form a second cavity 270 with the spacing layer 240. Wherein, the air pressure of the air flow in the first cavity 260 is greater than an air pressure threshold, that is, the relative pressure is a positive value; the air pressure of the air flow in the second cavity 270 is less than the air pressure threshold, i.e. the relative pressure is negative. The pressure threshold may be determined according to actual needs, such as standard atmospheric pressure or zero.

As mentioned above, referring to fig. 3, the bearing layer 230 may, for example, include a bearing surface 231 away from the spacing layer 240, the bearing surface 231 may, for example, be circular, and the device under test may, for example, be supported on the bearing surface 231 by air flotation. The bearing surface 231 may have a plurality of first air holes 232 and a plurality of second air holes 233 disposed thereon, for example. The plurality of first air holes 232 may, for example, communicate with the first cavity 260. The first air holes 232 are used for sending air flow to blow and float the piece to be tested, and the second air holes 233 are used for discharging redundant air flow between the air floating bearing device 20 and the piece to be tested. The air flow sent by the first air hole 232 and the air flow discharged by the second air hole 233 cooperate with each other, so that the bearing device 10 can perform air bearing on the to-be-tested piece. Further, the first air holes 232 and the second air holes 233 may be alternately disposed on the bearing surface 231, for example, and form a plurality of circles of air holes which are circularly distributed around the axis of the bearing surface 231. Thus, the air supply efficiency of the first air holes 232 is similar to the air exhaust efficiency of the second air holes 233, and the air floatation carrying effect of the carrying apparatus 10 is better. The multi-circle air pressure holes comprise outer circle air pressure holes close to the edge of the bearing surface and inner circle air pressure holes close to the axis of the bearing surface, and preferably, the air hole density of the outer circle air pressure holes is larger than that of the inner circle air pressure holes. Therefore, the exhaust efficiency of the bearing equipment 10 to the central area and the edge area of the to-be-tested piece is similar, and the uneven air floatation bearing to different areas of the to-be-tested piece caused by the overlarge difference of the exhaust efficiency of the bearing equipment 10 to the central area and the edge area of the to-be-tested piece is reduced. In addition, a first main air pipe 234 and a plurality of first sub air pipes 235 are disposed on one side of the bearing layer 230 adjacent to the spacing layer 240, and the first main air pipe 234 may be, for example, a hollow circular pipe, disposed near the center of the bearing layer 230, and communicated to the first cavity 260. The plurality of first air holes 232, the first main air pipe 234 and the first cavity 260 may form, for example, a first air pressure passage 210. The plurality of first branch gas-guide tubes may also be, for example, hollow tubular structures, and are communicated with the plurality of second gas holes 233 in a one-to-one correspondence manner.

Further, referring to fig. 4, a side of the spacing layer 240 away from the bearing layer 230 may be provided with a first main air pipe through hole 243 corresponding to the first main air pipe 234, for example, and the first main air pipe through hole 243 penetrates through the spacing layer 240. The first main air pipe 234 passes through the first main air pipe passing hole 243 and extends to a side of the spacing layer 240 away from the bearing layer 230. In addition, a plurality of first branch gas-guide tube through holes 244 are further formed in the spacer layer 200, and the plurality of first branch gas-guide tube through holes 244 respectively penetrate through the spacer layer 240. The plurality of first branch air duct through holes 244 correspond to the plurality of first branch air ducts 235 one by one, and the plurality of first branch air ducts 235 pass through the plurality of first branch air duct through holes 244, extend to one side of the spacer layer 240 away from the bearing layer 230, and are communicated with the second cavity 270.

