CN114754670A - Scanning magnetic detection microscope based on diamond quantum sensing - Google Patents
Scanning magnetic detection microscope based on diamond quantum sensing Download PDFInfo
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Abstract
The utility model provides a vacuum scanning magnetic detection microscope based on diamond quantum sensing, this vacuum scanning magnetic detection microscope includes workstation, main cavity body, mirror body suspension subassembly, scanning imaging mirror body unit and NV arouses and collects the light path unit, and scanning imaging mirror body unit includes three-dimensional double-precision adjusting part, objective, sample holder and probe. The invention relates to a wide-temperature-zone high-vacuum scanning magnetic detection microscope based on diamond quantum sensing, which integrates the diamond nitrogen vacancy color center magnetism measuring technology and an AFM (atomic force microscope) system highly, simplifies the structure of a scanning mirror body, adopts a compact design principle, occupies a small space in the scanning mirror body as much as possible, and simultaneously ensures that the utilization rate of the internal space of the scanning mirror body reaches the maximum, so that the rigidity of the scanning mirror body is good enough, a design with high stability is obtained, the adjusting difficulty is reduced, and the integration degree is improved.
Description
Technical Field
The invention relates to the field of magnetic detection microscopy, in particular to a vacuum scanning magnetic detection microscope based on diamond quantum sensing.
Background
The NV color center (Nitrogen-vacancy center of diamond) is a Nitrogen-vacancy paramagnetic defect center in diamond, and because of its unique optical properties and good stability and long coherence time, it can be controlled by laser and microwave, and attracts much attention in the related fields of quantum precision measurement, quantum information processing, etc., through more than ten years of deep research, the weak magnetic detection technology based on the NV color center of diamond develops rapidly, and has become a magnetic quantum sensor with both high sensitivity and high spatial resolution, and has unique advantages and great development potential in the magnetic detection field.
Meanwhile, scanning Magnetic detection microscope equipment based on diamond NV color center is also rapidly developed, and the structure of the scanning Magnetic detection microscope equipment can be roughly divided into two parts of optical Detected Magnetic Resonance (ODMR for short) and scanning imaging. Wherein, the ODMR part mainly carries out optical control on NV color centers and collects fluorescence signals; the scanning imaging part is mainly used for scanning and magnetically imaging the sample, including confocal scanning imaging of the sample. The core part of the scanning imaging mainly comprises five parts, namely a diamond NV color center probe, a sample table, an NV excitation and collection system, a magnetic field adjusting device and a microwave device, which all need certain degree of freedom, and the existing design usually combines various displacement tables, adjusting platforms and scanning tables so as to realize the scanning imaging. However, the design is usually bulky, and the space utilization rate is low, so that the design is not compact enough, and the structure is complex. Meanwhile, several parts of scanning imaging are relatively independent, and the rigidity of the whole design is poor, so that the stability is relatively poor, the requirement on the environment is high, and good vibration isolation and noise reduction measures are required to be carried out on the scanning imaging system to ensure the stable work of the scanning imaging system.
In addition, the existing scanning magnetic detection microscope equipment based on the NV color center is usually in a room-temperature atmospheric environment and directly performs magnetic detection on some samples, so that the samples are required to stably exist in the room-temperature atmospheric environment, and the test range of the samples is limited. Many samples are prone to oxidation in the atmospheric environment, cannot exist stably or are prone to pollution, and therefore the samples cannot be detected. A room temperature environment typically has a large thermal drift. Meanwhile, some processes or phenomena occurring at low temperature cannot be detected, and temperature-changing experiments cannot be carried out. There are also some cryogenic devices, whose scanning imaging part also adopts a combined stack mode of a positioning table (positioner) and a scanning table (scanner), and the scanning range achieved at low temperature is about 10 μm, and the scanning precision is nanometer level; the wet method generally employs a bayonet method of about 1 meter long. In the scanning imaging part, the integral rigidity is poor due to the combined mode of the positioning table and the scanning table, the load of the displacement table is very small and is only 50g, and the displacement table is easy to block due to the action of lateral force in the experimental process; the long insertion rod causes low optical collection efficiency, poor stability and large adjustment difficulty.
Disclosure of Invention
In view of the above, one of the main objects of the present invention is to provide a vacuum scanning magnetic detection microscope based on diamond quantum sensing, so as to at least partially solve at least one of the above technical problems.
