CN114738860A - Air purification device for scribing process - Google Patents
Air purification device for scribing process Download PDFInfo
- Publication number
- CN114738860A CN114738860A CN202210429439.0A CN202210429439A CN114738860A CN 114738860 A CN114738860 A CN 114738860A CN 202210429439 A CN202210429439 A CN 202210429439A CN 114738860 A CN114738860 A CN 114738860A
- Authority
- CN
- China
- Prior art keywords
- air
- air purification
- filter device
- static pressure
- dicing
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Images
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F24—HEATING; RANGES; VENTILATING
- F24F—AIR-CONDITIONING; AIR-HUMIDIFICATION; VENTILATION; USE OF AIR CURRENTS FOR SCREENING
- F24F3/00—Air-conditioning systems in which conditioned primary air is supplied from one or more central stations to distributing units in the rooms or spaces where it may receive secondary treatment; Apparatus specially designed for such systems
- F24F3/12—Air-conditioning systems in which conditioned primary air is supplied from one or more central stations to distributing units in the rooms or spaces where it may receive secondary treatment; Apparatus specially designed for such systems characterised by the treatment of the air otherwise than by heating and cooling
- F24F3/16—Air-conditioning systems in which conditioned primary air is supplied from one or more central stations to distributing units in the rooms or spaces where it may receive secondary treatment; Apparatus specially designed for such systems characterised by the treatment of the air otherwise than by heating and cooling by purification, e.g. by filtering; by sterilisation; by ozonisation
- F24F3/167—Clean rooms, i.e. enclosed spaces in which a uniform flow of filtered air is distributed
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F24—HEATING; RANGES; VENTILATING
- F24F—AIR-CONDITIONING; AIR-HUMIDIFICATION; VENTILATION; USE OF AIR CURRENTS FOR SCREENING
- F24F13/00—Details common to, or for air-conditioning, air-humidification, ventilation or use of air currents for screening
- F24F13/28—Arrangement or mounting of filters
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F24—HEATING; RANGES; VENTILATING
- F24F—AIR-CONDITIONING; AIR-HUMIDIFICATION; VENTILATION; USE OF AIR CURRENTS FOR SCREENING
- F24F3/00—Air-conditioning systems in which conditioned primary air is supplied from one or more central stations to distributing units in the rooms or spaces where it may receive secondary treatment; Apparatus specially designed for such systems
- F24F3/12—Air-conditioning systems in which conditioned primary air is supplied from one or more central stations to distributing units in the rooms or spaces where it may receive secondary treatment; Apparatus specially designed for such systems characterised by the treatment of the air otherwise than by heating and cooling
- F24F3/14—Air-conditioning systems in which conditioned primary air is supplied from one or more central stations to distributing units in the rooms or spaces where it may receive secondary treatment; Apparatus specially designed for such systems characterised by the treatment of the air otherwise than by heating and cooling by humidification; by dehumidification
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F24—HEATING; RANGES; VENTILATING
- F24F—AIR-CONDITIONING; AIR-HUMIDIFICATION; VENTILATION; USE OF AIR CURRENTS FOR SCREENING
- F24F8/00—Treatment, e.g. purification, of air supplied to human living or working spaces otherwise than by heating, cooling, humidifying or drying
- F24F8/10—Treatment, e.g. purification, of air supplied to human living or working spaces otherwise than by heating, cooling, humidifying or drying by separation, e.g. by filtering
Landscapes
- Engineering & Computer Science (AREA)
- Chemical & Material Sciences (AREA)
- Combustion & Propulsion (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Dicing (AREA)
Abstract
The invention provides an air purification device for scribing process, which comprises: a water mist separation device connected to the dicing saw by a short pipe to receive dicing wet air and configured to include a filler filling area and a baffle plate; an air filtration device configured to include a primary filter device and a secondary filter device; and a centrifugal fan device configured between the primary filter device and the intermediate filter device to provide a static pressure zone for the intermediate filter device, wherein the intermediate filter device is connected to the ambient static pressure layer of the dicing process to provide purified ventilation to the ambient static pressure layer.
