CN104502315A - Micro-region fluorescent scanning measurement system - Google Patents
Micro-region fluorescent scanning measurement system Download PDFInfo
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- CN104502315A CN104502315A CN201410720085.0A CN201410720085A CN104502315A CN 104502315 A CN104502315 A CN 104502315A CN 201410720085 A CN201410720085 A CN 201410720085A CN 104502315 A CN104502315 A CN 104502315A
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Abstract
The invention discloses a micro-region fluorescent scanning measurement system which comprises an exciting light source, an excitation light path part, a fluorescence signal collection light path part, a micro-region imaging light path part, a table-board, a two-dimensional electric translation system, a vacuum sample chamber, a vacuum pump, a low-temperature system and temperature control device, a grating spectrometer and a CCD detector, wherein the input end of the excitation light path part is connected with the exciting light source, and the output end of the excitation light path part is connected with the vacuum sample chamber; the excitation light path part is used for guiding laser to income into a sample in the vacuum sample chamber; the fluorescence signal collection light path part is used for collecting a fluorescence signal emitted from the sample; the micro-region imaging light path part is connected with the excitation light path and the fluorescence signal collection light path and is used for micro-region imaging and positioning of the sample surface topography; the excitation light path and the fluorescence signal collection light path part are arranged on the table-board; the two-dimensional electric translation system drives the table-board to do a two-dimensional scanning motion; the vacuum sample chamber is used for placing the sample; the vacuum pump is used for maintaining the vacuum degree of the vacuum sample chamber; according to the low-temperature system and temperature control device, the vacuum degree of the vacuum sample is maintained, and the sample chamber is maintained in a needed low temperature environment; the grating spectrometer is used for processing the fluorescence signal; and the CCD detector is used for acquiring the fluorescence signal.
Description
Technical field
The invention belongs to spectral instrument and spectral technique field, refer to a kind of self-control low temperature (normal temperature) microcell fluorescent scanning measuring system of improvement especially.
Background technology
Spectral technique utilizes interaction of laser with material to study the important means of material physics and chemistry character, is widely used in the various fields such as physics and chemistry, biology, especially in semiconductor surface detection and sign, has irreplaceable position.For semiconductor application field, common spectral characterization means comprise emission spectrum, absorption spectrum, photoluminescence (fluorescence) spectrum, Raman spectrum etc.Early stage spectral technique is limited to light source, and after laser instrument invention, export owing to can obtain coherent light waves, spectral technique obtains development at full speed, and finally becomes a kind of common optical detection means.
Fluorescence is a kind of chemiluminescence phenomenon of photoluminescence, and after extraneous incident light is subsequently absorbed in the material, electronic transition, to excited state, because the unstable electronics of excited state transits to low-energy state downwards, sends the light being longer than lambda1-wavelength.Characterize in application at semiconductor surface, fluorescence spectroscopy technique, as a kind of spectral detection means the most conventional, can obtain the important information such as semiconductor surface and near surface electronic band structure, impurity, defect and surface state.At low temperatures, the Particles Moving in material is suppressed, and electronics more occupies in lower energy state, thus make fluorescent effect comparatively normal temperature more easily observe, at low temperatures observe fluorescence be a kind of conventional means.
In recent years, due to the propelling of low-dimensional material physical study, need the material surface area of detection more and more less, microscopic spectrum technology comes into one's own gradually.As the fluorescence for the single quantum dot in semiconductor or quantum line, they are because dimension is all at micron even Nano grade, and traditional research means can not be satisfied the demand, and microcell fluorescent technique is also just taken advantage of a turn of events and get on.Microcell fluorescence, normally by controlling the size of launching spot, as used high power objective to focus at excitation light path, and coordinating accurate light path design, detecting micron so that the fluorescent effect in sub-micron rank region.Microcell fluorescent technique not only can detect the fluorescence that a single point sends, and also by mobile spot or mobile example, detects a region, obtains region fluorescent scanning image, thus make research expand to face from point.All the time, mobile spot is all a difficult thing, because this relates to the movement of light path, so the method for mobile example is widely adopted.Because aforementioned research needs, often need to carry out microcell fluoroscopic examination at low temperatures.When requiring temperature very low, Cryo Equipment is all very heavy (40 ~ 90KG as common in low temperature liquid nitrogen device) often, and at this moment mobile example carries out scanning and just becomes more difficult, and scanning accuracy is often difficult to reach requirement.
