CN114720638A - Monitoring device and monitoring method for gas molecular pollutants - Google Patents
Monitoring device and monitoring method for gas molecular pollutants Download PDFInfo
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- 238000012544 monitoring process Methods 0.000 title claims abstract description 58
- 238000000034 method Methods 0.000 title claims abstract description 48
- 239000003344 environmental pollutant Substances 0.000 title claims abstract description 44
- 231100000719 pollutant Toxicity 0.000 title claims abstract description 44
- 238000012806 monitoring device Methods 0.000 title claims abstract description 23
- 238000005070 sampling Methods 0.000 claims abstract description 592
- 238000010926 purge Methods 0.000 claims abstract description 157
- 239000007789 gas Substances 0.000 claims description 94
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 claims description 23
- 230000008569 process Effects 0.000 claims description 21
- 239000000356 contaminant Substances 0.000 claims description 20
- 238000004891 communication Methods 0.000 claims description 15
- 229910052757 nitrogen Inorganic materials 0.000 claims description 11
- UCKMPCXJQFINFW-UHFFFAOYSA-N Sulphide Chemical compound [S-2] UCKMPCXJQFINFW-UHFFFAOYSA-N 0.000 claims description 4
- 239000012855 volatile organic compound Substances 0.000 claims description 4
- 238000011109 contamination Methods 0.000 claims description 3
- 238000000746 purification Methods 0.000 claims description 3
- 238000010586 diagram Methods 0.000 description 13
- 238000004519 manufacturing process Methods 0.000 description 8
- 238000004590 computer program Methods 0.000 description 7
- 238000001514 detection method Methods 0.000 description 7
- 239000004065 semiconductor Substances 0.000 description 7
- 230000006870 function Effects 0.000 description 4
- 239000002245 particle Substances 0.000 description 4
- 238000012545 processing Methods 0.000 description 4
- 235000012431 wafers Nutrition 0.000 description 4
- 238000012986 modification Methods 0.000 description 3
- 230000004048 modification Effects 0.000 description 3
- 238000003860 storage Methods 0.000 description 3
- 230000007547 defect Effects 0.000 description 2
- 101100495835 Oryza sativa subsp. japonica Cht1 gene Proteins 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 229910001873 dinitrogen Inorganic materials 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 230000007246 mechanism Effects 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 239000005416 organic matter Substances 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 238000010408 sweeping Methods 0.000 description 1
- 230000001360 synchronised effect Effects 0.000 description 1
- 150000003568 thioethers Chemical class 0.000 description 1
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- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N33/00—Investigating or analysing materials by specific methods not covered by groups G01N1/00 - G01N31/00
- G01N33/0004—Gaseous mixtures, e.g. polluted air
- G01N33/0009—General constructional details of gas analysers, e.g. portable test equipment
- G01N33/0027—General constructional details of gas analysers, e.g. portable test equipment concerning the detector
- G01N33/0036—General constructional details of gas analysers, e.g. portable test equipment concerning the detector specially adapted to detect a particular component
- G01N33/0044—Sulphides, e.g. H2S
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N1/00—Sampling; Preparing specimens for investigation
- G01N1/02—Devices for withdrawing samples
- G01N1/22—Devices for withdrawing samples in the gaseous state
- G01N1/24—Suction devices
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- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N1/00—Sampling; Preparing specimens for investigation
- G01N1/02—Devices for withdrawing samples
- G01N1/22—Devices for withdrawing samples in the gaseous state
- G01N1/26—Devices for withdrawing samples in the gaseous state with provision for intake from several spaces
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N33/00—Investigating or analysing materials by specific methods not covered by groups G01N1/00 - G01N31/00
- G01N33/0004—Gaseous mixtures, e.g. polluted air
- G01N33/0009—General constructional details of gas analysers, e.g. portable test equipment
- G01N33/0011—Sample conditioning
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- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N33/00—Investigating or analysing materials by specific methods not covered by groups G01N1/00 - G01N31/00
- G01N33/0004—Gaseous mixtures, e.g. polluted air
- G01N33/0009—General constructional details of gas analysers, e.g. portable test equipment
- G01N33/0027—General constructional details of gas analysers, e.g. portable test equipment concerning the detector
- G01N33/0036—General constructional details of gas analysers, e.g. portable test equipment concerning the detector specially adapted to detect a particular component
- G01N33/0047—Organic compounds
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Abstract
The embodiment of the disclosure provides a monitoring device and a monitoring method for gas molecule pollutants, the monitoring device comprises a first sampling passage and a second sampling passage, the first sampling passage and the second sampling passage which are arranged in parallel are arranged to alternately sample, and meanwhile, a purging component is arranged to communicate the first sampling passage and the second sampling passage, when any one of the first sampling passage and the second sampling passage samples, the other one of the first sampling passage and the second sampling passage is purged, so that the first sampling passage and the second sampling passage are alternately purged, because the two sampling passages alternately sample and purge, no delay exists between two adjacent sampling passages and purging, and the sampling and purging are alternately performed, so that the monitoring efficiency of the gas molecule pollutants can be improved.
Description
Technical Field
The disclosure relates to the technical field of monitoring of gas molecular pollutants, in particular to a monitoring device and a monitoring method of gas molecular pollutants.
Background
The yield of semiconductor manufacturing is greatly affected by Air Molecular Contamination (AMC), for example, Total Volatile Organic Compounds (TVOC) can form particles or particles on the wafer surface, causing process defects, and the benign of semiconductor manufacturing is also affected by sulfides and alkalinity in air, so AMC monitoring of the environment in a clean room where semiconductor manufacturing is performed is required.
In the existing AMC monitoring of a dust-free room, a single direction-finding handheld analyzer or an online analyzer is generally used for environment monitoring, the monitoring period is long, and the monitored data is inaccurate.