Description
Technical Field
The invention relates to a semiconductor processing technology, in particular to an ambient air purification device for a semiconductor scribing process.
Background
The semiconductor production process designs a plurality of process flows, which have high complexity, and with the updating of the semiconductor production technology, the manufacturing cost of the production equipment is higher and higher, and the requirements on the production environment are correspondingly increased. In order to ensure the smooth production of semiconductors, the corresponding production steps are carried out in a clean room. How to ensure that the parameters such as temperature, relative humidity, pressure, cleanliness, airflow pattern and the like in the clean room meet the corresponding standards is a problem to be solved by the current production.
In the current production process, the exhaust system exhausts the process exhaust in the clean room to the outside; meanwhile, the fresh air processor system extracts fresh air from the outside and supplements the fresh air into the clean room, and a certain amount of positive pressure is kept.
The current problem that pump drainage air system faced is that semiconductor factory's exhaust system consumption is great to exhaust system is regarded as a whole control, and all process equipment all can be convulsions passively after opening.
In addition, the current design causes large heat load of the air conditioner, a large amount of air which is pumped away and has the constant temperature and humidity of about 22 ℃ and RH50 percent needs a fresh air processing system to pump fresh air from the outside, and the fresh air can be supplied to a clean room through regulation and purification treatments such as multi-stage temperature regulation, humidity control and filtration, and the consumed energy is large.
Therefore, there is a need for an air purification apparatus and system that saves power consumption suitable for semiconductor manufacturing processes.
Disclosure of Invention
One aspect of the present invention provides an air cleaning apparatus for a scribing process, including: a water mist separation device connected to the dicing saw by a short pipe to receive dicing wet air and configured to include a filler filling area and a baffle plate; an air filtration device configured to include a primary filtration device and a secondary filtration device; and a centrifugal fan device configured between the primary filter device and the intermediate filter device to provide a static pressure zone for the intermediate filter device, wherein the intermediate filter device is connected to the ambient static pressure layer of the dicing process to provide purified ventilation to the ambient static pressure layer.
An aspect of the present invention provides an air cleaning apparatus for a dicing process, wherein the filler filling region is filled with a spherical polyhedral filler.
An aspect of the present invention provides an air cleaning apparatus for a scribing process, wherein the baffle is formed of PVC or stainless steel.
An aspect of the present invention provides an air cleaning apparatus for a scribing process, wherein the water mist separating apparatus is connected to a drain pipe having a trap.
One aspect of the present invention provides an air purification apparatus for a dicing process, wherein the primary filter apparatus includes a G4 primary panel filter.
One aspect of the present invention provides an air purification apparatus for a dicing process, wherein the middle-effect filtering apparatus comprises a F6 middle-effect bag filter.
An aspect of the present invention provides an air cleaning apparatus for a scribing process, wherein the centrifugal fan apparatus is configured as a speed-adjustable high pressure centrifugal fan to provide a static pressure zone with adjustable wind pressure.
An aspect of the present invention provides an air cleaning apparatus for a scribing process, wherein the centrifugal fan apparatus is configured to adjust a wind pressure according to a humidity of air filtered by the primary filter apparatus.
An aspect of the present invention provides an air cleaning apparatus for a scribing process, wherein the centrifugal fan apparatus is connected to a drain pipe having a trap.
An aspect of the present invention provides an air cleaning apparatus for a dicing process, in which a portion of air in an ambient static pressure layer is supplied to a dicing saw through a fan filter unit FFU.
Drawings
FIG. 1 is a schematic view of an air purification apparatus according to an embodiment of the present invention; and
fig. 2 is a schematic view illustrating an air purification system including an air purification apparatus according to an embodiment of the present invention.