Specifically, referring to fig. 5 and 6, each of the first branch air guide tubes 235 includes a thick branch air guide tube end 2351 and a thin branch air guide tube end 2352, the thick branch air guide tube end 2351 is communicated with the thin branch air guide tube end 2352, and a step surface is formed at a connection position of the thick branch air guide tube end 2351 and the thin branch air guide tube end 2352, the thin branch air guide tube end 2352 of the first branch air guide tube 235 is inserted into a first air guide tube through hole 244 corresponding to the first branch air guide tube 235, and the step surface abuts against one side of the blank layer 240 adjacent to the carrier layer 230. The stepped surface may, for example, be provided with a third annular groove 2353, and the seal assembly 30 may, for example, include a third seal 330, the third seal 330 being disposed within the third annular groove 2353 and abutting the blank layer 240 and an end of the butt gas conduit end 2351 adjacent the blank layer 240. The third sealing member 320 may be, for example, a sealing ring.

In addition, referring to fig. 4 and 6, a first chamfer 2441 is further disposed on a side of the first branch airway tube via hole 244 away from the bearing layer 230, and the first chamfer 2441 may be, for example, a tapered groove. The seal assembly 30 also includes a fourth seal (not shown) disposed within the first chamfer 2441 and abutting the first chamfer 2441 and the thin branch airway tube end 2352. Preferably, the fourth seal may be, for example, a glue seal structure may be formed, for example, by providing glue within the first chamfer 2441.

Furthermore, referring to fig. 8, a second main air duct through hole 251 is disposed on the air path connection layer 250, and the second main air duct through hole 251 corresponds to the first main air duct through hole 244, and penetrates through the air path connection layer 250. The first main air pipe 235 sequentially penetrates through the first main air pipe through hole 244 and the second main air pipe through hole 251 and extends to one side of the air path connecting layer 250, which is far away from the spacing layer 240. In addition, the air path connecting layer 250 is further provided with a second main air pipe 252, and the second main air pipe 252 is communicated with the second cavity 270. The second plurality of air holes 233, the first plurality of air ducts 235, the second main air duct 252 and the second cavity 270 may form, for example, a second air pressure passage 220.

In one embodiment of this embodiment, referring to fig. 9, the air bearing device 20 may further include an air path control component 280, for example, and the air path control component 280 may be connected to a side of the air path connecting layer 250 away from the bearing layer 240, for example. Air path control component 280 may, for example, include an air path connector 281. Specifically, referring to fig. 8 and 10, the air path connecting layer 250 may be provided with a plurality of first mounting holes 253, for example, and the air path connecting body 281 may be provided with a plurality of second mounting holes 2811 matching with the first mounting holes 253, for example, and the air path connecting body 281 may extend through the first mounting holes 253 and the second mounting holes 2811, for example, by a threaded connection, so that the air path control component 280 is disposed on the side of the air path connecting layer 250 away from the spacing layer 240.

Referring again to fig. 10, the air passage connector 281 may be provided with a first air passage access passage 2812 and a second air passage access passage 2816, for example. The first air passage access passage 2812 may be disposed corresponding to the second main air pipe through hole 251, for example, and the first air passage access passage 2812 may communicate with the first main air pipe 234, for example. Specifically, the first air passage access passage 2812 includes a first longitudinal access hole 2813 and a first transverse access hole 2814, the first longitudinal access hole 2813 communicates with the first transverse access hole 2814 and the first main air pipe 234, and the first transverse access hole 2814 may be connected to an external positive pressure air source, for example. Further, referring to fig. 11, a fourth annular groove 2815 is disposed on a side of the air passage connector 281 abutting against the air passage connecting layer 250, and the fourth annular groove 2815 is disposed around the outside of the first longitudinal access hole 2813. The seal assembly 30 includes a fifth seal 340, the fifth seal 340 being disposed within the fourth annular recess 2815 and abutting the airway connection layer 250 and the airway connector 281. Wherein the fifth sealing element 340 may be, for example, a sealing ring.

