CN114770780B - Rod body processing device - Google Patents

Rod body processing device Download PDF

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Publication number
CN114770780B
CN114770780B CN202210609613.XA CN202210609613A CN114770780B CN 114770780 B CN114770780 B CN 114770780B CN 202210609613 A CN202210609613 A CN 202210609613A CN 114770780 B CN114770780 B CN 114770780B
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Prior art keywords
cutting
wire
alternating
electrode
rod
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CN202210609613.XA
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CN114770780A (en
Inventor
王海超
仇健
葛任鹏
邹英魁
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Qingdao Gaoce Technology Co Ltd
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Qingdao Gaoce Technology Co Ltd
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Priority to CN202210609613.XA priority Critical patent/CN114770780B/en
Publication of CN114770780A publication Critical patent/CN114770780A/en
Priority to PCT/CN2023/097086 priority patent/WO2023232020A1/en
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    • BPERFORMING OPERATIONS; TRANSPORTING
    • B28WORKING CEMENT, CLAY, OR STONE
    • B28DWORKING STONE OR STONE-LIKE MATERIALS
    • B28D5/00Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor
    • B28D5/04Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor by tools other than rotary type, e.g. reciprocating tools
    • B28D5/045Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor by tools other than rotary type, e.g. reciprocating tools by cutting with wires or closed-loop blades
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23HWORKING OF METAL BY THE ACTION OF A HIGH CONCENTRATION OF ELECTRIC CURRENT ON A WORKPIECE USING AN ELECTRODE WHICH TAKES THE PLACE OF A TOOL; SUCH WORKING COMBINED WITH OTHER FORMS OF WORKING OF METAL
    • B23H7/00Processes or apparatus applicable to both electrical discharge machining and electrochemical machining
    • B23H7/02Wire-cutting
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23HWORKING OF METAL BY THE ACTION OF A HIGH CONCENTRATION OF ELECTRIC CURRENT ON A WORKPIECE USING AN ELECTRODE WHICH TAKES THE PLACE OF A TOOL; SUCH WORKING COMBINED WITH OTHER FORMS OF WORKING OF METAL
    • B23H7/00Processes or apparatus applicable to both electrical discharge machining and electrochemical machining
    • B23H7/02Wire-cutting
    • B23H7/04Apparatus for supplying current to working gap; Electric circuits specially adapted therefor
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B28WORKING CEMENT, CLAY, OR STONE
    • B28DWORKING STONE OR STONE-LIKE MATERIALS
    • B28D5/00Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor
    • B28D5/0058Accessories specially adapted for use with machines for fine working of gems, jewels, crystals, e.g. of semiconductor material

Abstract

The embodiment of the application provides a rod body processing device, which comprises an electricity feeding mechanism; the power feeding mechanism comprises: a pulse power supply; the positive electrode and the negative electrode of the pulse power supply are connected to the input end of the electrode alternating device, and the output end of the electrode alternating device is led out of two alternating electrodes; the polarity of the alternating electrodes is alternately changed between the positive electrode and the negative electrode, and the two alternating electrodes are respectively connected with a rod body; and the discharging wire is used for connecting the two rod bodies and is arranged at the position of the rod bodies to be treated. According to the electrode alternating device of the rod body processing device, the two alternating electrodes, the two rod bodies and the discharge line form a discharge loop, and electric spark discharge can occur at the position of the discharge line on the rod body by the discharge loop, so that electric spark discharge cutting is generated. The electrode alternating device realizes the alternating change of the polarity of the alternating electrode between the positive electrode and the negative electrode, and balances the cutting effect of spark discharge cutting of two rod bodies.

