CN217154377U - Air purification device for scribing process - Google Patents

Abstract

The utility model provides an air purification device for scribing technology, its characterized in that includes: a water mist separation device connected to the dicing saw by a short pipe to receive dicing wet air and configured to include a filler filling area and a baffle plate; an air filtration device configured to include a primary filter device and a secondary filter device; and a centrifugal fan device arranged between the primary filter device and the intermediate filter device to provide a static pressure zone for the intermediate filter device, wherein the intermediate filter device is connected with an environmental static pressure layer of the scribing process to provide purified ventilation to the environmental static pressure layer.

Description

Air purification device for scribing process

Technical Field

The utility model relates to a semiconductor processing technology specifically relates to an ambient air purification device for semiconductor scribing technology.

Background

The semiconductor production process designs a plurality of process flows, which have high complexity, and with the updating of the semiconductor production technology, the manufacturing cost of the production equipment is higher and higher, and the requirements on the production environment are correspondingly increased. In order to ensure the smooth production of semiconductors, the corresponding production steps are carried out in a clean room. How to ensure that the parameters of temperature, relative humidity, pressure, cleanliness, airflow pattern and the like in the clean room meet the corresponding standards is a problem to be solved by the current production.

In the current production process, the exhaust system exhausts the process exhaust in the clean room to the outside; meanwhile, the fresh air processor system extracts fresh air from the outside and supplements the fresh air into the clean room, and a certain amount of positive pressure is kept.

The current problem that pump drainage air system faced is that semiconductor factory's exhaust system consumption is great to exhaust system is regarded as a whole control, and all process equipment all can be convulsions passively after opening.

In addition, the current design causes large heat load of the air conditioner, a large amount of air which is pumped away and has the constant temperature and humidity of about 22 ℃ and RH50 percent needs a fresh air processing system to pump fresh air from the outside, and the fresh air can be supplied to a clean room through regulation and purification treatments such as multi-stage temperature regulation, humidity control and filtration, and the consumed energy is large.

Therefore, there is a need for an air purification apparatus and system that saves power consumption suitable for semiconductor manufacturing processes.

SUMMERY OF THE UTILITY MODEL

An aspect of the utility model provides an air purification device for scribing technology, include: a water mist separation device connected to the dicing saw by a short pipe to receive dicing wet air and configured to include a filler filling area and a baffle plate; an air filtration device configured to include a primary filter device and a secondary filter device; and a centrifugal fan device configured between the primary filter device and the intermediate filter device to provide a static pressure zone for the intermediate filter device, wherein the intermediate filter device is connected to the ambient static pressure layer of the dicing process to provide purified ventilation to the ambient static pressure layer.

An aspect of the utility model provides an air purification device for scribing technology, wherein, the packing is filled the district and is utilized the packing of spherical multiaspect filler.

An aspect of the utility model provides an air purification device for scribing technology, wherein, the baffling board is formed through PVC or stainless steel.

An aspect of the utility model provides an air purification device for scribing technology, wherein, water smoke separator and the drain connection that has the trap.

An aspect of the utility model provides an air purification device for scribing technology, wherein, just, imitate filter equipment and include G4 just imitate board-like filter.

An aspect of the utility model provides an air purification device for scribing technology, wherein, well effect filter equipment includes F6 well effect bag filter.

An aspect of the utility model provides an air purification device for scribing technology, wherein, centrifugal fan device is configured into speed governing high pressure centrifugal fan to a static pressure district that provides adjustable wind pressure.

An aspect of the utility model provides an air purification device for scribing technology, wherein, centrifugal fan device is configured to adjust the wind pressure according to the filterable air humidity of primary filter equipment.

An aspect of the utility model provides an air purification device for scribing technology, wherein, centrifugal fan device and the drain pipe connection that has the trap.

An aspect of the utility model provides an air purification device for scribing technology, wherein, some in the air in the environment static pressure layer is provided the scribing machine through fan filter unit FFU.

Drawings

Fig. 1 is a schematic view of an air purification apparatus according to an embodiment of the present invention; and

fig. 2 is a schematic diagram illustrating an air purification system including an air purification apparatus according to an embodiment of the present invention.

Detailed Description

Before proceeding with the following detailed description, it may be advantageous to set forth definitions of certain words and phrases used throughout this patent document. The terms "couple," "connect," and derivatives thereof refer to any direct or indirect communication or connection between two or more elements, whether or not those elements are in physical contact with one another. The terms "transmit," "receive," and "communicate," as well as derivatives thereof, encompass both direct and indirect communication. The terms "include" and "comprise," as well as derivatives thereof, mean inclusion without limitation. The term "or" is inclusive, meaning and/or. The phrase "associated with … …" and derivatives thereof means including, included within … …, interconnected, contained within … …, connected or connected with … …, coupled or coupled with … …, in communication with … …, mated, interwoven, juxtaposed, proximate, bound or bound with … …, having an attribute, having a relationship or having a relationship with … …, and the like. The term "controller" refers to any device, system, or part thereof that controls at least one operation. Such a controller may be implemented in hardware, or a combination of hardware and software and/or firmware. The functionality associated with any particular controller may be centralized or distributed, whether locally or remotely. The phrase "at least one of, when used with a list of items, means that a different combination of one or more of the listed items can be used and only one item in the list may be required. For example, "at least one of A, B, C" includes any one of the following combinations: A. b, C, A and B, A and C, B and C, A and B and C.

Definitions for other specific words and phrases are provided throughout this patent document. Those of ordinary skill in the art should understand that in many, if not most instances, such definitions apply to prior, as well as future uses of such defined words and phrases.

In this patent document, the application combination of modules and the division levels of sub-modules are only for illustration, and the application combination of modules and the division levels of sub-modules may have different manners without departing from the scope of the present disclosure.

For the prior art, in the current production process, the exhaust system will exhaust the process exhaust air in the clean room to the outside; meanwhile, the fresh air handling unit system extracts fresh air from the outside and supplements the fresh air into the clean room, so that a large amount of energy is consumed. In order to solve the above problem, the present invention provides a purification apparatus that can save energy consumption by individually controlling the exhaust of the scribing unit.

In the packaging factory, the exhaust air of the dicing process accounts for more than 85% of the total exhaust air volume due to the generated moisture and impurities, and based on the above consideration, the power consumption of the exhaust system can be reduced by dividing the dicing unit, that is, by combining six dicing saws (three dicing saws in the case of a twin shaft) and corresponding cleaning devices of one cleaning machine into one exhaust unit and controlling the exhaust unit instead of the overall control.

The dust fog air generated by each air pumping and exhausting unit in the scribing process is subjected to dehydration treatment and filtration purification, so that the dust fog air meets the use requirement of a clean room environment and is internally circulated. This design has avoided the tradition to exhaust a large amount of directly outward arranging, has avoided fresh air conditioner to use very big energy to adjust the temperature, accuse is wet, filter and carry out the benefit back to thereby keep the problem of a large amount of power consumptions of the pressure-fired in the clean room, it has good energy-conserving effect, especially to its energy-conserving effect more obvious under the condition more than 7 ℃ of indoor, outer difference in temperature.

Fig. 1 is a schematic view of an air purification apparatus according to an embodiment of the present invention.

Referring to fig. 1, the air purification device of the embodiment of the present invention includes: a water mist separation device, a centrifugal fan device, an air filtering device and an electric controller (external).

According to the utility model discloses an embodiment, water smoke separator includes filler filling area and baffling board, wherein, packs spherical multiaspect filler in filler filling area. The scribing wet air generated by the scribing machine enters the water mist separation device through the short pipe, moisture in the wet air is filtered through the multi-surface filler and the baffle plate, and the wet air is discharged through a drain pipe connected to the water mist separation device, wherein the drain pipe has a trap structure, so that air in a factory area is prevented from being polluted through the drain pipe. According to the utility model discloses embodiment, the baffling board is formed through PVC or stainless steel. Moisture removal designs employing fillers and baffles can separate moisture from room temperature air generated by dicing saws commonly used in semiconductor processing (e.g., wafer dicing and substrate dicing). Compare in the scheme of traditional adoption condensing plate water smoke in getting rid of the higher air medium of water smoke temperature, the utility model discloses the temperature range that the scheme can be suitable for is bigger, therefore its range of application is wider.

The water smoke separator is connected with the primary filter device among the air filter equipment, according to the utility model discloses an embodiment, the primary filter device is including just imitating board-like filter. Specifically, according to the utility model discloses, adopt G4 primary effect plate filter, it has the frame of being convenient for hard material, for example, metal or PVC make to the dismouting, G4 primary effect plate filter is used for high efficiency ground air cleaner, blocks big particulate matter, and it has long service life's characteristics.

The primary filter device is connected with the centrifugal fan device. According to the embodiment of the utility model provides a centrifugal fan device is used for providing the static pressure district to make by the wet air of the scribing that the filter equipment was just imitated provide to well effect filter equipment through this static pressure district. In addition, the centrifugal fan device is connected to a drain pipe having a trap structure so as to remove water generated in the device. According to the utility model discloses an embodiment, centrifugal fan device is configured to speed governing high pressure centrifugal fan, compares in traditional axial fan, and it can provide adjustable wind pressure to adjust the static pressure district. In addition, the centrifugal fan device is adjusted by the electric controller to provide adjustable wind pressure, so that the speed and the passing time of scribing humid air passing through the water mist separation device can be adjusted, and the humidity of the purified air can be further adjusted. According to the utility model discloses an embodiment can adjust the wind pressure according to the filterable air humidity of primary filter equipment.

The middle effect filter equipment among centrifugal fan device and the air filter equipment is connected, according to the utility model discloses an embodiment, middle effect filter equipment includes middle effect bag filter. Specifically, according to the utility model discloses, adopt F6 medium-effect bag filter, wherein, F6 medium-effect bag filter can include the filter bag of making through compound non-woven fabrics, fine glass fiber, synthetic fiber filter material, or high performance static filter material for example, and every filter bag limit for example, can adopt the ultrasonic wave mode to fuse to realize having good gas tightness and bonding strength, unlikely to produce gas leakage or fracture and influence filtration efficiency because the wind pressure is high.

Air passing through the intermediate-effect filter device is provided into the static pressure layer of the semiconductor process plant. For wafer scribing and substrate scribing in a hundred-grade or thousand-grade clean room (i.e. a clean room), air exhausted from a dicing saw can be effectively purified into air meeting the requirements of the clean room by designing an air filtering device comprising a primary filtering device and a middle-efficiency filtering device without a high-efficiency filtering device, so that the efficiency is improved and the energy consumption is reduced.

Fig. 2 is a schematic diagram illustrating an air purification system including an air purification apparatus according to an embodiment of the present invention.

Referring to fig. 2, the scribe case is connected to an air cleaning device through an air suction duct, and the wet air of the scribe generated by the scribe is supplied to the air cleaning device. The wet air of the dicing saw is filtered and purified by an air purifying device and is provided to an environmental static pressure layer. Air in the ambient static layer is provided to the plant, a portion of which is to be provided to the dicing saw equipment, by fan filter units FFU that provide a continuous specific and steady flow of air to the plant production environment. Through the raised floor and the return air channel, a portion of the air provided by the fan filter unit FFU is returned to the ambient static pressure layer via the dry cooling coil DCC, thereby achieving internal air circulation. Wherein, owing to laid various production machines in whole clean room, can produce a large amount of heats during production machine operation, dry cold coil DCC is configured to cool off the air in order to take away the heat to reach the effect of maintaining the temperature and humidity environment stable for a long time.

According to the utility model discloses system including air purification device can control the unit of pump drainage and replace overall control to reduce exhaust system consumption, and through the air inner loop to the scribing technology production, thereby reduced the air quantity that needs the purification and further reduced the consumption.

Although the present disclosure has been described with exemplary embodiments, various changes and modifications may be suggested to one skilled in the art. The present disclosure is intended to embrace such alterations and modifications as fall within the scope of the appended claims.

None of the description in the present application should be read as implying that any particular element, step, or function is an essential element which must be included in the claim scope. The scope of patented subject matter is defined only by the claims.

Claims (10)

1. An air purification device for a scribing process, comprising:

a water mist separation device connected to the dicing saw by a short pipe to receive dicing wet air and configured to include a filler filling area and a baffle plate;

an air filtration device configured to include a primary filter device and a secondary filter device; and

a centrifugal fan device arranged between the primary filter device and the intermediate filter device to provide a static pressure area for the intermediate filter device,

the intermediate effect filtration device is connected to the ambient static pressure layer of the dicing process to provide purified vent gas to the ambient static pressure layer.

2. The air purification apparatus of claim 1, wherein the filler-filled region is filled with a spherical multi-faceted filler.

3. The air purification apparatus of claim 1, wherein the baffle is formed from PVC or stainless steel.

4. The air cleaning apparatus according to claim 1, wherein the water mist separator is connected to a drain pipe having a trap.

5. The air purification apparatus of claim 1, wherein the primary filter device comprises a G4 primary panel filter.

6. The air purification apparatus of claim 1, wherein the medium-effect filtration apparatus comprises a F6 medium-effect bag filter.

7. The air purification apparatus of claim 1, wherein the centrifugal fan device is configured as a variable speed high pressure centrifugal fan to provide a static pressure zone of adjustable wind pressure.

8. The air cleaning apparatus according to claim 7, wherein the centrifugal fan device is configured to adjust the wind pressure according to the humidity of the air filtered by the primary filter device.

9. The air cleaning apparatus according to claim 1, wherein the centrifugal fan means is connected to a drain pipe having a trap.

10. The air purification apparatus of claim 1, wherein a portion of the air in the ambient static pressure layer is provided to the dicing saw by a Fan Filter Unit (FFU).

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