As mentioned above, the second air passage access passage 2816 may be disposed corresponding to the second main air pipe 252, for example, and the second air passage access passage 2816 may communicate with the second main air pipe 252, for example. Specifically, the second air passage access channel 2816 includes a second longitudinal access hole 2817 and a second transverse access hole 2818, the second longitudinal access hole 2817 communicates with the second transverse access hole 2818 and the second main air pipe 252, and the second transverse access hole 2818 can be communicated to an external negative pressure air source, for example. Further, referring to fig. 12, a fifth annular groove 2819 is disposed on a side of the air passage connector 281 abutting the air passage connection layer 250, and the fifth annular groove 2819 is disposed around the outside of the second longitudinal access hole 2817. The seal assembly 30 includes a sixth seal 350, the sixth seal 350 being disposed within the fifth annular groove 2819 and abutting the air circuit connection layer 250 and the air circuit connection 281. The sixth seal 350 may also be a seal ring, for example.

In one embodiment of the present invention, referring to fig. 10, the air circuit control unit 280 may further include, for example, a first pressure regulating valve 282 and a second pressure regulating valve 283. The first pressure regulating valve 282 communicates with the first longitudinal access hole 2813 for controlling the pressure in the first pneumatic passage, and the second pressure regulating valve 283 communicates with the second longitudinal access hole 2817 for controlling the pressure in the second pneumatic passage.

To sum up, the bearing device 10 provided in the embodiment of the present invention respectively supplies and exhausts air to the to-be-tested object through the first air pressure channel and the second air pressure channel, so as to realize air floatation bearing; the sealing assembly is arranged for sealing the air path connecting channel so as to improve the air tightness of the bearing equipment, and further improve the air floatation bearing effect of the bearing equipment. Moreover, the air flotation bearing effect of the bearing equipment is improved by setting different air hole densities of the inner ring air pressure hole and the outer ring air pressure hole; first and second pressure regulating valves are provided to more conveniently regulate the pressures in the first and second pneumatic passages.

It should be understood that the foregoing embodiments are merely exemplary of the present invention, and the technical solutions of the embodiments can be arbitrarily combined and collocated for use without conflict between technical features and structural contradictions, which do not violate the purpose of the present invention.

Finally, it should be noted that: the above embodiments are only used to illustrate the technical solution of the present invention, and not to limit it; although the present invention has been described in detail with reference to the foregoing embodiments, it should be understood by those skilled in the art that: the technical solutions described in the foregoing embodiments may still be modified, or some technical features may be equivalently replaced; such modifications and substitutions do not depart from the spirit and scope of the present invention in its corresponding aspects.

Claims (10)

1. A load bearing apparatus, comprising:

the air floatation bearing device comprises a bearing layer, a spacing layer and an air path connecting layer, wherein the spacing layer is connected to one side of the bearing layer, the air path connecting layer is connected to one side of the spacing layer, which is far away from the bearing layer, and a first air pressure channel and a second air pressure channel are formed among the bearing layer, the spacing layer and the air path connecting layer; and

and the sealing assembly is arranged on the air floatation bearing device.

2. The load bearing apparatus of claim 1, wherein an edge location of a side of the distance layer adjacent the load bearing layer is provided with a first annular groove, the seal assembly comprising a first seal disposed within the first annular groove and abutting the distance layer and the load bearing layer.

3. The carrier apparatus of claim 1 wherein a second annular groove is disposed adjacent an edge of a side of the gas circuit-connecting layer of the spacing layer, the seal assembly including a second seal disposed within the second annular groove and abutting the spacing layer and the gas circuit-connecting layer.

4. The carrier device of claim 1,

the bearing layer comprises a bearing surface far away from the spacing layer, a plurality of first air holes and a plurality of second air holes are formed in the bearing surface, a plurality of first air branch pipes and a plurality of first main air branch pipes are further arranged on one side, close to the spacing layer, of the bearing layer, and the plurality of first air branch pipes are communicated with the plurality of second air holes in a one-to-one correspondence mode;

a first cavity is formed on one side of the spacing layer and the bearing layer, which is far away from the bearing surface, and the first cavity is respectively communicated with the plurality of first air holes and the first main air pipe; a first main air pipe through hole and a plurality of first branch air pipe through holes are further formed in one side, far away from the bearing layer, of the spacing layer, the first main air pipe penetrates through the first main air pipe through holes and extends to one side, far away from the bearing layer, of the spacing layer, and the plurality of first branch air pipes penetrate through the plurality of first branch air pipe through holes and extend to one side, far away from the bearing layer, of the spacing layer;