Description

Rod body processing device
Technical Field
The application relates to the technical field of rod body cutting, in particular to a rod body processing device.
Background
At present, with the importance and the opening of the society on the utilization of green renewable energy sources, the field of photovoltaic solar power generation is increasingly emphasized and developed. In the photovoltaic power generation field, a typical crystalline silicon solar cell is fabricated on a high quality silicon wafer, which is cut from a pulled or cast rod by a wire saw, i.e., a wire cutting technique.
The wire cutting technology is an advanced hard and brittle material processing technology in the world at present, and the principle of the wire cutting technology is that a workpiece to be processed (such as a bar body, sapphire or other semiconductor hard and brittle materials) is rubbed by a diamond wire moving at high speed, and square bars, round bars or thin slices are cut out, so that the cutting purpose is achieved.
The traditional gold steel wire cutting technology uses a physical cutting principle to remove materials to be processed, so that the loss rate of the cutter gap materials is high, and the cutting quality and the cutting efficiency are greatly improved, so that the dependence on cutting line performance is great.
The traditional composite cutting or electric spark cutting or electrolytic cutting technology adopts cutting lines as electrodes, and consumes electrode materials and electricity feeding materials. The above information disclosed in the background section is only for enhancement of understanding of the background of the application and therefore it may contain information that does not form the prior art that is already known to a person of ordinary skill in the art.
Disclosure of Invention
The embodiment of the application provides a rod body processing device with a novel structure.
The embodiment of the application provides a rod body processing device, which comprises an electricity feeding mechanism; the power feeding mechanism comprises:
a pulse power supply;
the positive electrode and the negative electrode of the pulse power supply are connected to the input end of the electrode alternating device, and the output end of the electrode alternating device is led out of two alternating electrodes; the polarity of the alternating electrodes is alternately changed between the positive electrode and the negative electrode, and the two alternating electrodes are respectively connected with a rod body;
and the discharging wire is used for connecting the two rod bodies and is arranged at the position of the rod bodies to be treated.
By adopting the technical scheme, the embodiment of the application has the following technical effects:
two alternating electrodes, two bars and a discharge line of the electrode alternating device form a discharge loop: first alternating electrode- & gtrod connected with the second alternating electrode- & gtdischarge wire- & gtrod connected with the second alternating electrode- & gtsecond alternating electrode. In this discharge circuit, when the first alternating electrode is positive, the second alternating electrode is negative; in the next cycle, the first alternating electrode is turned to negative and the second alternating electrode is turned to positive. The discharge loop can generate electric spark discharge at the position of the discharge wire on the rod body, and the electric spark discharge is used for etching and removing the rod body, so that electric spark discharge cutting is generated. The electrode alternating device realizes the alternating change of the polarity of the alternating electrode between the positive electrode and the negative electrode, and balances the cutting effect of spark discharge cutting of two rod bodies.
Drawings
The accompanying drawings, which are included to provide a further understanding of the application and are incorporated in and constitute a part of this application, illustrate embodiments of the application and together with the description serve to explain the application and do not constitute an undue limitation to the application. In the drawings:
FIG. 1 is a schematic view of a rod handling apparatus according to an embodiment of the present application;
FIG. 2 is an axial view of a cutting roll of a rod handling apparatus having only one reciprocating cut line and wound as a wire web with individual cut segments connected in parallel in accordance with an embodiment of the present application;
FIG. 3 is a side view of a cutting roll of a rod handling apparatus having only one reciprocating cut line and wound into a wire web with individual cut segments in series, according to an embodiment of the present application.
Reference numerals:
a pulse power supply 11, an electrode alternating device 12, a discharge wire 13, a rod body 14,
reciprocating cut lines 21.
Detailed Description
In order to make the technical solutions and advantages of the embodiments of the present application more apparent, the following detailed description of exemplary embodiments of the present application is given with reference to the accompanying drawings, and it is apparent that the described embodiments are only some of the embodiments of the present application and not exhaustive of all the embodiments. It should be noted that, in the case of no conflict, the embodiments and features in the embodiments may be combined with each other.
Example 1
As shown in fig. 1 and 2, a rod body processing device according to an embodiment of the present application includes an electricity feeding mechanism; the power feeding mechanism comprises:
a pulse power supply 11;
the positive electrode and the negative electrode of the pulse power supply 11 are connected to the input end of the electrode alternating device 12, and the output end of the electrode alternating device 12 is led out of two alternating electrodes; the polarity of the alternating electrodes is alternately changed between the positive electrode and the negative electrode, and the two alternating electrodes are respectively connected with a rod body;
a discharge wire 13 for connecting the two bars 14 and being placed at the position where the bars 14 are to be treated.
According to the rod body processing device, two alternating electrodes of the electrode alternating device, two rods and a discharge line form a discharge loop: first alternating electrode- & gtrod connected with the second alternating electrode- & gtdischarge wire- & gtrod connected with the second alternating electrode- & gtsecond alternating electrode. In this discharge circuit, when the first alternating electrode is positive, the second alternating electrode is negative; in the next cycle, the first alternating electrode is turned to negative and the second alternating electrode is turned to positive. The discharge loop can generate electric spark discharge at the position of the discharge wire on the rod body, and the electric spark discharge is used for etching and removing the rod body, so that electric spark discharge cutting is generated. The electrode alternating device realizes the alternating change of the polarity of the alternating electrode between the positive electrode and the negative electrode, and balances the cutting effect of spark discharge cutting of two rod bodies.
The inventors found that, in the case where the electrode alternating device is not provided, the two rods are connected to the positive electrode and the negative electrode of the pulse power source, respectively, to form the positive electrode of the pulse power source, the rod connected to the positive electrode of the pulse power source, the discharge wire, the rod connected to the negative electrode of the pulse power source, and the negative electrode of the pulse power source. The electric spark discharging cutting efficiency of the rod body connected with the positive electrode of the pulse power supply is higher, and the cutting effect is higher. The electric spark discharging cutting efficiency of the rod body connected with the cathode of the pulse power supply is lower, and the cutting effect is lower. Thus, the inventors have provided an electrode alternating arrangement, enabling alternating of the polarity of the two rods.
The rod body processing device can be used for cutting, electric spark machining or electrolytic machining of diamond wires of the conductor or semiconductor rod bodies with the same resistance, and also can be used for cutting, electric spark machining or electrolytic machining of non-diamond wire cutting wires. I.e. a rod body to which the two alternating electrodes are connected respectively, the resistances of both are required to be the same. On the premise of the same resistance, the rod bodies can be made of the same material or different materials.
In practice, as shown in FIG. 2, the rod handling apparatus further comprises a wire cutting mechanism; the cutting section of the wire cutting mechanism is multiplexed into the discharge wire 13;
wherein the cutting section is a part of the cutting line of the wire cutting mechanism, which is used for cutting two rod bodies in motion.
Like this, on the basis that wire cutting mechanism's cutting section carries out physical cutting to two barred bodies, the spark-discharge can appear on the barred body by the discharging wire of discharging circuit, because the effect of spark-discharge carries out the sculpture to the barred body and gets rid of, the effect of spark-discharge has played spark-discharge cutting's effect promptly to make barred body processing apparatus's cutting efficiency higher, the cutting mode of barred body obtains improving, and wire cutting mechanism's cutting force requirement of cutting section is lower, and barred body cutting surface quality is higher. The cutting that the stick body processing apparatus of this application embodiment carried out to the stick body is compound cutting, both includes cutting section cutting and includes spark-erosion discharge cutting, and cutting efficiency is higher, and cutting surface quality is higher moreover. The two rod bodies are used as power feeding devices, the cutting sections are multiplexed into discharge wires, and no additional parts which can generate loss are added under the condition of realizing the composite cutting of the two rod bodies. Therefore, the rod body processing device disclosed by the embodiment of the application has fewer parts and smaller loss.
In practice, the electrode alternating frequency of the electrode alternating device can be set according to the cutting process.
Thus, the alternating frequency of the electrodes of the rod body processing device can be changed, so that the rod body processing device has wider application range. According to different technological parameters such as the type of the rod body and the type of the cutting section, different electrode alternating frequencies can be set, and the composite cutting effect of the two rod bodies is balanced, so that the optimal quality of electric spark cutting and composite cutting of the cutting section is realized.
In implementation, the cutting of the two rod bodies is started and ended simultaneously, so that the integrity of a discharge loop formed by the two alternating electrodes of the electrode alternating device, the two rod bodies and the discharge wire is ensured, and the integral cutting effect of the two rod bodies is further ensured.
In practice, the wire cutting mechanism further comprises:
the rod fixing mechanism is used for fixing the two rods;
a wire saw mechanism at which a cutting wire is mounted to form the cutting section;
and the moving mechanism is connected with the wire saw mechanism and drives the wire saw mechanism to move so as to drive the cutting section to cut the rod body.
In an implementation, the cutting line is a diamond line.
As a first alternative, as shown in fig. 2 and 3, the wire cutting mechanism has a reciprocating cutting wire 21;
a reciprocating cutting line is wound between two or more parallel cutting rollers in a reciprocating manner according to a preset axial distance to form a wire net, and the wire net forms a plurality of parallel cutting sections which are arranged at intervals.
The mode that a reciprocating cutting line forms a plurality of cutting sections which are parallel and are arranged at intervals can realize the parallel connection or the serial connection of each cutting section.
The parallel connection mode is realized: as shown in fig. 2, the arrangement direction of the two rods is parallel to the length direction of the cutting section, and each cutting section, the two rods and the electrode alternating device form a discharge loop; when the number of the cutting sections is greater than one, the cutting sections are connected in parallel. Thus, the plurality of discharge loops are connected in parallel. In case the voltage supplied by the electrode alternating means is fixed, the voltage across each cut segment, i.e. the discharge line, is substantially the same and differs less from the voltage supplied by the electrode alternating means.
The serial connection mode is realized: as shown in fig. 3, the arrangement direction of the two rod bodies is perpendicular to the length direction of the cutting section, and a wire net where the two part cutting sections contacted with the rod bodies are positioned, the wire net between the rod bodies, the two rod bodies and the electrode alternating device form a discharge loop; the individual cut segments are connected in series in the circuit. Thus, the discharge circuit is one, the voltage provided at the electrode alternating means providing a voltage for the entire reciprocating cutting line, such that the voltage across each cutting segment is much smaller than the voltage provided by the electrode alternating means. The two rod bodies are arranged in a direction perpendicular to the length direction of the cutting section, which is a specific embodiment, but the arrangement direction of the two rod bodies is not limited thereto and may be inclined to the length direction of the cutting section. The arrangement direction of the two rod bodies and the length direction of the cutting section are arranged oppositely, and the two rod bodies are perpendicular to each other and inclined to each other.
As a second alternative, the cutting mechanism has a plurality of parallel and spaced ring-shaped cutting lines, each having a cutting section and each of the cutting sections being parallel and spaced.
As a third alternative, the cutting mechanism has a reciprocating cutting line, a reciprocating cutting line having a cutting section;
when the cutting mechanism is one, a cutting segment is formed.
When the cutting mechanisms are multiple, the cutting mechanisms are arranged to form a plurality of parallel cutting sections which are arranged at intervals.
As a fourth alternative, the cutting mechanism has one circular cutting line, each having a cutting section; forming a cutting segment when the cutting mechanism is one; the cutting mechanisms are multiple, and the cutting sections are parallel and are arranged at intervals.
In the second, third and fourth alternative modes, in the case that the cutting sections are plural and the respective cutting sections are parallel and spaced apart, the arrangement direction of the two bars is parallel to the length direction of the cutting section, and each cutting section, the two bars and the electrode alternating device form a discharge loop; each cutting segment is connected in parallel.
Thus, the plurality of discharge loops are connected in parallel. In case the voltage supplied by the electrode alternating means is fixed, the voltage across each cut segment, i.e. the discharge line, is substantially the same and differs less from the voltage supplied by the electrode alternating means.
In the third and fourth alternative modes, the plurality of cutting segments are arranged in parallel and spaced, and a specific embodiment is not limited thereto, and the cutting segments may be arranged in non-parallel and spaced modes.
Compared with diamond wire cutting used in the current industry, the composite cutting of the rod body processing device has the following advantages and the aspect to be improved:
1. has obvious advantages in material removal and cutting efficiency;
2. the cutting precision is higher;
3. the quality of the cutting surface can reduce the obvious line mark of diamond wire processing, and the surface consistency is higher;
4. in addition, the device has advantages in the aspect of cutting surface damage compared with diamond wire cutting, and the texture distribution consistency of the composite cutting of the rod body processing device is better;
5. the macroscopic cutting force, namely the cutting force of the diamond wire, is reduced, so that the size of the seam is smaller than that of the seam of the diamond wire, the loss of silicon materials is reduced to a certain extent, and the material cost is saved.
6. According to the rod body processing device, the composite cutting of the rod body processing device consumes an electroplated layer on the line consumption of the diamond line, so that the line consumption is increased; the composite cutting of the rod body processing device of the embodiment of the application consumes the electroplated layer, so that more abrasive particles are protruded to participate in processing, and the rod body processing device has a self-sharpening function. The diamond wire cutting reciprocates to remove the material, and the new wire is gradually conveyed to participate in cutting, and the old wire is recycled and scrapped, so that the cutting capability and the wire consumption of the diamond wire can be simultaneously considered under the condition of matching good wire consumption, material removal amount and wire feeding process, and the method achieves the result that the method has advantages compared with the diamond wire machining.
7. The compound cutting of the rod body processing device reduces macroscopic cutting force, namely cutting force of diamond wires, is more stable in the aspects of bow control, cutting state and the like, and also reduces abrasive particle impact effect of traditional diamond wire cutting;
8. the embodiment of the application can be applied to electrolytic machining by changing the type of power supply.
In addition, the matching of the discharge parameter and the grinding parameter has more possibility of digging, so that the cutting performance can be further improved, and the possibility is also more.
In the description of the present application and its embodiments, it should be understood that the terms "top," "bottom," "height," and the like indicate an orientation or positional relationship based on that shown in the drawings, and are merely for convenience of description and to simplify the description, rather than to indicate or imply that the devices or elements referred to must have a particular orientation, be configured and operated in a particular orientation, and thus should not be construed as limiting the present application.
In this application and in its embodiments, the terms "disposed," "mounted," "connected," "secured," and the like are to be construed broadly and include, for example, either permanently connected, removably connected, or integrally formed, unless otherwise explicitly stated and defined as such; the device can be mechanically connected, electrically connected and communicated; can be directly connected or indirectly connected through an intermediate medium, and can be communicated with the inside of two elements or the interaction relationship of the two elements. The specific meaning of the terms in this application will be understood by those of ordinary skill in the art as the case may be.
In this application and in its embodiments, unless expressly stated or limited otherwise, a first feature being "above" or "below" a second feature may include the first and second features being in direct contact, or may include the first and second features not being in direct contact but being in contact with each other through additional features therebetween. Moreover, a first feature being "above," "over" and "on" a second feature includes the first feature being directly above and obliquely above the second feature, or simply indicating that the first feature is higher in level than the second feature. The first feature being "under", "below" and "beneath" the second feature includes the first feature being directly above and obliquely above the second feature, or simply indicating that the first feature is less level than the second feature.
The above disclosure provides many different embodiments or examples for implementing different structures of the present application. The components and arrangements of specific examples are described above in order to simplify the disclosure of this application. Of course, they are merely examples and are not intended to limit the present application. Furthermore, the present application may repeat reference numerals and/or letters in the various examples, which are for the purpose of brevity and clarity, and which do not in themselves indicate the relationship between the various embodiments and/or arrangements discussed. In addition, the present application provides examples of various specific processes and materials, but one of ordinary skill in the art may recognize the application of other processes and/or the use of other materials.
While preferred embodiments of the present application have been described, additional variations and modifications in those embodiments may occur to those skilled in the art once they learn of the basic inventive concepts. It is therefore intended that the following claims be interpreted as including the preferred embodiments and all such alterations and modifications as fall within the scope of the application.
It will be apparent to those skilled in the art that various modifications and variations can be made in the present application without departing from the spirit or scope of the application. Thus, if such modifications and variations of the present application fall within the scope of the claims and the equivalents thereof, the present application is intended to cover such modifications and variations.

Claims (9)

1. The rod body processing device is characterized by comprising an electricity feeding mechanism; the power feeding mechanism comprises:
a pulse power supply;
the positive electrode and the negative electrode of the pulse power supply are connected to the input end of the electrode alternating device, and the output end of the electrode alternating device is led out of two alternating electrodes; the polarity of the alternating electrodes is alternately changed between the positive electrode and the negative electrode, and the two alternating electrodes are respectively connected with a rod body;
the discharging wire is used for connecting the two rod bodies and is arranged at the position to be treated of the rod bodies;
the wire cutting mechanism is also included; the cutting section of the wire cutting mechanism is multiplexed into the discharge wire;
wherein the cutting section is a part of the cutting line of the wire cutting mechanism, which is used for cutting two rod bodies in motion.
2. The wand processing device of claim 1, wherein the wire cutting mechanism has a reciprocating cut line;
a reciprocating cutting line is wound between two or more parallel cutting rollers in a reciprocating manner according to a preset axial distance to form a wire net, and the wire net forms a plurality of parallel cutting sections which are arranged at intervals.
3. The wand processing device of claim 1, wherein the cutting mechanism has a reciprocating cut line, a reciprocating cut line having a cut section;
forming a cutting segment when the cutting mechanism is one;
when the cutting mechanisms are multiple, each cutting mechanism is arranged to form a plurality of cutting sections which are arranged at intervals.
4. The rod handling apparatus of claim 1 wherein said cutting mechanism has a plurality of parallel spaced apart circular cut lines, each of said circular cut lines having a cut section and each of said cut sections being parallel spaced apart.
5. The wand processing device of claim 1, wherein the cutting mechanism has one circular cut line, each circular cut line having a cut section; forming a cutting segment when the cutting mechanism is one; the cutting mechanism is multiple, and each cutting section is arranged at intervals.
6. A rod handling apparatus according to claim 2 or 3 or 4 or 5, wherein the two rods are aligned parallel to the length of the cutting segments, each cutting segment, two rods and the electrode alternating means forming a discharge circuit; when the number of the cutting sections is greater than one, the cutting sections are connected in parallel.
7. The rod processing apparatus according to claim 2, wherein the arrangement direction of the two rods and the length direction of the cutting sections are arranged opposite to each other, the wire mesh between the two cutting sections contacting the rods, the wire mesh between the rods, the two rods and the electrode alternating apparatus form a discharge loop; the individual cut segments are connected in series in the circuit.
8. The rod handling apparatus of claim 2 or 3 or 4 or 5 wherein the wire cutting mechanism further comprises:
the rod fixing mechanism is used for fixing the two rods;
a wire saw mechanism at which a cutting wire is mounted to form the cutting section;
and the moving mechanism is connected with the wire saw mechanism and drives the wire saw mechanism to move so as to drive the cutting section to cut the rod body.
9. The rod handling apparatus of claim 1 wherein the cutting line is a diamond wire.
CN202210609613.XA 2022-05-31 2022-05-31 Rod body processing device Active CN114770780B (en)