Detailed Description
Before proceeding with the following detailed description, it may be advantageous to set forth definitions of certain words and phrases used throughout this patent document. The terms "couple," "connect," and derivatives thereof refer to any direct or indirect communication or connection between two or more elements, whether or not those elements are in physical contact with one another. The terms "transmit," "receive," and "communicate," as well as derivatives thereof, encompass both direct and indirect communication. The terms "include" and "comprise," as well as derivatives thereof, mean inclusion without limitation. The term "or" is inclusive, meaning and/or. The phrase "associated with … …" and derivatives thereof means including, included within … …, interconnected, contained within … …, connected or connected with … …, coupled or coupled with … …, in communication with … …, mated, interwoven, juxtaposed, proximate, bound or bound with … …, having an attribute, having a relationship or having a relationship with … …, and the like. The term "controller" refers to any device, system, or part thereof that controls at least one operation. Such a controller may be implemented in hardware, or a combination of hardware and software and/or firmware. The functionality associated with any particular controller may be centralized or distributed, whether locally or remotely. The phrase "at least one of, when used with a list of items, means that different combinations of one or more of the listed items can be used and only one item in the list can be required. For example, "at least one of A, B, C" includes any one of the following combinations: A. b, C, A and B, A and C, B and C, A and B and C.
Definitions for other specific words and phrases are provided throughout this patent document. Those of ordinary skill in the art should understand that in many, if not most instances, such definitions apply to prior, as well as future uses of such defined words and phrases.
In this patent document, the application combination of modules and the division levels of sub-modules are only used for illustration, and the application combination of modules and the division levels of sub-modules may have different manners without departing from the scope of the present disclosure.
For the prior art, in the current production process, an air pumping and exhausting system is used for pumping process exhaust air in a clean room to the outside; meanwhile, the fresh air handling unit system extracts fresh air from the outside and supplements the fresh air into the clean room, so that a large amount of energy is consumed. In order to solve the above-mentioned problems, the present invention provides a purification apparatus that saves energy consumption by individually controlling the exhaust of the dicing unit.
In the packaging factory, the exhaust air of the dicing process accounts for more than 85% of the total exhaust air volume due to the generated moisture and impurities, and based on the above consideration, the power consumption of the exhaust system can be reduced by dividing the dicing unit, that is, by combining six dicing saws (three dicing saws in the case of a twin shaft) and corresponding cleaning devices of one cleaning machine into one exhaust unit and controlling the exhaust unit instead of the overall control.
The dust fog air generated by each air pumping and exhausting unit in the scribing process is subjected to dehydration treatment and filtration purification, so that the dust fog air meets the use requirement of a clean room environment and is internally circulated. This design has avoided the tradition to exhaust a large amount of directly outward arranging, has avoided fresh air conditioner to use very big energy to adjust the temperature, accuse is wet, filter and carry out the benefit back to thereby keep the problem of a large amount of power consumptions of the pressure-fired in the clean room, it has good energy-conserving effect, especially to its energy-conserving effect more obvious under the condition more than 7 ℃ of indoor, outer difference in temperature.
Fig. 1 is a schematic view of an air cleaning apparatus according to an embodiment of the present invention.
Referring to fig. 1, an air cleaning apparatus according to an embodiment of the present invention includes: a water mist separation device, a centrifugal fan device, an air filtering device and an electric controller (external).
According to an embodiment of the invention, the water mist separation device comprises a filler filling area and a baffle plate, wherein spherical multi-surface fillers are filled in the filler filling area. Scribing wet air generated by the scribing machine enters the water mist separation device through the short pipe, moisture in the wet air is filtered through the multi-surface packing and the baffle plate, and the wet air is discharged through a water discharge pipe connected to the water mist separation device, wherein the water discharge pipe has a trap structure, so that air in a factory area is prevented from being polluted through the water discharge pipe. According to an embodiment of the invention, the baffles are formed from PVC or stainless steel. Moisture removal designs employing fillers and baffles can separate moisture from room temperature air generated by dicing saws commonly used in semiconductor processing (e.g., wafer dicing and substrate dicing). Compared with the traditional scheme of removing the water mist in the air medium with higher water mist temperature by adopting the condensing plate, the scheme provided by the embodiment of the invention has a wider applicable temperature range, so that the application range is wider.
The water mist separation device is connected with a primary filter device in the air filter device, and according to the embodiment of the invention, the primary filter device comprises a primary plate filter. Specifically, according to an embodiment of the present invention, a G4 primary plate filter is used, which has a frame made of a hard material, such as metal or PVC, for easy attachment and detachment, and a G4 primary plate filter is used for an air filter with high efficiency, blocking large particles, and has a long service life.