In order to achieve the above objects, as one aspect of the present invention, there is provided a vacuum scanning magnetic detection microscope based on diamond quantum sensing, comprising:
a work table;
the main cavity is arranged on the workbench and comprises a vacuum cavity and a Dewar cavity, and the top end of the main cavity is provided with a light through hole;
the lens body suspension assembly is suspended at the top of the vacuum cavity;
scanning imaging mirror unit, including:
the electronic base is placed on the mirror body suspension component;
the three-dimensional double-precision adjusting assembly comprises a first three-dimensional adjusting motor, a second three-dimensional adjusting motor, a third three-dimensional adjusting motor and a fourth three-dimensional adjusting motor; the fourth three-dimensional adjusting motor is arranged on the electronics base; the first three-dimensional adjusting motor is fixed at the top end of the fourth three-dimensional adjusting motor and is positioned in the right center of the scanning mirror body; the second three-dimensional adjusting motor and the third three-dimensional adjusting motor are respectively arranged on two adjacent side walls of the mirror body suspension assembly, the top end of the second three-dimensional adjusting motor is provided with a magnet, and the top end of the third three-dimensional adjusting motor is provided with a microwave coil;
The sample seat is arranged at the top of the first three-dimensional adjusting motor, and a sample is placed on the sample seat;
the probe is connected to the front end of the leveling device and is positioned right above the sample seat;
an objective lens located above the probe;
the NV excitation collecting light path unit comprises an excitation light path and a fluorescence collecting light path; the excitation light path comprises an optical fiber coupler, a first reflecting mirror and a dichroic mirror, laser enters the objective lens through a light through port after passing through the optical fiber coupler, the first reflecting mirror and the dichroic mirror and is focused on the diamond probe to excite an NV color center, fluorescence generated after the NV color center is excited reversely passes through the dichroic mirror from the objective lens to the reflecting mirror respectively, and the fluorescence reaches the single photon detector in the fluorescence collection light path to be collected.
Based on the technical scheme, compared with the prior art, the vacuum scanning magnetic detection microscope based on diamond quantum sensing has at least one or part of the following advantages:
1. according to the wide-temperature-zone high-vacuum scanning magnetic detection microscope based on diamond quantum sensing, the diamond nitrogen vacancy position color center magnetism measuring technology and an AFM (atomic force microscope) system are highly integrated, the structure of a scanning mirror body is simplified, according to a compact design principle, the space occupied inside the scanning mirror body is as small as possible, and meanwhile, the utilization rate of the internal space of the scanning mirror body is as high as possible, so that the rigidity of the scanning mirror body is good enough, a design with high stability is obtained, the adjusting difficulty is reduced, and the integration level is improved;
2. The AFM system with simple structure and strong stability is designed, is combined with the NV color center magnetic detection technology of the diamond, is placed in a high-vacuum cavity, and can also be used for cooling a sample through a low-temperature Dewar, so that the scanning magnetic detection microscopic technology with high sensitivity and high spatial resolution is realized;
3. the invention uses a novel three-dimensional double-precision piezoelectric motor to realize the integration of an AFM system, a magnetic field and a microwave coil system, applies the same piezoelectric motor to the free movement of each part, and realizes the small and rigid design of a scanning mirror body structure and the simplification of program control;
4. the scanning mirror body can be integrally taken out, a sample and a probe can be replaced outside the cavity, the scanning mirror body is debugged outside the cavity, and the scanning mirror body is returned to the cavity after being debugged to carry out formal experiments, so that the operation is more convenient, reliable and efficient;
5. the scanning mirror body is arranged in the vacuum cavity, so that a sample is cleaner, the sample can be prevented from being polluted by the outside to influence the test effect, and some samples with sensitive structures can be tested; in addition, the method can also be used for some low-temperature or variable-temperature experiments.
Drawings
In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings used in the embodiments or the prior art descriptions will be briefly described below, it is obvious that the drawings in the following description are only embodiments of the present invention, and for those skilled in the art, other drawings can be obtained according to the provided drawings without creative efforts.
FIG. 1 is a schematic diagram of a vacuum scanning magnetic probe microscope according to an embodiment of the present invention;
FIG. 2 is a schematic perspective view of a vacuum scanning magnetic probe microscope according to an embodiment of the present invention;
FIG. 3 is a schematic top view of a vacuum scanning magnetic probe microscope according to an embodiment of the present invention;
FIG. 4 is a schematic left-view structural diagram of a vacuum scanning magnetic probe microscope according to an embodiment of the present invention;
FIG. 5 is a schematic structural view of a vacuum scanning magnetic probe microscope provided in an embodiment of the present invention with a right side plate removed;
FIG. 6 is a schematic diagram of an upper optical path according to an embodiment of the present invention;
FIG. 7 is a schematic diagram of a fluorescence collection path provided in an embodiment of the present invention;
FIG. 8 is a schematic perspective view of a mirror body according to an embodiment of the present invention;
FIG. 9 is an enlarged view of a portion of FIG. 8;
FIG. 10 is a schematic structural diagram of a front view direction of a mirror structure according to an embodiment of the present invention;
FIG. 11 is a schematic view of a rear right structure of the mirror structure provided in the embodiment of the present invention;
fig. 12 is a schematic structural diagram of a first three-dimensional dual-precision piezoelectric motor according to an embodiment of the present invention;
fig. 13 is a schematic structural diagram of a fourth three-dimensional double-precision piezoelectric motor according to an embodiment of the present invention.
Description of the reference numerals:
1. the device comprises a main cavity, 2, an NV excitation collection optical path unit, 3, an air flotation vibration isolation table, 4, a molecular pump set and 5, a scanning imaging lens body unit;
1-1. Dewar inlet, 1-2. light passing flange, 1-3. low temperature cavity operation flange, 1-4. main cavity door, 1-5. reserved flange, 1-6. low temperature cavity pump port, 1-7. observation window, 1-8. cold head switch control flange, 1-9. copper pigtail operation flange, 1-10. low temperature Dewar, 1-11. cold head switch, 1-12. low temperature cold head, 1-13. main vacuum cavity pump port, 1-14. lens body suspension component;
2-1, an optical fiber coupler, 2-2, a first beam splitter, 2-3, a first reflector, 2-4, a second beam splitter, 2-5, a dichroic mirror, 2-6, an optical power meter, 2-7, an LED light source, 2-8, a third beam splitter, 2-9, a second reflector, 2-10, a third reflector, 2-11, a lens, 2-12, a CCD camera, 2-13, a first achromatic lens, 2-14, a pinhole, 2-15, a second achromatic lens, 2-16, a filter, 2-17, a third achromatic lens, and 2-18, a single photon detector; 2-19. a first plane mirror, 2-20. a second plane mirror; 2-21, a fourth reflective mirror;
5-1 of an electronics junction box, 5-2 of an electronics base, 5-3 of a fourth three-dimensional double-precision piezoelectric motor, 5-41 of a first three-dimensional double-precision piezoelectric motor, 5-42 of a second three-dimensional double-precision piezoelectric motor, 5-43 of a third three-dimensional double-precision piezoelectric motor, 5-5 of a hinge device, 5-6 of an objective lens, 5-7 of a support frame, 5-8 of an objective lens adapter, 5-10 of a magnet, 5-11 of an annular microwave coil, 5-12 of a sample holder and 5-13 of a probe;
5-4-1. a first three-dimensional double-precision piezoelectric motor Z-direction motor, 5-4-2. a first three-dimensional double-precision piezoelectric motor XY-direction motor, 5-3-1. a fourth three-dimensional double-precision piezoelectric motor Z-direction motor.
Detailed Description
In order that the objects, technical solutions and advantages of the present invention will become more apparent, the present invention will be further described in detail with reference to the accompanying drawings in conjunction with the following specific embodiments.
The invention discloses a vacuum scanning magnetic detection microscope based on diamond quantum sensing, which comprises:
a work table;
the main cavity body is arranged on the workbench and comprises a vacuum cavity and a Dewar cavity, and the top end of the main cavity body is provided with a light through port;
the lens body suspension component is suspended at the top of the vacuum cavity;
scanning imaging mirror unit, including:
the electronic base is placed on the mirror body suspension component;
the three-dimensional double-precision adjusting assembly comprises a first three-dimensional adjusting motor, a second three-dimensional adjusting motor, a third three-dimensional adjusting motor and a fourth three-dimensional adjusting motor; the fourth three-dimensional adjusting motor is arranged on the electronic base; the first three-dimensional adjusting motor is fixed at the top end of the fourth three-dimensional adjusting motor and is positioned in the right center of the scanning mirror body; the second three-dimensional adjusting motor and the third three-dimensional adjusting motor are respectively arranged on two adjacent side walls of the mirror body suspension assembly, the top end of the second three-dimensional adjusting motor is provided with a magnet, and the top end of the third three-dimensional adjusting motor is provided with a microwave coil;
The sample seat is arranged at the top of the first three-dimensional adjusting motor, and a sample is placed on the sample seat;
the probe is connected to the front end of the leveling device and is positioned right above the sample seat;
an objective lens located above the probe;
the NV excitation collecting light path unit comprises an excitation light path and a fluorescence collecting light path; the excitation light path comprises an optical fiber coupler, a first reflecting mirror and a dichroic mirror, laser enters the objective lens through the light through port after passing through the optical fiber coupler, the first reflecting mirror and the dichroic mirror and is focused on the diamond probe to excite the NV color center, fluorescence generated after the NV color center is excited reversely passes through the dichroic mirror from the objective lens to the reflecting mirror respectively, and then reaches the single photon detector in the fluorescence collection light path to be collected.
In some embodiments of the present invention, the scanning imaging mirror body further comprises a support frame and an objective adapter; the objective lens adaptor is arranged at the top of the support frame;
in some embodiments of the invention, the objective lens is fixed by an objective lens adapter, positioned above the probe.
In some embodiments of the present invention, the supporting frame comprises four supporting rods, and the supporting rods are two-joint supporting rods, and the length of the supporting rods is adjustable.
In some embodiments of the present invention, the mirror suspension assembly is fixedly connected to the chamber, and suspends the scanning mirror inside the vacuum chamber.
In some embodiments of the present invention, a dewar is disposed in the dewar chamber, and the dewar is connected to the sample stage;
in some embodiments of the present invention, a cold head switch is disposed in the dewar chamber, a low temperature cold head is disposed in the vacuum chamber, and two ends of the cold head switch are respectively connected to the low temperature cold head and the dewar; the other end of the low-temperature cold head is connected with a copper braid, and the other end of the copper braid is connected with the sample platform.
In some embodiments of the present invention, the vacuum scanning magnetic detection microscope further comprises a vacuum unit, the vacuum unit is connected with the vacuum cavity and the dewar cavity respectively;
in some embodiments of the invention, the vacuum unit comprises a set of molecular pumps, the set of molecular pumps being disposed below the table.
In some embodiments of the present invention, the scanning imaging mirror unit further includes two adjusting components and a hinge, the hinge is respectively connected to the tops of the two adjusting components, the front end of the hinge is connected to a probe, and the angle of the probe is adjusted by the adjusting components;
in some embodiments of the invention, the adjustment assembly comprises a Z-motor; the adjusting assembly is arranged on the first three-dimensional adjusting motor.
In some embodiments of the invention, the NV excitation collection optics unit further comprises a CCD optics.
In some embodiments of the invention, a main chamber door is provided on the main chamber body; an observation window is arranged on the main cavity door;
in some embodiments of the present invention, a reserved flange is further disposed on the main cavity.
In some embodiments of the invention, the stage comprises an air bearing vibration isolation stage or an active vibration isolation stage.
In one exemplary embodiment, the invention discloses a wide temperature zone (70K-30 ℃) high vacuum (1 x 10 ℃) based on a diamond NV color center-8mbar) scanning magnetic detection microscope device, which comprises an NV excitation collecting optical path unit, a main cavity body, a microwave unit, a scanning imaging microscope body unit and the like. The main cavity body includes vacuum cavity and low temperature chamber (dewar chamber promptly), and whole main cavity body is an arc cavity structures, fixes on the air supporting shock attenuation platform of customization, carries on NV simultaneously and arouses collecting light path unit to be located main cavity body one side, and the laser that is launched by the laser instrument focuses on in diamond probe in order to arouse NV color center after the dichroscope reflection, and the fluorescence of production sees through the dichroscope, reachs single photon counter after through the pinhole and is collected. The NV excitation and collection optical path unit is arranged outside the cavity and focuses laser on the diamond probe through a dichroic mirror, a reflector and an objective lens on the scanning mirror body so as to excite the NV color center and collect fluorescence generated by the NV color center; the microwave unit is used for controlling the NV color center; the core scanning imaging part of the scanning microscope is a compact high-stability scanning microscope body designed in a layered integrated manner, namely, all parts for scanning imaging are integrated, and the inside of the microscope body is divided into two layers, so that the rigidity and the stability are good, the whole scanning microscope can be debugged, installed and taken out, and the operation is more convenient;
The NV excitation collecting light path unit mainly comprises a laser, a laser fiber, a fiber coupler, a lens, a light emitting diode, a CCD camera, a dichroic mirror, an objective lens, a filter plate, a spatial filtering unit, a single photon detector and the like. The whole optical path system is divided into two layers, wherein the upper layer is a front-end optical path (namely an excitation optical path) and a CCD optical path, and the lower layer is a rear-end optical path (namely a fluorescence collection optical path). In the front-end light path, laser emitted by a laser is transmitted into a fiber coupler through a laser fiber, and then is transmitted into a first beam splitter, the first beam splitter divides light into two paths, one path of the laser is transmitted into an optical power meter, the other path of the laser passes through a first reflecting mirror and a second beam splitter and then is transmitted into a conversion head arranged above a two-layer light path support frame, a dichroic mirror is obliquely arranged inside the conversion head at an angle of 45 degrees, and the laser passes through a fourth reflecting mirror and then is vertically and downwards transmitted into an objective lens on a scanning imaging mirror body unit after penetrating through the dichroic mirror. Fluorescence generated after the NV color center is excited reversely and respectively passes through the objective lens, the reflector, the dichroic mirror and the layer of light path vertically and downwards outside the cavity, passes through the first and second plane mirrors of the layer of light path, passes through the first achromatic lens, reaches the pinhole, passes through the first achromatic lens, the optical filter and the third achromatic lens, and finally reaches the single photon detector, so that the fluorescence is collected by the single photon detector. The light-emitting diode is used for CCD imaging and does not participate in NV color center excitation and fluorescence collection functions.
The microwave unit comprises a wave source, a microwave switch (pin) and an annular microwave coil. The wave source generates microwaves, the wave source switch generates a formulated sequence under the control of the time sequence generator, the formulated sequence is transmitted through the annular microwave coil, and NV is driven by resonance and used for carrying out quantum regulation and control on the NV color center.
The main cavity comprises a vacuum cavity and a low-temperature cavity. The vacuum cavity can be pumped to a high vacuum environment by a pump set, and a plurality of flange ports are distributed on the cavity and can be used for an observation window, a vacuum gauge, a pump port, a light through port and the like. The scanning imaging lens body unit is placed in the main vacuum cavity and fixedly connected with the cavity through the support frame. The cavity is provided with a front door, and operations such as debugging and installation of the scanning mirror body can be carried out in the cavity by opening the front door.
And the low-temperature cavity in the main cavity is internally provided with a low-temperature Dewar and two flange ports, namely a pump port and a cold head switch operation port. The cold head switch operation port is used for controlling the on-off of the low-temperature cold head. The pump port is connected with a pump set and used for vacuumizing the low-temperature cavity and providing a vacuum environment for the Dewar so as to reduce the heat dissipation of liquid nitrogen (or liquid helium).
The vacuum cavity and the low-temperature cavity are separated by a partition plate, and when the vacuum cavity needs to be subjected to vacuum breaking operation, the vacuum environment of the low-temperature cavity is not affected, so that the liquid nitrogen (or liquid helium) is protected, and the loss of the low-temperature cavity caused by environmental change is reduced.
Wherein, the pump group and the vacuum cavity form a vacuum unit which is used for providing a high vacuum environment for the whole lens body part; the low-temperature Dewar is positioned in a low-temperature cavity in the main cavity and contains liquid nitrogen (or liquid helium) for cooling the sample;
the scanning imaging mirror body unit is designed into a layered integrated structure, wherein the displacement devices of all parts all use the same novel three-dimensional double-precision piezoelectric motor. The scanning mirror body is suspended in the vacuum cavity, the temperature of a sample can be reduced to the temperature of liquid helium through the low-temperature Dewar in the low-temperature cavity, and the temperature can be controlled through the temperature control device, so that the diamond NV color center scanning imaging experiment can be carried out in a wide temperature range from room temperature to the temperature of the liquid helium and a high-vacuum environment.
The scanning imaging mirror body unit mainly comprises a diamond probe leveling device, a sample table, an objective lens supporting device, a magnetic field adjusting assembly and a microwave coil assembly. The free movement of each part is mainly designed by a three-dimensional double-precision piezoelectric motor (namely a three-dimensional adjusting motor), the motor is mainly designed by a large-stroke XY motor and a Z-direction multi-region driven inertia piezoelectric motor (hereinafter referred to as a Z-direction motor), the Z-direction motor can carry out Z-direction movement and XYZ three-dimensional fine scanning, a square sapphire base is bonded at the center of the XY motor by epoxy resin, and then the bottom end of the Z-direction motor is bonded on the sapphire base by epoxy resin, so that XYZ three-dimensional coarse approximation and XYZ three-dimensional fine scanning nanometer precision adjustment can be simultaneously realized. In addition, an angle adjusting device is designed by utilizing two Z-direction motors and a hinge device, a rectangular baffle plate is respectively fixed at the top ends of the two Z-direction motors by using M6 screws, and the two baffle plates are respectively fixed at two sides of the hinge device in a ninety-degree direction, so that the angle adjustment of a probe fixed at the front end of the hinge device can be realized, and the angle adjusting device is called as an adjusting platform. The whole is a layered integrated structure design.
In the scanning imaging mirror body unit, four groups of the three-dimensional double-precision piezoelectric motors are used, and the four groups are slightly different in stroke and self size and are respectively used for realizing different functions. The Z-direction motor of the fourth three-dimensional double-precision piezoelectric motor (i.e., the fourth three-dimensional adjustment motor) is thicker than other groups and has a diameter of 2 to 3mm, so that the bearing capacity is larger, as shown in fig. 13, the fourth three-dimensional double-precision piezoelectric motor is placed in the first layer in a layered design and can be used for supporting the sample and probe device as a whole in two layers, and the Z-direction motor supports the whole in two layers. And a first three-dimensional double-precision piezoelectric motor (namely a first three-dimensional adjusting motor) positioned on the second layer, wherein a sample seat is placed at the top end of the Z-direction motor, and the frame of the XY motor is larger than the size of the first layer and is used for placing a diamond NV probe leveling device. The remaining second three-dimensional double-precision piezoelectric motor (i.e., the second three-dimensional adjustment motor) and the third three-dimensional double-precision piezoelectric motor (i.e., the third three-dimensional adjustment motor), which have substantially the same size and stroke, are fixed to the left side wall and the rear wall, respectively, and are structured as shown in fig. 12. The degree of freedom of each part of the scanning mirror body uses the same three-dimensional double-precision motor combined by a novel XY motor and a Z-direction motor as a main positioning device and a scanning device, the complexity of structure and program control is avoided, the whole design is compact, and the rigidity and the stability are good.
The third layer in the layered integrated design of the scanning imaging lens body unit is an objective lens supported by a plurality of support frames and is positioned at the upper part of the lens body, the support frames are supported from a base, the upper end of the support frames is fixed with a switching device, and the objective lens is fixed at the center of the lens body through the switching device.
The scanning imaging mirror body unit is fixedly connected with the cavity through a support frame. The support column is in a two-joint form, the upper half part can be screwed off to replace columns with different lengths, and the lower half part is in a hollow design and is mainly used for wiring.
In the magnetic field adjusting assembly, the embodiment of the invention designs a magnet group, wherein four small cubic neodymium iron boron magnets are combined together and fixed at the front end of the Z-direction motor of the three-dimensional double-precision piezoelectric motor on the rear wall.
The microwave coil assembly is characterized in that a PCB is designed, copper wires are bonded on two poles of the PCB by a lead machine to serve as a microwave transmitting antenna, and the PCB is fixed to the front end of a Z-direction motor of a three-dimensional double-precision motor on the left side wall.
The probe leveling device is an adjusting platform and is positioned on the right side of the two-layer three-dimensional double-precision motor base XY motor frame, and the front end of the adjusting platform is a PCB board welded with a tuning fork so as to adjust the angle.
The technical solution of the present invention is further illustrated by the following specific embodiments in conjunction with the accompanying drawings. It should be noted that the following specific examples are given by way of illustration only and the scope of the present invention is not limited thereto.
Referring to fig. 1-13, the present embodiment provides a wide temperature range high vacuum scanning magnetic detection microscope based on diamond quantum sensing, the apparatus includes: the device comprises a main cavity 1, an NV excitation and collection light path unit 2, an air-flotation shock insulation table 3, a molecular pump set 4 and a scanning imaging mirror body unit 5. The main cavity body 1 and the NV excitation collection light path unit 2 are placed on the air-flotation vibration isolation platform 3, the NV excitation collection light path unit 2 is arranged on the left side of the main cavity body 1, the molecular pump group 4 is connected with vacuum cavity pump ports 1-13 of the main cavity body 1 through a specially-customized middle circular hole of the air-flotation vibration isolation platform 3, and the scanning imaging mirror body unit 5 is suspended in the main cavity body 1.
The main cavity 1 part comprises a vacuum cavity and a low-temperature cavity (namely a Dewar cavity), and the main cavity 1 mainly comprises a Dewar inlet 1-1 for filling liquid nitrogen or liquid helium into a Dewar in the low-temperature cavity; the light transmitting flange 1-2 is used for introducing a light path outside the cavity into the vacuum cavity; a low temperature cavity operation flange 1-3 arranged on the top of the main cavity 1; opening the main cavity door 1-4 to perform any required operation in the vacuum cavity; the reserved flanges 1-5 are arranged on the side wall of the main cavity 1 and are used for meeting the experiment requirements possibly needed in the later period; the low-temperature cavity pump ports 1-6 are connected with a molecular pump set 4 for vacuumizing, so that the heat dissipation of liquid nitrogen (or liquid helium) is reduced; the observation windows 1-7 are respectively arranged on the main cavity doors 1-4 and the right side wall of the main cavity body 1 and are mainly used for observing the real-time condition of the scanning imaging lens body unit 5 in the vacuum cavity; the copper braid operation flanges 1-9 are arranged on the side wall of the main cavity 1 and used for adjusting the position of a copper braid outside the cavity and fixing the copper braid; the low-temperature Dewar 1-10 is positioned in the low-temperature cavity, and integrally has an arc square cavity structure for storing liquid nitrogen (or liquid helium); the cold head switch 1-11 is used for controlling the on-off of the low-temperature cold head 1-12; the cold head switch control flange 1-8 is arranged on the right side wall of the main cavity 1 and is connected with the cold head switch 1-11; and the low-temperature cold head 1-12 is positioned at the bottom of the vacuum cavity, one end of the low-temperature cold head 1-12 is connected to the sample seat 5-12 through a copper braid, the other end of the low-temperature cold head 1-12 is connected with the cold head switch 1-11 and is positioned at the lower part of the low-temperature cavity, and the low-temperature cold head can be disconnected when the sample is not required to be cooled. One end of a cold head switch 1-11 is connected with a Dewar, and the other end is connected with a low-temperature cold head 1-12 and used for cooling a sample; the lower ends of the vacuum cavity pump ports 1-13 are connected with a molecular pump group 4 for pumping high vacuum to the vacuum cavity; the mirror body suspension components 1-14 suspend the scanning imaging mirror body unit 5 in the vacuum cavity.
In the NV excitation collecting optical path unit 2, as shown in fig. 6 to 7, the optical path is divided into an upper layer and a lower layer, the upper layer is a front end optical path and a CCD optical path, and the upper layer is an optical path device disposed on the support platform. The front-end optical path comprises an optical fiber coupler 2-1, a first beam splitter 2-2, a first reflective mirror 2-3, a second beam splitter 2-4, a dichroic mirror 2-5 and an optical power meter 2-6 and is used for exciting an NV color center. The CCD light path is used for CCD imaging and comprises an LED light source 2-7, a third beam splitter 2-8, a second reflecting mirror 2-9, a third reflecting mirror 2-10, a lens 2-11 and a CCD camera 2-12; laser emitted by a laser is transmitted into an optical fiber coupler 2-1 through a laser optical fiber and then transmitted into a first beam splitter 2-2, the first beam splitter 2-2 divides light into two paths, one path of the laser is transmitted into an optical power meter 2-6, the other path of the laser passes through a first reflecting mirror 2-3 and a second beam splitter 2-4 and then is transmitted into a conversion head arranged above a two-layer light path support frame, a dichroic mirror 2-5 is obliquely arranged inside the conversion head at an angle of 45 degrees, and the laser penetrates through the dichroic mirror 2-5 and then is vertically and downwards transmitted into an objective lens on a scanning imaging mirror body unit through a fourth reflecting mirror 2-21. The lower layer is a fluorescence collection light path which comprises a first achromatic lens 2-13, a pinhole 2-14, a second achromatic lens 2-15, a filter 2-16, a third achromatic lens 2-17, a single photon detector 2-18, a first plane mirror 2-19 and a second plane mirror 2-20 as shown in figure 7; fluorescence generated after the NV color center is excited reversely and respectively passes through an objective lens 5-6, a fourth reflecting mirror 2-21, a dichroic mirror 2-5, a lower layer light path outside the cavity body vertically and downwards, is reflected by a first plane mirror 2-19 and a second plane mirror 2-20, sequentially passes through a first achromat 2-13, a pinhole 2-14, a second achromat 2-15 and a filter 2-16, and is collected by a single photon detector 2-18. The light emitting diode is used for CCD imaging and does not participate in NV color center excitation and fluorescence collection functions. As shown in figure 1, the microwave unit generates microwaves through a wave source, the switches generate a specified sequence under the control of a time sequence generator, the specified sequence is emitted through an annular microwave coil 5-11 fixed at the front end of a Z-direction motor on the right side wall to drive NV color centers, fluorescence generated after the NV color centers is excited finally reaches a single photon detector 2-18, and therefore the fluorescence is collected through the single photon detector 2-18.
The main cavity 1 is provided with a main cavity door 1-4, the endoscope body can be installed and debugged by opening the main cavity door 1-4, and the main cavity door 1-4 can be closed and then vacuumized by using the molecular pump unit 4. The inside low temperature cavity that has one to separate with the baffle of main cavity body 1 when needs are broken the vacuum operation in main cavity body 1, does not influence the vacuum environment in low temperature chamber like this to can protect liquid nitrogen (or liquid helium), reduce the consumption of liquid nitrogen (or liquid helium).
The scanning imaging mirror unit 5 comprises: an electronics base 5-2; the electronic junction box 5-1 is arranged at the front end of the electronic base 5-2 and provides an electronic interface for the line connection of each part; the three-dimensional double-precision piezoelectric motor can simultaneously realize XYZ three-dimensional coarse approximation and XYZ three-dimensional fine scanning. There are two types of three-dimensional double-precision piezoelectric motors. As shown in FIG. 12, the first three-dimensional double-precision piezoelectric motor 5-41 is a Z-direction motor 5-4-1 with a small diameter, the first three-dimensional double-precision piezoelectric motor 5-41 is located at the top end of the Z-direction motor 5-3-1 of the fourth three-dimensional double-precision piezoelectric motor, the top end of the Z-direction motor 5-41 of the first three-dimensional double-precision piezoelectric motor is a sample holder 5-12, the second three-dimensional double-precision piezoelectric motor 5-42 and the third three-dimensional double-precision piezoelectric motor 5-43 are respectively fixed on the rear wall 5-4 and the right side wall 5-13, and the front ends of the Z-direction motors are respectively fixed with a magnet 5-10 and an annular microwave coil 5-11. The fourth three-dimensional double-precision piezoelectric motor 5-3 is structurally shown in fig. 13, the diameter of the fourth three-dimensional double-precision piezoelectric motor Z-direction motor 5-3-1 is larger and thicker, and the fourth three-dimensional double-precision piezoelectric motor 5-3 is fixed on the bottom layer electronics base 5-2. The hinge assembly 5-5 and the two Z-direction motors 5-3-1 are combined into an angle adjusting device which is used as an adjusting platform and mainly used for leveling the probes 5-13, and angle adjustment of 0-7 degrees can be realized. The four support rods 5-7 are used for supporting the objective lens adapter 5-8 at the top, and the objective lens adapter 5-8 is used for fixing the objective lens 5-6. The support rod 5-7 is a two-joint, the upper half part can use columns with different lengths, so that the support rod can be suitable for the objective lenses 5-8 with different models, and the lower half part is hollow and can be used for routing.
The fourth three-dimensional double-precision piezoelectric motor 5-3 of one layer in the scanning imaging mirror body unit 5 can carry out XYZ three-dimensional movement and XYZ three-dimensional fine scanning on the probe 5-13 and the whole sample, and is mainly used for positioning a diamond probe and carrying out confocal scanning imaging on the probe 5-13. The two-layer three-dimensional double-precision motor is used for positioning and three-dimensional fine scanning of the sample. The upper part of the scanning imaging lens body unit 5 is provided with an objective lens 5-6, after the diamond probe 5-13 and the sample are placed, the objective lens 5-6 is fixed at the center of an objective lens adapter 5-8 and then is arranged above the center. The objective 5-6 will be fixed during the whole experiment afterwards.
When the invention works, the scanning imaging mirror body unit 5 is arranged in the vacuum cavity. Firstly, a fourth three-dimensional double-precision piezoelectric motor 5-3 of a layer of a scanning imaging lens body unit 5 is utilized to position a diamond NV color center probe, the diamond probe is positioned on a focal plane of an objective lens 5-6, then a second three-dimensional double-precision piezoelectric motor 5-42 and a third three-dimensional double-precision piezoelectric motor 5-43 are respectively utilized to enable a magnet and an annular microwave coil to be close to the diamond probe, a magnetic field and microwaves are applied to the probe, then a layer of the fourth three-dimensional double-precision piezoelectric motor Z is utilized to perform confocal scanning imaging on the diamond probe to obtain a fluorescence image, and then a continuous wave-front experiment can be performed, so that the NV color center is determined. The two-layer three-dimensional double-precision motor is used for positioning a sample, and after the area is determined, the three-dimensional fine scanning function of the two-layer three-dimensional double-precision motor can be utilized to perform needle insertion and scanning imaging experiments on the sample.
The above-mentioned embodiments are intended to illustrate the objects, technical solutions and advantages of the present invention in further detail, and it should be understood that the above-mentioned embodiments are only exemplary embodiments of the present invention and are not intended to limit the present invention, and any modifications, equivalents, improvements and the like made within the spirit and principle of the present invention should be included in the protection scope of the present invention.
Claims (10)
1. A vacuum scanning magnetic detection microscope based on diamond quantum sensing comprises:
a work table;
the main cavity is arranged on the workbench and comprises a vacuum cavity and a Dewar cavity, and the top end of the main cavity is provided with a light through hole;
the lens body suspension assembly is suspended at the top of the vacuum cavity;
scanning imaging mirror unit, including:
the electronic base is placed on the mirror body suspension component;
the three-dimensional double-precision adjusting assembly comprises a first three-dimensional adjusting motor, a second three-dimensional adjusting motor, a third three-dimensional adjusting motor and a fourth three-dimensional adjusting motor; the fourth three-dimensional adjusting motor is arranged on the electronics base; the first three-dimensional adjusting motor is fixed at the top end of the fourth three-dimensional adjusting motor and is positioned in the right center of the scanning mirror body; the second three-dimensional adjusting motor and the third three-dimensional adjusting motor are respectively arranged on two adjacent side walls of the mirror body suspension assembly, the top end of the second three-dimensional adjusting motor is provided with a magnet, and the top end of the third three-dimensional adjusting motor is provided with a microwave coil;
The sample seat is arranged at the top of the first three-dimensional adjusting motor, and a sample is placed on the sample seat;
the probe is connected to the front end of the leveling device and is positioned right above the sample seat;
an objective lens located above the probe;
the NV excitation collecting light path unit comprises an excitation light path and a fluorescence collecting light path; the excitation light path comprises an optical fiber coupler, a first reflecting mirror and a dichroic mirror, laser enters the objective lens through the light through port after passing through the optical fiber coupler, the first reflecting mirror and the dichroic mirror and is focused on the diamond probe to excite the NV color center, fluorescence generated after the NV color center is excited reversely passes through the dichroic mirror from the objective lens to the reflecting mirror respectively, and then reaches the single photon detector in the fluorescence collection light path to be collected.
2. The vacuum scanning magnetic detection microscope of claim 1,
the scanning imaging lens body also comprises a support frame and an objective lens adapter; the objective lens adaptor is arranged at the top of the support frame;
the objective lens is fixed through the objective lens adapter and is positioned above the probe.
3. The vacuum scanning magnetic detection microscope of claim 2,
the support frame includes four bracing pieces, the bracing piece is two and connects the bracing piece, and length is adjustable.
4. The vacuum scanning magnetic detection microscope of claim 1,
the mirror body suspension assembly is fixedly connected with the cavity and suspends the scanning mirror body in the vacuum cavity.
5. The vacuum scanning magnetic detection microscope of claim 1,
a Dewar is arranged in the Dewar cavity and connected with the sample table;
wherein a cold head switch is arranged in the Dewar cavity, a low-temperature cold head is arranged in the vacuum cavity, and two ends of the cold head switch are respectively connected with the low-temperature cold head and the Dewar; the other end of the low-temperature cold head is connected with a copper braid, and the other end of the copper braid is connected with the sample platform.
6. The vacuum scanning magnetic detection microscope of claim 1,
the vacuum scanning magnetic detection microscope also comprises a vacuum unit, and the vacuum unit is respectively connected with the vacuum cavity and the Dewar cavity;
wherein, the vacuum unit comprises a molecular pump set which is arranged below the workbench.
7. The vacuum scanning magnetic detection microscope of claim 1,
the scanning imaging mirror body unit further comprises two adjusting components and a hinge, the hinge is respectively connected with the tops of the two adjusting components, the front end of the hinge is connected with a probe, and the angle of the probe is adjusted through the adjusting components;
Wherein the adjustment assembly comprises a Z-direction motor; the adjusting component is arranged on the first three-dimensional adjusting motor.
8. The vacuum scanning magnetic detection microscope of claim 1,
the NV excitation collection optical path unit further comprises a CCD optical path.
9. The vacuum scanning magnetic detection microscope of claim 1,
a main cavity door is arranged on the main cavity body; an observation window is arranged on the main cavity door;
and a reserved flange is also arranged on the main cavity.
10. The vacuum scanning magnetic detection microscope of claim 1,
the working table comprises an air-floatation vibration isolation table or an active vibration isolation table.
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