Summary of the invention
The object of the invention is to, provide a kind of self-control low temperature (normal temperature) microcell fluorescent scanning measuring system of improvement, this system sample is fixed together with Cryo Equipment, carrys out mobile spot by mobile light path, thus reaches the object of scanning survey.This system cost is low, is easy to build, and is very applicable to laboratory or commercial Application.
The invention provides a kind of microcell fluorescent scanning measuring system, comprising:
Exciting light sources, for providing the laser of excited sample;
Excitation light path part, its input end is connected with excitation light source output terminal, and output terminal is connected with vacuum specimen chamber, and for the sample guiding laser to be incident to vacuum sample indoor, thus excited sample sends fluorescence signal;
Fluorescence signal collection light path part, its input end is connected with vacuum specimen chamber, and for collecting the fluorescence signal that sample sends, output terminal and spectrometer are connected to gather fluorescence spectrum with detector;
Microcell imaging optical path part, partially overlaps with excitation light path and fluorescence signal collection light path, for microcell imaging and the location of sample surface morphology;
Table top, excitation light path part and fluorescence signal collection light path part are placed on table top, for carrying the element in two parts light path;
Two dimension electric translation system, table top is placed on it, does two-dimensional scan campaign for being with moving platform;
Vacuum specimen chamber, for placing sample;
Vacuum pump, for keeping vacuum specimen chamber vacuum tightness;
Cryogenic system and temperature regulating device, be connected with vacuum specimen chamber, for keeping vacuum specimen chamber vacuum tightness and maintaining the low temperature environment that sample chamber is in needs;
Grating spectrograph, is connected with fluorescence signal collection light path output terminal, for the process of fluorescence signal;
Ccd detector, is connected with grating spectrograph, for the collection of fluorescence signal;
Computer data acquisition system, for receiving the spectral signal and the picture signal of imaging optical path that ccd detector exports, controlling grating spectrograph simultaneously and rotating, and controlling two-dimensional motion system and cryogenic system;
Optical table, except computing machine and cryogenic system, other opticators are placed on optical table.
Low temperature provided by the present invention (normal temperature) microcell fluorescent scanning measures improved system, and arrange in pairs or groups suitable excitation source and ccd detector, can realize the scanning probe of micron level spatial resolution.The present invention is different from the General low temperature fluorescent scanning system being undertaken scanning by mobile cryogenic sample chamber, and this system introduces fiber optic conduction, and the subelement in mobile light path, makes two-dimensional control system load-bearing greatly alleviate, thus effectively ensure scanning accuracy.The fluorescent scanning that this system may be used for as the low dimensional structures such as semiconductor-quantum-point, quantum line or material fine region is measured, and has the features such as low cost, high stability and high resolving power.
Accompanying drawing explanation
In order to further illustrate technology contents of the present invention, below in conjunction with instantiation, and with reference to accompanying drawing, the present invention is described in more detail, wherein:
Fig. 1 is the block schematic illustration of self-control low temperature (normal temperature) the microcell fluorescent scanning measuring system of a kind of improvement in the present invention;
Fig. 2 is the composition structural representation of microcell fluorescent scanning measuring system in the embodiment of the present invention.
Embodiment
For making the object, technical solutions and advantages of the present invention clearly understand, below in conjunction with specific embodiment, and with reference to accompanying drawing, the present invention is described in further detail.
The present invention relates to a kind of self-control low temperature (normal temperature) microcell fluorescent scanning measuring system of improvement, as shown in Figure 1, this system comprises:
Exciting light sources, be common solid-state or gas laser, light source output terminal is connected with excitation light path input end, for providing the laser of excited sample;
Excitation light path, its input end is connected with excitation source output terminal, and output terminal is connected with vacuum specimen chamber, for guiding the incident sample of laser, thus excited sample;
Fluorescence signal collection light path, its input end is connected with vacuum specimen chamber, for collecting the fluorescence signal that sample sends;
Microcell imaging optical path, is connected with fluorescence signal collection light path with excitation light path, for microcell imaging and the location survey of sample surfaces fine structure;
Table top excitation light path and fluorescence signal collection light path are placed on table top, for carrying this two parts light path;
Two dimension electric translation system, table top is placed on it, does two-dimensional scan campaign for being with moving platform;
Vacuum specimen chamber, is connected with fluorescence signal collection light path input end with excitation light path output terminal, for placing sample, guiding laser to enter sample chamber excited sample, and is spread out of by fluorescence signal and collect light path;
Vacuum pump, for keeping sample vacuum chamber degree;
Cryogenic system and temperature regulating device, be connected with vacuum specimen chamber, for keeping the low temperature environment of sample chamber needs;
Grating spectrograph, is connected, for fluorescent spectroscopy with fluorescence signal collection light path output terminal;
Ccd detector, is connected with grating spectrograph, coordinates spectrometer, gathers spectral signal intensity;
Computer data acquisition system, the light intensity signal for being exported by ccd detector carries out analog to digital conversion and obtains the picture signal of fluorescence spectrum and collection imaging optical path intuitively and show; Export control signal simultaneously and control grating spectrograph rotation, and control the alternating temperature operation that two-dimension translational platform carries out two-dimensional scan campaign and cryogenic system;
Optical table, except computing machine and cryogenic system, all the other opticses are all placed on optical table.
Fig. 2 shows the structural representation of self-control low temperature (normal temperature) the microcell fluorescent scanning measuring system improved in the specific embodiment of the invention.As shown in Figure 2,
LASER Light Source comprises laser instrument 10, and it is connected to excitation light path by the first optical fiber 11; Described first optical fiber 11 and collection light path the second optical fiber 35 used are single-mode fiber, because excitation light power does not need very high, optical power loss in optical fiber can be considered, in actual measurement, collect optical fiber for fluorescence signal decay within the acceptable range;
Excitation light path comprises the first optical fiber head 21, first attenuator 22, beam expanding lens 23, diaphragm 24, first catoptron 25, second attenuator 26, holographic notch filters 27 and object lens 28; Wherein, the first optical fiber head 21, first attenuator 22, beam expanding lens 23, diaphragm 24, first catoptron 25, second attenuator 26, holographic notch filters 27 and object lens 28 are all placed on the second table top 20; The laser that described laser instrument 10 sends is transmitted through the fiber to the first optical fiber head 21, first optical fiber head 21 of excitation light path by Laser Transmission to the first attenuator 22, described first attenuator 22 for decaying to described laser intensity, be applicable to concrete sample excitation; Laser output after the first attenuator 22 is decayed is to beam expanding lens 23, and described beam expanding lens 23 is for collimating the depth of parallelism of laser, so that object lens focus on; Described beam expanding lens 23 laser out transfers to diaphragm 24 through the semi-transparent semi-reflecting lens 43 of imaging optical path, and described diaphragm 24, for regulating the size of light beam, coordinates described beam expanding lens 23 to improve the exciting light depth of parallelism, so that object lens 28 focus on comparatively small light spot; Laser through diaphragm 24 is reflexed to the second attenuator 26 by the second catoptron 25, described second attenuator 26 for again decaying to described laser, to be applicable to concrete sample excitation; Laser after the second attenuator 26 is decayed is incident to holographic notch filters 27 place, described holographic notch filters 27 has very low saturating inverse ratio for the light (being incident laser) of specific wavelength here, there is very little bandwidth, also namely Main Function is the sample surfaces by being transferred to sample chamber 29 after the reflection of incident laser major part through object lens 28, the laser light returned sample surfaces reflection is little, simultaneously minimum through more reflection to the fluorescence of sample surfaces outgoing; Laser through holographic notch filters 27 enters object lens 28, described object lens 28 for by Laser Focusing to um magnitude, collect the fluorescence of sample surfaces outgoing simultaneously; Be irradiated to surface, sample chamber 29 from described object lens 28 laser out, described sample chamber 29 is low temperature or normal temperature device, for placing testing sample; Wherein diaphragm 24, first catoptron 25, attenuator 26, holographic notch filters 27 and the light path described by object lens 28 overlap with imaging optical path first half light path described below;
Phosphor collection light path comprises object lens 28, holographic notch filters 27, second catoptron 31, second lens 32, filter set 33, second optical fiber head 34 and the second optical fiber 35; Wherein, object lens 28, holographic notch filters 27, second catoptron 31, first lens 32, filter set 33 and the second optical fiber head 34 are all placed on the second table top 20; In holographic notch filters 27 and object lens 28 place phosphor collection light path and excitation light path common optical pathways; The fluorescence of sample surfaces outgoing in sample chamber 29 arrives the second catoptron 31 place through object lens 28 and holographic notch filters 27, and the fluorescence of described holographic notch filters 27 pairs of sample outgoing has high saturating low effect instead, and to make, fluorescence is as much as possible to be collected; Arrive the first lens 32 from the fluorescence of the second catoptron 31 reflection and (notice that Fig. 2, the 3rd catoptron 44 is only positioned at when imaging in light path, light path can be shifted out when carrying out fluorescence measurement, do not affect phosphor collection), these first lens 32 for by fluorescent foci to the second optical fiber head 34 collection place; Fluorescence through the first lens 32 arrives the second optical fiber head 34 through filter set 33, and described filter set 33 filters for remainder exciting light sample surfaces reflection returned, allow simultaneously fluorescence through; Fluorescence collected by second optical fiber head 34 transfers to spectrometer 50 by the second optical fiber 35 and ccd detector 60 processes; Wherein object lens 28, holographic notch filters 27 and the light path described by the second catoptron 31 overlap with described imaging optical path latter half light path below;
Imaging optical path comprises LED 41, second lens 42, the 3rd lens 45, CCD camera 46, semi-transparent semi-reflecting lens 43 and the 3rd catoptron 44; Wherein, described LED 41, second lens 42 are placed in the first table top the 40, three lens 45, CCD camera 46 is placed in the 3rd table top 30; Semi-transparent semi-reflecting lens 43 and the 3rd catoptron 44 are placed in the second table top 20; Described imaging optical path is divided into two parts, and Part I comprises LED 41, second lens 42 and semi-transparent semi-reflecting lens 43, and Part II comprises the 3rd catoptron 44, the 3rd lens 45 and CCD camera 46; Described LED 41 is for providing the illumination white light of imaging optical path, and described second lens 42 become parallel beam for white light LED 41 sent; Described semi-transparent semi-reflecting lens 43 for by white light reflection to the light path identical with excitation light path, simultaneously do not affect passing through of exciting light; White light arrives sample chamber 29 through the light path identical with excitation light path again after semi-transparent semi-reflecting lens 43 reflects, the 3rd catoptron 44 is finally arrived again through the light path identical with phosphor collection light path, described 3rd catoptron 44 reflexes to imaging CCD46 place for the white light (general testing sample all has polished surface or microslide) sample surfaces reflection returned, this catoptron 44 is equipped with a translation base, shift out collection light path when fluorescence measurement, need to move into light path when imaging; Described 3rd lens 45 focus on described CCD camera 46 place for the white light reflected by sample surfaces and carry out imaging; The only work in sample surface morphology imaging of described imaging optical path, awaits orders by closing LED 41 and shifting out the 3rd catoptron 44 carrying out fluorescence measurement;
Described each catoptron, for changing light path, can need to consider suitably increase and decrease according to actual light path;
Described second table top 20 is placed on two-dimentional motorized precision translation stage; Being positioned at the second catoptron 31 on the second table top 20, holographic notch filters 27, object lens 28 and sample chamber 29 is positioned on same pedal line in accordance with the order from top to bottom, and sample measured like this can horizontal positioned, is convenient to carry out horizontal two-dimension scanning survey; Sample chamber is fixed and be connected with attemperating unit with cryogenic system (not marking in figure), and sample chamber uses relatively more conventional compressed helium refrigeration, and sample chamber is connected with compression set by linking arm, carries out alternating temperature to testing sample.Collect logical second optical fiber 35 of optical line terminal to be connected with spectrometer 50, fluorescence spectrum signal ccd detector 60 gathers and enters computer data acquisition system (not marking in figure).
Described laser instrument 10 can be measured requirement per sample and select, and laser instrument introduces excitation light path by optical fiber;
Second table top 20 is for carrying excitation light path and collecting light path, and provide the M6 screw hole of standard, below is connected with two-dimentional motorized precision translation stage;
Two dimension motorized precision translation stage is for carrying the second table top and the excitation light path on it and collecting light path, and do two dimensional motion in the horizontal direction, load-bearing and the mobile accuracy of translation stage are selected as required, and general load-bearing 15KG, positioning precision 1um can meet the demands;
Vacuum specimen chamber when carrying out low temperature test for placing sample, compressor or molecular pump ensure sample vacuum chamber degree, and sample chamber provides an optical window, enter excited sample and collect fluorescence signal for directs excitation light, sample is placed on metab, and metab is connected with cryogenic system; When carrying out normal temperature experiment, vacuum specimen chamber can replace with conventional sample base.
Vacuum pump, for keeping sample vacuum chamber degree, normally mechanical pump or molecular pump, the latter can make vacuum tightness improve one to two orders of magnitude;
Cryogenic system and attemperating unit are selected as required, adopt than circulation helium refrigerator or helium continuous stream refrigeration machine, then be equipped with temperature controller as required that temperature is lower, realize continuous temperature and control within the scope of 4-350k;
Grating spectrograph is used for carrying out light splitting to fluorescence signal, is then obtained the intensity of corresponding light by ccd detector; Spectrometer has obstructed grating line usually, and for the measurement of different spectrum line precision, spectrometer has several output window usually, connects the detector of different response wave band respectively;
Ccd detector is connected with grating spectrograph output port, gathers the light intensity that spectrometer exports; Adopt the detector kind that different-waveband is corresponding as required;
Described optical table 70, for carrying all opticators except computing machine and cryogenic system, ensures that microcell optical detection can not be subject to the interference of extraneous trickle vibrations;
Computer data acquisition system comprises data acquisition interface and data acquisition software, acquisition software can by realizations such as common programming language C, C++, VB or Labview, realize CCD camera image to gather and ccd detector signals collecting, and grating spectrograph, two-dimentional motorized precision translation stage and attemperating unit are controlled;
Optical table is for carrying the light path part except department of computer science unifies except part attemperating unit, and optical table is requisite basic equipment in Experiments of Optics.
The above laser instrument adopts solid-state 532nm laser instrument and helium cadmium (HeCd) laser instrument (wavelength 325nm and 442nm), and the excitation wavelength needed per sample is selected.Laser instrument exports continuous laser, output power 200-500mW.Laser is irradiated on the sample in sample chamber by excitation light path, fluorescence excitation.
The above second table top 20 is fixed on a two-dimentional motorized precision translation stage, and two-dimentional motorized precision translation stage drives table top 20 to do two-dimensional scan campaign, thus makes object lens make scanning motion at sample surfaces.Motorized precision translation stage requires about center-point load 15kg, stroke 50-100mm, resolution 1um, and resetting is less than 2um.Optical element on table top 20 should be tried one's best weight reduction, and to make held stationary in two dimensional motion process, as table top 20 uses aluminum alloy materials, unnecessary optical element can move following table 20.
The use when carrying out low temperature test of the above sample chamber, be connected with cryogenic system with molecular pump simultaneously, molecular pump can ensure that sample vacuum chamber degree reaches more than 10-4mbar, sample is bonded on copper pedestal by low temperature glue, base is connected with closed loop helium refrigerator by copper arm, refrigerator is connected with attemperating unit, and attemperating unit Quality control room temperature changes within the scope of 4k-350k.When carrying out normal temperature experiment, vacuum specimen chamber can replace with conventional sample seat.
Fluorescence signal enters spectrometer by optical fiber, spectrometer uses different grating for adapting to different spectral band, cover UV-IR full band range, spectrometer provides two delivery outlets, connects the ccd detector (corresponding measurement wave band is 400-800nm) of Si and the ccd detector (corresponding measurement wave band is 800-1700nm) of InGaAs respectively.Ccd detector makes electricity consumption refrigeration or recirculated water refrigeration.
The above computer control system is connected with CCD camera, two-dimentional motorized precision translation stage, spectrometer, ccd detector and attemperating unit respectively; CCD camera is connected, for gathering image by USB2.0 interface; Be connected by the controllor for step-by-step motor of RS-232 serial ports with two-dimentional motorized precision translation stage, control the motion of two-dimension translational platform and stop; Be connected with spectrometer and ccd detector by USB2.0, control spectrometer and rotate and gather ccd output signal; Be connected with attemperating unit by RS-232 serial ports, Quality control room temperature changes.Computer control software uses Labview programming, realizes instrument controlling and data acquisition function.
Above-described specific embodiment; object of the present invention, technical scheme and beneficial effect are further described; be understood that; the foregoing is only specific embodiments of the invention; be not limited to the present invention; within the spirit and principles in the present invention all, any amendment made, equivalent replacement, improvement etc., all should be included within protection scope of the present invention.
Claims (11)
1. a microcell fluorescent scanning measuring system, comprising:
Exciting light sources, for providing the laser of excited sample;
Excitation light path part, its input end is connected with excitation light source output terminal, and output terminal is connected with vacuum specimen chamber, and for the sample surfaces guiding laser to be incident to vacuum sample indoor, thus excited sample sends fluorescence signal;
Fluorescence signal collection light path part, its input end is connected with vacuum specimen chamber, for collecting the fluorescence signal that sample sends;
Microcell imaging optical path part, is connected with fluorescence signal collection light path with excitation light path, for microcell imaging and the location of sample surface morphology;
Table top, excitation light path part and fluorescence signal collection light path part are placed on table top, for carrying the element in excitation light path part and fluorescence signal collection light path part;
Two dimension electric translation system, table top is placed on it, does two-dimensional scan campaign for being with moving platform;
Vacuum specimen chamber, for placing sample;
Vacuum pump, for keeping vacuum specimen chamber vacuum tightness;
Cryogenic system and temperature regulating device, be connected with vacuum specimen chamber, for keeping vacuum specimen chamber vacuum tightness and maintaining the low temperature environment that vacuum specimen chamber is in needs;
Grating spectrograph, is connected with fluorescence signal collection light path output terminal, for the process of fluorescence signal;
Ccd detector, is connected with grating spectrograph, for the collection of fluorescence signal;
Computer data acquisition system, for receiving the spectral signal and the picture signal of imaging optical path that ccd detector exports, controlling grating spectrograph and rotating, and controlling two-dimensional motion system and cryogenic system;
Optical table, except computing machine and cryogenic system, other parts are placed on optical table.
2. microcell fluorescent scanning measuring system according to claim 1, wherein, excitation source is gaseous state or solid-state laser, and described laser instrument introduces excitation light path by optical fiber.
3. microcell fluorescent scanning measuring system according to claim 1, wherein, described excitation light path part comprises collimation for laser and focusing, comprises attenuator, beam expanding lens, diaphragm, catoptron, holographic notch filters and object lens.
4. microcell fluorescent scanning measuring system according to claim 1, wherein, described fluorescence signal collection light path, for collecting the fluorescence that sample sends, comprise object lens, holographic notch filters, catoptron, lens, optical filter, introduce grating spectrograph by optical fiber.
5. microcell fluorescent scanning measuring system according to claim 1, wherein, described imaging optical path is divided into two parts, and a part is connected with excitation light path, comprises LED white light source, lens, semi-transparent semi-reflecting lens, for being provided as required light source; Another part is connected with fluorescence signal collection light path, comprises catoptron, lens, CCD camera, collects for sample surfaces imaging signal.
6. microcell fluorescent scanning measuring system according to claim 1, wherein, described table top, for carrying excitation light path and collecting light path, is connected with two-dimentional motorized precision translation stage below it.
7. microcell fluorescent scanning measuring system according to claim 1, wherein, the excitation light path of described two-dimentional motorized precision translation stage on loading floor and its and collection light path, it does two dimensional motion in the horizontal direction.
8. microcell fluorescent scanning measuring system according to claim 1, wherein, described vacuum specimen chamber when carrying out low temperature test for placing sample, compressor or molecular pump ensure vacuum tightness, sample chamber provides an optical window, for guiding laser enter excited sample and collect fluorescence signal, sample is placed on metab, and metab is connected with cryogenic system by copper arm; When carrying out normal temperature experiment, vacuum specimen chamber common sample seat replaces.
9. microcell fluorescent scanning measuring system according to claim 1, wherein, described vacuum pump is for keeping vacuum specimen chamber vacuum tightness, and it comprises mechanical pump or molecular pump.
10. microcell fluorescent scanning measuring system according to claim 1, wherein, described cryogenic system adopts closed loop helium refrigerator or helium continuous stream refrigeration machine when low-temperature test, and described temperature regulating device realizes continuous temperature and controls within the scope of 4-350k.
11. microcell fluorescent scanning measuring systems according to claim 1, wherein, grating spectrograph is used for carrying out light splitting to fluorescence signal, described grating spectrograph has obstructed grating line, for the measurement of different spectrum line precision, described grating spectrograph has multiple output window, connects the ccd detector of different response wave band respectively, and spectrometer and detector are placed on optical table.
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