The primary filter device is connected with the centrifugal fan device. According to an embodiment of the invention, the centrifugal fan device is adapted to provide a static pressure zone such that the saw wet air filtered by the primary filter device is provided to the intermediate filter device through the static pressure zone. In addition, the centrifugal fan device is connected to a drain pipe having a trap structure so as to remove water generated in the device. According to an embodiment of the invention, the centrifugal fan device is configured as a speed-adjustable high-pressure centrifugal fan which can provide adjustable wind pressure and thus adjust the static pressure zone compared to a conventional axial fan. In addition, the centrifugal fan device is adjusted by the electric controller to provide adjustable wind pressure, so that the speed and the passing time of scribing humid air passing through the water mist separation device can be adjusted, and the humidity of the purified air can be further adjusted. According to the embodiment of the invention, the wind pressure can be adjusted according to the air humidity filtered by the primary filter device.
The centrifugal fan device is connected with a medium-efficiency filter device in the air filter device, and according to the embodiment of the invention, the medium-efficiency filter device comprises a medium-efficiency bag filter. Specifically, according to an embodiment of the present invention, an F6 middle-effect bag filter is adopted, wherein the F6 middle-effect bag filter may include filter bags made of composite nonwoven fabric, micro glass fiber, synthetic fiber filter material, or high-performance electrostatic filter material, for example, and each filter bag edge may be fused by ultrasonic, for example, to achieve good air tightness and bonding strength, so as not to affect the filtration efficiency due to air leakage or rupture when the wind pressure is high.
Air passing through the intermediate-effect filter device is provided into the static pressure layer of the semiconductor process plant. For wafer scribing and substrate scribing in a hundred-grade or thousand-grade clean room (i.e. a clean room), air exhausted from a dicing saw can be effectively purified into air meeting the requirements of the clean room by designing an air filtering device comprising a primary filtering device and a middle-efficiency filtering device without a high-efficiency filtering device, so that the efficiency is improved and the energy consumption is reduced.
Fig. 2 is a schematic view illustrating an air purification system including an air purification apparatus according to an embodiment of the present invention.
Referring to fig. 2, the dicing machine case is connected to an air cleaning device through an air suction duct, and the dicing machine humid air generated by the dicing machine is supplied to the air cleaning device. The wet air of the dicing saw is filtered and purified by an air purifying device and is supplied to an environmental static pressure layer. Air in the ambient static layer is provided to the plant, a portion of which is to be provided to the dicing saw equipment, by fan filter units FFU that provide a continuous specific and steady flow of air to the plant production environment. Through the raised floor and the return air channel, a portion of the air provided by the fan filter unit FFU is returned to the ambient static pressure layer via the dry cooling coil DCC, thereby achieving internal air circulation. Wherein, owing to laid various production machines in whole clean room, can produce a large amount of heats during production machine operation, dry cold coil DCC is configured to cool off the air in order to take away the heat to reach the effect of maintaining the temperature and humidity environment stable for a long time.
According to the system comprising the air purification device, the air pumping and exhausting unit can be controlled to replace the overall control, so that the power consumption of the air exhaust system is reduced, and the air quantity required to be purified is reduced through the internal circulation of the air generated by the scribing process, so that the power consumption is further reduced.
Although the present disclosure has been described with exemplary embodiments, various changes and modifications may be suggested to one skilled in the art. The present disclosure is intended to embrace such alterations and modifications as fall within the scope of the appended claims.
None of the description in this specification should be read as implying that any particular element, step, or function is an essential element which must be included in the claim scope. The scope of patented subject matter is defined only by the claims.
Claims (10)
1. An air purification device for a dicing process, comprising:
a water mist separation device connected to the dicing saw by a short pipe to receive dicing wet air and configured to include a filler filling area and a baffle plate;
an air filtration device configured to include a primary filter device and a secondary filter device; and
a centrifugal fan device arranged between the primary filter device and the intermediate filter device to provide a static pressure area for the intermediate filter device,
wherein the intermediate effect filtration device is coupled to an ambient static pressure layer of a dicing process to provide purified ventilation to the ambient static pressure layer.