Therefore, how to improve the efficiency and accuracy of AMC monitoring is an urgent problem to be solved by those skilled in the art.
BRIEF SUMMARY OF THE PRESENT DISCLOSURE
The disclosure provides a monitoring device and a monitoring method for gas molecular pollutants, which are used for improving the monitoring efficiency and the monitoring precision of the gas molecular pollutants and avoiding mutual crosstalk among different sampling points to influence detection results.
In a first aspect, embodiments of the present disclosure provide a device for monitoring a gaseous molecular contaminant, including:
a first sampling path;
the second sampling passage is arranged in parallel with the first sampling passage, and the first sampling passage and the second sampling passage are used for alternately sampling gas in an environment to be tested;
the purging component is used for purging one of the first sampling passage and the second sampling passage when the other sampling passage is sampled;
at least one analyzer connected to the first sampling path and the second sampling path for analyzing the gas molecular contaminants collected by the first sampling path and the second sampling path;
and the control unit is in communication connection with the analyzer.
In one possible implementation, the first sampling path includes at least one first sampling point, and the second sampling path includes at least one second sampling point;
the first sampling passage and the second sampling passage are specifically configured to alternately sample the gas through any one of the first sampling points and any one of the second sampling points.
In a possible implementation manner, the first sampling passage further includes a first sampling inner tube, at least one first sampling outer tube, a first valve, a first sampling pump, and a first buffer tank, wherein the first sampling inner tube is provided with first sampling valves, the number of which is the same as that of the first sampling points, and each first sampling valve is connected to each first sampling outer tube;
one end of the first sampling outer pipe is a free end and is formed into a first sampling point, the other end of the first sampling outer pipe is connected with the purging assembly, and the first sampling point is communicated with the first sampling inner pipe through the first sampling valve;
one end of the first sampling inner pipe is connected with the purging assembly, and the other end of the first sampling inner pipe is connected with the at least one analyzer through the first valve, the first sampling pump and the first buffer tank;
the control unit is in communication connection with the first valve, the first sampling pump and each first sampling valve.
In a possible implementation manner, the second sampling passage further includes a second sampling inner tube, at least one second sampling outer tube, a second valve, a second sampling pump, and a second buffer tank, wherein second sampling valves having the same number as the second sampling points are disposed on the second sampling inner tube, and each of the second sampling valves is connected to each of the second sampling outer tubes;
one end of the second sampling outer pipe is a free end and forms a second sampling point, the other end of the second sampling outer pipe is connected with the purging assembly, and the second sampling point is communicated with the second sampling inner pipe through the second sampling valve;
one end of the second sampling inner pipe is connected with the purging assembly, and the other end of the second sampling inner pipe is connected with the at least one analyzer through the second valve, the second sampling pump and the second buffer tank;
the control unit is in communication connection with the second valve, the second sampling pump and each second sampling valve.
In a possible implementation manner, the purging component includes a first purging portion, and the first purging portion is respectively connected with the first sampling passage and the second sampling passage and performs thermal purging outside the environment to be tested through the first sampling passage and the second sampling passage respectively.
In a possible implementation manner, the first purging part comprises a nitrogen source, a purification pump, a third valve, an infrared guide plate and a temperature control sensor which are connected in sequence;
the first purging part is respectively connected with the first sampling passage and the second sampling passage through a first three-way valve, wherein a first end of the first three-way valve is connected with the temperature control sensor, a second end of the first three-way valve is connected with one end of the first sampling passage, and a third end of the first three-way valve is connected with one end of the second sampling passage;
the control unit is in communication connection with the purification pump, the third valve, the temperature control sensor and the first three-way valve.
In one possible implementation, the purge assembly further comprises a second purge portion;
the second purging part is respectively connected with the first sampling passage and the second sampling passage and purges the environment to be tested through the first sampling passage and the second sampling passage.
In one possible implementation, the second purge comprises a source of compressed dry air, wherein,
the compressed and dried air source is respectively connected with the first sampling passage and the second sampling passage through a second three-way valve, wherein a first end of the second three-way valve is connected with the compressed and dried air source, a second end of the second three-way valve is connected with one end of the first sampling passage, and a third end of the second three-way valve is connected with one end of the second sampling passage;
and the control unit is in communication connection with the second three-way valve.
In a possible implementation manner, the analyzers are connected to the first sampling passage and the second sampling passage through third three-way valves, and the number of the analyzers is the same as that of the third three-way valves, wherein a first end of each third three-way valve is connected to each analyzer, a second end of each third three-way valve is connected to the first sampling passage, and a third end of each third three-way valve is connected to the second sampling passage;
and the control unit is in communication connection with the third three-way valve.
In one possible implementation, the at least one analyzer includes: total volatile organic compound analyzer, sulfide analyzer and pH value analyzer.
In a possible implementation, the at least one analyzer and the control unit are both located outside the environment to be measured.
In a second aspect, embodiments of the present disclosure further provide a method for monitoring a gaseous molecular contaminant, which is applied to a device for monitoring a gaseous molecular contaminant according to any one of the first aspect, and the method includes:
alternately sampling gas in the environment to be detected through the first sampling passage and the second sampling passage; and purging either one of the first sampling passage and the second sampling passage while sampling the other through a purge component;
performing gas molecular contaminant analysis on the gas collected by the first and second sampling paths by at least one analyzer.
In one possible implementation, the first sampling path includes at least one first sampling point; the second sampling path comprises at least one second sampling point, and sampling is carried out alternately by any one first sampling point and any one second sampling point, and the method comprises the following processes:
opening any one first sampling point for sampling, collecting sampling gas of the first sampling point for gas molecular pollutant analysis, and closing the first sampling point after sampling is finished;
the following processes are executed in a loop:
opening any one second sampling point for sampling, collecting the sampling gas of the second sampling point for gas molecular pollutant analysis, simultaneously purging the first sampling passage, and closing the second sampling point after sampling is finished;
opening any one first sampling point for sampling, collecting the sampling gas of the first sampling point for gas molecular pollutant analysis, simultaneously purging the second sampling passage, and closing the first sampling point after sampling is finished.
In a possible implementation manner, in the process of opening any one of the second sampling points for sampling, collecting the sampling gas at the second sampling point for gas molecular pollutant analysis, and purging the first sampling passage at the same time, the method includes:
and carrying out hot purging on the first sampling passage towards the direction outside the environment to be detected, and purging the first sampling passage towards the direction inside the environment to be detected.
In a possible implementation manner, in the process of opening any one of the first sampling points for sampling, collecting the sampling gas at the first sampling point for gas molecular pollutant analysis, and purging the second sampling passage at the same time, the method includes:
and carrying out hot purging on the second sampling passage towards the direction outside the environment to be tested, and carrying out purging on the second sampling passage towards the direction inside the environment to be tested.
The embodiment of the disclosure provides a monitoring device and a monitoring method for gas molecule pollutants, the monitoring device comprises a first sampling passage and a second sampling passage, the first sampling passage and the second sampling passage which are arranged in parallel are arranged for alternately sampling, a purging component is arranged for communicating the first sampling passage and the second sampling passage, any one of the first sampling passage and the second sampling passage purges the other sampling passage when sampling, so that the first sampling passage and the second sampling passage are alternately purged, because the two sampling passages are alternately sampled and alternately purged, no delay exists between two adjacent sampling and purging, the sampling and purging are alternately performed, and simultaneously, the idle sampling passage can be purged, the mutual crosstalk between sampling points of the sampling passages is prevented, and the influence of the previous sampling point on the detection result of the next sampling point is avoided, therefore, the monitoring efficiency and the monitoring precision of the gas molecular pollutants can be improved.
Drawings
In order to more clearly illustrate the technical solutions of the present application, the drawings needed to be used in the description of the embodiments are briefly introduced below, and it is obvious that the drawings in the following description are only some embodiments of the present application, and it is obvious for those skilled in the art to obtain other drawings without creative efforts.
Fig. 1 is a schematic structural diagram of a monitoring apparatus for monitoring a gaseous molecular contaminant according to an embodiment of the present disclosure;
FIG. 2 is a schematic structural diagram of another apparatus for monitoring gaseous molecular contaminants according to an embodiment of the present disclosure;
FIG. 3 is a schematic structural diagram of another apparatus for monitoring gaseous molecular contaminants according to an embodiment of the present disclosure;
FIG. 4 is a schematic structural diagram of another monitoring apparatus for gaseous molecular contaminants according to an embodiment of the present disclosure;
FIG. 5 is a schematic structural diagram of another apparatus for monitoring gaseous molecular contaminants according to an embodiment of the present disclosure;
fig. 6 is a schematic flow chart of a method for monitoring a gaseous molecular contaminant according to an embodiment of the present disclosure.
Detailed Description
In order to make the purpose, technical solutions and advantages of the present application clearer, the technical solutions in the embodiments of the present application will be clearly and completely described below with reference to the accompanying drawings, and it is obvious that the described embodiments are only a part of the embodiments of the present application, and not all embodiments. All other embodiments that can be derived from the embodiments given herein by a person of ordinary skill in the art are intended to be within the scope of the present disclosure.
In the field of semiconductor manufacturing, the requirements on the environment are high, for example, when wafers are processed, the number of particles in the air has a great influence on the quality and reliability of the processed wafers, TVOC causes process defects due to the formation of particles on the surfaces of the wafers, and sulfide and acid-base in the air also influence the goodness of semiconductor manufacturing, so that the monitoring of gas molecular pollutants in the clean room environment of semiconductor manufacturing is required, and the gas molecular pollutants in the environment are kept at a low level by corresponding technical means, so that the goodness of semiconductor manufacturing is not influenced.
In order to improve the monitoring efficiency and monitoring accuracy of the gaseous molecular contaminant AMC, the disclosed embodiment provides a monitoring device for monitoring the gaseous molecular contaminant, for example, monitoring different concentrations of AMC substances in a clean room for uninterrupted precise detection, as shown in fig. 1, the device includes:
a first sampling path 100;
the second sampling passage 200 is arranged in parallel with the first sampling passage 100, and the first sampling passage 100 and the second sampling passage 200 are used for alternately sampling gas in the environment to be tested;
the purging assembly 300 is used for communicating the first sampling passage 100 and the second sampling passage 200, and the purging assembly 300 is used for purging one of the first sampling passage 100 and the second sampling passage 200 when the other sampling passage is used for sampling;
at least one analyzer 400 connected to the first sampling path 100 and the second sampling path 200 for analyzing the gas molecular contaminants collected by the first sampling path 100 and the second sampling path 200;
a control unit (not shown), a communication link analyzer 400.
The gas molecular pollutant monitoring device provided by the embodiment of the disclosure alternately samples by arranging the first sampling passage 100 and the second sampling passage 200 which are parallel, meanwhile, the purging component 300 is arranged to communicate the first sampling passage 100 and the second sampling passage 200, when any one of the first sampling passage 100 and the second sampling passage 200 is used for sampling, purging the other, such that the first sampling path 100 and the second sampling path 200 are alternately purged, because the two sampling passages perform alternate sampling and alternate purging, the adjacent two times of sampling and purging have no delay, the sampling and purging are performed alternately, meanwhile, the idle sampling passage can be purged, mutual crosstalk between sampling points of the sampling passage is prevented, the influence of the last sampling point on the detection result of the next sampling point is avoided, and therefore the monitoring efficiency and the monitoring precision of the gas molecular pollutants can be improved.
In a specific implementation, as shown in fig. 2, the first sampling path 100 may include at least one first sampling point, for example, 1, 3, 6, 8, for example, 8 (CH1, CH3, CH5, CH7, CH9, CH11, CH13, CH15), the second sampling path 200 may include at least one second sampling point, for example, 1, 3, 6, 8, for example, 8 (CH2, CH4, CH6, CH8, CH10, CH12, CH14, CH16), all of the sampling points are located at different positions in the environment to be tested, and the first sampling path 100 and the second sampling path 200 are specifically configured to alternately sample the gas through any one first sampling point and any one second sampling point.
For example, the first sampling point CH1 may be sampled first, gas in the environment to be detected enters the first sampling passage 100 from CH1, and then enters the analyzer 400 to analyze the gas molecular pollutants of the sampled gas, after the sampling is completed, the sampling of CH1 is stopped, the sampling of the second sampling point CH2 is performed, gas in the environment to be detected enters the second sampling passage 200 from CH2, and then enters the analyzer 400 to analyze the gas molecular pollutants of the sampled gas, after the sampling is completed, the sampling of CH2 is stopped, the sampling of the first sampling point CH3 is performed, and the sampling analysis is performed alternately in sequence, so that the sampling efficiency can be significantly improved, and the monitoring efficiency of the gas molecular pollutants can be improved.
In a specific implementation, as shown in fig. 3, the first sampling passage 100 further includes a first sampling inner tube 101, at least one first sampling outer tube 102, a first valve 103, a first sampling pump 104, and a first buffer tank 105, wherein the first sampling inner tube 101 is provided with first sampling valves 106, the number of which is the same as that of the first sampling points, and each first sampling valve 106 is connected to each first sampling outer tube 102; one end of the first sampling outer pipe 102 is a free end and is formed into a first sampling point, the other end of the first sampling outer pipe is connected with the purging component 300, and the first sampling point is communicated with the first sampling inner pipe 101 through the first sampling valve 106; one end of the first sampling inner tube 101 is connected with the purging assembly 300, and the other end of the first sampling inner tube 101 is connected with the at least one analyzer 400 through the first valve 103, the first sampling pump 104 and the first buffer tank 105; a control unit communicatively coupled to the first valve 103, the first sampling pump 104, and each of the first sampling valves 106.
The second sampling passage 200 further comprises a second sampling inner tube 201, at least one second sampling outer tube 202, a second valve 203, a second sampling pump 204 and a second buffer tank 205, wherein the second sampling inner tube 201 is provided with second sampling valves 206 with the same number as that of second sampling points, and each second sampling valve 206 is connected with each second sampling outer tube 202; one end of the second sampling outer tube 202 is a free end and is formed into a second sampling point, the other end of the second sampling outer tube is connected with the purging assembly 300, and the second sampling point is communicated with the second sampling inner tube 201 through the second sampling valve 206; one end of the second sampling inner pipe 201 is connected with the purging assembly 300, and the other end of the second sampling inner pipe 201 is connected with the at least one analyzer 400 through a second valve 203, a second sampling pump 204 and a second buffer tank 205; a control unit communicatively coupled to the second valve 203, the second sampling pump 204, and each of the second sampling valves 206.
The first sampling valve 106 and the second sampling valve 206 may be valves with 4 paths, such as four-way valves, as shown in fig. 3, all of the first sampling valve 106 and the second sampling valve 206 have four paths (path 1, path 2, path 3, and path 4), and the control unit may control on/off of the 4 paths of the sampling valves.
Specifically, in the sampling process, for example, CH1 is sampled first, the control unit controls the passage 2 and the passage 3 of the first sampling valve 106 corresponding to CH1 to be communicated, controls the passages 1 and the passages 2 of the remaining first sampling valves 106 to be communicated, controls the first valve 103 to be opened, and controls the first sampling pump 104 to provide negative pressure, so that the gas sampled by CH1 flows through the first sampling outer tube 102, the first sampling inner tube 101, the first valve 103, the first sampling pump 104 and the first buffer tank 105, and enters the analyzer 400 for analyzing the gas molecular pollutants; after sampling is completed, controlling the passage 3 of the first sampling valve 106 corresponding to CH1 to be closed, controlling the passage 1 and the passage 2 to be communicated, so that the purging assembly 300 purges the first sampling passage 100, and simultaneously samples CH2, controlling the passage 2 and the passage 4 of the second sampling valve 206 corresponding to CH2 to be communicated, controlling the passages 1 and the passages 2 of the other second sampling valves 206 to be communicated, controlling the first valve 103 to be closed, controlling the second valve 203 to be opened, and controlling the second sampling pump 204 to provide negative pressure, so that the gas sampled by CH2 flows through the second sampling outer tube 202, the second sampling inner tube 201, the second valve 203, the second sampling pump 204 and the second buffer tank 205, and enters the analyzer 400 for analyzing gas molecular pollutants; after sampling is completed, the passage 4 of the second sampling valve 206 corresponding to the CH2 is controlled to be closed, the passage 1 and the passage 2 are controlled to be communicated, so that the purging component 300 purges the second sampling passage 200, and simultaneously samples the CH3, and the following control process is similar to that described above, so that the first sampling passage 100 and the second sampling passage 200 alternately perform sampling and purging, the monitoring efficiency of gas molecule pollutants can be improved, in addition, the first sampling inner tube 101 passing through the CH1 can be cleaned, crosstalk caused when the next CH3 site is sampled is avoided, the detection result error is caused, and the detection precision is improved.
In a specific implementation, as shown in fig. 4, the purging assembly 300 may include a first purging portion 301 and a second purging portion 302, the first purging portion 301 is respectively connected to the first sampling passage 100 and the second sampling passage 200 and performs a thermal purging operation on the environment to be tested through the first sampling passage 100 and the second sampling passage 200, and the second purging portion 302 is respectively connected to the first sampling passage 100 and the second sampling passage 200 and performs a purging operation on the environment to be tested through the first sampling passage 100 and the second sampling passage 200.
The first purging part 301 and the second purging part 302 provided by the embodiment of the disclosure are configured to perform purging in two steps after sampling any sampling point of the first sampling path 100 or the second sampling path 200 is completed, first, the first purging part 301 performs purging using hot nitrogen to purge the sampling gas in the first sampling path 100 or the second sampling path 200 to the outside of the environment to be tested, purging using hot nitrogen has higher purging efficiency compared with CDA purging, and can effectively remove the residual AMC in the sampling path, then, the second purging part 302 performs purging again using CDA to purge the residual sampling gas in the first sampling path 100 or the second sampling path 200 to the inside of the environment to be tested, and after purging twice, the sampling gas in the sampling path can be completely removed, and the next sampling monitoring cannot be affected, so that the monitoring accuracy can be improved.
In a specific implementation, as shown in fig. 4, the first purging portion 301 includes a nitrogen source 3011, a purge pump 3012, a third valve 3013, an infrared flow guide 3014, and a temperature control sensor 3015, which are connected in sequence; the first purge part 301 is connected to the first sampling path 100 and the second sampling path 200 through a first three-way valve 601, wherein a first end of the first three-way valve 601 is connected to the temperature control sensor 3015, a second end of the first three-way valve 601 is connected to one end of the first sampling path 100, and a third end of the first three-way valve 601 is connected to one end of the second sampling path 200; the second purge part 302 includes a compressed dry air source 3021, wherein the compressed dry air source 3021 is connected to the first sampling passage 100 and the second sampling passage 200 through a second three-way valve 602, respectively, wherein a first end of the second three-way valve 602 is connected to the compressed dry air source 3021, a second end of the second three-way valve 602 is connected to one end of the first sampling passage 100, and a third end of the second three-way valve 602 is connected to one end of the second sampling passage 200;
and the control unit is in communication connection with the purge pump 3012, the third valve 3013, the temperature control sensor 3015, the first three-way valve 601 and the second three-way valve 602.
Specifically, the sampling time may be set to 25min, for example, and after the sampling start duration of CH1 reaches 25min, the sampling is ended, the sampling of CH2 is started, meanwhile, the first sampling passage 100 is subjected to hot purging, the control unit controls the purge pump 3012 to provide stable nitrogen pressure, controls the third valve 3013 to open, controls the infrared flow guide 3014 to heat nitrogen, controls the temperature control sensor 3015 to keep stable temperature, for example, can control the heating temperature of nitrogen to be stable at 60 ℃, the purging effect is optimal at the temperature, the pipeline cannot be damaged, the first end and the second end of the first three-way valve 601 are controlled to be communicated, so that the hot nitrogen gas in the first purge assembly 300 thermally purges the first sampling inner tube 101 in the first sampling passage 100, the sample gas is purged to the first buffer tank 105 through the first valve 103 and the first sample pump 104, and then discharged to the atmosphere.
It is noted that a valve may be provided between the first buffer tank 105 and the analyzer 400, the valve is closed during purging so that the sample gas is fully purged into the first buffer tank 105, the first buffer tank 105 is located outside the clean room environment to be measured, a purge port may be provided in the first buffer tank 105, the purge port is controlled to be opened or closed by a solenoid valve, the purge port is controlled to be opened during purging so that the purged sample gas is purged from the purge port to the outside of the environment to be measured, the purge port is controlled to be closed after purging is finished, and the second buffer tank 205 and the analyzer 400 are similarly controlled accordingly, and the control processes are all completed by the control unit.
The hot purging time may be set to 10min, for example, after the hot purging is completed, the control unit controls the first three-way valve 601 to be closed, controls the first end and the second end of the second three-way valve 602 to be conducted, so that the second purging mechanism performs reverse purging on the first sampling passage 100 by using the compressed dry air CDA, and purges the residual gas in the first sampling passage 100 back to the environment to be tested through each first sampling point, at which time the control unit controls all the passages 3 and 4 of the first sampling valve 106 to be conducted, so that the CDA flows through the second three-way valve 602, the common pipe 500 and the first sampling outer pipe 102 into each sampling point, each sampling point is located in the environment to be tested, and the reverse purging period may be set to 15min, for example, so that the CH2 sampling is correspondingly completed while the reverse purging is completed, then the CH3 is sampled for example for 25min, the hot purging is performed on the second sampling passage 200 for example for 10min and the reverse purging for example for 15min, therefore, the first sampling passage 100 and the second sampling passage 200 can be alternately sampled and purged, and the monitoring efficiency and the monitoring precision of the gas molecular pollutants can be improved.
In a specific implementation, as shown in fig. 5, the analyzers 400 are connected to the first sampling path 100 and the second sampling path 200 through the third three-way valves 603, and the number of the analyzers 400 is the same as the number of the third three-way valves 603, wherein a first end of each third three-way valve 603 is connected to each analyzer 400, a second end of each third three-way valve 603 is connected to the first sampling path 100, and a third end of each third three-way valve 603 is connected to the second sampling path 200.
For example, as shown in fig. 5, the analyzer 400 may include, for example, a total volatile organic compound analyzer 401, a sulfide analyzer 402, and a ph analyzer 403, and the number of the third three-way valves 603 may be set to 3 accordingly, and these analyzers 400 are located outside the environment to be measured. The controller is communicatively connected to the third three-way valve 603 and controls the communication state of the third three-way valve 603.
As shown in fig. 5, the following describes in detail the alternative monitoring process of the device for monitoring gaseous molecular pollutants provided by the embodiment of the present disclosure:
setting CH1-CH16 to alternately perform sampling monitoring in sequence, when sampling starts, controlling a channel 2 and a channel 3 of a first sampling valve 106 corresponding to CH1 to be communicated, controlling a channel 1 and a channel 2 of the other first sampling valves 106 to be communicated, controlling a first valve 103 to be opened, controlling a first sampling pump 104 to provide negative pressure, controlling a first end and a second end of a third three-way valve 603 to be communicated, so that gas obtained by CH1 sampling flows through a first sampling outer tube 102, a first sampling inner tube 101, the first valve 103, the first sampling pump 104, a first buffer tank 105 and the third three-way valve 603 to enter each analyzer 400 for analyzing gas molecular pollutants, wherein the analysis time of a total volatile organic matter analyzer 401 is longer than that of the other two analyzers and is generally 25min, so that the sampling time can be set to be 25min, and after sampling of CH1 is finished, controlling the channel 3 of the first sampling valve 106 corresponding to CH1 to be closed, controlling the first valve 103 to be closed, controlling the passage 2 and the passage 4 of the second sampling valve 206 corresponding to the CH2 to be communicated, controlling the passage 1 and the passage 2 of the rest of the second sampling valves 206 to be communicated, controlling the second valve 203 to be opened, controlling the second sampling pump 204 to provide negative pressure, and controlling the first end and the third end of the third three-way valve 603 to be communicated, so that the gas obtained by CH2 sampling flows through the second sampling outer pipe 202, the second sampling inner pipe 201, the second valve 203, the second sampling pump 204, the second buffer tank 205 and the third three-way valve 603 into each analyzer 400 to analyze the gas molecular pollutants; meanwhile, the purge pump 3012 is controlled to provide stable nitrogen pressure, the third valve 3013 is controlled to be opened, the infrared guide plate 3014 is controlled to heat nitrogen, the temperature control sensor 3015 is controlled to keep temperature at 60 ℃, the first end and the second end of the first three-way valve 601 are controlled to be conducted, the channels 1 and 2 of all the first sampling valves 106 are controlled to be conducted, the first valve 103 is controlled to be opened, the third three-way valve 603 is controlled to be closed, so that the first sampling channel 100 is subjected to hot purging by the first purging part 301, the purging direction is that the sampling gas enters the first buffer tank 105 through the first three-way valve 601, the first sampling inner tube 101, the first valve 103 and the first sampling pump 104, so that the sampling gas in the first sampling channel 100 is purged out of the environment to be measured through the first buffer tank 105, the hot purging lasts for 10min, after the hot purging is finished, the first three-way valve 601 is controlled to be closed, and the channels 3 and 4 of all the first sampling valves 106 are controlled to be conducted, and controlling the conduction of the first end and the second end of the second three-way valve 602, so that the compressed dry air CDA in the second purging part 302 flows through the second three-way valve 602, the common pipe 500, the first sampling outer pipe 102 and the first sampling inner pipe 101 to enter each first sampling point, thereby purging the residual sampling gas in the first sampling passage 100 into the environment to be tested, and setting the purging time to be 15 min.
When the purging of the first sampling passage 100 is completed, the sampling of the second sampling passage 200 is correspondingly completed, at this time, the passage 2 and the passage 3 of the first sampling valve 106 corresponding to CH3 are controlled to be communicated, the passages 1 and the passages 2 of the other first sampling valves 106 are controlled to be communicated, the first end and the second end of the third three-way valve 603 are controlled to be communicated, so that the gas sampled by CH3 enters analyzer 400 for analysis, the first end and the third end of first three-way valve 601 are controlled to be conducted, all the channels 1 and 2 of second sampling valve 206 are controlled to be conducted, so that the first purging part 301 performs hot purging on the second sampling passage 200 in the direction of entering the first buffer tank 105 through the first three-way valve 601, the second sampling inner tube 201, the second valve 203 and the second sampling pump 204, thereby purging the sample gas of the second sampling path 200 out of the environment to be tested through the first buffer tank 105; after the hot purging is performed for 10min, the first three-way valve 601 is controlled to be closed, the passages 3 and the passages 4 of all the second sampling valves 206 are controlled to be communicated, and the first end and the third end of the second three-way valve 602 are controlled to be communicated, so that the compressed dry air CDA in the second purging part 302 flows through the second three-way valve 602, the common pipe 500, the second sampling outer pipe 202 and the second sampling inner pipe 201 and enters each second sampling point, the residual sampling gas in the second sampling passage 200 is purged into the environment to be tested, and the purging time is set to be 15 min.
The following monitoring process is similar to the above process, and the sampling of all the sampling points is completed, which is not described herein again.
The gas molecular pollutant monitoring device provided by the embodiment of the disclosure alternately samples and sweeps the first sampling passage 100 and the second sampling passage 200, and the sampling process and the sweeping process are synchronous in time, so that the monitoring efficiency of the gas molecular pollutant can be improved; and when in purging, hot nitrogen is firstly used for hot purging, and then compressed dry air CDA is used for purging again, so that the monitoring precision can be improved.
Based on the same disclosure concept, the embodiment of the present disclosure further provides a method for monitoring a gas molecular pollutant, and the implementation of the method can refer to the implementation of the above apparatus, and repeated details are not repeated.
As shown in fig. 6, a method for monitoring a gaseous molecular pollutant provided by an embodiment of the present disclosure is applied to any one of the above monitoring apparatuses for analyzing a pollutant, and the method includes:
s601, alternately sampling gas in the environment to be detected through the first sampling passage 100 and the second sampling passage 200; and purging one of the first sampling passage 100 and the second sampling passage 200 while the other is being sampled by the purge assembly 300;
s602, performing gas molecular contaminant analysis on the gas collected by the first sampling path 100 and the second sampling path 200 through at least one analyzer 400.
Optionally, the first sampling path 100 includes at least one first sampling point; the second sampling path 200 includes at least one second sampling point, and alternately samples with any one of the first sampling points and any one of the second sampling points, and includes the following processes:
opening any one first sampling point for sampling, collecting sampling gas of the first sampling point for gas molecular pollutant analysis, and closing the first sampling point after sampling is finished;
the following processes are executed in a loop:
opening any one second sampling point for sampling, collecting the sampling gas of the second sampling point for gas molecular pollutant analysis, simultaneously purging the first sampling passage 100, and closing the second sampling point after sampling is finished;
and opening any one first sampling point for sampling, collecting the sampling gas of the first sampling point for gas molecular pollutant analysis, simultaneously purging the second sampling passage 200, and closing the first sampling point after sampling is finished.
Optionally, in the process of opening any one of the second sampling points for sampling, collecting the sampling gas at the second sampling point for gas molecular pollutant analysis, and purging the first sampling passage 100 at the same time, the method includes:
the first sampling passage 100 is thermally purged in a direction outside the environment to be measured, and the first sampling passage 100 is purged in a direction inside the environment to be measured.
Optionally, in the process of opening any one of the first sampling points for sampling, collecting the sampling gas at the first sampling point for gas molecular pollutant analysis, and purging the second sampling passage 200 at the same time, the method includes:
the second sampling passage 200 is thermally purged in a direction outside the environment to be measured, and the second sampling passage 200 is purged in a direction inside the environment to be measured.
The embodiment of the disclosure provides a monitoring device and a monitoring method for gas molecule pollutants, the monitoring device comprises a first sampling passage 100 and a second sampling passage 200, the first sampling passage 100 and the second sampling passage 200 which are arranged in parallel are arranged to alternately sample, a purging component 300 is arranged to communicate the first sampling passage 100 and the second sampling passage 200, either one of the first sampling passage 100 and the second sampling passage 200 purges the other one when sampling, so that the first sampling passage 100 and the second sampling passage 200 are alternately purged, because the two sampling passages alternately sample and purge, no delay exists between the adjacent two sampling and purging, the sampling and purging are alternately performed, meanwhile, the idle sampling passage can be purged, the mutual crosstalk between sampling points of the sampling passages is prevented, and the influence of the detection result of the previous sampling point on the next sampling point is avoided, therefore, the monitoring efficiency and the monitoring precision of the gas molecular pollutants can be improved.
As will be appreciated by one skilled in the art, embodiments of the present application may be provided as a method, system, or computer program product. Accordingly, the present application may take the form of an entirely hardware embodiment, an entirely software embodiment or an embodiment combining software and hardware aspects. Furthermore, the present application may take the form of a computer program product embodied on one or more computer-usable storage media (including, but not limited to, disk storage, CD-ROM, optical storage, and the like) having computer-usable program code embodied therein.
The present application is described with reference to flowchart illustrations and/or block diagrams of methods, apparatus (systems), and computer program products according to the application. It will be understood that each flow and/or block of the flow diagrams and/or block diagrams, and combinations of flows and/or blocks in the flow diagrams and/or block diagrams, can be implemented by computer program instructions. These computer program instructions may be provided to a processor of a general purpose computer, special purpose computer, embedded processor, or other programmable data processing apparatus to produce a machine, such that the instructions, which execute via the processor of the computer or other programmable data processing apparatus, create means for implementing the functions specified in the flowchart flow or flows and/or block diagram block or blocks.
These computer program instructions may also be stored in a computer-readable memory that can direct a computer or other programmable data processing apparatus to function in a particular manner, such that the instructions stored in the computer-readable memory produce an article of manufacture including instruction means which implement the function specified in the flowchart flow or flows and/or block diagram block or blocks.
These computer program instructions may also be loaded onto a computer or other programmable data processing apparatus to cause a series of operational steps to be performed on the computer or other programmable apparatus to produce a computer implemented process such that the instructions which execute on the computer or other programmable apparatus provide steps for implementing the functions specified in the flowchart flow or flows and/or block diagram block or blocks.
It will be apparent to those skilled in the art that various changes and modifications may be made in the present application without departing from the spirit and scope of the application. Thus, if such modifications and variations of the present application fall within the scope of the claims of the present application and their equivalents, the present application is intended to include such modifications and variations as well.
Claims (15)
1. A device for monitoring gaseous molecular contaminants, comprising:
a first sampling path;
the second sampling passage is arranged in parallel with the first sampling passage, and the first sampling passage and the second sampling passage are used for alternately sampling gas in an environment to be tested;
the purging component is used for purging one of the first sampling passage and the second sampling passage when sampling is performed on the other one of the first sampling passage and the second sampling passage;
at least one analyzer connected to the first sampling path and the second sampling path for analyzing the gas molecular contaminants collected by the first sampling path and the second sampling path;
and the control unit is in communication connection with the analyzer.
2. The monitoring device of claim 1, wherein the first sampling path includes at least one first sampling point and the second sampling path includes at least one second sampling point;
the first sampling passage and the second sampling passage are specifically configured to alternately sample the gas through any one of the first sampling points and any one of the second sampling points.
3. The monitoring device according to claim 2, wherein the first sampling passage further comprises a first sampling inner tube, at least one first sampling outer tube, a first valve, a first sampling pump and a first buffer tank, wherein the first sampling inner tube is provided with the same number of first sampling valves as the first sampling points, and each first sampling valve is connected with each first sampling outer tube;
one end of the first sampling outer pipe is a free end and is formed into a first sampling point, the other end of the first sampling outer pipe is connected with the purging assembly, and the first sampling point is communicated with the first sampling inner pipe through the first sampling valve;
one end of the first sampling inner pipe is connected with the purging assembly, and the other end of the first sampling inner pipe is connected with the at least one analyzer through the first valve, the first sampling pump and the first buffer tank;
the control unit is in communication connection with the first valve, the first sampling pump and each first sampling valve.
4. The monitoring device according to claim 3, wherein the second sampling passage further comprises a second sampling inner tube, at least one second sampling outer tube, a second valve, a second sampling pump and a second buffer tank, wherein the second sampling inner tube is provided with a number of second sampling valves equal to the number of the second sampling points, and each second sampling valve is connected with each second sampling outer tube;
one end of the second sampling outer pipe is a free end and is formed into a second sampling point, the other end of the second sampling outer pipe is connected with the purging component, and the second sampling point is communicated with the second sampling inner pipe through the second sampling valve;
one end of the second sampling inner pipe is connected with the purging assembly, and the other end of the second sampling inner pipe is connected with the at least one analyzer through the second valve, the second sampling pump and the second buffer tank;
the control unit is in communication connection with the second valve, the second sampling pump and each second sampling valve.
5. The monitoring device according to any one of claims 1 to 4, wherein the purging assembly comprises a first purging portion, and the first purging portion is connected with the first sampling passage and the second sampling passage respectively and performs hot purging outside the environment to be tested through the first sampling passage and the second sampling passage respectively.
6. The monitoring device of claim 5, wherein the first purging portion comprises a nitrogen source, a purge pump, a third valve, an infrared flow guide plate and a temperature control sensor connected in sequence;
the first purging part is respectively connected with the first sampling passage and the second sampling passage through a first three-way valve, wherein a first end of the first three-way valve is connected with the temperature control sensor, a second end of the first three-way valve is connected with one end of the first sampling passage, and a third end of the first three-way valve is connected with one end of the second sampling passage;
the control unit is in communication connection with the purification pump, the third valve, the temperature control sensor and the first three-way valve.
7. The monitoring device of claim 5, wherein the purge assembly further comprises a second purge portion;
the second purging part is respectively connected with the first sampling passage and the second sampling passage and purges the environment to be tested through the first sampling passage and the second sampling passage.
8. The monitoring device of claim 7, wherein the second purge comprises a source of compressed dry air, wherein,
the compressed and dried air source is respectively connected with the first sampling passage and the second sampling passage through a second three-way valve, wherein a first end of the second three-way valve is connected with the compressed and dried air source, a second end of the second three-way valve is connected with one end of the first sampling passage, and a third end of the second three-way valve is connected with one end of the second sampling passage;
and the control unit is in communication connection with the second three-way valve.
9. The monitoring device of claim 1,
the analyzers are connected with the first sampling passage and the second sampling passage through third three-way valves, and the number of the analyzers is the same as that of the third three-way valves, wherein a first end of each third three-way valve is respectively connected with each analyzer, a second end of each third three-way valve is connected with the first sampling passage, and a third end of each third three-way valve is connected with the second sampling passage;
and the control unit is in communication connection with the third three-way valve.
10. The monitoring device of claim 1, wherein the at least one analyzer comprises: total volatile organic compound analyzer, sulfide analyzer and pH value analyzer.
11. The monitoring device of claim 1, wherein the at least one analyzer and the control unit are both located outside of the environment under test.
12. A method for monitoring a gaseous molecular contaminant, which is applied to the apparatus for monitoring a gaseous molecular contaminant according to any one of claims 1 to 11, the method comprising:
alternately sampling gas in the environment to be detected through the first sampling passage and the second sampling passage; and purging either one of the first sampling passage and the second sampling passage while sampling the other through a purging component;
performing gas molecular contaminant analysis on the gas collected by the first and second sampling paths by at least one analyzer.
13. The method of monitoring of claim 12, wherein the first sampling path includes at least one first sampling point; the second sampling path comprises at least one second sampling point, and sampling is carried out alternately by any one first sampling point and any one second sampling point, and the method comprises the following processes:
opening any one first sampling point for sampling, collecting sampling gas of the first sampling point for gas molecular pollutant analysis, and closing the first sampling point after sampling is finished;
the following processes are executed in a loop:
opening any one second sampling point for sampling, collecting the sampling gas of the second sampling point for gas molecular pollutant analysis, simultaneously purging the first sampling passage, and closing the second sampling point after sampling is finished;
opening any one first sampling point for sampling, collecting the sampling gas of the first sampling point for gas molecular pollutant analysis, simultaneously purging the second sampling passage, and closing the first sampling point after sampling is finished.
14. The method for monitoring as claimed in claim 13, wherein the process of opening any one of the second sampling points for sampling, collecting the sampling gas of the second sampling point for gas molecular contamination analysis, and simultaneously purging the first sampling passage comprises:
and carrying out hot purging on the first sampling passage towards the direction outside the environment to be tested, and carrying out purging on the first sampling passage towards the direction inside the environment to be tested.
15. The method for monitoring as claimed in claim 13, wherein the process of opening any one first sampling point for sampling, collecting the sampling gas of the first sampling point for gas molecular contamination analysis, and simultaneously purging the second sampling passage comprises:
and carrying out hot purging on the second sampling passage towards the direction outside the environment to be tested, and carrying out purging on the second sampling passage towards the direction inside the environment to be tested.
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