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Application Number Priority Date Filing Date Title
CN202210609613.XA CN114770780B (en) 2022-05-31 2022-05-31 Rod body processing device
PCT/CN2023/097086 WO2023232020A1 (en) 2022-05-31 2023-05-30 Cutting device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
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CN114770780B true CN114770780B (en) 2024-02-02

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Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2023232020A1 (en) * 2022-05-31 2023-12-07 青岛高测科技股份有限公司 Cutting device

Citations (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61236427A (en) * 1984-11-29 1986-10-21 Sodeitsuku:Kk Wire cut electric discharge machine
RU2034684C1 (en) * 1992-02-24 1995-05-10 Экспериментальный научно-исследовательский институт металлорежущих станков Method to control working process of electrical discharge outcutting machine
JPH1170414A (en) * 1997-08-27 1999-03-16 Makino Milling Mach Co Ltd Work rustproofing method and device for wire discharge machine
DE10032963A1 (en) * 2000-07-06 2002-01-24 Fraunhofer Ges Forschung Separation of thinner surfaces of semiconductor and ceramic substrates uses saw with electromagnetic forces to control separation thickness
JP2005038968A (en) * 2003-07-17 2005-02-10 Tsurumi Soda Co Ltd Method and equipment for processing substrate
CN102114559A (en) * 2010-01-05 2011-07-06 北京安德建奇数字设备有限公司 Alternating polarity pulsed power supply
CH704345B1 (en) * 2008-05-29 2012-07-13 Eth Zuerich Device for milling and drilling rock with high energy pulses, has electronic power switch through which high discharge current and high energy are introduced into the rock, during milling and drilling
JP2012138543A (en) * 2010-12-28 2012-07-19 Mitsubishi Chemicals Corp Method for manufacturing hexagonal semiconductor tabular crystal
CN105269094A (en) * 2015-10-23 2016-01-27 山东大学 Ultrasonic vibration auxiliary micro-electrochemical electrical discharge wire-cutting machining method and device
CN211306987U (en) * 2019-12-04 2020-08-21 青岛高测科技股份有限公司 Single-wire saw diamond wire electric spark discharge silicon rod processing device
CN112008169A (en) * 2020-08-25 2020-12-01 北京东兴润滑剂有限公司 Double-head wire cut electric discharge machine and cutting method
CN114505552A (en) * 2022-03-10 2022-05-17 杭州依迪爱姆科技有限公司 Double-power-supply lead-in discharge machining method for reciprocating wire-moving electrospark wire-electrode cutting

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN101797713B (en) * 2010-04-08 2011-11-16 南京航空航天大学 Grinding/electrolyzing composite multiline-cutting processing method for silicon wafer
JP5825382B2 (en) * 2013-06-28 2015-12-02 キヤノンマーケティングジャパン株式会社 Wire electrical discharge machining apparatus, wire electrical discharge machining system, power supply device, wire electrical discharge machining method, semiconductor substrate manufacturing method.
WO2020137713A1 (en) * 2018-12-26 2020-07-02 秋田県 Cutting method and cutting device
EP3950200B1 (en) * 2020-08-07 2023-05-03 Agie Charmilles SA Method for high-speed wire cutting

Patent Citations (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61236427A (en) * 1984-11-29 1986-10-21 Sodeitsuku:Kk Wire cut electric discharge machine
RU2034684C1 (en) * 1992-02-24 1995-05-10 Экспериментальный научно-исследовательский институт металлорежущих станков Method to control working process of electrical discharge outcutting machine
JPH1170414A (en) * 1997-08-27 1999-03-16 Makino Milling Mach Co Ltd Work rustproofing method and device for wire discharge machine
DE10032963A1 (en) * 2000-07-06 2002-01-24 Fraunhofer Ges Forschung Separation of thinner surfaces of semiconductor and ceramic substrates uses saw with electromagnetic forces to control separation thickness
JP2005038968A (en) * 2003-07-17 2005-02-10 Tsurumi Soda Co Ltd Method and equipment for processing substrate
CH704345B1 (en) * 2008-05-29 2012-07-13 Eth Zuerich Device for milling and drilling rock with high energy pulses, has electronic power switch through which high discharge current and high energy are introduced into the rock, during milling and drilling
CN102114559A (en) * 2010-01-05 2011-07-06 北京安德建奇数字设备有限公司 Alternating polarity pulsed power supply
JP2012138543A (en) * 2010-12-28 2012-07-19 Mitsubishi Chemicals Corp Method for manufacturing hexagonal semiconductor tabular crystal
CN105269094A (en) * 2015-10-23 2016-01-27 山东大学 Ultrasonic vibration auxiliary micro-electrochemical electrical discharge wire-cutting machining method and device
CN211306987U (en) * 2019-12-04 2020-08-21 青岛高测科技股份有限公司 Single-wire saw diamond wire electric spark discharge silicon rod processing device
CN112008169A (en) * 2020-08-25 2020-12-01 北京东兴润滑剂有限公司 Double-head wire cut electric discharge machine and cutting method
CN114505552A (en) * 2022-03-10 2022-05-17 杭州依迪爱姆科技有限公司 Double-power-supply lead-in discharge machining method for reciprocating wire-moving electrospark wire-electrode cutting

Non-Patent Citations (2)

* Cited by examiner, † Cited by third party
Title
基于FPGA的往复走丝电火花线切割脉冲电源及高效加工研究;潘红伟;中国优秀硕士学位论文全文数据库工程科技Ⅰ辑(第2期);B022-494 *
浅析慢走丝用电极丝技术的发展及应用;孟宪旗;陈斌杰;李海涛;;模具制造(第03期);94-98 *

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