2. The air purification apparatus of claim 1, wherein the filler-filled region is filled with a spherical multi-faceted filler.
3. The air purification apparatus as claimed in claim 1, wherein the baffle is formed by PVC or stainless steel.
4. The air cleaning device of claim 1, wherein the mist separator is connected to a drain pipe having a trap.
5. The air purification device of claim 1, wherein the primary filter device comprises a G4 primary panel filter.
6. The air purification device of claim 1, wherein the medium effect filtration device comprises an F6 medium effect bag filter.
7. The air purification device of claim 1, wherein the centrifugal fan device is configured as a variable speed high pressure centrifugal fan to provide a static pressure zone of adjustable wind pressure.
8. The air purification apparatus according to claim 7, wherein the centrifugal fan device is configured to adjust the wind pressure according to the humidity of the air filtered by the primary filter device.
9. The air purification device of claim 1, wherein the centrifugal fan device is connected to a drain pipe having a trap.
10. The air purification apparatus of claim 1, wherein a portion of the air in the ambient static pressure layer is provided to the dicing saw by a Fan Filter Unit (FFU).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202210429439.0A CN114738860A (en) | 2022-04-22 | 2022-04-22 | Air purification device for scribing process |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202210429439.0A CN114738860A (en) | 2022-04-22 | 2022-04-22 | Air purification device for scribing process |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN114738860A true CN114738860A (en) | 2022-07-12 |
Family
ID=82284618
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202210429439.0A Pending CN114738860A (en) | 2022-04-22 | 2022-04-22 | Air purification device for scribing process |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN114738860A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN116105251A (en) * | 2023-03-14 | 2023-05-12 | 通威微电子有限公司 | Purifying equipment for semiconductor factory building |
-
2022
- 2022-04-22 CN CN202210429439.0A patent/CN114738860A/en active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN116105251A (en) * | 2023-03-14 | 2023-05-12 | 通威微电子有限公司 | Purifying equipment for semiconductor factory building |
| CN116105251B (en) * | 2023-03-14 | 2024-01-05 | 通威微电子有限公司 | Purifying equipment for semiconductor factory building |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| RU2506984C2 (en) | Air filter | |
| KR100819653B1 (en) | Gas purifier | |
| CN104949255B (en) | Air interchanger | |
| KR101548328B1 (en) | Method of manufacturing apparatus for cooling sever room and air conditioning system for data center therewith | |
| KR102073310B1 (en) | Method of manufacturing apparatus for cooling sever room and air conditioning system for data center therewith | |
| JP2012202558A (en) | Clean room air conditioning system | |
| CN114738860A (en) | Air purification device for scribing process | |
| KR20120119702A (en) | Dust collecting system | |
| CN217154377U (en) | Air purification device for scribing process | |
| CN211372645U (en) | Thousand-level dust-free room air conditioning system | |
| KR101598783B1 (en) | Turbofan and air conditioner having the same | |
| JP3833041B2 (en) | Energy-saving clean room | |
| CN211290433U (en) | Integrated form operating room clean system of low energy consumption | |
| CN211822864U (en) | Sterile laboratory air supply system | |
| JP4811800B2 (en) | Clean room equipment with low dew point | |
| KR102114586B1 (en) | Air Circulation Type Air handling Unit For Factory | |
| CN210602059U (en) | Air inlet purification device of clean workshop | |
| JP6090231B2 (en) | Air purifier | |
| JP4911968B2 (en) | Outside air cooling method and air conditioning system | |
| CN209605332U (en) | Factory building ventilation unit with vapor discharge function | |
| CN208566879U (en) | Dehumidify fan-coil device and independent fan coil end system | |
| JP3860677B2 (en) | Air conditioner | |
| CN206790870U (en) | A kind of redrying workshop electrical control cubicles cooling heat radiation system | |
| CN214094741U (en) | Clean factory building | |
| CN207162833U (en) | A kind of humidification filtration of air-conditioning |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination |