CN114755457A - Method for measuring scale factor of optical levitation acceleration sensor on line - Google Patents
Method for measuring scale factor of optical levitation acceleration sensor on line Download PDFInfo
- Publication number
- CN114755457A CN114755457A CN202210358465.9A CN202210358465A CN114755457A CN 114755457 A CN114755457 A CN 114755457A CN 202210358465 A CN202210358465 A CN 202210358465A CN 114755457 A CN114755457 A CN 114755457A
- Authority
- CN
- China
- Prior art keywords
- particles
- scale factor
- optical
- acceleration sensor
- measuring
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Withdrawn
Links
Images
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P21/00—Testing or calibrating of apparatus or devices covered by the preceding groups
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Length Measuring Devices By Optical Means (AREA)
Abstract
The invention belongs to the field of optical engineering and the technical field of precision measurement, and particularly relates to a method for measuring a scale factor of an optical levitation acceleration sensor on line. In the optical levitation acceleration sensor, the scale factor of the acceleration sensor is obtained by measuring the displacement information of the particles and then obtaining the resonance frequency of the particles through Fourier transform. The speed of the method for acquiring the scale factor is equivalent to the speed of particle displacement acquisition, so that the scale factor can be measured on line at high speed. The invention does not need to measure parameters such as rigidity coefficient, particle mass and the like, does not need to carry out experimental calibration, and has the advantages of simple structure, strong practicability, wide application range and the like.
Description
Technical Field
The invention belongs to the field of optical engineering and the technical field of precision measurement, and particularly relates to a method for measuring a scale factor of an optical levitation acceleration sensor on line.
Background
An acceleration sensor generally comprises a support structure and a mass, wherein when the mass is subjected to an acceleration, the mass is displaced and the support structure is deformed. The displacement of the mass is typically proportional to the input acceleration value, which is referred to as a "scale factor", and the acceleration value can be calculated by measuring the displacement of the mass. Conventional support structures are typically constructed of springs, cantilever beams, etc., and have mechanical noise that is difficult to avoid. Furthermore, the sustained release of the stress of the support material can also introduce cumulative errors.
Optical levitation is a novel manipulation tool and is widely applied to the fields of life science, basic physics, precision measurement and the like. In particular, in the precision measurement aspect, the optical suspension technology has achieved zeptobovine force sensitivity, unimodular mass sensitivity, microgravity acceleration sensitivity and the like. The optical suspension type accelerometer has the advantages of non-contact suspension, small damage, high precision and the like, so that mechanical noise and accumulated errors can be effectively avoided by adopting the optical suspension as a supporting mode to manufacture the accelerometer, and the optical suspension type accelerometer is an important technical scheme for realizing high-precision acceleration sensing.
Accurate acquisition of the scale factor is an important premise for realizing high-precision application of the optical levitation acceleration sensor, and two general acquisition methods are provided: the first method is a direct calibration method, and after experimental data of acceleration and mass block displacement are measured, a scale factor is obtained through fitting calculation; the second method is an indirect measurement method, which can be obtained according to Newton's second law and Hooke's law, and the scale factor is the ratio of the rigidity coefficient and the particle mass, and the scale factor value can be obtained by calculating the ratio after measuring the two parameters. Both methods require the measurement of relevant parameters before use, and the measurement methods are cumbersome. In addition, the scale factor may fluctuate during use, introducing measurement errors into the optical levitation acceleration sensor, and neither method is capable of measuring the scale factor change in real time. The technical scheme provided by the invention is not reported at present.
Disclosure of Invention
In order to overcome the defects of the prior art, the invention provides a method for measuring the scale factor of the optical suspension acceleration sensor on line, which can monitor the change of the scale factor on line in real time and has the advantages of simple method, strong practical effect, low cost and the like.
The technical scheme adopted by the invention for solving the technical problem is as follows: a method for on-line measuring the scale factor of an optical levitation acceleration sensor, comprising the steps of:
step one, establishing an optical tweezers system to capture particles: an optical tweezers system is built by adopting capture laser and a condensing lens to build a three-dimensional optical potential well; loading particles into an optical potential trap region to realize that an optical tweezers system captures the particles;
step two, obtaining displacement information of the particles;
step three, obtaining the resonance frequency omega of the particles: carrying out Fourier transform on the displacement information of any dimension of the particles to obtain the frequency spectrum distribution of the dimension displacement information of the particles and obtain the resonance frequency omega of the particles;
step four, calculating a scale factor Q: the scaling factor is obtained by calculating the square of the resonance frequency of the particles, i.e. Q-omega2。
Further, the step two of obtaining the displacement information of the particles is realized by measuring the scattered light of the particles by a displacement detector.