the first air pressure channel comprises a plurality of first air holes, a first cavity and a first main air guide pipe, and the second air pressure channel comprises a plurality of second air holes, a plurality of first air guide pipes and a second cavity;

each first branch air guide pipe comprises a thick branch air guide pipe end and a thin branch air guide pipe end, the thick branch air guide pipe end is communicated with the thin branch air guide pipe end, a step surface is formed at the joint of the thick branch air guide pipe end and the thin branch air guide pipe end, a third annular groove is formed in the step surface, the thin branch air guide pipe end of the first branch air guide pipe is inserted into a first branch air guide pipe through hole corresponding to the first branch air guide pipe, and the step surface abuts against one side, adjacent to the bearing layer, of the spacing layer;

the seal assembly includes a third seal disposed in the third annular groove and abutting the blank layer and an end of the stub air conduit end proximate the blank layer.

5. The carrying device according to claim 4, wherein a first chamfer is further provided on a side of the first branch gas-guide tube via hole away from the carrying layer; the seal assembly includes a fourth seal disposed within the first chamfer and abutting the first chamfer and the thin branch air duct end.

6. The carrier device of claim 4,

the gas circuit connecting layer and one side of the spacing layer, which is far away from the bearing layer, are provided with the second cavity, and the plurality of first branch gas guide tubes are communicated with the second cavity; the gas circuit connecting layer is also provided with a second main gas guide pipe and a second main gas guide pipe through hole, the second main gas guide pipe is communicated with the second cavity, and the first main gas guide pipe penetrates through the second main gas guide pipe through hole; the second pneumatic channel further includes the second main pneumatic tube.

7. The carrying apparatus according to claim 1, wherein the air-bearing device further comprises an air path control component, and the air path control component is connected to a side of the air path connecting layer away from the spacing layer; the gas circuit control component comprises a gas circuit connector, the gas circuit connector is connected to the gas circuit connecting layer and is provided with a first gas circuit access channel and a second gas circuit access channel;

the first air passage access channel comprises a first longitudinal access hole and a first transverse access hole, the first longitudinal access hole is communicated with the first transverse access hole, and the first longitudinal access hole is also communicated with the first air pressure channel; a fourth annular groove is formed in one side, abutted against the air path connecting layer, of the air path connecting body, and the fourth annular groove is arranged around the first longitudinal access hole; the sealing assembly comprises a fifth sealing element which is arranged in the fourth annular groove and is abutted against the air path connecting layer and the air path connecting body;

the second air path access channel comprises a second longitudinal access hole and a second transverse access hole, the second longitudinal access hole is communicated with the second transverse access hole, and the second longitudinal access hole is also communicated with the second air pressure channel; a fifth annular groove is formed in one side, abutted against the air path connecting layer, of the air path connecting body, and the fifth annular groove is arranged around the second longitudinal access hole; the sealing assembly comprises a sixth sealing element, and the sixth sealing element is arranged in the fifth annular groove and is abutted to the gas path connecting layer and the gas path connecting body.

8. The carrier apparatus of claim 7 wherein the air path control component further comprises a first pressure regulating valve disposed on the air path connector and in communication with the first longitudinal access aperture and a second pressure regulating valve disposed on the air path connector and in communication with the second longitudinal access aperture.

9. The apparatus of claim 4, wherein the bearing surface is circular in shape; the first air holes and the second air holes are alternately arranged on the bearing surface to form a plurality of circles of air pressure holes which are circularly distributed by taking the axis of the bearing surface as the center.

10. The load apparatus of claim 9, wherein the plurality of turns of gas pressure holes comprise an outer turn of gas pressure holes proximate an edge of the load-supporting surface and an inner turn of gas pressure holes proximate an axis of the load-supporting surface, the outer turn of gas pressure holes having a greater density of gas holes than the inner turn of gas pressure holes.

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