The beneficial effects of the invention are: in the optical levitation acceleration sensor, the scale factor of the acceleration sensor is obtained by measuring the displacement information of the particles and then obtaining the resonance frequency of the particles through Fourier transform. The speed of the method for acquiring the scale factor is equivalent to the speed of particle displacement acquisition, so that the scale factor can be measured on line at high speed. In addition, the method does not need to measure parameters such as rigidity coefficient, particle mass and the like, does not need to carry out experimental calibration, and has the advantages of simple structure, strong practicability and the like; the invention is not limited to the structure of the light trap and the structure of the light path, and has wide application range.
Drawings
FIG. 1 is a schematic block diagram of the present invention;
FIG. 2 is a schematic view of an experimental apparatus according to an embodiment of the present invention;
FIG. 3 is experimental data of particle displacement power spectra in an embodiment of the invention.
Detailed Description
An embodiment of the present invention will be described in detail with reference to the accompanying drawings, but the scope of the invention should not be limited thereby.
As shown in fig. 1, a method for on-line measuring the scale factor of an optical levitation acceleration sensor comprises the following steps:
step one, establishing an optical tweezers system to capture particles: an optical tweezers system is built by adopting capture laser and a condensing lens to build a three-dimensional optical potential well; loading particles into an optical potential trap region to realize that an optical tweezers system captures the particles;
Step two, obtaining displacement information of the particles;
step three, obtaining the resonance frequency omega of the particles: carrying out Fourier transform on displacement information of any dimension of the particles to obtain the frequency spectrum distribution of the dimension displacement information of the particles and obtain the resonance frequency omega of the particles;
step four, calculating a scale factor Q: the scaling factor is obtained by calculating the square of the resonance frequency of the particles, i.e. Q-omega2。
Preferably, the obtaining of the displacement information of the particle in step two is implemented by measuring the scattered light of the particle with a displacement detector.
The method is realized as follows: as shown in FIG. 2, a device for measuring the scale factor of the optical levitation acceleration sensor on line is built, and comprises a capture laser 1, a condensing lens 2, particles 3 and a displacement detector 4. The capture laser 1 forms an optical potential well after passing through a condenser lens 2, and captures particles 3; the displacement detector 4 detects scattered light of the particles 3 to obtain displacement information of the particles 3, and the resonance frequency of the particles can be obtained by performing fourier transform on the displacement information of any dimension of the particles; the square operation is performed on the resonance frequency, and the scale factor can be obtained.
The spectrum information of the one-dimensional displacement information of the fine particles obtained by the above-described device is shown in fig. 3, and the resonance frequency Ω can be obtained 0. By squaring it, the scaling factor Q is obtained, i.e. Q ═ Ω0 2。
The principle analysis of the invention is as follows: the particles are subjected to light in the optical trap so that they are stably bound. When the particles are deflected, the optical force F increases with the amount x of deflection, which can be expressed as F ═ kx using hooke's law, where k is the stiffness coefficient of the support structure. Assuming that the mass of the particle is m and the received acceleration is a, the relationship between the displacement x of the particle output and the input acceleration a can be expressed by combining newton's second law F ═ ma
Wherein Q is a scaling factor, and Q is k/m.
The trapped particle can be regarded as a simple harmonic oscillator, when the environmental damping is low, the particle can generate simple harmonic motion, and the resonance frequency omega of the particle satisfies omega2K/m. Therefore, the scale factor and the resonant frequency satisfy
Q=Ω2。 (2)
The invention does not need to measure parameters such as optical rigidity, particle mass and the like, does not need to carry out experimental calibration, and has the advantages of online measurement, simple structure, strong practicability and the like. The invention is not limited to the structure of the light trap and the structure of the light path, and has wide application range.
Claims (2)
1. A method for measuring the scale factor of an optical suspension acceleration sensor on line is characterized by comprising the following steps:
Step one, establishing an optical tweezers system to capture particles: an optical tweezers system is built by adopting capture laser and a condensing lens to build a three-dimensional optical potential well; loading particles into an optical potential trap region to realize that an optical tweezers system captures the particles;
step two, obtaining displacement information of the particles;
step three, obtaining the resonance frequency omega of the particles: carrying out Fourier transform on displacement information of any dimension of the particles to obtain the frequency spectrum distribution of the dimension displacement information of the particles and obtain the resonance frequency omega of the particles;
step four, calculating a scale factor Q: the scaling factor is obtained by calculating the square of the resonance frequency of the particles, i.e. Q-omega2。
2. The method according to claim 1, wherein the step two of obtaining the displacement information of the particles is performed by measuring the scattered light of the particles by using a displacement detector.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN202210358465.9A CN114755457A (en) | 2022-04-06 | 2022-04-06 | Method for measuring scale factor of optical levitation acceleration sensor on line |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN202210358465.9A CN114755457A (en) | 2022-04-06 | 2022-04-06 | Method for measuring scale factor of optical levitation acceleration sensor on line |
Publications (1)
Publication Number | Publication Date |
---|---|
CN114755457A true CN114755457A (en) | 2022-07-15 |
Family
ID=82329248
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN202210358465.9A Withdrawn CN114755457A (en) | 2022-04-06 | 2022-04-06 | Method for measuring scale factor of optical levitation acceleration sensor on line |
Country Status (1)
Country | Link |
---|---|
CN (1) | CN114755457A (en) |
Citations (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN102841219A (en) * | 2012-09-04 | 2012-12-26 | 浙江大学 | Multi-beam optical trap rigidity calibration device and method |
CN105785071A (en) * | 2016-03-07 | 2016-07-20 | 浙江大学 | High-sensitivity light trap measuring device and measuring method thereof |
JP2018132500A (en) * | 2017-02-17 | 2018-08-23 | 国立大学法人東京工業大学 | Acceleration meter using microparticles |
CN108645751A (en) * | 2018-05-15 | 2018-10-12 | 浙江大学 | A kind of measurement method and device of the dynamic viscosity based on light suspended particulates |
CN108897057A (en) * | 2018-04-25 | 2018-11-27 | 浙江大学 | The full tensor gradiometry method and gravity gradiometer to be suspended based on luminous power |
CN112485163A (en) * | 2020-11-20 | 2021-03-12 | 浙江大学 | Device and method for feeding back cooling particles in double-beam optical trap |
US11085944B1 (en) * | 2018-04-04 | 2021-08-10 | The Government Of The United States Of America As Represented By The Secretary Of The Air Force | Optically levitated nanoparticle accelerometer |
CN113257451A (en) * | 2021-05-11 | 2021-08-13 | 中国人民解放军国防科技大学 | Method for stabilizing position of captured microsphere in double-beam optical trap |
CN113514179A (en) * | 2021-08-11 | 2021-10-19 | 之江实验室 | Force field gradient measuring device and method based on double-vibrator suspension optomechanics system |
CN113884702A (en) * | 2021-10-18 | 2022-01-04 | 兰州空间技术物理研究所 | Design method for improving scale factor consistency of electrostatic suspension accelerometer |
-
2022
- 2022-04-06 CN CN202210358465.9A patent/CN114755457A/en not_active Withdrawn
Patent Citations (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN102841219A (en) * | 2012-09-04 | 2012-12-26 | 浙江大学 | Multi-beam optical trap rigidity calibration device and method |
CN105785071A (en) * | 2016-03-07 | 2016-07-20 | 浙江大学 | High-sensitivity light trap measuring device and measuring method thereof |
JP2018132500A (en) * | 2017-02-17 | 2018-08-23 | 国立大学法人東京工業大学 | Acceleration meter using microparticles |
US11085944B1 (en) * | 2018-04-04 | 2021-08-10 | The Government Of The United States Of America As Represented By The Secretary Of The Air Force | Optically levitated nanoparticle accelerometer |
CN108897057A (en) * | 2018-04-25 | 2018-11-27 | 浙江大学 | The full tensor gradiometry method and gravity gradiometer to be suspended based on luminous power |
CN108645751A (en) * | 2018-05-15 | 2018-10-12 | 浙江大学 | A kind of measurement method and device of the dynamic viscosity based on light suspended particulates |
CN112485163A (en) * | 2020-11-20 | 2021-03-12 | 浙江大学 | Device and method for feeding back cooling particles in double-beam optical trap |
CN113257451A (en) * | 2021-05-11 | 2021-08-13 | 中国人民解放军国防科技大学 | Method for stabilizing position of captured microsphere in double-beam optical trap |
CN113514179A (en) * | 2021-08-11 | 2021-10-19 | 之江实验室 | Force field gradient measuring device and method based on double-vibrator suspension optomechanics system |
CN113884702A (en) * | 2021-10-18 | 2022-01-04 | 兰州空间技术物理研究所 | Design method for improving scale factor consistency of electrostatic suspension accelerometer |
Non-Patent Citations (4)
Title |
---|
熊威: "基于双光束光阱的开环光力加速度传感理论与实验初步研究", 中国博士学位论文全文数据库 基础科学辑 * |
蒋建斌: "真空光悬浮微粒位移探测系统", 中国优秀硕士学位论文全文数据库 信息科技辑 * |
韩翔等: "真空光镊系统及其在精密测量中的研究进展", 中国激光 * |
高立夫等: "真空光阱中微球参数反馈控制的数值仿真研究", 兵器装备工程学报 * |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
US10655954B2 (en) | Three-dimensional shape, displacement, and strain measurement device and method using periodic pattern, and program therefor | |
CN109655674B (en) | Weak electrostatic field measuring device and method based on weak coupling micromechanical resonator | |
CN201689021U (en) | Micro-nanometer level in-situ nanometer indentation scratch test system | |
CN101876609A (en) | Micron-nano scale in-situ nano indentation and scratching test system | |
Romeis et al. | A novel apparatus for in situ compression of submicron structures and particles in a high resolution SEM | |
Bassindale et al. | Measurements of the force fields within an acoustic standing wave using holographic optical tweezers | |
Fujii | Microforce materials tester | |
CN108917895B (en) | Cantilever Liang Motai frequency-based mass weighing device and method | |
WO2023065386A1 (en) | Electric field force detection system based on single trapped ion | |
CN111307487A (en) | Rotating mechanical vibration measurement method based on micro-motion amplification | |
Payton et al. | Modelling oscillatory flexure modes of an atomic force microscope cantilever in contact mode whilst imaging at high speed | |
Fujii | Measurement of the electrical and mechanical responses of a force transducer against impact forces | |
CN114755457A (en) | Method for measuring scale factor of optical levitation acceleration sensor on line | |
Zhou et al. | Acoustic-excitation optical coherence vibrometer for real-time microstructure vibration measurement and modal analysis | |
Fujii | Pendulum for precision force measurement | |
Takaya et al. | Nano-position sensing using optically motion-controlled microprobe with PSD based on laser trapping technique | |
Miller et al. | Analysis of flip-chip packages using high resolution Moiré interferometry | |
Helfrick | An investigation of 3D digital image correlation for structural health monitoring and vibration measurement | |
JP2013181801A (en) | Method for detecting three-dimensional vector by atomic force microscope and atomic force microscope for detecting force three-dimensional vector | |
Xie et al. | Scanning-digital image correlation for moving and temporally deformed surfaces in scanning imaging mode | |
CN102564654B (en) | Laser force-measuring system used in scanning electron microscope | |
CN109490574A (en) | A kind of Nonlinear Vibration method of resonant silicon micro-acceleration gauge | |
Zhang et al. | Measurement Technology for Micro-Nanometer Devices | |
Aginian et al. | Development of new algorithm in the method of a resonant vibrating target for large scanning speeds | |
CN114964461B (en) | Full-field vibration measurement method based on two-dimensional digital image correlation |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
PB01 | Publication | ||
PB01 | Publication | ||
SE01 | Entry into force of request for substantive examination | ||
SE01 | Entry into force of request for substantive examination | ||
WW01 | Invention patent application withdrawn after publication | ||
WW01 | Invention patent application withdrawn after publication |
Application publication date: 20220715 |